KR20100057419A - Composite ion analyzer - Google Patents

Abstract

PURPOSE: A composite ion analyzer is provided to reduce the test time by analyzing and measuring the ion energy in real time using the ion time-of-flight. CONSTITUTION: A composite ion analyzer(100) comprise a flash generating member(5), a Thomson parabola ion analyzer, and an ion time-of-flight analyzer. The flash generating member selectively passes only some ion to an ion source(4). The Thomson parabola ion analyzer measures the distance that the ion passing the flash generating member is deviated by the electromagnetic field. The ion time-of-flight analyzer measures the time-of-flight of the ion using the flash generated by the ion colliding with the flash generating member. The flash generating member comprises a first through-hole. Some ion of the ion source passes the first through-hole.

Description

Complex Ion Analyzer {COMPOSITE ION ANALYZER}

The present invention relates to an ion analyzer, and more particularly, to an ion analyzer for analyzing the properties of ions using the physical properties of the incident ions.

The conventional Thomson parabolic ion analyzer has a structure in which an electric field and a magnetic field are applied in parallel, ions are incident in a direction perpendicular to the electric field and the magnetic field, and measured by a detector located at a predetermined distance from the electric field and the magnetic field.

At this time, the ions are deflected in a direction parallel to the electric field while being deflected in a direction perpendicular to the magnetic field. Since the distance at which the ions are deflected is smaller as the energy of the ions is higher, the energy of the ions can be measured using the deflected distance. In addition, the parabolic equation is satisfied between the distance deflected by the electric field and the distance deflected by the magnetic field. Since different parabolas are drawn according to the type of ions, the type of ions can be analyzed using this.

In the Thomson parabolic ion analyzer, ions are generally used as the detector for the ions using CR39, which is a solid nucleus detector, and an image plate using photo-stimulated luminescence.

However, in order to analyze ions detected by CR39 in the related art, it is necessary to etch CR39 using sodium hydroxide and observe a pit caused by ions with an optical microscope, so it takes several hours from detection to analysis. In addition, the image plate also needs to be analyzed using an image plate reader, so it takes several minutes from detection to analysis. Therefore, when performing experiments that generate protons and ions while varying various experimental conditions, there is a problem that it takes a long time to perform the experiment because the real-time analysis is difficult.

To overcome this, detection systems incorporating microchannel plates, phosphors, CCD imaging devices, etc., capable of real-time analysis, are used in the Thomson parabolic ion analyzer, but in this case, the analyzer must be kept at a high vacuum and manufacturing cost There was a problem of this expensive.

In the present invention, while using the advantages of the Thomson parabolic ion analyzer, it is to provide a complex ion analyzer that can measure the energy spectrum in real time to measure the energy of ions.

In addition, to provide a complex ion analyzer that can improve the reliability of the analysis by having two ion analyzers operating on different principles at the same time to analyze the characteristics of one ion source.

In order to achieve the above object, the present invention is an ion incidence device, a part of the incident ions hit and a part of the ions are formed so as to pass through a flash generating member for emitting a flash when the ions hit, in the flash generating member Provided is a complex ion analyzer including a first ion analyzer for analyzing ions using divergent flashes, and a second ion analyzer for analyzing ions passing through the flash generating member.

Here, the flash generating member may be configured to have a first through hole through which some of the ions can pass.

In this case, the flash may further include a reflector for switching the path of the flash, and the flash may be incident to the first ion analyzer while forming a path different from the ions passing through the first hole by the reflector.

The reflector may include a second through hole through which ions may pass, and ions passing through the flash generating member may be incident to the second ion analyzer through the first through second hole.

Therefore, it is preferable that the first through holes and the second through holes are installed in parallel with the incident part where the ions are incident in the ion incident device.

To this end, the first through hole, the second through hole and the alignment inspection device that can check the alignment state of the incident portion may be further configured.

In this case, the alignment inspection apparatus may be installed to face each other at a position opposite to the entrance hole, and may be configured to measure the alignment state by irradiating a laser in a direction penetrating the first and second apertures. In addition, the alignment inspection apparatus may be configured integrally with the second ion analyzer.

Here, it is preferable to include a position adjusting device which can adjust the position of at least one of the first through hole, the second through hole or the entrance hole in the vertical or horizontal direction.

On the other hand, the first ion analyzer may be configured to analyze the energy spectrum of the ions by measuring the time taken for the ions to fly a predetermined distance.

In this case, the first ion analyzer may analyze the energy of the ions by measuring each time reaching the scintillator member from the time when the ions are generated.

The first ion analyzer may include a scintillation detector for detecting each scintillation and converting the scintillation into an electrical signal.

In this case, the first ion analyzer may further include a lens for forming images on different positions on the scintillator according to the position where the respective scintillation diverges from the scintillator.

In addition, the first ion analyzer may further include an optical characteristic adjusting unit for adjusting the wavelength or intensity of the flash light passing through the lens.

For example, the optical characteristic adjusting unit may include a band pass filter and a photosensitive filter installed between the lens and the scintillation detector.

On the other hand, the second ion analyzer may be a device for analyzing the energy and type of the ion by measuring the distance that the ion is deflected while passing through the electric or magnetic field.

Here, the second ion analyzer is preferably configured to further include a collimator that can limit the size of the ions flowing into the electromagnetic field.

On the other hand, the flash generating member may comprise a plastic scintillator.

In addition, the front side of the flash generating member may further include a deflection magnet for guiding the electrons outward in order to prevent the electrons having low energy from hitting the flash generating member.

In addition, the front surface of the flash generating member is preferably made of a metal coating so as to block the inflow of infrared rays, visible light or ultraviolet rays into the flash generating member.

