KR20080058975A - Unmanned guided vehicle and manufacturing equipment hainvg discharging system of substrate for flat panel display - Google Patents

Abstract

An unmanned guided vehicle including a discharging system for discharging a substrate of a flat panel display and equipment for manufacturing the flat panel display are provided to discharge a substrate while the substrate is conveyed and/or before manufacturing equipment performs a flat panel display manufacturing process to reduce discharging of the substrate and improve productivity of the flat panel display. An unmanned guided vehicle(100) having a discharging system for discharging a substrate of a flat panel display includes a stage(110) on which a cassette(104) in which substrates(102) are loaded is mounted, a controller and a discharging unit(140). The controller determines whether the cassette is mounted on the stage and generates a driving signal. The discharging unit discharges the substrates in response to the driving signal provided by the controller.

Description

UNMANNED GUIDED VEHICLE AND MANUFACTURING EQUIPMENT HAINVG DISCHARGING SYSTEM OF SUBSTRATE FOR FLAT PANEL DISPLAY}

1 is a diagram schematically illustrating a manufacturing line of a conventional flat panel display.

2 is a block diagram schematically illustrating an antistatic system of a substrate for a flat panel display according to a first embodiment of the present invention.

FIG. 3 is a diagram for schematically describing an automatic transport cart including an antistatic system of the substrate for a flat panel display shown in FIG. 2.

4 is a block diagram schematically illustrating an antistatic system of a substrate for a flat panel display according to a second embodiment of the present invention.

FIG. 5 is a diagram for schematically describing an automatic transport cart including an antistatic system of the substrate for a flat panel display shown in FIG. 4.

FIG. 6 is a diagram for schematically describing a manufacturing apparatus for a flat panel display device including an antistatic system of the substrate for a flat panel display device illustrated in FIG. 4.

{Description of symbols for main parts of the drawing}

100, 200: automatic conveyance trolley 110, 210, 310: stage

120, 220 antistatic system 130: first control unit

140: first static elimination means 150: first power supply

230: second control unit 240: static electricity measuring unit

250: third control unit 260: second antistatic means

270: second power supply

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to the manufacture of a flat panel display, and more particularly, to a manufacturing process using an unmanned conveyance truck for carrying a cassette loaded with a substrate in a manufacturing line of a flat panel display device and a substrate loaded in a cassette loaded from an unmanned transport truck A manufacturing apparatus for a flat panel display device is performed.

In response to the development of the information society, the use of flat panel displays (FPDs) such as liquid crystal displays (LCDs) and organic light emitting diodes (OLEDs) is increasing. Among such flat panel display devices, a liquid crystal display device will be described below as an example.

The liquid crystal display may display an image by using the electro-optical characteristics of the liquid crystal molecules forming the liquid crystal layer.

To this end, the liquid crystal display may include a liquid crystal panel, a backlight unit, and a driving circuit unit.

The liquid crystal panel displays an image and may include a color filter substrate and a thin film transistor substrate bonded to each other with a liquid crystal layer interposed therebetween.

The color filter substrate expresses a color and may include a red / green / blue color filter formed as a thin film on a transparent substrate such as glass or plastic.

The thin film transistor substrate applies a voltage to the liquid crystal layer and may include a thin film transistor, a pixel electrode, and a common electrode formed of a thin film on another transparent substrate made of a material such as glass or plastic.

The backlight unit may be disposed on the rear surface of the liquid crystal panel to provide light to the liquid crystal panel.

The driving circuit unit generates driving voltages for driving the liquid crystal panel, and supplies the generated driving voltages to the liquid crystal panel connected thereto.

The conventional liquid crystal display having the above structure can be largely manufactured through a substrate manufacturing process, a cell manufacturing process, and a module manufacturing process. Here, a substrate manufacturing process means the process of manufacturing the color filter board | substrate using the wash | cleaned board | substrate, and the process of manufacturing the thin film transistor board | substrate using the other wash | cleaned board | substrate. The cell manufacturing process refers to a process of forming a liquid crystal panel by forming a liquid crystal layer between a color filter substrate and a thin film transistor substrate and then joining the two substrates together. The module manufacturing step refers to a step of assembling the liquid crystal panel having the driving circuit unit with the backlight unit after attaching the driving circuit unit to the pad portion of the liquid crystal panel.

