KR20100088931A - Water monitoring sensor - Google Patents

Abstract

PURPOSE: A water quality monitoring sensor is provided to simutenously or successively measure a plurality of characteristics such as chlorine concentration, pH concentration, and turbidity. CONSTITUTION: A water quality monitoring sensor(40) which measuring test items of a sample comprises: a first substrate(400); a second substrate formed on the first substrate; a sample fluid channel(420) which is formed on the second substrate and is connected with a sample inlet(402); a indicator fluid channel(430) which is formed on the second substrate and is connected to the indicator inlet(410); a mixture fluid channel(440) which is connected to the sample fluid channel and indicator fluid channel; a light source which provides light of predetermined wave length band; and a light sensor unit(460) which is formed on the first substrate and detects permeability of light source.

Description

Water monitoring sensor

The present invention relates to a water quality monitoring sensor, and more particularly, to form a fluid channel on a semiconductor substrate using MEMS technology, and to form a light sensing unit on the semiconductor substrate for detecting a spectral change or transmittance of light passing through the fluid channel. Thus, the present invention relates to a water quality monitoring sensor that can measure a plurality of items such as turbidity, chlorine concentration, pH value, and the like in real time.

Recently, various types of water quality analysis systems have been developed. The water quality analysis system is to effectively manage the drinking water source water quality standards, wastewater discharge allowance standards, discharged water quality standards, etc. of the water pollutant discharge workplaces, and will be equipped with a variety of measuring instruments and sensors. As such, the sensors used to analyze water quality include electrolytic sensors and optical sensors. Conventional electrolytic sensors or optical sensors are often difficult to measure in real time because only the sample is analyzed after sampling.

On the other hand, the electrolytic sensor is to be provided with a measuring electrode, since the measuring electrode is corroded with a long time use, there is a problem that not only hassle to replace the measuring electrode, but also increases the cost. In addition, the electrolytic sensor has the disadvantage of high power consumption and bulky. In addition, the conventional optical sensor increases the maintenance cost because of the high consumption of reagents for the measurement, and has the disadvantage of being bulky and expensive.

An object of the present invention for solving the above problems is to provide a water quality monitoring sensor that can monitor the water quality in real time while the manufacturing process is simple using MEMS technology.

Another object of the present invention is to provide a water quality monitoring sensor that can calculate the concentration of a test item by measuring the light transmittance or transmission spectrum of the sample mixed with the indicator.

It is still another object of the present invention to provide a water quality monitoring sensor capable of sequentially or simultaneously measuring a plurality of test items for a sample.

The water quality monitoring sensor according to the first aspect of the present invention for achieving the above-described technical problem is to measure the concentration of the test item contained in the sample, when the sample is mixed with the indicator, the transmittance changes in a specific wavelength band according to the concentration Regarding the water quality monitoring sensor for measuring the concentration of the test item having the characteristic that

A first substrate; A second substrate formed on the first substrate; A sample fluid channel formed on the second substrate and connected to the sample inlet; An indicator fluid channel formed on the second substrate and connected to the indicator inlet; A mixed fluid channel formed on the second substrate and connected to the sample fluid channel and the indicator fluid channel; A light source providing light of a preset wavelength band; A light sensing unit formed on the first substrate and configured to detect and output a transmittance of the light source with respect to the specific wavelength band in the mixed fluid channel, and pass the sample mixed with the indicator into the mixed fluid channel; The optical sensing unit detects a transmittance of the specific wavelength band of the sample passing through the mixed fluid channel, and calculates a concentration of the test item according to the detected transmittance.

In the water quality monitoring sensor according to the first aspect described above, it is preferable that the first substrate is made of a semiconductor substrate, and the second substrate is made of a transparent insulating material.

A water quality monitoring sensor according to the first aspect described above, wherein the light detecting unit comprises: a photo detector for measuring the intensity of light passing through the mixed fluid channel; And a filter that transmits only light of the specific wavelength band and is disposed between the photo detector and the light source. It is preferable that it consists of.

