KR20070091830A - Substrate supporting member - Google Patents

Abstract

A substrate supporting member is provided to prevent damage of a substrate and contamination of equipment caused by malfunction of a driving assembly by monitoring the driving state of a driving assembly for moving up/down a lift pin. A support body(120) has a placement surface on which a substrate is placed. A lift pin(110) is formed on the bottom surface of the support body to place the substrate on the placement surface. A driving assembly moves up/down the lift pin, including a motor, an elevation member and a detection member(172). The elevation member moves up/down the lift pin by the rotation of the motor. The detection member detects the moving-up/down of the elevation member. The elevation member includes a driving bar(140), a rotation axis(160) and a driving axis(150). A long hole is lengthwise formed at one end of the driving bar, and a coupling part coupled to a pin support unit is formed at the other end of the driving bar. The rotation axis supplies a seesaw motion between a first position where the lift pin is moved up by the driving bar and a second position where the lift pin is moved down by the driving bar, positioned between the one end and the other end of the driving bar. The driving axis supplies driving force to seesaw the driving bar, inserted into the long hole. The detection member detects whether the driving bar is positioned between the first and the second positions.

Description

Substrate Support Member {SUBSTRATE SUPPORTING MEMBER}

1 is a block diagram showing a substrate support member according to the present invention.

2A and 2B are diagrams for describing an operation process of the substrate support member illustrated in FIG. 1.

3 is a flow chart showing an operation process of the substrate support member shown in FIG.

* Description of the symbols for the main parts of the drawings *

10 chamber 140 drive bar

12: support 150: drive shaft

100: substrate support member 160: rotation axis

110: lift pin 170: monitoring member

112: shaft 172: sensing member

114: gear 172a: first contact sensor

120 support 172b second contact sensor

130 housing 174 control unit

132 frame 176 display member

134: Bracket

The present invention relates to a substrate support member, and more particularly to a substrate support member having a lift pin.

BACKGROUND OF THE INVENTION In general, semiconductor devices and chips are manufactured by a series of processing processes, in which substrates must be aligned in a predetermined state. In particular, since the pattern formed on the substrate must be aligned in a predetermined pattern direction during the normal processing process, a process of aligning the pattern formed on the substrate must be performed before the processing process is started.

In a semiconductor ion implantation process, a process of aligning a predetermined pattern of a semiconductor formed on a substrate in a predetermined direction is required before implanting impurity ions into the substrate. This alignment process is usually performed at the end station of the ion implantation facility, and the end station is provided with a substrate support member for supporting the substrate and rotating the substrate at a predetermined rotational speed to align the substrate pattern.

The substrate support member has a support having a seating surface for seating the substrate, a lift pin coupled to the bottom of the support, and a drive assembly for lifting and lowering the lift pin. The drive assembly has a motor, a drive shaft rotated by the motor, a drive shaft is inserted into one end and the other end is coupled to the lift pin, the rotation shaft is coupled to the center of the drive bar. Therefore, the driving bar receives a driving force from the driving shaft to seesaw around the rotating shaft, and the lift pin coupled to the other end of the driving bar to be moved by the seesaw movement raises and lowers the support.

However, the substrate support member is not provided with means for detecting the driving state of the drive assembly. Therefore, if an error occurs in the driving state of the driving assembly during the process, the substrate is not raised and lowered smoothly, which causes problems such as damage to the substrate and contamination of equipment.

An object of the present invention for solving the above problems is to provide a substrate support member that can monitor the driving state of the drive assembly for raising and lowering the lift pin.

Another object of the present invention is to provide a substrate support member that prevents substrate damage due to a malfunction of a drive assembly for elevating a lift pin.

According to an aspect of the present invention, a substrate support member includes a support having a seating surface on which a substrate is seated, a lift pin provided on a bottom surface of the support to seat a substrate on the seating surface, and lifting and lowering the lift pin. Including a drive assembly, wherein the drive assembly includes a motor, a lifting member for raising and lowering the lift pin by the rotation of the motor, and a sensing member for detecting the lifting and lowering of the lifting member.

