KR20100003488A - Surface radiation type excimer ultra violet lamp - Google Patents

Abstract

PURPOSE: A surface radiation type excimer ultra violet lamp is provided to secure the fixed UV according to the longitudinal direction of the inner pipe. CONSTITUTION: The inner pipe is separated within the outer pipe(210) with the inner side of the outer pipe and is inserted and arranged. The discharge electrode is arranged in the outer side surface of the inner pipe(220) according to the longitudinal direction of the inner pipe as the constant interval. The discharge electrode(230) occurs the surface discharge each other. The dielectric(240) is spread on the outer side surface of the inner pipe including the discharge electrode. The discharge gas(250) is charged in the space between the inner pipes.

Description

Surface-discharge excimer ultra violet lamp {Surface radiation type excimer ultra violet lamp}

The present invention relates to an excimer ultraviolet lamp, and more particularly, to a surface discharge type excimer ultraviolet lamp that is driven by discharge if not opposite discharge.

The general low pressure ultraviolet light (UV) emits only light of 253.7 nm and 184.9 nm wavelengths. For example, the light of 184.9 nm wavelength is very effective for decomposing organic impurities because of high energy of 154.7 ㎉ / mol.

However, it is impossible to break C = C bonds having a binding energy of 140.5 kV / mol or C = O bonds having 190 kV / mol with normal low pressure ultraviolet rays having wavelengths of 253.7 nm and 184.9 nm. In particular, the surface of LCD substrates and wafers, as well as the surfaces of polyvinyl chloride (PVC), polypropylene (PP), poly ethylene (PE), polyethylene terephthalate (PET), poly styrene (PS), and metal leadframes. Since most of the impurities have a double bond and a triple bond, in order to break the double or triple bond with a high binding energy, only the energy of 154.7 에너지 / mol of the light having the wavelength of 253.7 nm and 184.9 nm is insufficient.

Therefore, in order to obtain a stronger energy than the energy of the light of the 184.9nm wavelength, light having a shorter wavelength or a more concentrated wavelength is required, and as a result, the light of the 172nm and 146nm wavelengths has been developed. It is an excimer UV lamp to generate.

Early excimer lasers were expensive, difficult to use, and poor in performance, and were not used much beyond those used for research. However, in ultra-precise industries such as LCDs and semiconductors, high precision and high energy are required. Excimer ultraviolet rays or excimer lasers only correspond to the excimer. In recent years, the excimer has been used not only in the display industry, such as LCD and OLED, but also in the semiconductor, metal, and engineering plastics industries. Applications of the excimer are expected to increase in new environmental solutions such as difficult decomposition COD and VOC (Volatile Organic Composition) decomposition.

1 is a cross-sectional view showing a conventional excimer ultraviolet lamp, which will be described below.

As shown, the excimer ultraviolet lamp 100 has an outer tube 110 and an inner tube 120 inserted into the outer tube 110, a metal mesh type disposed on an outer surface of the outer tube 110 ( a first electrode 130 of a metal mesh type, and a second electrode 140 of a metal plate type disposed on an inner side surface of the inner tube 120.

The conventional excimer UV lamp 100 is driven by the opposite discharge that occurs between the first electrode 130 and the second electrode 140 using the outer tube 110 and the inner tube 120 itself as a dielectric. This drive method is used by most excimer UV lamp manufacturers.

However, the above-described conventional excimer UV lamp uses the thickness itself of the outer tube and the inner tube as the dielectric so that the opposite discharge is made between the first electrode and the second electrode. This has to be very high, and there is a problem that the high discharge start voltage has a significant adverse effect on the life of the outer tube.

In addition, although not described above, since the first electrode disposed on the outer surface of the outer tube is formed in a mesh type, there is a burden of coating an insulating material on the electrode of the mesh type.

In addition, since the formation of the metal electrode type first electrode and the metal plate type second electrode is not easy, there is a process difficulty.

In particular, it has been pointed out that the problem of the counter discharge is a severe heat problem, which needs to be improved because it affects the life of the excimer UV lamp, which extends the life of the excimer UV lamp and constant and stable UV radiation. .