Meanwhile, an object of the present invention is a scintillator for converting an ion source into a flash, an ion flight time analyzer for measuring a flight time of ions using the flash generated by the scintillator, and a distance at which the ion source is deflected while passing through an electromagnetic field. It can also be achieved by a complex ion analyzer including a Thomson parabolic ion analyzer for analyzing the.

Here, the scintillator may be configured to form a first through hole through which ions of a portion of the ion source can pass.

In addition, the flash generated by the ions hitting the scintillator may be configured to be switched to the ion flight time analyzer by changing a path by a reflector provided at the rear side of the scintillator.

In addition, the ions passing through the first through holes may pass through the second through holes formed inside the reflector to be introduced into the Thomson parabolic ion analyzer.

According to the present invention, when measuring the energy of ions it is possible to analyze this in real time using the flight time of ions, it is possible to significantly shorten the time required for the experiment compared to the prior art.

In addition, in the measurement of the energy of ions, two ion analyzers measure the ion source on different principles. Therefore, it is possible to confirm that the measured values coincide and to analyze the type of ions. In comparison, the reliability of the ion characteristic measurement is improved.

Hereinafter, with reference to the accompanying drawings will be described in detail a preferred embodiment of the composite ion analyzer 100 according to the present invention.

1 is a cross-sectional view showing the internal cross section of the composite ion analyzer according to the preferred embodiment of the present invention.

As shown in FIG. 1, the complex ion analyzer according to the present invention includes an ion incident apparatus 1 for injecting ions into the complex ion analyzer, and first and second ion analyzers 110 for analyzing incident ions. , 120).

Here, the ion incidence device 1 is a device that allows the ion beam source 4 to be analyzed to enter the complex ion analyzer 100 through the incidence part 1a at a predetermined speed. In this case, the ion incidence device 1 may be configured to inject ions generated in a separate device, or may be configured to generate ions directly and to incident them.

The ion incident apparatus 1 according to the present embodiment may be configured to generate ions using an ultra-high power laser. By focusing ultra-high-power lasers at a small focal point on thin targets, plasma radiation, X-rays, electrons and ions can all be generated. At this time, the optical component and the target for focusing the laser may be installed in a target chamber (not shown) formed by a vacuum. Therefore, when the ultra-high power laser is irradiated to the target chamber, all the sources including the ion source can be generated at the same time. The ion beam source 4 generated at this time may be incident into the complex ion analyzer 100 through the incident part 1a of the ion incident apparatus 1.

The ultra-short high-power laser used in this embodiment has a very short time span of pulses, and thus the generated X-rays, electrons, and ion beam sources have a very short time span of about picoseconds. Therefore, in this embodiment, it can be regarded that ions having different energies are generated instantaneously at the same time.

However, this is only one embodiment, and of course, it is also possible to inject ions using another device. For example, a configuration is also possible in which ions are generated by using an ion beam port of a conventional particle accelerator. However, in this case, unlike the present embodiment, it will correspond to an ion source in which ions having different energies are continuously generated.

Meanwhile, according to the present invention, as shown in FIG. 1, ions incident by the ion incident apparatus 1 may be simultaneously analyzed by the first and second ion analyzers 110 and 120. .

Compared to a general ion analyzer, in the present invention, two ion analyzers 110 and 120 may apply respective analysis methods to one ion source 4 to analyze characteristics of ions.

In this case, the advantages of each ion analyzer can be taken and the disadvantages can be compensated for. In addition, when the ions that each ion analyzer can analyze are different from each other, the properties of various ions can be analyzed in one experiment. On the other hand, even if each ion analyzer analyzes the same properties of the ions by the respective analysis method, there is an advantage that can be obtained with high reliability in one measurement.

In the present invention, in order to configure such a complex ion analyzer 100, a part of the incident ion source (4) is incident to generate a flash, a part may include a flash generating member installed to pass through it. In this case, the flash generating member 5 may be configured to emit a flash by using the energy of the ions hitting, or may be configured to emit a flash when the ions hit, including a separate fluorescent material.

That is, the incident ions may be divided into ions which are hit by the flash generating member 5 and emit flashes, and ions which pass without hitting the flash generating member 5. In addition, the first ion analyzer 110 analyzes the characteristics of the ions by using the flash, and the second ion analyzer 120 may analyze the characteristics of the ions by directly using the ions passing through the scintillation generating member.

Hereinafter, the specific structure by this invention is demonstrated in detail with reference to FIG.

As shown in FIG. 1, in this embodiment, the ion incidence device 1 is positioned on one side, and a flying vacuum tube 2 is formed to form a path in a direction in which ions travel from the ion incidence device 1. Can be.

In addition, the above-described flash generating member 5 may be installed on a path of ions formed inside the vacuum tube 2. In addition, the scintillation generating member 5 is preferably configured to generate scintillation when ions collide with each other. In this embodiment, the plastic scintillator 5 may be used as an example.

Here, when some ions of the ion source hit the plastic scintillator 5, an attractive force acts between the electrons and the ions in the scintillator 5. At this time, as the electrons are excited, the scintillator 5 may emit flashes.

On the other hand, the flash generating member 5 according to the present invention is formed so that a portion of the traveling ions pass without hitting, the flash generating member 5 is a path of the ions formed inside the vacuum tube (2) It is desirable to have a shape that does not block a predetermined portion.

Therefore, in the present embodiment, a first through hole 5a through which some ions can pass may be formed inside the plastic scintillator 5. (See FIG. 2) Thus, the plastic scintillator 5 arrives. A portion of the ion beam travels through the first through hole 5a, and the other may be converted into flash by hitting the plastic scintillator 5.