By the way, for example, for the substrate manufacturing process, the substrates must be transferred in sheet or group form to each manufacturing equipment. For this reason, a plurality of substrates can be stacked in sheets, and a cassette capable of transferring the sheets in groups can be used for substrate transfer. That is, according to the prior art, the substrate can be conveyed to the manufacturing equipment in the state loaded on the cassette.

On the other hand, for example, manufacturing equipment for performing a substrate manufacturing process may have different substrate processing capacities and processing times. Therefore, buffering may occur when the cassette loaded with the substrate is transferred from one manufacturing equipment to the other manufacturing equipment. In order to effectively solve this buffering problem, a stocker for temporarily storing a cassette may be used.

The cassette temporarily stored in the stocker may be returned to each manufacturing equipment through an unmanned conveyance trolley. Here, the unmanned conveyance trolley refers to a vehicle that is responsible for the transfer of logistics by the command of the host computer in an unmanned factory or an automated production line using a battery charged with its own power source. There are a variety of such unmanned conveyance trolleys, such as automatic guided vehicles (AGV) and laser guided vehicles (LGA).

1 is a diagram schematically illustrating a manufacturing line of a conventional flat panel display. In FIG. 1, the automatic conveyance trolley was shown as an unmanned conveyance trolley.

Referring to FIG. 1, as described above, in the manufacturing line 1 of a conventional flat panel display device, a stocker 10 for temporarily storing a cassette 4 on which a substrate is loaded, an automatic transport cart 30, and Manufacturing equipment 40 and 50 are provided.

The stocker 10 may include an input port 12 and an output port 14, a shelf 16, and a rack master 18.

The input port 12 feeds the cassette 4 into the shelf 16 for the cassette 4 conveyed via the automatic conveyance trolley 30 from the output port 44, 54 of any manufacturing equipment 40, 50. You can enter (4).

The output port 14 can output the cassette 4 to convey the cassette 4 carried out from the shelf 16 by the rack master 18 to any manufacturing equipment 40, 50.

The shelf 16 is a facility for temporarily storing the cassette 4 on which the substrate is loaded. Shelf 16 may be partitioned into a plurality of cells, each cell holding one cassette 4.

The rack master 18 travels along a designated movement path 20 inside the stocker 10, takes out the cassette 4 from the shelf 16 to the output port 14, and also inputs the cassette 4 to the input port. It can carry in to the shelf 16 from (12).

The automatic conveyance trolley 30 comprises an input port 12 and an output port 14 of the stocker 10 along with a designated movement path 32 outside the stocker 10, and an input port of the manufacturing equipment 40, 50 ( It travels between 42 and 52 and output ports 44 and 54, and can carry the said cassette 4 conveyance.

By the way, when the cassette 4 is conveyed to the input ports 42 and 52 of the arbitrary manufacturing equipment 40 and 50 by the said automatic conveyance trolley 30, the board | substrate mounted in the cassette 4 is exposed to air. As a result, charging may occur on the substrate. This charging phenomenon may be further intensified by the vibration of the automatic conveyance trolley 30 generated when the automatic conveyance trolley 30 travels.

For this reason, the charged board | substrate can collect the surrounding fine foreign material. Foreign matter present on the charged substrate may remain until the cassette 4 is input to the input ports 42, 52 of the manufacturing equipment 40, 50 through the automatic conveyance trolley 30.

For this reason, foreign material defects due to fine foreign matter collected on the charged substrate may occur. This may act as a factor deteriorating the productivity of the flat panel display.

Accordingly, an object of the present invention is to provide a manufacturing apparatus for an unmanned transport trolley and flat panel display device having an antistatic system capable of static eliminating a substrate.

In addition, another technical problem to be achieved by the present invention is to provide a manufacturing apparatus for an unmanned transport trolley and flat panel display device that can prevent a foreign material defect by having a static elimination system capable of static eliminating the substrate.

Further technical problems to be achieved by the present invention are not limited to the above-mentioned technical problems, and other technical problems not mentioned above are clearly understood by those skilled in the art from the following description. It can be understood.

