KR20070018698A - Heating element - Google Patents

Abstract

It provides a heating element with a long lifespan, high durability, compactness, and low manufacturing cost of the protective layer without corrosion of the feed terminal.

The plate-shaped portion 1a on which the heater pattern 3a is formed, the rod-shaped portion 1b on which the conductive path 3b protruding from one surface of the plate-shaped portion 1a, and the plate-shaped portion 1a of the rod-shaped portion 1b are formed. ) Has a heat-resistant base material 1 of an integral body formed with a tip portion 1c on which the feed terminal 3c is formed, and is positioned opposite to), and has an insulating dielectric layer 2 and a dielectric layer 2 on the surface of the heat-resistant base material 1. On the conductive layer 3, the heater pattern 3a is formed in the plate-shaped portion 1a, and the conductive path 3b is formed in the rod-shaped portion 1b, and the tip portion 1c is formed. ), A power feeding terminal 3c is formed, and the heating element 3c is formed with the surface of the heater pattern 3a and the conductive path 3b covered with an insulating protective layer 4 and integrally formed. 10).

Description

Heating element {HEATING ELEMENT}

1 is a schematic diagram of an example (Example 1) of a heating element of the present invention, (A) is a sectional view of the heating element, (B) is a perspective view of the protective layer removed from the heating element, and (C) is a An enlarged view of a partial cross-sectional view of the conductive portion (dashed line portion in FIG. 1A), (D) is a cross-sectional view of the heat resistant substrate, and (E) is a perspective view of the heat resistant substrate.

2 is a schematic view of another example of the heating element of the present invention (Example 2), (A) is a sectional view of the heating element, (B) is a perspective view of the protective layer removed from the heating element, and (C) is a heat resistant substrate (D) is a perspective view of a heat resistant base material.

3 is a schematic diagram of an example of a heating element of the present invention in which an electrostatic chuck pattern is formed, (A) is a sectional view of the heating element, (B) is a perspective view from below of removing the protective layer from the heating element, (C) It is a perspective view from the top of what removed the protective layer from the heating element.

4 is a schematic view of an example (comparative example) of a conventional heating element, (A) is a sectional view of a heating element, (B) is a perspective view of the entire portion where a conductive layer is formed on a heat resistant substrate, and (C) is a heat resistant substrate (D) is a perspective view of a heat resistant base material.

Fig. 5 is a schematic diagram of an example in which the protective layer of the heating element of the present invention has two layers, (A) is a sectional view of the heating element of Example 1, (B) is a partial cross-sectional view of the conductive portion of the heating element (Fig. An enlarged view of 5 (A) and dotted line in (C), and (C) are sectional views of the heating element of Example 2. FIG.

<Description of the symbols for the main parts of the drawings>

One… Heat-resistant base material 1a... Plate

1b... Rod-shaped portion 1c... Tip

2… Dielectric layer 3... Conductive layer

3a... Heater pattern 3b... Challenge

3c... Feed terminal 4.. Protective layer

4p... . Outermost layer 5 of protective layer. Power terminal

6... Electrostatic chuck pattern 10... Heating element

10a... Heating section 10b... Challenge

10c... Feeding terminal part

The present invention relates to a heating element having at least a heat generating portion in which a heater pattern is formed in a plate-shaped portion of a heat resistant substrate, and a feed terminal portion having a feed terminal formed on the heat resistant substrate.

As a heater used for heating the semiconductor wafer in the manufacturing process of a semiconductor device, the heat-resistant base material which consists of sintered ceramics, such as alumina, aluminum nitride, zirconia, etc., is made of high melting point metals, such as molybdenum and tungsten, and foil as a heating element. What has been wound or glued has been used.

However, in such a heater, since the heat generating element is made of metal, there are problems such as deformation and volatilization, short life, and complicated assembly (see Non-Patent Document 1). Moreover, since the sintered ceramic is used for a heat resistant base material, there also existed a problem that the binder contained in this became an impurity.

Therefore, in order to prevent thermal deformation and scattering of impurities due to such heat cycles, a pyrolytic boron nitride (PBN) pyrogenic nitride (PBN) pyrogenic nitride (PBN) heat-resistant substrate and a pyrolytic graphite on the heat-resistant substrate Ceramic heaters having a conductive layer have been developed (see Non-Patent Document 1, Patent Documents 1-3, etc.).