According to an embodiment of the present invention, the elevating member has a bar (bar) shape, the driving bar is formed at one end is formed with a long hole in the longitudinal direction of the bar and the other end coupled to the pin support, the driving bar A rotational shaft provided between the first and the other ends of the driving bar to move the first and second positions of the lift pins and the second positions of the lift pins; and a rotary shaft inserted into the long hole to allow the drive bars to move. And a driving shaft for providing a driving force, wherein the sensing member detects whether the driving bar is positioned at the first position and the second position.

According to an embodiment of the present invention, when the driving bar is positioned at the first position, the sensing member has a first contact sensor contacting the other end of the driving bar and the driving bar is positioned at the second position. And a second contact sensor contacting the other end of the drive bar.

According to another exemplary embodiment of the present disclosure, the sensing member may include a sensor bar installed at the other end of the driving bar, a first contact sensor contacting the sensor bar when the driving bar is located at the first position, and the driving bar may include: And a second contact sensor in contact with the sensor bar when positioned in the second position.

According to an exemplary embodiment of the present invention, the substrate support member may be installed in a facility in which the first and second contact sensors and the driving bar do not normally contact each other when the driving bar is positioned at the first position and the second position during the process. It further includes a control unit for stopping the process progress.

According to an embodiment of the invention, the substrate support member is provided in the end station of the ion implantation device, the lift pin is a substrate support member, characterized in that for rotating the substrate seated on the seating surface.

A substrate support member according to an embodiment of the present invention for achieving the above object is a support for mounting a substrate in the ion implantation process, the substrate supporting member for rotating the seated, the substrate having a mounting surface on which the substrate, At least one lift pin coupled to the lower portion of the support, having a bar shape (bar) and one end is formed with a long hole in the longitudinal direction of the bar and the other end is formed with a coupling portion coupled to the pin support, and the pin support Drive bar for seesawing between the first position to raise and the second position for lowering the pin support, so that the drive bar is seesawed between the first position and the second position between one end and the other end of the drive bar A rotating shaft provided, a driving shaft inserted into the long hole and providing a driving force to the driving bar to move the seesaw; A first contact sensor contacting the other end of the drive bar when the copper bar is located in the first position and a second contact sensor contacting the other end of the drive bar when the drive bar is located in the second position The member may include a control unit which stops the process of the installation when the driving member is located at the first position and the second position during the process, when the sensing member does not normally sense the driving bar.

Hereinafter, with reference to the accompanying drawings will be described in detail a substrate support member according to an embodiment of the present invention. The embodiments of the present invention may be modified in various forms, and the scope of the present invention should not be construed as being limited by the embodiments described below. This embodiment is provided to more fully describe the present invention to those skilled in the art. Accordingly, the shape of elements in the figures is exaggerated to emphasize clear explanation.

(Example)

1 is a block diagram showing a substrate support member according to the present invention, Figures 2a and 2b are views for explaining the operation of the substrate support member shown in FIG.

Referring to FIG. 1, the substrate support member 100 according to the present invention has a lift pin 110, a support member 120, and a driven assembly. The lift pin 110 is lifted by the driving assembly, and the support 120 is coupled to the upper portion of the lift pin 110. The support 120 is located in a chamber (not shown) in which a semiconductor processing process is performed. The chamber has a space for performing a predetermined processing process on the semiconductor substrate (W). In one embodiment, the chamber is provided at an end-station of the ion implantation apparatus, and the treatment process may be an ion implantation process in a semiconductor manufacturing process.

The lift pin 110 elevates the support 120 for loading and unloading the substrate W. As shown in FIG. At least one lift pin 110 is provided, and an upper portion of the lift pin 110 is coupled to a bottom surface of the support 120. The lower portion of the lift pin 110 is provided with a shaft 112 that is coupled to the drive bar 140 to be described later. The shaft 112 is coupled to the gear 114 receives the rotational force from the auxiliary motor (not shown). The gear 114 receives the rotational force from the auxiliary motor during the process so that the lift pin 110 may be rotated at a predetermined rotational speed. . When the substrate W is seated on the support 120 during the process, the auxiliary motor rotates the gear 114 to rotate the lift pin 110. Therefore, the substrate W is rotated at an angle, and alignment of the substrate W for the ion process is performed.

