KR20050108787A - Temperature independent wavelength-division multiplexing device using inorganic-organic hybrid materials - Google Patents

Abstract

The present invention provides a temperature-independent wavelength division multiplexing device, wherein at least one of the lower clad layer, the core layer and the upper clad layer on the planar substrate is composed of an organic-inorganic hybrid material having a negative thermo optical coefficient, and the thermo optical coefficient Provided is a temperature independent wavelength division multiplexing device characterized in that the temperature-independent characteristics are exhibited through the control of.

Description

Temperature Independent Wavelength-Division Multiplexing Device Using Inorganic-Organic Hybrid Materials

The present invention relates to a wavelength division multiplexing device for an optical communication, and more particularly, to a temperature dependency of an element including an organic-inorganic hybrid material which can control thermo-optic coefficient as a material forming a core layer and a clad layer of a wavelength division multiplexing device. A wavelength division multiplexing device that suppresses

The wavelength division multiplexing device is a device in which a phase difference is generated through waveguide columns arranged so that wavelengths at an input terminal are different by a predetermined length as shown in FIG. 1, and are separated into respective wavelengths at an output terminal by interference. However, such a wavelength division multiplexing device, when the core layer and the clad layer are formed of silica, the center wavelength of the output terminal has a temperature dependency of ~ 0.012nm / ℃ corresponds to 1550nm to 1GHz. Recently, the Dense Wavelength Division Multiplexing (DWDM) transmission system, which is in the spotlight, requires a very narrow channel spacing of about 10 GHz. It is necessary to stabilize the temperature of the device. Conventional wavelength division multiplexing devices use heaters and coolers for temperature stabilization, but this causes obstacles such as power consumption, price, and size. Therefore, it is necessary to develop a simple temperature independent wavelength division multiplexing device.

As a related art related to the present invention, Professor Y. Kokubun of Japan has fabricated a temperature independent optical waveguide using the thermooptic effect of the material. This is based on the fact that in the case of an optical waveguide having silica as a core layer and a polymer material as an upper clad layer, the optical path is kept constant without change with temperature. ( Electron. Lett. , Vol. 30, No. 15, p. 1223 (1994)) However, polymer materials are mostly negative values with large thermo-optic coefficients, so they can obtain temperature-independent properties only in a narrow range of temperatures. The introduction of an intermediate silica layer for thermooptic coefficient control over the layer allowed the temperature range to be extended. (Electn . Lett. , Vol. 34, No. 4, p. 367 (1998)) However, this has the disadvantage of complicating the process and creating additional costs.

In US Pat. No. 6,519,380, an upper clad layer is formed by a combination of an organic material and a glass material in a silica core layer in order to obtain a temperature independent characteristic of an integrated optical device. Here, the organic material is an organic-inorganic hybrid material by polymer or sol-gel method, and only a specific part of the upper clad layer is made of organic material and the remaining part is coated with glass material or both materials are coated with the upper clad two layer film. The lamination was performed to adjust the thermo-optic coefficient and to stabilize the temperature dependence of the device. However, this requires a lot of processes and has the disadvantage of complicated device.

In addition, Kaneto et al. Introduced temperature-independent optical devices by introducing grooves filled with silicon adhesive materials with negative thermo-optic coefficients in the core layer of the silica waveguide thermal lattice device, which is a wavelength division multiplexing device ( Electron. Lett. , Vol . .36, p.318 (2000)), Maru et al., Have made a crescent-shaped trench in the light incidence region of a silica waveguide thermal lattice device to realize temperature-independent characteristics. ( OFC 2000, San Jose, WH3 (2000)) However, these methods cause additional light loss and phase shift, and polarization dependence is also a problem.

As described above, the thermo-optic effect of the material plays a key role in the fabrication of temperature-independent wavelength division multiplexing devices. It was difficult to manufacture a split multiplexing device and the design was complicated. Therefore, a temperature-independent wavelength division multiplexing device that is more stable and easily manufactured is essential.

