KR20070015166A - 로봇팔 - Google Patents

로봇팔 Download PDF

Info

Publication number
KR20070015166A
KR20070015166A KR1020067020561A KR20067020561A KR20070015166A KR 20070015166 A KR20070015166 A KR 20070015166A KR 1020067020561 A KR1020067020561 A KR 1020067020561A KR 20067020561 A KR20067020561 A KR 20067020561A KR 20070015166 A KR20070015166 A KR 20070015166A
Authority
KR
South Korea
Prior art keywords
robot arm
arm section
robot
section
robotic
Prior art date
Application number
KR1020067020561A
Other languages
English (en)
Korean (ko)
Inventor
리차드 제이 켄트
Original Assignee
팹웍스 솔루션스 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 팹웍스 솔루션스 인코포레이티드 filed Critical 팹웍스 솔루션스 인코포레이티드
Publication of KR20070015166A publication Critical patent/KR20070015166A/ko

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0019—End effectors other than grippers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J17/00—Joints
    • B25J17/02—Wrist joints
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • B25J9/1065—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
    • B25J9/107—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms of the froglegs type
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S901/00—Robots
    • Y10S901/30—End effector

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020067020561A 2004-04-08 2005-04-08 로봇팔 KR20070015166A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US56040604P 2004-04-08 2004-04-08
US60/560,406 2004-04-08

Publications (1)

Publication Number Publication Date
KR20070015166A true KR20070015166A (ko) 2007-02-01

Family

ID=35150519

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020067020561A KR20070015166A (ko) 2004-04-08 2005-04-08 로봇팔

Country Status (4)

Country Link
KR (1) KR20070015166A (fr)
CN (1) CN101124070A (fr)
TW (1) TWI262120B (fr)
WO (1) WO2005099972A2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101020474B1 (ko) * 2007-04-18 2011-03-08 팹웍스 솔루션스 인코포레이티드 로봇아암의 관절

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI498202B (zh) * 2013-01-29 2015-09-01 Compal Electronics Inc 具有組接結構之機器人
CN115182927B (zh) * 2022-08-03 2023-07-07 郑州机械研究所有限公司 一种自适应工况滑动轴承、齿轮箱以及选用方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4555217A (en) * 1983-01-06 1985-11-26 Intelledex Incorporated Robot arm with split wrist motion
US6418811B1 (en) * 2000-05-26 2002-07-16 Ross-Hime Designs, Inc. Robotic manipulator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101020474B1 (ko) * 2007-04-18 2011-03-08 팹웍스 솔루션스 인코포레이티드 로봇아암의 관절

Also Published As

Publication number Publication date
CN101124070A (zh) 2008-02-13
WO2005099972A3 (fr) 2007-02-08
TWI262120B (en) 2006-09-21
WO2005099972A2 (fr) 2005-10-27
TW200602169A (en) 2006-01-16

Similar Documents

Publication Publication Date Title
US11613002B2 (en) Dual arm robot
US11978649B2 (en) Substrate processing apparatus
TWI478797B (zh) 具有多支獨立活動關節臂桿之基板搬運裝置
TWI590368B (zh) 具有使用機械轉換機構之複數可動臂的基板運送裝置
EP0811468A2 (fr) Dispositif de transfert à bras articulé
JPH03136779A (ja) 磁気的に結合された２軸型ロボット
TW201517200A (zh) 設有線性平移支架之真空機械臂
TW201347936A (zh) 雙臂真空機器人
JP6053757B2 (ja) 多関節ロボット、搬送装置
KR20070015166A (ko) 로봇팔
WO2020247740A1 (fr) Robot double comprenant des organes terminaux effecteurs chanfreinés ainsi que systèmes et procédés comprenant celui-ci
US7296962B2 (en) Split assembly robotic arm
US8336419B2 (en) Hub assembly for robotic arm having pin spacers
JPH07171778A (ja) 多関節搬送装置，その制御方法及び半導体製造装置
US20060045718A1 (en) Hub assembly for robotic arm having pin spacers
US20090278023A1 (en) Lower motor locking mount
US20040018070A1 (en) Compact and high throughput semiconductor fabrication system
Hosek Time-Optimum Trajectories for Robots with Multiple End-Effectors

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application