KR20070018805A - Optical system and method for use in projection systems - Google Patents

Abstract

Optical systems and methods are presented to produce controlled illumination light patterns. The system comprises a light source system operatively configured to produce light structured in the form of a plurality of spatially separated light beams; And a beam shaping arrangement. The beam shaping arrangement consists of diffractive optical units operatively configured to perform at least one of the following: (i) combining an array of spatially separated light beams into a simple light beam, thereby intensifying the intensity of the irradiated light; Increases sufficiently; (Ii) apply the intensity profile of the light beam to provide a substantially uniform rectangular intensity illumination beam;

Semiconductor, Projection System, Optical System

Description

Optical system and method for use in projection systems {OPTICAL SYSTEM AND METHOD FOR USE IN PROJECTION SYSTEMS}

The present invention relates generally to optical systems and methods suitable for use in projection systems and to optimized light source and beam shaping systems and methods.

In light source technology advances, light emitting diodes (LEDs) and lasers are being used for ever-growing applications. These forms of light sources are replacing standard light sources such as halogen, florescent and the like because of their improved optical efficiency and low power consumption.

The problems still present with LEDs and lasers, the key light sources in the luminescence / multimedia industry, are due to the low efficiency of today's projection systems that provide high optical power, relatively low power consumption, and require high power sources. It is impossible to provide a light source in a physically small size at a low price point overall.

Laser light sources consisting of a single laser diode are expensive to use in light source applications due to the need for high power output and manufacturing methods.

Vertical resonator surface emitting lasers (VCSELs) have been developed. VCSELs are semiconductor microlasers that offer significant advantages over end-emitting lasers (EEL), which are currently used mostly in light fiber communication devices. EELs emit coherent light or infrared energy parallel to the boundaries between semiconductor layers. The VCSEL emits its coherent energy perpendicular to the boundaries between the layers. VCSELs have the advantages of high operating efficiency and low cost. Structure-based VCSELs can be cut straight into small solid shapes from wafers in a two-dimensional array configuration. The VCSELs operate at low initial currents because of their highly integrated arrangement. Surface-normal emission of the VCSEL, which is nearly identical to the light detector shape, provides easy alignment and packaging; VCSELs provide circular low divergence output beams, eliminating the need for optical calibration. VCSELs are less temperature sensitive compared to terminal light emitting laser diodes, resulting in high transfer rates with low power consumption.

Vertical resonator type surface emitting lasers and methods for their preparation are disclosed, for example, in US Pat. No. 6,542,531. The electronically pumped (pumped) VCSEL here comprises active cavity (cavity) materials sandwiched between the DBR top and bottom stacks. The upper DBR has at least one n-semiconductor layer. The device specifies a gap region between a structured active cavity material surface and an n-semiconductor layer of the upper DBR stack. The structured surface is formed on the top surface of the mesa including at least the n ++ layer on top of the p ++ / n ++ tunnel junction and the surface of the p-type layer outside the mesa. The structured surface fuses to the surface of the n-semiconductor layer of the DBR stack because of the deformation of these surfaces, thereby forming an air gap in the vicinity of the mesa between the fused surfaces. The active region is defined by a current gap comprising a mesa surrounded by an air gap, thereby limiting the flow of current into the active region while the air gap provides a side deflection of the refractive index in the VSCEL. .

U. S. Patent No. 6,546, 029 discloses a fine, electromechanically coordinated vertical cavity light (photonic) device and a method of manufacturing the same. Harmonized Fabry-Perot vertical cavity light devices include harmonized air-gap cavities and top and bottom semiconductor DBR stacks therebetween. The air-gap cavity is formed inside a recess in the insulator above the bottom DBR stack. The upper DBR stack is maintained by the region in the support structure region located above the center region of the vortex while the region of the outer DBR stack and the upper support structure of the vortex provide rupture deflection by application of voltage regulation to the device contact. .

Although some promises have been made in demonstrating visible red VCSELs, most VSCELs today are used primarily for telecommunication purposes in the non-visible range.

Next-generation FP lasers with a 45 ° reflective mirror inside are also manufactured with FP lasers that enable surface light emission.

There is a need in the art for optical systems of high efficiency and preferably small size for use in applications.

The present invention provides a novel approach for light propagation side (optical path) and light source side for dramatically optimizing optical system efficiency (e.g., projection systems), cost and size; It also provides an inexpensive manufacturing method for optical elements that collectively limits light beam properties.

The light source system of the present invention is configured to generate structure light, and preferably comprises an arrangement of micro light sources, which is an optimized method for improving the light source system performance efficiency. Depending on the application). The light source system also includes a light collection / transmission unit (eg, collection lenses). The micro light sources are preferably supported by a conventional substrate and the collection lenses are located above the light source planes. Micro light sources can be implemented using a continuous mechanism limited by a limiting unit that can be integrated inside the light source system (internal logic unit) or can be an independent unit (external unit) connectable to the light source system. have. Such a logic unit is structured and implemented to limit contact and shorting of the light source element (laser) in a way that provides maximum distance on the two light source elements, minimizing heat generation and maximizing heat dissipation. It is possible.

Preferably, the light source system of the present invention utilizes multiple SE lasers, such as VCSELs, or a plurality of closely filled EE lasers. VCSELs can be used as actual light sources, not as pumping sources. Optionally, to implement using VCSELs emitting light outside the visible spectrum within the visible spectrum (eg green light or blue light), the VCSELs directly multiply the frequency that emits the VCSEL laser light line. Or with nonlinear optical media (e.g., crystals or polymers), which are combined with crystals that emit laser light using the VCSEL as a pump source and subsequently multiply the frequency emitted in the visible range from the laser crystal. .

In addition, the present invention provides new beam shaping techniques. In general, the beam shaping aims to provide an output light of controlled cross section cross section from a constant light input (simple beam or multiple beams). The use of beam shaping is essential when implementing multiple micro light sources (eg VCSELs) as an optimized light source. Multiple micro light sources generate structured light, that is, multiple spatially separated light beams, when combined, provide a high density output beam on the one hand and properly shape on the other. Beam shaping techniques of the present invention include a top hat or an arrangement of top hat elements; Dammann gratings; Reverse fencing lattice; Multi-pixel diffractive optical phase masks (filters); And / or using a diffractive optical structure, using a diffractive optical element using a fractal based approach.

Thus, in accordance with a broad aspect of the present invention, there is provided a light source system operable and structured to produce structured light in the form of a plurality of spatially separated light beams; And beam shaping arrangement; The beam shaping arrangement can at least: (i) combine spatially separated light beams into a simple light beam to sufficiently increase the light intensity to be irradiated; (Ii) applying an intensity profile of the light beam to irradiate light of a substantially orthogonal constant intensity profile; A structured optical system is provided to provide a regulated luminescent light pattern, which is structured into a structured diffractive optical unit that is feasible to perform one of the following.

The light source system includes a plurality of arrays of light source elements each producing one corresponding to one of the structured lights. Optionally or additionally, the light source system may include at least one light source for generating a single light beam, and a light splitting unit for dividing the light beam into a plurality of spatially separated light beams.

The light splitting unit may include a multi-fixel diffractive optical face mask configured to generate an array of light beams spatially separated from the light beam. The multi-pixel diffractive optical face mask can be configured to be defined as an array of sub-pixels within each multiple pixels range, whereby multiple spatially separated light beams from each spatially separated light beams Create a fractal approch. The light splitting unit may comprise a Damman grating structure configured to generate a plurality of light beams spatially separated from the light beam. The light splitting unit comprises an array of at least two Damman lattice structures arranged in a dependent manner, such that each light beam output from one Damman lattice structure is directly connected through a continuous Damman lattice structure. Which may increase the number of light beams produced by the first Damman grating structure.

The optical system more preferably comprises a single lens arranged on the light of all the light beams for guiding them along the light axis of the lens, or comprises an arrangement of the lenses on each optical path of the corresponding one of the light beams. Focusing optics.

The light source system may include one or more nonlinear media and one or more pumping light sources to be effected by the light generated by the pumping source either directly or through an additional laser crystal. The pumping source may comprise an array of light source elements such as VCSELs. The light source system may include at least one light bladder diode (LED), and / or at least one EE laser, and / or at least one VCSEL.

The beam shaping arrangement may include an inverted grating only grating structure to produce a single high-density output beam from the structured light. Alternatively or additionally, the beam shaping arrangement may comprise at least one top hat element assembly in the form of an arrangement of top hat elements in each optical path of the one corresponding to one of the plurality of light beams. The top hat element structure generates a mosaic of beams on the surface virtualized therefrom, or a virtualized surface (e.g., an SLM pixel or the whole) by each beam that sufficiently covers the entire surface and sums their intensities. And to influence the intensity of the profile of the corresponding light beam in order to produce a beam output of a substantial rectangular intensity profile corresponding to the shape of the pixel array). The inverse damman structure is used in conjunction with a top hat structure such as the top hat structure in which the output of the inverse damman lattice structure is installed.

Inverted Damman gratings are used with light source systems of the kind using pumping nonlinear optical media. In this case, the reverse damman grating is installed on top of the nonlinear medium in relation to the direction of light propagation through the optical system. In addition, the top hat element structure is mounted on the optical path of the combined light beams generated by the inverted dam grating. The top hat element structure may be used with a light source system of the kind that pumps non-linear optical media, where the top hat element structure is installed directly at the output of the non-linear media.

The optical system more preferably comprises a restriction unit associated with the light source system. The limiting unit is pre-programmed to successively trigger a plurality of light source elements according to a pattern preset by a continuous mechanism. The pattern can be implemented only one light source element at any given time, and the entire light source system is visible to the human eye while being consistently carried out for the required runtime, thereby being defined by the light source system. Reduce overheating in a single area. The pattern may be that at any given moment of time the furthest light source element is operated in relation to the light source element that was implemented before it. The pattern may be that only one group of light source elements is active at any given time.

The light source system can be configured to be limited to at least two spatially separated optical paths, each coupled with at least two light sources, such as operating in different wavelength ranges. At least one of the light sources may be of a class using pumping of a nonlinear medium, and at least one other light source is an active light source. In this case, the beam shaping arrangement is more preferably installed in one of the optical paths to allow the spatially separated light beams to pass through and thereby produce output light beams of considerable rectangular intensity profile. A top hat element structure; And a light coupling unit for coupling light from at least two optical paths for transmission along a general optical path.

Such a system can be used to examine the pixel arrangement of the SLM. The spatially separated light beams are placed in an array corresponding to the pixel array of the SLM. The top hat element structure includes an array of top hat elements each associated with the corresponding of the light beams. The beam shaping arrangement also includes at least one light splitting unit for splitting light, represented from a non-linear medium, as a preset arrangement of spatially separated light beams.

The light source system includes first and second VCSEL arrangements that operate at different wavelengths associated with the first and second nonlinear media, respectively; And laser die arrays operated at a third, different wavelength. In this case, the VCSEL arrays operate in the non-visible spectral range, and the crystals are each used to produce two different colors of the visible spectral range.

According to a broad aspect of the present invention, there is provided a light source system implemented and configured to produce structured light in the form of a plurality of spatially separated light beams; And a beam shaping arrangement; A structured optical system is provided to provide a controlled illumination light pattern comprising a beam shaping arrangement comprising an inverted anti-lattice grating structure that is operated and structured to engage the plurality, thereby significantly increasing the intensity of the illumination light. .

According to another broad aspect of the present invention, there is provided a light source system embodied and configured to produce structured light in the form of a plurality of spatially separated light beams; And a beam shaping arrangement; And from it a controlled irradiation light pattern operable to influence the profile intensity of the light passing through it to produce a light beam of profile of a substantially uniform uniform intensity. It provides an optical system configured to provide.

According to another broad aspect of the present invention, there is provided a light source system operable and structured to produce at least one light beam; And a structured multi-pixel diffractive optical face mask for generating at least one light beam from above, which is a structured light formed by a predetermined arrangement of spatially separated light beams of substantially equal intensity values and profiles. An array, a multi-pixel diffractive optical face mask array structured to define a first array of pixels, each of the pixels patterned to define a second array of sub-pixels, and an upper second column of the pixels. An optical system configured to provide a controlled illumination light pattern comprising the light structured in the form of spatially separated light beams arranged accordingly.