The present invention has been made to solve the problems of the prior art, the purpose of which is that the temperature of the device is simple and the process is simple using a non-organic hybrid material that is easy to adjust the thermo-optic coefficient and is widely adjustable The present invention provides a dependent wavelength division multiplexing device.

In order to achieve the above object, the present invention provides a temperature-independent wavelength division multiplexing device, wherein at least one or more of the lower cladding layer, the core layer and the upper cladding layer on the planar substrate have a negative thermo-optic coefficient. It is composed of a material and provides a temperature-independent wavelength division multiplexing device that exhibits temperature-independent characteristics by adjusting thermo-optic coefficients.

The present invention preferably provides a temperature independent wavelength division multiplexing device in which the temperature independent characteristic of the device is achieved through the adjustment of the thermo-optic coefficient between the core layer and the clad layer.

The present invention preferably provides a temperature-independent wavelength division multiplexing device wherein the organic-inorganic hybrid material is a material having an oxygen atom bonded to silicon in the structure or a network structure crosslinked with an organic monomer capable of crosslinking or modification.

Hereinafter, the content of the present invention in more detail as follows.

FIG. 2 is a vertical cross-sectional view of a temperature independent wavelength division multiplexing device, and is organic-free on at least one of the lower clad layer 2, the core layer 3, and the upper clad layer 4 on the silicon substrate 1. Contains hybrids. The organic-inorganic hybrid material has a negative thermo-optic coefficient, and preferably includes a material having a network structure crosslinked with an oxygen atom bonded to silicon or an organic monomer capable of crosslinking or modification in the structure.

The temperature-independent principle of the optical waveguide wavelength division device of the present invention is as follows. In an optical filter element such as a wavelength division element, the dependence of the center wavelength on temperature is expressed as follows.

here Is the center wavelength, L is the element length, Is the effective refractive index of the optical waveguide, S is the optical path length. The optical path length S can be expressed as follows for a uniform bulk material.

only, Is the refractive index and L is the length of the medium. Therefore, the optical path length is formulated as follows.

here, Is the coefficient of thermal expansion. Therefore, to satisfy the temperature-independent condition of the device

Must meet. However, in the case of silica, the constants included in the above formula, that is, the thermal expansion coefficient and the thermo-optic coefficient are both positive values, and thus temperature-independent conditions cannot be satisfied.

On the other hand, in the case of the optical waveguide formed on the substrate, the dependence of the center wavelength on temperature under the influence of the substrate is expressed as follows.

here, Denotes the thermal expansion coefficient of the substrate, and the thermal expansion coefficient of the substrate is included because the thermal expansion of the waveguide is determined by the substrate because the thickness of the substrate is very thick compared to the thickness of the optical waveguide. Therefore, the temperature independent condition is as follows.

Therefore, in the state where the thermal expansion coefficient of the substrate, the refractive index of the core and clad, the core thickness, etc. are determined, the thermal expansion coefficient and the refractive index of the substrate are positive values, so that the temperature-independent condition can be satisfied by adjusting the negative thermo-optic coefficient that satisfies the above equation. It becomes possible. Since the thermo-optic coefficient is related to the change of the effective refractive index with temperature, the value is determined by the combination of the thermo-optic coefficients of the core and the clad. In the case of silica, which is the main optical waveguide material, the thermo-optic coefficient is about 1.1 × 10 ^-5 / ° C, which is a positive value and it is difficult to change largely. In order to satisfy the condition, a temperature-independent optical device can be realized by adjusting the upper cladding layer having a negative thermo-optic coefficient.

The organic-inorganic hybrid material of the present invention is prepared by a sol-gel method including a hydrolysis and condensation reaction process, prepared by reacting an organic halogen silane with a silicon alkoxide or an alkyl ether, or using water. It can be prepared through a non-hydrolytic reaction process that does not.

The organic-inorganic hybrid material of the present invention can be prepared using silicon compounds represented by the following general formulas 1 to 3 as starting materials.

