KR20060091495A - Ink thickness public prosecutor measurement equipment of lcd - Google Patents

Abstract

The present invention relates to an ink thickness inspection measuring apparatus of a liquid crystal display device, and an object of the present invention is to inspect the thickness of ink filled in each cell at a high speed for quality inspection of an LCD color filter developed using inkjet printing technology. An ink thickness inspection measuring apparatus for a liquid crystal display device can be provided.

In addition, in the thickness measurement of the LCD color filter, the entire surface can be inspected in a short time, the internal structure is simple, and the ink thickness inspection measuring apparatus of the liquid crystal display device with low manufacturing cost.

To this end, the present invention is a light source, a wavelength conversion device for separating the light from the light source into a desired wavelength, an illumination device for making the light emitted from the wavelength conversion device into parallel light and incident to the object, and reflected from the object It includes a reflector for reflecting light, and a light detector for detecting the light from the reflector and converts the light into an electrical signal.

Description

Ink thickness inspection device of liquid crystal display device {Ink thickness public prosecutor measurement equipment of LCD}

1 is a block diagram illustrating a conventional high speed scanning interferometer system.

2 is a view showing a conventional LCD color filter inspection measurement device.

3A and 3B are diagrams illustrating an LCD color filter ink thickness inspection measurement apparatus according to an embodiment of the present invention.

Explanation of symbols on the main parts of the drawings

100: light source

102: wavelength conversion device

104: first lens

106: reflector

108: second lens

110: measurement object

112: third lens

114: light detecting device

The present invention relates to an ink thickness inspection measuring apparatus of a liquid crystal display device, and more particularly, to an ink thickness inspection measuring apparatus of a liquid crystal display device capable of inspecting the thickness of ink contained in a cell of an LCD color filter panel at high speed. will be.

Generally, the fringe of equal chromatic order and the created interferometer based on the principle of interference, in order to measure thickness and surface roughness, which are very important factors in the design and manufacture of optical components, wafers, glass products, thin films, etc. (Fizeau interferometry), etc. are applied. In particular, the manufacturing process of products such as liquid crystal display devices (LCDs) used in notebook computers, etc. is very complicated, and each manufacturing process is performed at a high speed, thereby increasing the necessity of an apparatus for measuring the thickness or surface roughness of the LCD. .

FIG. 1 is a thin film thickness measuring apparatus using a created interferometer, and the system modulates or unmodulates a laser oscillator 2 for oscillating and outputting a laser beam of a predetermined wavelength and a laser beam output from the laser oscillator 2. The acousto-optic modulator 4, the reference light detector 6 for detecting a portion of the laser beam modulated by the acoustooptic modulator 4 as reference light, and the remainder of the laser beam modulated via the acoustooptic modulator 4 The optical system 8 which proceeds to be scanned by the measurement object 10, the reflected light detection apparatus 14 which detects the laser beam reflected by the measurement object 10, and the laser beam which permeate | transmits the measurement object 10 are detected. The transmitted light detecting device 12 and the reference light detecting device 6 and the reflected light detecting device 14 or the transmitted light detecting device 12 are compared with each other, and the interference fringes are counted to determine the thickness or surface roughness of the workpiece. And a display device 18 on which the thickness and surface roughness of the measured object calculated from the counted results are displayed.

This measuring system is a thin film thickness measuring system, which modulates a short-wavelength laser beam into two beams having different frequencies, and then enters the modulated beam into the workpiece 10 and reflects or transmits the beam to the workpiece 10. The thickness of the thin film is measured using the interference fringes generated by the and reference beams.

However, this method is not only good for measuring the absolute thickness of a thin film, but also the complexity of the configuration makes it difficult to align, and the system is expensive. It is not suitable for measuring the ink thickness, so three types of lasers having wavelengths corresponding to each color are required, or expensive wavelength-variable lasers have to be used.

In addition, when the system is composed of a system driven by two axes of one axis of a polygon mirror and one axis of a workpiece transfer stage, the driving shaft increases, and thus the noise increases. As shown in FIG. There was a problem in that the cost increases if you perform the inspection by placing.

In addition, the polygon mirror method has a problem that the measurement speed is slow compared to the full illumination method that does not need to scan the scan method.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to inspect the thickness of ink in each cell at a high speed for quality inspection of a liquid crystal display device color filter developed using inkjet printing technology. The present invention provides an ink thickness inspection and measuring apparatus for a liquid crystal display device.

In addition, in the measurement of the thickness of the color filter of the liquid crystal display device, the entire surface can be inspected within a short time, the internal structure is simple, and the ink thickness inspection measuring device of the liquid crystal display device with low manufacturing cost is provided.

The present invention for achieving the above object is a light source, a wavelength conversion device for separating the light from the light source into a desired wavelength, an illumination device for making the light from the wavelength conversion device into parallel light and incident to the object, And a light reflecting device for reflecting the light reflected from the object, and a light detecting device for detecting the light from the reflecting device and converting the light from the reflecting device.

