KR20060098206A - Antiseptic treatment method for products made from pva sponge - Google Patents

Antiseptic treatment method for products made from pva sponge Download PDF

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Publication number
KR20060098206A
KR20060098206A KR1020050020332A KR20050020332A KR20060098206A KR 20060098206 A KR20060098206 A KR 20060098206A KR 1020050020332 A KR1020050020332 A KR 1020050020332A KR 20050020332 A KR20050020332 A KR 20050020332A KR 20060098206 A KR20060098206 A KR 20060098206A
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KR
South Korea
Prior art keywords
pva
pva sponge
product
sponge
products
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KR1020050020332A
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Korean (ko)
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방병호
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주식회사 브러쉬텍
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Priority to KR1020050020332A priority Critical patent/KR20060098206A/en
Publication of KR20060098206A publication Critical patent/KR20060098206A/en

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F1/00—Tubular elements; Assemblies of tubular elements
    • F28F1/10—Tubular elements and assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with projections, with recesses
    • F28F1/12—Tubular elements and assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with projections, with recesses the means being only outside the tubular element
    • F28F1/34—Tubular elements and assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with projections, with recesses the means being only outside the tubular element and extending obliquely
    • F28F1/36—Tubular elements and assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with projections, with recesses the means being only outside the tubular element and extending obliquely the means being helically wound fins or wire spirals
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D1/00—Heat-exchange apparatus having stationary conduit assemblies for one heat-exchange medium only, the media being in contact with different sides of the conduit wall, in which the other heat-exchange medium is a large body of fluid, e.g. domestic or motor car radiators
    • F28D1/02—Heat-exchange apparatus having stationary conduit assemblies for one heat-exchange medium only, the media being in contact with different sides of the conduit wall, in which the other heat-exchange medium is a large body of fluid, e.g. domestic or motor car radiators with heat-exchange conduits immersed in the body of fluid
    • F28D1/04—Heat-exchange apparatus having stationary conduit assemblies for one heat-exchange medium only, the media being in contact with different sides of the conduit wall, in which the other heat-exchange medium is a large body of fluid, e.g. domestic or motor car radiators with heat-exchange conduits immersed in the body of fluid with tubular conduits
    • F28D1/047—Heat-exchange apparatus having stationary conduit assemblies for one heat-exchange medium only, the media being in contact with different sides of the conduit wall, in which the other heat-exchange medium is a large body of fluid, e.g. domestic or motor car radiators with heat-exchange conduits immersed in the body of fluid with tubular conduits the conduits being bent, e.g. in a serpentine or zig-zag
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F1/00—Tubular elements; Assemblies of tubular elements
    • F28F1/10—Tubular elements and assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with projections, with recesses
    • F28F1/12—Tubular elements and assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with projections, with recesses the means being only outside the tubular element
    • F28F1/124—Tubular elements and assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with projections, with recesses the means being only outside the tubular element and being formed of pins
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F2255/00—Heat exchanger elements made of materials having special features or resulting from particular manufacturing processes

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Geometry (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning Implements For Floors, Carpets, Furniture, Walls, And The Like (AREA)

Abstract

본 발명은 폴리비닐 알콜 아세탈 스폰지(Polyviny alcohol acetal sponge)(이하 "PVA 스폰지"라 한다)를 소재로 하여 만들어지는 원료에 방부제를 미리 넣어 PVA 스폰지를 소재로 한 브러시 롤과 같은 PVA 제품을 만든 다음 수산화암모니움(NH4OH)과 과산화수소(H2O2) 및 초순수(超純水)(DI Water=Deionized Water)를 혼합하여 얻어진 용제에 함침(含浸) 하였다가 꺼집어 낸 후 탈수(脫水)하면 방부처리가 된 PVA 스폰지 제품을 얻게 되므로 PVA 스폰지의 조직변형(組織變形)을 방지할 수 있고 사용상 편리성을 도모할 수 있으며 물에 젖은 상태에서 보관하여도 부패 될 염려가 전혀 없으며 제품의 수명을 연장시켜 오랫 동안 사용할 수 있도록 한 PVA 스폰지를 소재로 한 제품의 방부처리방법을 제공하고자 한다.The present invention is made of a PVA product, such as a brush roll made of PVA sponge by preservatives are added to the raw material made of a polyviny alcohol acetal sponge (hereinafter referred to as "PVA sponge") material Ammonium hydroxide (NH 4 OH), hydrogen peroxide (H 2 O 2 ), and ultrapure water (DI Water = Deionized Water) are impregnated with the solvent obtained by dipping, and then dewatered. If you do this, you will get a PVA sponge product with antiseptic treatment, which can prevent tissue deformation of the PVA sponge, improve the convenience of use, and there is no risk of corruption even when stored in wet conditions. To provide a preservative treatment method of a product made of PVA sponge material that can be used for a long time by extending the.