The water quality monitoring sensor according to the second aspect of the present invention measures the concentration of a test item included in a sample, and measures the concentration of a test item having a characteristic that the transmission spectrum changes according to the concentration when the sample is mixed with the indicator. As about water quality monitoring sensor to say,

A first substrate; A second substrate formed on the first substrate; A sample fluid channel formed on the second substrate and connected to the sample inlet; An indicator fluid channel formed on the second substrate and connected to the indicator inlet; A mixed fluid channel formed on the second substrate and connected to the sample fluid channel and the indicator fluid channel; A light source providing light of a preset wavelength band; And a light detector formed on the first substrate and detecting a transmission spectrum of the light source passing through the mixed fluid channel, and outputting a detected transmission spectrum. The concentration of the test item is detected according to the transmission spectrum for the mixed sample.

In the water quality monitoring sensor according to the above-described second feature, it is preferable that the first substrate is made of a semiconductor substrate, and the second substrate is made of a transparent insulating material.

In the water quality monitoring sensor according to the second aspect described above, The light detector comprises: a photo detector for measuring the intensity of light passing through the mixed fluid channel; And a tunable filter which can adjust a pass wavelength band and is disposed between the photo detector and the light source, and measures the intensity of light through the photo detector while sequentially changing the pass wavelength band of the tunable filter. And it is preferable to detect the transmission spectrum of the said test | inspection item using the intensity of the light measured in each pass wavelength band.

In the water quality monitoring sensor according to the second aspect, the light sensing unit comprises: a filter array in which a plurality of filters having different pass wavelength bands are arranged in a plurality of arrangements in a horizontal and vertical direction; And a plurality of photo detectors for measuring the intensity of light passing through the mixed fluid channel; The photo detectors are disposed to correspond to the respective filters of the filter array, and measure the intensity of transmitted light in each pass wavelength band through each photo detector, and use the intensity of light measured in each pass wavelength band. It is preferable to detect the transmission spectrum of the inspection item.

According to a third aspect of the present invention, there is provided a water quality monitoring sensor comprising: a first substrate made of a semiconductor material; A second substrate made of a transparent insulating material formed on the first substrate; A plurality of sensors formed on the first substrate;

The sensor may include a fluid channel for a sample formed on the second substrate and connected to a sample inlet; An indicator fluid channel formed on the second substrate and connected to the indicator inlet; A mixed fluid channel formed on the second substrate and connected to the sample fluid channel and the indicator fluid channel; A light source providing light of a preset wavelength band; A light detector formed on the first substrate and detecting a transmission spectrum or a transmittance of the light source passing through the mixed fluid channel; And,

The photo detector of the sensor, the photo detector for detecting the intensity of the light passing through the mixed fluid channel; And a filter disposed between the photo detector and the light source.

Each sensor detects the concentration of a corresponding test item according to a transmission spectrum or transmittance of a sample mixed with the indicator detected by each light sensing unit.

The water quality monitoring sensor according to the above features further comprises a temperature sensor formed on the surface of the second substrate, the temperature sensor is made of a metal having a characteristic that the electrical resistance value changes linearly in a specific temperature section.

The water quality monitoring sensor according to the present invention is manufactured by using MEMS technology on a semiconductor substrate, so that the structure thereof is simple, miniaturization can be achieved, and the portable sensor can be manufactured. In addition, the fabrication process is easy to facilitate mass production at low cost.

In addition, the water quality monitoring sensor according to the present invention can not only measure the characteristics of water quality in real time by integrating a signal processing circuit and a communication system on the first substrate made of a semiconductor substrate or additionally combining it externally. By providing a wireless communication module, remote real-time measurement is also possible.

In addition, the water quality monitoring sensor according to the present invention can measure the temperature, turbidity, chlorine concentration, pH value, etc. simultaneously or sequentially on a single chip.

Hereinafter, the structure and operation of a water quality monitoring sensor according to preferred embodiments of the present invention will be described with reference to the accompanying drawings.

First embodiment

Hereinafter, the structure and operation of the water quality monitoring sensor according to the first embodiment of the present invention will be described with reference to FIGS. 1 to 2. The water quality monitoring sensor according to the present embodiment measures the characteristics of a sample by using a fluid channel, and detects that the light transmittance in a specific wavelength band is changed in accordance with the concentration of the test item. It is characterized by measuring the concentration. 1 is a perspective view schematically showing the structure of a water quality monitoring sensor according to a first embodiment of the present invention, Figure 2 (a) and (b) is cut along the AA 'direction and BB' direction of FIG. It is sectional drawing shown.

