KR20100025131A - Articulated robot which align its arms easily - Google Patents

Abstract

PURPOSE: An articulated robot capable of easily aligning arms is provided to precisely align a plurality of arms when the power source between two timing bolts is isolated. CONSTITUTION: An articulated robot comprises idle pulleys(400,500) and a timing belt. The idle pulley is installed on between a drive part and a driven part of the arms. The timing belt partitions drive part and driven part timing belts(610,620,611,621) into two parts in the longitudinal direction. The drive part timing belt connects driving pulleys and idle pulley. The driven part timing belt connects the idle pulley and driven part pulleys. The idle pulley is divided into drive part and driven part idle pulleys in an axial direction. The drive part and driven part idle pulleys can be meshed with one another or separated.

Description

Articulated robot which align its arms easily}

The present invention relates to a multi-joint robot, and more particularly, it is possible to perform arm alignment easily and accurately by cutting off the power connection between the arm and the arm as required, and enabling independent rotation of each joint and the arm as necessary. It also relates to a multi-joint robot that is made to be stable and quiet.

The articulated robot, which is frequently used in a conveyance process of a work such as a glass substrate for a liquid crystal panel or a semiconductor wafer, has a stacking part placed at a plurality of points by stretching and expanding a plurality of arms by driving a joint part ( Eg transfer the workpiece between cassettes.

Various conventional examples of such articulated robots are disclosed in Korean Patent No. 10-0487152 and Japanese Patent No. 3881579.

Conventional articulated robots, including the robots disclosed in the above publications, are typically arranged sequentially by partially overlapping a plurality of arms on a base table, articulating adjacent arms jointly, and jointly connecting the adjacent arms to the tip of the final arm. The end mount is articulated, the end mount is equipped with a hand for handling a workpiece, and each joint portion is formed by a power belt connected by a timing belt. Therefore, when the respective joints are rotated by the motor and the respective timing belts, a plurality of arms are unfolded or folded so that the hand of the end is moved forward and backward.

In such a conventional articulated robot, the arms must be assembled with the correct relative positions at the time of initial assembly to ensure the straightness of the hand, and thus the positions of the plurality of arms must be accurately aligned at the time of initial assembly.

However, the above articulated articulated robots have a structure in which a plurality of timing belts are continuously constrained to one motor so that when one arm moves, the other arms move simultaneously. When turning, all the other arms will turn accordingly, which not only requires a lot of time and effort to align the arms, but also does not guarantee the precision as much as the time and effort.

In addition, when using the articulated robot when the arms are misaligned or when one of the timing belts needs to be replaced to realign the arms, the arms cannot be moved independently, making it difficult and precise. There is this.

In addition, the conventional articulated robot has a disadvantage in that the timing belt is sag due to deflection of the timing belt because of the structure in which two joints are separated from each other in a long distance.

The present invention was developed to solve the above conventional problems, by making it possible to isolate or break the power connection between the arm and arm so that each joint and the arm can be independently rotated, easy alignment of the arm It is an object of the present invention to provide a multi-joint robot which can be finely and precisely performed and which is stable and quiet.

In order to achieve the above object, the articulated robot according to the present invention jointly connects a plurality of arms to each other on a base table so as to be pivotable, and has an end mount on which the hand for handling a workpiece is mounted at the front end of the final arm. An articulated robot rotatably articulated and electrically connected between both articulation portions of each arm with a timing belt, comprising: an idle pulley being installed at an intermediate portion between the driving articulation portion and the driven articulation portion of each arm; The timing belt which connects the pulley of the driving joint and the pulley of the driven joint is divided into two parts in the longitudinal direction by the driving timing belt and the driven timing belt. A pulley is connected to connect the pulley, and the driven timing belt is installed to connect the idle pulley and the driven pulley; The idle pulley is divided into an axial direction into a driving idle pulley to which the driving side timing belt is connected and a driven idle pulley to which the driven side timing belt is connected, and the divided idle driving pulley and the driven idle pulley are divided in two directions. It is characterized by being integrally coupled to each other in a detachable state.

In the articulated robot of the present invention, the driving idler pulley and the driven idler pulley are rotatably supported by the respective arms, and the opposing faces are axially opposed to each other and are detachably integrally coupled by bolts. do.