본 발명은 PVA 스폰지로 만들어지는 제품 중 특히 반도체 공장의 CMP(Chemica machinery polishing) 공정에서 세척용구로 사용되는 브러시 롤(Brush Roll)과 같은 제품은 젖은 상태에서 장기간 보관되어야 하므로 인하며 제품이 부패 될 염려가 있다는 점에 착안하게 된 것이다.According to the present invention, products such as brush rolls, which are used as cleaning tools in the CMP (Chemica machinery polishing) process of the semiconductor factory, are made of PVA sponges, and thus, the products may be decayed. I came to realize that there is concern.

Description

PVA 스폰지를 소재로 한 제품의 방부처리방법{Antiseptic treatment method for products made from PVA sponge}Antiseptic treatment method for products made from PVA sponge

본 발명은 폴리비닐 알콜 아세탈 스폰지(Polyviny alcohol acetal sponge)(이하 "PVA 스폰지"라 한다)를 소재로 하여 만들어지는 원료에 방부제를 미리 넣어 PVA 스폰지를 소재로 한 브러시 롤과 같은 PVA 제품을 만들고 난 후 수산화암모니움(NH4OH)과 과산화수소(H2O2) 및 초순수(超純水)(DI Water=Deionized Water)를 혼합하여 얻어진 용제에 함침(含浸) 하였다가 꺼집어 낸 후 탈수(脫水)하면 방부처리가 된 PVA 스폰지 제품을 얻게 되므로 PVA 스폰지의 조직변형(組續變形)을 방지할 수 있고 사용상 편리성을 도모할 수 있으며 물에 젖은 상태에서 보관하여도 부패 될 염려가 전혀 없으며 제품의 수명을 연장시켜 오랫 동안 사용할 수 있도록 한 PVA 스폰지를 소재로 한 제품의 방부처리방법을 제공하고자 한다.The present invention is to prepare a PVA product such as a brush roll made of PVA sponge by preservatives pre-added to the raw material made of a polyviny alcohol acetal sponge (hereinafter referred to as "PVA sponge") material After impregnating the solvent obtained by mixing ammonium hydroxide (NH 4 OH), hydrogen peroxide (H 2 O 2 ) and ultrapure water (DI Water = Deionized Water), and then taken out, dehydration (脫水) PVA sponge products can be treated with antiseptic, which can prevent tissue deformation of the PVA sponge, improve the convenience of use, and there is no risk of corruption even when stored in wet conditions. To provide a preservative treatment method of a product made of PVA sponge material that can be used for a long time by extending the life of the product.

이를 더욱 상세히 설명하면, PVA 스폰지로 만들어지는 제품 중 특히 반도체공장의 CMP(Chemical machinery polishing) 공정에서 세척용구로 사용되는 브러시롤(Brush Roll)과 같은 제품은 젖은 상태에서 장기간 보관하여야 하므로 인하여 부 패 될 염려가 있다는 점에 착안하여 본 발명을 안출하게 된 것이다.In more detail, among the products made of PVA sponge, especially products such as brush rolls used as cleaning tools in the chemical machinery polishing (CMP) process of semiconductor factories, they must be stored for a long time in a wet state. The present invention has been devised in view of the concern that it may be caused.

