KR20090095350A - Detecting Panel for X-Ray, Detecting Apparatus for X-Ray and Method for Driving of Detecting Panel for X-Ray - Google Patents

Abstract

A detecting panel for X-ray, a detecting apparatus for X-ray and a method for driving the detecting panel for X-ray are provided to reduce manufacturing cost as a liquid crystal display channel using a thin film transistor is not used. A detecting panel(100) for X-ray comprises a first substrate(201), a second substrate(211), and a partition(214). In the first substrate, a first electrode(202) is arranged. In the second substrate, a second electrode(212) and a third electrode(215) are arranged. A second dielectric layer(213) is arranged between the second electrode and the third electrode. The second electrode is arranged to be parallel to the first electrode. The first dielectric layer is arranged at the upper part of the first electrode. The third electrode is crossed toward the first electrode and the second electrode. The partition partitions off cells between the first substrate and the second substrate.

Description

Detecting Panel for X-Ray, Detecting Apparatus for X-Ray and Method for Driving of Detecting Panel for X-Ray

The present invention relates to a method for driving an X-ray detection panel, an X-ray detection apparatus and an X-ray detection panel.

In general, the X-ray detection apparatus is a device for photographing a subject using X-rays (X-Ray) is currently widely used in medical.

Conventional X-ray detection apparatus has a problem that it is difficult to increase the size and the manufacturing cost is high because it uses a liquid crystal display panel using a thin film transistor (Thin Film Transistor).

One object of the present invention is to provide an X-ray detection panel, an X-ray detection apparatus, and an X-ray detection panel driving method using an X-ray detection gas.

An X-ray detecting panel according to the present invention includes a first substrate on which a first electrode is disposed, a second electrode parallel to the first electrode, a second substrate on which a third electrode intersecting the first electrode and the second electrode is disposed, It may include a partition wall partitioning the cell between the first substrate and the second substrate.

In addition, a first dielectric layer may be further disposed on the first electrode, and a second dielectric layer may be further disposed between the second electrode and the third electrode.

In addition, the X-ray transmittance of the first dielectric layer may be higher than the X-ray transmittance of the second dielectric layer.

In addition, the third electrode may be exposed into the cell.

In addition, the third electrode may include a second portion having a second width and a first portion having a first width wider than the second width.

In addition, the first portion may overlap with at least one of the first electrode and the second electrode.

In addition, the first electrode and the second electrode may overlap each other.

In addition, the X-ray detecting apparatus according to the present invention includes an X-ray emitter for emitting X-rays, an X-ray detecting panel for detecting X-rays, and a driver for processing data corresponding to X-rays detected by the X-ray detecting panel. The X-ray detection panel includes a first substrate on which a first electrode is disposed, a second electrode parallel to the first electrode, a second substrate on which a third electrode intersecting the first electrode and the second electrode is disposed, and a first substrate And a partition wall partitioning the cell between the second substrate and the second substrate.

In addition, the driver supplies a first signal to the first electrode, supplies a first signal and a second signal of reverse polarity to the second electrode, and the data of the third electrode in a period where the first signal and the second signal overlap. You can read

The method of driving the X-ray detection panel may include supplying a first signal to a first electrode and supplying a second signal corresponding to the first signal to a second electrode.

Also, the second signal may be reverse polarity with the first signal.

In addition, the first signal may be a negative signal, and the second signal may be a positive signal.

In addition, the first signal may fall from the voltage of the ground level GND to the first voltage, and the second signal may rise from the voltage of the ground level GND to the second voltage.

In addition, the first signal may fall from the third voltage lower than the voltage of the ground level GND to the fourth voltage, and the second signal may rise from the fifth voltage higher than the voltage of the ground level GND to the sixth voltage. have.

In addition, at least one of the pulse width and the magnitude of the voltage of the first signal may be different from the pulse width and the magnitude of the voltage of the second signal.

In addition, at least one of the pulse width and the magnitude of the voltage of the first signal may be the same as the pulse width and the magnitude of the voltage of the second signal.

The X-ray detecting panel, the X-ray detecting apparatus, and the method of driving the X-ray detecting panel according to an embodiment of the present invention are advantageous in size and have an effect of lowering manufacturing cost.

Hereinafter, an X-ray detecting panel, an X-ray detecting apparatus, and an X-ray detecting panel driving method according to the present invention will be described in detail with reference to the accompanying drawings.

1 is a view for explaining an example of the configuration of the X-ray detection apparatus according to the present invention.

Referring to FIG. 1, the X-ray detecting apparatus according to the present invention may include an X-ray emitter 110, an X-ray detecting panel 100, and a driver 120.