1 and 2, the water quality monitoring sensor 10 according to the present embodiment includes a first substrate 100 and a second substrate formed on the first substrate in order to measure characteristics of a sample introduced from the outside. 101, sample inlet 102, indicator inlet 110, indicator reservoir 112, sample fluid channel 120, indicator fluid channel 130, mixed fluid channel 140, light source 150, light The sensing unit 160 is provided. The sample fluid channel, the indicator fluid channel, and the mixed fluid channel are formed in the second substrate. The water quality monitoring sensor 10 having the above-described configuration supplies the indicator for the inspection item to the indicator storage tank 112 and uses the electrical signal output from the light sensing unit 160 to determine the concentration of the inspection item of the sample. Will be measured. Hereinafter, the structure of the above-described components will be described in detail. The first embodiment exemplarily describes a water quality monitoring sensor for measuring chlorine concentration for convenience of description, but does not limit the inspection item of the water quality monitoring sensor according to the present invention to chlorine, and adjusts the pass wavelength band of the indicator and the filter. By doing so, other inspection items may be measured.

Since the first substrate 100 may require integration of a signal processing circuit or a signal amplifier circuit later, if necessary, the first substrate 100 is preferably made of a semiconductor substrate such as silicon. The second substrate 101 is a substrate on which a sample fluid channel, an indicator fluid channel, and a mixed fluid channel are formed, and is preferably made of an insulating material having transparency to a wavelength band of a light source to be used. In particular, the second substrate on which the sample fluid channel, the indicator fluid channel, and the mixed fluid channel are formed may be formed using a transparent polymer material such as PDMS, and may be formed by processing transparent materials such as glass and acrylic. 1 may be combined with the substrate 100 to form a channel.

The sample inlet 102 is an inlet through which the sample to be measured is introduced from the outside. The sample inlet 102 is connected to the sample fluid channel 120 and the sample introduced into the sample inlet is provided to the sample fluid channel 120.

The indicator reservoir 112 stores an indicator in response to a characteristic to be measured of the sample, and the outlet of the indicator reservoir 112 is connected to the indicator inlet 110. In particular, when measuring the chlorine concentration of water, which is a sample, DPD (diethyl-p-phenylenediamine) having a characteristic that the degree of change in pink varies according to the chlorine concentration in the sample may be used as an indicator. When the indicator and water are mixed, the pink concentration is changed according to the concentration of chlorine contained in the sample water, and thus the light transmittance is changed.

The indicator reservoir may be manufactured integrally with the water quality monitoring sensor or may be manufactured separately from the water quality monitoring sensor and connected to the indicator inlet. It is preferable to further include a valve at the outlet of the indicator reservoir so that the flow rate and the outflow time of the indicator can be controlled by an external water quality measurement system connected to the water quality monitoring sensor.

The indicator inlet 110 is an inlet connected to the outlet of the indicator reservoir 112 and provided with the indicator, and is connected to the indicator fluid channel to provide the indicator provided from the indicator reservoir to the indicator fluid channel.

The sample fluid channel 120 is a microchannel formed between the sample inlet 112 and the mixed fluid channel 140, and provides a sample introduced from the sample inlet to the mixed fluid channel.

The indicator fluid channel 130 is a microchannel formed between the indicator inlet 110 and the mixed fluid channel 140, and provides an indicator flowing from the indicator inlet to the mixed fluid channel.

The mixed fluid channel 140 is connected to the sample fluid channel 120 and the indicator fluid channel 130, and the sample of the sample fluid channel and the indicator of the indicator fluid channel are introduced into and mixed together. Then react with each other. The outlet of the mixed fluid channel 140 functions as an outlet for discharging the sample mixture to the outside of the water quality monitoring sensor.

The light source 150 provides light in a predetermined wavelength band such as visible light, and the light source is formed at a position capable of providing light to the mixed fluid channel and at a position facing the light sensing unit. It is preferable to be.