According to an aspect of the present invention, there is provided an unmanned transport cart including an antistatic system for a substrate for a flat panel display, comprising: a stage for seating a cassette on which a substrate is loaded; A controller which determines whether the cassette is seated on the stage and generates a driving signal; And static elimination means for discharging the substrate in response to the driving signal provided from the controller.

The unmanned transport trolley may include a signal transmission cable having one side connected to the control unit and the other side connected to the antistatic unit, and transmitting the driving signal generated by the control unit to the antistatic unit; And a power supply unit supplying power to each of the control unit and the static elimination means.

Here, the antistatic means may be an ionizer.

On the other hand, the unmanned conveyance trolley provided with the antistatic system of the board | substrate for flat panel displays which concerns on this invention for achieving the said technical subject is a stage which seats the cassette which board | substrate is loaded; A first controller which determines whether the cassette is seated on the stage and generates a first driving signal; A static electricity measuring unit measuring an amount of static electricity of the substrate in response to the first driving signal provided from the first controller; A second controller configured to generate a second driving signal by using the amount of static electricity of the substrate provided from the static electricity measuring unit; And a static eliminator for discharging the substrate in response to a second driving signal provided from the second controller.

Here, in the unmanned conveyance trolley, a first side of which one side is connected to the first control unit, the other side is connected to the electrostatic measuring unit, and transmits the first drive signal generated by the first control unit to the static electricity measuring unit. Cable for signal transmission; A second signal transmission cable having one side connected to the electrostatic measuring unit and the other side connected to the second control unit and transmitting the amount of static electricity of the substrate measured by the electrostatic measuring unit to the second control unit; A third signal transmission cable having one side connected to the second control unit, the other side connected to the antistatic means, and transmitting the second driving signal generated by the second control unit to the antistatic unit; And a power supply unit configured to supply power to each of the first and second control units, the static electricity measuring unit, and the antistatic means.

Here, the static electricity measuring unit, the probe in contact with the substrate to measure the amount of static electricity of the substrate; And a probe driving unit contacting the probe to the substrate in response to the first driving signal provided from the first controller.

Here, the antistatic means may be an ionizer.

On the other hand, the flat panel display manufacturing apparatus including the antistatic system of the flat panel display substrate according to the present invention for achieving the above technical problem is provided in the input port to which the cassette loaded with the substrate from the unmanned transfer truck, A stage for seating the cassette; A first controller which determines whether the cassette is seated on the stage and generates a first driving signal; A static electricity measuring unit measuring an amount of static electricity of the substrate in response to the first driving signal provided from the first controller; A second controller configured to generate a second driving signal by using the amount of static electricity of the substrate provided from the static electricity measuring unit; And a static eliminator for discharging the substrate in response to a second driving signal provided from the second controller.

Here, in the manufacturing apparatus for flat panel display device, one side is connected to the first control unit, the other side is connected to the electrostatic measuring unit, and the first driving signal generated by the first control unit is transmitted to the electrostatic measuring unit. A first signal transmission cable; A second signal transmission cable having one side connected to the electrostatic measuring unit and the other side connected to the second control unit and transmitting the amount of static electricity of the substrate measured by the electrostatic measuring unit to the second control unit; A third signal transmission cable having one side connected to the second control unit, the other side connected to the antistatic means, and transmitting the second driving signal generated by the second control unit to the antistatic unit; And a power supply unit configured to supply power to each of the first and second control units, the static electricity measuring unit, and the antistatic means.

Here, the static electricity measuring unit, the probe in contact with the substrate to measure the amount of static electricity of the substrate; And a probe driving unit contacting the probe to the substrate in response to the first driving signal provided from the first controller.

Here, the antistatic means may be an ionizer.

Specific details of other embodiments are included in the detailed description and the drawings. Advantages and features of the present invention and methods for achieving them will be apparent with reference to the embodiments described below in detail with the accompanying drawings.

Hereinafter, with reference to the accompanying drawings will be described in detail with respect to the unmanned transport trolley and the manufacturing equipment for a flat panel display device having a static elimination system of a substrate for a flat panel display device according to an embodiment of the present invention.

