KR20100071600A - Chemical solution storage apparatus - Google Patents

Chemical solution storage apparatus Download PDF

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Publication number
KR20100071600A
KR20100071600A KR1020080130377A KR20080130377A KR20100071600A KR 20100071600 A KR20100071600 A KR 20100071600A KR 1020080130377 A KR1020080130377 A KR 1020080130377A KR 20080130377 A KR20080130377 A KR 20080130377A KR 20100071600 A KR20100071600 A KR 20100071600A
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KR
South Korea
Prior art keywords
chemical liquid
float
level
liquid storage
chemical
Prior art date
Application number
KR1020080130377A
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Korean (ko)
Inventor
최기용
Original Assignee
세메스 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 세메스 주식회사 filed Critical 세메스 주식회사
Priority to KR1020080130377A priority Critical patent/KR20100071600A/en
Publication of KR20100071600A publication Critical patent/KR20100071600A/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Level Indicators Using A Float (AREA)

Abstract

The present invention relates to a chemical liquid storage device, comprising a single float sensor in a chemical liquid storage device such that the single float sensor has a plurality of contact members corresponding to respective level points in the chemical liquid storage tank. The present invention relates to a chemical liquid storage device capable of sensing the level of the chemical liquid storage device through a signal according to the operation.

The chemical liquid storage device according to the preferred embodiment of the present invention includes a plurality of contact members provided in the chemical liquid storage tank filled with the chemical liquid and corresponding to level points for sensing the level of the chemical liquid stored in the chemical liquid storage tank. Has a single float sensor with

Description

Chemical solution storage apparatus

The present invention relates to a chemical liquid storage device, and more particularly, a single float sensor is provided in the chemical liquid storage device so that the single float sensor has a plurality of contact members corresponding to respective level points in the chemical liquid storage tank. It relates to a chemical liquid storage device that can detect the level of the chemical liquid storage device through a signal according to the operation of the contact member.

In general, a float sensor (or level sensor) is a sensor installed inside a chemical storage device such as a chemical tank in which a chemical liquid for processing a substrate, such as a flat glass substrate, used in the manufacture of a liquid crystal display, is stored. .

1 is a cross-sectional view showing a conventional chemical liquid storage device.

As shown in FIG. 1, the conventional chemical liquid storage device 10 includes a storage tank 11 in which the chemical liquid 12 is stored, and detects the level of the chemical liquid 12 in the storage tank 11. A plurality of float sensors 20-80 are provided. Here, the plurality of float sensors 20-80 are for detecting the dangerous level, the minimum level, the replenishment level, the standard level, and the highest level of the chemical liquid 12 in the storage tank 11, respectively. The sensors 20-80 are arranged above and below the float 24, the guide 21 for guiding the lifting movement of the float 24, and the float 24, respectively, according to the water level change of the chemical liquid 12. And an upper contact portion 22 and a lower contact portion 23 contacting the float 24 as the float 24 moves up and down.

However, the conventional chemical liquid storage device 10 having the float sensor as described above, according to the installation of each of the plurality of float sensors 20-80 for detecting the level of the chemical liquid 12 in the storage tank 11 Hole processing and fastening nut, installation labor, signal wiring labor, etc. of the storage tank 11 has to be formed a lot of problems, the installation work is very difficult, and also because the cost of the sensor is expensive, a problem that is expensive There is this.

In addition, according to the installation of the plurality of sensors there is a problem that the float lifting operation is interfered with the cooling water pipe provided in the storage tank 11, such that the sensors malfunction.

The present invention has been made in view of the above problems, and has a single float sensor having a plurality of contact members corresponding to the level points for detecting the level of the chemical liquid in the chemical storage tank to enable a simple installation and cost It is to provide a chemical storage device that can save.

In addition, the present invention provides a chemical liquid storage device that is provided with a single float sensor in the chemical liquid storage tank so that the lifting operation of the floats does not interfere with the cooling water pipe provided in the chemical liquid storage tank. It is.

Meanwhile, the object of the present invention is not limited to the above-mentioned objects, and other objects not mentioned can be clearly understood by those skilled in the art from the following description.

In order to achieve the above object, a chemical liquid storage device according to a preferred embodiment of the present invention is provided inside the chemical liquid storage tank in which the chemical liquid is filled, and level points for sensing the level of the chemical liquid stored in the chemical liquid storage tank. It has a single float sensor having a plurality of contact members corresponding to.

According to a preferred embodiment of the present invention, the plurality of contact members, each of which is provided on the outside of the guide having a distance corresponding to the level points, and floats along the guide in accordance with the level change of the chemical liquid; It is disposed above and below the float and includes an upper contact portion and a lower contact portion contacting as the float rises and falls.