For example, as shown in FIG. 4, the heating element of such a heater includes at least a heat generating portion 20a having a heater pattern 3a formed on a plate-shaped heat resistant substrate 21 and a heater pattern of the heat resistant substrate 21. A heating element 20 having a feed terminal portion 20c having a feed terminal 3c formed on the periphery of the same surface as that of the heater surface 3, wherein a protective layer 4 is formed on the heater pattern 3a, and a feed member or the feed terminal 3c. The power supply terminal 5 is connected.

However, since pyrolytic graphite, which is a heating element, is weak in oxidation consumption and reactive with hot gases used during the process such as methane gasification by hydrogen, pyrolysis graphite of the feed terminal portion exposed for power supply may not contain oxygen remaining in the process. There was a problem in that it was consumed by the hot gas in the process and the life was short.

In order to solve this problem, an attempt has been made to keep the feed terminal unit away from the heat generating unit. For example, the feed terminal is connected to the power supply terminal member via a feed member having a heater pattern that generates heat by energization, and the protection layer covering the heater pattern is made of an electrically insulating ceramic such as PBN to prevent overheating of the feed terminal portion. A proposal has been made to extend the life of the feed terminal (see Patent Document 4).

Moreover, the method of forming a protective layer after stacking carbon feed terminal parts by granulation is proposed (refer patent document 1, 7 etc.).

However, since the heating element of such a heater has projections on the heating surface side, it is necessary to form a space between the objects to be heated, which causes a problem of compact design. In addition, there is a problem that cracks are likely to occur in the protective layer near the connection portion assembled by combining a plurality of components, and corrosion of the conductive layer starts from the cracks, resulting in a shortened life. In addition, when used in an environment where borides corrode, such as using a halogen-based etching gas, there is a drawback that the outermost layer lacks resistance as the boride and the outermost layer is corroded to shorten the life.

In addition, when the thermally decomposed boron nitride is used as the material of the heat resistant support base as described above, the mechanical strength is high and the heating can be performed with high efficiency. However, the anisotropy tends to cause warpage and is also expensive, so that the boron nitride sintered body is also used. It is proposed (refer patent document 5).

However, when the boron nitride sintered body is used for the heat resistant support base, the substrate has to be thick because the mechanical strength is small, and the amount of heat that escapes from the side of the substrate is also large, especially when the sample is to be heated to a temperature higher than 700 ° C. The temperature did not rise.

In addition, recently, a highly functional ceramic heater is proposed (see Patent Literatures 2, 3, 5, and 6) to impart an electrostatic adsorption function for fixing a semiconductor wafer to be heated on a heater (see Patent Documents 2, 3, 5, and 6), but insufficient heat resistance of the heater. did.

[Non-Patent Document 1] Pyrolysis Graphite / Pyrolysis Boron Nitride Heater manufactured by Union Carbide Services Co., Ltd. described in "Vacuum" Nos. 12, (33) and p.53

[Patent Document 1] Japanese Patent Application Laid-open No. Hei 8-500932

[Patent Document 2] Japanese Patent Application Laid-Open No. 5-129210

[Patent Document 3] Japanese Patent Application Laid-open No. Hei 6-61335

[Patent Document 4] Japanese Patent Application Laid-Open No. 11-354260

[Patent Document 5] Japanese Patent Application Laid-Open No. 4-358074

[Patent Document 6] Japanese Patent Application Laid-Open No. 5-109876

[Patent Document 7] International Publication WO2004 / 068541 Pamphlet

Accordingly, the present invention has been made in view of the above problems, and an object of the present invention is to provide a heating element having a long life, high durability, compactness, and low manufacturing cost of the protective layer without the feed terminal being corroded.

In order to achieve the above object, according to the present invention, at least a plate-shaped portion on which a heater pattern is formed, a rod-shaped portion on which a conductive path protruding from one surface of the plate-shaped portion is formed, and the plate-shaped portion is opposed to the plate-shaped portion. It has a heat-resistant base material of the integral body formed in the front end portion is formed at the end and the feed terminal is formed, an insulating dielectric layer on the surface of the heat-resistant substrate and a conductive conductive layer on the dielectric layer, the conductive layer is a heater pattern in the plate-shaped portion And a conductive path is formed in the rod-shaped portion, a feed terminal is formed in the tip portion, and the heater pattern and the surface of the conductive path are covered with an insulating protective layer and are integrally formed. An element is provided (claim 1).