The light detector 160 includes a photo detector and a filter, detects a transmittance of a specific wavelength band of the sample passing through the mixed fluid channel, and calculates a concentration of the test item according to the detected transmittance. At this time, the sample passing through the mixed fluid channel is a sample mixed with the indicator, the transmittance of the sample is changed according to the concentration of the test item.

 The filter is a filter that transmits only light of a specific wavelength band, and the wavelength band transmitted by the filter is determined according to the transmission wavelength band of the sample mixed with the indicator added to measure the concentration of the test item. The filter may be disposed in front of the light source or disposed in front of the photo detector of the light sensing unit to transmit only light having a specific wavelength band to the photo detector.

The photo detector is formed on a first substrate at a position opposite to the light source, and disposed at a position capable of receiving light of the light source passing through the mixed fluid channel. The photo detector receives light of a specific wavelength band passing through the mixed fluid channel, converts the intensity of the received light into an electrical signal, and outputs the light. The photo detector according to the present invention is preferably fabricated on a first substrate using a semiconductor manufacturing process.

Meanwhile, the water quality monitoring sensor according to the first embodiment of the present invention preferably further includes a temperature sensor on the substrate. The water quality monitoring sensor uses the temperature measured by the temperature sensor to calibrate the measurement data of other test items to obtain more accurate measurement data. The temperature sensor may be formed by depositing a metal on the surface of the water quality monitoring sensor in the form of a thin film and then patterning the metal. As the metal used as the temperature sensor, a resistance thermometer (Resistance Thermometer Device), Ni, Pt, etc. having a linear ratio of temperature to resistance characteristics and excellent sensitivity may be used.

The water quality monitoring sensor according to the present invention preferably further comprises a control unit, a data storage unit and a communication interface unit. The control unit is electrically connected to an output terminal of the light sensing unit, receives an electrical signal output from the light sensing unit, processes the signal, and transmits the signal to an external water quality measurement system through the communication interface unit, or to the data storage unit. After storage, it can be sent on demand to an external water quality measurement system. The communication interface unit may include both a wired communication module and a wireless communication module or optionally include one of them.

Hereinafter, the operation and driving principle of the water quality monitoring sensor having the above-described configuration will be described. If the sample is water, the extent to which pure water passes light and the extent to which pure water passes light are different. Transmittance (I) of light decreases exponentially depending on the thickness of the medium through which light passes and the nature of the medium having a specific absorption coefficient, as shown in Equation (1).

3 is a conceptual diagram exemplarily illustrated to explain light transmittance. As shown in FIG. 3, the light transmittance I for pure water is reduced as shown in (a), while the transmittance I for non-pure water as in (b) is significantly reduced. Using this property, the light sensor measures the light transmittance to measure the degree of change in the state of water. As described above, when the turbidity of the water, which is a sample, is to be measured, the turbidity of the water is measured by using a property in which light transmittance varies according to the turbidity of water.

On the other hand, when measuring the chlorine concentration of water, which is a sample, DPD (diethyl-p-phenylenediamine) having a characteristic that the degree of change in pink varies according to the chlorine concentration in the sample can be used as an indicator. When the indicator and water are mixed, the concentration of pink is changed according to the concentration of chlorine contained in the sample water, and thus the light transmittance is changed. The light sensing unit of the water quality monitoring sensor measures the intensity of light passing through the sample, detects light transmittance of the sample using the light, and calculates chlorine concentration contained in the sample using the detected light transmittance.

In addition, various characteristics of the sample can be measured by changing the type of indicator. For example, water quality test items such as chromaticity, organic matter, ammonia, nitrite, iron, calcium, carbonate, nitrate, sulfate, hydrogen sulfide, and ammonia nitrogen can also be measured using indicators that can test the item.