On the other hand, in order to solve the heat generation problem of the counter-discharge product, conventionally, efforts have been made to reduce the amount of current flow as much as possible by patterning the electrodes or reducing the line width of the electrodes. However, while these methods can control the flow of current to reduce heat generation, on the other hand, there is an adverse effect on the amount of brightness or illuminance. That is, it may cause unevenness of discharge voltage and current, and thus unevenness of brightness and illuminance and lifetime, and requires a power supply, that is, an inverter, for stable driving of the lamp, thereby significantly reducing manufacturing costs. There is an economic problem.

An embodiment of the present invention provides a surface discharge excimer ultraviolet lamp that does not adversely affect the life of the outer tube.

In addition, an embodiment of the present invention provides a surface discharge excimer ultraviolet lamp that does not need to coat an insulating material on the mesh-type electrode.

In addition, embodiments of the present invention provide a surface discharge excimer ultraviolet lamp that can facilitate the electrode forming process.

In addition, an embodiment of the present invention provides a surface discharge type excimer ultraviolet lamp that can extend the life and secure a constant and stable ultraviolet radiation amount through solving the invention problem.

In one embodiment, an excimer ultraviolet lamp according to an embodiment of the present invention, the outer tube; An inner tube inserted into the outer tube and spaced apart from an inner surface of the outer tube; A plurality of discharge electrodes disposed on the outer surface of the inner tube at regular intervals along the longitudinal direction of the inner tube, and having surface discharges therebetween; A dielectric coated on the outer side of the inner tube including the discharge electrode to a thickness not in contact with the inner side of the outer tube; And a discharge gas filled in a space between the outer tube and the inner tube to which the dielectric is applied.

The outer tube is made of quartz.

The inner tube is made of any one of ceramic, glass and quartz.

The inner tube has the shape of any one of three, four, six, eight and circular cross sections.

The inner tube is provided with grooves in each of the outer side portions on which the discharge electrodes are formed, in which case the discharge electrodes are respectively inserted into the corresponding grooves.

The grooves have the same shape, same depth and width.

Excimer UV lamp according to an embodiment of the present invention, the fixing plate for inserting at each end of each of the outer tube and the inner tube is coated with a dielectric on the outer surface to maintain a gap between the outer tube and the inner tube; And a sealing layer sealing both ends of the outer tube and the inner tube including the fixing plate so that one end of the discharge electrode is exposed to the outside.

The present invention is inserted into the inner tube formed with a discharge electrode at regular intervals on the outer surface inside the outer tube of quartz material so as to maintain a constant distance from the inner surface of the outer tube, the outer surface of the inner tube including the discharge electrode The dielectric is applied to form an excimer ultraviolet lamp.

Since the surface discharge excimer ultraviolet lamp of the present invention is driven by a surface radiation type rather than a conventional counter discharge, the high discharge associated with the thick thickness of the outer tube and the inner tube serving as a dielectric during the counter discharge. No starting voltage is required, and thus shortening the life of the outer tube can be prevented.

In addition, the surface-discharge excimer UV lamp of the present invention does not need to form a metal mesh type electrode on the outer wall of the outer tube of the excimer UV lamp having a conventional counter discharge structure, thereby increasing the complexity of the electrode forming process and the cost increase due to the material. I can solve it.

In addition, the surface discharge type excimer UV lamp of the present invention has a surface discharge structure, thereby improving heat generation problems due to the increase of the electrode area, which is a disadvantage of the counter discharge structure, and problems of low efficiency due to reduction of life and excessive current amount. .

In addition, the surface discharge excimer ultraviolet lamp of the present invention can not only easily implement products of various sizes, but also can realize considerable competitiveness in terms of economy through the reduction and low cost of electrodes and inner tube materials.

Hereinafter, with reference to the accompanying drawings will be described in detail a preferred embodiment of the present invention.

2 is a perspective view illustrating a surface discharge excimer ultraviolet lamp according to an exemplary embodiment of the present invention.

