KR20090101888A - Heat treatment apparatus - Google Patents

Abstract

A heat treatment apparatus comprises a first heating chamber and a second heating chamber. The first heating chamber heats a work by a high-frequency induction heating device. The work heated in the first heating chamber is carried into the second heating chamber. The second heating chamber heats the work in the atmosphere heated by a heater.

Description

Heat Treatment Equipment {HEAT TREATMENT APPARATUS}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heat treatment apparatus for heat-treating a metal product. The present invention relates to a magnetic annealing apparatus or a soldering apparatus for joining metal parts (particularly, different types of metals having significantly different electrical resistance and thermal conductivity (specific heat), such as stainless steel and copper). To join parts).

Here, the "lead welding" refers to a technique of joining without using a brazing filler metal or a solder to dissolve the base metal, as described in, for example, "connection and bonding technique" (Tokyo Electric University Publishing Bureau).

Here, joining using a filler material having a melting point of 450 ° C. or higher is referred to as brazing or brazing, and the filler material at that time is referred to as a brazing material. And joining using melting | fusing material of 450 degrees C or less is called soldering, and the filler material at that time is called soldering.

The heat treatment apparatus is an apparatus for heating a metal product (work) to a predetermined temperature. (See, for example, Patent Document 1).

Patent Document 1: Japanese Patent Laid-Open No. 5-311202

However, in the heat treatment apparatus described in Patent Literature 1, an atmosphere such as hydrogen gas or argon gas is heated by a heater, and the work is heated (heated up) through such a heated atmosphere, which requires time for heating the work to a predetermined temperature. And, there is a problem that it is difficult to shorten the heat treatment time.

The present invention aims to shorten the heat treatment time to solve this problem.

1 is a schematic view of a heat treatment apparatus according to the first and second embodiments of the present invention.

2 (a) to 2 (c) are charts showing the relationship between the temperature of the work W and the elapsed time during brazing.

3 is a schematic view of a heat treatment apparatus according to a third embodiment of the present invention.

<Explanation of symbols for the main parts of the drawings>

1: brazing device 10: pre-vacuum room

10A: Outlet 10B: Outlet

11: first vacuum pump 12: first valve

13: 3rd valve 20: vacuum heating chamber

20A: Outlet 20B: Outlet

21: high frequency heating induction apparatus 22: second vacuum pump

23: second valve 24: fourth valve

30: Intermediate room 30A: Entrance entrance

31A: 5th valve 31A 31B: 6th valve

40: hydrogen heating chamber 40B: outlet outlet

41: electric heater 42: first door

43: second door 44: third door

45: temperature rising zone 46: cooling zone

47A: seventh valve 47B: eighth valve

48A: heating atmosphere inlet 49A: first inert gas nozzle

49A: second inert gas nozzle 49B: second inert gas nozzle

51: first opening and closing door 52: second opening and closing door

53: third opening and closing door 61, 62, 63: belt conveyor

In the present invention, in order to achieve the above object, according to an embodiment of the present invention, the first heating chamber for heating the workpiece in the high-frequency induction heating apparatus and the workpiece heated in the first heating chamber is carried in to intervene the atmosphere heated in the heater And a second heating chamber for heating the work.

According to embodiments of the present invention, there is provided a heat treatment apparatus for soldering a workpiece made of different metal parts having different electrical resistance and thermal conductivity, and the first heating chamber and the first heating chamber for heating the workpiece in the high frequency induction heating apparatus. It is characterized in that it comprises a second heating chamber into which the workpiece heated in the first heating chamber is brought in, and the workpiece is heated by heating the workpiece through a reducing atmosphere heated by the heater.

According to the embodiments of the present invention, there is provided a heat treatment apparatus for soldering a workpiece made of metal parts, the first heating chamber for heating the workpiece in the high-frequency induction heating apparatus and the workpiece heated in the first heating chamber is carried in the heater It is characterized by including a 2nd heating chamber which heats a workpiece | work through a heated reducing atmosphere, and solders a workpiece | work.

