KR20100012991A - Apparatus and method for detecting a position - Google Patents
Apparatus and method for detecting a position Download PDFInfo
- Publication number
- KR20100012991A KR20100012991A KR1020080074456A KR20080074456A KR20100012991A KR 20100012991 A KR20100012991 A KR 20100012991A KR 1020080074456 A KR1020080074456 A KR 1020080074456A KR 20080074456 A KR20080074456 A KR 20080074456A KR 20100012991 A KR20100012991 A KR 20100012991A
- Authority
- KR
- South Korea
- Prior art keywords
- reference block
- optical sensor
- detecting
- edge
- sides
- Prior art date
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
- G01R1/0433—Sockets for IC's or transistors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2891—Features relating to contacting the IC under test, e.g. probe heads; chucks related to sensing or controlling of force, position, temperature
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
A position detection method is disclosed. A position of a corner having a predetermined distance from the test socket is detected among the upper surfaces of the reference block integrally assembled with the test socket for inspecting the at least one semiconductor module. Next, the position of the test socket is detected based on the position of the detected upper surface edge. Therefore, the position of the test socket for the semiconductor module to test can be detected at once through the reference block.
Description
The present invention relates to a position detection method and apparatus, and more particularly, to a method and apparatus for detecting the position of the test socket for inspecting the semiconductor module.
In general, a semiconductor module includes an adhesion process of bonding a wafer on which semiconductor chips are formed to an adhesive sheet, a sawing process of cutting the wafer bonded to the adhesive sheet to individualize each of the chips, and separating the individualized chip from the adhesive sheet. A chip separation step of attaching the chip separated from the adhesive sheet to a substrate, a wire bonding step of electrically connecting the chip with a connection pad of the substrate, and molding the chip with an epoxy resin. And a molding step, a terminal forming step of forming a connection terminal electrically extending from the substrate to the outside, and the like.
The semiconductor module manufactured as described above is further inserted into the inspection socket of the motherboard in a separate inspection facility to further inspect the electrical characteristics of the semiconductor module.
Accordingly, the position of the test socket into which the semiconductor module is inserted is first detected by the vision apparatus by using a vision device to detect the position of the test socket by the reference block in the motherboard outside of the test equipment. After detecting the position where the motherboard is mounted through the reference block therein, the position of the test socket is finally determined by analyzing the data detected by the first detection and the second detection.
As described above, since the position detection of the test socket is performed twice like the first detection and the second detection, the detection operation is complicated and cumbersome.
Accordingly, the present invention has been made in view of such a problem, and an object of the present invention is to provide a position detection method capable of detecting the position of an inspection socket at a time.
Another object of the present invention is to provide a position detection device to which the position detection method described above is applied.
In order to achieve the above object of the present invention, a position detection method according to one aspect is disclosed. A position of an edge having a predetermined distance from the inspection socket is detected among the upper surfaces of the reference block integrally assembled with the inspection socket for inspecting the at least one semiconductor module. Next, the position of the test socket is detected based on the position of the detected upper surface edge.
Here, the edge of the detected upper surface is a position where the first and second sides meet at right angles to each other, and thus, to detect the position of the upper surface edge of the reference block, the surface is reflected to face the upper surface of the reference block. Disposing a light sensor; moving the light sensor in directions parallel to each of the first and second sides of the upper surface; and analyzing a signal received as the light sensor moves to analyze the received signal. Measuring first and second distances between an initial position and the first and second sides, and calculating position coordinates of the upper surface edge through the measured first and second distances.
In order to achieve the above object of the present invention, a position detecting apparatus according to one aspect includes a reference block, a first detecting unit and a second detecting unit. The reference block is integrally assembled with an inspection socket for inspecting at least one semiconductor module. The first detector is disposed to face an upper surface of the reference block, and detects a position of a corner having a predetermined distance from the test socket of the upper surface. The second detector is connected to the first detector, and detects the position of the test socket based on the position of the edge of the upper surface detected by the first detector.
Here, the detected edge of the upper surface is a position where the first and second sides meet at right angles to each other, and thus the first detector includes an optical sensor, a transfer unit, and a calculation unit.
The optical sensor faces a top surface of the reference block and has a reflective feature. The transfer unit moves the optical sensor in directions parallel to each of the first and second sides of the upper surface. The calculating unit analyzes a signal received as the optical sensor moves to measure first and second distances between the initial position of the optical sensor and the first and second sides, and the measured first and second measurements. The position coordinates of the upper surface edge are calculated through the distances.
Meanwhile, the test socket and the reference block may be fixed to a surface opposite to other electronic components of the circuit board.
According to such a position detecting method and apparatus, the inspection socket and the reference block are integrally assembled to detect the position of the upper edge of the edge while maintaining the distance between the inspection socket and the upper edge of the reference block. By detecting the position of the inspection socket, the operation for inspecting the position of the inspection socket can be performed at once in the inspection facility.
Therefore, by shortening the time required to detect the position of the inspection socket to improve work efficiency therefor, it is possible to improve the productivity of the semiconductor module in which the inspection is performed in the inspection socket.
Hereinafter, with reference to the accompanying drawings will be described in detail a position detection method and apparatus according to an embodiment of the present invention. As the inventive concept allows for various changes and numerous embodiments, particular embodiments will be illustrated in the drawings and described in detail in the text. However, this is not intended to limit the present invention to the specific disclosed form, it should be understood to include all modifications, equivalents, and substitutes included in the spirit and scope of the present invention. In describing the drawings, similar reference numerals are used for similar elements. In the accompanying drawings, the dimensions of the structures are shown in an enlarged scale than actual for clarity of the invention.
Terms such as first and second may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as the second component, and similarly, the second component may also be referred to as the first component.
