KR20100006358A - Specimens-probes mounting holder for four-probe conductivity measurement - Google Patents

Abstract

PURPOSE: A specimens-probes mounting holder for four-probe conductivity measurement is provided to increase the accuracy of measurement by minimizing a contact size of a sample and a probe. CONSTITUTION: A specimen(1) is located on a lower support(10). A four-probe installation holes(22) are formed in upper support(20) at the fixed interval. A support fixing units(30) is separated by as much as set interval between the upper support and the bottom. 4 probes(40) comprises a body of the rod-shape and a head(42) of the sharp end form. The body installs to the probe installation hole. The head of the sharp end form is formed in the lower part of the body. An elastic members(50) pushes the head in the direction of the down support stand.

Description

Specimens-Probes Mounting Holder for Four-Probe Conductivity Measurement}

The present invention relates to a specimen-electrode mounting apparatus for measuring electrical conductivity, and to a specimen-electrode mounting apparatus for measuring 4-contact electrical conductivity used in the field of measuring the properties of semiconductor or ceramic materials.

The electrical conductivity of semiconductors and ceramics is one of the inherent properties of the material and is very important in terms of providing useful information on the chemical structure of the material or the industrial applicability of the property.

1 is a diagram illustrating an example of a probe arrangement for measuring 4-contact conductivity.

Referring to FIG. 1, in order to measure electrical conductivity of semiconductors and ceramics having a large electrical resistance, an external current J may be probed as an electrode J to overcome the problem of contact resistance between the specimen 1 and the multimeter. The proper contact arrangement between the specimen and the electrode is important because it flows through IV and the potential difference V between probes II and III is measured with a high impedance voltmeter.

2 and 3 is a view showing the contact form of the specimen and the probe for the conventional 4-contact electrical conductivity measurement.

Referring to FIG. 2, in the related art, a disk-shaped conductor 2 formed of platinum or gold as probes I and IV is used to apply an external current J, and a probe for measuring a potential difference is used. In II and III, the electrical conductivity was measured by wrapping a linear conductor (3) such as platinum wire around the specimen (1).

In another embodiment, as shown in FIG. 3, all of the probes I, II, III, and IV were surrounded by platinum conductors (platinum wire, etc.) wrapped around the specimen to measure electrical conductivity.

In order to obtain accurate and reproducible measurement results in the 4-contact conductivity measurement, the arrangement between the specimen-probe four-contact point must be uniformly standardized, and the contact size must be minimized.

However, in the conventional method as described above, in the case of the disk-shaped probe, it is difficult to standardize the contact arrangement according to the degree of flatness of the probe surface or the specimen surface. Each time the winding is changed and the contact arrangement can be different, there is a problem that the standardization is difficult.

In addition, in order to connect the probe to the specimen, the process of winding the specimen around with a linear conductor is cumbersome and inconvenient.

The present invention has been made to solve the above-mentioned problems of the prior art, in the four-contact electrical conductivity measurement to minimize the size of the specimen and the probe (probe) contact, standardize the formation of the four-contact array between the specimen and the probe, the measurement process The aim is to provide a specimen-electrode mounting device for 4-contact electrical conductivity measurement, which improves the accuracy and reproducibility of the measurement and reduces the labor of the experimenter.

Specimen-electrode mounting apparatus for measuring the four-contact electrical conductivity according to the present invention for solving the above problems is installed on the lower support, the upper support of the lower support, the four probes are installed, the four probes installed An upper supporter having holes formed at regular intervals, a support fixing part for fixing the upper support and the lower support by spaced apart by a predetermined interval, a rod-shaped body mounted to the probe installation hole and an end formed at the bottom of the body Four probes including a pointed head and an elastic body formed between the head of the probe and the upper support to push the head toward the lower support.

The probe further includes a first protrusion protruding from the body to a radius larger than a radius of the probe mounting hole to prevent the body from being pushed by the elastic body to be separated from the probe mounting hole.

The elastic body is inserted into the probe body, the spiral spring having a radius larger than the radius of the probe installation hole, or has an elastic plate formed in an arch shape in the lower direction having a hole in which the probe body is fitted It is characterized in that the spring in the form of a plate consisting of two support plates in close contact with the lower side of the upper support around the probe mounting hole on both sides of the elastic plate.

The probe may further include a second protrusion protruding from the body to a radius larger than a radius of the hole of the elastic plate so that the arch center of the elastic plate is supported.

The material of the elastic body is characterized in that the Inconel (Inconel).

The support fixture may be composed of four support screws and nuts.

The lower support is formed with holes in which the support fixing screw is fitted at four corners.

The upper support is formed at the four corners of the screw holes to be coupled with the support fixing screw.

Specimen-electrode mounting apparatus for 4-contact electrical conductivity measurement according to the present invention configured as described above to minimize the size of the specimen and the probe (probe) in the 4-contact electrical conductivity measurement to increase the accuracy of the measurement, the specimen and the probe ( By standardizing the formation of four contact arrays between probes, it is possible to obtain reproducible results by providing constant measurement conditions at all times, and to reduce the labor of the experimenter by simplifying the experiment process.