In such a heating element, the heating portion in which the heater pattern is formed in the plate-shaped portion and the feed terminal portion in which the feed terminal is formed in the tip end portion are blocked by the rod-shaped portion in which the conductive path is formed. The terminal is less likely to be consumed by the hot gas in the process, resulting in longer life.

Moreover, since the said heat resistant base material is not an assembly and combining several parts, it is compact and it is low in manufacturing cost, and the layer formed in the said heat resistant base material is hard to produce a crack by use, and is long life.

The conductive layer is formed of a heater pattern, a conductive path and a feed terminal as described above, and is formed integrally by covering the surface of the heater pattern and the conductive path with a protective layer. It is low, and the said protective layer becomes hard to produce a crack by use, and becomes long life.

At this time, it is preferable that the material of the said heat resistant base material is graphite (claim 2).

Thus, if the material of the heat resistant substrate is graphite, even if the material is inexpensive and complicated shape, the processing is easy, so that the manufacturing cost can be further lowered and the heat resistance is also large.

In addition, the material of the dielectric layer is preferably one of boron nitride, pyrolytic boron nitride, silicon nitride, CVD silicon nitride, aluminum nitride, CVD aluminum nitride, or a combination thereof (claim 3).

Thus, if the material of the dielectric layer is any one of boron nitride, pyrolytic boron nitride, silicon nitride, CVD silicon nitride, aluminum nitride, CVD aluminum nitride, or a combination thereof, the insulation is high and there is no scattering of impurities due to the use at high temperature, so that the purity is high. It is also possible to cope with the required heating process.

Moreover, it is preferable that the material of the said conductive layer is pyrolysis carbon and glass carbon (claim 4).

If the material of the conductive layer is pyrolytic carbon or glass carbon, it can be heated to a high temperature and is easy to process. Therefore, by changing the width of the heater pattern as a meandering pattern or by varying the width thereof, It is also easy to give a heat generation distribution and to make it crack.

In addition, the material of the protective layer is preferably one of boron nitride, pyrolytic boron nitride, silicon nitride, CVD silicon nitride, aluminum nitride, CVD aluminum nitride, or a combination thereof (claim 5).

Thus, the material of the protective layer is any one of boron nitride, pyrolytic boron nitride, silicon nitride, CVD silicon nitride, aluminum nitride, CVD aluminum nitride, or a combination thereof. Since there is no scattering of, it becomes a protective film which can cope with the heating process which requires high purity.

In addition, it is preferable that the said protective layer consists of at least two layers, and the material of an outermost layer is aluminum, yttrium, silicon, or any one of these compounds (claim 6).

Thus, the protective layer is composed of at least two layers, and the material of the outermost layer is aluminum, yttrium, silicon, or any one of these compounds, so that the protective layer can be used stably even in a corrosive environment such as halogen-based etching gas or oxygen. . In particular, in this case, it is effective and preferable to use the first layer of the protective layer as the aluminum nitride or the like.

Moreover, it is preferable that the length of the said rod-shaped part is 10-200 mm (claim 7).

By setting the rod-shaped portion to 10 to 200 mm in this manner, the terminal portion and the heating portion can be provided with a sufficient distance, so that the terminal portion can be sufficiently low in temperature, and the consumption of the terminal portion can be more effectively prevented.

The heater pattern may be formed on a surface of the plate-shaped portion on which the rod-shaped portion protrudes, and an electrostatic chuck pattern for holding the object to be heated is formed on the surface on the opposite side of the plate-shaped portion. .

Thus, when the heater pattern is formed on the surface of the plate-shaped side protruding the rod-shaped portion, and the electrostatic chuck pattern for holding the object to be heated is formed on the surface on the opposite side of the plate-shaped portion, heating while maintaining the heated object It can be heated efficiently and the position can be set with high precision, and the desired heating process can be performed more precisely when the positional accuracy of the object to be heated such as ion infrastructure, plasma etching, sputtering is required. have.

As shown in Fig. 4, in the heating element 20 of the conventional ceramic heater having the pyrolytic graphite heat generating layer 3a on the heat resistant substrate 21 of pyrolytic boron nitride, pyrolytic graphite is weak in the consumption of oxide and used during the process. Since it is reactive with hot gas, the pyrolytic graphite of the feed terminal 3c exposed for power feeding is consumed by the oxygen remaining in the process or the hot gas in the process, resulting in a short lifespan.

In order to solve this problem, several attempts have been made to keep the feed terminal away from the heat generating portion. However, projections are generated on the heating surface side, which impairs the compact design, or the protective layer near the connecting portion assembled by combining a plurality of parts. There was a problem in that cracks easily occurred due to use and the life was short.