The terminology used herein is for the purpose of describing particular example embodiments only and is not intended to be limiting of the present invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this application, the terms "comprise" or "have" are intended to indicate that there is a feature, number, step, action, component, part, or combination thereof described on the specification, and one or more other features. It is to be understood that the present invention does not exclude the possibility of the presence or the addition of numbers, steps, operations, components, parts, or combinations thereof.
On the other hand, unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art. Terms such as those defined in the commonly used dictionaries should be construed as having meanings consistent with the meanings in the context of the related art and shall not be construed in ideal or excessively formal meanings unless expressly defined in this application. Do not.
1 is a configuration diagram schematically showing a position detection device according to an embodiment of the present invention, Figure 2 is a perspective view showing in detail the position of the reference block of the position detection device shown in FIG.
1 and 2, the
The
That is, the
In this case, in order to test the operating state of the
In addition, the
Alternatively, the
The
The test block for inspecting the
The
The
The
That is, the
In this case, the
Therefore, since it is difficult to change the position of the
Hereinafter, a method of detecting the position of the corner of the
FIG. 3 is a view of the position of the reference block shown in FIG. 2 from above, and FIG. 4 is an enlarged view of portion A of FIG. 3.
3 and 4, the
In this case, the
The
Accordingly, the
In this case, when the first and second distances d1 and d2 are less than about 3 mm, the control of the
As described above, the
The second detector 300 is connected to the
To this end, the distance between the
The detected position of the
Therefore, the reference is made in a state in which the
That is, by shortening the time required to detect the position of the
FIG. 5 is a flowchart schematically illustrating a method of detecting a position of an inspection socket using the position detection apparatus shown in FIG. 1.
1 to 5, in order to detect the position of the
Subsequently, the position of the corner of the
Accordingly, the
Subsequently, an accurate position of the
Subsequently, the exact position of the
As a result, the inspection process for the
Although the detailed description of the present invention has been described with reference to the preferred embodiments of the present invention, those skilled in the art or those skilled in the art will have the idea of the present invention described in the claims to be described later. It will be understood that various modifications and variations can be made in the present invention without departing from the scope of the present invention.
The present invention described above can be used in an apparatus capable of detecting the position of the test socket at one time by using a reference block integrally assembled with the test socket in the test facility.
1 is a configuration diagram schematically showing a position detection device according to an embodiment of the present invention.
FIG. 2 is a perspective view illustrating the position of a reference block in the position detecting apparatus shown in FIG. 1 in detail.
3 is a view as viewed from above the position of the reference block shown in FIG.
4 is an enlarged view of a portion A of FIG. 3.
FIG. 5 is a flowchart schematically illustrating a method of detecting a position of an inspection socket using the position detection apparatus shown in FIG. 1.
<Explanation of symbols for the main parts of the drawings>
10: semiconductor module 20: motherboard
30: electronic component 40: inspection socket
100: reference block 200: first detection unit
210: light sensor 220: transfer unit
230: calculator 300: second detector
1000: position detection device
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020080074456A KR20100012991A (en) | 2008-07-30 | 2008-07-30 | Apparatus and method for detecting a position |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020080074456A KR20100012991A (en) | 2008-07-30 | 2008-07-30 | Apparatus and method for detecting a position |
Publications (1)
Publication Number | Publication Date |
---|---|
KR20100012991A true KR20100012991A (en) | 2010-02-09 |
Family
ID=42087088
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020080074456A KR20100012991A (en) | 2008-07-30 | 2008-07-30 | Apparatus and method for detecting a position |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR20100012991A (en) |
-
2008
- 2008-07-30 KR KR1020080074456A patent/KR20100012991A/en not_active Application Discontinuation
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US20180136272A1 (en) | Fault detection apparatus | |
US7637413B2 (en) | X-ray inspection device and X-ray inspection method | |
US9593939B1 (en) | Glue thickness inspection (GTI) | |
US11506740B2 (en) | Test apparatus which tests semiconductor chips | |
KR20200007952A (en) | Temperature measuring method in inspection system and inspection system | |
CN102519351A (en) | Method for measuring warpage of electronic packaging product | |
US7187164B2 (en) | Apparatus for calibrating a probe station | |
US11756919B2 (en) | Wedge tool, bonding device, and bonding inspection method | |
Elger et al. | Inline thermal transient testing of high power LED modules for solder joint quality control | |
TW200739080A (en) | Connection point assembly and lsi chip detection device for the same | |
KR100889819B1 (en) | Semiconductor inspecting apparatus and control method thereof | |
JP2014199229A (en) | Inclination angle measuring method and inclination angle measuring device | |
KR20100012991A (en) | Apparatus and method for detecting a position | |
KR20090092426A (en) | Apparatus and method for bonding a die | |
KR100982343B1 (en) | Apparatus for measuring and calibrating error of stage in wafer prober | |
JP2012503758A (en) | Light-emitting element measuring device including solar module and measuring method thereof | |
US8875979B2 (en) | Apparatus and method for determining an alignment of a bondhead of a die bonder relative to a workchuck | |
CN107728038B (en) | Package testing system and method using contact alignment | |
JP2020201283A (en) | Substrate inspection device, inspection tool, and substrate inspection method therefor | |
JP2016100545A (en) | Inspection device and inspection method for semiconductor image sensor | |
US20140184782A1 (en) | System of measuring warpage and method of measuring warpage | |
KR20100012987A (en) | Method and apparatus for detecting a position | |
US20180164171A1 (en) | Method of correcting estimated force of bonding apparatus | |
JP2019028077A (en) | Substrate inspection device, positioning, and substrate inspection method | |
KR101188849B1 (en) | LED Device Inspection System |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E601 | Decision to refuse application |