Hereinafter, with reference to the accompanying drawings will be described specific details and embodiments of the present invention.

4 is a cross-sectional view illustrating a specimen-electrode mounting apparatus for measuring 4-contact electric conductivity according to a first embodiment of the present invention.

Referring to FIG. 4, the specimen-electrode mounting apparatus for measuring the four-contact electrical conductivity according to the first embodiment of the present invention includes a lower support 10 in which the specimen 1 is positioned when the electrical conductivity is measured, and the lower support 10. The upper support 20, which is installed spaced apart from the upper side of the four probe mounting holes 22 are formed at regular intervals, the upper support 20 and the lower support 10 is fixed by spaced apart by a set interval And a support 50 fixed to the support 30, four probes 40 mounted on the probe mounting holes 22, and an elastic body 50 for pushing the probes toward the lower support such that the probes contact the specimen 1. It is configured by.

A material of the lower support 10 and the upper support 10 is preferably an alumina material, but is not limited thereto, and may be made of plastic or the like.

The lower support 10 and the upper support 10 is fixed in a state maintained at a constant interval by the support fixing portion 30, in this case the support fixing portion 30 is four support fixing screws 31 ) And the nut 32, but is not limited thereto.

In this case, the lower support 10 has a hole 11 into which the support fixing screw 31 is fitted at four corners, and the upper support 20 has a screw hole 21 coupled to the support fixing screw at four corners. ) Is formed.

The probe 40 includes a body 41 formed in a rod shape and a head 42 having a pointed tip formed at a lower portion of the body 41.

The body 41 of the probe is mounted in the probe mounting hole 22.

Four probe mounting holes 22 are formed at regular intervals in the upper support 20, and four probes are positioned in the four probe mounting holes 22.

An intermediate portion of the body of the probe 40 is larger than the radius of the probe mounting hole 22 to prevent the body 41 from being pushed by the elastic body 50 and being separated from the probe mounting hole 22. The first protrusion 43 with a larger radius is formed.

The head 42 of the probe has a pointed end shape so that the contact with the specimen 1 is minimized when the specimen 1 is mounted.

The head 42 of the probe has a radius greater than that of the body 41 that is connected to the body 41 of the probe. Strictly speaking, it should be larger than the radius of the elastic body 50. This is because the elastic body 50 can be stably positioned between the upper support 20 and the head 42. If the upper radius of the head 42 is smaller than the radius of the elastic body 50, a problem may occur in which the elastic body 50 leaves the head 42 of the probe.

The head 42 may have a conical shape, or may be formed in the form of a triangular pyramid, a square pyramid, or the like, and the shape of the part contacting the specimen 1 should be sharp. The shape of the probe head 42 is that when the specimen (1) is pushed between the lower support 10 and the probe 40, the probe 40 is naturally pushed up to the upper surface of the specimen (1) 42) can be positioned and at the same time, the contact with the specimen (1) is minimized and the contact arrangement is constant to improve the accuracy when measuring electrical conductivity.

The probe 40 as a whole has the shape of an arrowhead with a sharp tip.

The elastic body 50 is formed between the head 42 of the probe and the upper support 20 to push the head 42 toward the lower support 10. That is, when the specimen 1 is located on the lower support 10, the head 42 is always in contact with the specimen (1).

In the first embodiment of the present invention, the elastic body 50 is fitted into the probe body 41 below the upper support 20, it is a spiral spring having a radius larger than the radius of the probe mounting hole 22 ..

The elastic body 50 is relaxed in the absence of the specimen 1, but is contracted when the specimen 1 is positioned on the lower support 10.

The elastic body 50 is preferably made of Inconel, but is not limited thereto and may be made of various materials.

5 is a view showing a state in which the specimen is placed on the lower support in the specimen-electrode mounting apparatus for measuring the four-contact electrical conductivity according to the first embodiment of the present invention.

Referring to FIG. 5, when the specimen 1 is positioned on the lower support 10, the probe 40 is pushed up as a whole so that the head 42 of the probe contacts the upper surface of the specimen 1. 50) is retracted.

Since the probes I, II, III, and IV are independently elasticated by the elastic bodies, the contact points can be maintained even when the height of the surface of the specimen 1 is different.

The probes I and IV are connected to a current power supply, and current is input to the probe I to output the current to the probe IV.

Probes II and III can be connected to a high impedance voltmeter to measure the voltage (V) induced according to the input current, and according to Equation 1 below, Conductivity (electrical resistance) is calculated.

ρ : ohm-cm

ρ: ohm-cm

Here, s refers to the interval between probes.

6 is a view showing a part of the specimen-electrode mounting apparatus for measuring the four-contact electrical conductivity according to the second embodiment of the present invention, Figure 7 is a view showing an elastic body used in the second embodiment of the present invention to be.