The support body 120 supports the substrate W during the process. In one embodiment, the support 120 is manufactured in a disk shape having a diameter smaller than the diameter of the substrate W. FIG. The upper portion of the support 120 has a seating surface for supporting the target surface of the substrate (W), the lower portion of the support 120 is coupled to the lift pin 110. In addition, the support 120 may include fixing means for fixing the substrate W so that the substrate W is not separated from the seating surface when the substrate W is seated. As the fixing means, a vacuum line for adsorbing the bottom of the substrate W seated on the seating surface with a vacuum and a vacuum pump for providing a vacuum pressure to the vacuum line may be used.

In addition, the support 120 is installed to be rotatable inside the chamber. This is to align the pattern formed on the substrate W in a predetermined direction by rotating the substrate W seated on the support 120 at a predetermined angle during the process. That is, during the ion implantation process, since the pattern formed on the substrate W should be aligned in a predetermined direction, the support 12 rotates the seated substrate W to align the pattern direction formed on the substrate W.

The drive assembly moves the lift pin 110 up and down. The drive assembly has a housing 130, a motor (not shown), an elevating member, and a monitoring emember 170. The housing 130 has a frame 132 and a bracket 134 in which the components of the drive assembly are installed. In particular, the frame 132 and the bracket 134 are provided with configurations of lifting members for vertically moving the repeat pin 110. The elevating member has a driven bar 140, a driven shaft 150, and a rotating shaft 160.

The driving bar 140 has a long bar shape. One end of the driving bar 140 is formed with a long hole 142 is inserted into the drive shaft 150 driven by the motor. Long hole 142 is formed in the longitudinal direction of the drive bar (140). The long hole 142 is provided to convert the rotational force of the drive shaft 150 into a seesaw of the drive bar 140. In addition, the other end of the driving bar 140 is provided with a coupling portion coupled with the shaft 112 of the lift pin 110. In one embodiment, the coupling portion may be a configuration of a forceps manufactured to hold and secure the shaft 112.

The drive shaft 150 is driven by a motor (not shown). The drive shaft 134 is inserted into the long hole 142 formed in the drive bar 140, and rotates along the annular movement path 10. The movement path 10 is an operation path of the drive shaft 150 for the drive bar 120 to seesaw around the rotation shaft 160. The movement path 10 may be annular, for example, including a garden, an ellipse, and the like. The rotating shaft 160 is inserted into the driving bar 140 between one end and the other end of the driving bar 140. The rotating shaft 160 serves as a central axis of the seesaw motion of the driving bar 140.

2A and 2B, the above-described seesaw motion has a first position a and a second position b. The first position (a) is the position of the drive bar 140 for separating the substrate (W) from the seating surface during the process, and the second position (b) is for seating the substrate (W) on the seating surface during the process The position of the driving bar 140. For example, the first position (a) is a position where the driving bar 140 is rotated counterclockwise about the rotation axis 160 to lift the lift pin 110, and the second position (b) is the driving bar 140. ) Rotates clockwise around the rotation shaft 160 to lower the lift pin 110.

The above-described shape of the movement path 10 and the long hole 142 of the drive shaft 150 is that the driving bar 140 is provided for the rotation operation between the first and second positions a and b, and the movement path ( 10) and the shape of the long hole 142 may be variously modified and changed. For example, the movement path 10 of the drive shaft 150 may be a straight line and a curved line rather than an annular shape. In this case, the shape of the long hole 142 formed in the drive bar 140 may be variously modified according to the shape and the movement path of the drive shaft 150.

The monitoring member 170 has a sensing member 172, a control member 174, and a display member 176. The sensing member 172 detects whether the driving bar 140 is normally positioned at the first and second positions a and b. To this end, the sensing member 172 has first and second contact sensors 172a and 172b. The first and second contact sensors 172a and 172b may be in contact with the fixed bar 140 during the process, and detect the presence or absence of the fixed bar 140 depending on the contact.