Articulated robot according to another direction of the present invention, the base; A first arm rotatably articulated about a first articulation axis at the tip of the base; A second arm pivotally connected to a tip of the first arm about a second joint axis; An end mount that is rotatably articulated about a third joint axis at the tip of the second arm and to which a work handling hand is mounted; A main drive pulley rotatably connected to the first joint shaft in the base to receive power from a drive source; A first driving pulley rotatably installed on the first joint shaft while being integrally coupled with the main drive pulley in the first arm; A first driven pulley rotatably mounted to the second joint shaft inside the first arm; A second driving pulley rotatably installed on the second joint shaft while being integrally coupled to the first driven pulley of the second joint shaft within the second arm; A second driven pulley rotatably mounted to the third joint shaft inside the second arm; The first driving side idler pulley and the first driven side pulley are divided into two in the axial direction, and the two divided first driving side idler pulley and the first driven side idler pulley are integrally coupled to each other so as to be integral with each other. A first idler pulley rotatably installed in the longitudinal middle portion of the one arm; The second driving pulley pulley and the second driven pulley pulley is divided into two in the axial direction, the two divided second driving pulley idle pulley and the second driven pulley pulley is integrally coupled to each other in a state that the first pulley. A second idle pulley rotatably installed in the longitudinal middle portion of the two arms; A first driving side timing belt connecting the first driving pulley and the first driving side idle pulley; A first driven side timing belt connecting the first driven side idle pulley and the first driven pulley; A second driving side timing belt connecting the second driving pulley and the second driving side idle pulley; And a second driven side timing belt connecting the second driven side idle pulley and the second driven pulley.

The first idler pulley includes a frame mounted to the first arm, and the first driving pulley pulley and the first driven pulley pulley are rotatably installed on the frame in a state in which they face each other. The first driving side idle pulley and the first driven side idle pulley are detachably coupled by a binding hole; The second idler pulley includes a frame mounted to a second arm, and the second driving side idler pulley and the second driven side idler pulley are rotatably installed in the frame in a state in which they face each other, and the second drive that is in contact with each other. The side idle pulley and the second driven idle pulley are detachably coupled by a binding hole.

And it is preferable that the through-hole through which the binding hole passes is made of an arc-shaped long hole to allow the circumferential flow of the binding hole.

According to the articulated robot of the present invention, the timing belt connecting the driving joint and the driven joint is divided into two via an idle pulley, and the power between two timing belts divided by two is separated by separating the idle pulley. Since the plurality of arms can be moved independently in the state, the alignment of the arms can be easily performed, and the alignment is precise.

In addition, since the length of the timing belt is shortened, the deflection of the belt is reduced, so that driving is smooth and quiet, and the width of the belt can be reduced.

The articulated robot of the present invention has a structure in which a plurality of arms are jointly connected to each other sequentially on a base table so as to be pivotable with each other, and an end mount on which a work handling hand is mounted is rotatably connected to the front end of the final arm. In the articulated robot of, an idle pulley of a combined configuration is installed in a middle portion between two joints of each arm, and a timing belt connecting both joints is divided into two parts (ie, 2 Two timing belts) by winding the divided timing belts through the idle pulleys to selectively connect or disconnect the power of both joints through the idle pulleys, thereby separating the idle pulleys By turning the arm independently, it is possible to perform the alignment of the arm.

The detailed structure of the articulated robot of this invention is demonstrated in detail, referring an accompanying drawing.

1 and 2 show a multi-joint robot according to a first embodiment of the present invention, in which FIG. 1 is a front view and FIG. 2 is a plan view.

As shown in FIGS. 1 and 2, the articulated robot includes a base 10 and a first pivotally connected to the front end of the base 10 about a first articulation axis 15. On the tip of the second arm 200 and the arm 100, the second arm 200 is pivotally articulated around the second joint shaft 25 to the tip of the first arm 100, And an end mount 300 rotatably articulated about the third joint shaft 35 and to which the work handling hand 2 is mounted.

The main drive pulley 110 is rotatably installed on the first joint shaft 15 in the base 10, and a first drive on the first joint shaft 15 in the first arm 100. The pulley 120 is rotatably installed. The first drive pulley 120 is integrally coupled with the main drive pulley 110.

In addition, the first driven pulley 210 is rotatably installed on the second joint shaft 25 in the first arm 100, and the second joint shaft 25 is formed on the second joint shaft 25 in the second arm 200. A second drive pulley 220 is rotatably installed and integrally coupled with the first driven pulley 210.