According to a preferred embodiment of the present invention, the upper contact portion and the lower contact portion, the wiring for receiving a control signal from the control means is connected.

According to a preferred embodiment of the present invention, a magnetic or magnet is inserted into the float.

According to a preferred embodiment of the present invention, the upper contact portion and the lower contact portion is provided with a magnetic field sensor for sensing the magnetic field upon contact of the float and transmitting it to the control means.

According to the present invention, a single float sensor having a plurality of contact members corresponding to the level points for detecting the level of the chemical liquid is provided inside the chemical liquid storage tank, thereby facilitating wiring and the like, thereby simplifying the installation of the sensor. And the cost can be saved by reducing the number of sensors installed.

In addition, since a single float sensor having a plurality of contact members is provided inside the chemical storage tank, the lifting operation of the floats of the contact members is prevented from interfering with the cooling water pipe provided in the chemical storage tank, thereby causing malfunction of the sensor. Can be prevented.

On the other hand, the effects of the present invention is not limited to the effects mentioned above, other effects that are not mentioned will be clearly understood by those skilled in the art from the description of the claims.

Advantages and features of the present invention, and methods for achieving them will be apparent with reference to the embodiments described below in detail in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but may be implemented in various different forms, only the embodiments are to make the disclosure of the present invention complete, and common knowledge in the art to which the present invention belongs It is provided to fully inform the person having the scope of the invention, which is defined only by the scope of the claims. Like reference numerals refer to like elements throughout.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

2 is a cross-sectional view showing a chemical liquid storage device according to a preferred embodiment of the present invention, Figure 3 is a cross-sectional view showing a float sensor in the chemical liquid storage device of FIG.

As shown in Figure 2 and 3, the chemical liquid storage device 100 according to a preferred embodiment of the present invention, the chemical liquid 101 is provided in the interior of the chemical liquid storage tank 110 is filled and stored, the chemical liquid 101 It includes a single float sensor 130 having a plurality of contact members 120 corresponding to the respective level points for detecting the water level.

The single float sensor 130 is combined with the chemical storage tank 110 such that the guide 131 for guiding the lifting movement of the plurality of contact members 120 penetrates the inside and the outside of the chemical storage tank 110 to store the chemical liquid. The tank 110 is fixedly installed.

The plurality of contact members 120 are divided into first contact members 121 to sixth contact members 126. Here, in the embodiment of the present invention, the number of the contact member 120 is described as six, but may have a number below or more.

The contact members 120 are installed on the outside of the guide 131 at a predetermined interval, preferably, at intervals corresponding to respective level points of the chemical storage tank 110, and the level of the chemical liquid 101 changes. Float f along the guide 131 and the upper contact portion u and the lower contact portion (d) disposed above and below the float (f) and in contact with the lift of the float (f). do.

In addition, wires for receiving control signals from control means 140 such as a FLG (Frogrammable Logic Controller) are respectively connected to the upper contact portion u and the lower contact portion d of the plurality of contact members 120. l) is connected.

In addition, a magnetic (m) or a magnet is inserted into the float (f), the upper contact portion (u) and the lower contact portion (d) of the plurality of contact members 120 in contact with the float (f). Magnetic field detection sensor (s) for detecting the magnetic field of the magnetic (m) or the magnet and transfer it to the control means 140 through the wiring (l) is provided.

Here, the guide 131 is a hollow tube of which the shaft center is hollow for the installation of the magnetic field sensor s in the inner space, the cross section of the shaft may be variously formed, and preferably has a circular cross section.

In addition, the guide circumference in the longitudinal direction of the guide 131 is provided on the outer circumferential surface of the guide 131 at equal intervals, and the guide groove corresponding to the circumferential guide line of the guide 131 on the inner circumferential surface of the float f. It is preferable that the guide 131 is prevented from being bent by the chemical liquid 101 in the chemical liquid storage tank 110, thereby enabling stable lifting of the float f. .

In addition, the upper contact portion (u) and the lower contact portion (d) of the plurality of contact members 120, respectively, is given a unique address to enable the control means 140 to control the level detection operation of the corresponding contact members. Can be.

Hereinafter, the operation and effects of the chemical liquid storage device having a single float sensor according to the preferred embodiment of the present invention having the configuration as described above will be described.

First, as shown in FIG. 2, when the level of the chemical liquid 101 in the chemical storage tank 110 corresponds to a position between the fourth contact member 124 and the fifth contact member 125, the first The floats f of the contact member 121 to the fourth contact member 124 are raised along the guide 131 by the buoyancy force of the chemical solution 101 and thus the upper contact portions u of the contact members 121 to 124. Contact with the fields.

