KR20060134764A - Method and equipment of eddy current sensor's sorting out base metal - Google Patents

Method and equipment of eddy current sensor's sorting out base metal Download PDF

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Publication number
KR20060134764A
KR20060134764A KR1020050054707A KR20050054707A KR20060134764A KR 20060134764 A KR20060134764 A KR 20060134764A KR 1020050054707 A KR1020050054707 A KR 1020050054707A KR 20050054707 A KR20050054707 A KR 20050054707A KR 20060134764 A KR20060134764 A KR 20060134764A
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eddy current
current sensor
sensor coil
base material
inductance
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KR1020050054707A
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Korean (ko)
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고각현
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고각현
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/72—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/12—Measuring magnetic properties of articles or specimens of solids or fluids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V3/00—Electric or magnetic prospecting or detecting; Measuring magnetic field characteristics of the earth, e.g. declination, deviation
    • G01V3/08—Electric or magnetic prospecting or detecting; Measuring magnetic field characteristics of the earth, e.g. declination, deviation operating with magnetic or electric fields produced or modified by objects or geological structures or by detecting devices
    • G01V3/10—Electric or magnetic prospecting or detecting; Measuring magnetic field characteristics of the earth, e.g. declination, deviation operating with magnetic or electric fields produced or modified by objects or geological structures or by detecting devices using induction coils
    • G01V3/101—Electric or magnetic prospecting or detecting; Measuring magnetic field characteristics of the earth, e.g. declination, deviation operating with magnetic or electric fields produced or modified by objects or geological structures or by detecting devices using induction coils by measuring the impedance of the search coil; by measuring features of a resonant circuit comprising the search coil

Abstract

A method and an apparatus for classifying a base metal of an eddy current sensor are provided to improve accuracy of the eddy current sensor by compensating an error of the sensing result due to different properties of the base metal. An apparatus for classifying a base metal of an eddy current sensor includes a current/voltage measuring unit, an impedance/phase difference measuring unit, an inductance/actual resistance measuring unit, and a classifying unit. The current/voltage measuring unit measures the current and voltage of an eddy current sensor coil unit. The impedance/phase difference measuring unit measures the impedance and phase difference of the eddy current sensor coil unit. The inductance/actual resistance measuring unit extracts the variation of the inductance and actual resistance of the eddy current sensor coil unit. The classifying unit compares the variation of the inductance/actual resistance of the eddy current sensor coil unit with impedance variation data of the eddy current sensor coil unit to classify the base metal for the eddy current sensor.

Description

와전류 센서의 금속 모재선별 방법 및 장치{Method and Equipment of eddy current sensor's sorting out base metal}Method and equipment for eddy current sensor's sorting out base metal

도 1은 각각의 금속모재별 와전류센서 코일부의 임피던스 변화를 나타낸 표.1 is a table showing the impedance change of the eddy current sensor coil unit for each metal base material.

도 2은 와전류 센서의 금속 모재선별 알고리즘.2 is a metal matrix selection algorithm of the eddy current sensor.

도 3는 와전류 센서의 금속 모재선별 장치의 신호처리선도.3 is a signal processing diagram of a metal matrix screening device of the eddy current sensor.

도 4은 와전류 센서의 금속 모재선별 장치의 회로.4 is a circuit of a metal matrix screening device of the eddy current sensor.

와전류 센서는 금속 모재까지의 정밀 변위 측정 및 모재 내부의 이상을 감지하는 탐상에 쓰이는 대표적 센서이다. 와전류 센서의 기본적 원리는 센서의 코일부에 인가되는 전류의 세기 및 주파수에 비례하여 자기장이 형성되고 그 자기장에 의해 금속 모재의 표면에 와전류가 발생하는데 발생한 와전류에 의해 센서의 코일부에서 발생한 자기장의 방향에 반대 방향의 자기장이 형성돼고 결국 센서 코일부의 임피던스의 변화를 초래하고 그 임피던스 변화의 측정으로 센싱하게된다. Eddy current sensor is a representative sensor used for precision displacement measurement to metal base material and flaw detection to detect abnormality inside base material. The basic principle of the eddy current sensor is that a magnetic field is formed in proportion to the intensity and frequency of the current applied to the coil part of the sensor, and the magnetic field generated by the coil part of the sensor is caused by the eddy current generated when the eddy current is generated on the surface of the metal base material. A magnetic field in the opposite direction is formed in the direction, which eventually causes a change in the impedance of the sensor coil and senses the measurement of the change in the impedance.

기존 와전류 센서는 금속모재와의 변위나 금속모재내의 이상에 따른 와전류센서 코일부의 인덕턴스 변화량을 추출하여 계측을 수행하였다. 그러나 실제와전류센서 코일부의 임피던스 변화는 인덕턴스뿐만 아니라 실저항의 변화도 초래된다. 더욱이 그 각각의 와전류 센서 코일부 임피던스 변화는 금속 모재까지의 거리뿐만 아니라 금속 모재의 물성(전기전도도, 투자율)에도 관계되는 함수로써, 변화량은 금속 모재별로 각기 다르다.(도 1 참조)The existing eddy current sensor was measured by extracting the variation in inductance of the coil part of the eddy current sensor due to the displacement with the metal base material or the abnormality in the metal base material. However, the change of the impedance of the coil part of the actual eddy current sensor causes not only the inductance but also the change of the real resistance. Moreover, the impedance change of each eddy current sensor coil part is a function that is related not only to the distance to the metal base material but also to the physical properties (electrical conductivity, permeability) of the metal base material, and the amount of change is different for each metal base material (see FIG. 1).

