KR20080109107A - Display substrate and method of manufacturing the same - Google Patents
Display substrate and method of manufacturing the same Download PDFInfo
- Publication number
- KR20080109107A KR20080109107A KR1020070056984A KR20070056984A KR20080109107A KR 20080109107 A KR20080109107 A KR 20080109107A KR 1020070056984 A KR1020070056984 A KR 1020070056984A KR 20070056984 A KR20070056984 A KR 20070056984A KR 20080109107 A KR20080109107 A KR 20080109107A
- Authority
- KR
- South Korea
- Prior art keywords
- layer
- metal pattern
- inorganic
- pixel
- pixel electrode
- Prior art date
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133514—Colour filters
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/133734—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by obliquely evaporated films, e.g. Si or SiO2 films
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/12—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode
- G02F2201/123—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode pixel
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Liquid Crystal (AREA)
Abstract
The display substrate includes a pixel structure formed on an insulating substrate, a color filter layer formed on the pixel structure, a pixel electrode formed on the color filter layer corresponding to each pixel, and an inorganic alignment layer formed on the pixel electrode. The inorganic alignment film has a plane shape substantially the same as that of the pixel electrode. The inorganic insulating layer may include silicon oxide (SiOx). The inorganic insulating film and the pixel electrode are formed through one mask process. As such, the stability of the liquid crystal alignment layer may be improved by using the inorganic alignment layer, and the manufacturing cost may be reduced by forming the pixel electrode and the inorganic alignment layer through one mask process.
Description
1 is a plan view illustrating a display substrate according to an exemplary embodiment of the present invention.
FIG. 2 is a cross-sectional view taken along the line II ′ of FIG. 1.
3 to 9 are cross-sectional views for describing a manufacturing process of the display substrate illustrated in FIGS. 1 and 2.
<Explanation of symbols for the main parts of the drawings>
100: display substrate 130: color filter layer
140
200: pixel structure 210: first metal pattern
220: first insulating film 230: second metal pattern
240: second insulating film
The present invention relates to a display substrate and a method for manufacturing the same, and more particularly, to a display substrate used in a liquid crystal display device for displaying an image and a method for manufacturing the same.
A liquid crystal display for displaying an image includes a thin film transistor substrate, a color filter substrate coupled to face the thin film transistor substrate, and a liquid crystal layer disposed between the two substrates.
The thin film transistor substrate includes signal wirings, thin film transistors, and pixel electrodes formed on an insulating substrate to independently drive a plurality of pixels, and the color filter substrate includes red (R), green (G), and blue (B) colors. A color filter layer including color filters and a common electrode facing the pixel electrode are included.
The liquid crystal included in the liquid crystal layer serves as a switch for transmitting or blocking light. The liquid crystal is arranged in a predetermined direction by a liquid crystal alignment layer formed on the thin film transistor substrate and the color filter substrate, and controls the direction of light by an electric field formed by the pixel electrode and the common electrode.
The liquid crystal alignment layer may be classified into a horizontal alignment layer and a vertical alignment layer, and the horizontal and vertical alignment layers generally use a polyimide-based material.
However, the polyimide-based liquid crystal alignment film has a problem in that it is insufficient in stability to heat and light.
Accordingly, the present invention has been made in view of such a problem, and the present invention provides a display substrate capable of improving the stability of the liquid crystal alignment film.
Moreover, this invention provides the manufacturing method of said display substrate.
According to an aspect of the present invention, a display substrate includes a pixel structure formed on an insulating substrate, a color filter layer formed on the pixel structure, a pixel electrode formed on the color filter layer corresponding to each pixel, and an inorganic formed on the pixel electrode. An alignment film is included. The inorganic alignment layer has a plane shape substantially the same as that of the pixel electrode. The inorganic insulating layer may include silicon oxide (SiOx). The inorganic insulating layer may be formed to a thickness of 50nm ~ 300nm.
The pixel structure includes a first metal pattern, a first insulating layer, a second metal pattern, and a second insulating layer. The first metal pattern is formed on the insulating substrate and includes a gate line and a gate electrode connected to the gate line. The first insulating layer is formed to cover the first metal pattern on the insulating substrate on which the first metal pattern is formed. The second metal pattern is formed on the first insulating layer, and includes a data line crossing the gate line, a source electrode connected to the data line, and a drain electrode spaced apart from the source electrode and electrically connected to the pixel electrode. do. The second insulating layer is formed to cover the second metal pattern on the insulating substrate on which the second metal pattern is formed.
The display substrate may be formed on a metal pad electrically connected to an end of at least one of the gate line and the data line, and formed on the metal pad to be in direct contact with the metal pad. It further includes a conductive pad.