According to another aspect of the invention, there is provided a light source system operable and structured to produce at least one light beam; And a multi-pixel diffractive optical face mask array structured to produce at least one light beam from said structure, said structured light being formed by a predetermined arrangement of spatially separated light beams of substantially equal intensity values and profiles. The first mask splits the light beam into a first array of spatially separated light beams, and the second mask is dependent such as splitting the spatially separated light beams into a second array of spatially separated light beams. An optical system configured to provide a regulated illumination light pattern comprising a multi-pixel diffractive optical face mask array comprising at least first and second multi-pixel diffractive optical face masks arranged in a way.

According to another broad aspect of the present invention, there is provided an optical system for use in patterning a surface, the optical system being embodied and structured to produce at least one light beam; And a multi-pixel diffractive optical face mask arrangement structured to produce at least one of the light beams, which are structured lights formed by a predetermined arrangement of spatially separated light beams of substantially equal intensity values and profiles. do.

According to another broad aspect of the present invention, there is provided a light source system comprising an array of light source elements; And provide a light source system comprising a constrained and structured implementable to implement a continuous mechanism for continuously activating light source elements in accordance with a predetermined pattern.

According to another broad aspect of the present invention, at least two optical paths are respectively provided to at least one of the at least two light sources, which are structured to produce a structured light in the form of an array of spatially separated light beams. At least two light sources for generating light of different wavelengths propagating along; A light coupling arrangement for combining said at least two optical paths into said output optical path; And an optical system for use in scanning an image comprising a mechanical scanner on the output optical path.

According to another aspect of the invention, there is provided an apparatus comprising: at least one of said at least two light sources configured to produce a structured light in the form of an array of spatially separated light beams each of a substantially rectangular uniform intensity profile; At least two individually addressable light sources for generating light of different respective wavelengths propagating along at least two optical paths; A light coupling arrangement for combining at least the two optical paths into an output optical path; And an optical system used for scanning an image comprising a mechanical scanner mounted on the output optical path.

The invention also provides for the generation of structured light in the form of a plurality of spatially separated light beams; And applying beam shaping to the structural light: (i) combining the multiple light beams into a single light beam, thereby significantly increasing the intensity of the irradiated light; (ii) through a diffractive optical unit embodied and configured to carry out at least one of affecting the intensity profile of the input light to provide the irradiation light in the form of an array of light beams of a substantially rectangular uniform shape intensity profile. A method is provided for generating a controlled pattern of illuminated light including the beam shaping that includes structured light beam passing.

According to another broad aspect of the invention, at least one light beam generation; And wherein said at least one light beam is configured to be generated from said structured at least one light beam formed by a preset arrangement of spatially separated light beams of a substantially equivalent intensity value and a Gaussian intensity profile. Provides a method for use in patterning a surface to create a lenslet array passing through a pixel diffractive optical face mask.

According to another broad aspect of the present invention, first and second light portions of at least different wavelengths spread along at least two optical paths, each of which are spatially separated light beams corresponding to an array of image pixels, At least one of the light portions in the form of an array; A method for combining at least two optical paths into a single output optical path and using the array of light beams to connect an array of light beams along the single output optical path to a mechanical scanner and to scan an image. to provide.

The technique of the present invention provides for delivering integrated brightness into the projected image since each pixel is individually turned on and can incorporate 100% of the diffusion of brightness through the image. For example, the use of beam shaping arrangements involving light source systems, such as projection displays, makes it possible to sufficiently reduce the physical size of the SLM and opens up a vast variety of new applications for display projection technology.

Mixed source combinations (coherence and non coherence), polarity and non polarity, including different types of irradiation sources (VCSELs, LEDS, laser dice), beam Shaping arrays (bamman, blightman, damman and lenslet arrays, multi-pixel diffractive optical face masks, fractal beam shaping) can enhance and optimize projection systems and other applications that make significant strides beyond the art. It can be used as a survey system for (eg, lenslet production).

The combination of several light sources in a single medium is carried out with a fast pulse mode drive to achieve lower energy consumption, higher output optical intensity and very little speckle reduction, and sets of groups of light (laser die rows, LEDs) Die, VCSEL arrays), and the continuous mechanism into a single light module is a significant advance over the art.

A more preferred embodiment for understanding this invention and to see how it is actually implemented will be described below with reference to the accompanying figures in a manner not limited to this embodiment:

1 is a block diagram of a light source system of the present invention that can be implemented by a continuous mechanism;

FIGS. 2A-2C more specifically illustrate possible implementations of the light source system of FIG. 1, where FIG. 2A shows an arrangement of multiple micro light sources, and FIGS. 2B and 2C are contiguous mechanisms, respectively. Shows two embodiments of executing.

3 is a block diagram of the optical system of the present invention;

Figure 4 illustrates a light source module formed by a two dimensional array of VCSELs;

FIG. 5 illustrates the conversion of a Gaussian intensity profile to a top hat profile.

6A-6F illustrate optical systems that utilize beam shaping based on the use of top hat element assembly with simulation of beam shaping performed.

7A through 7G illustrate the principles of diffractive optical unit (beam shaping arrangement) design for use in the present invention, where FIG. 7A shows a typical optical set up for beam shaping acquisition. ; 7B shows some steps of the iterative algorithm used; Fig. 7C shows the input field distribution (Gaussian field) and dense output shape (square) in the diffractive optical element, and Figs. 7D to 7G show the simulation results;

8 illustrates an optical system of the present invention using an inverted-only optical element as the beam shaper.

9A-9C illustrate the principles of a Damman grating designed for use in the present invention; 9A shows the optical setup, FIG. 9B shows the lattice transparency in one dimension, and FIG. 9C shows the output of the Damman grating with one transition point;

10A through 10F illustrate the principle of using the apparatus of FIG. 8 to convert a wide light source array into a uniform array of point sources, where FIG. 10A illustrates nine point sources (one-dimensional). 10B and 10C show light intensities computed in the output plane in two dimensions and one dimension respectively, and FIG. 10D shows a one-dimensional Fourier of light intensity in the output plane. Fig. 10E shows the light intensity after free space propagation (FSP) of one focal length distance from the focal plane of the collection lens, and Fig. 10F shows the same in one dimension after the FSP. The light intensity is shown.

Fig. 11 schematically illustrates the optical system of the present invention using a diffractive optical unit for converting a single light beam into a 2D array of beamlets.

Figure 12 shows just a filter phase showing the notations for obtaining mathematical derivation between the energy spot (Δσ) region where the output should be zero and the region where the spot appears (Δμ). Illustrate the principles of analytical solutions for

13A-13C show numerical examples for accessing two fractal terms of a diffractive optical unit suitable for use as a beam shaping arrangement in the present invention;

FIG. 14 schematically illustrates another example of the optical system of the present invention, which uses an inverse damman grating assembly and a top hat element assembly.

FIG. 15 illustrates the production of multiple light spots in a non-linear optical medium by reverse damman grating replacement in FIG. 14 by another type of optical element;

16A and 16B show two examples of the optical system of the present invention, respectively, configured as a projection system combining light from different light sources implemented in different wavelength ranges;

17A and 17B further show two examples of the optical system of the present invention suitable for use in a projection system;

18 illustrates an optical system of the present invention configured for use of a photolithography tool arrangement for the fabrication of microstructures, such as a microlens array fabricated as a surface relief pattern; And

19A and 19B respectively show two examples of a full 2D addressable (addressable) VCSEL pumped based on a structure to obtain three color channels to obtain an image projected in various colors.

Referring to Fig. 1, by way of a block diagram, the light source system 10 of the present invention is shown. System 10 includes an arrangement of micro light sources 6; Focusing optics 4 (light collecting / transmitting optics); Light source driver assembly 20; And a pre-programmed processor for executing the write continuous mechanism 18.

2A-2C illustrate in more detail possible implementations of the light source system of FIG.

2A shows the top of a light source module 1 formed by a number of N micro light sources all supported by a normal substrate 2, and the light collection / transmission optical lens 4 It is located above the plurality of micro light sources 6. In this embodiment, the optical lens 4 collects the light generated by all the micro light sources 6 and a single collection lens for transmitting the collected light outward in a relatively uniform parallel manner. It includes. It should be noted that additional optical lenses, such as beam shaping, which will be described further below, may add upstream and / or downstream of the collection lens. 2B and 2C show two examples, respectively, for a continuous mechanism implementation in micro light sources. Each of the figures shows a rear view of the light source module 1.

 In the embodiment of Fig. 2B, the light source module 1 operates to integrate the light continuous mechanism and the light source driver (18 and 20 of Fig. 1) and to limit the continuous mechanism, In other words, it uses an internal limiting unit (electronic circuit) 8 which automatically proceeds simultaneously and limits the micro light source 6 from turning on and off. Two input ports 11 are provided in combination with the input voltage supply, while the rest of the light source on / off operational steps are automatically completed by an internal limiting unit 8.

In the embodiment of FIG. 2C, device 12 is used to integrate the light continuation mechanism and the light source driver (18 and 20 of FIG. 1). The light source module 1 at its rear is provided with N input port 14 associated with each of the N micro light sources, and is operated properly separated by a limiting unit; And also one common connection port is used (not shown).

The continuous mechanism consists of the following: Micro light sources 6 have a short time per source, such as the method in which the furthest source at each time responds to the light source that was turned on before. Lights up during periods. This is allowed to reduce overheating in a single area defined by the light source module.

With a suitably continuous light source 6, only one light source is turned on at a given time. After one light source is on for some time period, the light source is turned off and the other light source is turned on. Since at least one light source is turned on at any given time, the entire light module appears to stay on for a given operating time to the human eye.

Since the heat generated by one light source is absorbed by the entire light module medium, the continuous mechanism allows the light module to have a smaller physical size. Because each time the other source is turned on, the light source that was turned on first at any given time is now cooled, while the other light source that is turned on is heated. This also allows for over-current operation of the light source where electrical higher-pezk power light pulses are generated, which is better for optical conversion efficiency.

The periodic time of each micro light source in the light source module and the selectivity of the sources will be turned on according to their internal location which can be selected and limited depending on the specific application requirements and the set method of the light module operating. .

Returning to Fig. 1, the system 10 is operated in the following way: The input driving signal 16 is operated and configured to enable, in particular, to limit the selective operation of the micro light sources. It is passed to the light continuous mechanism 18, such as how long the micro light source will be turned on. The light continuous mechanism 18 transmits a signal to the light driver 20 and then is projected outside of the module and then uniformly projects out of the light collected in a parallel manner. It physically drives a designated micro light source in an array of micro light sources 6 for producing light collected by the optical lens 4.

The required number of micro light sources 6 can be provided by the operation of the same wavelength (eg red) or other wavelengths. The micro light source 6 can be LEDs, lasers, or any combination of both (including polarized source types, pulsed or continuous wave types). An example of a light source module is a 2D addressable array of surface emitting (SE) lasers such as VCSELs, or a new kind of surface-emitting FP lasers with a 45 degree reflection mirror inside (Quintessence Photonics). Corporation, commercially available).

The maximum integrated arrangement of VCSELs or small, low power Fabry-Perot (FP) end-emitting (EE) lasers would be advantageously used for scientific path investigation. VCSELs are small in size and cost effective; Small, low power FP (EE) allows for high volume utilization such as optical storage; VCSEL operates with low threshold currents and thus enables high-density arrays (arrays); The surface-normal emission of the VCSELs and the surface-normal emission of the VCSELs and the photo detector geometry which is almost identical to the photographs make it easy to adjust and pack. An approach based on VCSELs provides a budget potential because these devices are tested and completed at the wafer level. Light emission at a VCSEL or SEEP array, eg, 6 × 6 array, 1060 (nm) can be used in the projector.