The X-ray emitter 110 emits X-rays.

The X-ray detection panel 100 may detect X-rays emitted by the X-ray emitter 110.

For example, suppose a case in which a subject such as a human body is disposed in front of the X-ray detection panel 100.

In this case, when the X-rays emitted from the X-ray emitter 110 penetrate bones, muscles, organs, etc. of the human body, energy changes may occur depending on the permeable region. For example, the energy of X-rays when penetrating bones and through muscles may be different.

Due to the difference in energy of the X-rays, the degree of ionization of the X-ray detection gas, for example, the penning gas, filled in the X-ray detection panel 100 is different. Then, the X-ray detection panel 100 may detect a difference in the degree to which the X-ray detection gas is ionized.

The driver 120 may process data corresponding to the X-rays detected by the X-ray detection panel 100. For example, the difference between the degree of ionization of the X-ray detection gas when the X-rays penetrate the bones and the muscles in the human body can be treated as data. The driver 120 may process the detected data as an image signal. For example, it is possible to output a photograph taken of the human body by X-rays.

2 is a view for explaining the structure of the X-ray detection panel.

Referring to FIG. 2, the X-ray detection panel 100 includes a first substrate 201 on which the first electrode 202 is disposed, a second electrode 212 parallel to the first electrode 202, and a first electrode 202. ) And a second substrate 211 on which the third electrode 215 intersects the second electrode 212.

Although not shown, the first substrate 201 and the second substrate 211 may be bonded by a seal layer (not shown).

A first dielectric layer 203 may be disposed on the first electrode 202 to limit the discharge current of the first electrode 202 and to insulate the second electrode 202.

Although not shown, another functional layer, for example, a protective layer (not shown) may be further disposed on the first dielectric layer 213. The protective layer may include a material having a high secondary electron emission coefficient, such as magnesium oxide (MgO).

The second electrode 212 may be disposed on the second substrate 211, and the second dielectric layer 213 may be disposed on the second electrode 212 to insulate the second electrode 212.

In order to increase the detection efficiency of X-rays, the first electrode 202 disposed on the first substrate 201 and the second electrode 212 disposed on the second substrate 211 may overlap each other.

Comparing the first dielectric layer 203 and the second dielectric layer 213, the X-rays emitted from the X-ray emitter must pass through the first dielectric layer 203 to reach a cell partitioned by the partition wall 214. Therefore, the X-ray transmittance of the first dielectric layer 203 should be sufficiently high. On the other hand, the X-rays emitted from the X-ray emitter do not have to penetrate the second dielectric layer 213. Therefore, X-ray transmittance of the first dielectric layer 203 may be higher than X-ray transmittance of the second dielectric layer 213.

A third electrode 215 intersecting with the first electrode 202 and the second electrode 212 may be disposed on the second dielectric layer 213. The third electrode 215 may be exposed to the inside of the cell in order to effectively detect the electrons generated by the X-rays. That is, the third electrode 215 may be exposed to the X-ray detection gas.

On the other hand, it is possible to further arrange another functional layer, for example, a third dielectric layer (not shown), on top of the third electrode 215 under conditions that do not excessively interfere with the detection of electrons by the third electrode 215.

In addition, a partition wall 214 may be disposed between the first substrate 201 and the second substrate 211 to partition the cell between the first substrate 201 and the second substrate 211.

Here, although only the case in which the partition wall 214 is disposed on the second dielectric layer 213 is illustrated in FIG. 2, the formation position of the partition wall 214 may not be limited thereto. For example, the partition wall 214 may be disposed above the first dielectric layer 203.

In addition, although only the stripe type partition wall 214 is shown in FIG. 2, the partition wall 214 may also be a closed type including a first partition wall and a second partition wall that cross each other.

An X-ray detection gas may be filled between the first substrate 201 and the second substrate 211. The X-ray detection gas may be ionized by X-rays. The X-ray detection gas is not particularly limited except that ionized by X-rays, and examples thereof include neon (Ne), argon (Ar), xenon (Xe), and the like.

3 to 4 are views for explaining the operation of the X-ray detecting apparatus according to the present invention.

3 to 4, X-rays reaching the X-ray detection panel may pass through the first substrate 201 and the first dielectric layer 203 to reach a cell filled with the X-ray detection gas. For example, as shown in FIG. 4, X-rays may be emitted during the time of T. Here, the time T at which the X-rays are emitted may be adjusted within a range that does not adversely affect the human body. Preferably, T may be 30 ms or less.