In addition, the second driven pulley 310 is rotatably installed on the third joint shaft 35 inside the second arm 200.

The main drive pulley 110 receives power from the drive source 4. In this embodiment, the main drive pulley 110 is connected to the pulley 6 of the drive source 4 made of a motor through a drive belt 8 to receive power. .

Accordingly, the power from the drive source 4 is driven by the drive belt 8-> main drive pulley 110-> first drive pulley 120-> first driven pulley 210-> second drive pulley 220. It is transmitted to the end mount 300 through the second driven pulley 310.

The first arm 100 is pivotally connected to an output end of the first reduction gear 130 that is power-drawn from the integrated main drive pulley 110 and the first drive pulley 120, and the second arm 100 rotates. The arm 200 pivots by being connected to an output end of the second deceleration device 230 which is pulled out of the integrated first driven pulley 210 and the second driving pulley 220. The end mount 300 is pivotally connected to an output end of a third reduction gear 330 that is powered by the second driven pulley 310.

In particular, in the present invention, the timing belt connecting the two joints of the arms 100 and 200 is divided into two, and the divided timing belt is passed through the idle pulley. To this end, a first idle pulley 400 is installed between the first driving pulley 120 and the first driven pulley 210, and the second driving pulley 220 and the second driven pulley 310 are installed. The second children pulley 500 is installed between).

The first idle pulley 400 is divided into a first driving side idle pulley 410 and a first driven side idle pulley 420 in its axial direction (up and down direction in FIG. 1), and the divided first driving side. And the driven idle pulleys 410 and 420 are coupled to each other by a binding hole 430 so as to be separated from each other (ie, to be disconnected without restraining each other by disconnecting power).

Similarly, the second idle pulley 500 is divided into a second driving side idle pulley 510 and a second driven side idle pulley 520 in its axial direction, and the divided second driving side and driven idle pulleys. The 510 and 520 are detachably coupled to each other by the binding hole 530. Service holes 101 and 201 for inserting a tool such as a wrench for releasing the binding holes 430 and 530 are formed in the lower surfaces of the first arm 100 and the second arm 200.

The timing belt connecting the first driving pulley 120 and the first driven pulley 210 is divided into a first driving side timing belt 610 and a first driven side timing belt 611, and the first driving pulley 120 is connected to the first driving pulley 120. The driving side timing belt 610 connects the first driving pulley 120 and the first driving side idle pulley 410, and the first driven side timing belt 611 is connected to the first driven side idle pulley 420. 1 driven pulley 210 is connected.

Similarly, the timing belt connecting the second driving pulley 220 and the second driven pulley 310 is divided into a second driving side timing belt 620 and a second driven side timing belt 621, and thus the second driving pulley 220 is connected to the second driving pulley 310. The second driving side timing belt 620 connects the second driving pulley 220 and the second driving side idle pulley 510, and the second driven side timing belt 621 is connected to the second driven side idle pulley 520. The second driven pulley 310 is connected.

Meanwhile, as shown in FIG. 2, the first driving side timing belt 610, the first driven side timing belt 611, the second driving side timing belt 620, and the second driven side timing belt 621. In the middle of the extension path of the tensioner (tensioner) (700) can be installed. The tensioner 700 adjusts the tension of the belt and increases the contact angle with the pulley so that power transmission is made more smoothly.

In the present invention made as described above, when the relative position (angle) between the arms (100, 200) and the end mount 300 is to be adjusted, that is, when the alignment of the arms should be performed, for example, articulated In the final process of manufacturing the robot, or while using the robot in the actual process, when the arms are completely folded as shown in FIG. 2, the arm alignment (or realignment) should be performed. .

First, in the state where the operation of the driving source 4 is stopped and the restraining force of the driving source 4 is also removed (if the motor is in a state where the brake of the motor itself is released), the service hole 101 of the first arm 100 is opened. By releasing the binding port 430 of the first idler pulley 400, the first driving side idler pulley 410 and the first driven side idler pulley 420 are separated from each other so as to be able to swing. Then, the second arm 200 can be freely rotated alone with respect to the first arm 100.