In addition, the illumination device, characterized in that it comprises a cylindrical lens that can cover the width of the object.

The optical axis of the lens irradiating the light passing through the wavelength conversion device to the lighting device and the optical axis of the lighting device are shifted from each other.

In addition, the object is characterized in that the measurement is completed only by moving in one direction.

The light source may be white light.

Hereinafter, with reference to the drawings the preferred embodiment of the present invention will be described in detail.

3A and 3B illustrate a liquid crystal display device color filter ink thickness test measurement apparatus according to an exemplary embodiment of the present invention, which includes a white light source 100 and a white light source 100 for illuminating light on a measurement object 110. The first lens 104 and the second lens 108 for irradiating the wavelength conversion device 102 and the light passing through the wavelength conversion device 102 to the measurement object 110 to extract light of the desired wavelength from And a reflecting device 106 for transmitting the interference beam reflected from the measurement object 110 to the light detecting device 114, and an optical beam collecting the interference beam reflected by the reflecting device 106 to the light detecting device 114. The third lens 112 and an optical detection device 114 for detecting the brightness information of the interference beam collected by the third lens (112).

In the measuring apparatus having such a configuration, a white light source 100 that includes all wavelengths of visible light while being inexpensive as a light source is used. Light from the white light source 100 is converted into a beam of a desired wavelength by a wavelength converting device (acoustic optical tuning filter: AOTF) 102. In the LCD color filter, three colors of red, green, and blue are injected into each cell in turn. When measuring the thickness of the ink, it is necessary to use a beam having the most suitable wavelength for each color of the ink (for example, a beam that reflects the most well) to obtain a good quality measurement result.

To this end, the wavelength conversion device 102 is essential, and the output of the desired wavelength is made through the electrical control. The beam passing through the wavelength conversion device 102 passes through the first lens 104 to be focused once, and then enters the second lens 108. The second lens 108 is a cylindrical lens manufactured to fit the length of one side of the measurement object 110, and the inspection / measurement may be completed by simply moving the entire measurement object 110 in one axis at a synchronized time. It is a lens designed to make it possible.

The beam passing through the second lens 108 is converted into a parallel beam and incident on the measurement object 110. Some of the beams incident on the measurement object 110 are transmitted and some are reflected, wherein the reflected beams are reflected from the upper surface of the measurement object 110 and the beams reflected from the lower surface of the measurement object 110. Can be divided into two, and the two beams cause interference. Such interference is called creation interference.

The interference beam is incident on the reflector 106. Even after the beam reflected from the measurement target 110 passes through the second lens 108, the beam does not return to the first lens 104 again, as shown in FIG. 3B. This is because the optical axes of 108 are different from each other.

The beam reflected by the reflector 106 is incident on the third lens 112, and the beam passing through the third lens 112 is detected by the photodetector 114. As the photodetector 114, a charge coupled device (CCD) may be used. As described above, the thickness of the measurement object 110 may be inspected / measured using the interference information of the beam detected by the light detection device 114.

After the photodetector 114 detects the beam, the measurement object 110 is moved one step in the scanning direction (arrow direction shown in FIG. 3A). The above process is repeated to detect the beam. After moving the measurement object 110 to the end in this way, the thickness measurement of the measurement object 110 for the entire area is finished.

Since the second lens 108 is manufactured according to the length of the measurement object 110, the thickness of the entire area of the measurement object 110 can be inspected / measured by moving the measurement object 110 only one cycle in the scanning direction. Will be.

Thus, even if only one light source 100, one wavelength converting device 102, three lenses 104, 108, 112, one reflecting device 106, and one light detecting device 114 are used, The display element color filter ink thickness is accurately measured.

As described in detail above, the present invention can inspect / measure the entire surface in a short time in the measurement of the color filter ink thickness of the liquid crystal display device, and the internal structure of the system is simple, so the development / production cost is low and the production line The applicability of is large.

In addition, since the whole system is driven by only one axis, the error occurrence rate is reduced, and since the full illumination method is used to illuminate the beam on the measurement object, there is no effect of measurement error due to vibration that may be caused by the scanning method. There is.

In addition, the white light source as a light source is not only inexpensive, but also because the white light source includes the spectrum of all wavelengths, there is an effect that the wavelength converter alone can emit beams of all wavelengths.

Claims (5)

A light source, a wavelength converting device for separating light from the light source into a desired wavelength, an illuminating device for making light emitted from the wavelength converting device into parallel light and incident the object, and reflecting light reflected from the object And a light detecting device for detecting light from the reflecting device and converting the light from the reflecting device into an electrical signal. The method of claim 1, The illumination device, the ink thickness inspection measuring apparatus of the liquid crystal display device, characterized in that it comprises a cylindrical lens that can cover the width of the object. The method of claim 1, And an optical axis of a lens for irradiating light passing through the wavelength conversion device to the illumination device and an optical axis of the illumination device are shifted from each other. The method of claim 1, And the object moves only in one direction to complete the measurement. The method of claim 1, And the light source is white light.

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