Second embodiment

Hereinafter, the structure and operation of the water quality monitoring sensor according to the second embodiment of the present invention will be described. The water quality monitoring sensor according to the present embodiment measures the concentration by using a property in which the sample mixed with the indicator changes color by the concentration of the test item and changes the transmission spectrum, and transmits light in the transmission spectrum for the sample mixed with the indicator. Detecting a wavelength band to measure the concentration of the test item according to the detected wavelength band. The water quality monitoring sensor according to the second embodiment of the present invention includes a first substrate, a second substrate, a sample inlet, an indicator inlet, an indicator reservoir, a sample fluid channel, an indicator fluid channel, a mixed fluid channel, a light source, and a light sensing unit. do. Since the components of the water quality monitoring sensor according to the second embodiment except for the light sensing unit and the filter are the same as those of the water quality monitoring sensor according to the first embodiment, the overlapping description will be omitted and only the differences will be described.

The light detector includes a filter and a photo detector to detect a transmission spectrum of the sample passing through the mixed fluid channel, and calculate a concentration of the test item according to the detected transmission spectrum. At this time, the sample passing through the mixed fluid channel is a sample mixed with the indicator, the transmission spectrum is changed according to the concentration of the test item.

The filter may be configured as a filter array in which filters having different pass wavelength bands are sequentially arranged, or as a tunable filter that may adjust a pass wavelength band, between the light source and the light sensing unit. Can be placed in.

The photo detector is formed on a first substrate at a position opposite to the light source, and is formed at a position capable of receiving light of the light source passing through the mixed fluid channel. If the filter is implemented as a filter array, a plurality of photo detectors must be provided to correspond to each filter constituting the filter array, and each photo detector detects and outputs the intensity of light passing through the corresponding filter. do. If the filter is implemented as a tunable filter, the light detector comprises a single photo detector, and the photo detector sequentially detects the intensity of light transmitted in each operating wavelength band of the tunable filter that is sequentially adjusted. Will print. In this case, the light detector should be operated in conjunction with the tunable filter.

4 is a chart showing the discoloration range of the sample mixed with the indicator according to the pH of the indicator and the sample for measuring the pH. 4, since the transmission spectrum of the sample mixed with the indicator is changed according to the pH, by using the indicator to change the color of the sample according to the pH, by measuring the wavelength band of light transmitted according to the pH of the sample Can be detected. In the water quality monitoring sensor according to the second embodiment of the present invention using such a property, when the pH of the sample is to be measured, the pH is changed according to the color which is changed after mixing an indicator, which is a pH reagent that changes color according to the pH. Will be measured. In other words, when the sample of water and the indicator are mixed, the color changes according to the pH of the sample. As a result, the water quality monitoring sensor measures the transmission spectrum through which the light of each wavelength band passing through the tunable filter passes through the sample mixed with the indicator, and adjusts the pH value according to each wavelength band through which the light is transmitted in the transmission spectrum. Will be detected.

Third embodiment

Hereinafter, with reference to the accompanying drawings will be described the structure and operation of the water quality monitoring sensor according to a third embodiment of the present invention. The water quality monitoring sensor according to the third embodiment is characterized in that a plurality of characteristics can be sequentially measured for a sample.

5 is a plan view schematically illustrating a water quality monitoring sensor according to a third embodiment of the present invention. Referring to FIG. 5, the water quality monitoring sensor 40 according to the present embodiment includes a first substrate 400, a second substrate 401, and a plurality of sensors formed on the first substrate and the second substrate. The sensors include a sample inlet 402, an indicator inlet 410, an indicator reservoir 412, a sample fluid channel 420, an indicator fluid channel 430, a mixed fluid channel 440, a light source (not shown). And a light sensing unit 460. The water quality monitoring sensor has a single mixed fluid channel 440 as a whole, and the single mixed fluid channel is used by a plurality of sensors. However, FIG. 5 exemplarily illustrates three items of turbidity, chlorine, and pH and a water quality monitoring sensor capable of measuring temperature in order to facilitate explanation. The water quality monitoring sensor 40 having the above-described configuration supplies the indicators according to the characteristics of the sample to be measured to the indicator reservoir 412 of each sensor, and uses the electrical signal output from the light sensing unit 460 of each sensor. This is to measure a plurality of properties of the sample sequentially. The water quality monitoring sensor according to the present embodiment can sequentially measure a plurality of measurement items by sequentially driving each sensor. The water quality monitoring sensor sequentially turns on the indicator input ports of the sensors, and sequentially measures and outputs a received signal of the light sensing unit 460 of the sensors in conjunction with the sequential opening and closing of the indicator input ports. Therefore, the water quality monitoring sensor sequentially measures a plurality of characteristics of the sample. Hereinafter, components of the water quality monitoring sensor according to the third embodiment will be described. However, descriptions overlapping with the components of the first and second embodiments will be omitted. Structures of the sample inlet and the fluid channel for the sample are the same as those of the first and second embodiments, and thus redundant description is omitted.