Thus, the inventors have intensively studied, at least, a plate-shaped portion on which a heater pattern is formed, a rod-shaped portion on which a conductive path protruding from one surface of the plate-shaped portion is formed, and the plate-shaped portion opposite to the plate-shaped portion. It has a heat-resistant base material of the integral body formed in the front end portion is formed in the feed terminal, the insulating dielectric layer on the surface of the heat-resistant substrate and a conductive conductive layer on the dielectric layer, the conductive layer is formed in the plate-shaped heater pattern A conductive element is formed in the rod-shaped portion, a feed terminal is formed in the tip portion, and the heater pattern and the surface of the conductive path are covered with an insulating protective layer and are integrally formed with a heating element. (B) As the protective layer is less deteriorated, it is found to be durable, compact, and low in manufacturing cost.

EMBODIMENT OF THE INVENTION Hereinafter, although embodiment of this invention is described in detail, referring drawings, this invention is not limited to these. 1 and 2 are schematic views of the heating element of the present invention.

According to the present invention, the plate-shaped portion 1a on which the heater pattern 3a is formed, the rod-shaped portion 1b on which the conductive path 3b protruding from one surface of the plate-shaped portion 1a, and the plate-shaped portion of the rod-shaped portion 1b are formed. It has the heat-resistant base material 1 of the integral body in which the front-end | tip part 1c in which the feed terminal 3c is formed in the opposite end to the upper part 1a is formed, and has the insulating dielectric layer 2 and the dielectric layer on the surface of the heat-resistant base material 1; It has a conductive conductive layer 3 on (2), the heater pattern 3a is formed in the plate-shaped part 1a, and the conductive path 3b is formed in the rod-shaped part 1b, In the tip portion 1c, a feed terminal 3c is formed, and the heating element 10 is formed by integrally forming a surface of the heater pattern 3a and the conductive path 3b covered with an insulating protective layer 4 and integrally formed. )to be.

In the heating element 10, the heating portion 10a having the heater pattern 3a formed on the plate-shaped portion 1a and the feeding terminal portion 10c having the feed terminal 3c formed on the tip portion 1c have a rod-shaped portion ( Since it is blocked by the conductive part 10b in which the conductive path 3b was formed in 1b, the power supply terminal part 10c becomes low temperature, and the exposed power supply terminal 3c becomes hard to be consumed by the hot gas in a process. It becomes difficult to deteriorate.

In addition, since the heat-resistant base material 1 is an integrated body and is not assembled by combining a plurality of parts, the layer formed on the heat-resistant base material 1 is compact and has low manufacturing cost, and the whole is made of the same material. (2, 3, 4) becomes hard to produce a crack by use.

If the material of the heat resistant base material 1 is graphite, even if the material is inexpensive and complicated shape, it is easy to process, so that the manufacturing cost can be further lowered and the heat resistance is also high, and if the heat resistance is high, other materials such as boron nitride sintered body are preferable. This may be

The plate portion 1a may be formed as the heating portion 10a by forming the dielectric layer 2, the heater pattern 3a, and the protective layer 4, and does not necessarily have a disc shape as shown in FIGS. It may be a polygonal plate shape.

The rod-shaped portion 1b protrudes from one surface of the plate-shaped portion 1a, and as shown in Fig. 1C, the dielectric layer 2, the conductive path 3b, and the protective layer 4 are formed to form the conductive portion 10b. As long as it is, it does not necessarily need to be a cylinder like FIG. 1, FIG. 2, and may be a polygonal column. In addition, there may be one rod-shaped part 1b like FIG. 1, or may be two or more like FIG. In the heating element of FIG. 2, the heater pattern 3a is formed on both sides of the plate-shaped portion 1a, and is energized by two rod-shaped portions 1b to be heated.

By setting the rod-shaped portion 1b to 10 to 200 mm, the feed terminal portion 10c and the heating portion 10a can be provided at a sufficient distance, so that the consumption of the terminal portion can be more effectively prevented.

The tip portion 1c may be positioned opposite to the plate portion 1a of the rod-shaped portion 1b, and the dielectric layer 2 and the feed terminal 3c may be formed to form the feed terminal portion 10c. Here, the protective layer 4 is not formed on the feed terminal 3c. Thereby, the said feed terminal 3c is electrically connected to the power supply terminal 5, and can flow a direct current or alternating current.

