KR20090072880A - Apparatus for vapor deposition of thin film - Google Patents

Abstract

An organic apparatus for depositing a thin film is provided to minimize the deposition of the organic phosphor on the inner wall of the chamber and increase the utilization efficiency of the organic phosphor. The organic apparatus for depositing a thin film comprises a tank for organic luminescence material(110), and a nozzle unit(130) and an instantaneous heating part. The tank for organic luminescent material stores the organic luminescent material. The nozzle unit deposits the organic luminescent material on the substrate(150). The instantaneous heating unit is equipped in the nozzle unit. The instantaneous heating part heats and vaporizes the organic luminescent material. The instantaneous heating part blocks the heat transferred to the substrate.

Description

Organic thin film deposition apparatus {Apparatus for vapor deposition of thin film}

The present invention relates to an organic thin film deposition apparatus, and more particularly to an organic thin film deposition apparatus that can improve the efficiency of the organic fluorescent material deposited on the substrate.

Recently, various flat panel display devices that can reduce weight and volume, which are disadvantages of cathode ray tubes, have emerged. Such flat panel displays include liquid crystal displays, field emission displays, plasma displays, and organic electroluminescence displays. .

Among them, the organic light emitting display device is a self-light emitting device that emits a light emitting material by recombination of electrons and holes.

The organic light emitting display device has an advantage that the response speed is as fast as that of a cathode ray tube as compared to a passive light emitting device requiring a separate light source like a liquid crystal display device. In addition, the organic light emitting display device has many advantages such as low voltage driving, self-luminous, thin film type, wide viewing angle, fast response speed, and high contrast, and is expected to be a next generation display device.

The organic light emitting display device forms a transparent electrode by depositing a transparent metal such as indium tin oxide (ITO) on a substrate and selectively removing the transparent metal through photolithography and etching. An insulating layer is formed on the transparent electrode, and a partition wall having a predetermined height in the vertical direction at a predetermined interval is formed on the insulating layer.

In order to form a pixel between the barrier ribs, an organic fluorescent material is deposited using the shadow mask of the present invention.

The process of depositing the organic fluorescent material is deposited by heating and vaporizing the organic fluorescent material at a high temperature.

However, in the step of heating the organic fluorescent material to a high temperature, since the general organic thin film deposition apparatus becomes a high temperature, there is a problem that deformation of the substrate and the shadow mask on which the organic fluorescent material is deposited occurs.

In addition, the general deposition apparatus is designed to sufficiently space the distance between the substrate and the shadow mask from the nozzle portion from which the vaporized organic fluorescent material exits to prevent deformation of the substrate and the shadow mask due to heat, but organic type used unnecessarily depending on the distance As the amount of the mineral material (for example, when deposited on the inner wall of the chamber) increases, there is a problem that the efficiency of the expensive organic fluorescent material is lowered.

An object of the present invention is to provide an organic thin film deposition apparatus that can improve the use efficiency of the organic fluorescent material.

Organic thin film deposition apparatus according to an embodiment of the present invention,

An organic light emitting tank containing organic light emitting materials; And a nozzle unit disposed on the substrate for depositing the organic light emitting material on the substrate, wherein the nozzle unit is provided with an instantaneous heating unit for heating and vaporizing the organic light emitting material within seconds.

The organic thin film deposition apparatus of the present invention is a structure capable of heating the organic fluorescent material within a few seconds and at the same time to minimize the heat transfer to the substrate and the shadow mask, improve the deposition rate by reducing the distance between the substrate and the shadow mask from the nozzle portion There is an effect that can improve the use efficiency of the organic light emitting material.

In addition, the present invention has the effect of improving the efficiency of the organic light emitting material by reducing the amount of the organic light emitting material deposited on the inner wall of the chamber unnecessarily by reducing the distance between the nozzle portion, the shadow mask and the substrate.

In addition, the present invention is configured to include the instantaneous heat generating unit and the heat shield in the nozzle portion, it can be applied to all kinds of organic thin film deposition equipment, such as the upward method, vertical method and downward method according to the position of the nozzle unit as well as the substrate and There is an effect that can reduce the cost of thermal deformation of the shadow mask.