2 is a block diagram schematically illustrating an antistatic system of a substrate for a flat panel display according to a first embodiment of the present invention. FIG. 3 is a diagram for schematically describing an automatic transport cart including an antistatic system of the substrate for a flat panel display shown in FIG. 2. Since the static elimination system shown in FIG. 2 may be included in the automatic conveyance balance shown in FIG. 3, the description of FIG. 2 is not provided separately, and the unmanned conveyance balance will be described with reference to FIGS. 2 and 3. Explanation will be given using the same numbers. In addition, in FIG. 3, the automatic conveyance trolley was shown as an unmanned conveyance trolley. However, this is not intended to be limiting, because it is intended to describe an unmanned transport cart including the antistatic system of the substrate for a flat panel display according to the first embodiment of the present invention. Accordingly, the antistatic system of the substrate for a flat panel display according to the first embodiment of the present invention may be provided in other types of unmanned conveyance trucks, such as a laser conveyance truck.

Referring to FIGS. 2 and 3, the automatic transfer trolley 100 includes a substrate 102 that can be charged when the cassette 104 loaded with the substrate 102 is transferred from the stocker to an input port of any manufacturing equipment. Can be static.

To this end, the automatic conveyance trolley 100 may include a stage 110 and an antistatic system 120.

The stage 110 may seat the cassette 104 on which the substrate 102 is loaded. Here, the cassette 104 may be seated on the stage 110 by the up / down / expansion / rotation operation of the robot arm 112, and the cassette 104 may be seated on the stage 110 by the operation of the robot arm 112. Cassette 104 may be input to an input port of each of the stocker and the manufacturing equipment.

The static elimination system 120 may staticize the substrate 102 loaded on the cassette 104.

To this end, the antistatic system 120 may include a first control unit 130 and a first antistatic means 140. In addition, the antistatic system 120 may further include a first power supply unit 150.

The first controller 130 is driven by using the power supplied from the first power supply 150, and determines whether the cassette 104 is seated on the stage 110 to generate the first driving signal. .

The first driving signal generated by the first control unit 130 may be a signal capable of turning on / off the first static eliminating means 140. That is, when the cassette 104 is seated on the stage 110, the first controller 130 may generate a signal for turning on the first static eliminating means 140. In addition, when the cassette 104 is not seated on the stage 110, the first controller 130 may generate a signal for turning off the first static eliminating means 140. Through this, the lifespan and power consumption of the first static elimination means 140 may be reduced.

The first driving signal generated by the first control unit 130 may be transmitted from the first control unit 130 to the first static eliminating means 140 through the first signal transmission cable 132. Here, the first signal transmission cable 132 may be installed such that one side of the first signal transmission cable 132 is connected to the first control unit 130 and the other side of the first signal transmission cable 132.

The first static eliminating means 140 may be driven by using the power supplied from the first power supply 150, and may charge the substrate 102 in response to the first driving signal provided from the first controller 130. . Here, the first static elimination means 140 may be, for example, an ionizer, but is not limited thereto.

Since the first static elimination means 140 must be able to decharge all the substrates 102 loaded on the cassette 104, the position higher than the substrate 102 located at the top of the substrates 102 loaded on the cassette 104, For example, it may be installed on the upper portion of the outer body of the automatic transport cart (100).

The first static elimination means 140 may include a discharge electrode, and the discharge electrode may alternately generate positive and negative ions through an alternating voltage provided from the first power supply 150. At this time, the generated cations and anions may have a total sum of zero. Thus, the substrate 102 loaded on the cassette 104 may be in contact with the ions emitted from the first static eliminating means 140. Through this, the static electricity present in the substrate 102 can be neutralized and removed by ions of opposite polarity.

The first power supply unit 150 may supply power to each of the first control unit 130 and the first static eliminating means 140 through the first and second power cables 152 and 154, respectively. Here, the first power supply unit 150 may be a battery that is a power source capable of driving the automatic transfer cart 100. In this case, since the battery may provide a DC voltage, a DC-AC converter for providing an AC voltage to the first static elimination means 140 may be additionally provided between the first power supply 150 and the first static elimination means 140. Can be installed.

Due to the static elimination system 120 having the above configuration, fine foreign matters during conveyance of the cassette 104 may not be collected on the substrate 102. Through this, it is possible to prevent a defect in the foreign material due to the fine foreign matter.