Subsequently, while slowly turning the second arm 200 by hand, the position of the first arm 100 and the second arm 200 is accurately adjusted using various measuring equipment. After adjusting the position, when the binding hole 430 is fastened again to recombine the first driving side idle pulley 410 and the first driven side idle pulley 420, the first arm 100 and the second arm 200 are mounted. The power is reconnected with the alignment of) correct.

Next, the second arm 200 is rotated slightly by hand to expose the service hole 201, and then the binding hole 530 is released through the service hole 201 to the second driving side idle pulley 510. The second driven side idle pulley 520 is separated to make a state in which each other can turn away. Then, the end mounting unit 300 is freely rotated (or pivoted) with respect to the second arm 200.

Subsequently, the end mount 300 is slowly rotated by hand to accurately position the second arm 200 and the end mount 300 using various measuring equipment. After adjusting the position, the binding sphere 530 is re-engaged to recombine the second driving side idle pulley 510 and the second driven side idle pulley 520, and the first arm 200 and the end mount 300 The power is reconnected with the alignment of) correct.

Thus, by releasing the first and second idle pulleys 400 and 500, respectively, the first arm 100 and the second arm 200, and the second arm 200 and the end mount 300 are separated. By releasing the connection state, the first arm 100, the second arm 200, and the end mount 300 can be moved alone, so that the arm alignment work can be performed very easily and accurately.

3 is a cross-sectional view of an essential part showing in detail the installation structure of the idle pulleys 400 and 500 and the tensioner 700 described above.

As shown in FIG. 3, the first idler pulley 400 and the second idler pulley 500 are fasteners 440 and 540 such as bolts to the first arm 100 and the second arm 200, respectively. Is fixed by. The first idler pulley 400 is divided into a first driving side idler pulley 410 and a first driven side idler pulley 420 in the vertical direction, and is detachably coupled by the binding hole 430. The second idle pulley 500 is divided into a second driving side idle pulley 510 and a second driven side idle pulley 520 and detachably coupled by a binding hole 530.

The tensioner 700 is configured to mount the tension pulley 710 on the first arm 100 and the second arm 200 in a rotatable state through the shaft 720. As the tensioner 700, a known 'auto tensioner' which automatically adjusts the tension with a set force may be used.

4 to 6 show the structure of the first idler pulley and the second idler pulley according to the present invention, a perspective view is shown in FIG. 4, a bottom view of FIG. 4 is shown in FIG. 5, and FIG. 4 is a cross-sectional view. Since the first idler pulley 400 and the second idler pulley 500 are configured in the same configuration, the first and second idler pulleys 400 and 400 are shown in one drawing. Reference numerals for the components of the first idler pulley 400 are first described, and the components of the second idler pulley 500 are written using parentheses.

As shown in FIGS. 4 and 5, idle pulleys 400 and 500 include frames 401 and 501 that are secured to arms 100 and 200, and that of frames 401 and 501. The driving idler pulleys 410 and 510 and the driven idler pulleys 420 and 520 are installed in a relatively rotatable state to face each other in an up and down direction, and are provided through binding holes 430 and 530 such as bolts. It is detachably coupled to each other.

In addition, through holes 421 and 521 are formed in the driven idle pulleys 420 and 520 to fasten the binding holes 430 and 530, and female thread holes in the driving idle pulleys 410 and 510. 411 and 511 are formed. In the present embodiment, the through holes 421 and 521 are centered on the rotation axis (ie, the rotation center axis) of the idle pulleys 400 and 500 to allow the circumferential flow of the binding holes 430 and 530. It is made in the form of an arc-shaped long hole extending in the circumferential direction. Accordingly, circumferential flow of the binding ports 430 and 530 is possible in a state in which the binding holes 430 and 530 are not completely separated from the idle pulleys and released only a small amount of the binding force. Therefore, the relative rotation of the driving idle pulleys 410 and 510 and the driven idle pulleys 420 and 520 can be performed within the angle range allowed by the arc length of the through holes 421 and 521. By doing so, it is possible to adjust the degree to some extent even when the binding ports 430 and 530 are not completely removed.

In addition, the female threaded holes 411 and 511 are formed in the circumferential direction more densely than the number of the through-holes 421 and 521 so that the driving idler pulleys 410 and 510 and the driven idler pulley ( No matter where the 420 or 520 is located, only one female threaded hole 411 or 511 enters the inside of one through hole 421 or 521 so that the alignment of the arm can be made finer. To facilitate the fastening of the (430) (530).