<Formula 1>

(OR ¹ ) _n Si-R ² _m (n + m = 4)

<Formula 2>

(OR ¹ ) _n Si- (XR ³ ) _m (n + m = 4)

<Formula 3>

R ⁴ SiCl ₃

In general formulas 1 to 3, R ¹ is a straight-chain or branched chain alkyl group such as methyl, ethyl, propyl, or butyl having 1 to 10 carbon atoms or a hydrogen atom in which these groups are hydrolyzed, and R ² is a straight chain having 1 to 4 carbon atoms. Or a branched alkyl group, a phenyl group, a phenyl alkoxy group, or an amine group. In addition, n is a natural number of 1-4, m represents the integer of 0-3.

X is a carbon chain having 3 to 6 carbon atoms, R ³ is a substance containing a vinyl group, a glycidoxy group, a methacryl group or a fluoride substance substituted with a fluoride atom in a carbon chain having 4 to 8 carbon atoms (hereinafter referred to as fluorocarbon). Indicates.

R ⁴ is a fluoride valence in a carbon chain having 1 to 10 carbon atoms, or a straight or branched alkyl group or a hydrogen atom, a phenyl group, a phenyl alkoxy group, an amine group, a vinyl group, a glycidoxy group or a methacryl group or a carbon chain having 4 to 8 carbon atoms. Substituted fluorocarbons.

Examples of specific compounds belonging to the general formulas (1) to (3) include tetramethoxysilane, tetraethoxysilane, tetrapropoxysilane, tetrabutoxysilane, vinyltriethoxysilane, vinyltrimethoxysilane, vinyltripropoxysilane, Vinyltriacetoxysilane, vinyldimethoxyethoxysilane, aminopropyltriethoxysilane, aminopropyltrimethoxysilane, aminopropyltripropoxysilane, N- (3-acryloxy-2-hydroxypropyl) -3 -Aminopropyltriethoxysilane, N- (3-acryloxy-2-hydroxypropyl) -3-aminopropyltrimethoxysilane, 3-acryloxypropyldimethoxysilane, 3-acryloxypropyldiethoxysilane, 3-acryloxypropyldipropoxysilane, 3- (meth) acryloxypropyltrimethoxysilane, 3- (meth) acryloxypropyltriethoxysilane, 3- (meth) acryloxypropyltripropoxysilane, N -(2-aminoethyl-3-aminoprop Phil) -trimethoxysilane (DIAMO), N- (2-aminoethyl-3-aminopropyl) -triethoxysilane, N- (2-aminoethyl-3-aminopropyl) -tripropoxysilane, N -(2-aminoethyl-3-aminopropyl) -tributoxysisilane, trimethoxysilylpropyldiethylenetriamine (TRIAMO), triethoxysilylpropyldiethylenetriamine, tripropoxysilylpropyldiethylenetri Amine, tributoxysilylpropyldiethylenetriamine, 2-glycidoxyethylmethoxysilane, 3-glycidoxypropyltrimethoxysilane, 3-glycidoxypropyltriethoxysilane, 2-glycidoxypropyl Trimethoxysilane, 2-glycidoxypropyltriethoxysilane, 2-glycidoxyethylmethyldimethoxysilane, 2-glycidoxyethylmethyldiethoxysilane, 3-glycidoxyethylmethyldimethoxysilane, 3 Glycidoxypropylethyldimethoxysilane, 3-glycidoxypropylethyldimethoxysilane, 3-glycidoxypropylethyldie Cysilane, 2-glycidoxypropylethyldiethoxysilane, 2-glycidoxypropylethyldimethoxysilane, 2- (3,4-ethoxycyclohexyl) ethyltrimethoxysilane, 2- (3,4-e) Methoxycyclohexyl) ethyltriethoxysilane, ethyltrimethoxysilane, methyltriethoxysilane, 3-chloropropyltrimethoxysilane, 3-chloropropyltripropoxysilane, 2-chloropropyltributoxysilane, phenyl Trimethoxysilane, phenyltriethoxysilane, 3,3,3, -trifluoropropyltrimethoxysilane, dimethyldimethoxysilane, 3-chloropropylmethyldimethoxysilane, methyltrichlorosilane, ethyltrichlorosilane, Phenyltrichlorosilane, vinyltrichlorosilane, hexyltrichlorosilane or decyltrichlorosilane.