Accordingly, the magnetic field of the magnetic m of the float f is sensed by the magnetic field sensing sensors s of the upper contact portions u, and a sensing signal is transmitted to the control means 140.

On the other hand, since the floats (f) of the fifth contact member 125 and the sixth contact member 126 are located higher than the level of the chemical liquid 101, the buoyancy force of the chemical liquid 101 does not act as a guide 131. Descends along and contacts the lower contact portion d of the contact members 125 and 126.

Accordingly, the magnetic field of the magnetic m of the float f is sensed by the magnetic field sensing sensors s of the lower contact portions d, and a sensing signal is transmitted to the control means 140.

Accordingly, the control unit 140 may detect the detection signals of the upper contact portions u of the first to fourth contact portions 121-124 and the lower contact portions d of the fifth and sixth contact portions 125 and 126. Based on the detection signal, it is determined that the level of the chemical liquid 101 stored in the chemical storage tank 110 corresponds to the height between the fourth contact portion 124 and the fifth contact portion 125. The installation position corresponding to the level point of the parts may be determined.

Here, the level point preferably corresponds to the dangerous level, the lowest level, the supplementary level, the standard level, and the highest level of the chemical liquid 101 stored in the chemical storage tank 110.

Therefore, according to the present invention as described above, the chemical liquid storage tank for detecting the water level of the chemical liquid 101 stored in the chemical liquid storage tank 110 is provided in the chemical liquid storage tank 110 is filled and stored Since a single float sensor 130 having a plurality of contact members 120 corresponding to each level point in the interior of the 110 is provided, it is possible to simplify the installation work of the sensor by facilitating wiring work and the like. By reducing the number of installation costs can be saved.

In addition, since a single float sensor 130 having a plurality of contact members 120 is provided inside the chemical storage tank 110, lifting and lowering of the floats f of the contact members 120 may be performed using the chemical storage tank ( 110, it is possible to prevent the malfunction of the sensor is not interfered by the cooling water pipe provided in the inside.

On the other hand, in the preferred embodiment of the present invention, the contact member 120 to detect the magnetic field of the magnetic (m) or a magnet to detect the level of the chemical solution 101, but the upper portion of the contact member 120 Instead of the magnetic field sensor (s) in the contact portion (u) and the lower contact portion (d) by employing a capacitance sensor to detect the capacitance changes in accordance with the contact of the float (f) to raise the level of the chemical liquid (101) It may be sensed.

While the preferred embodiments of the present invention have been described above with reference to the accompanying drawings, those skilled in the art to which the present invention pertains have various permutations and modifications without departing from the spirit or essential features of the present invention. It is to be understood that the present invention may be practiced in other specific forms, since modifications may be made. It is therefore to be understood that the above-described embodiments are illustrative in all aspects and not restrictive.

1 is a cross-sectional view showing a conventional chemical liquid storage device.

2 is a cross-sectional view showing a chemical storage device according to a preferred embodiment of the present invention.

3 is a cross-sectional view illustrating a float sensor in the chemical liquid storage device of FIG. 2.

* Drawing reference Explanation *

100: chemical storage device 110: chemical storage tank

120: contact member 130: float sensor

140: control means f: float

u: upper contact point d: lower contact point

m: Magnetic s: Magnetic field sensor

Claims (5)

It is provided inside the chemical storage tank in which the chemical liquid is filled and stored. And a single float sensor having a plurality of contact members corresponding to level points for sensing the level of the chemical stored in the chemical storage tank. The method of claim 1, wherein the plurality of contact members, Each of which is installed on the outside of the guide at intervals corresponding to the level points, A float moving up and down along the guide according to a change in the level of the chemical liquid; And an upper contact portion and a lower contact portion disposed above and below the float to contact each other as the float moves up and down. The chemical liquid storage device according to claim 2, wherein the upper contact portion and the lower contact portion are connected with wires for receiving a control signal from a control means. The chemical liquid storage device according to claim 2, wherein a magnetic or magnet is inserted into the float. The chemical liquid storage device according to claim 4, wherein the upper contact portion and the lower contact portion are provided with a magnetic field sensor for detecting a magnetic field when the float contacts.
KR1020080130377A 2008-12-19 2008-12-19 Chemical solution storage apparatus KR20100071600A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020080130377A KR20100071600A (en) 2008-12-19 2008-12-19 Chemical solution storage apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020080130377A KR20100071600A (en) 2008-12-19 2008-12-19 Chemical solution storage apparatus

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KR20100071600A true KR20100071600A (en) 2010-06-29

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2579610A (en) * 2018-12-06 2020-07-01 Map16 Rsb Tech Ltd Gully sensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2579610A (en) * 2018-12-06 2020-07-01 Map16 Rsb Tech Ltd Gully sensor

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