따라서, 기존 와전류센서는 초기 사용시 모재의 물성별 측정오차를 보정하기 위한 초기 세팅작업(Alignment or Calibration)을 필요로 하였으며 모재별 측정치의 선형구간 상이에 따른 측정치 정도하향 및 각각의 센서별 센싱대상(측정금속모재)의 제한을 초래하였으며 더욱이 서로 다른 금속 모재에의 연속 측정을 불가능하게 하였다.Therefore, the existing eddy current sensor required initial setting (Alignment or Calibration) to correct the measurement error for each material property at the time of initial use, and the measurement accuracy was lowered and the sensing target for each sensor ( Measurement metal base material), and furthermore, it is impossible to perform continuous measurement on different metal base materials.

본 발명의 목적은 금속모재에 따른 와전류 센서 코일부의 인덕턴스 변화 뿐만 아니라 실저항의 변화를 동시에 측정하여 와전류 센서가 금속모재를 선별 가능토록 하여 와전류 센서의 금속모재별 세팅작업의 불편을 없애고 센서 측정치의 모재별 오차보정 피드백 정보로써의 활용을 통한 와전류 센서의 정도 향상 및 연속적으로 변하는 서로 다른 금속 모재에의 실시간 측정을 가능 하도록 하려는 것이다.An object of the present invention is to measure the change in the inductance of the eddy current sensor coil portion according to the metal base material as well as the change in the real resistance at the same time so that the eddy current sensor can select the metal base material to eliminate the inconvenience of setting work for each metal base material of the eddy current sensor and the sensor measurement value This study aims to improve the accuracy of the eddy current sensor by using the error correction feedback information of each base material and to make real-time measurement on different metal base materials continuously changing.

전술한 발명의 목적인 와전류 센서의 금속 모재선별의 구현 원리는 다음과 같다.The implementation principle of the metal matrix selection of the eddy current sensor, which is an object of the above-described invention is as follows.

와전류 센서 코일부의 측정대상인 금속보재에 측정했을 경우(metal)와 측정대상이 없을 경우(air)의 인덕턴스 변화량과 실저항의 변화가 금속모재별로 각기 상이함(도 1 참조)을 이용한다.The change in inductance and the real resistance of the eddy current sensor coil part when the measurement is performed on the metal material to be measured (metal) and when there is no object to be measured (air) are different for each metal base material (see FIG. 1).

즉, 미리 실험적으로 구한 각각의 금속모재별 임피던스 변화량(도 1)과 측정 으로 구한 임피던스 변화량의 비교를 통하여 미지의 금속모재를 선별가능케 된다.That is, the unknown metal base material can be selected by comparing the impedance change amount (FIG. 1) for each metal base material experimentally obtained in advance and the impedance change amount measured by the measurement.

본 발명은 와전류 센서의 금속 모재선별을 위해.The present invention is to select the metal matrix of the eddy current sensor.

와전류 센서 코일부의 전류/전압의 크기를 측정하는 단계;Measuring the magnitude of the current / voltage of the eddy current sensor coil;

와전류 센서 코일부의 임피던스/위상차를 측정하는 단계;Measuring an impedance / phase difference of the eddy current sensor coil unit;

와전류 센서 코일부의 인덕턴스/실저항의 변화를 추출하는 단계;Extracting a change in inductance / real resistance of the eddy current sensor coil;

추출된 와전류 센서 코일부의 인덕턴스/실저항의 변화량과 금속모재별 와전류 센서 코일부의 임피던스변화 자료(DATA Table)과 비교로 금속모재를 선별하는 단계;Selecting a metal base material by comparing the variation of inductance / real resistance of the extracted eddy current sensor coil part with an impedance change data (DATA table) of the eddy current sensor coil part of each metal base material;

를 거치는 방법으로써 와전류 센서가 금속모재를 선별하게 된다.(도 2)By passing through the eddy current sensor is to select the metal base material (Fig. 2).

본 발명은 와전류 센서의 금속 모재선별을 위하여,The present invention for the metal base material selection of the eddy current sensor,

와전류 센서 코일부의 전류/전압의 크기를 측정하는 기구;A mechanism for measuring the magnitude of the current / voltage of the eddy current sensor coil portion;

와전류 센서 코일부의 임피던스/위상차를 측정하는 기구(도 4);A mechanism for measuring the impedance / phase difference of the eddy current sensor coil portion (FIG. 4);

와전류 센서 코일부의 인덕턴스/실저항의 변화를 추출하는 기구;A mechanism for extracting a change in inductance / real resistance of the eddy current sensor coil portion;

추출된 와전류 센서 코일부의 인덕턴스/실저항의 변화량과 금속모재별 와전류 센서 코일부의 임피던스변화 자료(DATA Table)과 비교로 금속모재를 선별하는 기구;A mechanism for selecting a metal base material by comparing the variation in inductance / real resistance of the extracted eddy current sensor coil part with an impedance change data (DATA table) of the eddy current sensor coil part for each metal base material;

로 구성된 장치로써 와전류 센서가 금속모재를 선별하게 된다.(도 3)The device consisting of the eddy current sensor is to select the metal base material (Fig. 3).

