KR20060034057A - A effector plasma - Google Patents

Abstract

The present invention relates to a plasma reactor to discharge only clean air to the outside by treating harmful gases such as volatile organic compounds (VOC) generated in the industrial field, more specifically, each flange is formed at the upper and lower ends An upper body, an intermediate body, and a lower body are connected to form a resonant chamber therein. The first and second quartz tubes are installed in the resonant chamber, and a cover in which a plurality of pipes are connected is provided at the top of the upper body in which an inlet is formed at one side. Coupled to one side of the lower body to install a microwave guide tube to be connected to the resonant chamber, and the lower body to the microwave auxiliary guide tube having a small quartz tube is installed to be connected to the first resonant chamber, the second using the pilot As a constitution of a plasma reactor equipped with a resonance chamber, the present invention provides a method for adsorbing a low concentration of volatile organic compounds to an adsorbent. Condensation is carried out using a condensation facility by separating it into high concentration by microwave, and volatile organic matter is easily treated by microwave plasma plasma by simply separating volatile organic compounds attached to adsorbent by using plasma reactor. It would be possible to provide a plasma reactor that makes the working environment of industrial sites dealing with compounds comfortable, prevents environmental pollution due to air pollution, and prevents odors by preventing odors and skin diseases.

Plasma, Microwave, Vacuum Chamber, Quartz Tube, Pilot, VOC

Description

Plasma reactor {a effector Plasma}

1 is a cross-sectional view of a coupling state of the plasma reactor of the present invention.

Figure 2 is a front configuration diagram of the plasma reactor of the present invention.

Figure 3a is a cross-sectional configuration of the upper body of the plasma reactor according to the present invention.

Figure 3b is a cross-sectional view of the intermediate body of the plasma reactor according to the present invention.

4 is an auxiliary guide configuration used as a pilot of the present invention.

Figure 5 is a use state diagram installed the plasma reactor of the present invention.

<Description of the symbols for the main parts of the drawings>

10: plasma reactor 11: upper body

12: middle body 12a: inner wall

12b: outer wall 13: lower body

14: first resonance chamber 15: first quartz tube

16: 2nd quartz tube 17: water cooling chamber

18: Inlet 19: Cover

20: Guide Hall 21: Entrance

22: discharge port 23: discharge pipe

24: Sample Hall 25: Second Resonance Room

26: 3rd quartz tube 27: auxiliary guide tube

28: pilot (SIC)

The present invention relates to a plasma reactor for treating only harmful air such as volatile organic compounds (VOC) generated in the industrial field to discharge only clean air to the outside, more specifically all the combustion process including the incinerator. Adsorption of harmful gases of volatile organic compounds (VOCs) from hydrocarbons generated at industrial sites such as equipment, chemical processes, and factories with an adsorbent, separated using microwaves, and then completely treated in a plasma reactor and discharged to the outside The present invention relates to a plasma reactor that prevents air pollution and environmental pollution, and has a high efficiency effect by simply manufacturing a VOC treatment facility and installing it in a small space at a low cost.

Volatile Organic Compounds (VOCs) described in the present invention include aliphatic (paraffinic and olefinic hydrocarbons) and aromatic compounds (benzene, toluene, xylene hydrocarbons, etc.), ammonia, alcohols, aldehydes, ketones, ethers, and the like. Refers to a compound that can generate ozone by photochemical reaction after being released into the air as a general term for hydrocarbons including nitrogen and oxygen elements or compounds containing halogen elements such as chloroform and trichroloethylene.

Therefore, it occurs in almost all industrial processes such as petrochemicals, painting, printing, adhesives, semiconductor cleaning processes, waste water and waste treatment plants, gas stations, etc., and it is highly volatile, which causes various safety accidents such as fire explosions and works on site. There is a problem causing respiratory diseases and skin diseases of those who do.

In addition, photochemical oxidants generated by photochemical reactions caused by NOx and sunlight after VOC diffused into the atmosphere were found to be the cause of photochemical air pollution such as carcinogenicity and deforestation.

For example, in the United States, the developed countries in the United States have institutionalized VOC emission control and prevention facilities, such as amendment of the air cleanup law, which significantly strengthens regulations on VOC emissions. Regarding the movement Since 1997, the petroleum-related industry has mandated the installation of emission control and recovery facilities in all industries, and the policy is gradually moving towards strengthening the air conservation law.