In addition, the present invention can introduce an organic material that is easy to thermal deformation because the organic light emitting material is heated only within a few seconds. That is, the present invention has the advantage of free application of organic materials.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a view schematically showing an organic thin film deposition apparatus according to an embodiment of the present invention, Figure 2 is a cross-sectional view showing a nozzle portion of the organic thin film deposition apparatus of FIG.

1 and 2, the organic thin film deposition apparatus according to an embodiment of the present invention is transparent using a shadow mask 160 having a predetermined pattern in a chamber (not shown) not shown. It is a manufacturing apparatus used for the process of depositing organic fluorescent materials of three primary colors (Red, Green, Blue) on the substrate 150 and the process of depositing each organic material.

The organic thin film deposition apparatus includes an organic fluorescent material tank 110 in which organic fluorescent materials are stored, a moving tube 111 through which organic fluorescent material is moved from the organic fluorescent material tank 110, and an organic fluorescent material moved from the moving tube 111 in a gaseous state. The nozzle unit 130 is vaporized and deposited on the substrate 150.

The shadow mask 160 having a slit (not shown) is formed on a region to be deposited on the substrate 150.

Although not shown in the drawing, the moving tube 111 is provided with at least one valve (not shown) for opening and closing the organic light emitting material.

The nozzle unit 130 is a scan method for depositing an organic light emitting material while moving from one side of the substrate 150 to the other side, and the length of the nozzle unit 130 is equal to the length of one side of the substrate 150 corresponding thereto. Equal or longer.

The nozzle unit 130 includes first and second instantaneous heat generating units 141a and 141b for heating the organic fluorescent material for a short time.

The first and second instantaneous heat generating units 141a and 141b allow the organic fluorescent material to evaporate within seconds. That is, the first and second instantaneous heat generating units 141a and 141b heat the organic fluorescent substance higher than the vaporization temperature of the organic fluorescent substance and vaporize it within seconds.

Although not shown in the drawing, the nozzle unit 130 is provided in an area surrounding or adjacent to the first and second instantaneous heat generating units 141a and 141b, and thus, from the first and second instantaneous heat generating units 141a and 141b. A heat shield (not shown) is further provided to prevent the generated heat from being conducted to the substrate 150 and the shadow mask 160.

The heat shield may be a cooling system or a cooling system using a coolant.

The first and second instantaneous heat generating parts 141a and 141b and the heat shielding part (not shown) heat the organic fluorescent material within a few seconds to be deposited on the substrate 150 and at the same time the substrate 150 and the shadow mask 160 direction. By blocking the heat conduction to the nozzle 130 to reduce the gap between the substrate 150 and the shadow mask 160 serves to improve the efficiency of the organic fluorescent material.

Third and fourth instantaneous heat generating parts 143a and 143b are further provided inside the end of the moving tube 111 connected to the nozzle unit 130 to heat the organic fluorescent material supplied through the moving tube 111 for a short time. do.

The third and fourth instantaneous heat generating units 143a and 143b have the same function as the first and second instantaneous heat generating units 141a and 141b.

Although the present invention has been limited to and described an organic thin film deposition apparatus of an up-type method of depositing an organic fluorescence material on the substrate 150, the present invention is not limited thereto. It can be applied to both thin film deposition apparatus.

3 is a cross-sectional view illustrating a configuration of the instantaneous heat generating unit of FIG. 2.

As shown in FIG. 3, the instantaneous heat generating unit according to an embodiment of the present invention includes a heating plate 160, first and second electrode patterns 163a and 163b formed on the heating plate 160, and The heating plate 160 includes a heating pattern 165 formed on the first and second electrode patterns 163a and 163b.

A first insulating layer 161 is formed between the heating plate 160 and the heating pattern 165, the first and second electrode patterns 163a and 163b, and generates heat including the first insulating layer 161. The second insulating layer 167 is formed on the pattern 165 and the first and second electrode patterns 163a and 163b.