종래에는 반도체 공장의 CMP 공정에서 세척용구로 사용되는 PVA 스폰지로 만들어진 브러시 롤(Brush Roll)과 같은 제품에 나타나는 박테리아나 오염 등을 방지하기 위하여 자외선이나 감마선 등을 이용하여 소독을 하였으나, 상기와 같이 자외선이나 감마선 등을 이용 할 경우에는 PVA 스폰지로 만들어진 제품의 조직에 변형을 가져 오는 등의 문제점이 발생하였다.Conventionally, in order to prevent bacteria or contamination on products such as brush rolls made of PVA sponges used as cleaning tools in a CMP process of a semiconductor factory, sterilization was performed using ultraviolet rays or gamma rays. In the case of using ultraviolet rays or gamma rays, problems such as deformation of the product made of PVA sponge were caused.

본 발명은 상술한 바와 같이 종래 반도체 공장의 CMP 공정에서 세척용구로 사용되는 PVA 스폰지를 소재로 하여 만들어진 브러시 롤을 소독할 때 발생하는 문제점을 해소하기 위하여 발명된 것으로서 본 발명은 PVA 스폰지를 소재로 하여 제품을 만들 때 PVA 스폰지의 원료에 미리 방부제를 넣어 브러시 롤과 같은 PVA 스폰지 제품을 만든 다음 상기 브러시 롤과 같은 PVA 스폰지 제품을 수산화암모니움과 산화수소 및 초순수를 혼합하여 얻어진 용제에 함침 하였다가 꺼집어 낸 후 탈수처리를 하여 브러시 롤과 같은 PVA 스폰지를 소재로 한 제품을 제조하므로서 상기 방부처리가 된 브러시 롤과 같은 PVA 스폰지 제품을 젖은 상태에서 장기간 보관 하더라도 부패 될 염려가 전혀 없게 되고 PVA 스폰지의 조직이 변형을 가져오지 않게 되며 제품의 수명을 연장시켜 오랫 동안 사용할 수 있음은 물론 실수요자에게 경제적인 부담을 덜어 줄 수 있고 사용상 편리성을 도모할 수 있도록 한 것을 목적으로 한다.The present invention has been invented to solve the problem that occurs when disinfecting the brush roll made of a PVA sponge used as a cleaning tool in the CMP process of a conventional semiconductor factory as described above, the present invention is a PVA sponge as a material When the product is made, the preservative is added to the raw material of the PVA sponge to make a PVA sponge product such as a brush roll, and then the PVA sponge product such as the brush roll is impregnated with a solvent obtained by mixing ammonium hydroxide with hydrogen oxide and ultrapure water. Since the product is made out of PVA sponge such as brush roll by dehydration treatment, it is free from the possibility of spoilage even if the PVA sponge product such as the preservative treated brush roll is stored in the wet state for a long time. Tissue does not cause deformation and prolongs the life of the product It can give to that, as well as end-users are available for rats relieve the economic burden and aims to promote a convenience in use.

이하 본 발명의 PVA 스폰지를 소재로 한 제품의 방부처리방법을 상세히 설명하면 다음과 같다.Hereinafter, a method of preservative treatment of a product based on the PVA sponge of the present invention will be described in detail.

먼저, PVA 스폰지를 만드는 원료에 미리 방부제를 넣고 반도체 공장의 CMP 공정에서 세척용구로 사용되는 브러시 롤과 같은 PVA 스폰지 제품을 만든다.First, preservatives are added to the raw materials for making PVA sponges, and PVA sponge products such as brush rolls used as cleaning tools in the CMP process of a semiconductor factory are made.

다음, 수산화암모니움(NH4OH):과산화수소(H2O2):초순수(DI Water)=7:25:50 의 비율로 혼합아여 얻어진 용제에 상기 브러시 롤과 같은 PVA 스폰지 제품을 함침(含浸) 하였다가 꺼집어 낸 후 탈수하면 방부처리가 이루어진 브러시 롤과 같은 PVA 스폰지 제품을 얻게 된다.Next, the solvent obtained by mixing a mixture of ammonium hydroxide (NH 4 OH): hydrogen peroxide (H 2 O 2 ): ultrapure water (DI Water) = 7:25:50 was impregnated with a PVA sponge product such as the brush roll. After dehydration and dehydration, PVA sponge products such as preservative brush rolls are obtained.