4 is a block diagram schematically illustrating an antistatic system of a substrate for a flat panel display according to a second embodiment of the present invention. FIG. 5 is a diagram for schematically describing an automatic transport cart including an antistatic system of the substrate for a flat panel display shown in FIG. 4. Since the static elimination system illustrated in FIG. 4 may be provided in the automatic conveyance balance shown in FIG. 5, the description of FIG. 4 is omitted, and the unmanned conveyance balance will be described with reference to FIGS. 4 and 5. Explanation will be given using the same numbers. In addition, in FIG. 4, the automatic conveyance trolley was shown as an unmanned conveyance trolley. However, this is not intended to be limiting, because it is intended to describe an unmanned transport cart including an antistatic system of a substrate for a flat panel display according to a second embodiment of the present invention. Accordingly, the antistatic system of the substrate for flat panel display according to the second embodiment of the present invention can be applied to other types of unmanned conveyance trolleys such as laser conveyance trolley.

4 and 5, the automatic conveyance trolley 200 picks up a substrate 202 that can be charged when transferring the cassette 204 loaded with the substrate 202 from the stocker to an input port of any manufacturing equipment. Can be static.

To this end, the automatic conveyance trolley 200 may include a stage 210 and an antistatic system 220.

The stage 210 may seat the cassette 204 on which the substrate 202 is loaded. Here, the stage 210 illustrated in FIG. 5 is the same as the stage 110 illustrated in FIG. 3, and thus a detailed description thereof will be omitted.

The static elimination system 220 may staticize the substrate 202 loaded in the cassette 204.

To this end, the antistatic system 220 may include a second control unit 230, a static electricity measuring unit 240, a third control unit 250, and a second antistatic unit 260. In addition, the antistatic system 220 may further include a second power supply unit 270.

The second control unit 230 may be driven by using the power supplied from the second power supply unit 270, and may determine whether the cassette 204 is seated on the stage 210 to generate a second driving signal. .

The second driving signal generated by the second controller 230 may be a signal capable of turning on / off the static electricity measuring unit 240. That is, when the cassette 204 is seated on the stage 210, the second controller 230 may generate a signal for turning on the static electricity measuring unit 240. In addition, when the cassette 204 is not seated on the stage 210, the second controller 230 may generate a signal for turning off the static electricity measuring unit 240.

The second driving signal generated by the second control unit 230 may be transmitted from the second control unit 230 to the static electricity measuring unit 240 through the second signal transmission cable 232. Here, the second signal transmission cable 232 may be installed such that one side thereof is connected to the second control unit 230 and the other side thereof is connected to the static electricity measuring unit 240.

The static electricity measuring unit 240 is driven by using the power supplied from the second power supply unit 270, and measures the amount of static electricity of the substrate 202 in response to the second driving signal provided from the second control unit 230. Can be.

To this end, the static electricity measuring unit 240 may include a probe 242 and a probe driving unit 244.

The probe 242 may contact the substrate 202 to measure the amount of static electricity of the substrate 202.

The probe driving unit 244 moves the probe 242 up / down / left / right in response to the second driving signal provided from the second controller 230 so that the probe 242 moves the substrate 202. Make contact with

The amount of static electricity of the substrate 202 measured by the static electricity measuring unit 240 may be converted into a digital or analog signal, and the converted digital or analog signal may be converted into a third signal through a third signal transmission cable 246. It may be transmitted to the controller 250. Here, the third signal transmission cable 246 may be installed such that one side thereof is connected to the static electricity measuring unit 240 and the other side thereof is connected to the static electricity measuring unit 240.

The third control unit 250 is driven by using the power supplied from the second power supply unit 270, and generates a third driving signal using the amount of static electricity of the substrate 202 provided from the static electricity measuring unit 240. can do.

The third driving signal generated by the third controller 250 may be a signal capable of turning on / off the second static eliminating means 260. That is, when it is determined that the electrostatic capacity of the substrate 202 is large, the third controller 250 may generate a signal for turning on the second static electricity eliminating means 260. In addition, when it is determined that the amount of static electricity of the substrate 202 is low, the third control unit 250 may generate a signal for turning off the second static eliminating means 260. Through this, the life and power consumption of the second static eliminating means 260 can be reduced.