According to embodiments of the present invention, hydrogen gas is introduced into the second heating chamber as a reducing atmosphere.

According to embodiments of the present invention, in a heat treatment apparatus for annealing a metal workpiece, a hydrogen gas or an argon gas disposed on a downstream side of the first heating chamber and a first heating chamber for heating the work in the high frequency heater and heated. It is characterized by including a 2nd heating chamber which heats a workpiece | work in atmosphere.

According to the embodiments of the present invention, a voltage is applied to the high frequency induction heating apparatus in a state in which the inside of the first heating chamber is maintained in a weak vacuum.

According to the embodiments of the present invention, the high frequency induction heating apparatus is applied with a voltage while the inert gas is filled in the first heating chamber.

According to the embodiments of the present invention, the high frequency induction heating apparatus is applied with a voltage while the nitrogen gas is filled in the first heating chamber.

According to embodiments of the present invention, an opening and closing means for alternately changing the second heating chamber into a closed state and an open state is provided.

First embodiment

The present embodiment relates to a brazing device (welding device) for brazing a work (brazing product) such as a copper part and a stainless part, according to an embodiment of the present invention. An embodiment of the present invention will be described with reference to.

1. Outline of Brazing Device

1 is a schematic diagram (conceptual diagram) of a brazing device 1 according to an embodiment of the present invention. And the brazing device 1 according to the present embodiment is configured by arranging the prevacuum chamber 10, the vacuum heating chamber 20, the intermediate chamber 30 and the hydrogen heating chamber 40 in series with respect to the conveying direction of the work do.

And the workpiece (W) is heated while being transferred in the order of the pre-vacuum chamber 10 → vacuum heating chamber 20 → intermediate chamber 30 → hydrogen heating chamber 40, the workpiece is taken out from the hydrogen heating chamber (40) At that point, the brazing (heat treatment) of the workpiece W is completed.

Here, in the brazing (welding), as described above, the brazing material (brazing material) is a joining method of joining a plurality of parts without heating the filler metal (melting material) above the melting point of the filler metal and dissolving the base material. It is necessary to heat W) to a temperature at least above the melting point of the brazing filler metal.

In this embodiment, after heating the workpiece W in the vacuum heating chamber 20 to near the melting point of the brazing filler metal (hereinafter, such a heating process is referred to as a 'preliminary heating process'), the workpiece into the hydrogen heating chamber 40 ( The work W is brazed by heating W) to the brazing temperature (hereinafter, such a heating step is referred to as a 'main heating step').

That is, the prevacuum chamber 10, the vacuum heating chamber 20, and the intermediate chamber 30 are mainly heating means for performing the preheating process, and the hydrogen heating chamber 40 is mainly heating means for performing the main heating process. to be.

2. Preheating Process

The vacuum heating chamber 20 is a first heating chamber which heats the work W by the high frequency heating induction apparatus 21 in a low vacuum (for example, 0.11 Torr or less), and the high frequency heating induction apparatus ( 21 is a device for heating the work W by Joule's heat (or joule damage) caused by the induced current by applying a high frequency current to the coil to generate an induction current to the work W.

Here, if the inlet 20A for carrying the workpiece | work W into the vacuum heating chamber 20 is opened directly to the air | atmosphere side, every time the workpiece | work W is brought into the vacuum heating chamber 20, a vacuum heating chamber ( Since the pressure in 20 is at atmospheric pressure, a long time is required until the inside of the vacuum heating chamber 20 is re-reduced to low vacuum, as well as air or inert gas in the vacuum heating chamber 20 (this embodiment). In this case, the load of the second vacuum pump 22 that sucks nitrogen gas increases.

In the present embodiment, the preliminary vacuum chamber 10 is provided at the inlet 20A side of the vacuum heating chamber 20 to directly carry the work W into the vacuum heating chamber 20, and preliminarily prepare the work W. The second opening / closing door 52 which is carried in the vacuum chamber 10 to lower the pressure in the prevacuum chamber 10 and divides the outlet 10B of the prevacuum chamber 10 and the inlet 20A of the vacuum heating chamber 20. ) Is opened so that the workpiece W is carried into the vacuum heating chamber 20.

