KR20080032320A - Plasma display pannel and method for treating surface of the same - Google Patents

Abstract

A plasma display panel and a surface treating method thereof are provided to reduce jitters at an addressing interval when displaying an image by decreasing dangling bond on a surface of the panel. An MgO thin film is formed on a substrate(401), and then the substrate with the MgO thin film is loaded in a chamber(402). The chamber is vacuumed(403), and then predetermined gas is injected into the chamber(404). An inductively coupling plasma is generated in the gas(405). The MgO thin film is reacted with the inductively coupling plasma(406). The gas injected into the chamber comprises at least one selected from the group consisting of Ar, N3 and O2, and the inductively coupling plasma is generated by a high frequency AC voltage.

Description

Plasma Display Pannel and Method for Treating Surface of the Same}

1 is a view schematically showing a conventional surface discharge type PDP of the AC method.

2 is a view for explaining a surface treatment method of the plasma display panel according to the present invention.

3 is a graph comparing jitter before and after surface treatment by the surface treatment method of the plasma display panel.

4 is a block diagram sequentially illustrating a surface treatment method of a plasma display panel according to the exemplary embodiment described with reference to FIG. 2.

5 is a block diagram sequentially illustrating a method of manufacturing a plasma display panel using the surface treatment method of the plasma display panel according to the present invention.

The present invention relates to a plasma display panel, and more particularly to a surface treatment of the plasma display panel.

In general, a plasma display panel (hereinafter referred to as a PDP) is a display that displays characters or graphics by using light generated by excitation of phosphors by 147 nm ultraviolet rays generated when a He + Xe or Ne + Xe gas is discharged. In addition, the film has been attracting attention as a next-generation display because it is not only easy to thin and large in size but also greatly improves image quality and competitiveness in cost due to recent technology development. In this PDP, pixels are arranged in a matrix, and each pixel cell is combined into three sub discharge cells of red, green, and blue for generating red, green, and blue signals. PDPs are roughly classified into direct current (DC) type with large discharges and alternating current (AC) type with surface discharges. The plasma display device of the AC type is a driving method that has attracted attention because of the advantages of low power consumption and lifetime compared to the DC method.

1 is a view schematically showing an AC discharge type surface discharge PDP. Referring to FIG. 1, the PDP is composed of a top plate and a bottom plate, and the top plate includes a sustain electrode pair 102 formed on the upper glass substrate 101 and a bus electrode 103 formed side by side on the sustain electrode pair 102. And a dielectric layer 104 formed on the surface of the bus electrode 103 and the upper glass substrate 101, and an MgO protective film 106 formed on the dielectric layer 104.

The sustain electrode pairs 102 are electrodes which sustain a discharge by performing a counter discharge as the transparent electrode ITO. The bus electrode 103 in parallel with the sustain electrode pair 102 serves to lower the discharge voltage by reducing the electrical resistance of the sustain electrode pair 102. The bus electrode 103 is formed of Cr / Cu / Cr material and is formed by being deposited or etched side by side on the sustain electrode 102. The dielectric layer 104 serves to protect the sustain electrode pair 102 from discharge, and wall charges are accumulated during discharge. This dielectric layer 104 is applied by a screen printing method. The protective layer 105 is made of MgO to serve to protect the dielectric layer 104 from discharge, and is deposited on the dielectric layer 104 by about 2000 kV.

The lower plate includes an address electrode 113 formed on the lower glass substrate 111 so as to be orthogonal to the sustain electrode pairs 102, a second dielectric layer 112 applied on the lower glass substrate 111 and the address electrode 113, and an address. A partition wall 115 extending vertically from the surface of the lower glass substrate 111 with the electrode 113 interposed therebetween, and a phosphor 114 applied to the partition wall 115 and the lower glass substrate 111.

The upper and lower glass substrates 101 and 111 are made of soda lime silicate. The address electrode 113 serves to select a discharge cell which is supplied with data and is scanned by facing a discharge with one sustaining electrode 102. The address electrode 113 is printed on the lower glass substrate 111 by the screen printing method. The phosphor 114 is excited and emitted by ultraviolet rays generated by discharge to generate visible light of red green blue (RGB) in each subcell.

A light emission signal is inputted so that the address electrode and the sustain electrode face opposite discharges, but in a real discharge area, a discharge occurs after a certain time. This delaying time is called jitter. Jitter can appear as noise on display or cause image degradation. Therefore, there is a need to reduce jitter in order to make the PDP image more clear.

SUMMARY OF THE INVENTION The present invention has been made in an effort to provide a surface treatment method for a plasma display panel which reduces jitter in an addressing section during plasma display driving by solving the above-described problems.

Another object of the present invention is to provide a plasma display panel in which jitter is reduced in an addressing period when driving a plasma display by solving the above problems.

In order to achieve the above object, the surface treatment method of the plasma display panel according to the present invention comprises the steps of forming an MgO thin film on the upper portion of the substrate, mounting the substrate on which the thin film is formed in a predetermined chamber, vacuum inside the chamber And a step of injecting a predetermined gas into the chamber, generating an inductively coupled plasma in the gas, and reacting the inductively coupled plasma with the MgO thin film.

The predetermined gas injected into the chamber is preferably one or two or more selected from Ar, N 2 and O 2, and the inductively coupled plasma may be generated by a high frequency induction voltage.

Plasma display panel according to the present invention for achieving the above object comprises the steps of forming a thin film MgO on top of the substrate, mounting the substrate on which the thin film is formed in a predetermined chamber, making the interior of the chamber into a vacuum, the Injecting a predetermined gas into the chamber, generating an inductively coupled plasma in the gas, and reacting the inductively coupled plasma with the MgO thin film. It is done.

Other objects, features and advantages of the present invention will become apparent from the following detailed description of embodiments taken in conjunction with the accompanying drawings.