According to the method of manufacturing a display substrate according to an aspect of the present invention, a pixel structure is formed on an insulating substrate. A color filter layer is formed on the pixel structure. Through one mask process, a pixel electrode formed on the color filter layer and an inorganic alignment layer having substantially the same planar shape as the pixel electrode are formed on the pixel electrode corresponding to each pixel.
In order to form the pixel structure, a first metal pattern including a gate line and a gate electrode connected to the gate line is formed on the insulating substrate. A first insulating layer is formed on the insulating substrate on which the first metal pattern is formed to cover the first metal pattern. A second metal pattern is formed on the first insulating layer including a data line crossing the gate line, a source electrode connected to the data line, and a drain electrode spaced apart from the source electrode. A second insulating layer is formed on the insulating substrate on which the second metal pattern is formed to cover the second metal pattern.
In order to form the pixel electrode and the inorganic alignment layer, a transparent conductive layer and an inorganic layer are sequentially formed on the color filter layer. A photoresist pattern having a first thickness in the pad region and a second thickness thicker than the first thickness in the pixel electrode region is formed on the inorganic layer. The inorganic layer and the transparent conductive layer are patterned to form the pixel electrode and the inorganic insulating layer in an active region, and formed on a metal pad connected to at least one end of the gate and data lines in the pad region. Form a conductive pad in direct contact with the. The photoresist pattern is ashed to expose the inorganic layer of the pad region. The inorganic layer exposed in the pad area is etched. Strip the ashed photoresist pattern.
According to such a display substrate and a method of manufacturing the same, the manufacturing process is simplified by improving the stability of the liquid crystal alignment layer using the inorganic alignment layer and forming the pixel electrode and the inorganic alignment layer through one mask process.
Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited to the following embodiments and may be implemented in other forms. The embodiments introduced herein are provided to make the disclosure more complete and to fully convey the spirit and features of the present invention to those skilled in the art. In the drawings, the thickness of each device or film (layer) and regions has been exaggerated for clarity of the invention, and each device may have a variety of additional devices not described herein. When (layer) is mentioned as being located on another film (layer) or substrate, an additional film (layer) may be formed directly on or between the other film (layer) or substrate.
1 is a plan view illustrating a display substrate according to an exemplary embodiment of the present invention, and FIG. 2 is a cross-sectional view taken along the line II ′ of FIG. 1.
1 and 2, the
The
The
The
The
The first insulating
The
The
The
On the other hand, when the mask for forming the
The
Accordingly, the thin film transistor TFT including the
The second
The
The
The
The
The
The
The
The
The
The
In order to reduce the number of mask processes, the
The
The data pad part DP includes a
The gate pad part GP may include a
Hereinafter, a method of manufacturing the display substrate illustrated in FIGS. 1 and 2 will be described with reference to FIGS. 3 and 9.
3 to 9 are cross-sectional views for describing a manufacturing process of the display substrate illustrated in FIGS. 1 and 2.
1 and 3, a substrate including a
The
1 and 4, the first insulating
An
The
The
The
Meanwhile, the
1 and 5, the second insulating
The
Subsequently, a
Next, a second contact hole CNT2 exposing a part of the
1 and 6, an inorganic layer for forming the transparent
In order to pattern the
1 and 7, the
7 and 8, an ashing process of reducing the photoresist pattern PRa by a predetermined thickness is performed to expose the
8 and 9, the
Subsequently, when the ashed photoresist pattern PRb remaining on the
According to such a display substrate and its manufacturing method, by using an inorganic alignment film as a liquid crystal aligning film, stability to heat and light can be improved. In addition, the manufacturing cost can be reduced by patterning the inorganic alignment layer and the pixel electrode through one mask process.
In the detailed description of the present invention described above with reference to the preferred embodiments of the present invention, those skilled in the art or those skilled in the art having ordinary skill in the art will be described in the claims to be described later It will be understood that various modifications and variations can be made in the present invention without departing from the scope of the present invention.
Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020070056984A KR20080109107A (en) | 2007-06-12 | 2007-06-12 | Display substrate and method of manufacturing the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020070056984A KR20080109107A (en) | 2007-06-12 | 2007-06-12 | Display substrate and method of manufacturing the same |
Publications (1)
Publication Number | Publication Date |
---|---|
KR20080109107A true KR20080109107A (en) | 2008-12-17 |
Family
ID=40368465
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020070056984A KR20080109107A (en) | 2007-06-12 | 2007-06-12 | Display substrate and method of manufacturing the same |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR20080109107A (en) |
-
2007
- 2007-06-12 KR KR1020070056984A patent/KR20080109107A/en not_active Application Discontinuation
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