The first method of preparing an organic-inorganic hybrid material according to the present invention is to prepare a mixed solution of water and alcohol of the materials represented by the general formulas (1) and (2) above, preferably by adding an acid or a base catalyst to hydrolysis and Condensation reaction. That is, the silanes represented by Formulas 1 and 2 are free from the gelation process in which oxides having a high molecular weight are transferred from a sol state to a gel state through a continuous reaction of hydrolysis and condensation reactions represented by Formula 1 below. Organic hybrids can be prepared.

<Formula 1>

[Hydrolysis]

M (OR) _x + xH ₂ O ↔M (OH) _x + xROH

[Condensation]

≡M (OH) + (HO) M≡ ↔ ≡MOM≡ + H ₂ O

               [Water condensation]

≡M (OR) + (HO) M≡ ↔ ≡M-O-M≡ + ROH

              [Alcohol condensation]

According to a second method of preparing an inorganic-organic hybrid material according to the present invention, an organosilane compound such as silicon chloride, methyltrichlorosilane, ethyltrichlorosilane, or phenyltrichlorosilane represented by the general formula (3) may be combined with silicon alkoxide or alkyl ether. Preferably, the method includes preparing a non-organic hybrid material having a polymer oxide structure through a reaction represented by the following Chemical Formula 2 using a catalyst such as metal chloride, for example, zirconium chloride, titanium chloride, tin chloride, and the like.

<Formula 2>

RSiCl ₃ + 0.75 Si (OR`) <sub>4</sub> → [RSi <sub>1.75</sub> O <sub>3</sub> ] <sub>n</sub> + 3R`Cl

0.75SiCl ₄ + RSi (OR`) <sub>3</sub> → [RSi <sub>1.75</sub> O <sub>3</sub> ] <sub>n</sub> + 3R`Cl

RSiCl ₃ + RSi (OR`) <sub>3</sub> → [R <sub>2</sub> Si <sub>2</sub> O <sub>3</sub> ] <sub>n</sub> + 3R`Cl

2RSiCl ₃ + 3R` <sub>2</sub> O → [R <sub>2</sub> Si <sub>2</sub> O <sub>3</sub> ] <sub>n</sub> + 6R`Cl

RSiCl ₃ + Si (OR`) <sub>4</sub> → [RSi <sub>2</sub> O <sub>3</sub> -OR`] _n + 3R`Cl

SiCl ₄ + RSi (OR`) <sub>3</sub> → [RSi <sub>2</sub> O <sub>3</sub> -Cl] <sub>n</sub> + 3R`Cl

R ′ in Formula 2 is a straight or branched alkyl group having 1 to 10 carbon atoms, and R is a straight or branched alkyl group having 1 to 10 carbon atoms or a hydrogen atom, a phenyl group, a phenyl alkoxy group, an amine group, a vinyl group, or a glycidoxy group. Or fluorine carbide containing a methacryl group or substituted with a fluoride atom in a carbon chain having 4 to 8 carbon atoms.

The third method for producing an organic-inorganic hybrid material according to the present invention is by a non-hydrolytic reaction without using water, and a silanediol represented by the following general formula (4) and a metal represented by the general formula (5). Preparing an organic-inorganic hybrid material in the form of a polymer by thermal or photocuring the oligomer obtained by reacting the alkoxide.