As shown, the surface-discharge excimer ultraviolet lamp 200 according to an embodiment of the present invention, the outer tube 210, the inner tube 220 is inserted into the outer tube 210, the inner tube 220 A plurality of discharge electrodes 230 disposed at regular intervals on the outer surface of the), the dielectric 240 applied on the outer surface of the inner tube 220 including the discharge electrode 230, and the outer tube 210 And a discharge gas 250 filled in a space between an inner side surface of the c) and an inner tube 220 to which the dielectric 240 is applied.

The outer tube 210 is made of a quartz material. The inner tube 220 is made of any one of ceramic, glass, and quartz. For example, the inner tube 220 has a shape of any one of three, four, six, eight, and circular cross sections. In particular, the inner tube 220 is formed with a plurality of grooves at regular intervals along the longitudinal direction on the outer surface, the discharge electrode 230 is formed so as to be inserted into each corresponding groove. The grooves are formed to have the same shape, the same depth and the width. The dielectric 240 is coated so as not to cover one end of the discharge electrode to be connected to the external electrode terminal.

On the other hand, the groove may not be formed, in this case, the discharge electrode 230 may be understood to be formed spaced apart at regular intervals on the outer surface of the inner tube (220).

The inner tube 220 having the discharge electrode 230 and the dielectric 240 formed on the outer surface is inserted and spaced apart from the inner surface of the outer tube 210 in the outer tube 210 to have a discharge space. In this discharge space, the discharge gas 250 is filled.

In addition, the surface-discharge excimer ultraviolet lamp 200 according to an embodiment of the present invention is inserted into each of both ends of the outer tube 210 and the inner tube 220 is coated with a dielectric 240 on the outer surface of the A fixing plate (not shown) for maintaining a gap between the outer tube 210 and the inner tube 220, and the outer tube 210 and the inner tube including the fixing plate so that one end of the discharge electrode 230 is exposed to the outside. It further includes a sealing layer (not shown) for sealing both ends of the 220.

Such a method of manufacturing a surface discharge excimer ultraviolet lamp according to an embodiment of the present invention is as follows.

First, in a state in which an inner tube 220 made of ceramic, glass, quartz, or the like is provided, a plurality of grooves are formed on the outer surface of the inner tube 230 at regular intervals along its longitudinal direction. The grooves are formed to have the same depth and width.

Then, while maintaining a constant thickness and width in each groove formed on the outer surface of the inner tube 220 by using a dispenser (dispensor) equipment, the discharge electrode is uniformly from one end to the other end of the inner tube 220 ( 230). As the discharge electrode 230 material, for example, silver paste is used, and the silver face is coated, dried, and baked to form the discharge electrode 230.

Here, the distance between the electrodes that affect the discharge start voltage and the efficiency of the lamp can be adjusted according to the amount of paste. That is, when the amount of the electrode paste is small, the discharge electrodes are formed only in the grooves to widen the intervals between adjacent electrodes. On the contrary, when the amount of the electrode paste is large, the electrodes are formed outside the grooves and the intervals between the adjacent electrodes are increased. It becomes narrower. Therefore, the spacing between the electrodes can be adjusted by appropriately adjusting the amount of the electrode paste as needed.

Subsequently, the dielectric 240 is coated on the outer surface of the inner tube 220 in which the discharge electrode 230 is formed. The dielectric 240 is applied to the outer surface of the inner tube 220 including the discharge electrode 230 in a predetermined thickness according to the spray method. Since the dielectric material 240 is a very important factor for the performance of the excimer ultraviolet lamp, the material and thickness thereof are precisely controlled. For example, the dielectric 240 is formed in a multilayer structure using alumina and a glass face.

The inner tube 220 coated with the dielectric 240 is inserted into the outer tube 210 made of quartz. At this time, the inner tube 220 is inserted into the outer tube 210 so that the dielectric 240 applied to the outer surface thereof is spaced apart by a predetermined interval without contacting the inner surface of the outer tube 210.