In addition, the tool insertion groove (SH) is formed on the end surface of the driven idle pulley (420, 520). In the tool insertion groove SH, for example, an 'L-shaped wrench' is inserted to finely control the driving idler pulleys 410 and 510 and the driven idler pulleys 420 and 520 when the robot is assembled. To make it possible.

As shown in more detail in FIG. 6, the frames 401, 501 of the idle pulleys 400, 500 are each arm 100, 200 by fasteners 440, 540 described above. It is fixed inside. In addition, the driving side idle pulleys 410 and 510 are rotatably supported on an upper portion of the frames 401 and 501 by bearings 412 and 512, and driven side idle pulleys 420 and 520. The lower end thereof is rotatably supported by the bearings 422 and 522 at the bottom of the frames 401 and 501.

In addition, the free ends of the driving idler pulleys 410 and 510 and the driven idler pulleys 420 and 520 are opposed to each other by the coupling shafts 413 and 513 and the coupling grooves 423 and 523. It is fitted in a state where relative rotation is possible. The binding holes 430 and 530 pass through the through-holes 421 and 521 of the driven idle pulleys 420 and 520 so that the female thread holes 411 and 511 of the idle idle pulleys 410 and 510 are driven. By coupling to the driving idler pulleys (410, 510) and the driven idler pulleys (420, 520) are integrated.

In the case of slight misalignment between the arms, the binding holes 430 and 530 are slightly relaxed to perform alignment. In the state where only the binding holes 430 and 530 are loosened and only the restraining force between the driving side idle pulleys 410 and 510 and the driven side idle pulleys 420 and 520 is removed (released), the through holes 421 and 521 are removed. The driving idler pulleys 410 and 510 and the driven idler pulleys 420 and 520 can be freely rotated within this allowable range. On the contrary, when the deviation between the arms is large or the arm needs to be rotated a lot, the alignment operation is performed with the binding holes 430 and 530 completely removed, and after the alignment, the binding holes 430 and 530 are removed. Re-engagement recombines the driving idler pulleys 410 and 510 and the driven idler pulleys 420 and 520.

As described above, the articulated robot according to the present invention is divided into two timing belts connecting the driving joint and the driven joint of the arm via an idle pulley, and two timings divided into two through separation of the idle pulley. Arm alignment can be easily and precisely performed because the plurality of arms can be moved independently by interrupting power between the belts.

In addition, since the length of the timing belt is shortened, the sagging of the belt is reduced, so that the driving is smooth and quiet.

Therefore, the articulated robot according to the present invention requires particularly high precision and accuracy and productivity, such as a flat panel (e.g., LCD, PDP, FED, OLED), a conveying system of a semiconductor wafer manufacturing process line, and a loading / unloading system. In a highly competitive process, arms of an articulated robot can always be easily aligned and precisely aligned, resulting in improved product quality and productivity.

In the above, specific embodiments of the present invention shown in the accompanying drawings have been described in detail, but these are merely illustrative of the preferred embodiments of the present invention, and the scope of protection of the present invention is not limited thereto. In addition, the embodiments of the present invention as described above can be variously modified and equivalent other embodiments by those of ordinary skill in the art within the technical spirit of the present invention, such modifications and equivalent other embodiments are naturally It belongs to the appended claims of the present invention.

1 is an overall structural diagram of a multi-joint robot according to a first embodiment of the present invention.

2 is a plan view of FIG. 1.

3 is a cross-sectional view of an essential part showing an actual installation structure of an idle pulley and a tensioner according to the present invention.

Figure 4 is a perspective view showing in detail the idle pulley according to the present invention.

5 is a bottom view of FIG. 4.

6 is a cross-sectional view of FIG. 4.