Here, the first opening and closing door 51 is a door that opens and closes the inlet 10A of the preliminary vacuum chamber 10, and the third opening and closing door 53 is an outlet 20B and an intermediate chamber of the vacuum heating chamber 20. It is a door which divides 30 A of inlet openings of 30, and the 1st vacuum pump 11 is a pump which inhales air or inert gas (nitrogen gas in this embodiment) in the prevacuum chamber 10. As shown in FIG.

In addition, the first valve 12 is a valve for opening and closing the passage connecting the suction side of the first vacuum pump 11 to the prevacuum chamber 10, the second valve 23 is made of the vacuum heating chamber 20 2 is a valve for opening and closing a passage connecting the suction side of the vacuum pump 22, the third valve 13 for opening and closing the inlet of the inert gas (nitrogen gas in the present embodiment) introduced into the prevacuum chamber 10. It is a valve, and the 4th valve 24 is a valve which opens and closes the inlet of inert gas (in this embodiment, nitrogen gas) which introduces into the vacuum heating chamber 20. As shown in FIG.

In addition, belt conveyors 61 and 62 for transferring the workpieces W are disposed in each of the prevacuum chamber 10 and the vacuum heating chamber 20, wherein the belt conveyors 61 and 62 are It consists of a metal mesh belt excellent in heat resistance.

Here, since hydrogen gas is introduced into the hydrogen heating chamber 40 as a reducing atmosphere as described later, when the vacuum heating chamber 20 and the hydrogen heating chamber 40 communicate directly, the hydrogen gas is vacuum heated. There is a high possibility that it will flow into the seal 20.

In addition, the pre-vacuum chamber 10 is provided at the inlet 20A side of the vacuum heating chamber 20 so that the vacuum heating chamber 20 and the atmospheric side are not in direct communication, but the vacuum heating chamber 20 is indirectly atmospheric. Since it is in communication with the side, if hydrogen gas in the hydrogen heating chamber 40 flows into the vacuum heating chamber 20, the hydrogen gas and air (oxygen) are mixed to increase the risk of explosion.

For this reason, in this embodiment, the intermediate chamber 30 is provided between the vacuum heating chamber 20 and the hydrogen heating chamber 40 to prevent the vacuum heating chamber 20 and the hydrogen heating chamber 40 from directly communicating. do.

Here, the 5th valve 31A and the 6th valve 31B are valves which open and close the inlet of inert gas (in this embodiment, nitrogen gas) introduced into the intermediate chamber 30.

3. Hydrogen Heating Room

The hydrogen heating chamber 40 is a second heating chamber that heats the work W after the preheating process is completed. In the hydrogen heating chamber 40, the electric heater 41 heats the atmosphere and indirectly through the heated atmosphere. The workpiece W is heated. In this embodiment, a reducing gas (hydrogen gas in this embodiment) is used as the atmosphere, and the work W is heated to the brazing temperature in the reducing gas.

In addition, the hydrogen heating chamber 40 uses a belt conveyor 63, such as the belt conveyor 61 of the prevacuum chamber 10, to transfer the workpiece W while heating and brazing the workpiece W while heating the tunnel. As a seal, the space in the hydrogen heating chamber 40 may be partitioned into at least two spaces (zones) by the first to third doors 42, 43, 44.

That is, the zone from the first door 42 to the second door 43 is a temperature rising zone 45 for heating up the work W to a predetermined temperature (brazing temperature in this embodiment) in the atmosphere. The zone from the door 43 to the 3rd door 44 is the cooling zone 46 for cooling the workpiece | work W which completed heating in atmosphere.

Here, the upstream side always communicates with the intermediate chamber 30 with respect to the conveyance direction of the workpiece | work W rather than the 1st door 42. As shown in FIG. For this reason, the belt of the belt conveyor 63 is comprised by one belt connected from the inlet 30A of the intermediate | middle chamber 30 to the carrying out outlet 40B of the hydrogen heating chamber 40. FIG.