6 and 7, the elastic body 50 used in the second embodiment of the present invention has an elastic portion formed in an arch shape in a downward direction with a hole 53 into which the probe body 41 is fitted. It is a spring in the form of a plate consisting of two support plates 51 in close contact with the lower support 20 around the probe mounting hole 22 in both the plate 52 and the elastic plate 52.

In this case, the probe 40 has a second protrusion projecting from the probe body 41 with a radius larger than the radius of the hole 53 of the elastic plate 52 so that the arch center of the elastic plate 52 is supported. 44 is formed.

Since the remaining components are substantially the same as the first embodiment, description thereof will be omitted.

FIG. 8 is a view showing a part of a state in which a specimen is placed on a lower support in a specimen-electrode mounting apparatus for measuring 4-contact electric conductivity according to a second embodiment of the present invention.

When the specimen 1 is positioned on the lower support 10, the probe 40 is pushed up, and when the arch-shaped elastic plate 52 of the elastic body is pressed upwards, both sides of the elastic plate 52 As the support plate 51 is pushed to the left and right, the height of the elastic plate 52 is lowered. The elastic plate 52 pushes the second protrusion 44 toward the lower support 10, and the head 42 of the probe maintains contact with the upper surface of the specimen 1.

As described above, in the state in which the probe 40 and the specimen 1 are in contact with each other, the electrical conductivity of the specimen may be measured using Equation 1 as in the first embodiment.

As described above, the specimen-electrode mounting apparatus for measuring the four-contact electric conductivity according to the present invention was described with reference to the illustrated drawings, but the present invention is not limited by the embodiments and drawings disclosed herein, and the technical concept is protected. It can be applied within the range.

1 is a diagram showing an example of a probe arrangement for measuring the four-contact electrical conductivity,

2 and 3 is a view showing the contact form of the specimen and the probe for the conventional 4-contact electrical conductivity measurement,

4 is a cross-sectional view showing a specimen-electrode mounting apparatus for measuring 4-contact electrical conductivity according to a first embodiment of the present invention;

5 is a view showing a state in which the specimen is placed on the lower support in the specimen-electrode mounting apparatus for measuring the four-contact electrical conductivity according to the first embodiment of the present invention,

6 is a view showing a portion of a specimen-electrode mounting apparatus for measuring four-contact electrical conductivity according to a second embodiment of the present invention;

7 is a view showing an elastic body used in the second embodiment of the present invention,

FIG. 8 is a view showing a part of a state in which a specimen is placed on a lower support in a specimen-electrode mounting apparatus for measuring 4-contact electric conductivity according to a second embodiment of the present invention.

<Explanation of symbols on main parts of the drawings>

1: Psalm 10: Lower Support

20: upper support 21: screw hole

22: probe mounting hole 30: support fixing portion

31: Set screw 32: Nut

40: probe 41: probe body

42: probe head 43: first protrusion

44: second protrusion 50: elastic body

51: support plate 52: elastic plate

53: hall

Claims (9)

A lower support on which the specimen is positioned when measuring electrical conductivity; An upper support spaced apart from an upper side of the lower support, and having four probe installation holes formed at regular intervals; A support fixing part for fixing the upper support and the lower support to be spaced apart by a predetermined interval; Four probes including a rod-shaped body mounted to the probe installation hole and a head having a pointed tip formed at a lower portion of the body; And Specimen-electrode mounting device for measuring the electrical conductivity is formed between the head of the probe and the upper support and an elastic body for pushing the head toward the lower support. The method according to claim 1, The probe may further include a first protrusion protruding from the body to a radius larger than a radius of the probe mounting hole to prevent the body from being pushed by the elastic body to be separated from the probe mounting hole. 4 Specimen-electrode mounting device for measuring contact electrical conductivity. The method according to claim 2, The elastic body is fitted to the probe body, the specimen-electrode mounting apparatus for measuring the four-contact electrical conductivity, characterized in that the spiral spring having a radius larger than the radius of the probe mounting hole. The method according to claim 2, The elastic body has a hole in which the probe body is fitted in the center and has a plate shape consisting of an elastic plate formed in an arch shape in a lower direction and two support plates in close contact with a lower portion of the upper support around the probe installation hole at both sides of the elastic plate. Specimen-electrode mounting device for measuring 4-contact electrical conductivity, characterized in that the spring. The method according to claim 4, The probe includes a second electrode that protrudes from the body to a radius larger than a radius of the hole of the elastic plate so that the arch center of the elastic plate is supported. Mounting device. The method according to claim 1, Specimen-electrode mounting device for measuring the four-point electrical conductivity, characterized in that the material of the elastic material Inconel (Inconel). The method according to claim 1, The support fixture is a specimen-electrode mounting device for measuring the four-contact electrical conductivity, characterized in that consisting of four support screws and nuts. The method according to claim 7, The lower support is a specimen-electrode mounting apparatus for measuring the four-point electrical conductivity, characterized in that the four holes formed in the support fixing screw is inserted into the corner. The method according to claim 8, The upper support is a specimen-electrode mounting device for measuring the four-point electrical conductivity, characterized in that the four holes formed in the four corners of the support screw and the fixing screw coupling.

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