Unlike typical Fabry-Perot (FP) cavities (cavities) of end-emitting (EE) laser diodes, which are 250 to 500 microns in length, the overall size of the VCSEL is only for electrical contact with the dimensions of the emission area. Limited only by space Thus, the die for the finished VCSEL is potentially slightly larger than the beam size. Devices currently capable of 5-25 μm circular beams are about 100 μm in volume (including heat dissipation surfaces), but this can certainly be 50 μm or smaller. The smaller size results in higher integration density, lower budget and higher yield per wafer for laser array utilization.

When comparing a surface-emitting (SE) laser with an EE laser diode, the following should be recalled. The EE laser diode must be diced up (and possibly even mounted) just to determine what is good and what is bad. They cannot be tested at all when present as part of the original wafer, since the ends have not yet been split. This is an expensive time consuming process and is the result of many wasted efforts and materials. On the other hand, the entire wafer of SE lasers can be tested with each unit rated for laser threshold, power, beam shape, superiority and safety. For example, it is possible to form one million VCSELs on a single wafer in a batch process and then automatically test and evaluate the performance of each one. The entire wafer is burned in to eliminate the initial loss rate and ensure high reliability of the final product. Each device can then be packaged or discarded based on these findings. SE laser wafers can be cut into cubes to produce laser arrays of various sizes in a low budget manner. Virtually the same devices, used in the final structure of devices based on integrated circuits, are VCSELs because they are attached equally to the package substrate and shine through a window like that of an EPROM (but of high optical quality). It may be used in or integrated with the optical fiber structure as needed. Since the active lasing semiconductor and the mirrors are buried under the top surface layer, no sealed closure is necessary. VCSELs can use inexpensive plastic packaging and / or can easily be combined with other optical components, such as hybrid or chip-on-board structures. All of this contributes to further cost savings.

Returning to Figures 1 and 2A to 2C, the light source system (module) requires light sequential operation, such as a projection system in which the R, G, and B sources are turned on continuously to produce a full color video image. And can be operated by pulse modulation according to the light continuous mechanism that is allowed to create an optimal light module for a projection system without the need for continuous light operation. 33% of the maximum time sustained in such a system is dedicated to each of the color sources (R, G, B), so that the optimal light source is not designed to use 100% of the time preferentially, Only 33% of the time.

Considering the light source module on which the VCSELs are based, the groups of VCSELs can be operated for a very short period of time to cover up to 33% of the total color illumination. By doing so, more output can be squeezed from the VCSELs, so each group of VCSELs can be turned on for a duty cycle of 5% and 95% of the time can be turned off, while the other of the VCSELs The groups cover off time of the first group until the groups fill the entire 95% off time of the first group and then turn on again in a repeating manner. The VCSELs group then has time to cool down, but the VCSELs can be delivered at higher peak power when they are turned on in a shorter time than when they were turned on in continuous wave operation mode. have. Therefore, the total optical power output from the light module for a maximum light duty cycle of 33% is relatively low electrical compared to the high-power CW light source, which was used for only 33% of the time. Power consumption rises further. So power consumption is optimized.

This technique is used and formed for other irradiation sources that can be combined with 2D VCSEL pumping arrangements such as LED dies. Individually, each die can be turned on for up to 33% of the total time for a given color continuous operation, with only 5% of the 33% time turned on and 95% of the 33% time off. If the total timing does not exceed 5 (ms) of the timing cycle, the optical output can rise by a factor of up to 15 within such as with LEDs. Continuous color in projection displays requires at least 1 (80) Hz of frame rate operation, and then reaching 5 (ms) is not to be considered as a limit or obstacle.

Like RED irradiation sources, for example, the same method is used for using laser die arrays and then results in similar results.

Both the VCSEL array source and the laser die array source can be of a kind that delivers polarized output light, so that the total physical area occupied by advanced light transmission through SLM and less heat dissipated optical paths It should be recalled that the system is reduced and can be used advantageously with spatial light modulators (SLM).

The present invention provides the possibility of adding non-linear crystals for frequency doubling to use an array of VCSELs like an actual light source (and unlike a pumping source).

Irradiation with the light source system described above using the VCSEL array and / or the laser die array causes spots of different patterns to appear in each cycle. This is accomplished by turning the VCSEL switch on and off, for example at a rate of 10KHz (low frequency switching for the VCSEL and high frequency switching for the human eye) at high duty-cycles of 95 to 99%. Allows for spot reduction to be contrasted. Each off-on cycle results in a VCSEL arrangement to start at a random phase, so different spot patterns occur. Therefore, spots of the output image are reduced and a clean image of spotlessness is maintained. Since VCSELs are typically used in telecommunications, even faster switching of lasers (up to one million cycles per second) is possible, further reducing forward specks by maintaining a spot pattern between each of the changing ones. . Visual integration reduces spot contrast with the perception of vision.

The present invention also provides for refined beam shaping techniques. As with other applications / systems such as optical element fabrication, beam shaping can be used to fully utilize / progress the projection system; The beam shaping technique of the present invention aims to implement at least one of the following: structural light (multiple spatially separated light beams) of significantly higher intensity values (substantially with the intensity of all light beams). Combine into a single light beam; Affect the intensity profile of the at least one light beam to provide at least one output light beam of a sufficiently rectangular intensity profile; And a single light beam of sufficiently rectangular intensity profile of multiple spatially separated light beams is produced.

3 schematically shows an optical system 200 of the present invention. System 200 includes light source system 202; Beam shaping arrangement 210; And more preferably also includes a light collection / transmission optical 204 lens, which may or may not be part of the light source system 202. The beam shaping arrangement may or may not be part of the light source system as well. The beam shaping arrangement can be installed completely or partially upstream of the focusing optical lens.

The light source 202 is configured by using a multiple light source element array, for example, having multiple micro light sources (eg VCSELs) located in a general circuit board (wafer), that is configured as shown in FIG. 1A. Or to generate a structured light B1 obtained by using a single light source and a light splitting unit. The focusing optical lens 204 includes a single lens associated with multiple light beams, or an array of lenses (lenslet arrays) each associated with an array of light beams. Beam shaping arrangement 210 is a diffractive optical unit that may include an array of top hat elements for generating rectangular-profile light beams, and / or for combining structured light into a single high-intensity light beam B ₂ . Only inverse dams consist of a lattice structure.

Optionally provided in the beam shaping array 210 and / or the light source system 202 is at least one multi-pixel diffractive optical face mask (filter), which may be configured using a face mask based on a fractal approach. . Furthermore, optionally provided to the light source system 202 is a non-linear optical medium located in the optical path of light B ₁ (which is a single or multiple beam light) or in the optical path of light B ₂ .

Beam shaping arrangements using multi-pixel diffractive optical face masks (filters) or face masks based on fractal approaches can be designed to output a two-dimensional array of equally distributed spots when turned on with a light source system. There is such a beam shaping method can be used, for example, of the NxM small beamlets / spot for irradiating the array of pixels of the SLM unit which each pixel is examined individually in the SLM Used for constant survey sources to split into arrays. It is formed as NxM small light sources, each attached to their own SLM pixel. Thus, the validity of the light used to examine the image from the SLM is not hindered by the SLM Black Matrix (TFTs); In addition, it avoids overheating of the SLM and diminishes much of the light (brightness), which is the maximum. Also, less powerful and smaller light sources can be used. Because each pixel is individually turned on and the scattering of brightness to be an image is 100% integrated, the research technique also delivers the projected image with integrated brightness. The use of such beam shaping elements along irradiation sources as a use for projection displays makes the SLM's physical size very small and opens up a vast variety of new applications for displaying projection technology. As will be described in more detail below, the two-dimensional array of spots obtained by the beam shaping technique of the present invention can be used to produce a micro-lens array,

The use of an inverted Damme element as a beam shaping means, in other words, the Damdam grating element, in which the input (light entrance) and output (light exit) are reversed, the input light beams (spots) ) To provide a single high-intensity light beam / spot.

For example, the reverse damming element may be a single light beam / spot used to pump non-linear optical materials (such as lasing / double crystals) into a two-dimensional array of VCSEL spots, while creating an optimized pumping light source. I can change it.

4 is an embodiment of a light source module 1 formed by a two-dimensional array of VCSELs. In this embodiment, the module is formed by a 10 × 10 matrix of VCSELs arranged at 100 μm pitch. The module has a volume of 1200 μm × 1200 μm.

The present invention provides a new VCSEL structure involving a beam shaping structure. This is done by using a non-linear optical material along the VCSELs. By this, light beams of visible spectrum such as green light or blue light can be obtained. This can be achieved by pumping and then by frequency doubling or by direct frequency doubling. Two-dimensional VCSEL arrays (arrays of micro light sources) are used for crystallizing crystals along special optical elements (e.g., micro-lens arrays, or inverted dalm lattice, described below) that form a single light beam at the surface of the crystal It can be manufactured to form the optical output required to pump.

It has been shown that multi-mode VCSELs arrays are more powerful and cheaper. However, because of the uncertainty in their spatial distribution, their beam shaping is not efficient. Inventors use nonlinear optics in multimode VCSEL arrays and frequency doubling (e.g., DPM1102, 1.5x2x2.5mm ³ commercially available from CASIX; or any other non-linear optical crystal) to pump laser crystals. Have been. The laser crystal produces radiant energy at 1064 (nm) and 914 (nm) and the non-linear optical crystal doubles it to green 532 (nm) and / or blue 457 (nm).

Hybrid structures formed by lasing and non-linear optical crystals, called diode-pumped microchip lasers (DPMs), have been developed by CASIX. This DPM crystal combines Nd: YV04 and KTP. This hybrid (or composite) crystal simplifies the structure of a low power green DPSS laser. These hybrid crystals virtually eliminate fidding like play because HR, Nd: YV04 (vanadate), KTP, and OC mirrors are permanently aligned. In many applications, no additional optical lens is required. For blue wavelengths, other non-linear optical crystals, such as BBO, characterized by low budget and frequency doubling efficiency, must be used.

Each output beam from the output from the DPM or from the laser diode array typically has a Gaussian profile. In order to efficiently investigate the SLM, a rectangular uniform-intensity beam profile is required for other applications as well. The present invention solves this problem by using a top hat element structure, that is, a single top hat element or an arrangement of top hat elements. FIG. 5 illustrates the conversion of a Gaussian intensity profile to a top hat profile (rectangular profile with uniform energy distribution) in a self-explanatory manner.

6A-6F illustrate optical systems of the present invention using beam shaping based on the use of top hat element structures.

The optical system 400A of FIG. 6A includes a light source system 202 formed by a two-dimensional array of light source elements (6 × 6 array in this embodiment), such as a laser die array or a surface emitting laser array; A diffractive optical unit 210 comprising a two-dimensional array of top hat elements each associated with an individual laser source element (eg, a light beam generated by the laser source element); And a focusing optic 204 comprising a two dimensional array of lenses each associated with an individual of the top hat elements. Laser dies are a very cost effective solution for producing red illumination. Laser dies originate from the CD and DVD player industry, so they produce exceptional output power (7mW for low modules) and their price is extremely low. They are single mode lasers and thus allow for efficient beam shaping.

The beam profile at the output of each laser source element in the array is Gaussian. To convert it into a uniform rectangular cross section beam, a top hat array 210 is used, each top hat element shaping each beam from a laser die array. Therefore, each Gaussian-profile light beam generated by the light source element is shaped to form a rectangular-profile uniform-intensity beam; And a two-dimensional array of such rectangular-profile parallel beams is thus provided together fully of the entire portion of the multi-pixel array (eg SLM). The top hat array can be designed to produce multiple beams of a uniform intensity profile of each rectangle corresponding to the shape of a single pixel from the multi-pixel array, or to match the size of the entire multi-pixel array from the respective laser beams in the array. The beam profile is configured to provide a sufficiently identical rectangular beam profile so that all the beams are superimposed on top of each other and their energy is concentrated with little loss due to the low coherency between the respective laser source elements.

In the embodiment of FIG. 6B, optical system 400B includes a light source system 202 including a red laser based on arrays of laser die each generating light beam B1 at 650 (nm); And beam shaping arrangement 210 in the formation of a two-dimensional array of top hat elements. Each top hat element is aligned with the respective light beams B1. Light beams B2 emerging from the top hat element structure are in a rectangular cross section with a uniform intensity profile.