<Formula 4>

R ⁵ R ⁶ Si (OH) ₂

<Formula 5>

R ⁷ _a R ⁸ _b M (OR ⁹ ) _(cab)

In Formulas 4 and 5, R ⁵ , R ⁶ , R ⁷ , and R ⁸ are an alkyl group, a ketone group, an acryl group, an allyl group, an aromatic group, a halogen group, an amine group, an amino group, a mercapto group, an ether group, an ester group, Or a linear, branched or cyclic C1-C12 hydrocarbon group having one or two or more epoxy functional groups, a, b is an integer of 0 to 3, c is an integer of 3 to 6, M is silicon or a metal, R <^9> represents a linear, branched or cyclic C1-C6 hydrocarbon group which has an alkyl group, an alkoxy group, a ketone group, and an aromatic group single or 2 types or more.

In addition, the organic-inorganic hybrid material is a compound of the same or different types including an organic monomer capable of crosslinking with an organic group substituted in silicon of the compounds represented by the general formula 2, 5 by adding a free radical and an organic polymerization initiator It can also be obtained by polymerization, the compound represented by the general formulas (2) and (5) can be obtained by the ring-opening reaction of a homogeneous or heterogeneous compound containing an organic monomer capable of crosslinking with an organic group substituted with silicon by ring-opening reaction with a metal alkoxide or amine group It may be. Specific examples of the organic polymerization initiator include aluminum alkoxide, zirconium alkoxide, titanium alkoxide, 1-methylimidazole, imidazole series, borontrifluoride diethyl isate, benzoyl peroxide, 2.2'-azobisisobutyro Nitriles and the like, but are not limited thereto.

The organic-inorganic hybrid material according to the present invention can be prepared by the above methods and can change the structure and properties of the final material according to the type of organic material added. In organic-inorganic hybrids, organics play a role as network formers and network modifiers in networks that are largely crosslinked with oxygen atoms. For example, organic substances that cannot bind to other organic monomers or inorganic network such as phenyl group or amine group play a role of modifier in organic-inorganic hybrids. If the added organic substance is an organic substance such as glycidoxy group, methacryl group, or vinyl group, it can act as a crosslinking agent to form a new bond through bonding with other organic monomers or other organic substances in the inorganic network structure. . In the case where a vinyl group, glycidoxy group, or methacryl group is included as the organic monomer which enables crosslinking between molecules in the material of Formula 2, it is possible to perform an organic polymerization reaction represented by the following Chemical Formula 3. It is preferable when the organic group substituted in the silicon is vinyl group or methacryl group (preferably methacryloxy group). Let's do it.

When glycidoxy group is included, organic polymerization may be preferably performed through a ring opening reaction using aluminum alkoxide, titanium alkoxide, zirconium alkoxide, amine group or the like.

<Formula 3>

O ₃ ≡Si-R + R`-Si≡O <sub>3</sub> → O <sub>3</sub> ≡Si-RR`-Si≡O ₃

O ₃ ≡Si-R + R + R + R`-Si≡O <sub>3</sub> → O <sub>3</sub> ≡Si-RRRR`-Si≡O ₃

R, R` in Formula 3 is an organic monomer capable of crosslinking and has an unsaturated hydrocarbon such as a double bond or a triple bond or an unstable ring structure. Representative examples of such bonds or structures include vinyl groups, methacryl groups, glycidoxy groups, and the like.

The thermo-optic coefficient of the organic-inorganic hybrid material of the present invention exhibits a negative value, and is a wide range from -10 ^-5 / ° C to -3 × 10 ^-4 / ° C, which was not obtained with silica or polymer, which is a conventional optical waveguide material. Indicates the value of. In addition, since it is manufactured in a solution state, the composition and structure can be easily controlled. Therefore, the thermo-optic coefficient is very simple according to the ratio of inorganic and organic materials, the type of organic materials, the polymerization or crosslinking reaction of the organic materials, the inorganic mesh degree, and the heterometal oxide ratio. It can be changed finely. And since the fine adjustment of the refractive index is easy, and the prepared solution is easy to change the viscosity, it is possible to form a film by an easy coating process such as spin coating method, dip coating method, bar coating method, the thickness of the coating film by the viscosity change Controllable and uniform coating film can be obtained. Therefore, temperature-independent wavelength-division multiplexing device in which thermo-optic coefficient plays a key role by using organic-inorganic hybrid materials that can adjust the thermo-optic coefficient very simply and finely in a wide range, can change refractive index, and is easy to form. Can be provided by a simple device structure and a simple process.