In addition, when there is one rod-shaped part 1b as shown in FIG. 1, it is preferable that the front-end | tip part 1c is made into the plate-shaped structure expanded like FIG. 1 for structural stability.

The dielectric layer 2 may be made of a material having insulation and heat resistance, but the material may be made of any one of boron nitride, pyrolytic boron nitride, silicon nitride, CVD silicon nitride, aluminum nitride, CVD aluminum nitride, or a combination thereof. There is no scattering of impurities by the use in the present invention, and it can cope with a heating process requiring high purity.

In the conductive layer 3, a heater pattern 3a is formed in the plate-shaped portion 1a, a conductive path 3b is formed in the rod-shaped portion 1b, and a feed terminal 3c is formed in the tip portion 1c. It is formed, and the surface of the heater pattern 3a and the conductive path 3b is formed by being integrally formed by being covered with the protective layer 4, so it is compact and has low manufacturing cost. In addition, since the conductive layer 3 is not a combination of a plurality of components, it is difficult to peel off, and the protective layer 4 does not cause cracks in the vicinity of the connecting portion of the component due to its use, and thus has a long service life.

If the material of the conductive layer 3 is pyrolytic carbon or glass carbon, it can be heated to a high temperature, and it is easy to process, so that the heater pattern is a meandering pattern, and the width thereof is changed to give an arbitrary temperature gradient, or according to the thermal environment. It is also preferable to give a heat generation distribution so that it can be cracked. In particular, pyrolytic graphite is preferable since it is a lower manufacturing cost. However, any other material may be used as long as it is a material having high heat resistance that generates heat by energization. The heater pattern shape is not limited to the meandering pattern (zigzag pattern) as shown in FIG. 1, and may be, for example, a concentric swirl pattern.

The heater pattern 3a is formed between the dielectric layer 2 and the protective layer 4 on the plate-shaped portion 1a, and provides sufficient heat for heating the target object to be heated by heat generation by energization. It is. As shown in Figs. 1 and 2, one pair of inlet portions of the currents connected to the conductive path 3b may be used. However, by using two or more pairs, independent heater control of two or more zones is also possible.

The heater pattern 3a is preferably formed on the surface opposite to the surface on which the rod-shaped portion 1b of the plate-shaped portion 1a protrudes, as shown in Fig. 1 (B) and Fig. 2 (B). ) May be formed on the surface of the side where the rod-shaped portion 1b of the plate-shaped portion 1a protrudes, or may be formed on both surfaces.

The feed terminal 3c is formed on the dielectric layer 2 on the tip portion 1c, and is connected to the power supply terminal 5, so that the insulating protective layer 4 is not formed. Here, the power supply terminal 5 is connected to the feed terminal 3c to supply a direct current or alternating current to the conductive layer 3.

The conductive path 3b is formed between the dielectric layer 2 and the protective layer 4 on the rod-shaped portion 1b and integrally formed to connect the heater pattern 3a and the feed terminal 3c in the middle. will be. 1 and 2, the connection with the heater pattern 3a in the case where the heater pattern 3a is formed on the surface on the opposite side from which the rod-shaped portion 1b of the plate portion 1a protrudes, The conductive path 3b is formed through the side surface and the rear surface of the plate-shaped portion 1a.

Although the protective layer 4 may be a material having insulation and heat resistance, it is preferable that the material is one of boron nitride, pyrolytic boron nitride, silicon nitride, CVD silicon nitride, aluminum nitride, CVD aluminum nitride, or a combination thereof. As a result, it is possible to cope with a heating process having high insulation properties and no scattering of impurities due to use at high temperatures and requiring high purity. However, pyrolytic boron nitride is hydrogen resistant, but it is not preferable to use it in a fluorine-based environment because it is not corrosion resistant.

As shown in Fig. 5B, the protective layer 4 is composed of at least two layers, and the material of the outermost layer 4p is aluminum, yttrium, silicon, or any one of these compounds. It is preferable. Thereby, it can use stably also in the corrosive environment, such as halogen type etching gas and oxygen. That is, it can be used as aluminum, a yttrium metal, or as a compound of any one of aluminum, yttrium, or silicon, for example, alumina, aluminum fluoride, yttria, yttrium fluoride, silicon oxide can be used, and aluminum, yttrium, You may use the compound which combined two or more of alumina, aluminum fluoride, yttria, yttrium fluoride, and silicon oxide. In this case, the outermost layer is made of aluminum or the like, and since the lower layer protects the conductive layer, oxides and conductive materials are not preferable, and metals are short and cannot be used. Therefore, it is preferable to set it as the above-mentioned boron nitride, pyrolysis boron nitride, etc.