Therefore, the existing methods of treating volatile organic compounds can be divided into recycling techniques and final complete treatment methods. Conventional methods for recycling volatile organic compounds have been mainly used for combustion, recovery, and condensation, absorption, adsorption and membrane separation for reuse as heat sources. A lot of researches are being conducted on the hybrid system that supplements the.

In particular, the recovery method is known to be the most preferable method because it can prevent the environmental pollution caused by air pollution by recovering the volatile organic compounds and reused compared to the combustion method.

Therefore, although the recovery device has a membrane separation method and a cooling condensation method at a high concentration of several percent or more, most of the recovery device is a recovery method using the adsorption force by the activated carbon adsorption method. It condenses and recovers (heat shift).

In addition, although the activated carbon used was centered on granular activated carbon, the cases of fibrous activated carbon are increasing in recent years, and there exists a tendency for the apparatus to simplify more.

However, the existing method using activated carbon and adsorbent has problems that secondary contaminants form another phase and the cost of secondary carbon recovery is high.

As an alternative to the problems of the adsorption method, a microwave separation technique has emerged as a volatile organic compound removal and recovery process, and has recently attracted much attention.

Since the microwave method is a method of dielectric heating, the pollutants can be directly heated, and if the adsorbed pollutants are non-polar components through which microwaves pass, the surrounding moisture is heated. Can effectively heat contaminants.

Therefore, in the United States, in the study of microwaves used in the adsorption process, the University of Massachusetts Tuner et al. Investigated the microwaves in the adsorption of methanol (polar component) and cyclohexane (nonpolar component) zeolite. The adsorption and separation phenomena have been studied. Polar molecules such as methanol are activated by microwaves and are easily separated, and the separation of non-polar cyclonucleic acid is not affected by microwaves.

In particular, thermal treatment methods of VOCs and odors include direct combustion, catalytic combustion, and plasma treatment. Direct combustion and catalytic combustion have a longer processing time than the Plasma method, even though the treatment efficiency is good. During the cooling process, harmful components such as dioxin, another byproduct of combustion, may be formed. In case of direct combustion, consideration should be given to preventing the formation of Therma1 NOx due to high temperature.

In the case of catalytic combustion, although the formation degree of Therma1 NOx is low due to the low temperature combustion reaction, theoretically, since the downstream gas contains heavy metals and a large amount of water which can cause poisoning of the catalyst, Although this is high, there are many problems in actual field application. On the other hand, in the case of Plasma, it is possible to process the component to be treated by instantaneous treatment, and the treatment efficiency is high, and the generation rate of harmful components by the recombination reaction between the products after treatment is relatively low.

In addition, since there is little air input for oxygen supply during the treatment process, there is a big advantage that it can lead to the prevention of secondary pollutant formation, such as the formation of Therma1 NOx. However, the technology using Plasma is still in the research and experimental stage, and since the practical technology has many problems in the field application, further research is needed.

Therefore, in the present invention, in order to efficiently treat odors and volatile organic compounds (VOCs) that may occur during the process, adsorption of volatile organic compounds (VOCs) and odor components using microwaves and plasma by microwaves Efficient treatment of volatile organic compounds (VOCs) and malodorous components using plasmas has been developed.

The present invention has been invented in view of the above-mentioned problems, and it has been found that the toxic organic gases of volatile organic compounds (VOCs) of hydrocarbons generated at industrial sites such as incinerators and all combustion apparatuses, chemical processes and factories, etc. By using wave, it is completely treated in the plasma reactor to discharge the clean air to the outside to prevent air pollution and environmental pollution. In addition, the VOC treatment facility can be easily manufactured and installed in a small space at a low cost to have high efficiency. It is an object to provide a plasma reactor.

Hereinafter, the configuration of the present invention in detail.

Upper and lower ends of the flanges are formed to connect the upper body 11, the middle body 12, and the lower body 13 to form a first resonant chamber 14 therein, and the first resonant chamber 14. The first and second quartz tube 15, 16 is installed, the cover 19 is connected to a plurality of pipes is connected to the upper end of the upper body 11, the inlet 18 is formed on one side, the lower body one side The microwave guide tube 20 is installed to be connected to the resonance chamber 14, and the microwave auxiliary guide tube 27 having the third quartz tube 26 is attached to the first resonance chamber 14 at the bottom of the lower body. It is a configuration of the plasma reactor 10 having a pilot installed to be connected.