In addition, the seventh valve 47A and the eighth valve 47B are valves for adjusting the introduction amount of the inert gas introduced into the space (zone) from the intermediate chamber 30 to the first door 42. The atmosphere inlet ports 48A and 48B are heating atmosphere introduction means for introducing hydrogen gas, which is a heating atmosphere, into the hydrogen heating chamber 40.

In addition, the first and second inert gas injection ports 49A and 49B inject an inert gas (nitrogen gas in the present embodiment) into the hydrogen heating chamber 40 so that the hydrogen heating chamber 40 is like an air curtain. Divide the space within.

Here, the first inert gas injection port 49A is for dividing the temperature raising zone 45 and the cooling zone 46, and the second inert gas injection port 49B is with respect to the outlet 40B of the hydrogen heating chamber 40. This is for dividing the inside and outside of the hydrogen heating chamber 40.

In addition, the hydrogen discharge cylinder 81 burns the excess hydrogen gas introduced into the hydrogen heating chamber 40 and discharges it to the outside of the hydrogen heating chamber 40. An on / off valve 81A for opening and closing and an electric heater (not shown) for igniting combustion of hydrogen are provided.

4. Operation of the brazing device

The workpiece W is preliminarily transported in the order of the preliminary vacuum chamber 10 → the vacuum heating chamber 20 → the intermediate chamber 30 → the hydrogen heating chamber 40 (heating zone 45 → cooling zone 46). It is brazed as it is heated through the heating step and the main heating step. Hereinafter, the operation of the brazing device will be described in detail.

In the high frequency heating induction apparatus 21, since the induced current generated in the workpiece W is greatly changed by the arrangement relationship between the coil and the workpiece W for electromagnetic induction or the voltage application time, the coil and the workpiece W When the arrangement relationship changes, it becomes difficult to heat up the work W appropriately.

In this case, in the present embodiment, the belt conveyor 62 is stopped to close the second and third opening / closing doors 52 and 53 in a state where the workpiece W is stopped with respect to the coil, thereby vacuuming in the vacuum heating chamber 20. The work W is heated while maintaining.

That is, when heating up the workpiece W in the vacuum heating chamber 20, first, the first opening / closing door 51 is opened with at least the second opening / closing door 52 closed to open the workpiece W in the prevacuum chamber ( 10), the first vacuum door 11 is closed to close the first opening / closing door 51 to decrease the pressure in the prevailing chamber 10 with the first vacuum pump 11, and at the same time the prevailing chamber 10 Suction and remove air (especially oxygen) in

Here, when bringing the workpiece (W) into the preliminary vacuum chamber 10, inert gas is introduced into the preliminary vacuum chamber 10 in advance, and the pressure in the prevacuum vacuum chamber 10 is restored to a level similar to atmospheric pressure, and then the first opening / closing door ( 51).

Subsequently, the third valve 13 is opened while the first opening / closing door 51, the second opening / closing door 52, and the third opening / closing door 53 are closed, and the pressure in the prevacuum chamber 10 and the vacuum heating chamber ( After the pressure in the preliminary vacuum chamber 10 is restored to a degree that the pressure in the chamber 20 is about the same, the belt conveyors 61 and 62 are operated at the same time as the second opening / closing door 52 is opened. I import it into).

When the carrying-in of the workpiece W is completed in the vacuum heating chamber 20, the second opening / closing door 52 is closed and the second vacuum pump 22 is operated to operate the vacuum heating chamber 20 in the preliminary vacuum chamber 10. At the same time as removing the inert gas introduced into the vacuum suction chamber, the vacuum heating chamber 20 is brought into a low vacuum (0.1 Torr or less) and the belt conveyor 62 is stopped to stop the work W with respect to the coil. A voltage is applied to the coil to heat up the workpiece W to near the brazing temperature.

