KR20070016230A - Apparatus for carrying substrate - Google Patents

Abstract

The present invention relates to a substrate transfer device, to which the present invention rotates a pulley connected to the belt by a motor drive, a substrate transfer for transferring a substrate placed on the tip of the arm by operating the arm receives the driving force from the pulley on one side In the apparatus, a supply nozzle 10 to which lubricating oil is supplied is located at one side of the bearing coupled to the pulley, and the supply of lubricating oil through the supply nozzle 10 is interrupted by the oil supply valve 20, and the oil supply The valve 20 is provided with a configuration in which the lubricant is transferred from the oil tank 30 through the oil supply hose 40 so that the lubricant is supplied manually or automatically at regular intervals to a bearing for supporting the pulley and the pulley. Minimizes the frictional force in the system to ensure stable transmission of drive force, while at the same time While extending to reduce airborne provides the effect of further improving the productivity, thereby to ensure a more economical equipment and perform management process performed.

Board Transfer, Pulley, Bearing, Lubrication

Description

Apparatus for carrying substrate

1 is a plan view showing a multi-chamber configuration in a typical semiconductor manufacturing facility,

2 is a schematic block structure diagram showing the oil supply means of the substrate transfer apparatus according to the present invention;

3 is a use state diagram showing the structure of the substrate transfer apparatus according to the present invention;

Explanation of symbols on the main parts of the drawings

10: supply nozzle

20: oil supply valve

30: oil tank

40: oil supply hose

50, 60: pulley

The present invention relates to a substrate transfer apparatus, and more particularly, a substrate transfer apparatus that enables a more economic process to be carried out with stable substrate transfer and reduction of man-hours by allowing lubricating oil to be appropriately and easily supplied to a driving part with high frictional force. It is about.

In general, semiconductor manufacturing facilities and LCD manufacturing facilities are equipped with a substrate transfer device for the transfer of the substrate, a typical robot is such a substrate transfer device.

In particular, transfer of substrates inside process equipment requires more precise control of its accuracy.

In addition, to increase the efficiency of the process and the utilization of space, a multi-chamber system is adopted to allow several substrate processing operations to proceed simultaneously in multiple chambers.

FIG. 1 is a plan view illustrating a configuration of a multi-chamber in a semiconductor manufacturing facility. The multi-chamber system includes a load lock chamber 2 which is an atmospheric section of a substrate to be processed or a substrate already processed on one side of the transfer chamber 1 in the center. ), And a process chamber 3 is provided at a position corresponding to the load lock chamber 2 to perform a substantial process.

In this case, the transfer chamber 1 is provided with a transfer robot 4 for transferring a substrate between the load lock chamber 2 and the process chamber 3.

The transfer robot 4 normally drives the arm 4a through a pulley by a motor drive to safely transport the substrate placed on the carriage 4b at the tip of the arm to a required position.

On the other hand, the transfer robot 4 is connected by a pulley belt between the lower portion of the transfer chamber 1 to transmit power, and the pulley on one side receives the power from the motor so that the substrate transfer operation is performed by driving the motor. .

However, regular checks must be carried out as the substrate transfer operation continues for an extended period of time, especially as the bearing connections of the pulleys may corrode and cause operational errors.

In order to perform such a check frequently, it becomes a decisive cause of declining work efficiency and productivity as the work maneuver increases.

Therefore, the present invention has been invented to solve the above-mentioned problems of the prior art, an object of the present invention is to provide a convenient power transmission and management convenience by always lubricating the bearing connection portion of the pulley that is concerned about corrosion due to long-term operation. At the same time, to provide a substrate transfer device to improve the productivity by extending the inspection cycle.

In order to achieve the above object, the present invention is a substrate transfer device for rotating the pulley connected to the belt by the motor drive, and transfers the substrate placed on the tip of the arm by operating the arm receives the driving force from the pulley on one side, One side of the bearing coupled to the pulley is a supply nozzle for supplying the lubricating oil, the supply of the lubricating oil through the supply nozzle is to be intermitted by the oil supply valve, and the oil supply valve to the lubricant to be delivered through the oil supply hose from the oil tank will be.

In the above configuration, the oil supply valve may be formed in a manual structure capable of manually opening and closing the control and the amount of opening and closing, or may be to control the oil supply automatically by a control command from the controller using a solenoid.

In particular, the automatic refueling valve is more preferably opened for a predetermined time every certain period in the controller to enable the refueling is made.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

The present invention has the most remarkable feature of having an oil supply means for supplying lubricant to a bearing coupled to a pulley of the substrate transfer device.

The substrate conveying apparatus of the present invention firstly comprises a motor as a driving means, a belt and a pulley as a power transmission means for transmitting a driving force transmitted from the motor, and an arm rotating by a rotational force connected to the pulley on one side, The configuration is achieved by the engagement of the carriage provided so that the substrate is placed at the arm tip, which is the same as the conventional substrate transfer apparatus.

That is, the substrate transfer apparatus of the present invention transmits the driving force generated by the driving of the motor to the drive shaft side pulley so that the driving force is transmitted to the interlock shaft through the belt connecting the drive shaft side pulley and the interlock shaft side pulley, and is transmitted to the interlock shaft. The substrate is moved by moving the carriage at the tip of the arm by rotating the arm by the driving force.

At this time, the arm moves the carriage in the front-rear direction and the rotational direction through the power transmission means to move the substrate placed in the carriage provided at the uppermost position to the required position.

Figure 2 schematically shows the lubrication means according to the present invention, the present invention is to provide a lubrication means for supplying lubricating oil to the bearing in a configuration such that the carriage of the arm tip is operated by the driving force of the motor.

The oil supply means is constituted largely as a supply nozzle 10, a fuel supply valve 20, an oil tank 30, and an oil supply hose 40.