또 이는 반도체 공장의 CMP 공정에 사용되는 용제와 동일한 비율을 갖는 용제로서 PVA 스폰지 제품을 공정에 바로 투입하여 사용할 수 있는 효과도 있다.In addition, as a solvent having the same ratio as the solvent used in the CMP process of the semiconductor factory, there is an effect that the PVA sponge product can be directly used in the process.

상기에서 설명한 바와 같이 본 발명은 반도체 공장의 CMP 공정에서 세척용구로 사용되는 브러시 롤과 같은 PVA 스폰지 제품을 젖은 상태에서 장기간 보관한다해도 부패 될 염려가 전혀 없게 되고 또한 PVA 스폰지의 조직이 변형되지 않게되며 제품의 수명이 연장되어 오랫 동안 사용할 수 있음은 물론 실수요자에게 경제적인 부담을 덜어 줄 수 있고 사용상 편리성을 도모할 수 있는 등의 효과를 나타내게 된다.As described above, the present invention has no fear of spoilage even if the PVA sponge product such as the brush roll used as a cleaning tool in the CMP process of the semiconductor factory is kept for a long time in a wet state, and the tissue of the PVA sponge is not deformed. It can be used for a long time as the life of the product is extended, and it can reduce the economic burden on the real user and promote convenience of use.

이상에서 본 발명은 기재된 구체예에 대해서만 상세히 설명 되었지만, 본 발명의 기술사상 범위내에서 다양한 변형 및 수정이 가능함은 당업자에게 있어서 명 백한 것이며, 이러한 변형 및 수정이 첨부된 특허청구범위에 속함은 당연한 것이다.Although the present invention has been described in detail only with respect to the described embodiments, it will be apparent to those skilled in the art that various modifications and variations are possible within the technical spirit of the present invention, and such modifications and modifications belong to the appended claims. will be.

Claims (1)

PVA 스폰지 원료에 미리 방부제를 넣어 브러시 롤과 같은 PVA 스폰지 제품을 만든 다음 수산화암모니움:과산화수소:초순수=7:25:50 의 비율로 혼합아여 얻어진 용제에 상기 브러시 롤과 같은 PVA 스폰지 제품을 함침 하였다가 꺼집어 낸 후 탈수하면 방부처리가 이루어진 PVA 제품을 얻게 되는 것을 특징으로 하는 PVA 스폰지 제품을 소재로 한 방부치리방법.The preservatives were preliminarily added to the PVA sponge raw material to make a PVA sponge product such as a brush roll, and then mixed in a ratio of ammonium hydroxide: hydrogen peroxide: ultra pure water = 7: 25: 50 to impregnate the PVA sponge product such as the brush roll with the obtained solvent. The method of preservatives made of PVA sponge products, characterized in that the PVA product obtained by preservation treatment is obtained by dehydration after taking out.
KR1020050020332A 2005-03-11 2005-03-11 Antiseptic treatment method for products made from pva sponge KR20060098206A (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR880001734A (en) * 1986-07-31 1988-04-26 박호선 Polyvinyl alcohol multipurpose sponge manufacturing method
JPS63186712A (en) * 1987-01-29 1988-08-02 Mitsubishi Petrochem Co Ltd Improvement in water-absorptivity of sponge
JPH1060150A (en) * 1996-08-20 1998-03-03 Seiji Machida Pva sponge
US6324715B1 (en) * 1995-10-13 2001-12-04 Lam Research Corporation Apparatus for cleaning semiconductor substrates
KR20030015197A (en) * 2000-06-12 2003-02-20 일리노이즈 툴 워크스 인코포레이티드 Peroxide preservation

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR880001734A (en) * 1986-07-31 1988-04-26 박호선 Polyvinyl alcohol multipurpose sponge manufacturing method
JPS63186712A (en) * 1987-01-29 1988-08-02 Mitsubishi Petrochem Co Ltd Improvement in water-absorptivity of sponge
US6324715B1 (en) * 1995-10-13 2001-12-04 Lam Research Corporation Apparatus for cleaning semiconductor substrates
JPH1060150A (en) * 1996-08-20 1998-03-03 Seiji Machida Pva sponge
KR20030015197A (en) * 2000-06-12 2003-02-20 일리노이즈 툴 워크스 인코포레이티드 Peroxide preservation

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