Here, the plastic scintillator 5 may emit flashes for all of X-rays, electrons, and ions. In particular, in the case of electrons having a low energy may have a speed similar to that of ions, it may be difficult to distinguish the first ion analyzer 110. Therefore, in order to block electrons with low energy, it is preferable to provide the deflection magnet 12 in front of the scintillator 5 to the outside of the path where the ions travel. In this case, electrons having low energy can be prevented from reaching the plastic scintillator 5 by deflecting outward while traveling along the vacuum tube 2.

In this embodiment, a plastic scintillator having a through hole formed in the center is used, but the present invention is not limited thereto. In addition to this, it is also possible to use another configuration that can emit flash when ions collide with each other, and the shape of the flash generating member 5 may also be configured differently from the present embodiment so as to pass some ions.

On the other hand, the ions passing through the flash generating member 5 continue to maintain the speed at the time of incidence, and the flash generated by the ions striking the flash generating member 5 also moves in the direction in which the ions travel. Can diverge. Therefore, in the present embodiment, it is preferable to form different paths such that the flash and the ions passing through the flash generating member 5 flow into the first ion analyzer 110 and the second ion analyzer 120, respectively.

In the present embodiment, a vacuum chamber 3 connected to the vacuum tube 2 is formed on the rear side of the plastic scintillator 5, and the reflector 6 which switches the path of flashing light inside the vacuum chamber 3. ) Can be installed. Here, the surface of the reflector 6 is preferably optically excellently polished, and more preferably may be coated with a metal having high reflectance. Therefore, the reflectance of the glare can be maximized without distorting the spatial image of the glare formed on the plastic scintillator 5.

On the other hand, the reflector 6 is preferably formed so as to pass through the reflector 6 in the direction in which the ions passing through the plastic scintillator 5, while switching the path of the flash. The reflector 6 according to the present exemplary embodiment may include the second through hole 6a at a position corresponding to the path of movement of the ions. Accordingly, the ions passing through the first through hole 5a may be introduced into the second ion analyzer 120 through the second through hole 6a while maintaining the speed at the time of incidence.

As such, the ion beam source 4 incident from the ion incidence device 1 is separated into a flash and some ions passing through the plastic scintillator 5, and the first and second ion analyzers are respectively reflected by a reflector. Can flow into (110, 120).

Hereinafter, the configuration of the first and second ion analyzers 110 and 120 will be described in detail.

First, the first ion analyzer 110 according to the present embodiment analyzes the properties of ions using the flash flowing from the reflector 6. Specifically, the first ion analyzer 110 analyzes the flight time of the ions to analyze the characteristics of the ions. Do this. In general, since the ions advance the space at a speed corresponding to the energy they have, the energy of the ions can be measured by measuring the time for which the ions fly a certain distance. Therefore, when one ion source contains ions with different energies, the energy spectrum of the ion source can be measured by calculating their flight times.

As shown in FIG. 1, the first ion analyzer 110 according to the present embodiment includes a flash detector 9 for detecting incoming flash and a flight time measuring device 11 for measuring flight time using the same. Can be configured.

The scintillation detector 9 may be configured as a photomultiplier tube that detects each scintillation and converts the scintillation into an electrical signal when the scintillation reaches the photocathode formed therein. At this time, when a high voltage is applied to the photomultiplier using the high voltage power supply 10, it is possible to amplify the number of photoelectrons generated by the flash by tens of thousands or more.

The flight time measuring device 11 may be configured using an oscilloscope. Therefore, the oscilloscope can measure the flight time of ions by detecting the electrical signal amplified from the photomultiplier tube (9).

Therefore, according to the first ion analyzer 110 of the present embodiment, when a plurality of ions having different energies are instantaneously generated and start to fly, the respective ions reach the first ion analyzer 110. It is possible to determine the energy of each ion by sensing the time to be measured, it is possible to measure the energy spectrum of the ion in real time.

On the other hand, the first ion analyzer 110 according to the present embodiment may be provided with a lens 7 on the path of the flash from the reflector 6 to the photomultiplier tube. Here, the lens 7 may serve to form an image at different positions on the photocathode cathode of the photomultiplier tube according to the position where each flash is emitted from the plastic scintillator 5. For example, as shown in FIG. 2, the flashes a and b formed at different positions in the plastic scintillator 5 pass through the lens 7 to each other at a 'and b' on the photomultiplier tube. It is possible to image at different locations.

Therefore, the position and intensity at which the flash is emitted from the plastic scintillator 5 correspond to the spatial distribution of the incident ions. Know the distribution.

On the other hand, the first ion analyzer 110 may further include an optical characteristic control unit 8 that can adjust the wavelength and intensity of all the light including the flash passing through the lens (7). In the present exemplary embodiment, the optical characteristic adjusting unit 8 including the plurality of optical filters may be provided between the lens 7 and the photomultiplier tube 9.

In this case, a band pass filter may be included to selectively transmit only the wavelength of the flash emitted from the plastic scintillator 5. Here, in the case of the band pass filter, the infrared ray, the visible light having a different wavelength from the flash and the ultraviolet light generated together with the ion ray source 4 in the ion incidence device 1 are reflected by the reflector 6, so that the photomultiplier tube ( 9) can block the flow, and selectively pass only the flash generated by the ions.

However, even if the bandpass filter is provided, the visible light such as generated with ions and the wavelength of the flash can not be blocked, as shown in Figure 2 metal coating having a thin thickness on the entire surface of the plastic scintillator (5) It is preferable to process by (5b). In this case, the metal coating 5b serves to block infrared rays, visible rays, and ultraviolet rays of all wavelengths that may enter the plastic scintillator 5 together with the ion beam source 4.

Here, in addition to the band pass filter, the optical characteristic adjusting unit 8 may be configured to include an attenuation filter that can adjust the intensity of the incoming glare to an appropriate level to be measured by the oscilloscope 11. In addition, it is preferable to control the characteristics of the flash flowing into the photomultiplier tube 9 using various optical filters.