The light sensing unit of each sensor consists of a photo detector and a filter. The filter may include any one of a filter transmitting light of a specific wavelength band, an array of filters arranged in an array of filters transmitting light of different wavelength bands, and a tunable filter adjusting transmission wavelength bands according to characteristics of an inspection item. It can be composed of one. For example, when a test item has a transmittance in a specific wavelength band depending on the concentration, such as chlorine, a filter that transmits light of the wavelength band is disposed, and when the test item varies in transmission spectrum according to a pH value such as pH, A filter array or tunable filter can be arranged.

The sample fluid channel and indicator fluid channel of each sensor are connected to the mixed fluid channel.

The light detector 460 of each sensor selectively selects one of a turbidity light detector 461 for detecting turbidity, a chlorine light detector 462 for detecting chlorine concentration, and a pH light detector 463 for detecting pH. It is equipped with. The turbidity light detector 461 and the chlorine light detector 462 respectively arrange filters for transmitting light of a specific wavelength band, and the pH light detector 463 preferably includes a tunable filter or a filter array. . The light sensing unit detects the concentration of the inspection item by measuring the degree of transmittance in a specific wavelength band according to each inspection item or by measuring the transmission spectrum of the inspection item.

Meanwhile, the water quality monitoring sensor according to the third embodiment further includes a separate temperature sensor, and more accurate measurement by calibrating the measurement data of the inspection item measured through the light sensing unit using the temperature data measured by the temperature sensor. Make sure you get the data.

The water quality monitoring sensor according to the third embodiment having the above-described configuration can be used to monitor the water quality of the water tank or the reservoir. 6 is a configuration diagram exemplarily illustrating a state in which a water quality monitoring sensor according to a third embodiment of the present invention is applied. Referring to FIG. 6, the water quality monitoring sensor 40 capable of sequentially measuring three water quality items, turbidity, chlorine, pH, and temperature, is installed in a drain pipe of the water tank 42, and then output from the water quality monitoring sensor. The electrical signal is transmitted to the water quality measurement system 46 and finally measured for various items for the sample water.

Fourth embodiment

Hereinafter, with reference to the accompanying drawings will be described the structure and operation of the water quality monitoring sensor according to a fourth embodiment of the present invention. The water quality monitoring sensor according to the fourth embodiment is characterized in that a plurality of characteristics can be simultaneously measured for a sample.

7 is a plan view schematically illustrating a water quality monitoring sensor according to a fourth embodiment of the present invention. Referring to FIG. 7, the water quality monitoring sensor 50 according to the present exemplary embodiment includes a first substrate 500, a second substrate 501, and a plurality of sensors formed on the first substrate and the second substrate. Each sensor includes a sample inlet 502, an indicator inlet 510, an indicator reservoir 512, a sample fluid channel 520, an indicator fluid channel 530, a mixed fluid channel 540, a light source (not shown). And a light sensing unit 560. The water quality monitoring sensor 50 having the above-described configuration supplies the indicators according to the characteristics of the sample to be measured to the indicator storage tank 512 of each sensor, and outputs electrical signals output from the light sensing units 560 of each sensor. To measure multiple properties of a sample simultaneously. In addition, the water quality monitoring sensor according to the present embodiment by simultaneously turning on the indicator input ports of all the sensors, and simultaneously measuring and outputting the received signals of the light sensing unit 460 of each sensor, the water quality monitoring sensor is a plurality of Sensors can be used to measure multiple properties of a sample simultaneously. Hereinafter, components of the water quality monitoring sensor according to the fourth embodiment will be described. However, descriptions overlapping with the components of the first and second embodiments will be omitted. The structures of the sample inlet and the fluid channel for the sample are the same as those of the first embodiment, and thus redundant descriptions are omitted.