The intermediate body 12 is formed of an inner wall 12a and an outer wall 12b to form a water cooling chamber 17, and a water inlet 21 and an outlet 22 are formed at one side of the outer wall 12b.

The first quartz tube 15, the second quartz tube 16 is located in the upper portion of the intermediate body 12 and the lower body 13, and the first quartz tube 15 is positioned, and the second quartz tube 16 is the first quartz tube. Located inside the tube 15, the upper end is fixed to the center of the cover 19 of the upper body 11 and the lower end is installed to be spaced apart from the bottom of the lower body 13 by a predetermined distance.

The microwave auxiliary guide tube 27 installed at the bottom of the lower body is provided with a hose 28 to supply plasma generating gas into the third quartz tube 26 installed to be connected to the first resonance chamber 14.

The intermediate body and the lower body is formed so that the viewing window 29 is formed on one surface to observe the inside.

A pilot 25 made of a microwave auxiliary guide tube 27 having a third quartz tube 26 is installed to form a plasma on the bottom surface so that the plasma of the first resonant chamber is not turned off and made stable. It is.

Reference numeral 20 denotes a microwave reactor capable of adsorbing and separating volatile harmful substances, 60 denotes a storage container for condensing and storing volatile harmful substances, and 70 denotes a microwave generator.

An embodiment of the present invention configured as described above will be described in detail with reference to the accompanying drawings.

 Figure 1 of the present invention is a cross-sectional view of the plasma reactor of the present invention, the upper body 11, the intermediate body 12, the lower body 13 is connected to each of the flanges using the first and second inside The overall connection diagram is shown with the quartz tube installed.

Figure 2 is a front configuration diagram of the plasma reactor of the present invention, a front configuration diagram of the upper body, the lower body and the microwave guide tube and the microwave auxiliary guide used as a pilot is installed.

Figure 3a is a cross-sectional configuration of the upper body of the plasma reactor according to the present invention, the inlet 18 is formed so that the VOC or plasma generating gas can be introduced on one side and the clean air is purified on the upper cover 19 coupled to the top It is shown that a plurality of sample tubes 24 are installed so that the discharge pipe 23 and the clean air can be checked to be discharged,

Figure 3b is a cross-sectional configuration of the intermediate body of the plasma reactor according to the present invention, the body is formed of a double jacket consisting of an inner wall (12a) and an outer wall (12b), between the inner wall and the outer wall with a water cooling chamber (17) The water is introduced through the inlet 21 of the upper side, and the introduced water represents the intermediate body 12 capable of circulating action discharged through the outlet 22 of the lower side.

FIG. 4 is a schematic diagram of an auxiliary guide used as a pilot of the present invention, and shows a microwave auxiliary guide installed as an auxiliary pilot at a bottom to stably generate plasma generated in a first resonance chamber.

FIG. 5 is a state diagram in which the plasma reactor of the present invention is installed, and the harmful gas separated by the microwaves in the microwave reactor 10 is connected to the end portion connected to the condenser 30, the vacuum pump 40, and the bumper 50. FIG. It shows the overall configuration to be discharged to the outside through the discharge pipe (23) after purifying the installed and separated harmful gas completely by plasma and clean air.

The present invention configured as described above firstly introduces harmful gases such as volatile organic compounds (VOCs) generated at industrial sites into the reactor 10 of the microwave, adsorbs them onto the adsorbent, and separates them into microwaves to condenser, vacuum pump, and bumper. Through the introduction into the inlet 18 formed on one side of the upper body 11 of the plasma reactor of the present invention.

Hazardous gases such as volatile organic compounds (VOC) or plasma generating gas introduced into the inlet 18 are vortexed between the first quartz tube 15 and the second quartz tube 16 of the first resonant chamber 14. As it descends, it flows into the inside through the bottom of the second quartz tube 16 and then rises to the top to be discharged to the outside through the discharge pipe 23 of the upper body cover.

At this time, the microwaves are introduced into the resonant chamber 14 through the guide tube 20 connected to one side of the lower body, and come into contact with harmful gases such as volatile organic compounds (VOCs) passing through the second quartz tube 16, Decomposed and dissolved harmful volatile components and odor, the gas discharged through the discharge pipe is discharged only pure and clean air.