The process of analyzing the characteristics of the ions using the first ion analyzer 110 as described above is as follows.

인 이온이 거리

을 진행하여 플라스틱 신틸레이터(5)에 도착하는데 소요되는 시간, 즉 비행 시간이

일 때, 이온의 에너지

와 비행시간

사이에는 다음의 식이 만족된다.It is assumed that after ions having different energies are instantaneously generated at one location at the same time, they are incident from the ion incident apparatus 1, and the kinetic energy is

Phosphorus ion distance

The time it takes to reach the plastic scintillator 5, i.e. the flight time

When is the energy of ions

And flight time

In between, the following equation is satisfied.

---- <1>

---- <1>

---- <2>

---- <2>

는 빛의 속도이고,

은 이온의 정지질량 에너지이다. 수소 원자의 이온인 양성자에 대해

은 938.272 MeV이다. 위 <1> 식에 의하면, 비행시간은 이온의 운동 에너지와 정지질량 에너지의 비율에 의해서 결정된다. here

Is the speed of light,

Is the static mass energy of the ion. About proton which is ion of hydrogen atom

Is 938.272 MeV. According to the above equation, the flight time is determined by the ratio of the kinetic energy of the ion and the static mass energy.

In the plastic scintillator 5, the time required for the ions to change to flash, the response time of the oscilloscope 11, etc., all have a time of less than nanoseconds. It is possible to measure.

By converting the flight time into the energy of ions using the above equation, the intensity of the electrical signal can be measured as a function of the energy of the ions. At this time, the electrical signal is proportional to the number of particles of ions, but the proportional constant (that is, the reactivity of the detection system) has a different value depending on the type and energy of the ions. If we know this proportionality constant, we can measure the particle number of the ion that changes according to the energy of the ion. This measurement is called the energy spectrum of the absolute calibrated ion.

As described above, the lens of FIGS. 1 and 2 serves to form a spatial intensity distribution of ions incident on the plastic scintillator 5 in the photomultiplier tube. Therefore, by installing an aperture having an appropriately shaped hole in front of the plastic scintillator 5, and limiting the spatial region of the incoming ion beam, it is possible to measure the energy spectrum that changes with the position in the ion beam. For example, in FIG. 2, if an ion is incident only on the a portion of the plastic scintillator using a suitable shader, only the energy spectrum of the ion corresponding to the a portion can be measured. Therefore, when one ion source has a different energy spectrum according to the position, the first ion analyzer 110 according to the present exemplary embodiment may measure the change.

On the other hand, the second ion analyzer 120 according to the present embodiment, by measuring the amount of ions deflected when passing through a predetermined electric field and magnetic field, may be configured as an ion analyzer for analyzing the energy or type of the ions. . This corresponds to a configuration similar to a conventional Thomson parabolic ion analyzer, and in the present embodiment, may include a collimator 13, a displacement inducer 14, and an ion detector 16.

As shown in FIG. 1 and FIG. 2, the displacement inductor 14 is for inducing a displacement in a vertical or horizontal direction forcibly to the traveling ions, and may be composed of an electrode 14a and a magnetic pole 14b. have. The electrode 14a includes an anode and a cathode, and a voltage of several kV may be applied from the high voltage power supply device 15 between the anode and the cathode. Further, the magnetic pole 14b is composed of the north pole and the south pole, and the intensity of the magnetic field by them can be set to several hundred mT.

In addition, the displacement inductor 14 preferably arranges the electrode 14a and the magnetic pole 14b such that the direction of the electric field and the direction of the magnetic field are parallel to each other. To this end, in the present embodiment, as shown in FIG. 2, the two electrodes 14a may be disposed to face each other on the inside, and the N pole and the S pole may be disposed on the outside thereof. Accordingly, the electrode 14a is made of a material through which a magnetic field generated by an external magnetic pole 14b can pass, and an insulator (not shown) is inserted between each electrode 14a and the magnetic pole 14b. It is preferable to prevent the current applied to the electrode 14a from flowing through the magnetic pole 14b.

On the other hand, the ion detector is a detector for detecting the ions induced by the electric field and the magnetic field formed by the displacement inductor 14, the analysis can measure the displacement of the ions. In the present embodiment, the ion detector 16 may be configured using a CR39 and an image plate. The CR39 has a spatial resolution of several micrometers, and the image plate may have a spatial resolution of several tens of micrometers. Therefore, the ion detector 16 is provided at a position away from the displacement inductor 14 by a certain distance, so that the displacement of the ions can be measured with an accuracy of about tens of micrometers.

On the other hand, the ion energy analysis capability of the second ion analyzer 120 may be determined by the spatial size of the ion ray source 4 in addition to the spatial resolution of the ion detector 16. Therefore, the second ion analyzer 120 of the present embodiment preferably includes a collimator 13 capable of limiting the spatial size of the ion source 4. The collimator 13 may be formed of a metal plate having a material and a thickness through which ions to be measured cannot pass, and a small hole through which ions can pass may be formed.

가 이온의 정지질량 에너지에 비해 아주 작고(즉,

), 자기장에 의해 일어나는 원 운동의 반경인 라모 반경(Larmor radius)

(=

)이 자극의 길이에 비해 아주 크다면(즉,

), 이온검출기(16) 상에서 이온이 도착하는 위치

와

는 다음의 방정식으로 근사될 수 있다. In this case, the displacement of the ions is measured using the second ion analyzer 120 as described above, and the motion of the ions in the electric and magnetic fields may be analyzed using a relativistic equation of motion. Kinetic energy of ions

Is very small compared to the static mass energy of

), Larmor radius, which is the radius of circular motion caused by the magnetic field

(=

) Is very large relative to the length of the stimulus (i.e.

