KR20090010241U - connecting structure for duct - Google Patents

Abstract

The present invention relates to the connection structure of FRP (fiberglass reinforced plastics) ducts. The present invention includes a hollow first duct having a first flange installed at one end and a tubular connection guide formed at an inner end thereof; An o-ring provided between the connection guide and the inner surface of the first duct; A hollow second duct having a second flange formed at one end thereof and protruding from one side toward the outside and having an insertion portion inserted between the connection guide and the inner surface of the first duct and contacting the O-ring; A flange having an inner surface recessed inward and a bolt hole at both ends is formed, and a flange is contacted in a circumferential direction of upper portions of the first and second flanges to contact the first and second flanges by bolts and nuts. It characterized in that it comprises a fixing band for fixing. This makes it easy and quick to assemble. To eliminate defects in semiconductor products, and no odors caused by assembly work to avoid the evacuation of workers and to ensure safety, and duct management is easy to disassemble after installation There is an advantage to this.

 Connection structure of duct, 1st duct, 2nd duct, O-ring, connection guide, fixing band, odor and dust removal

Description

Connecting structure for duct

The present invention relates to a connection structure of FRP (fiberglass reinforced plastics) ducts installed inside a semiconductor manufacturing plant and discharging gases generated from semiconductor manufacturing equipment to the outside. Maintains confidentiality and improves the working environment by preventing dust and odor from occurring during the connection and installation of ducts.In addition, dust and odor due to installation work when installed in a factory where existing semiconductor manufacturing equipment is installed The present invention relates to a connection structure of F-R ducts that can prevent semiconductor manufacturing equipment from malfunctioning.

Generally, equipment for manufacturing various semiconductors is installed in the semiconductor manufacturing plant, and since the sensors for detecting dust and gas are installed in the semiconductor manufacturing plant, dust, odor, gas, etc. If this occurs, the semiconductor manufacturing equipment may malfunction or stop working. Therefore, the duct installation work in the place where the semiconductor manufacturing equipment is installed, it is necessary to be careful, the gas and odor generated from the semiconductor manufacturing equipment through the installed duct is discharged to the outdoors.

Conventionally, ducts installed inside a semiconductor manufacturing plant where semiconductor manufacturing equipment is installed are formed of FRP (fiberglass reinforced plastics) material, and flanges are formed at the connecting portions of the ducts, and rubber packing is provided between them. It can be assembled with each other tightly using bolts and nuts.

On the other hand, since the flange is not formed at the connection part of the duct, the inner surface of all the ducts having the structure of cutting the duct, contacting both ends of the duct, and bonding the contact part with an adhesive is connected. It has an anticorrosion layer to prevent corrosion.

However, in the duct structure in which the flange part is connected as a bolt as described above, a gap is generated in the connected part as time passes, and gas and odor generated from the semiconductor manufacturing equipment are discharged from the factory without being discharged to the outside through the gap. This causes a problem that the semiconductor manufacturing equipment malfunctions or stops working.

In addition, the duct of the structure in which both ends of the duct are in contact with each other and adhesively bonded to the contact portion of the duct has a dust or the like in the process of cutting the duct appropriately for installation and connection. In addition to the disadvantages of stopping, the corrosion protection layer applied to the inner surface of the duct is broken when cutting the duct, causing corrosion of the duct due to odor and gas. In particular, such a conventional duct has a problem of causing the temperature and humidity of the semiconductor manufacturing room and pressure destruction and malfunction of the equipment in the process of cutting and connecting in the field.

Therefore, the object of the present invention, in order to solve the above-mentioned conventional problems, by standardizing the duct by the manufacturing using a mold, can be connected by simply assembling the duct without cutting or bonding when installing the duct in the semiconductor manufacturing factory By providing a structure, it does not destroy the corrosion protection layer inside the duct due to the duct installation work and does not generate dust and odor, thereby preventing the cause of temperature, humidity and pressure destruction in the semiconductor manufacturing room, and maintaining safety and confidentiality after the duct installation. It provides a connection structure of fiberglass reinforced plastics (FRP) ducts.