When the heating and temperature increase in the vacuum heating chamber 20 is completed, the fourth valve 24 is opened with the second opening / closing door 52 and the third opening / closing door 53 closed, and the pressure in the vacuum heating chamber 20 is reduced. After the pressure in the intermediate chamber 30 is restored to the same extent as the pressure in the intermediate chamber 30, the belt conveyors 62 and 63 are operated at the same time as the third opening / closing door 53 is opened. Bring it into the thread 30.

In the present embodiment, when the work W is heated up in the vacuum heating chamber 20, a new work W is carried into the prevacuum chamber 10, and air in the prevacuum chamber 10 is removed by suction. At this time, the workpiece W is carried out from the vacuum heating chamber 20 to the intermediate chamber 30. In this way, the workpiece W is intermittently transferred in the preheating step.

On the other hand, in the hydrogen heating chamber 40, the belt conveyor 63 rotates continuously without stopping, and when the workpiece | work W carried in the intermediate chamber 30 approaches the temperature rising zone 45, the 1st door ( 42 is opened, and the workpiece | work W is heated to brazing temperature in the heated atmosphere (hydrogen gas) to the brazing temperature by carrying in into the temperature raising zone 45, and brazing.

When the workpiece W approaches the cooling zone 46, the second door 43 is opened and at the same time, the inert gas is injected from the first inert gas injection port 49A so that the temperature rising zone 45 is kept tightly sealed. The workpiece | work W is carried in to the cooling zone 46 from the temperature rising zone 45 in a state.

Then, when cooling of the workpiece | work W is complete | finished and the workpiece | work W approaches the 3rd door 44, the 3rd door 44 opens, the workpiece | work W is carried out from the cooling zone 46, and then the workpiece | work (W) is taken out from the hydrogen heating chamber 40.

Here, in this embodiment, the inert gas is always injected from the second inert gas injection port 49B, so that air can be prevented from flowing into the hydrogen heating chamber 40 from the discharge port 40B.

5. Features of the brazing device according to this embodiment

5.1. Technical Background and Problems Regarding the Brazing Apparatus According to the Embodiment

As the brazing apparatus, for example, the vacuum brazing furnace described in Japanese Patent Application Laid-Open No. 3-106562 (hereinafter referred to as Patent Document 2) has an internal pressure of 0.11 Torr (≒) while introducing an inert gas into the brazing chamber. 13.3 Pa), and while heating the atmosphere (inert gas) in the electric heater disposed in the brazing chamber, the work is heated and brazed through the atmosphere.

However, the vacuum brazing furnace described in Patent Literature 2 heats the work by heating the inert gas atmosphere with an electric heater and through the heated atmosphere, so that the time for raising the work to the brazing temperature (melting point of the filler metal) can be increased. It is difficult to require and improve the productivity of brazing products.

In addition, when the vacuum brazing apparatus described in Patent Document 1 is applied to a heterogeneous metal part that has a large difference in thermal conductivity or specific heat, such as stainless steel or copper, a component having a high thermal conductivity and a small specific heat has a small thermal conductivity and a large specific heat even if the ambient temperature is constant. It heats up faster. For this reason, in the workpiece | work of the dissimilar metal in which thermal conductivity and specific heat differ greatly in this way, it is difficult to heat up all the components joined together to brazing temperature quickly, and there exists a problem that it is difficult to improve productivity in invention of patent document 2.

5.2. Technical effect of the brazing device according to the embodiment

The high frequency heating induction device 21 of the vacuum heating chamber 20 generates the induced current in the workpiece W and heats the workpiece W by Joule heat (joint damage) caused by the induced current generated in this way, so that The work W can be heated up.

However, since the high frequency heating induction device 21 generates an induced current by electromagnetic induction, for example, induction generated in the workpiece W according to the arrangement relationship between the electromagnetic induction coil and the workpiece W or the voltage application time. The current changes greatly.

For this reason, if the size or shape of the workpiece | work W differs for every workpiece | work W, even if the material of the workpiece | work W is the same, the induced current which generate | occur | produces in the workpiece | work W will also change largely, and according to the workpiece | work W, high frequency heating It is necessary to change the operating conditions of the induction apparatus 21.