), Where the ions arrive on the ion detector 16

Wow

Can be approximated by the equation

-- <3>

-<3>

--- <4>

--- <4>

----- <5>

----- <5>

----- <6>

----- <6>

는 자기장에 의해 편향되는 방향으로 이온의 편향거리이고,

는 전기장에 의해 편향되는 방향으로 편향거리이다.

와

의 원점은 전기장과 자기장이 인가되지 않았을 때 이온이 이온검출기(16)에 도달하는 위치이다.

는 이온의 전하,

은 이온의 질량이고,

와

는 인가된 전기장과 자기장의 세기이다. 도 2와 같이,

는 전기장과 자기장이 인가되는 공간에서 전극(14a)과 자극(14b)의 길이이고,

는 전기장과 자기장 인가되지 않는 공간에서 전극(14a)과 자극(14b)의 끝으 로부터 이온검출기(16)까지의 거리이다.here

Is the deflection distance of ions in the direction deflected by the magnetic field,

Is the deflection distance in the direction deflected by the electric field.

Wow

The origin of is the position where the ions reach the ion detector 16 when the electric and magnetic fields are not applied.

Is the charge of the ion,

Is the mass of ions,

Wow

Is the strength of the applied electric and magnetic fields. As shown in Figure 2,

Is the length of the electrode 14a and the magnetic pole 14b in the space where the electric and magnetic fields are applied,

Is the distance from the ends of the electrodes 14a and the magnetic poles 14b to the ion detector 16 in the space where electric and magnetic fields are not applied.

와

사이에는 포물선의 방정식이 만족될 수 있고, 이온의 질량을 전하로 나눈 값(

에 따라 각각 다른 포물선이 그려질 수 있다. 따라서 이온의 질량과 전하를 알고 있는 경우 두 편향거리를 측정하면, <3>식과 <4>식으로부터 이온의 에너지를 측정하는 것이 가능하다.According to the above <5> equation, two deflection distances

Wow

In between, the parabolic equation can be satisfied and the mass of ions divided by the charge (

Different parabolas can be drawn. Therefore, if the mass and charge of ions are known, the two deflection distances can be measured, whereby the energy of the ions can be measured from the equations <3> and <4>.

=320V/mm, 자기장의 세기는

=0.16 T, 전극과 자극의 길이는

=100mm, 전극과 자극의 끝에서 이온검출기까지의 거리는

=200mm를 가정하였다.FIG. 3 shows Thomson parabolas of proton and carbon ions detected by ion detector 16 and three straight lines (dotted lines). The intensity of the applied electric field

= 320V / mm, the field strength is

= 0.16 T, the length of electrode and stimulus

= 100mm, the distance from the electrode and the tip of the pole to the ion detector

Assume = 200 mm.

가 일정한 값을 갖는 수직선과 톰슨포물선이 만나는 교점(도 3에서 원형의 점)은 이온의 운동량을 전하로 나눈 값(

)이 같은 점에 해당하므로, 이 수직선을 전하당 등운동량 선(constant momentum-to-charge line)이라고 한다. 그리고, 위의 <4>식에 의하면

가 일정한 값을 갖는 수평선과 톰슨포물선이 만나는 교점(도 3에서 삼각형 점)은 이온의 운동 에너지를 전하로 나눈 값(

)이 같은 점에 해당하므로, 이 수평선을 전하당 등에너지 선(constant energy-to-charge line)이라 한다. 상기 제<6> 식은 직선의 방정식을 나타내며, 직선의 기울기가 이온의 질량과 전하에는 무관하고 속도에만 반비례한다. 따라서, 두 편향거리의 원점에서 임의의 방향으로 그린 직선과 톰슨포물선이 만나는 교점(도 3에서 사각형 점)은 이온의 속도가 같은 점에 해당하므로 등속도 선(constant velocity line)이라 한다.According to the above <3> equation

The intersection point (circular point in Fig. 3) where a vertical line having a constant value and a Thompson parabola is equal to the momentum of the ion divided by the charge (

) Is the same, so this vertical line is called a constant momentum-to-charge line. And, according to <4> above

The intersection point of the horizontal line where Thomson's parabola meets with a constant value (the triangle point in FIG. 3) is the kinetic energy of the ion divided by the charge (

) Is the same, so this horizontal line is called a constant energy-to-charge line. Equation (6) represents an equation of a straight line, and the slope of the straight line is independent of mass and charge of ions and is inversely proportional to speed. Therefore, the intersection point (square point in FIG. 3) where a straight line drawn in an arbitrary direction and a Thomson parabola meets at the origin of two deflection distances corresponds to a point where ions have the same velocity and thus is called a constant velocity line.

)은 다음의 식을 만족한다.In the case of the second ion analyzer 120, the mass and charge of the ions cannot be measured separately, but the ratio thereof can be measured. That is, the mass divided by the charge from the equations <3> to <6> (

) Satisfies the following equation.

-- <7>

-<7>

값이 같은 전하당 등운동량 선과 톰슨포물선이 만나는 교점(원형 점)의

값은

에 비례한다.

값이 같은 전하당 등에너지 선과 톰슨포물선이 만나는 교점(삼각형 점)의

값은

의 제곱근에 비례한다. 그리고, 속도가 일정한 등속도 선과 톰슨포물선이 만나는 교점(사각형 점)의

값과

값은 모두

에 비례한다.In reference to this,

Of the intersection (circular point) where the equi-molecular line per charge and the Thompson parabola meet

The value is

Proportional to

Of the intersection (triangle point) where the equi energy-charged line and the Thompson parabola meet

The value is

Proportional to the square root of. And the intersection of the constant velocity line and the Thomson parabola

Value and

All values

Proportional to

값은 전하에 반비례하고, 전하당 등에너지 선과 톰슨포물선이 만나는 교점(삼각형 점)의

값은 전하의 제곱근에 비례한다. 그리고, 등속도 선과 톰슨포물선이 만나는 교점(사각형 점)의

와

값은 모두 전하에 비례하므로, 각 교점들이 등간격으로 배열되어 있다.As shown in FIG. 3, the above characteristics can be confirmed in thomson parabolas drawn for carbon ions having the same mass and different charges. That is, the intersection of the equimolar moment lines and the Thomson parabola

The value is inversely proportional to the charge, and the value of the intersection (triangle point)

The value is proportional to the square root of the charge. And the intersection of the constant velocity line and the Thomson parabola

Wow

The values are all proportional to the charge, so each intersection is arranged at equal intervals.