In the example of FIG. 6C, optical system 400C includes a green or blue light source system based on a VCSEL arrangement, such as an energy source at 808 (nm), 1064 (nm) lasing crystals with KTP for frequency doubling; Beam shaping array 210 includes a top hat diffractive optical element that operates to change the Gaussian profile of the light generated by the light source system 202 into a rectangular cross-section light beam. The array of gauss-profile light beams B1 spatially separated from the VCSEL array produces a single one close to the Gauss-profile light beams B2 of another wavelength (rather than that of light B1) appearing from the non-linear crystal. As a result of the output light beam B3 of the rectangular cross section with a uniform intensity profile, this light beam B2 now passes through the top hat element structure 210 formed by a single top hat element. An additional focusing optical lens can be used in addition to the optical path of the light beams B2 to advance the pumping efficiency.

6D and 6E show simulations of light beam profiles (two-dimensional array of light beams) before (pass. 6D) and after (Fig. 6E) pass through an array of top hats (top wallet arrangement). . As can be seen, after the light passes through the top hat structure, the light beam has a rectangular uniform intensity profile.

6F shows an optical system 400F that includes a light source system 202 and a beam shaping arrangement 210. The light source system 202 is configured to generate green or blue light by directly doubling the laser beam by the non-linear medium. The light source system thus includes a VCSEL array as an energy source at 1060 (nm) or 910 (nm) with non-linear optical material, such as KTP, BBO, PPLMN, LBO crystals or non-linear polymers. The diffractive beam shaping arrangement 210 includes a top-hallet arrangement in the optical path of multiple beams in which a non-linear material is present. As a result, the output beam profile is shown in Fig. 6E.

Non-linear materials with the necessary wavelength sensitive coating (e.g. Anti-Reflective / Highly Reflective) resonator structures in the laser array to form wider cavities and advance frequency doubling efficiency It should be recalled that it can be attached to the top of the laser array in this way to be part of. Attachment of the non-linear optical material to the laser array may be, for example, by direct deposition, direct crystal growth, mechanical gluing, or spin coating, or a combination thereof. Can be.

It should also be recalled that, in order to optimize crystal pumping, VCSELs are operated using the above-described continuous mechanism, just as they are acted at each time instant of only one group of VCSELs. VCSELs can be turned on and off in groups at different times as each group fires a laser over the crystal at different locations within the total lasing surface, so that better along the coated substrate Allows heat dissipation and maintains better reliability of the coating over the crystal, while avoiding overheating of a single spot and preventing the coating from burning. As a result, higher power can be operated with smaller and / or cheaper crystals.

It should be understood that it is also possible to use array arrangements or VCSEL arrangements similar to a given green, red or blue wavelength, such as irradiation channels without crystal pumping, to operate in the visible spectral range. do.

The top hat element structure should be suitably designed to provide a beam cross section that corresponds to the shape to be irradiated, such as, for example, an SLM pixel or an entire SLM active area.

An important application of diffractive optical elements is the ability to perform beam shaping, within the limits defined by wave equation constraints. A typical optical image setup for beam shaping strokes is shown in FIG. 7A. The input distribution T _in is increased only by the face of the filter (diffractive optical element), and then the first and second lenses with proper free space propagation are Fourier transform at this multiplication. It is used to perform.

An iterative algorithm is used to calculate a spatial phase filter where the random phase is initially selected and the constraints are the amplitudes of the input and output planes. In each iteration, the face is increased by the input amplitude and then a Fast Fourier Transform (FFT) is performed. The thus-obtained phase is increased by the output amplitude and an Inverse Fast Fourier Transform (IFFT) is performed. Now, this obtained phase becomes the input phase for the first iteration. The algorithm is shown in Fig. 7B After several iterations, convergence occurs.

Using MATLAB, only after calculating the face filter, the filter can be manufactured by a binary optical method, which will be described below or similar linear optical methods. Fig. 7C shows the input field distributions that are Gaussian field (curve H ₁ ) and rectangular (curve H ₂ ) contraints output shapes. Since the amplitude of the regulated output shape was chosen, the energy on the output side was the same as the energy on the input side.

In this simulation, three different methods were used. The first method is a regular FFT, the second method used is a Fractional Fourier Transform (FRT) with an order p (selected as the smallest RMS error value), and the third method. In Fsnel transform, instead of FFT or FRT, a Fresnel transform was used for distance z (reselected to the smallest RMS value). 7D-7G: Simulation results shown in FIG. 7D show curve A1 corresponding to regular FFT and curve A2 corresponding to FRT, FIG. 7F shows Fresnel transform results, and FIG. .7E and 7G show the RMS as several iteration functions for all three cases (convergence ratio). As shown, the Fresnel approach produces better results. Moreover, this is advantageous because it does not require Fourier transform lenses. Therefore, more preferably this approach is chosen for the top hat element structure design.

Returning to FIGS. 6B and 6C, more preferably the top hat element is for example (after the laser die arrangement in FIG. 6B and / or after the DPM structure (laser and non-linear optical media) in FIG. 6C). The top hat structure is located at a small distance from the output of the light source system, and this is taken into account when designing the element, since it is impossible to provide it substantially without distance difference, as .

See FIG. 8 for a schematic illustration of an optical system 500 using an inverted-only optical element as a beam shaper. System 500 includes a light source system 202 formed by an arrangement of micro light source elements 6; Focusing optical lens 204 (general collection lens); And a beam shaping arrangement 210 that includes the inverse damman grating structure. The system 500 is thus operable and configured to convert the arrangement of incoming low-intensity light beams B1 into a single high-intensity light beam B ₂ . The light source elements 6 project the beams B ₁ towards the collection lens 204, which are then converted to a plane wave (single light beam) B ₂ by the reverse damman grating structure 210.

This optical system comprises, for example, groups of VCSELs in a projection system in which beamslets of the VCSELs group are translated into a single light spot on the active pumping region of the non-linear optical crystal by the beam shaper. It can be used to pump non-linear optical crystals to form a visible range wavelength illumination source with the arrays. It should be recalled that arrays of light sources may have any type of array, any number of light source elements or various light source types (lasers: VCSELs, laser dies; LEDs).

Inverted damdam is a Damsel grid element with alternating input (light on) and output (light draw). The reverse damman grating element provides for the conversion of an array of spots into a single light beam / spot, for example, from an array of VCSEL light spots to a single light spot (which can pump double or lasing crystals).

The use of the Damman grating is an analytical approach for implementing an adjusted spot distribution in the Fourier plane only by using a binary face grating. The conversion point between "-1" to "1" transparency values is computed by interpreting a set of equations that yield the required spot structure. Irradiation of the Damman grating involving a single light beam / spot can be designed such that a 2D array of spots is produced with an equally effective energetic distribution. This approach can be used to generate any set spot distribution in the Fourier plane. This 2D arrangement of spots can be used, for example, as the irradiation source of the SLM in a highly optimized method.

Damman gratings are binary diffractive optical elements that have several diffraction dimensions of the same intensity and are used to multiplex images from one input object. 9A shows in an obvious manner an optical setup that can be used for this purpose. The constant plane wave W1, which normally impinges on the grating G, is diffracted by the grating G, and the output pattern P appears in the rear focal plane of the converging lens CL. The Damman grating can be designed to have 3, 5, 7 or even the same diffraction orders. Fig. 9B shows the lattice transparency function in one dimension. The only free parameters in the one-dimensional transparency function are the transition points X1, X2, X3 ... Xn. A grating with n transition points will result in diffraction orders of (2n + 1) centers. The output of the Damman grating with n = 1 is shown in Fig. 9C: there are three same dimensions with 62% of the input energy; The remaining energy is distributed among the higher diffraction dimensions.

Inverted Damman gratings can be used to transform an array of low-intensity light sources into one high-intensity plane wave emitting light source. If a reverse damman grating is used in the optics of Fig. 9A, the arrangement of point sources converts to one point source with higher intensity.

Returning to Fig. 8, the inventors used this setup to transform coherent point sources into wide light sources. Here, the arrangement of point sources is converted into plane waves by the Daman grating 210 and the lens 204. An input containing a matrix of nine point sources is selected, shown in FIG. 10A (in one dimension). Light intensity at the output plane was calculated by MATLAB simulation. As shown in two dimensions in Fig. 10B and in one dimension in Fig. 10C, at the output plane (one focal length from the lens), the resulting intensity is calculated. The one-dimensional Fourier transform of the light intensity in the output plane is shown in Figure 10D, where 90% of the actual intensity can be seen as being in zero order. This represents the efficiency of this optical instrument.

As seen from Figs. 10B and 10C, the light intensity is not uniform and rapidly drops to zero. This is because the input has a finite number of orders. Nevertheless, when moving further away from the focal plane of the lens, the spot becomes constant. 10E shows the light intensity after free space propagation (FSP) at an interval of one focal length from the focal plane of the collection lens 204. Longer distances will make the spot smoother. Fig. 10F shows the same light intensity in one dimension after FSP.

As shown in the figure, there are no more jumps to zero at distance from the focal plane. This is due to the nature of the FSP's low-pass filter. If necessary, additional optical bandpass filters can be applied to properly limit the FSP length.

Considering the mechanism of FIG. 8, the VCSEL array 202 lies on the focal plane of the collection lens 204. Therefore, after that lens, its Fourier transform is obtained. In that plane, an inverted-damman element is placed. The relationship between the focal length f and the source spot size d of the Fourier-converting lens and the spot size D obtained is determined as follows:

For example, if D = 2 (mm), λ = 808 (nm) , and d is the active region of the individual VCSELs, for example, about 3-10 (μm), and f = 9.9 (mm) (d = 4 μm). The inverted light grating 210 is placed immediately after the lens 204. The gap of the lens 204 should be larger than the light spot size D. Since the light spot is small (D = 2mm), a lens of 5mm or smaller gap can be selected.

Another issue that needs to be considered is the lattice resolution. To approximate this, we;

Will be used.

Where A is the irradiation area, and R is the resolution (minimum feature size). In this design, A is the VCSEL array region and R is the minimum feature size in the Fourier plane. Using a ¹⁴ × ¹⁴ array (shown as the worst case) with a total size of 16 × ¹⁶ mm ² , these parameters yield a resolution of λf / A = 10 μm. Damman gratings are fast to change, and their resolution is assumed to be orders of magnitude greater than the output resolution, and therefore a resolution of 1 [mu] m is obtained within the capability of manufacturing well.

See FIG. 11 for a schematic illustration of an optical system 600 using a diffractive optical unit to convert a single light beam into a 2D array of beamlets (beamlets). System 600 includes a light source system 202; And beam shaping arrangement 210. The light source system 202 is configured to generate a single or multiple light beams B1 (lasers, LEDs); Beam shaping array 210 includes a multi-pixel face mask element designed with or without a fractal beam shaping approach, such as an array of Damman gratings arranged in a cascaded manner. The beam shaper 210 thus converts the light beam B1 into the adjusted 2D of the beamlets B2. To end this, the diffractive optical unit 210 (mask of beamlets) is suitably designed to match the required size of the diameter of the beamlets and the pitch of the beamlets pattern. The arrangement of beamlets B2 reveals an output plane 44 which can be any controlled plane that requires irradiation (e.g. a photo-resistive material irradiated to generate a patterned array structure, or light through a low disturbance SLM). SLM clear gap area designed to fit the relevant pixel size on the SLM, as to maximize efficiency)

As pointed out above, in such a way that each spot of the first damman is individually advanced to the second and series damman element, the diffractive optical unit 210 includes several damman gratings arranged in a series manner, whereby Increase the number of spots of the first wall. Optionally, the diffractive optical unit 210 is a special multi-pixel diffractive face mask element and includes beamlet size requirements and pitch size requirements to inspect the adjusted output plane / surface in an optimized manner. Set to match. If large arrays are needed, the multi-pixel diffractive face mask element is designed as a fractal beam shaping element.