Hereinafter, the content of the present invention will be described in more detail with reference to Examples. However, these examples are only presented to understand the content of the present invention, and the scope of the present invention should not be construed as being limited to these embodiments.

<Example 1>

In the vertical cross-sectional structure of FIG. 2, a wavelength division multiplexing device including a silica lower cladding layer, a silica core layer, and an organic-inorganic hybrid upper cladding layer was fabricated on a silicon substrate. The thermal expansion coefficient of the silicon substrate is 2.63 × 10 ⁻⁶ / ° C., the refractive index at the wavelength of 1550 nm of the lower silica cladding layer is 1.4440, the refractive index is 1.4548 at the wavelength of 1550 nm of the silica core layer, and the thermal optical coefficient of the silica layer is 1.1 × 10 ^−5. / ℃ the case of a numerical analysis by using the actual value of the upper clad layer non-organic hybrid material of a refractive index of 1.4440, the number of excited academia -1.0 × 10 ^-4 /℃~-1.3×10 ^-4 / ℃ at 1550nm wavelength Only in this case, temperature independent characteristics of the wavelength division multiplexing device could be obtained.

In order to prepare an organic-inorganic hybrid material satisfying the above conditions, 3-methacryloxypropyltrimethoxysilane (MPTS), zirconium propoxide (ZPO), and perfluoroalkylsilane (PFAS) are used as starting materials. Mix at a molar ratio of 1: 0.2: 0.242. 0.01 N HCl was used as a reaction catalyst and stirred for 20 hours. Further, benzoyl peroxide (BZPO), an acrylic organic polymerization initiator, was added in an amount of 3% by weight of silicon atoms, followed by stirring for 1 hour. The final solution was coated on a substrate prepared by Flame Hydrolysis Deposition (FHD) with a silica lower cladding layer and a core layer of a wavelength division multiplexing device, spin-coated at 1000 rpm, and then heat treated at 150 degrees Celsius for 5 hours. It was. Since the thermal stress (thermal stress) acts on the coating film during cooling, the upper cladding layer was prepared by gradually cooling to a temperature of 120, 80, 40 degrees Celsius. The refractive index of the prepared organic-inorganic hybrid material was 1.4440 at 1550 nm as measured by a prism coupler, and the thickness of the coating film was measured by electron scanning microscope (SEM).

3 shows the change of the center wavelength according to the temperature at the output terminal of the wavelength division multiplexing device. 3 shows the temperature dependence of the wavelength division multiplexing device made of silica, and increases linearly with a slope of 0.013 nm / ° C as the temperature increases. On the contrary, in the wavelength division multiplexing device using the upper cladding layer composed of the organic-inorganic hybrid material indicated by the symbol 6 of FIG. 3, the center wavelength decreases with increasing temperature and increases again around 60 ° C, showing a U-shaped change curve. In the temperature range of 10 ° C to 90 ° C, the temperature dependence was significantly reduced compared to the wavelength division multiplexing device made of silica with a change in the center wavelength of 0.28nm. Therefore, the temperature-independent wavelength division multiplexing device, which could not be realized by the conventional optical waveguide material, could be manufactured in a simple form by controlling the thermo-optic coefficient of the organic hybrid material.