If several types of ions are included, the above characteristics can be used to classify Thomson parabolas corresponding to the same type of ions. If a Thomson parabola of known ions (eg, protons) is obtained with a Thomson parabola of unknown ions, it is possible to measure the ratio of mass and charge of ions of unknown kind using the following equation: Do.

------ <8>

------ <8>

------ <9>

------ <9>

------- <10>

------- <10>

의 첨자가 붙은 값은 종류를 알고 있는 기준이 되는 이온의 톰슨포물선에 해당하는 값이고,

의 첨자가 붙은 값은 종류를 모르는 이온에 해당하는 값이다. <8> 식은 전하당 등에너지 선과 톰슨포물선들이 만나는 교점의

값들을, <9> 식은 전하당 등운동량 선과 톰슨포물선들이 만나는 교점의

값들을 이용해 질량과 전하의 비율을 측정할 때 사용될 수 있다. 그리고 <10> 식은 등속도 선과 톰슨포물선들이 만나는 교점의

와

값을 이용해 질량과 전하의 비율을 측정하는데 사용될 수 있다.here,

The value with the superscript is the thomson parabola of the ion that is the type of reference.

Values with a superscript are equivalent to ions of unknown type. <8> The equation shows the intersection of the charge-energy isoelectric line and the Thomson parabola.

Values are expressed as the intersection of the equimolar lines and the Thomson parabola

The values can be used to determine the ratio of mass to charge. And <10> is the intersection of the constant velocity line and the Thomson parabola

Wow

The value can be used to determine the ratio of mass to charge.

As such, the second ion analyzer 120 analyzes the ions that arrive directly to analyze the characteristics of the ions, so that the respective components installed between the second ion analyzer 120 at the incident part 1a may move. It needs to be precisely aligned to form a path that can be. That is, the ion beam source is incident from the incident portion 1a of the ion incidence device 1, so that the first through hole 5a of the plastic scintillator 5, the second through hole 6a of the reflector 6, and the collimator 13 And through the center of the electrode 14a of the displacement inductor 14.

Therefore, the present invention preferably includes an alignment inspection device 17 for checking the alignment between the components. As a result, it is possible to check whether or not the incident part 1a, the first through hole 5a, the second through hole 6a, the collimator 13, and the like are all aligned in a straight line.

The alignment inspection apparatus 17 of this embodiment can be configured using a laser having excellent straightness. And, it may be installed so as to face at a position opposite to the incident portion (1a) can be configured to irradiate the laser in the path of the ion proceeds. As shown in FIG. 1, the alignment inspection apparatus 17 may irradiate a laser into the vacuum chamber 3 through the glass plate 18 for maintaining the vacuum, and the laser irradiates in the reverse direction of the path through which the ions travel. It is then possible to check the alignment of the individual components forming the path.

In this embodiment, the alignment inspection apparatus 17 is integrally formed with the second ion analyzer 120 so as to irradiate the laser in the reverse direction of the ion path as described above. However, this is only one embodiment, and the present invention is not limited thereto.

On the other hand, the present invention preferably further includes a position adjusting device 19 that can adjust the position of each component so that each component can accurately form the path of the ion and flash. Therefore, when it is determined that the alignment is out of alignment as a result of the inspection by the alignment inspection device 17, the alignment state may be corrected by moving or rotating the corresponding component up, down, left, and right.

In the composite ion analyzer 100 according to the present embodiment, after the first and second ion analyzers 110 and 120 are assembled in the vacuum tube 2 and the vacuum chamber 3, the ion incidence apparatus 1 It is configured to assemble on one side. In this case, the vacuum tube 2, the vacuum chamber 3 and the first and second ion analyzers 110 and 120 may be assembled in a state where alignment check is completed. Therefore, when the assembly is finally made to one side of the ion incidence device 1, the position adjusting device 19 can adjust the positional relationship between the incidence portion (1a) and the other components.

Accordingly, the position adjusting device 19 of the present embodiment can collectively adjust the positions of any other components in which ions and flashes form a traveling path, in contrast to the incident portion 1a on which ions are incident. .

As such, in the present embodiment, the position adjusting device 19 which can adjust the position of each component collectively is used, but the present invention is not limited thereto. In addition, it is also possible to individually adjust the position of each component of the flash generating member 5, the reflector 6, the collimator 13, the displacement guide 14, etc., both individual and collective adjustment It is of course also possible to be configured to be possible.

Therefore, before performing the experiment, after checking the alignment state of each component using the alignment inspection device 17, if the alignment state is misaligned to adjust the alignment state by using the position adjustment device of each component It is possible.

As such, the present invention can analyze a single ion source at the same time through two ion analyzers, and can provide a complex ion analyzer capable of supplementing the disadvantages while simultaneously having the advantages of each ion analyzer.

As an example, in the present embodiment, an analyzer using a flight time of ions and an analyzer using a principle in which ions are deflected by an electromagnetic field are configured, but the present invention is not limited thereto. In addition, it is obvious that the technical idea of the present invention is a complex ion analyzer that combines an ion analyzer that directly uses physical properties (mass, charge, and velocity) of an ion source and an ion analyzer that uses flashes generated from ions.