When a current flows through the first and second electrode patterns 163a and 163b, the instantaneous heat generating part generates heat in the heat generating pattern 165, and the heat is transferred to the heating plate 160.

The instantaneous heat generating unit may be a ceramic heater, an aluminum heater, a stainless heater, a glass heater, a ludenox heater, or the like.

The instantaneous heat generating part is semi-permanent, can be manufactured in a very small size, can heat only the desired area, and has a feature that is not harmful to the human body because far infrared rays are emitted during heat generation.

As described above, the organic thin film deposition apparatus according to an embodiment of the present invention is a structure that can minimize the heat transfer to the substrate 150 and the shadow mask 160 while heating the organic fluorescent material in a few seconds, The distance between the substrate 150 and the shadow mask 160 may be shortened from the unit 130 to improve the deposition rate, thereby improving the efficiency of the organic light emitting material.

In addition, the present invention by reducing the interval between the nozzle unit 130, the shadow mask 160 and the substrate 150, unnecessary amount of organic light emitting material deposited on the inner wall of the chamber, thereby reducing the efficiency of the organic light emitting material Can be improved.

In addition, the present invention is configured to include the instantaneous heat generating unit (141a, 141b, 143a, 143b) and the heat shield in the nozzle unit 130, the upward method, vertical method and downward method according to the position of the nozzle unit 130, etc. Not only can be applied to various types of organic thin film deposition equipment, but also the cost of thermal deformation of the substrate 150 and the shadow mask 160 can be reduced.

In addition, the present invention can introduce an organic material that is easy to thermal deformation because the organic light emitting material is heated only within a few seconds. That is, the present invention has the advantage of free application of organic materials.

4 is a cross-sectional view schematically showing a substrate on which an organic light emitting material is deposited using an organic thin film deposition apparatus according to an embodiment of the present invention.

As shown in FIG. 4, a transparent metal such as ITO is deposited on the substrate 150, and the transparent metal is selectively removed through a photo and etching process to form a transparent electrode 152.

An insulating layer 153 is formed on the transparent electrode 152, and a partition wall 151 having a predetermined height in a vertical direction at a predetermined interval is formed on the insulating layer 153.

In order to form a pixel between the barrier ribs 151, a red light emitter R is deposited on a selected region using a shadow mask 160.

Although not shown in the drawing, the green light emitter and the blue light emitter are sequentially deposited in the same manner as the red light emitter R using the shadow mask 160.

Those skilled in the art will appreciate that various changes and modifications can be made without departing from the technical spirit of the present invention. Therefore, the technical scope of the present invention should not be limited to the contents described in the detailed description of the specification but should be defined by the claims.

1 is a view schematically showing an organic thin film deposition apparatus according to an embodiment of the present invention.

FIG. 2 is a cross-sectional view illustrating a nozzle unit of the organic thin film deposition apparatus of FIG. 1.

3 is a cross-sectional view illustrating a configuration of the instantaneous heat generating unit of FIG. 2.

4 is a cross-sectional view schematically showing a substrate on which an organic light emitting material is deposited using an organic thin film deposition apparatus according to an embodiment of the present invention.

Claims (5)

An organic light emitting tank containing organic light emitting materials; And And a nozzle unit disposed on the substrate for depositing the organic light emitting material on the substrate. The nozzle unit is an organic thin film deposition apparatus, characterized in that the instantaneous heat generating unit for heating and vaporizing the organic light emitting material within a few seconds. According to claim 1, The nozzle unit further comprises a heat shield for blocking heat to the instantaneous heat generating unit in the peripheral region. According to claim 1, The instantaneous heating unit is an organic thin film deposition apparatus comprising at least two so as to correspond to each other. According to claim 1, The organic light emitting material tank and the nozzle unit is provided with a moving tube, the organic thin film deposition apparatus, characterized in that the instantaneous heat generating portion is provided inside the end of the moving tube adjacent to the nozzle portion. According to claim 1, The instantaneous heating unit, Metal plates; First and second electrode patterns formed on the metal plate at regular intervals; And a heat generating pattern formed on the metal plate and the first and second electrode patterns.

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