<Example 2>

In the same manner as in Example 1, a wavelength division multiplexing device including a silica lower cladding layer, a silica core layer, and an organic-inorganic hybrid upper cladding layer was fabricated on a silicon substrate. At this time, the organic hybrid material was prepared using 3-methacryloxypropyltrimethoxysilane, methyltrichlorosilane, and perfluoroalkylsilane as starting materials. It stirred for 10 hours using tin chloride as a catalyst, and after adding benzoyl peroxide (BZPO) which is an acrylic organic polymerization initiator in the quantity of 3 weight% of a silicon atom, it stirred for 1 hour. The prepared organic-inorganic hybrid material exhibited a thermo-optic coefficient of 2.5 ± 0.5 × 10 ⁻⁴ / ° C., and the upper cladding layer of the wavelength division multiplexing device was manufactured in the same manner as in Example 1, and measured at 10 ° C. In the temperature range between 90 ° C, the temperature dependence was reduced compared to the wavelength division multiplexing device made of silica with a change of about 0.5 nm in the center wavelength.

<Example 3>

In the same manner as in Example 1, a wavelength division multiplexing device including a silica lower cladding layer, a silica core layer, and an organic-inorganic hybrid upper cladding layer was fabricated on a silicon substrate. At this time, the organic hybrid material was prepared using 3-methacryloxypropyltrimethoxysilane, diphenylsilanediol, and perfluoroalkylsilane as starting materials. After the solution was mixed, the mixture was stirred at 60 ° C. for 5 hours, and benzoyl peroxide (BZPO), which is an acrylic organic polymerization initiator, was added in an amount of 3% by weight of silicon atoms, followed by stirring for 1 hour. The organic-inorganic hybrid material prepared through the same process as in Example 1 was able to adjust the thermo-optic coefficient in the range of 3.0 ± 0.3 × 10 ^-4 / ℃, 10 ℃ as a result of manufacturing the upper cladding layer of the wavelength division multiplexing device In the temperature range from to 90 ° C, the temperature dependence was reduced compared to the wavelength division multiplexing device made of silica with a variation of the center wavelength of 0.58 nm.

As described above, the wavelength division multiplexing device using the organic-inorganic hybrid material according to the present invention can finely control the refractive index and the thermo-optic coefficient in a wide range, thereby providing a temperature-independent characteristic that cannot be realized with conventional optical waveguide materials. Can be.

1 is a conventional wavelength division multiplexing device

2 is a vertical cross-sectional view of a temperature independent wavelength division multiplexing device according to the present invention;

Figure 3 is the temperature dependence of the wavelength division multiplexing device by the organic-inorganic hybrid material of the present invention

<Description of the symbols for the main parts of the drawings>

1: silicon substrate 2: lower clad layer

3: core layer 4: upper clad layer

Claims (12)