Hereinafter, an example of an experiment performed using the present embodiment will be described.

= 1.65 m일 때, 양성자의 에너지에 따른 비행시간을 보여준다. (b) 실선은, 자기장의 세기가 B = 0.16 T, 자극의 길이가

= 100 mm, 자극의 끝에서 이온 검출기까지의 거리가

= 200 mm일 때, 자기장에 의해 편향되는 방향으로 양성자의 편향거리

를 보여준다. 양성자의 에너지가 작으면 작은 에너지의 변화에도 비행시간과 편향거리가 크게 변하지만, 양성자의 에너지가 크면 이들의 변화가 작아진다. 따라서 양성자의 에너지가 클수록 에너지 측정의 분해능이 낮아지게 된다.(A) Solid line of FIG. 4 shows that

= 1.65 m, it shows the flight time according to the proton energy. (b) the solid line indicates that the magnetic field strength is B = 0.16 T and the magnetic pole length is

= 100 mm, the distance from the end of the stimulus to the ion detector

= 200 mm, deflection distance of the proton in the direction deflected by the magnetic field

Shows. If the energy of the protons is small, the flight time and the deflection distance change greatly even with the change of small energy, but if the energy of the protons is large, their changes are small. Therefore, the higher the energy of the proton, the lower the resolution of the energy measurement.

Figure 5 is the result measured by the first ion analyzer in this experiment. In this experiment, the ultra-high power laser beam is focused on a polyimide target having a thickness of 12.5 μm to generate ions, and a plastic scintillator is installed at a distance of 1.65 m (flying distance L) from the target. [A] of FIG. 5 shows an electric signal (PMT voltage) measured by a photomultiplier tube and an oscilloscope as a function of flight time. Zero flight time is the time the laser beam arrived at the target. Intensity of electric signals by plasma radiation, X-rays and electrons other than protons starts to increase from 5.5 ns. This is the time it takes for non-proton sources to proceed 1.65 m at the speed of light. On the other hand, the proton signal starts to be measured from time 92.00 ns, which means that the maximum energy of protons generated is 1.683 MeV (see FIG. 4).

On the other hand, [B] of FIG. 5 is an electrical signal of the photomultiplier tube drawn as a function of proton energy. The transverse axis data was calculated by converting the flight time into proton energy. The vertical axis data was calculated by multiplying the rate of change (dt / dT) of the flight time with respect to the change in proton energy by the electric signal of the photomultiplier and dividing it by the solid angle (dΩ) measured by the plastic scintillator. Strictly speaking, [B] is not the proton energy spectrum, since the reactivity of the detection system that varies with proton energy is not taken into account. However, for one proton energy, the intensity of the electrical signal is proportional to the number of particles of the proton. Considering the noise level of the electrical signal, the maximum energy of the protons is in good agreement with the results obtained in [A].

6 shows the Thomson parabola of protons measured by a second ion analyzer. The strength of the applied electric field is 240 V / mm and the strength of the magnetic field is 0.16 T. The middle straight line is obtained without connecting a high voltage power supply to the electrode, and the upper and lower parabolas are obtained by changing the polarity of the power applied to the electrode. Image plates were used as ion detectors.

에 따라 변하는 광여기 냉광을 보여준다. 양성자가 편향거리

=21.387 mm에서부터 검출되기 시작하므로, 발생된 양성자의 최대 에너지는 1.685 MeV이다(도 4 및 편향거리와 양성자 에너지의 관계식 참조).The result of analyzing the Thomson parabola of FIG. 6 obtained by the image plate is shown in FIG. 7. By analyzing an image plate exposed to ions with an image plate reader, a photo-stimulated luminescence (PSL) value can be measured. Fig. 7A shows the deflection distance of the protons in the direction deflected by the magnetic field.

The light changes depending on the cold light here. Proton Deflection Distance

Since the detection starts from = 21.387 mm, the maximum energy of protons generated is 1.685 MeV (see FIG. 4 and the relation between deflection distance and proton energy).

[B] of FIG. 7 shows photoexcitation cold light drawn as a function of proton energy. The transverse axis data were calculated by converting the deflection distance into proton energy. The vertical axis data was calculated by multiplying the rate of change of the deflection distance (dx / dT) with respect to the change in proton energy by photoexcitation cold light and dividing it by the solid angle (dΩ) of the proton beam measurement corresponding to the spatial resolution of the image plate reader. Strictly speaking, [B] is not the proton energy spectrum because the responsiveness of the image plate that changes with the proton energy is not taken into account. Considering the noise level of photoexcitation, the maximum energy of protons is in good agreement with the results obtained in [A].

The result of FIG. 5 obtained by the first ion analyzer and the result of FIG. 7 obtained by the second ion analyzer are measured by using both analyzers simultaneously. The maximum energy of the protons obtained by the two analyzers is in good agreement with each other, and the electric signals on the longitudinal axis of each [B] and the intensity of photoexcitation are different depending on the proton energy. This fact means that the characteristics of the ions measured by the two ion analyzers are in good agreement, and thus the reliability of the properties measured by the respective analyzers can be improved. And, looking at the Thompson parabola of Figure 6 it can be seen that there is only one type of proton generated. Therefore, it can be assured that the electrical signal obtained by the first ion analyzer is generated only by protons. As such, the second ion analyzer compensates for the shortcomings of the first ion analyzer which cannot analyze the type of ions.