The above object is, according to the present invention, in the connection structure of FRP (fiberglass reinforced plastics) duct, a hollow first having a first flange provided at one end and a tubular connecting guide formed at an inner end thereof. Ducts; An o-ring provided between the connection guide and the inner surface of the first duct; A hollow second duct having a second flange formed at one end thereof and protruding from one side toward the outside and having an insertion portion inserted between the connection guide and the inner surface of the first duct and contacting the O-ring; A flange having an inner surface recessed inward and a bolt hole at both ends is formed, and a flange is contacted in a circumferential direction of upper portions of the first and second flanges to contact the first and second flanges by bolts and nuts. It is achieved by a connecting structure of FRP (fiberglass reinforced plastics) ducts characterized by including a fixing band for fixing.

This makes it easy and quick to assemble and connect the dust pollution source of the clean room inside the semiconductor manufacturing plant because the anti-corrosion layer of the dust and ducts are not destroyed during the cutting and installation process for the installation at the duct installation in the semiconductor manufacturing plant. To eliminate defects in semiconductor products, and no odors caused by assembly work to avoid the evacuation of workers and to ensure safety, and duct management is easy to disassemble after installation There is an advantage to this.

Hereinafter, with reference to the accompanying drawings will be described in detail the present invention.

1 is an exploded perspective view partially extracting the duct connection structure according to the present invention, Figure 2 is an enlarged cross-sectional view of the assembled state according to FIG.

As can be seen from these figures, the connection structure of the FRP (fiberglass reinforced plastics) duct according to the present invention, the first duct 10, the O-ring 20, the second duct 30 and And a fixed band 40 is provided.

The duct according to the present invention is variously sized to be manufactured by a mold, and the material of the first and second ducts 10 and 30 manufactured as described above is FRP (fiberglass reinforced plastics). Is formed.

The first duct 10 has a first flange 11 formed at one end thereof, and a tubular connecting guide 13 formed at an inner end thereof, and has a circular shape between the connecting guide and the inner surface of the first duct. The groove 15 is formed and the diameter of the groove is formed to the same diameter as the diameter of the insertion portion 31 of the second duct 30 to be described below.

The O-ring 20 formed of a rubber material is inserted into the groove 15 provided between the connection guide 13 and the inner surface of the first duct 10 and the insertion portion 33 of the second duct 30 inserted into and in contact with the groove. And confidentiality.

The second duct 30 has a second flange 31 formed at one end thereof, protrudes outwardly at one side thereof, and is inserted into a groove 15 formed between the connection guide 13 and the inner surface of the first duct to form an O-ring ( An insertion portion 33 is formed in contact with 20. Thus, the first and second ducts 10 and 30 are assembled to each other.

On the other hand, when the first and second ducts 10 and 30 are assembled to each other and thus the first and second flanges 11 and 31 are in contact with each other, the depression 41 in which the inner surface cross-sectional shape is recessed inward is inward. Using a fixing band 40 having a flange 45 having a bolt hole 43 at both ends thereof, the bolts 47 are brought into contact with each other in a circumferential direction above the first and second flanges 11 and 31. ) And the assembly of the first and second ducts 10 and 30 is secured quickly and quickly without dust and odor by fixing the first and second flanges 11 and 31 as nuts 48. .

In addition, when detaching the assembled state of the first and second ducts 10 and 30 as necessary, the fixing bands are removed from the first and second flanges 11 and 31 by releasing the bolts 47 and the nuts 48. By removing 40, the first and second ducts 10, 30 can be managed simply and quickly.

1 is an exploded perspective view partially extracting the duct connection structure according to the present invention,

2 is an enlarged cross-sectional view of the stewed state according to FIG. 1.

-Description of the symbols for the main parts of the drawings-

10: first duct 11: first flange

13: Connection Guide 15: Home

20: O-ring 30: second duct

31: second flange 33: insertion portion

40: fixed band 41: depression

43: bolt hole 45: flange

47: Bolt 48: Nut

Claims (1)

In the connection structure of FRP (fiberglass reinforced plastics) duct, A hollow first duct having a first flange installed at one end and a tubular connection guide formed at an inner end thereof; An o-ring provided between the connection guide and the inner surface of the first duct; A hollow second duct having a second flange formed at one end thereof and protruding from one side toward the outside and having an insertion portion inserted between the connection guide and the inner surface of the first duct and contacting the O-ring; A flange having an inner surface recessed inward and a bolt hole at both ends is formed, and a flange is contacted in a circumferential direction of upper portions of the first and second flanges to contact the first and second flanges by bolts and nuts. A connection structure of FRP (fiberglass reinforced plastics) ducts comprising a fixing band for fixing.

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