In the accompanying drawings, the thickness of layers, films, panels, regions, etc., are exaggerated for clarity, and the thickness ratios of the layers in the drawings do not represent actual thickness ratios. On the other hand, when a part such as a layer, film, region, plate, etc. is formed or positioned on another part, it is formed not only in direct contact with another part but also when another part exists in the middle thereof. It should be understood to include.

Hereinafter, the configuration and operation of the present invention will be described in detail with reference to the surface treatment method of the plasma display panel and the embodiment of the plasma display panel according to the present invention.

2 is a view for explaining a surface treatment method of the plasma display panel according to the present invention. Surface treatment according to the invention is carried out in the chamber 201 as shown in FIG. 2. An antenna electrode 203 is present above the chamber 201, and an insulating film 205 is provided between the chamber 201 and the electrode 203.

Specifically, it looks at the surface treatment method of the present invention plasma display panel. First, an electrode and a dielectric are formed on a substrate and an MgO thin film is formed thereon (not shown). The substrate 210 on which the MgO thin film is formed is mounted in the chamber 201. Thereafter, a predetermined gas is injected into the chamber to make a vacuum and plasma to remove impurities in the chamber. The predetermined gas may be one of Ar, N 2 and O 2, and a gas mixed with these gases may also be used. In general, Ar gas is mainly used because of its high stability.

Thereafter, the high frequency AC voltage 207 is applied outside the chamber using the antenna electrode 203 to form an electric field and a magnetic field. The gas in the chamber changes into a plasma state by the electric field and the magnetic field. The plasma generated in this way is called inductively coupled plasma. Plasma can be largely divided into Inductively Coupled Plasma (ICP) and Capacitively Coupled Plasma (CCP), but in the present invention, the surface of the MgO thin film is treated by using Inductively Coupled Plasma (ICP). do. Since the details of the generation algorithm of the inductively coupled plasma are well known, the description thereof is omitted. Inductively coupled plasma is a high-density plasma and has a high responsiveness due to the high temperature of electrons in the plasma, and has a small plasma damage to the substrate due to a small sheath voltage.

The generated inductively coupled plasma reacts with the MgO thin film in the chamber to reduce dangling bonds on the thin film surface. When the unsaturated bond is reduced in this way, the jitter of the panel is reduced because the fast response characteristic is generated by the voltage change between the address electrode and the upper electrode during plasma addressing.

3 is a graph comparing jitter before and after surface treatment by the surface treatment method of the plasma display panel. 3 shows the relative size of the jitter after the surface treatment when the size of the jitter before the surface treatment (ref) is 1. As shown in the graph, after the surface treatment with inductively coupled plasma, the jitter before surface treatment decreased to 0.78 for Ar plasma, 0.62 for N ₂ plasma, and 0.72 for O ₂ plasma.

4 is a block diagram sequentially illustrating a surface treatment method of a plasma display panel according to the exemplary embodiment described with reference to FIG. 2. The surface treatment method of the plasma display panel according to the present invention comprises the steps of forming a thin film MgO on the substrate (401), mounting the substrate on which the thin film is formed in a predetermined chamber (402), making the inside of the chamber into a vacuum Step 403, injecting a predetermined gas into the chamber 404, generating an inductively coupled plasma in the gas 405, and reacting the inductively coupled plasma with the MgO thin film 406. Is done.

5 is a block diagram sequentially illustrating a method of manufacturing a plasma display panel using the surface treatment method of the plasma display panel according to the present invention.

As shown in FIG. 5, the manufacturing method of the plasma display panel includes an upper panel manufacturing process listed on the right side, a lower panel manufacturing process listed on the left side, and a sealing process listed below.

First, the manufacturing process of the upper panel is as follows. The upper panel first prepares an upper glass as a substrate (501), and then a plurality of sustain electrode pairs are formed on the upper glass (502). Thereafter, an upper dielectric layer is formed over the sustain electrode pair (503), and an MgO protective layer for protecting the sustain electrode pair is formed over the upper dielectric layer (504). In the plasma display panel according to the present invention, the MgO protective layer forming step 504 may be based on the sequence according to the block diagram of FIG. 4.

Next, the lower panel manufacturing process will be described. Like the upper panel, the lower panel first prepares a lower glass, which is a substrate (505), and a plurality of address electrodes are formed on the lower glass so as to face and cross the sustain electrode pair formed on the upper panel (506). Thereafter, a lower dielectric layer is formed on the upper surface of the address electrode (507), and a phosphor layer is formed on the upper surface of the lower dielectric layer (508).

The upper panel and the lower panel manufactured as described above are sealed to each other 509 to form a plasma display panel (510).

Those skilled in the art will appreciate that various changes and modifications can be made without departing from the technical spirit of the present invention.

Therefore, the technical scope of the present invention should not be limited to the contents described in the embodiments, but should be defined by the claims.

As described above, according to the present invention, the surface of the plasma display panel is treated with inductively coupled plasma to reduce dangling bonds on the surface of the panel, thereby reducing jitter in the addressing section during display, thereby providing high image quality. It works.

Claims (4)

Forming an MgO thin film on top of the substrate; Mounting the substrate on which the thin film is formed in a predetermined chamber; Vacuuming the interior of the chamber; Injecting a predetermined gas into the chamber; Generating an inductively coupled plasma in the gas; And And reacting the inductively coupled plasma with the MgO thin film. The method of claim 1 The predetermined gas to be injected into the chamber is at least one selected from Ar, N2, O2, or at least two. The method of claim 1 The inductively coupled plasma is generated by a high frequency AC voltage surface treatment method of a plasma display panel. A plasma display panel surface-treated by the surface treatment method of the plasma display panel according to claim 1.

Images