The third driving signal generated by the third control unit 250 may be transmitted from the third control unit 250 to the second static eliminating means 260 through the fourth signal transmission cable 252. Here, the fourth signal transmission cable 252 may be installed such that one side of the fourth signal transmission cable 252 is connected to the third controller 250 and the other side of the fourth signal transmission cable 252.

The second static eliminating means 260 may be driven by using the power supplied from the second power supply 270, and may charge the substrate 202 in response to the third driving signal provided from the third control unit 250. . Here, the second static eliminating means 260 may be, for example, an ionizer, but is not limited thereto. Here, since the second static elimination means 260 may be the same as the first static elimination means 140 shown in FIGS. 2 and 3, a detailed description thereof will be omitted.

The second power supply unit 270 is connected to the second control unit 230, the static electricity measuring unit 240, the third control unit 250, and the second through the third to sixth power cables 272, 274, 276, and 278, respectively. Power may be supplied to each of the static eliminator 260. Here, the second power supply unit 270 may be a battery that is a power source capable of driving the automatic transport cart 200. In this case, since the battery may provide a DC voltage, a DC-AC converter for providing an AC voltage to the second static elimination means 260 may be additionally provided between the second power supply 270 and the second static elimination means 260. Can be installed.

Due to the static elimination system 220 having the above configuration, fine foreign matter during conveyance of the cassette 204 may not be collected on the substrate 202. Through this, it is possible to prevent a defect in the foreign material due to the fine foreign matter.

6 is a diagram for schematically describing a manufacturing apparatus for a flat panel display device including an antistatic system of the substrate for a flat panel display device illustrated in FIG. 4. Since the static elimination system according to the second embodiment of the present invention shown in FIG. 6 is the same as described above, the same reference numerals are used, and redundant descriptions are omitted, and only the features thereof will be described. In addition, since the antistatic system according to the second exemplary embodiment of the present invention may be installed in an input port of the manufacturing equipment for a flat panel display, only an input port of the manufacturing equipment for a flat panel display is illustrated in FIG. 6.

Referring to FIG. 6, a manufacturing apparatus for a flat panel display may perform a predetermined manufacturing process using a substrate 302 mounted on a cassette 304 that is input to itself through an unmanned conveyance truck. Here, the manufacturing equipment, for example, may be any one of cleaning, deposition, photo, etching, orientation, rubbing, bonding, cutting, inspection equipment, which may vary depending on the manufacturing line configuration and characteristics of the flat panel display device. Therefore, it is not limited to the above.

The manufacturing equipment for a flat panel display may include an input port 300 for carrying in the cassette 304 from an unmanned conveyance trolley.

The input port 300 may be provided with a stage 310 for seating the cassette 304. In this case, the antistatic system 220 may be installed on the stage 310. Here, the manufacturing equipment for the flat panel display may include the antistatic system 120 shown in FIG. 2, but in this case, the substrate 302 may be removed whenever the cassette 304 is brought into the input port 300. Problems that need to be static may occur. For this reason, the substrate processing time of the manufacturing equipment for flat panel display devices can be increased. This may act as a factor deteriorating the productivity of the flat panel display. Therefore, the manufacturing equipment for a flat panel display device according to the embodiment of the present invention may include the antistatic system 220 shown in FIG. 4.

The antistatic system 220 may charge the substrate 302 loaded on the cassette 304 before the manufacturing equipment performs a predetermined manufacturing process.

To this end, the antistatic system 220 may include a second control unit 230, a static electricity measuring unit 240, a third control unit 250, and a second antistatic unit 260. In addition, the antistatic system 220 may further include a second power supply unit 270. Here, the second power supply unit 270 may be a power supply unit for operating the flat panel display manufacturing equipment.

Through the antistatic system having the above structure, the flat panel display manufacturing equipment can discharge the substrate loaded in the cassette before the predetermined manufacturing process is performed. For this reason, fine foreign matters may not be collected on the substrate. Through this, it is possible to prevent a defect in the foreign material due to the fine foreign matter.

Although the embodiments of the present invention have been described above with reference to the accompanying drawings, those skilled in the art to which the present invention pertains can realize that the present invention can be implemented in other specific forms without changing the technical spirit or essential features. You will be able to understand that.