The multi-pixel diffractive optical face mask (filter) is only an analytical solution for the face filter and extracts a constant 2-D array of spots. Advanced implementations of this type of diffractive optical element provide mathematical constraints that deal with the energetic content equivalent to that of each of the spots in the array rather than having a nonuniformity in the shape of each spot. Obtained by application. Such a state of energy is applicable, for example, if the generated 2D array is for the purpose of irradiating the 2D array of pixels of the SLM. Then the 2D array of light beamlets then collides individually on every pixel of the SLM to advance efficiency. For example, an SLM involving a resolution of 1024x768 active pixels would have sets of 1024x768 beamlets individually for each pixel. By doing so, it is possible to prevent light degradation from the dispersion of the light in the TFT mask of the SLM and the inactive surface regions.

The following is an explanation of the analytical solution for the face filter only to excite a uniform 2D array of spots. The output plane where the 2D array of spots is obtained is defined only by the Fourier transform of the face element:

Where x is a spatial variable, μ is a spatial frequency variable, φ (x) is a face function, and F (μ) is a Fourier transform.

Energy in the output plane within a particular impulse as follows:

Therefore, two constraints for the analytical optimization process will be defined:

The variables Δσ and Δμ are defined in Fig. 12, which shows notations for the mathematical derivation, where Δσ is the region between the energy spots at which the output should be zero; And Δμ is a region where spots appear. The shape of the spots is not important as long as its energy is the same as other spots. This leads to two cost functions that are minimized:

This means solving the following set of equations:

This leads to doing:

And:

가 ε₁의 미분과 관련한

의 미분인

를 계산하기 위해 정의될 것이다. At the beginning of the first equation (Equation 8), ø = ø ₀ + δø,

With respect to the derivative of ε ₁

Derivative of

Will be defined to calculate.

이 된다:Suppose it is a small variation of the face,

Becomes:

And:

에러의 미분이 때문에

Because of the derivative of the error

Gets:

in:

It should be recalled:

in:

And thus:

는 상호 적분을 나타낸다(denotes).

Denotes mutual integration (denotes).

According to Equation 12, the equation becomes zero for all variables in the face:

Get

Where an asterisk represents a complex conjugate. This leads to the fact that the imaginary part of T (x1) must be zero and thus:

And:

Thus, the optical interface function obtains the muscle by the inverse tangent function (tan operation) applies. (Extracted)

Now, the equation relating to the second optimization condition of ε22 can be derived.

Applying similar mathematical manipulations and using Eq. 14

Get one:

And so:

Equations 19 and 22 must be satisfied: the solution to the face is incursive and iterative. The initial idea of pace is assumed. Then, the right side of equations 19 and 22 are computed. Thus, the face can be found in both equations. The mean is computed in both solutions. This result is assumed to be the next input to the right side of the two equations 19 and 22. The left side (face) is recalculated. This process is repeated until the hunting point is obtained.

It should be recalled that the equivalent of equations 19 and 22 should be written N times, where N is the total number of spots in the output plane. So, in fact, the result is better shown in the matrix representation that the elements of the matrix are all possible combinations of 1 < k, n, m <

As noted above, in the system 600 of FIG. 11, the diffractive optical unit 210 is a multi-pixel diffractive optical face mask (filter). This filter can be used to excite a face mask that needs to produce a medium sized array of spots. To extend this realization for large dimensional arrays, a fractal based approach must be used and an appropriate diffractive optical element is created.

The mathematical derivation described above can be used to excite the face mask needed to produce a medium sized array. To extend this realization for large dimensional arrays, a fractal based approach can be used.

Assuming that the face mask originally created for a multi-pixel diffractive optical face mask element is an N × N array of spots in its Fourier plane (output plane), if the mask is scaled by N factor, well known Because of the Fourier relationship, the NxN array will shrink by N factor:

Where G (μ) is the Fourier transform of g (x) .

Thus, if a convolution between the original and the scaled array of spots is executed in the output plane (Fourier plane), the array of N2 by N3 spots is between any function and the delta function. Convolution is realized because of the nature of the delta function that changes the function at the location of the delta.

The convolution operation performed on the output plane is equivalent to the multiplication operation of the face mask plane because the Fourier relationship exists between the two planes:

Multiplication of two-face masks implies the addition of two faces. Thus, the full face representation for the case described

to be.

Where? Is the face of the mask implementing N by the N spot structure.

Usually, an equation for a face that is equivalent to a fractal equation is obtained, for example a structure in which the sum of scaled versions of the same structure is combined out:

Figures 13A-13C show examples represented by the number of approaches described for the two fractal terms. Fig. 13A shows (8) by (8) of the two-dimensional array of spots computed using the Gerchberg-Saxton numerical algorithm. The result is obtained after repeating (21). Scaling the face led to a distribution arrangement of spots shown in Figure 13B. This distribution is actually the scale of the first one. The sum of the two faces (original and scaled) is, for example, a 2D array of spots with (82) by (82) spots (eg, (64) by (64) spots) and Similarly, the results shown in Fig. 13C are calculated.

Reference is made to Fig. 14 for another embodiment of the optical system 700 of the present invention. System 700 generates a 2D array of beamlets B1 (shown 52 in 2D form of beamlets) and is formed by a laser array 61 operating in a range of non-visible spectra (laser dies or VCSELs). System 202, and non-linear optical crystal 60; A focal optical lens 204 comprising a collimated lens positioned at the output of the laser array 61; And the beam shaping arrangement 210 and the top hat element structure 64 of the non-linear crystal 60 comprising a reverse damman grating structure 56 positioned proximate to the lens 204 downstream therewith. And downstream. The beamlets B1 generated by the laser array 61 are collimated by the lens 204 and they focus on doubling or lasing the active gap 60 (or any other non-linear optical medium) of the crystal. Only the reverse dams which are converted to a single beam B2 (corresponding to the spots indicated by 58) are directed to the grating 56 and to the visible beam B3 (corresponding to the spots indicated by 62). This visible beam B3 is another diffractive optical element (where the Gaussian characteristic of beam B3 intersects the beam (spot represented by 66) and is converted into an integrated form output beam B4 to reach the total integrated brightness distribution. Top hat) 64.

The resulting integrated beam B4 can be used to irradiate any surface, such as SLM, so that it has clean and integrated brightness with the same light distribution across the active surface. Although non-linear optical crystals are used in the light source system, it should be recalled that different varieties of architecture are possible for laser sources that do not require such a non-linear optical medium.

Although a single spot is created on the surface of a non-linear optical crystal using an inverted datum lattice, several spots of light on the surface of the crystal may only be inverted by a different type of optical element (eg, a lenslet array). It should also be noted that is generated by replicating. This is shown in Fig. 15: Non-linear crystals 60 are such that each spot is at a different position on the lasing surface, more preferably each spot is turned on at a different time period by a different set of lasers in the population. It is irradiated with the spots of the light 70, thus allowing better heat dissipation over the surface of the crystal and better efficiency of the output optical intensity.

Reference may be made to FIGS. 16A-16B, which illustrate still other embodiments of the optical system of the present invention, as configured as a projection system that combines light from other light sources operating in different wavelength ranges. . In the embodiment of Figure 16A, light from two sets of 2D VCSEL sources are combined by light from a 2D laser die array source.

In the embodiment of Figure 16B, one light type set of 2D VCSELs is combined from an LED and a 2D laser die array set. 16A, system 800A includes a light source system 202; Beam shaping arrangement 210; A focusing optical lens 204 and a light combiner 92 (periscope). The system 800A aims to adequately illuminate the SLM 94 which, in turn, has an output that images the optical lens 96. In this embodiment, the SLM is of the light transmitting type, but it should be understood that the principles of the invention can be used for the type that reflects the SLM.

The light source system 202 operates both in the non-visible range and 2D VCSEL arrays for pumping the non-linear optical material 84 and 86 (eg, KTP and BBO crystals) respectively. Light sources 72 and 74 formed by 83) and 85 (e.g., 1060 (nm) and 940 (nm)), and operate at a laser die array (e.g., 650 (nm)). Light source 76 formed by Three light sources each define three optical paths of light propagation.

The focal optical legs 204 each comprise micro lenslet arrays 78, 80, 82 installed in three optical paths and associated with the light sources 72, 74 and 76. And properly combined with these light sources. The micro lenslet arrays 78 and 80 are located at the output of the VCSEL arrays 83 and 85 upstream of the crystals 84 and 86, respectively. Each of the micro lenslet arrays 78 and 80 is each to form some focused spots above its respective crystal (more preferably in other time sections) as described above. Is configured to focus the VCSELs groups of the total VCSEL array of the < RTI ID = 0.0 > Groups of spots falling into the micro-lenslet arrays 78 and 80 collide in crystals 84 and 86 and thereby obtain a second harmonic generation effect and thus green and blue light Get the beams (in this detailed example).

The micro lenslet array 82 installed on the output of the third light source 76 is in the formation of a KxL array of micro lenses arranged in alignment with the array of the laser die array 76, where the matrix NxM is the lenslet matrix. There are such things as laser die elements that are quite consistent with KxL. This is to integrate the beamlets at the SLM active surface.

Beam shaping array 210 is a multi-pixel diffractive optical face mask installed in an optical path defined by light sources 81 and 84 downstream of non-linear crystals 84 and 86, respectively. 88) and 90; And multi-pixel diffractive optical face masks 91 (eg top hat array) as a third optical mirror of lenslet array 82.

The first and second light beams of the visible spectrum appearing from crystals 84 and 86 are respectively converted into first and second arrangements of N × M beams as required according to the pixel arrangement of SLM unit 94. And passes through the multi-pixel diffractive optical face masks 88 and 90. Beamlets from the multi-pixel face masks 88 and 90 and from the multi-pixel diffractive optical face mask 91 are directed towards the periscope lens 81 and then to cover its active surface in an optical manner. Head towards SLM Unit 94. This light is properly adjusted by the SLM unit (operated by a driving signal), which is enlarged and projected outwards and transmitted through the imaging lens 96.

Although this embodiment shows the use of a combination of two VCSEL arrays and one laser die array, it should be recalled that all three light sources are either laser die arrays or VCSEL arrays. Although the lenslet arrays are used as light splitting units, diffractive optical elements (eg Damman gratings) can be used to integrate the brightness of the output spots equally with the optional top hat element structures instead. It should also be recalled.

In addition, the optics 204 can be completely removed, and the non-linear material, together with the necessary wavelength sensitive coating (eg antireflection / highly reflective), forms an extended cavity and improves frequency doubling efficiency. It should be recalled that as part of the resonator structure of the advancing laser arrays, it can be attached to the top of the laser array in this way.

Additionally, although it is more desirable to generate some spots on the surface of the non-linear optical crystal, it should be recalled that a configuration in which a single light spot impinges on the crystal is also used. In addition, at least one or both of the multi-pixel face masks used for optical light to provide to the SLM may be a top hat structure that provides a fractal beam shaping elements or a rectangular beam of uniform intensity that optionally impinges on the SLM. Or other suitable means, such as It should also be understood that the use of non-linear materials is optional and will be eliminated if VCSELs that are operable in the range of visible spectra are used. Although only a doubling crystal is used in this embodiment, it should be understood that in some applications a lasing crystal is also used. (For example, a light source instrument that includes a 2D VCSEL array at 808 (nm) will need a lasing crystal, such as YV04, and a KTP crystal that yields a green output at 532 (nm).)

In the embodiment of Figure 16B, projection system 800B similarly includes light source system 202; Beam shaping arrangement 210; An optical focus lens 204 and a light combination 116 (periscope lens); And it aims at investigating SLM 118 appropriately. Here, the light source system 202 includes a first light source 98 formed by a 2D VCSEL array 99 and a non-linear optical crystal 110 (eg, KTP); 2D laser die array 102; And LED source 100.