According to the present invention, the inner body 12a has a double jacket so that the intermediate body has a double jacket to prevent rupture of the quartz tube or the like due to the high temperature generated by the contact of the volatile harmful gas passing through the first quartz tube and the second quartz tube with the microwave. And the outer wall 12b to form the water cooling chamber 22 to prevent the high temperature heat formed in the first resonant chamber from rising above a predetermined temperature.

The temperature of the plasma generated in the first resonance chamber is raised to a high temperature by forming water inlets 21 and outlets 22 on one side of the outer wall formed of the double jacket to circulate the water in the water cooling chamber 17. The quartz tube of the first resonance chamber is prevented from being broken.

 Alternatively, as the gas for generating the plasma, a plasma may be generated by contacting a gas generated such as argon gas, oxygen, nitrogen, or air in addition to the volatile oil.

The generated plasma is decomposed by the high temperature in contact with the harmful gas passing through the inside of the second quartz tube to melt volatile components and odors that are harmful components, and the gas discharged through the discharge port discharges only pure and clean air.

In addition, the present invention is the main body is formed in the first vacuum chamber 14 due to the irregular inflow of harmful gas and environmental unstable conditions of the surroundings is installed on the bottom surface of the lower body 13 is made of a pilot Do not turn off the plasma.

That is, the pilot resonator chamber 25 acts as an auxiliary flame, and the microwave guided from the auxiliary guide tube 27 in the lower part is connected to the center of the lower body bottom center of the third quartz tube 26. At the same time, since the plasma is generated on the top and inside of the third quartz tube 26 and the third quartz tube 26 is heated, the upper part is maintained as if a small flame is formed when viewed from the external viewing window 29. The main plasma generated around the second quartz tube located in the center of the first resonant chamber by the microwaves introduced through the microwave guide tube of the microwave guide tube can be maintained stably without turning off.

Plasma pilot of the second resonant chamber in the present invention is to install a pilot on the bottom of the lower body in order to prevent the main plasma generated in the second quartz tube inside the first resonant chamber to be stable processing of plasma generation I would have to.

In the present invention, the plasma generated gas introduced into the pilot tube 26 through the hose 28 connected to the bottom is injected with argon gas, nitrogen, oxygen or ordinary air as described above. It is filled up.

As described above, the present invention adsorbs a low concentration of volatile organic compounds to an adsorbent, separates them in high concentration by microwaves, condenses them using a condensation facility, and attaches harmful gases discharged in the condensation process to the adsorbent using a plasma reactor. By simply and easily separating volatile organic compounds and completely treating them with microwave plasma, it makes the working environment of industrial sites dealing with volatile organic compounds pleasant, prevents environmental pollution due to double air pollution, and prevents odors. It has the effect of being able to prevent.

Claims (5)

Upper flanges are formed at upper and lower ends thereof, and the upper body 11, the middle body 12, and the lower body 13 are connected to form a first resonance chamber 14 therein, and the first resonance chamber 14 The first and second quartz tube 15, 16 is installed, the cover 19 is connected to a plurality of pipes is connected to the upper end of the upper body 11, the inlet 18 is formed on one side, the lower body one side The microwave guide tube 20 is installed to be connected to the first resonant chamber 14, and the lower body has a second resonant chamber 25 constituting a pilot consisting of the auxiliary guide tube 27, Plasma reactor. The method of claim 1, The intermediate body is composed of an inner wall (12a) and the outer wall (12b) to form a water cooling chamber (17), the outer wall (12b) on one side of the plasma reactor characterized in that the water inlet (21) and the outlet (22) formed. The method of claim 1, The first quartz tube and the second quartz tube are located in the upper part of the intermediate body 12 and the lower body 13, the first quartz tube 15 and the second quartz tube 16 is located inside the first quartz tube Plasma reactor, characterized in that the upper end is fixed to the center of the cover 19 of the upper body (11) and the lower end is spaced apart from the bottom of the lower body (13) by a predetermined distance. The method of claim 1, The pilot is a plasma reactor, characterized in that configured to be connected to the first resonant chamber 14, the third quartz tube 26 is installed on one side of the guide beam tube (27). The method of claim 1, The intermediate body and the lower body plasma reactor, characterized in that the viewing window is formed on one surface configured to observe the inside.

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