Subsequently, after the fixing plate is inserted into each of both ends of the outer tube 210 and the inner tube 220 to which the dielectric is applied, one end of the discharge electrode 230 is exposed to the outside. Both ends of the outer tube 210 and the inner tube 220 including the fixing plate to be sealed with a sealing layer so as to. Here, when the sealing layer is different from each other in the material of the outer tube 210 and the inner tube 220, the thermal expansion coefficient between the two may be different, so that warpage and cracks may occur, so select an appropriate material considering this do.

Then, the discharge gas 250 is filled in the space between the outer tube 210 and the inner tube 220 to which the dielectric 240 is applied, thereby providing a surface-discharge excimer UV lamp according to an embodiment of the present invention. Complete the manufacture. The discharge gas 250 is filled in the discharge space through a tip (not shown) previously formed in the discharge space.

The surface discharge excimer ultraviolet lamp according to the embodiment of the present invention is driven by the surface discharge generated in the discharge space between the adjacent discharge electrodes 230, as shown in FIG.

Therefore, in the surface discharge excimer ultraviolet lamp according to the embodiment of the present invention, since the thickness of the outer tube and the inner tube does not serve as a dielectric and makes the dielectric thickness uniform, a high discharge start voltage is not necessary. It is possible to prevent shortening of the life of the outer tube.

In addition, the surface-discharge excimer UV lamp according to the embodiment of the present invention does not need to form a metal mesh-type electrode on the outer wall of the excimer UV lamp of the conventional counter-discharge structure, it can solve the complexity of the electrode forming process In addition, the cost increase due to the electrode material can be prevented.

In addition, since the surface discharge type excimer UV lamp according to the embodiment of the present invention basically has a surface discharge structure, it is possible to improve a problem of heat generation and the resulting shortening of life and low efficiency due to excessive current amount.

As mentioned above, although the present invention has been illustrated and described with reference to specific embodiments, the present invention is not limited thereto, and the following claims are not limited to the scope of the present invention without departing from the spirit and scope of the present invention. It can be easily understood by those skilled in the art that can be modified and modified.

1 is a cross-sectional view showing a conventional excimer ultraviolet lamp.

2 is a perspective view illustrating a surface discharge excimer ultraviolet lamp according to an exemplary embodiment of the present invention.

3 is a cross-sectional view for explaining the driving of the surface-discharge excimer ultraviolet lamp according to the embodiment of the present invention.

Claims (8)

Outer tube; An inner tube inserted into the outer tube and spaced apart from an inner surface of the outer tube; A plurality of discharge electrodes disposed on the outer surface of the inner tube at regular intervals along the longitudinal direction of the inner tube, and having surface discharges therebetween; A dielectric coated on the outer side of the inner tube including the discharge electrode to a thickness not in contact with the inner side of the outer tube; A discharge gas filled in a space between the outer tube and the inner tube to which the dielectric is applied; Surface-discharge type excimer ultraviolet lamp comprising a. 2. The surface discharge excimer ultraviolet lamp according to claim 1, wherein the outer tube is made of quartz. The surface discharge excimer ultraviolet lamp according to claim 1, wherein the inner tube is made of any one of ceramic, glass and quartz. The surface-discharge excimer ultraviolet lamp according to claim 1, wherein the inner tube has a cross section having any one of three, four, six, eight and circular shapes. The surface-discharge excimer ultraviolet lamp according to claim 1, wherein the inner tube is provided with a groove in each of the outer surface portions where the discharge electrodes are formed. 6. The surface discharge excimer ultraviolet lamp according to claim 5, wherein the discharge electrodes are respectively inserted into the corresponding grooves. 6. The surface discharge excimer ultraviolet lamp according to claim 5, wherein the grooves have the same shape, the same depth and the width. The method of claim 1, A fixing plate inserted into each of both ends of the outer tube and the inner tube coated with a dielectric on the outer surface to maintain a gap between the outer tube and the inner tube; And A sealing layer sealing both ends of the outer tube and the inner tube including the fixing plate so that one end of the discharge electrode is exposed to the outside; Surface-discharge type excimer ultraviolet lamp, characterized in that it further comprises.

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