In addition, even if the size and shape of the workpiece W are the same, if the materials (electrical resistances) are different for each workpiece W, the induced current and the amount of heat generated in the workpiece W vary greatly. Therefore, it is necessary to change the operating conditions of the high frequency heating induction apparatus 21.

In addition, even if the size and shape of the workpiece W are the same, the workpiece W made of different kinds of metal parts having different electrical resistances has a different temperature rise for each part of the workpiece W, that is, the workpiece. (W) It is difficult to heat up the whole uniformly.

That is, although the high frequency heating induction apparatus 21 can raise the workpiece | work W in a short time, there exists a problem that it is difficult to raise and maintain the temperature of the workpiece | work W at an appropriate temperature.

On the other hand, in the hydrogen heating chamber 40 which heats the workpiece | work W through a heated atmosphere, since the temperature of the workpiece | work W carried in the hydrogen heating chamber 40 will become the temperature substantially the same as the temperature of an atmosphere finally, When the temperature of the atmosphere is managed, the temperature of the work W can be managed. For this reason, in the hydrogen heating chamber 40, the temperature of the workpiece | work W can be raised and maintained at an appropriate temperature easily, without being influenced by the magnitude | size, shape, and a material of the workpiece | work W.

Therefore, like the brazing apparatus 1 according to the present embodiment, the workpiece (W) is heated in advance in the vacuum heating chamber 20, that is, the high frequency heating induction apparatus 21, and then the workpiece (in the hydrogen heating chamber 40). By heating W), it is possible to raise the work W in a short time as compared with the case where the work W is heated and heated using only means for heating and heating the work W through the atmosphere. The temperature of (W) can be easily raised and maintained at an appropriate temperature. Furthermore, the productivity of the brazing product can be further improved.

Here, in the vacuum heating chamber 20, the workpiece W made of stainless steel parts, copper parts, and the like as in the present embodiment has a temperature of which the stainless steel parts having a large electrical resistance rise faster than the copper parts, while hydrogen In the heating chamber 40, a copper component with a large thermal conductivity rises faster than a stainless component.

Therefore, as in the present embodiment, when the workpiece W is overheated and heated in advance in the vacuum heating chamber 20, and the heated workpiece W is overheated and heated in the hydrogen heating chamber 40, the vacuum heating chamber ( 20) and the disadvantages of each of the hydrogen heating chamber 40 can complement each other, as well as the temperature of the workpiece (W) can be easily raised and maintained at an appropriate temperature in a short time.

2 (a) to 2 (c) are charts showing the relationship between the temperature of the workpiece W and the elapsed time, and FIG. 2 (a) shows the brazing in the brazing apparatus 1 according to the present embodiment. 2 (b) shows a case of brazing only with a vacuum heating chamber, and FIG. 2 (c) shows a case of brazing only with a hydrogen heating chamber (reduction furnace).

2 (a) to 2 (c), the work W can be heated to a brazing temperature quickly in this embodiment, so that the brazing time of the work W can be significantly shortened. have.

In this case, since a combustible gas such as hydrogen gas is usually used as the reducing atmosphere, when air (oxygen) flows into the hydrogen heating chamber 40, the reducing atmosphere introduced into the hydrogen heating chamber 40 may explode. .

Due to this problem, in the hydrogen gas furnace, the inlet and the outlet of the work W provided in the hydrogen gas furnace are formed small to suppress air from entering the furnace, and the ratio of hydrogen gas and oxygen in the furnace is reduced. It is configured to be less than this explosion limit.

However, in the case where the inlet and the outlet of the work W are formed small in this way, the large work W cannot be brazed because the large work W cannot be carried in the furnace.

In contrast, in the present embodiment, the first door 42 to the third door 44 or the first inert gas injection port 49A and the second which alternately change the hydrogen heating chamber 40 into the closed state and the open state. Since the inert gas injection port 49B is provided, a large amount of air can be suppressed from flowing into the hydrogen heating chamber 40. Therefore, even if the inlet and the outlet of the hydrogen heating chamber 40 are formed large, the ratio of reducing atmosphere and oxygen in the hydrogen heating chamber 40 can be suppressed below the explosion limit.