The mixed fluid channel of each sensor is connected with the indicator fluid channel and the sample fluid channel so that the sample mixed with the indicator flows into the mixed fluid channel. The light sensing unit of each sensor is disposed to correspond to the mixed fluid channel to measure the transmittance or the transmission spectrum of the mixed fluid channel. The light detector and the filter disposed to correspond to the mixed fluid channel of each sensor are configured differently according to the inspection item. In the case of measuring the transmittance in a specific wavelength band such as turbidity or chlorine concentration, the filter includes a filter that transmits light in a specific wavelength band according to the inspection item.In the case of measuring the transmission spectrum such as pH, the filter is a tunable filter or It is desirable to have a filter array.

Therefore, each sensor of the water quality monitoring sensor according to the present embodiment has an output terminal connected to the light sensing unit, so that the water quality monitoring sensor can simultaneously output a plurality of measurement signals to the outside through a plurality of output terminals.

8 shows another embodiment of the fourth example, wherein each sensor of the water quality monitoring sensor has a fluid channel for a sample separated from each other. In this way, each sensor constituting the water quality monitoring sensor is completely separated, it is possible to accurately measure a plurality of inspection items at the same time.

Although the present invention has been described above with reference to preferred embodiments thereof, it is merely an example and is not intended to limit the present invention, and those skilled in the art do not depart from the essential characteristics of the present invention. It will be appreciated that various modifications and applications which are not illustrated above in the scope are possible. And differences relating to such modifications and applications should be construed as being included in the scope of the invention as defined in the appended claims.

The water quality monitoring sensor according to the present invention can measure a plurality of inspection items such as chlorine concentration, turbidity, pH, temperature, etc. necessary for water quality inspection of a reservoir, a water tank, and the like in real time.

1 is a perspective view schematically showing the structure of a water quality monitoring sensor according to a first embodiment of the present invention, Figure 2 (a) and (b) is cut along the AA 'direction and BB' direction of FIG. It is sectional drawing shown.

3 is a conceptual diagram exemplarily illustrated to explain the transmittance of light.

4 is a chart showing the discoloration range of the sample mixed with the indicator according to the pH of the indicator and the sample for measuring the pH.

5 is a plan view schematically illustrating a water quality monitoring sensor according to a third embodiment of the present invention.

6 is a configuration diagram exemplarily illustrating a state in which a water quality monitoring sensor according to a third embodiment of the present invention is applied.

7 is a plan view schematically illustrating a water quality monitoring sensor according to a fourth embodiment of the present invention.

8 is a plan view schematically showing another embodiment of the water quality monitoring sensor according to the fourth embodiment of the present invention.

<Explanation of symbols for the main parts of the drawings>

10, 40, 50, 60: water quality monitoring sensor

100, 400, 500, 600: substrate

102, 402, 502, 602: sample inlet

110, 410, 510, 610: indicator input hole

112, 412, 512, 612: indicator reservoir

120, 420, 520, 620: sample fluid channel

130, 430, 530, 630: fluid channel for indicator

140, 440, 540, 640: mixed fluid channels

150: light source

160, 460, 560, 660: light detector

Claims (12)