The focus optical lens 204 includes micro lenslet arrangements 104 and 108 angled with light sources 98 and 102, and a collection lens 106 at the output of the LED 100. . The micro lens array 104 is installed at the output of the upper portion of the VCSEL array 99 of the crystal 110 and is used to form some focused spots on the pumped crystal 110 (more preferably at other times). Configured to focus groups of VCSELs from all of the 2D VCSEL arrays 99. The micro lens array 108 is installed at the output of the laser die array 102, and this is NxM, in order to integrate the beamlets at the SLM active surface, as these matrices NxM (die) and KxL (lenslets) are quite the same. A KxL matrix of micro lenses arranged in alignment with a matrix of laser dies.

Beam shaping array 210 includes an output multi-pixel diffractive optical face mask 112 of crystal 110; And a top hat element 114 in the optical path of the light collected from the LED 100.

Thus, the light from the LED 100 is collected by the collection lens 106 and then of the rectangular integrated beam from the light Gaussian intensity profile to advance the light integration onto the SLM surface and obtain an integrated image. It passes through the top hat 114 which is reshaped into it. Light exiting the top hat 114 is directed towards the periscope lens 116. The light in which the pumped crystal 110 is present passes through a multi-pixel diffractive optical face mask 112, which is configured to convert this light into NxM beams as required according to the pixel arrangement of the SLM. . These light beams from the three optical paths are transmitted from the periscope lens 116 towards the SLM 118. The SLM operates to restrict the adjustment of incident light to form an image and then projected outward by the imaging lens 120.

It should be noted that the lenslet arrays are replaced by the Daman grating (optionally integrating the output spot brightness equally with the top hat element structure). Instead of generating some spots on the surface of the crystal, the system is configured to create a single light spot on the crystal. In addition, at least one of the multi-pixel face masks or all of them used to provide optical light to the SLM may be adapted to other suitable means, such as fractal beam shaping elements or a uniform-strength square beam acting on the SLM. It is replaced by things like optional top hat structures that you provide. If a visible-range VCSEL is used, the use of crystals (non-linear material) is eliminated. Instead of using only a doubling crystal, a lasing crystal is used with a non-linear optical crystal (e.g., a 2D VCSEL array at 808 (nm) and a green output at YV04, and 532 (nm), for example. Rising crystals such as KTP crystals). The use of a single LED is replaced by the arrangement of LEDs along their required optics, where the provision of the top hat structure 114 is optional. The combination of the laser die array with the VCSEL array is replaced by two VCSEL arrays or two laser die arrays (along with the appropriate beam shaping optics). In addition, the optical lens 204 can be completely removed and the non-linear material with the requisite wavelength sensitivity coating is arranged such that the laser array is part of the resonator structure of the laser array to form extended cavities and advance frequency doubling efficiency. It can be attached to the top of (e.g., by the methods listed above).

Reference is made to FIGS. 17A and 17B showing further examples of optical systems suitable for use in a projection system embodiment.

In the embodiment of Fig. 17A, the light source system formed by the optical system 900A eye 2D VCSEL array 122; Focusing optics including first and second collection lenses 126 and 134; And a beam shaping arrangement comprising first and second diffractive optical units 130 and 136. The VCSEL array 122 produces an array of beamlets 124 that propagate towards the lens 126 (which can optionally be a face of the 2D lenslet array), so that the lens 126 is a first beam shaper ( Create collimated beams 128 that propagate toward 130. The latter is a multi-pixel diffractive optical face mask designed to generate output in the formation of NxM beamlets. This mask 130 may be formed by an array of individually made face mask elements in which each multi-pixel face mask element is adjusted to a specific beamlet from the VCSEL array beamlets. Therefore, each VCSEL beamlet is converted into an array of beamlets by its individual face mask, which means that all VCSEL beamlets are converted together into a large number of output beamlets 132 by all face mask elements. The output characteristics of the mask 130 can be predetermined depending on the pitch and size, for example, the needs of the particular application. If the number of beamlets 132 is not sufficient, the first iteration can be pre-formed. The beams 132 can also be the first multi-pixel face mask 138 (array of multi-pixel face masks) to increase the number of 2D beamlet arrays they are obtained by the first mask 130. Toward the focus lens 134 that is projected and collimated, thus obtaining an array of scale beamlets.

Convolution is formed of a set of VCSELs between the beam shaping elements 130 and the Fourier of 138, and the distance between the beamlets spots is adjusted to be equal to the size of the VCSEL array.

The resulting beamlets 140 are then passed towards (not shown) a irradiation plate where each beamlet acts individually on the corresponding pixel at the active surface of the SLM, for example, a photo patterning it that obtains an array of optical elements. To investigate interference or to investigate SLM in the most efficient way possible.

It should be recalled that the multi-pixel face mask is replaced by fractal beam shaping elements to obtain even larger arrays of 2D beamlets. The VCSEL array is replaced by a laser die array.

Optical system 900B (FIG. 17B) is generally configured similarly to the system of FIG. 17A, that is, 2D beamlet array light source 142 (such as 2D array or laser dies of VCSELs); Focus lens array; And a beam shaping arrangement. However, the focus lens arrangement here is in the formation of the lenslet arrangement 146; And the beam shaping arrangement comprises a single multi-pixel diffractive optical face mask 150 formed by an arrangement of sub-elements (facemasks).

The light source 142 projects the array of beamlets 144 towards the lenslet array 146 where the beams are collimated. Lenslet array 146 outputs an array of beamlets 148 towards beam shaping element 150. The latter is configured as if each face mask is individually coordinated with the specific beamlet of beamlet array 148, the arrangement of large number of output beamlets 152, the specific beam size and requirements and the multi-pixel face sub-mask design Thus forming NxM beamlets with a difference between adjacent beams.

It should be recalled that multi-pixel face masks are replaced by fractal beam shaping elements to obtain even larger 2D beamlet arrangements. The VCSEL is replaced by a laser die array.

18 illustrates an optical system 1000 configured for use in photolithography in the fabrication of microstructures, such as microlens arrays fabricated as surface relief patterns. System 1000 includes a light source system formed by UV light source 154; And a beam shaping arrangement formed by the multi-pixel diffractive optical face mask 158. Light source 154 is a 2D array of UV light source elements (eg, VCSELs, laser dies) that together produce a 2D array of beamlets 156. The multi-pixel diffractive optical face mask 158 builds out the sub-masks, a mask per beamlet, as described in the above example. The mask 158 extends the beamlets 156 into a specific beam diameter. And an NxM array of micro UB beams 160 with pitch size. The arrangement of these beams 160 is then irradiated with output irradiation light. For example, beam 160 is projected onto photo-inhibited (e.g., polymer) coated with substrate 162 (e.g., glass), and UV light (or vice versa, negative photo-inhibited). Photo-inhibiting substance removal within the area interacting with). Since the beams 160 represent an array of spots with a Gaussian distribution of light, they form a matrix-like shape in the photograph-inhibiting substrate that corresponds to the lens-like shape, and thus create a micro lens array. Prepare the pattern.

It should be recalled that a single light source element is used instead of an array of micro light source elements, in which case the multi-pixel diffractive optical face mask is designed to provide a controlled beamlet array arrangement. Since the system provides a controlled UV fabrication pattern, the use of the optical system 1000 provides an investigation that requires the creation of a fabrication mask (photographic tool), thereby reducing the fabrication cost of the microstructure.

It should also be recalled that instead of using a multi-pixel face mask, fractal beam shaping elements or Damman elements can be used to generate the 2D beamlets arrangement.

Regarding the examples of the invention described above, it should be recalled that other standard optics known as art (eg lens arrays) may be added before and after beam shaping arrangements only for adjustment purposes. Each light source or light source element can be designed using the light module structure of FIGS. 1, 2A-2C in which several light sources are used, with a continuous mechanism and pulse mode operation.

The use of VCSEL arrays, laser die arrays, and a variety of instruments of LEDs that follow special beam shaping arrays in the same projection system can potentially reduce costs, physical size, higher output brightness, and lower electrical power. It could create consumption.

The beam shaping techniques of the present invention can be used, for example, to dramatically advance the efficiency of light acting on a clean aperture of a spatial light modulator (SLM). The operation and construction of the SLM is known per per and so need not be described in detail. SLMs are commonly used as compact displays (typically with screen sizes less than 1.5 "diagonal) in virtual data projectors, head-mounted displays, and in traditional viewfinders of digital cameras. The manufacture of SLMs seeks to reduce its physical size within each generation of modulators to extract a new variety of products. However, the transmittance efficiency of the SLM remains problematic, and it is important to further reduce modulators in a dramatic way, as black matrix TFT masks within them block a large portion of the incident and projected light. It is considered an obstruction and thus focuses on the use of high brightness illumination sources to obtain a sufficient output projection image. In addition, due to the moving overheating of the liquid crystal substance, the portion of the light hindered by the SLM, in order to propagate the heat accumulated in the SLM, such as creating aberrations in the projected image has a large surface area. Elicit the requirements for an SLM with Therefore, a relatively large SLM is needed for better light transmission and heat dissipation.

The present invention solves the above problem by using a beam shaping technique in the SLM unit. The beam shaping of the present invention is based on the Damman grating (with or without lenslet arrays), an optical face mask (filter) or fractal approach of multi-pixel diffraction, and / or an inverted Damman grating.

See Figures 19A and 19B to show two embodiments of a full 2D addressable VCSEL pump based on an architecture for obtaining three color channels each to obtain a projected image in various colors.

In the example of FIG. 19A, optical system 1100A is configured to define three spatially separated optical paths, and delivers light from all passages towards a deflection element that scans the output image. The image is made of a set of 2D addressable channels per each light source, each light source device being synchronically controlled by a deviation element that is limited to provide different patterns of gray level and becomes a digital micro mirror based element. Where scanned, an image is obtained while forming a moving square shape pattern on the projection surface with gray level variations.

System 1100A includes a light source system formed by three individually addressable light sources 164, 166, 168 that are 2D VCSEL arrays operating in conjunction with other wavelengths. Light source 164 is a 2D VCSEL array (more preferably individually addressable) at a given wavelength of 1060 (nm); And the light source 166 is another irradiation channel based on the 2D addressable VCSEL instrument arrangement at another given wavelength of about 860 to 940 (nm); And light source 168 is a 2D addressable VCSEL arrangement at a given wavelength of about 630 to 660 nm, while the other two sources 164 and 166 are crystal doubling elements that provide green and blue colors, respectively. (170) (eg KTP) and (172) (eg BBO) are used. Light source 166 beams directed to doubling crystal 172, whereby a 860 (nm) IR beam from the source converts to a 430 (nm) blue output from BBO crystal 172. The beamlet sets of each light source are limited, and their brightness is determined corresponding to the required projected image gray level per color. Brightness Patterns The constituent IR beams are projected in parallel to the doubling crystal, but at different wavelengths within the visible range are interpreted as the same patterns of brightness in terms of doubling output. Such light source arrangements may be manufactured in a manner similar to that described in the above references of FIGS. 16A and 16B.

The beams appearing from crystals 170 and 172 and the RED 2D addressable VCSEL instrument 168 combine them and then reflect them towards the rotating mirror 178 toward the mounted mirror 176. All are delivered to the periscope lens 174 to be delivered. Rotating mirror 178 performs all output scanning to create the full image from the arrays of many beamlets. The full output image is finally projected through the imaging lens 180, where its payment is optional.

It should be recalled that other types of crystals (raising and doubling) or other non-linear optical media can be used to obtain the same result. It should also be recalled that additional optical elements (eg micro-lens arrangement) can be used in the irradiation channels. Although the specific wavelengths of the irradiation VCSELs indicate obtaining images in various colors, it should be recalled that other irradiation sources may also be used with other wavelengths within the non-visible range.

In the embodiment of Fig. 19B, optical system 1100B is based on a pumped full 2D addressable VCSEL, using a single 2D addressable VCSEL arrangement to obtain three color channels to obtain a projected image of various colors. It is configured to provide an architecture. This 2D addressable VCSEL array 182 is an IR light source at a given wavelength of 808 (nm). The light generated by the light source 182 is split into three spatially separated beams by the beam splitters 184 and 186. As shown, the light portion reflected by the beam splitter 184 is passed to the beam splitter 186 to be further divided into two light portions, one of which is carried out by the beam splitter 186, the beam splitter 184. ) And toward the mirror 188 appropriately adapted to be delivered to these light portions parallel to the light portions reflected by the beam splitter 186.