Here, in the case where the high frequency heating induction apparatus 21 heats the work W, applying the voltage to the high frequency heating induction apparatus 21 is as described in the operation description of the brazing apparatus described above. Since it is necessary to cut off the applied voltage and to apply the voltage intermittently when moving, the work W is intermittently transferred from the vacuum heating chamber 20 to the hydrogen heating chamber 40.

For this reason, the hydrogen heating chamber 40 is provided with the first doors 42 to the third doors 44, and the doors are opened and closed according to a predetermined cycle, so that the transfer and the interference of the work W do not occur, The ratio between the reducing atmosphere and the oxygen in the hydrogen heating chamber 40 can be suppressed below the explosion limit and the work W can be brazed in sequence.

In addition, since a reducing atmosphere is introduced into the hydrogen heating chamber 40, brazing can be performed while removing the oxide film formed on the surface of the work W even without using a reducing material having a reducing operation such as flux.

As described above, the brazing device 1 according to the present embodiment sufficiently prevents the reducing atmosphere introduced into the hydrogen heating chamber 40 from being exploded, thereby increasing the safety and leading the lead of the large work W. In addition to being able to carry out contacting, productivity can be further improved because a subsequent process for cleaning and removing the flux is unnecessary.

In addition, since the voltage is applied to the high frequency heating induction device 21 while the inside of the vacuum heating chamber 20 maintains low vacuum, an oxide film is formed on the surface of the work W in the vacuum heating chamber 20 or the work ( The discomfort that W) discolors can be prevented beforehand.

6. Correspondence relationship between invention specific matter and embodiment

In this embodiment, the vacuum heating chamber 20 corresponds to the first heating chamber described in the claims, the hydrogen heating chamber 40 corresponds to the second heating chamber described in the claims, and the first door 42. And the third door 44 corresponds to the opening and closing means described in the claims.

(2nd Example)

This embodiment applies the heat treatment apparatus according to an embodiment of the present invention to a magnetic annealing apparatus for magnetic annealing a work made of iron-based metal parts.

Here, the heat treatment apparatus for magnetic annealing according to the present embodiment and the heat treatment apparatus for brazing according to the first embodiment differ only in specific heating conditions such as a heating temperature and a heating time, and the heat treatment apparatus itself has the same configuration. Detailed description of the heat treatment apparatus overlapped for the sake is omitted.

In this embodiment, when the inside of the vacuum heating chamber 20 becomes low vacuum (0.11 Torr or less), the belt conveyor 62 is stopped to apply a voltage to the coil in a state in which the workpiece W is stopped with respect to the coil. W) is heated up to near the annealing temperature (preliminary heating step), and then, the workpiece W, after which the preliminary heating step is completed, is heated to the magnetic annealing temperature in the hydrogen heating chamber 40 to heat the work (W). ) Magnetic annealing (main heating process).

Characteristics of the magnetic annealing device according to the embodiment

Magnetic annealing is, for example, a process of heating an annealing product (work) in a hydrogen gas atmosphere in order to give luster as described in Patent Document 1.

However, the magnetic annealing device described in Patent Document 1 heats the work to the annealing temperature because the magnetic annealing device heats the work (heating up) through the heated atmosphere by heating the atmosphere such as hydrogen gas or argon gas with an electric heater. There is a problem that it takes time to do, and it is difficult to shorten the annealing time.

In contrast, in the present embodiment, similarly to the first embodiment, the workpiece W is heated in advance in the vacuum heating chamber 20, that is, the high frequency heating induction apparatus 21, and then the workpiece W in the hydrogen heating chamber 40. ), The work W can be raised in a short time as compared with the case where the work W is heated and heated only by means of heating and heating the work W through hydrogen gas. The temperature of W) can be easily raised and maintained at an appropriate temperature. Furthermore, the time required for magnetic annealing can be shortened.