In measuring the concentration of the test item contained in the sample, the water quality monitoring sensor for measuring the concentration of the test item having a characteristic that the transmittance in a specific wavelength band according to the concentration when the sample is mixed with the indicator, A first substrate; A second substrate formed on the first substrate; A sample fluid channel formed on the second substrate and connected to the sample inlet; An indicator fluid channel formed on the second substrate and connected to the indicator inlet; A mixed fluid channel formed on the second substrate and connected to the sample fluid channel and the indicator fluid channel; A light source providing light of a preset wavelength band; A light detector formed on the first substrate and configured to detect and output a transmittance of the light source with respect to the specific wavelength band in the mixed fluid channel; Pass the sample mixed with the indicator to the mixed fluid channel, the light sensing unit detects the transmittance of the specific wavelength band of the sample passing through the mixed fluid channel, and the inspection according to the detected transmittance The water quality monitoring sensor, which calculates the concentration of the item. The water quality monitoring sensor of claim 1, wherein the water quality monitoring sensor includes a plurality of indicator fluid channels, and a plurality of light sensing units, each indicator fluid channel is connected between the corresponding mixed fluid channels, and each light sensing unit is mixed. A water quality monitoring sensor disposed along a fluid channel to measure the concentration of a plurality of test items for the sample. The water quality monitoring sensor according to claim 1, wherein the indicator input port is connected to an indicator reservoir storing an indicator for inspecting a test item. The water quality monitoring sensor according to claim 1, wherein the first substrate is made of a semiconductor substrate, and the second substrate is made of a transparent insulating material. The method of claim 1, wherein the light detecting unit, A photo detector for measuring the intensity of light passing through the mixed fluid channel; And A filter that transmits only light of the specific wavelength band and is disposed between the photo detector and the light source; Water quality monitoring sensor, characterized in that consisting of. In measuring the concentration of the test item contained in the sample, the water quality monitoring sensor for measuring the concentration of the test item having a characteristic that the transmission spectrum is changed according to the concentration of the sample mixed with the indicator, A first substrate; A second substrate formed on the first substrate; A sample fluid channel formed on the second substrate and connected to the sample inlet; An indicator fluid channel formed on the second substrate and connected to the indicator inlet; A mixed fluid channel formed on the second substrate and connected to the sample fluid channel and the indicator fluid channel; A light source providing light of a preset wavelength band; A light sensing unit formed on the first substrate and detecting a transmission spectrum of the light source passing through the mixed fluid channel and outputting the detected transmission spectrum; And a concentration of a test item according to a transmission spectrum of a sample mixed with the indicator detected by the light sensing unit. The water quality monitoring sensor according to claim 6, wherein the first substrate is made of a semiconductor substrate, and the second substrate is made of a transparent insulating material. The method of claim 6, wherein the light detecting unit, A photo detector for measuring the intensity of light passing through the mixed fluid channel; And A tunable filter capable of adjusting a pass wavelength band and disposed between the photo detector and the light source; And, The intensity of the light is measured through the photo detector while sequentially changing the pass wavelength band of the tunable filter, and the transmission spectrum of the corresponding inspection item is detected using the intensity of light measured at each pass wavelength band. Monitoring sensor. The method of claim 6, wherein the light detecting unit, A filter array in which filters having different pass wavelength bands are arranged in an array; And A plurality of photo detectors for measuring the intensity of light passing through the mixed fluid channel; And, The photo detectors are arranged to correspond to the respective filters of the filter array, and measure the intensity of transmitted light in each pass wavelength band through each photo detector, and use the corresponding test item using the intensity of light measured in each pass wavelength band. Water quality monitoring sensor, characterized in that for detecting the transmission spectrum of. A first substrate made of a semiconductor material; A second substrate made of a transparent insulating material formed on the first substrate; And a plurality of sensors formed on the first substrate and the second substrate, The sensor A sample fluid channel formed on the second substrate and connected to the sample inlet; An indicator fluid channel formed on the second substrate and connected to the indicator inlet; A mixed fluid channel formed on the second substrate and connected to the sample fluid channel and the indicator fluid channel; A light source providing light of a preset wavelength band; A light detector formed on the first substrate and detecting a transmission spectrum or a transmittance of the light source passing through the mixed fluid channel; And, The light detector of the sensor, A photo detector for detecting the intensity of light passing through the mixed fluid channel; And And a filter disposed between the photo detector and the light source. Each sensor detects the concentration of a corresponding test item according to a transmission spectrum or transmittance of a sample mixed with the indicator detected by each light sensing unit. The water quality monitoring sensor of claim 10, wherein the water quality monitoring sensor has a single mixed fluid channel, and each sensor of the water quality monitoring sensor uses the mixed fluid channel jointly. And said water quality monitoring sensor drives said sensors sequentially. The water quality monitoring sensor of claim 1, further comprising a temperature sensor formed on a surface of the second substrate, wherein the temperature sensor has a characteristic in which an electrical resistance value is linearly changed in a specific temperature section. Water quality monitoring sensor, characterized in that consisting of a metal having.

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