Description of the main parts of the drawing

2: hand 4: drive source

8: Drive Belt 10: Foundation

15: first joint axis 25: second joint axis

35: third joint axis 100: first arm

110: main drive pulley 120: first drive pulley

130: first reduction device 200: second arm

201: service hall 210: first driven pulley

220: second drive pulley 230: second reduction gear

300: end mount 310: second driven pulley

320: third reduction device 400: first children pulley

401 and 501: Frame 410: First driving side idle pulley

411, 511: female threader 412, 422, 512, 522: bearing

413 and 513: coupling shaft 420: first driven idle pulley

421, 521: through hole 423, 523: coupling groove

430 and 530: binding port 610: first drive side timing belt

611: first driven side timing belt 620: second driven side timing belt

621: second driven side timing belt 700: tensioner

Claims (7)

Articulating a plurality of arms sequentially pivotally to each other on the base frame, and jointly rotatably connecting the end mount on which the hand for handling the work is mounted on the tip of the final arm, and timing between the joints of the two arms In the articulated robot powered by a belt, An idle pulley is installed in an intermediate portion between the drive side joint portion and the driven side joint portion of each arm, The timing belt which connects the pulley of the driving joint and the pulley of the driven joint is divided into two parts in the longitudinal direction by the driving timing belt and the driven timing belt. It is installed to connect the pulley, the driven timing belt is installed to connect the idle pulley and the driven pulley, The idle pulley is divided into an axial direction into a driving idle pulley to which the driving side timing belt is connected and a driven idle pulley to which the driven side timing belt is connected, and the divided idle driving pulley and the driven idle pulley are divided in two directions. Multi-joint robot, characterized in that integrally coupled to each other in a detachable state. The method of claim 1, And the driving idler pulley and the driven idler pulley are rotatably supported by the respective arms, and the opposing surfaces thereof are axially opposed to each other and are integrally detachably coupled by bolts. With the base 10, A first arm 100 rotatably articulated about a first articulation axis 15 at the tip of the base 10; A second arm 200 rotatably articulated about a second joint shaft 25 at the tip of the first arm 100, An end mount 300 that is rotatably articulated about a third joint shaft 35 at the tip of the second arm 200 and to which a work handling hand 2 is mounted; A main drive pulley 110 rotatably connected to the first joint shaft 15 in the foundation 10 to receive power from a driving source; A first drive pulley 120 rotatably installed on the first joint shaft 15 in a state in which the first arm 100 is integrally coupled with the main drive pulley 110; A first driven pulley 210 rotatably installed on the second joint shaft 25 in the first arm 100; A second drive rotatably installed on the second joint shaft 25 in a state in which the second arm 200 is integrally coupled with the first driven pulley 210 of the second joint shaft 25. Pulley 220, A second driven pulley 310 rotatably installed on the third joint shaft 35 in the second arm 200; It is divided into a first driving side idle pulley 410 and a first driven side idle pulley 420 in the axial direction, so that the two divided first driving side idle pulley 410 and the first driven side idle pulley 420. A first idler pulley 400 which is integrally coupled to each other in a detachable state and rotatably installed in a longitudinal middle portion of the first arm 100, The second driving side idle pulley 510 and the second driven side idle pulley 520 are divided into two in the axial direction, so that the second divided second driving side idle pulley 510 and the second driven side idle pulley 520 are divided. A second idle pulley 500 which is integrally coupled to each other in a detachable state and rotatably installed in a longitudinal middle portion of the second arm 200, A first driving side timing belt 610 connecting the first driving pulley 120 and the first driving side idle pulley 410; A first driven side timing belt 611 connecting the first driven side idle pulley 420 and the first driven pulley 210; A second driving side timing belt 620 connecting the second driving pulley 220 and the second driving side idle pulley 510; And a second driven side timing belt (621) connecting the second driven side idle pulley (520) and the second driven pulley (310). The method of claim 3, The first idler pulley 400 includes a frame 401 mounted to the first arm 100, and the first driving side idler pulley 410 and the first driven side idler pulley 420 face each other. The first driving side idle pulley 410 and the first driven side idle pulley 420, which are rotatably installed in the frame 401 and are coupled to each other, are detachably coupled to each other by a binding hole 430. Articulated robot, characterized in that. The method of claim 4, wherein The through hole (421) through which the binding port (430) passes, the articulated robot, characterized in that made of an arc-shaped long hole that allows the circumferential flow of the binding port (430). The method of claim 3, The second children pulley 500 includes a frame 501 mounted to the second arm 200, and the second driving side idle pulley 510 and the second driven side idle pulley 520 are opposed to each other. It is rotatably installed on the frame 501 in a state, and the second driving side idle pulley 510 and the second driven side idle pulley 520 which are opposed to each other are detachably coupled by the binding hole 530. Articulated robot. The method of claim 6, The through hole 521 through which the binding hole 530 passes is an articulated robot, comprising an arc-shaped long hole allowing circumferential flow of the binding hole 530.

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