Then, the X-ray detection gas is ionized by the X-rays, ions are attracted to the first electrode 202, and electrons are attracted to the third electrode 215.

In addition, the degree of ionization of the X-ray detection gas may vary depending on the amount of energy of the X-rays.

For example, when X-rays penetrate a specific subject, for example, a human body, energy of X-rays reaching each cell may be different. For example, the energy of X-rays that passed through bones in a human body may be less than the energy of X-rays that passed through muscles, so that the degree of ionization of X-ray detection gas in the cells that reach X-rays through bones through X-rays through the muscles It may be weaker than the extent to which the X-ray detection gas is ionized in this reaching cell.

In this case, the amount of electrons attracted to the third electrode 215 in the cell where the X-ray passing through the bone arrives may be less than the amount of electrons attracted to the third electrode 215 in the cell where the X-ray passing through the muscle arrives. have. This may mean that there is a difference in the magnitude of the current flowing through the third electrode 215. When the current flowing through the third electrode 215 is detected as described above, data of a human body is detected using X-rays. Can be obtained.

An example of a method of detecting a current flowing in the third electrode 215 described above, that is, a method of driving an X-ray detection panel is illustrated in FIG. 4.

First, in the driving method of the X-ray detection panel, the first signal S1 is supplied to the first electrode Y and the second signal S2 corresponding to the first signal S1 is applied to the second electrode Z. It may include the step of being supplied.

In detail, the first signal S1 is supplied to the first electrodes 202 and Y1 to Yn, and the second signal S2 corresponding to the first signal S1 is supplied to the second electrodes 212 and Z1 to Zn. When supplied, the corresponding cell is turned on and the current of the third electrodes 215 and X corresponding to the corresponding cell can be read. For example, when the first signal S1 is supplied to the Y1 first electrode and the second signal S2 is supplied to the Z1 second electrode, currents corresponding to the cells disposed on the Y1 first electrode and the Z1 second electrode are read. It can be.

Here, it may be preferable that the second signal S2 is reverse polarity with the first signal S1, more preferably, the first signal S1 is a negative signal, and the second signal S2 May be a positive signal.

In this manner, the current of all the cells can be read in a period where the first signal S1 and the second signal S2 overlap during the time T during which the X-rays are emitted, thereby acquiring data obtained by photographing the subject with X-rays. You can do it.

5 to 9 are diagrams for describing the first signal and the second signal in more detail.

First, referring to FIG. 5, the first signal S1 may be in the form of falling from the voltage 0V of the ground level GND to the first voltage V1, and the second signal S2 may be the ground level GND. It may be in the form of rising from the voltage (0V) to the second voltage (V2). Although the first signal is described as having a negative form and the second signal has a positive form, the first signal may have a positive form and the second signal may have a negative form.

As such, when the first signal is supplied to the first electrode Y and the second signal having the opposite polarity to the first signal is supplied to the second electrode Z, driving efficiency can be improved. For example, when a driving voltage of 400 V is supplied to any one of the first electrode Y and the second electrode Z, and a driving voltage of 0 V is supplied to the other electrode, the first electrode Y In the case of supplying a driving voltage of -200V and supplying a driving voltage of + 200V to the second electrode Z, the latter case may have a relatively high driving efficiency. In addition, the latter case can lower the withstand voltage characteristics of the driving circuit, which may be more advantageous in terms of manufacturing cost.

Next, referring to FIG. 6, the first signal S1 may be in the form of falling from the third voltage V3 to the fourth voltage V4 lower than the voltage 0V of the ground level GND, and the second signal S1. S2 may be in the form of rising from the fifth voltage V5 to the sixth voltage V6 higher than the voltage 0V of the ground level GND. In this case, the withstand voltage characteristics of the driving circuit can be further lowered.

Next, referring to FIG. 7, the first signal S1 and the second signal S2 may overlap. That is, in the above description, only the case where the first signal S1 and the second signal S2 are synchronized is described. Alternatively, as shown in FIG. 7, when the first signal S1 is supplied, It is possible to differ by Δt from the point of supply. That is, the first signal S1 and the second signal S2 may overlap each other. Alternatively, the end point of the second signal may be different from the end point of the first signal.

Next, referring to FIG. 8, the pulse widths of the first signal S1 and the second signal S2 may be different from each other. That is, in the above description, only the case where the pulse widths of the first signal S1 and the second signal S2 are equal to each other is described. However, differently, as shown in FIG. It is possible to be narrower than the pulse width W2 of the two signals S2. Alternatively, unlike FIG. 8, the pulse width W2 of the second signal may be narrower than the pulse width W1 of the first signal.