(Third Embodiment)

In the above-described embodiments, the prevacuum chamber 10 is provided before the vacuum heating chamber 20. However, in the present embodiment, the prevacuum chamber 10 is omitted, as shown in FIG. It is simplified.

Here, the heat treatment apparatus 1 according to the present embodiment can be applied to any of a soldering apparatus and a magnetic annealing apparatus similarly to the heat treatment apparatus 1 according to the first embodiment of the present invention.

(Other Examples)

In the above-described embodiments, the intermediate chamber 30 is provided before the vacuum heating chamber 20, but the present invention is not limited thereto, and the intermediate chamber 30 may be omitted.

In the second embodiment described above, although hydrogen gas is used as the atmosphere inside the second heating chamber (hydrogen heating chamber 40), the present invention is not limited thereto, and hydrogen brittleness such as titanium is large. In the metal, argon gas can be used as an atmosphere inside the second heating chamber (hydrogen heating chamber 40).

In the first embodiment described above, although hydrogen gas is used as the reducing atmosphere, the present invention is not limited thereto, and propane gas, butane gas and the like can be used.

Here, when using propane gas or butane gas as a reducing atmosphere, it is not reduced by propane gas or butane gas, but is reduced by carbon monoxide gas obtained by decomposing propane gas and butane gas with a catalyst.

In addition, in the above-described embodiments, the vacuum heating chamber 20 is used as the first heating chamber of the present invention. However, the present invention is not limited thereto, and the inside of the first heating chamber is filled with an inert gas such as nitrogen gas. The work W can be heated in this inert gas.

In addition, the present invention may be variously applied according to the spirit of the invention described in the claims, and is not limited to the above-described embodiments.

In the present invention, since the workpiece is heated in the second heating chamber after the workpiece is heated in advance in the first heating chamber, that is, the high frequency induction heating apparatus, the workpiece is heated and heated using only means for heating and heating the workpiece through the atmosphere. Compared with the invention described in Patent Literature 1, the work can be heated in a short time, and the temperature of the work can be easily raised and maintained at an appropriate temperature, so that the heat treatment can be completed in a short time.

Claims (9)

A first heating chamber for heating the work in the high frequency induction heating apparatus; And A second heating chamber into which the workpiece heated in the first heating chamber is loaded and which heats the workpiece through an atmosphere heated by a heater; Heat treatment apparatus comprising a. In the heat treatment apparatus for soldering a workpiece made of different metal parts having different electrical resistance and thermal conductivity, A first heating chamber for heating the work in the high frequency induction heating apparatus; And A second heating chamber into which the workpiece heated in the first heating chamber is loaded to heat the workpiece through a reducing atmosphere heated by a heater to solder the workpiece; Heat treatment apparatus comprising a. In the heat treatment apparatus for soldering a workpiece made of metal parts, A first heating chamber for heating the work in the high frequency induction heating apparatus; A second heating chamber into which the workpiece heated in the first heating chamber is loaded to heat the workpiece through a reducing atmosphere heated by a heater to solder the workpiece; Heat treatment apparatus comprising a. The method according to claim 2 or 3, Hydrogen gas is introduced into the second heating chamber as the reducing atmosphere. In the heat treatment apparatus for annealing the metal workpiece, A first heating chamber for heating the work in the high frequency heater; And A second heating chamber disposed on a downstream side of the first heating chamber to heat the work in a heated hydrogen gas or argon gas atmosphere; Heat treatment apparatus comprising a. The method according to any one of claims 1 to 5, And a voltage is applied to the high frequency induction heating apparatus while the vacuum is maintained in the first heating chamber. The method according to any one of claims 1 to 6, And a voltage is applied to the high frequency induction heating apparatus while the inert gas is filled in the first heating chamber. The method according to any one of claims 1 to 6, And a voltage is applied to the high frequency induction heating apparatus while nitrogen gas is charged inside the first heating chamber. The method according to any one of claims 1 to 8, And an opening / closing means for alternately changing the second heating chamber into a closed state and an open state.