A portion of the light appearing from the beam splitters 184 and 186 and a portion of the light reflected by the mirror 188 are delivered to the respective liquid crystal cells 190, 192, and 194. Each liquid crystal cell can be limited for each projection channel that is activated or deactivated (with color continuous operation).

The portions of light appearing from liquid crystal cells 190, 192, and 194 are the lasing crystals 196, 198, and 199, where the wavelength per channel is converted from 808 (nm) to another wavelength range, respectively. Propagates towards Light output form LC 190 passes through lasing crystal 196 (e.g., Nd: YV04) to be converted to 1064 (nm) light, and then a doubling crystal in which a second harmonic generation of light is formed. Pass through 206 (eg, KTP) and thus generate a visible-range beam of 532 (nm) (green).

A similar process to the above occurs in the irradiation channel associated with the beam splitter 186. The light emerging from the LC cell 192 hits the lasing crystal 198 (e.g., Nd: YV04), which converts an input of 808 (nm) to 914 (nm), and then a second input of the input. A doubling crystal 207 (e.g., BBO) that emits 1 harmonic generation of is aimed at, thus obtaining a 457 (nm) input (blue).

In the third channel associated with the beam splitter 188, the light output from the LC 194 is directed towards the doubling crystal 201 which emits 1319 (nm) light and then obtains a second harmonic generation at that output. Transmitted toward the passing lasing crystal 199 (e.g., Nd: Yag), thus obtaining a 660 (nm) output (red).

All channels are turned on at different times in color continuous mode with different patterns turned on in the 808 (nm) VCSEL array in each irradiation cycle. The light beams shine toward each channel in a parallel manner, but the patterns of irradiation cycles are only forwarded to the channel of the corresponding color and are hindered by the liquid crystal in the other channels.

Light generated in each of the channels is transmitted to the outside like a visible range pattern, and is pointed toward the deflection mirror 212 after the light from all channels is pointed towards the mirror 211, thereby turning the periscope lens 208. Projected toward. The latter performs all output scanning to produce the entire image from many arrays of beamlet patterns. The full output image is finally projected through the imaging lens 214 (optionally). It should be recalled that optionally the beam splitter and liquid crystal shutter combinations can be replaced by deflector mirrors which limit which passages are irradiated at which point in time.

In each given cycle, the limiting unit (not specified) carefully adjusts the gray level of the 2D VCSEL array according to the feed injected per color, and gives the deflector to obtain a large image of a relatively small array of 2D VCSELs. Is scanned.

It should be recalled that different types of crystals (raising and doubling) are used to achieve the same result. Additional optical elements (eg micro lens array) can be added in the irradiation channels. Instead of splitting the 808 (nm) VCSEL array into three channels, three 808 (nm) VCSEL arrays can each be used in different channels, eliminating the need for beam splitters and liquid crystals. Optionally, a larger 808 (nm) 2D addressable VCSEL array can be used to examine each channel by covering all three channels (instead of three VCSEL arrays) and limiting the VCSEL array address lines. Although specific wavelengths of irradiation are shown to obtain images of various colors, it should also be recalled that other irradiation sources can be used with other wavelengths within the non-visible range. It should be recalled that, as described in the references of FIGS. 16A and 16B above, this light source structure involving a more preferred beam shaping arrangement can also be used to investigate projection systems based on SLM.

Those skilled in the art will readily recognize that various modifications and variations can be applied to embodiments of the invention as set forth in the preceding disclosure by the appended claims and without departing from its scope as defined. will be.

Claims (90)