Also, as shown in FIG. 3, the object to be heated may be held by forming the electrostatic chuck pattern 6, which is an electrode pattern for supplying static electricity. In particular, the heater pattern 3a is formed on the surface of the side where the rod-shaped portion 1b of the plate-shaped portion 1a protrudes as shown in Fig. 3B, and the side opposite to the plate-shaped portion 1a as shown in Fig. 3A. If the electrostatic chuck pattern 6 is formed on the surface of the substrate to be heated, the heating body can be reliably maintained while being heated so that the heating position can be set with high accuracy, and the ion infrastructure, plasma etching, sputtering, etc. When the positional precision of a heating body is calculated | required, a desired heating process can be performed more correctly. In the case of forming the chuck pattern, the protective layer is particularly preferably made of insulating material in which nitrides as described above are blended.

The heating element 10 of the present invention as described above is electrically connected and heated by the power supply terminal 5 so that the heating portion 10a and the power feeding terminal portion 10c are connected to the rod-shaped portion 1b by the conductive path 3b. ) Is blocked by the formed conductive portion 10b, so that the feed terminal 3c exposed in the feed terminal portion 10c is less likely to be consumed by the hot gas in the process, resulting in a longer life.

In the conductive layer 3, the heater pattern 3a, the conductive path 3b, and the feed terminal 3c are formed, and the surface of the heater pattern 3a and the conductive path 3b has a protective layer 4. ), It is formed integrally, so that it is compact and the manufacturing cost is low, and the protective layer 4 is less likely to be cracked by use, resulting in a long service life.

EXAMPLE

Hereinafter, although an Example and a comparative example are shown and this invention is demonstrated more concretely, this invention is not limited to these.

Example 1

As shown in Fig. 1, the rod-shaped portion 1b having a diameter of 30 mm and a length of 100 mm and the plate-shaped portion 1a of the rod-shaped portion 1b are formed from the center of one surface of the plate-shaped portion 1a having a thickness of 10 mm and an outer diameter of 250 mm. ) A carbon-resistant heat-resistant base material (1) formed of a single disc having a diameter of 60 mm and a thickness of 10 mm on the opposite side thereof, and having a tip portion 1c having four 6 mm diameter holes that can be connected to the power supply terminal 5. Prepared).

The heat resistant base material 1 was placed in a thermal CVD furnace, and ammonia and boron trichloride were flown on the surface of the reaction gas at a capacity mixing ratio of 4: 1, and reacted under the conditions of 1900 ° C. and 1 Torr to have a thickness on this surface. A dielectric layer 2 made of 0.3 mm pyrolytic boron nitride was prepared.

Next, methane gas was pyrolyzed under the conditions of 1800 ° C. and 3 Torr to form a conductive layer 3 made of pyrolytic graphite having a thickness of 0.1 mm. The conductive layer 3 forms the heater pattern 3a at the heating surface side at the plate-shaped portion 1a, and forms the conductive path 3b at the side, the rear surface and the rod-shaped portion 1b, and feeds at the tip portion 1c. It processed so that the terminal 3c might be formed. In this case, two feed terminals 3c were used, and the remaining two holes were not used.

Then, the feed terminal portion 3c was masked, and the substrate 1 was again placed in a thermal CVD furnace to flow ammonia and boron trichloride as a reaction gas at a capacity mixing ratio of 4: 1, and the conditions were 1900 占 폚 and 1 Torr. On the surface of the heater pattern 3a and the conductive path 3b, an insulating protective layer 4 made of pyrolytic boron nitride having a thickness of 0.1 mm was formed.

In this way, the heating element 10 of FIG. 1 manufactured was electrically connected, and it heated in the vacuum of 1x10 <^-4> Pa, The heating part 10a was heated at 800 degreeC with the electric power of 1.5 kV. At that time, the power supply terminal portion 10c became 150 ° C and was able to be significantly lowered than the heating portion 10a.

Hydrogen gas was introduced to 1 × 10 ⁻² Pa, but the terminal and heater parts could be heated without change even after 200 hours.