Therefore, since the embodiments described above are provided to completely inform the scope of the invention to those skilled in the art, it should be understood that they are exemplary in all respects and not limited. The invention is only defined by the scope of the claims.

According to the present invention, the substrate may be charged during conveyance of the substrate for flat panel display and / or before the manufacturing equipment for flat panel display performs the manufacturing process. For this reason, the charging phenomenon of a board | substrate can be reduced and the physical property defect by a charging phenomenon can be prevented. As a result, productivity of the flat panel display may be improved.

Claims (11)

A stage for seating a cassette on which a substrate is loaded; A controller which determines whether the cassette is seated on the stage and generates a driving signal; And Antistatic means for discharging the substrate in response to the drive signal provided from the controller Unmanned bounce balance that includes. The method of claim 1, A signal transmission cable having one side connected to the control unit, the other side connected to the antistatic means, and transmitting the driving signal generated by the control unit to the antistatic unit; And A power supply unit supplying power to each of the control unit and the static elimination means Unattended bounce balance further including. The method of claim 1, The said antistatic means is an ionizer, The unmanned conveyance truck characterized by the above-mentioned. A stage for seating a cassette on which a substrate is loaded; A first controller which determines whether the cassette is seated on the stage and generates a first driving signal; A static electricity measuring unit measuring an amount of static electricity of the substrate in response to the first driving signal provided from the first controller; A second controller configured to generate a second driving signal by using the amount of static electricity of the substrate provided from the static electricity measuring unit; And Discharge means for discharging the substrate in response to the second drive signal provided from the second control unit Unmanned bounce balance that includes. The method of claim 4, wherein A first signal transmission cable having one side connected to the first control unit and the other side connected to the static electricity measuring unit and transmitting the first driving signal generated by the first control unit to the static electricity measuring unit; A second signal transmission cable having one side connected to the electrostatic measuring unit and the other side connected to the second control unit and transmitting the amount of static electricity of the substrate measured by the electrostatic measuring unit to the second control unit; A third signal transmission cable having one side connected to the second control unit, the other side connected to the antistatic means, and transmitting the second driving signal generated by the second control unit to the antistatic unit; And Power supply unit for supplying power to each of the first and second control unit, the static electricity measuring unit and the antistatic means Unattended bounce balance further including. The method of claim 4, wherein the static electricity measuring unit, A probe contacting the substrate to measure an amount of static electricity of the substrate; And A probe driving unit contacting the probe to the substrate in response to the first driving signal provided from the first controller; Unmanned bounce balance that includes. The method of claim 4, wherein The said antistatic means is an ionizer, The unmanned conveyance truck characterized by the above-mentioned. A stage provided at an input port into which a cassette on which a substrate is loaded is loaded from an unmanned conveyance truck, and for seating the cassette; A first controller which determines whether the cassette is seated on the stage and generates a first driving signal; A static electricity measuring unit measuring an amount of static electricity of the substrate in response to the first driving signal provided from the first controller; A second controller configured to generate a second driving signal by using the amount of static electricity of the substrate provided from the static electricity measuring unit; And Discharge means for discharging the substrate in response to the second drive signal provided from the second control unit Manufacturing equipment for a flat panel display comprising a. The method of claim 8, A first signal transmission cable having one side connected to the first control unit and the other side connected to the static electricity measuring unit and transmitting the first driving signal generated by the first control unit to the static electricity measuring unit; A second signal transmission cable having one side connected to the electrostatic measuring unit and the other side connected to the second control unit and transmitting the amount of static electricity of the substrate measured by the electrostatic measuring unit to the second control unit; A third signal transmission cable having one side connected to the second control unit, the other side connected to the antistatic means, and transmitting the second driving signal generated by the second control unit to the antistatic unit; And Power supply unit for supplying power to each of the first and second control unit, the static electricity measuring unit and the antistatic means Manufacturing equipment for flat panel display further comprising. The method of claim 8, wherein the static electricity measuring unit, A probe contacting the substrate to measure an amount of static electricity of the substrate; And A probe driving unit contacting the probe to the substrate in response to the first driving signal provided from the first controller; Manufacturing equipment for a flat panel display comprising a. The method of claim 8, The said antistatic means is an ionizer, The manufacturing apparatus for flat panel displays characterized by the above-mentioned.

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