이온의 경우, 그 전하가 양성자에 비해 4배나 크고, 양성자의 에너지 0.5 MeV에 해당하는 전하당 등에너지 선까지 방출되므로,

이온의 최대 에너지는 2 MeV 정도이다. 한편 탄소 이온들이 가지는 최대 속도에 해당하는 등속도 선이 도 8에 점선으로 표시되어 있다. 이 등속도 선은 에너지가 0.2 MeV 이상인 양성자의 톰슨포물선과 만나지 않는다. 따라서 이 이온선원을 제1 이온분석기로 분석할 경우, 에너지 0.2 MeV 이상에서 생기는 전기신호는 양성자만에 의한 것이라는 결론을 내릴 수 있다.8 is a second ion analyzer measuring ions generated when the ultra-high power laser beam is focused on a copper target having a thickness of 5 μm. This is the result measured only by the second ion analyzer without using the first ion analyzer together. Not only protons but also carbon ions with different degrees of ionization were generated. The maximum energy of protons generated is about 2.2 MeV. The maximum energy of the carbon ions can be calculated from the isoenergy lines per charge drawn in the horizontal lines in FIG. 8.

In the case of ions, the charge is four times larger than that of the proton, and is emitted up to the isoenergy line per charge corresponding to 0.5 MeV of proton energy.

The maximum energy of the ion is about 2 MeV. Meanwhile, the constant velocity line corresponding to the maximum velocity of carbon ions is indicated by a dotted line in FIG. 8. This isoline does not meet the Thomson parabola of protons with energy above 0.2 MeV. Therefore, when the ion source is analyzed by the first ion analyzer, it can be concluded that the electric signal generated at the energy of 0.2 MeV or more is due to only the protons.

1 is a cross-sectional view showing the internal cross section of the composite ion analyzer according to a preferred embodiment of the present invention;

Fig. 2 is a schematic diagram showing the detailed structure of the first ion analyzer and the second ion analyzer and the path of ions and flashes of this embodiment.

3 is a graph showing the Thomson parabola of protons and carbon detected in the ion detector,

4 is a graph showing flight time and deflection distance for each energy of an ion according to the present embodiment;

5 is a graph showing the characteristics of ions analyzed using the values measured in the first ion analyzer;

FIG. 6 is a graph showing Thomson parabola of ions measured in a second ion analyzer; FIG.

7 is a graph showing the characteristics of ions analyzed using FIG. 6;

FIG. 8 is a graph showing Thomson parabola of ions measured by a second ion analyzer when an ultra-high power laser is focused on a copper target.

<Description of Signs of Major Parts of Drawings>

1: ion incidence device 5: scintillation generating device

6: reflector 7: lens

17: alignment inspection device 100: complex ion analyzer

110: first ion analyzer 120: second ion analyzer

Claims (20)

A flash generating member for selectively passing only a part of ions with respect to the ion beam source; A Thomson parabolic ion analyzer that measures a distance at which ions passing through the scintillator are deflected by an electromagnetic field; And, And an ion flight time analyzer that measures the flight time of ions using the flash generated by the ions hitting the flash generating member. The method of claim 1, The flash generating member is a composite ion analyzer, characterized in that the first through-hole is formed through which the ions of the ion source can pass. The method of claim 2, The flash generated by the ions hitting the flash generating member is converted into a path by a reflector provided on the rear side of the flash generating member is introduced into the ion flight time analyzer, characterized in that the flow. The method of claim 3, The ion passing through the first hole is passed through the second hole formed inside the reflector, the composite ion analyzer, characterized in that flowing into the Thomson parabolic ion analyzer. A part of the incident ions hit and a part of the ions are formed so as to pass, and when the ions hit a flash generating member for emitting a flash; A first ion analyzer for analyzing the characteristics of ions using the flash emitted from the flash generating member; And, And a second ion analyzer for analyzing the characteristics of the ions passing through the flash generating member. The method of claim 5, The scintillation generating member has a first ion through which a portion of the ion can pass. The method of claim 6, Further comprising a reflector for switching the path of progress of the flash, The flash is incident on the first ion analyzer by forming a different path from the ions passing through the first hole by the reflector. The method of claim 7, wherein The reflector has a second hole through which ions can pass, and the ion passing through the first hole of the scintillation generating member is incident to the second ion analyzer through the second hole. . The method of claim 8, The first hole and the second hole is a composite ion analyzer, characterized in that installed in parallel with the incident portion where the ions are incident. 10. The method of claim 9, And an alignment tester capable of measuring an alignment state of each component forming a path through which the ions reach the second ion analyzer. The method of claim 10, The alignment inspection device is a complex ion analyzer, characterized in that for checking the alignment state of the first through the second hole and the incident portion. The method of claim 10, The alignment inspection device is installed at a position opposite to the incident portion, the composite ion analyzer, characterized in that for irradiating the laser along the path of the ions. 10. The method of claim 9, Complex ion analyzer, characterized in that it further comprises a position control device for collectively adjusting the position of each component forming the path of the ion or flash. 10. The method of claim 9, And a position adjusting device capable of individually adjusting positions of the components forming the path through which the ions or flashes travel. The method of claim 5, The first ion analyzer is a complex ion analyzer, characterized in that for analyzing the energy spectrum of the ion by measuring the time it takes for the ion to fly a predetermined distance. The method of claim 15, The first ion analyzer is a composite ion analyzer, characterized in that for measuring the time to reach the scintillation generating member from the point of generation of ions. The method of claim 15, The first ion analyzer is a complex ion analyzer characterized in that it comprises a flash detector for detecting each of the flash to convert to an electrical signal and a flight time measuring device for measuring the flight time of the ion. The method of claim 17, And the first ion analyzer further comprises a lens for imaging each of the flashes at different positions on the flash detector according to a position at which the flash is emitted from the flash generating member. The method of claim 5, The second ion analyzer is a composite ion analyzer, characterized in that for measuring the energy spectrum and type of the ion by measuring the amount of ions deflected when passing through a predetermined electric and magnetic fields. The method of claim 5, The second ion analyzer further comprises a collimator that can limit the spatial size of the ions flowing into the electromagnetic field.

Images