In one embodiment, the first contact sensor 172a is fixedly installed to contact the other end of the fixing bar 140 when the fixing bar 140 is located at the first position (a). The second contact sensor 172b is fixedly installed to contact the other end of the fixing bar 140 when the fixing bar 140 is located at the second position b. Accordingly, the first and second contact sensors 172a and 172b are in contact with the other end of the fixing bar 140 when the fixing bar 140 is normally positioned at the first and second positions a and b, respectively. 140). Each of the first and second contact sensors 172a and 172b transmits a signal corresponding to whether the fixed bar 140 is detected to the controller 174.

In the present exemplary embodiment, the sensing member 172 detects whether the first and second positions (a, b) of the driving bar 140 operate with each other to detect whether the lift pin 110 operates normally. It explained. This is because the driving bar 140 is directly linked to the lifting motion of the lift pin 110. However, the sensing member 172 may detect whether the lift pin 110 is normally raised by detecting the operation of at least one of the components for elevating the lift pin 110. In addition, the position of the sensing member 172 is not limited to being installed in the housing 130, and may be installed at various points of the facility.

In addition, in an embodiment of the present invention, the first and second contact sensors 172a and 172b of the sensing member 172 directly contact the driving bar 140, and thus, the first and second of the driving bar 140. The method of detecting the position (a, b) has been described as an example. However, when the first and second contact sensors 172a and 172b are in contact with the driving bar 140, they may not be sensitively detected. Therefore, the sensing member 172 may further include a sensor bar to increase the sensing sensitivity of the first and second contact sensors 172a and 172b. The sensor bar reacts sensitively with the first and second contact sensors 172a and 172b. For example, the sensor bar (not shown) is fixedly installed at the other end of the drive bar 140. In this case, the sensor bar contacts the first contact sensor 172a when the driving bar 140 is located at the first position (a), and the second sensor bar is positioned when the driving bar 140 is located at the second position (b). In contact with the contact sensor 172b. Accordingly, the sensing member 172 detects whether the sensor bar is positioned at the first and second positions a and b of the driving bar 140 according to whether the sensor bar is in contact with the sensor bar.

The sensing member 172 according to another embodiment of the present invention sensitively recognizes the driving bar 140 having no sensing capability when the first and second contact sensors 172a and 172b contact the driving bar 140. Have a sensor bar to compensate for what you can't do. Therefore, the sensing member 172 may detect the first and second positions a and b of the driving bar 140 more precisely.

The controller 174 determines whether the first and second positions a and b of the fixing bar 140 detected by the sensing member 172 are positioned. If the detection of the sensing member 172 is not normally performed, the controller 174 stops the process of the installation and displays the display member 176 on the display member so as to be recognized by the operator. The display member 176 displays the operation state of the elevating member described above so that an operator can recognize it. As the display member 176, a display member such as a microcomputer or an alarm device for generating an alarm may be used.

Hereinafter, an operation process of the substrate support member 100 having the above configuration will be described in detail. Here, the reference numerals for the same configuration as the above-described configuration are the same and the description thereof will be omitted.

3 is a flow chart showing an operation process of the substrate support member shown in FIG. Referring to FIG. 3, when a process is started, a robot arm (not shown) installed outside the chamber (not shown) may bring a blade (not shown) into which the substrate W is mounted into the chamber. The substrate W is positioned on the support 120. When the substrate W is positioned above the support 120, the motor rotates the driving shaft 150 to raise the lift pin 110 by allowing the driving bar 140 to be positioned at the first position a. The support 120 loads the substrate W seated on the robot arm on the seating surface by the lift pin 110. When the substrate W is loaded on the support 120, the robot arm is moved out of the chamber.

When the blade of the robot arm is taken out of the chamber, the driving bar 140 is rotated clockwise about the rotation shaft 160 from the first position (a) to the second position (b), thereby lifting the lift pin 110. Lower In addition, the lift pin 110 rotates at a predetermined rotational speed so that the pattern formed on the seated substrate W is aligned in a predetermined direction. When the alignment of the substrate W is completed, impurity ions are implanted into the processing surface of the substrate W.

When the ion implantation process is completed, the driving bar 140 is rotated counterclockwise to rotate from the second position (b) to the first position (a) to raise the lift pin (110). Then, when the lift pin 110 is raised, the blade of the robot arm is moved into the chamber to carry out the substrate W seated on the support 120.