An optical system structured to provide a regulated illumination light pattern, comprising: a light source system operatively configured to produce structured light in the form of a plurality of spatially separated light beams; And beam shaping arrangement: (i) combining spatially separated light beams into a simple light beam whereby the intensity of the irradiated light is substantially increased; (Ii) affecting the intensity profile of the light beam to provide a substantially rectangular constant intensity illumination beam, comprising a beam shaping arrangement of diffractive optical units operatively configured to perform one of the following: And an optical system structured to provide a controlled illumination light pattern. The optical system of claim 1, wherein the diffractive optical unit comprises at least one inverted light grating. The optical system of claim 1 (ii), wherein the diffractive optical unit comprises a top hat element structure. The system of claim 3, wherein the top hat element structure includes an array of top hat elements arranged in accordance with an array of spatially separated light beams, such that each of the top hat elements acts corresponding to one of the light beams. Optical system structured to provide a controlled illumination light pattern. 5. The system of claim 4, wherein the top hat element is structured to apply to the intensity profile of the corresponding light beam to produce therefrom a substantially rectangular irradiation intensity beam of intensity profile corresponding to the shape of the entire surface to be irradiated. Structured optical system to provide a controlled illumination light pattern. 5. The system of claim 4, wherein the top hat element is an intensity profile of a corresponding light beam for producing therefrom an irradiated light beam of a substantially rectangular intensity profile corresponding to the shape of a simple pixel from an array of surface pixels to be irradiated. An optical system structured to provide a controlled illumination light pattern, which is structured for application to. 5. The system of claim 4, wherein the top hat element is an intensity profile of a corresponding light beam for producing therefrom an irradiation light beam of an intensity profile that is substantially rectangular, corresponding to the shape of the sub-array from the arrangement of pixels to be irradiated. An optical system structured to provide a controlled illumination light pattern, which is structured to act on. The optical system of claim 1, wherein the light source system comprises a plurality of light source elements each producing one of the corresponding light beams. The system of claim 1, wherein the light source system comprises: at least one light source element producing at least one light beam; And a light separation unit for separating the at least one light beam into an array of spatially separated light beams. The system of claim 1, comprising: focusing optics comprising lenses embedded in optical paths of the array of light beams for delivery to them along the optical axis of the lenses. Optical system. The optical system of claim 1, comprising focusing optics each comprising an array of lenses in an optical path of one of the corresponding arrays of light beams. The system of claim 1, wherein the light source system comprises at least one pumping light source array and at least one non-linear optical medium for being pumped by the light generated by the at least one pumping light source array. Optical system structured to provide a controlled illumination light pattern. The optical system of claim 12, wherein the pumping light source arrangement comprises a surface emitting laser source for pumping directly to the nonlinear optical medium. 13. The optical system of claim 12, wherein the pumping light source arrangement comprises a surface emitting laser source and a lasing crystal. The optical system of claim 12, wherein the at least one pumping light source arrangement comprises an arrangement of surface emitting laser source elements. 13. The optical system of claim 12, wherein the at least one pumping light source arrangement comprises an array of vertical resonator type surface emitting semiconductors (VCSELs). The system of claim 1, wherein the light source system comprises at least one light source element, wherein the light source element comprises at least: a light emitting diode (LED), a laser die, an end emitting laser, a surface emitting laser One of which is structured to provide a controlled illumination light pattern. 10. The system of claim 9, wherein the light splitting unit comprises at least one multi-pixel diffractive optical face mask, the mask being structured to produce an array of light beams spatially separated from the at least one light beam. system. 10. The system of claim 9, wherein the light splitting unit comprises a multi-pixel diffractive optical face mask defining a first array of pixels, wherein each of the pixels is structured in a second array of sub-pixels. An optical system structured to provide a regulated illumination light pattern that produces spatially separated light beams arranged in accordance with the second arrangement. 10. The system of claim 9, wherein the light splitting unit produces a first array of light beams in which light passing through a first mask is spatially separated, and passing of the first array through a second mask is spatially separated. At least a first and a first, each defining a different arrangement of pixels, such as producing an increased plurality of second arrays of light beams, and embedded in a spatially separated relationship along the optical path of light propagation through the system. 2. An optical system structured to provide a controlled illumination light pattern comprising two multi-pixel diffractive optical face masks. 10. The system of claim 9, wherein the light splitting unit comprises a Damman diffractive structure configured to produce an array of light beams spatially separated from the at least one light beam. Optical system. 19. The system of claim 18, wherein the beam shaping arrangement comprises an arrangement of top hat elements in each optical path corresponding to one of the spatially separated light beams to produce a light beam of substantially rectangular constant intensity profile therefrom. And an optical system structured to provide a controlled illumination light pattern. 10. The system of claim 9 wherein the light separation unit is such that each light beam production from one Damman grating structure is directed through a continuous Damman grating structure, whereby a plurality of light beams produced by the one Damman grating structure. And an array of Damman grating structures arranged in a serial manner that doubles them. 16. The system of claim 15, wherein the beam shaping arrangement comprises an inverse damman grating structure for combining spatially separated light beams into a simple combined light beam of significantly high intensity value. 25. The optical system of claim 24, wherein the inverse damman grating structure is embedded upstream of the non-linear optical medium with respect to the direction of light propagation through the optical system. The system of claim 24, wherein the beam shaping arrangement comprises a top hat element embedded in an optical path of the combined light beam to produce a substantially rectangular constant intensity profile irradiated light beam. Structured optical system. The optical system of claim 15, wherein the beam shaping arrangement comprises an array of top hat elements embedded in the output of the non-linear medium. The system of claim 15, wherein the multi-pixel diffractive optical face mask embedded in the optical path of the light output to produce an array of spatially separated light beams from the non-linear optical medium, and the spatially separated light beams. And an array of top hat elements embedded in the optical path of the array. The system of claim 1 comprising a control unit associated with a light source system, wherein the control unit is preprogrammed to perform a continuous mechanism, whereby a plurality of light source elements are continuously operated according to a preset pattern. And an optical system structured to provide a controlled illumination light pattern. 30. The system of claim 29, wherein only one light source element operates at a given time, and the entire light source system is visible to the human eye when producing consistently at the required production time, whereby the light source An optical system structured to provide a regulated illumination light pattern that reduces overheating within one region defined by the system. 31. The system of claim 30, wherein the pattern is structured to provide a controlled illumination light pattern such that the furthest light source element at a given time instant is produced in relation to its previously operated light source element. system. 30. The system of claim 29, wherein the pattern is structured to provide a controlled illumination light pattern that is structured to provide a regulated illumination light pattern that is operable only by one group of light sources at a given time. system. 16. The control unit of claim 15, wherein the control unit is associated with a light source system, said control unit being preprogrammed to perform a continuous mechanism, thereby continually operating said plurality of light source elements in accordance with a predetermined pattern. An optical system structured to provide a controlled illumination light pattern that is structured to provide a regulated illumination light pattern. 34. The optical system of claim 33, wherein the pattern is structured to provide a modulated illuminated light pattern in which only one group of light source elements is operable at a given time. The system of claim 1, wherein the light source system is configured to define at least two spatially separated optical paths, the light source system comprising at least two light sources operable in different wavelength ranges. Optical system structured to provide an illumination light pattern. 36. The optical system of claim 35, wherein at least one of the light sources comprises a pumped light source array and a nonlinear optical medium. 36. The system of claim 35, wherein the beam shaping arrangement includes a built-in top hat element structure to allow one of the optical paths to pass through the spatially separated light beams thereby outputting a substantially rectangular constant intensity profile. Produce light beams; And a light coupling unit for coupling light for propagating along a common optical path from the at least two optical paths. 38. The optical system of claim 37, comprising a spatial light modulator (SLM) embedded in the cavity optical path. 39. The optical system of claim 38, wherein the spatially separated light beams are arranged in a preset arrangement corresponding to the pixel arrangement arrangement of the SLM. 39. The optical system of claim 38, wherein the top hat element structure comprises an arrangement of top hat elements each associated with a corresponding one of the light beams. 37. The system of claim 36, wherein the beam shaping arrangement comprises at least one light splitting device embedded in an output of each of the at least one non-linear optical medium, and at least one optically shaped light appearing from the non-linear optical medium. Configured to divide into a predetermined arrangement of spatially separated light beams to propagate along each angle of the path; And at least one top hat element structure embedded in at least one on the optical path to allow passage of spatially separated light beams therethrough; And a light coupling unit for coupling light from the at least two optical paths to transmit along the cavity optical path. 42. The optical system of claim 41, wherein the arrangement of top hat elements is embedded in an optical path in relation to at least one other light source. 37. The regulated illumination light pattern of claim 36, wherein the at least one pumping light source arrangement comprises a number of surface emitting lasers, and wherein the at least one another light source comprises a number of laser dies. Optical system structured to provide. 44. The system of claim 43, wherein the light source system is operable as first and second pumping sources to be first and second non-linear optical media, the first and second surface luminescence producing light of different wavelengths, respectively. An optical system structured to provide a controlled illumination light pattern comprising laser arrays. 45. The system of claim 44, wherein the first and second surface emitting laser arrangements operate within a non-visible spectral range, wherein light appears from the first and second non-linear optical media and is different from each other in the visible spectral range. An optical system structured to provide an adjusted illumination light pattern, which is two colors. 46. The system of claim 45, wherein the first and second surface emitting laser arrangements are vertical resonator type surface emitting laser (VCSEL) arrays; The optical system structured to provide a modulated illuminated light pattern wherein the first and second non-linear optical media are KTP and BBO crystals. 36. The optical system of claim 35, comprising at least two focusing optical lens arrays embedded on the at least two optical paths. 42. The system of claim 41, wherein the light source system is operated as first and second pumping sources for first and second non-linear optical media and produces light of different wavelengths, respectively. Luminescent laser array; And laser split arrays operating with different third wavelengths, light splitting units embedded in the first and second optical arrays associated with the first and second surface emitting laser arrays, and within the optical path associated with the die array. An optical system structured to provide a controlled illumination light pattern comprising an embedded top hat element structure. 36. The system of claim 35, wherein the light source system comprises an array of surface emitting lasers and defines a first light source that generates an array of spatially separated light beams, and associated three spatially separated optical paths, respectively. Is configured to; A second light source comprising a light emitting diode (LED); And a third light source formed by the arrangement of laser dies. 50. The optical system of claim 49, wherein the first light source comprises a non-linear optical medium to be pumped by a surface emitting laser arrangement. 51. The system of claim 50, further comprising a light splitting unit embedded in the output of the non-linear optical medium for dividing the light coming from it into spatially divided light beams. system. 50. The system of claim 49, wherein each of the two focusing optical lens arrays embedded within optical paths defined by the surface emitting laser array and the laser die array and the light collection embedded within optical paths defined by a light emitting diode And an optical system structured to provide a controlled illumination light pattern. 50. The system of claim 49, wherein the beam shaping arrangement comprises: a top hat element embedded to produce a substantially rectangular constant intensity light beam from the light beam produced by the light emitting diode in the second optical path; And a light coupling device for coupling light to propagate along the cavity optical path from the three optical paths. 52. The system of claim 51, wherein the beam shaping arrangement comprises: a top hat element embedded to produce a light beam of sufficient rectangular constant intensity profile from the light beam produced by the light emitting diode in the second optical path; And a light coupling device for coupling light to propagate along the cavity optical path from the three optical paths. The optical system of claim 49, wherein the system of claim 49 includes a spatial light modulator (SLM) embedded within the cavity optical path. 56. The optical system of claim 55, wherein the arrangement of spatially separated light beams is produced by a light source corresponding to a pixel array arrangement of the SLM. 55. The optical system of claim 54, wherein the top hat element structure includes an arrangement of top hat elements each associated with a corresponding one of the light beams. The system of claim 1, comprising at least one multi-pixel diffractive optical face mask configured to produce the structured light in the form of a predetermined pattern of spatially separated light beams. Optical systems structured to do so. 59. The adjusted illumination light of claim 58, wherein a multi-pixel diffractive optical face mask is configured to define a first arrangement of pixels, each of the pixels being configured to define a second arrangement of sub-pixels. Optical system structured to provide a pattern. The system of claim 58, wherein the beam shaping arrangement is spatially-separated along the propagating optical path of light through the system, such that the light beam emerging from the first mask further divides the array of light beams by a second mask. An optical system structured to provide a modulated illuminated light pattern comprising at least first and second multi-pixel diffractive optical face masks embedded within the established relationship. 59. The optical system of claim 58, comprising a focusing optical lens embedded in an optical path of light propagating towards the at least one multi-pixel diffractive optical face masks. . 61. The system of claim 60, comprising a focusing optical lens comprising at least two focusing structures embedded upstream of each of the at least two multi-pixel diffractive optical face masks. Structured optical system. 62. The system of claim 61, wherein the focusing optical lens comprises an arrangement of lenses arranged in a plane perpendicular to the optical axis of the lenses, whereby corresponding light beams of focused light beams propagate in front of the multi-pixel diffractive optical face mask. An optical system structured to provide a controlled illumination light pattern that produces an array. 76. The system of claim 63, wherein the multi-pixel diffractive optical image mask comprises an array of face masks arranged in a plane parallel to the array of lenses, wherein the array of face masks corresponds to one of the focused light beams, respectively. An optical system structured to provide an adjusted illumination light pattern, configured to be combined, thereby forming an arrangement of light beams of a predetermined size and gap between adjacent beams. An optical system configured to provide a regulated illumination light pattern, the optical system comprising: a light source system operably configured to produce structured light in the form of a plurality of spatially separated light beams; And a beam shaping arrangement; The beam shaping arrangement is configured as a diffractive optical unit operatively configured to combine an array of spatially separated light beams into a single light beam, thereby providing a controlled irradiation light pattern in which the intensity of the irradiated light is substantially increased. Optical system configured to. 66. The optical system of claim 65, wherein the diffractive optical unit comprises an inverse damman grating structure. 66. The system of claim 65, wherein the diffractive optical unit is configured to provide an adjusted irradiation light pattern configured to affect the intensity of the beam to produce a light beam of constant intensity profile that is substantially rectangular from it. system. 69. The optical system of claim 67, wherein the diffractive optical unit comprises a top hat element structure. 67. The system of claim 66, wherein the diffractive optical unit comprises a top illumination element structure that affects an intensity profile of the light beam to produce a light beam of constant intensity profile that is substantially rectangular from it. Optical system configured to provide. 70. The optical system of claim 69, wherein the top hat element structure is configured to provide a regulated illumination light pattern embedded in the output of an inverse damman grating. An optical system configured to provide a controlled illumination light pattern, comprising: a light source system operatively configured to produce light structured in the form of a plurality of spatially separated light beams; And a beam shaping arrangement; And a beam shaping arrangement comprises an inverted dalm lattice structure operatively configured to couple the plurality, thereby substantially increasing the intensity of the irradiated light. An optical system configured to provide a controlled illumination light pattern, comprising: a light source system operatively configured to produce light structured in the form of a plurality of spatially separated light beams; An array of respective top hat elements is provided to provide an adjusted illumination light pattern operatively configured to apply an intensity profile of light passing through it to produce a light beam of a constant intensity profile that is substantially rectangular from it. . An optical system configured to provide an adjusted illumination light pattern, the optical system comprising: a light source system operatively configured to produce at least one light beam; And a multi-pixel diffractive optical face mask arrangement is configured to produce structured light formed by a predetermined arrangement of spatially separated light beams of profile and substantially equal intensity values from the at least one light beam, A pixel diffractive optical face mask array is configured to define a first array of pixels, each of the pixels is patterned to define a second array of sub-pixels, and the structured light is the first of the pixels 2 An optical system configured to provide a regulated illumination light pattern in the form of spatially separated light beams arranged in accordance with an arrangement. An optical system configured to provide an adjusted illumination light pattern, the optical system comprising: a light source system operatively configured to produce at least one light beam; And a multi-pixel diffractive optical face mask arrangement is configured to produce structured light formed by a predetermined arrangement of spatially separated light beams of profile and substantially equal intensity values from the at least one light beam; A multi-pixel diffractive optical face mask array wherein a first mask divides the light beam into a first array of spatially separated light beams, and a second mask spatially separates each of the spatially separated light beams. And at least first and second multi-pixel diffractive optical face masks arranged in a serial manner such as dividing into a second array of light beams. An optical system for use in surface patterning, comprising: a light source system operably configured to produce at least one light beam; And a multi-pixel diffractive optical mask arrangement configured to produce structured light formed by a predetermined arrangement of spatially separated light beams of a profile and substantially equivalent intensity values from the at least one light beam. Optical system for use in patterning. 76. The optical system of claim 75, wherein the light beam is configured to produce a Gaussian intensity profile, whereby the light beam is operable to be produced in a lenslet arrangement. An array of light source elements; And a control unit operatively configured to perform a continuous mechanism to continuously operate the light source elements in accordance with a preset pattern. 78. The light source system of claim 77, wherein the pattern is such that only one group of laser source elements is operable within a given time. An optical system for use in image scanning, the optical system comprising at least two light sources that produce light of different wavelengths, each propagating along at least two optical paths, at least one of said at least two light sources being spatial Is configured to produce structured light in the form of an array of light beams separated into; A light coupling arrangement for combining the at least two optical paths into an output optical path; And a mechanical scanner embedded in the output optical path. An optical system for use in image scanning, comprising: at least two individually addressable light sources producing light of different wavelengths each propagating along at least two optical paths, the at least two light sources Are configured to produce a structured light form of each array of spatially separated light beams of a constant intensity profile, at least one of which is substantially rectangular; A light coupling arrangement for combining the at least two optical paths into one output optical path; And a mechanical scanner embedded in the output optical path. 81. The optical system of claim 80, wherein the at least one light source is configured to provide individually addressable spatially separated light beams. CLAIMS 1. A method for producing a controlled pattern of illuminated light, the method comprising: producing structured light in the form of a plurality of spatially separated light beams; And applying beam shaping to the structured light, wherein the beam shaping combines (i) the multiple light beams into a simple life beam, whereby the intensity of the irradiated light is sufficiently increased; (Ii) a diffractive optical unit configured to be executable to perform at least one of affecting the intensity profile of the input light to provide the illumination light in the form of an array of light beams of substantially rectangular constant intensity profile. A method for producing a controlled pattern of illuminated light through which structured light passes through. 82. The method of claim 82, comprising passing multiple light beams through an inverted damman grating. 82. The method of claim 82 (ii), wherein the input light passes through the top hat element structure. 85. The method of claim 84, wherein the top hat element structure comprises an arrangement of top hat elements arranged in accordance with an array of spatially separated light beams such that each top hat element affects one of the light beams. Method for producing a regulated pattern of illumination light. 86. The method of claim 85, wherein the top hat element is configured to affect the intensity of the corresponding light beam to produce an irradiated light beam of an intensity profile that is substantially rectangular corresponding to the shape of the entire surface to be irradiated therefrom. Method for producing a regulated pattern of illumination light. 86. The method of claim 85, wherein an intensity profile of a corresponding light beam is applied to produce an irradiated light beam of an intensity profile that is substantially rectangular corresponding to the shape of a simple pixel from an array of surface pixels for which the tap hat element is to be irradiated therefrom. And a method for producing a controlled pattern of illumination light. 86. The method of claim 85, wherein the tap hat element is an intensity of a corresponding light beam to produce an illumination profile of an intensity profile that is substantially rectangular corresponding to the shape of the sub-array from an array of pixels of the surface to be irradiated therefrom. A method for producing a regulated pattern of illuminated light, configured to influence a profile. CLAIMS 1. A method for using surface patterning to produce a lenslet arrangement, the method comprising: producing at least one light beam; And through a multi-pixel diffractive optical face mask configured to produce structured light formed by a predetermined arrangement of spatially separated light beams of a substantially same intensity value and a Gaussian intensity profile from the at least one light beam. A method for using surface patterning to produce a lenslet array, the method comprising passing at least one light beam. A method for use in scanning an image, the method comprising: producing at least first and second light portions of different wavelengths each propagating along at least two optical paths, the at least one light portions corresponding to an arrangement of image pixels A form of an array of spatially separated light beams; scanning an image comprising transferring an array of light beams along the simple output optical path to a mechanical scanner and combining the at least two optical paths into a simple output optical path Method for use.

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