In addition, as shown in FIG. 5, 10 micrometers of aluminum nitride is formed as the outermost layer 4p by the reactive sputtering method on the outermost surface of the heating element 10 of FIG. 1 manufactured similarly to FIG. 5 (A). The heating element 10 shown was manufactured. It was electrically connected, it heated in the vacuum of 1x10 <^-4> Pa, and the heating part 10a was able to heat to 500 degreeC with 1.0 kV electric power. At that time, the power supply terminal portion 10c became 150 ° C and was able to be significantly lowered than the heating portion 10a.

CF ₄ was introduced here to make 1 × 10 ⁻² Pa, but even after 200 hours, the consumption was heated to 5 μm or less without change.

Example 2

As shown in Fig. 2, both ends of one surface of the plate-shaped portion 1a having a thickness of 10 mm and an outer diameter of 250 mm, a pair of rod-shaped portions 1b having a diameter of 20 mm and a length of 50 mm at two locations, and the rod-shaped portions 1b. The carbon-resistant heat-resistant base material 1 was formed from the integral body in which the female screw hole of 10 mm of depth M10 was formed in the opposite side to the plate-shaped part 1a, and the front end part 1c which formed the electrical connection by screw was formed.

The heat-resistant base material 1 was placed in a thermal CVD furnace, and ammonia and boron trichloride were flowed on the surface thereof as a reaction gas at a capacity mixing ratio of 4: 1, and reacted under the conditions of 1900 占 폚 and 1 Torr. A dielectric layer 2 made of pyrolytic boron nitride with a thickness of 0.3 mm was formed.

Next, methane gas was pyrolyzed under the conditions of 1800 ° C. and 3 Torr to form a conductive layer 3 made of pyrolytic graphite having a thickness of 0.1 mm. The conductive layer 3 forms the heater pattern 3a on the heating surface side in the plate-shaped portion 1a, the conductive path 3b in the rod-shaped portion 1b, and the feed terminal 3c in the tip portion 1c. Processed to form.

Then, the feed terminal portion 3c was masked, and the heat resistant base material 1 was again placed in a thermal CVD furnace to flow ammonia and boron trichloride as a reaction gas at a capacity mixing ratio of 4: 1, 1900 ° C and 1 Torr. Under the condition of, an insulating protective layer 4 made of pyrolytic boron nitride having a thickness of 0.1 mm was formed on the surfaces of the heater pattern 3a and the conductive path 3b.

Thus, the heating element 10 of FIG. 2 manufactured was electrically connected, and it heated in the vacuum of 1x10 <^-4> Pa, and the heating part 10a was heated at 800 degreeC with the electric power of 1.5 kV. At that time, the power supply terminal portion 10c became 200 ° C, and was able to be significantly lowered than the heating portion 10a.

Hydrogen gas was introduced here to 1 × 10 ⁻² Pa, but heating was possible without change in the terminal portion even after 200 hours.

In addition, on the outermost surface of the heating element 10 of FIG. 2 manufactured in the same manner, as shown in FIG. 5, an yttria layer is formed by a plasma spraying method as the outermost layer 4p by 10 占 퐉, and FIG. The heating element 10 shown to was manufactured. It was electrically connected, it heated in the vacuum of 1x10 <^-4> Pa, and the heating part 10a was able to heat to 500 degreeC with 1.0 kV electric power. At that time, the power supply terminal portion 10c became 150 ° C and was able to be significantly lowered than the heating portion 10a.

CF ₄ was introduced here to make 1 × 10 ⁻² Pa, but the surface consumption was very small (10 μm) even after 200 hours.

(Comparative Example)

As shown in Fig. 4, carbon is formed into an integral body in which female threaded holes having a depth of 10 mm of M10 are formed at both ends of the surface of the plate-shaped base material 21 having a thickness of 10 mm and an outer diameter of 250 mm so that electrical connection can be performed by screws. The heat resistant base material 21 of the agent was formed. The screw portion of M10 was made slightly larger than 0.4 mm so that electrical connection could be made later by screws.

The heat resistant substrate 21 was placed in a thermal CVD furnace, and ammonia and boron trichloride were flown on the surface of the reaction gas at a capacity mixing ratio of 4: 1, and reacted under the conditions of 1900 ° C. and 1 Torr to have a thickness on the surface. A dielectric layer 2 made of 0.3 mm of pyrolytic boron nitride was formed.

Next, methane gas was pyrolyzed under the conditions of 1800 ° C. and 3 Torr to form a conductive layer 3 made of pyrolytic graphite having a thickness of 0.1 mm. The conductive layer 3 was processed so that the heater pattern 3a was formed in the heating surface side of the base material, and the feed terminal 3c was formed in the both ends.