Next, referring to FIG. 9, voltages of the first signal S1 and the second signal S2 may be different from each other. That is, in the above description, only the case where the voltages of the first signal S1 and the second signal S2 are equal to each other is described. However, unlike FIG. 9, the magnitude of the voltage of the first signal S1 (ΔV1) is different from that of FIG. Is larger than the magnitude (ΔV2) of the voltage of the second signal S2. Alternatively, unlike FIG. 9, the magnitude ΔV2 of the voltage of the second signal may be larger than the magnitude ΔV1 of the voltage of the first signal.

10 is a diagram for explaining an example of the structure of the third electrode.

Referring to FIG. 10, the third electrode 215 may include a first portion 700 having a first width W1 and a second portion 701 having a second width W2 that is wider than the first width W1. It may include.

In addition, the first portion 700 may be a portion overlapping with at least one of the first electrode 202 and the second electrode 212.

As such, when the relatively wide first portion 700 overlaps at least one of the first electrode 202 and the second electrode 212, the current detection efficiency of the corresponding cell may be further improved.

Meanwhile, the third electrode 215 may be formed in the form of a strip, unlike in FIG. 10.

As such, the technical configuration of the present invention described above can be understood by those skilled in the art that the present invention can be implemented in other specific forms without changing the technical spirit or essential features of the present invention.

Therefore, the exemplary embodiments described above are to be understood as illustrative and not restrictive in all respects, and the scope of the present invention is indicated by the appended claims rather than the foregoing detailed description, and the meaning and scope of the claims are as follows. And all changes or modifications derived from the equivalent concept should be interpreted as being included in the scope of the present invention.

1 is a view for explaining an example of the configuration of an X-ray detection apparatus according to the present invention.

2 is a diagram for explaining the structure of an X-ray detection panel.

3 to 4 are views for explaining the operation of the X-ray detecting apparatus according to the present invention.

5 to 9 are diagrams for explaining the first signal and the second signal in more detail.

10 is a diagram for explaining an example of the structure of a third electrode.

<Description of the numbers for the main parts of the drawings>

100: X-ray detection panel 110: X-ray emission unit

120: drive unit

Claims (16)

A first substrate on which the first electrode is disposed; A second substrate on which a second electrode parallel to the first electrode and a third electrode intersecting the first electrode and the second electrode are disposed; And A partition wall partitioning a cell between the first substrate and the second substrate; X-ray detection panel comprising a. The method of claim 1, A first dielectric layer is further disposed on the first electrode. And a second dielectric layer further disposed between the second electrode and the third electrode. The method of claim 2, An X-ray transmittance of the first dielectric layer is higher than an X-ray transmittance of the second dielectric layer. The method of claim 1, And the third electrode is exposed inside the cell. The method of claim 1, The third electrode includes a second portion having a second width and a first portion having a first width wider than the second width. The method of claim 5, wherein And the first portion overlaps at least one of the first electrode and the second electrode. The method of claim 1, And the first electrode and the second electrode overlap each other. An X-ray detection panel for detecting X-rays, And a driver configured to process data corresponding to the X-rays detected by the X-ray detection panel. The X-ray detection panel A first substrate on which the first electrode is disposed; A second substrate on which a second electrode parallel to the first electrode and a third electrode intersecting the first electrode and the second electrode are disposed; And A partition wall partitioning a cell between the first substrate and the second substrate; X-ray detection apparatus comprising a. The method of claim 8, The driving unit The first electrode is supplied to the first electrode, the second signal of reverse polarity is supplied to the second electrode, and the third electrode is overlapped with the first signal and the second signal. X-ray detection device that reads data. In the driving method of the X-ray detection panel according to any one of claims 1 to 7, Supplying a first signal to the first electrode; And supplying a second signal corresponding to the first signal to the second electrode. The method of claim 10, And the second signal has a reverse polarity with the first signal. The method of claim 11, The first signal is a negative signal, and the second signal is a positive signal. The method of claim 10, And the first signal falls from the voltage at ground level (GND) to the first voltage and the second signal rises from the voltage at ground level (GND) to the second voltage. The method of claim 10, The first signal falls from the third voltage lower than the voltage of the ground level GND to the fourth voltage, and the second signal rises from the fifth voltage higher than the voltage of the ground level GND to the sixth voltage. Method of driving the detection panel. The method of claim 10, And at least one of the pulse width and the magnitude of the voltage of the first signal is different from the magnitude of the pulse width and the voltage of the second signal. The method of claim 10, And at least one of the pulse width and the magnitude of the voltage of the first signal is equal to the magnitude of the pulse width and the voltage of the second signal.

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