이상에서 설명한 바와 같이, 본 발명을 활용하면 종래의 기술이 갖는 금속모재별 세팅작업의 불편 제거, 센서 측정치의 모재별 오차보정 피드백 정보로써의 활용을 통한 와전류 센서의 정도 향상, 와전류 센서의 금속모재 선별, 연속적으로 변하는 서로 다른 금속 모재에의 실시간 측정등이 가능하다. As described above, the use of the present invention eliminates the inconvenience of setting work for each metal base material of the prior art, improves the accuracy of the eddy current sensor by using the sensor measurement value as error correction feedback information for each base material, and the metal base material of the eddy current sensor. Screening and real-time measurements on different metal substrates that are continuously changing are possible.

Claims (2)

와전류 센서의 금속 모재선별을 위해.For screening metal substrates of eddy current sensors. 와전류 센서 코일부의 전류/전압의 크기를 측정하는 단계;Measuring the magnitude of the current / voltage of the eddy current sensor coil; 와전류 센서 코일부의 임피던스/위상차를 측정하는 단계;Measuring an impedance / phase difference of the eddy current sensor coil unit; 와전류 센서 코일부의 인덕턴스/실저항의 변화를 추출하는 단계;Extracting a change in inductance / real resistance of the eddy current sensor coil; 추출된 와전류 센서 코일부의 인덕턴스/실저항의 변화량과 금속모재별 와전류 센서 코일부의 임피던스변화 자료(DATA Table)과 비교로 금속모재를 선별하는 단계;Selecting a metal base material by comparing the variation of inductance / real resistance of the extracted eddy current sensor coil part with an impedance change data (DATA table) of the eddy current sensor coil part of each metal base material; 로 구성된 와전류 센서의 금속 모재선별 방법(도 2)Metal substrate selection method of eddy current sensor consisting of (Fig. 2) 와전류 센서의 금속 모재선별 방법의 구현을 위해.For the implementation of metal matrix screening method of eddy current sensor. 와전류 센서 코일부의 전류/전압의 크기를 측정하는 기구;A mechanism for measuring the magnitude of the current / voltage of the eddy current sensor coil portion; 와전류 센서 코일부의 임피던스/위상차를 측정하는 기구(도 4);A mechanism for measuring the impedance / phase difference of the eddy current sensor coil portion (FIG. 4); 와전류 센서 코일부의 인덕턴스/실저항의 변화를 추출하는 기구;A mechanism for extracting a change in inductance / real resistance of the eddy current sensor coil portion; 추출된 와전류 센서 코일부의 인덕턴스/실저항의 변화량과 금속모재별 와전류 센서 코일부의 임피던스변화 자료(DATA Table)과 비교로 금속모재를 선별하는 기구;A mechanism for selecting a metal base material by comparing the variation in inductance / real resistance of the extracted eddy current sensor coil part with an impedance change data (DATA table) of the eddy current sensor coil part for each metal base material; 로 구성되어 신호처리 및 계측을 수행하는 와전류 센서의 금속 모재선별 장치(도 3)Metal matrix screening device of the eddy current sensor to perform signal processing and measurement consisting of (Fig. 3)
KR1020050054707A 2005-06-23 2005-06-23 Method and equipment of eddy current sensor's sorting out base metal KR20060134764A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008101270A1 (en) * 2007-02-23 2008-08-28 Evk Di Kerschhaggl Gmbh Method and device for differentiating objects influencing an electromagnetic alternating field, particularly metal objects
US11359306B2 (en) 2019-10-29 2022-06-14 Senic Inc. Method for preparing a SiC ingot and device for preparing a SiC ingot wherein electrical resistance of crucible body is 2.9 ohms or more
US11856678B2 (en) 2019-10-29 2023-12-26 Senic Inc. Method of measuring a graphite article, apparatus for a measurement, and ingot growing system

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008101270A1 (en) * 2007-02-23 2008-08-28 Evk Di Kerschhaggl Gmbh Method and device for differentiating objects influencing an electromagnetic alternating field, particularly metal objects
US8305088B2 (en) 2007-02-23 2012-11-06 Evk Di Kerschhaggl Gmbh Process and device for differentiating objects influencing an electromagnetic alternating field, in particular metal objects
US11359306B2 (en) 2019-10-29 2022-06-14 Senic Inc. Method for preparing a SiC ingot and device for preparing a SiC ingot wherein electrical resistance of crucible body is 2.9 ohms or more
US11856678B2 (en) 2019-10-29 2023-12-26 Senic Inc. Method of measuring a graphite article, apparatus for a measurement, and ingot growing system

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