The oil supply hose 40 constitutes a lubricating oil supply line from the oil tank 30 to the supply nozzle 10, and the oil supply valve 20 of the oil supply hose 40 between these oil tanks 30 and the supply nozzle 10 is provided. It may be provided in the middle, and may be provided in the structure attached to the oil tank 30 or the supply nozzle 10. FIG.

In the lubrication means, the supply nozzle 10 is a discharge end for discharging the lubricating oil, and the supply nozzle 10 allows the end to be located at the lubricating oil supply site, that is, the bearing for supporting the pulley and the bearing engagement site.

And the oil supply valve 20 is configured to interrupt the discharge of the lubricating oil through the supply nozzle 10, so that the discharge amount can be adjusted.

The oil supply valve 20 may in particular be operated by manual operation by a facility manager, and may be automatically operated by being controlled by the controller 22 using the solenoid 21 by electrical operation as shown. You may.

In particular, it is more preferable that the automatic operation type oil supply valve 20 is supplied with oil only for a predetermined time at a predetermined period already set by the controller 22.

The oil tank 30 is always configured to accommodate a predetermined amount of lubricating oil, and is preferably provided at a position where filling is easy.

The lubrication hose 40 may be a flexible rubber hose, which is a lubricating oil flow passage allowing the lubricating oil to flow from the oil tank 30 to the supply nozzle 10, or may be formed as a PVC pipe or a metal pipe. .

In addition, the oil supply hose 40 connects the supply nozzle 10 and the oil supply valve 20 according to the position of the oil supply valve 20 provided between the supply nozzle 10 and the oil tank 30, and simultaneously supplies the oil supply valve 20. ) And the oil tank (30).

On the other hand, the supply nozzle 10 can also be formed in a configuration in which a plurality of feed nozzles 10 are provided at the same time in a portion where abrasion due to friction may occur in particular.

Referring to the operation of the present invention configured as described above is as follows.

First, the present invention allows the oil tank 30 to be filled with a certain amount of lubricating oil, and as shown in FIG. 3, the supply nozzle 10 has a bearing (not shown) that supports the pulley 50 and the pulley 60 of the substrate transfer device. To be fixed toward the

An oil supply valve 20 is provided between the supply nozzle 10 and the oil tank 30, and the oil supply valve 20 is operated by manual or automatic operation when oil supply is required to allow lubrication supply.

That is, when the oil supply valve 20 is opened for a predetermined time at a predetermined period, a minute amount of lubricant oil is supplied from the oil tank 30 to the required position through the supply nozzle 10 via the oil supply valve 20.

In this way, the lubricant may be manually finely adjusted by the facility manager to supply the appropriate amount, or the controller 22 may operate the oil supply valve 20 to automatically supply the appropriate amount.

Lubrication at the right time can minimize wear at anticipated friction.

Therefore, the lubrication is stably performed to the site where friction is expected by long-term driving of the substrate transfer device, so that power transmission due to pulley and bearing wear can be stably performed accurately.

In other words, when the substrate transfer device is continuously driven, the surface friction inevitably occurs in the driving portion, and the driving force transmission between the pulley 50 and the pulley 60 is very important.

In particular, when friction occurs more seriously in at least one of the pulley 50 and the pulley 60, which are connected to each other by a belt or the like, when friction deviation occurs in both pulleys 50 and 60, the driving force is transmitted through the pulley. Minor deviations may occur, resulting in inaccurate substrate transfer.

This phenomenon is caused by the deepening of the frictional force at the part supporting the pulley and the bearing coupling part. Since the increased frictional force is mainly caused by the lack of lubricating oil, the lubricant is supplied at the appropriate time by the periodic equipment inspection (PM). This is to minimize the friction in this area.

Accordingly, the present invention allows the lubricant to be properly supplied to the site where the friction is intensified, thereby preventing corrosion at the driving site and minimizing the friction, thereby further delaying the inspection cycle.

Prolonging the inspection intervals of the equipment can make the process more stable and more productive.

In particular, it is possible to further reduce the number of inspections of the facility to further reduce the labor manpower, thereby further increasing the production efficiency.

On the other hand, while many matters have been described in detail in the above description, they should be construed as illustrative of preferred embodiments rather than to limit the scope of the invention.

Therefore, the scope of the present invention should not be defined by the described embodiments, but should be determined by the technical spirit described in the claims.

As described above, according to the present invention, as the bearing supporting the pulley and the pulley which transmits the driving force of the motor, the lubricant is supplied manually or automatically at regular intervals so as to minimize the frictional force at this site so that a stable driving force can be achieved. At the same time, the facility maintenance cycle and process execution are more economical by reducing the man-hours while extending the facility inspection cycle, and in particular, the process can be stably performed, thus providing a useful effect of improving productivity.

Claims (5)

In the substrate transfer apparatus for rotating the pulley connected to the belt by the motor drive, the driving force is received from the pulley on one side to operate the arm to transfer the substrate placed on the tip of the arm, One side of the bearing coupled to the pulley is a supply nozzle for supplying the lubricating oil, the supply of the lubricating oil through the supply nozzle is to be intermitted by the oil supply valve, so that the lubricant oil is delivered to the oil supply valve through the oil supply hose from the oil tank Substrate transfer device. The substrate transport apparatus of claim 1, wherein the supply nozzle is connected to an oil supply valve and an oil supply hose. The substrate transport apparatus according to any one of claims 1 to 2, wherein the oil supply valve is controlled to be opened and closed while being opened and closed by manual operation. The substrate transfer apparatus according to any one of claims 1 to 2, wherein the oil supply valve is automatically operated by a controller so that opening and closing is interrupted. The substrate transfer apparatus of claim 4, wherein the oil supply valve is opened by the controller only for a predetermined time at a predetermined period.

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