Then, the feed terminal portion 3c was masked, the substrate 21 was again placed in a thermal CVD furnace, and ammonia and boron trichloride were flowed at a capacity mixing ratio of 4: 1 as a reaction gas at 1900 占 폚 and 1 Torr. Under the condition of, an insulating protective layer 4 made of pyrolytic boron nitride having a thickness of 0.1 mm was formed on the surface of the heater pattern 3a.

Thus, the heating element 20 of FIG. 4 manufactured was electrically connected, and it heated in the vacuum of 1x10 <^-4> Pa, and was able to heat to 800 degreeC with 1.5 kV electric power. At that time, the feed terminal portion could hardly prevent heating at 480 ° C.

Hydrogen gas was introduced to 1 × 10 ⁻² Pa, but at 75 hours, carbon in the feed terminal 3c was corroded and disconnected.

When CF ₄ was introduced by heating to 500 ° C with 1.0 kW of electric power, boron nitride, which is the outermost layer, was lost at the point where 10 hours had elapsed, and cracks were formed in the conductive layer 3 such as the heater pattern 3a. And the heating element 20 was disconnected.

In addition, this invention is not limited to the said embodiment. The said embodiment is an illustration, Any thing which has a structure substantially the same as the technical idea described in the claim of this invention, and shows the same effect is contained in the technical scope of this invention. For example, although the case where the dielectric layer 2 and the protective layer 4 were formed with the thermal decomposition boron nitride was described in embodiment, it is also the case where it forms with other materials, such as silicon nitride and aluminum nitride.

Thus, in the heating element provided by the present invention, since the heating portion and the feed terminal portion are blocked by the rod-shaped portion, it is difficult for the feed terminal exposed at the feed terminal portion to be consumed by the hot gas in the process, and the heat resistant substrate Since is a monolithic body, it is compact, low in manufacturing cost, and the formed layer becomes less likely to crack.

In addition, since the conductive layer is formed of a heater pattern, a conductive path and a feed terminal as described above, and the surfaces of the heater pattern and the conductive path are covered with a protective layer and are integrally formed, the conductive layer is compact and has low manufacturing cost. In addition, the protective layer is less likely to be cracked by use. Therefore, the heating element of the present invention is very long in life.

In particular, since the material of the heat resistant base material is graphite, processing is easy even if the material is inexpensive and complicated shape, so that the manufacturing cost can be further lowered and the heat resistance is also large.

Claims (8)

At least, a plate-shaped portion in which a heater pattern is formed, a rod-shaped portion in which a conductive path protruding from one surface of the plate-shaped portion is formed, and an integrally formed tip portion in which a feed terminal is formed at an end opposite to the plate-shaped portion of the rod-shaped portion. Has a heat resistant substrate of water; An insulating dielectric layer on the surface of said heat resistant substrate and a conductive conductive layer on said dielectric layer; In the conductive layer, a heater pattern is formed in the plate portion, a conductive path is formed in the rod portion, and a feed terminal is formed in the tip portion; And the surface of the heater pattern and the conductive path are covered with an insulating protective layer and formed integrally with each other. The heating element according to claim 1, wherein a material of the heat resistant substrate is graphite. The heating element according to claim 1 or 2, wherein the material of the dielectric layer is one of boron nitride, pyrolytic boron nitride, silicon nitride, CVD silicon nitride, aluminum nitride, CVD aluminum nitride, or a combination thereof. The heating element according to any one of claims 1 to 3, wherein the conductive layer is made of pyrolytic carbon or glass carbon. The material of the protective layer according to any one of claims 1 to 4, wherein the material of the protective layer is boron nitride, pyrolytic boron nitride, silicon nitride, CVD silicon nitride, aluminum nitride, CVD aluminum nitride, or a combination thereof. Heating element. The heating element according to any one of claims 1 to 5, wherein the protective layer is formed of at least two layers, and the material of the outermost layer is aluminum, yttrium, silicon, or any compound thereof. The heating element according to any one of claims 1 to 6, wherein the rod-shaped portion has a length of 10 to 200 mm. The electrostatic chuck according to any one of claims 1 to 7, wherein a heater pattern is formed on a surface of the plate-shaped portion on which the rod-shaped portion protrudes, and the heated object is held on a surface on the opposite side of the plate-shaped portion. Heating element, characterized in that the pattern is formed.

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