During the process described above, the monitoring member 170 monitors the operation of the elevating member for elevating the lift pin 110. That is, when the process proceeds, the sensing member 172 of the monitoring member 170 detects whether it is normally located in the first and second positions (a, b) of the drive bar 140 (S110). That is, when the driving bar 140 is normally positioned at the first position a, the first contact sensor 172a contacts the other end of the driving bar 140 to detect that the normal operation of the driving bar 140 is performed. do. In the same manner, the second contact sensor 172b is in contact with the other end of the driving bar 140 when the driving bar 140 is normally positioned at the second position b, thereby performing normal operation of the driving bar 140. Detect. The first and second contact sensors 172a and 172b transmit the detected signals to the controller 184.

The controller 174 receives the signal sensed by the sensing member 172, and determines whether the operation is normally performed between the first and second positions a and b of the driving bar 140 (S120). If the fixing bar 140 is positioned at the first position (a), the first contact sensor 172a does not contact the fixing bar 140, or the fixing bar 140 is positioned at the second position (b). When the second contact sensor 172b does not come into contact with the fixed bar 140, the controller 174 determines that the operation of the fixed bar 140 is not normally performed, and stops the process of the facility, and the worker The display is displayed on the display member 176 so as to be recognized (S130). The operator grasps the information displayed on the display member 176 and performs maintenance for the normal operation of the substrate support member 100.

As described above, the substrate support member 100 according to the present invention detects whether or not the operation of the lifting member for lifting the lift pin 110 is normally performed, and displays it for the operator to recognize. Therefore, the operation of the elevating member for elevating the lift pin 110 can be monitored.

The foregoing detailed description illustrates the present invention. In addition, the foregoing description merely shows and describes preferred embodiments of the present invention, and the present invention can be used in various other combinations, modifications, and environments. That is, changes or modifications may be made within the scope of the concept of the invention disclosed in this specification, the scope equivalent to the disclosed contents, and / or the skill or knowledge in the art. The above-described embodiments are intended to illustrate the best state in carrying out the present invention, the practice in other states known in the art for using other inventions such as the present invention, and the specific fields of application and uses of the invention. Various changes are also possible. Accordingly, the detailed description of the invention is not intended to limit the invention to the disclosed embodiments. Also, the appended claims should be construed to include other embodiments.

As described above, the substrate support member according to the present invention may monitor the driving state of the driving assembly for elevating the lift pin. Therefore, it is possible to prevent damage to the substrate and contamination of equipment due to malfunction of the drive assembly during the process.

Claims (6)

In the support member for supporting a substrate, A support having a seating surface on which the substrate is seated, A lift pin provided on a bottom of the support to seat the substrate on the seating surface; Including a drive assembly for raising and lowering the lift pin, The drive assembly, Motor, An elevating member that raises and lowers the lift pin by rotation of the motor; And a sensing member for sensing a lifting and lowering operation of the lifting member. The method of claim 1, The lifting member, A driving bar having a bar shape, one end having a long hole formed in the longitudinal direction of the bar, and the other end having a coupling part coupled to the pin support; A rotating shaft provided between the first and the other ends of the driving bar so that the driving bar is seesawed between a first position in which the lift pin is raised and a second position in which the lift pin is lowered; A driving shaft inserted into the long hole and providing a driving force to the driving bar to move the seesaw; The sensing member, And detecting whether the driving bar is positioned at the first position and the second position. The method of claim 2, The sensing member, A first contact sensor contacting the other end of the drive bar when the drive bar is located in the first position; And a second contact sensor contacting the other end of the drive bar when the drive bar is positioned in the second position. The method of claim 2, The sensing member, A sensor bar installed at the other end of the driving bar; A first contact sensor contacting the sensor bar when the driving bar is located at the first position; And a second contact sensor contacting the sensor bar when the driving bar is positioned at the second position. The method according to claim 3 or 4, The substrate support member, When the driving bar is located in the first position and the second position during the process, if the first and second contact sensor and the drive bar does not normally contact, further comprising a control unit for stopping the process of the installation process Substrate support member. The method of claim 5, The substrate support member, It is provided at the end station of the ion implantation device, The lift pin, The substrate support member, characterized in that for rotating the substrate seated on the seating surface.

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