In the temperature independent wavelength division multiplexing device, At least one of the lower clad layer, the core layer and the upper clad layer on the planar substrate is composed of an organic-inorganic hybrid material having a negative thermo-optic coefficient, and temperature-independent characteristics are exhibited by controlling the thermo-optic coefficient. Temperature independent wavelength division multiplexing device The method of claim 1, Temperature-independent wavelength division multiplexing device, characterized in that the temperature-independent characteristic of the device is achieved by adjusting the thermo-optic coefficient between the core layer and the cladding layer The method of claim 1, The organic-inorganic hybrid material has a temperature-independent wavelength division multiplexing device having a network structure crosslinked with an oxygen atom bonded to silicon or an organic monomer capable of crosslinking or modification in the structure. The method of claim 3, wherein The organic-inorganic hybrid material is a temperature independent wavelength division multiplexing device characterized in that the compound represented by the following formula (1) is a sol-gel method of undergoing hydrolysis and condensation reaction in the presence of an acid or a base catalyst. (1) (OR ¹ ) _n Si-R ² _m (n + m = 4) R ¹ is a straight or branched chain alkyl group having 1 to 10 carbon atoms or a hydrogen atom. R <^2> is a C1-C4 linear or branched alkyl group, a phenyl group, a phenyl alkoxy group, and an amine group. n is a natural number between 1 and 4, and m is an integer between 0 and 3. The method of claim 3, wherein The organic-inorganic hybrid material is a temperature-independent wavelength-division multiplexing device, characterized in that the compound represented by the following formula (2) is formed by a sol-gel process undergoing hydrolysis and condensation reaction in the presence of an acid or a base catalyst (2) (OR ¹ ) _n Si- (XR ³ ) _m (n + m = 4) R ¹ is a straight or branched chain alkyl group having 1 to 10 carbon atoms or a hydrogen atom. X is a carbon chain having 3 to 6 carbon atoms. R ³ is a fluorocarbon containing a vinyl group, a glycidoxy group, a methacryl group, or a fluoride atom substituted with a carbon chain having 4 to 8 carbon atoms. n is a natural number between 1 and 4, and m is an integer between 0 and 3. The method of claim 3, wherein The organic-inorganic hybrid material is a temperature independent wavelength division multiplexing device, characterized in that a compound obtained by reacting an organic halogen silane represented by the following general formula (3) with a silicon alkoxide or an alkyl ether: (3) R ⁴ SiCl ₃ R ⁴ is a linear or branched alkyl group having 1 to 10 carbon atoms or a hydrogen atom, a phenyl group, a phenyl alkoxy group, an amine group, a vinyl group, a glycidoxy group, a methacryl group, or a 4 to 8 carbon chain in a carbon chain. Fluorocarbon substituted by a ride atom. The temperature-independent wavelength division multiplexing device according to claim 3, wherein the organic-inorganic hybrid material is prepared by a non-hydrolysis reaction of the compound represented by the following general formulas (4) and (5). (4) R ⁵ R ⁶ Si (OH) ₂ (5) R ⁷ _a R ⁸ _b M (OR ⁹ ) _(cab) In the general formula, R ⁵ , R ⁶ , R ⁷ , R ⁸ is an alkyl group, a ketone group, an acryl group, an allyl group, an aromatic group, a halogen group, an amine group, an amino group, a mercapto group, an ether group, an ester group, or an epoxy functional group A straight, branched or cyclic hydrocarbon having 1 to 12 carbon atoms, alone or in combination. a, b is an integer of 0 to 3, c is an integer of 3 to 6, M is a silicon or metal, R ⁹ is an alkyl group, an alkoxy group, a ketone group, a straight chain, branched or cyclic having solely or two or more kinds Hydrocarbons of 1 to 6 carbon atoms. The method of claim 3, wherein the organic-inorganic hybrid material is free radicals and organic polymerization of the same or different compounds comprising an organic monomer capable of crosslinking with an organic group substituted with silicon in the compounds represented by the following general formulas (2) and (5) Temperature-independent wavelength division multiplexing device characterized by polymerization by adding an initiator (2) (OR ¹ ) _n Si- (XR ³ ) _m (n + m = 4) (5) R ⁷ _a R ⁸ _b M (OR ⁹ ) _(cab) Each general formula is the same as defined in claims 5 and 7. The method of claim 3, wherein the organic-inorganic hybrid material is a compound of the same type or heterogeneous compound containing an organic monomer capable of crosslinking with an organic group substituted with silicon in the compounds represented by the general formulas 2, 5 Temperature-independent wavelength division multiplexing device characterized in that the ring opening reaction (2) (OR ¹ ) _n Si- (XR ³ ) _m (n + m = 4) (5) R ⁷ _a R ⁸ _b M (OR ⁹ ) _(cab) Each general formula is the same as defined in claims 5 and 7. Temperature-independent wavelength-division multiplexing device in which the same or different compounds including organic monomers capable of crosslinking with an organic group substituted in silicon are polymerized by the addition of free radicals and an organic polymerization initiator Manufacturing method of organic-inorganic hybrid material for manufacturing (2) (OR ¹ ) _n Si- (XR ³ ) _m (n + m = 4) (5) R ⁷ _a R ⁸ _b M (OR ⁹ ) _(cab) Each general formula is the same as defined in claims 5 and 7. The method of claim 10, The organopolymerization initiator is selected from the group consisting of aluminum alkoxide, zirconium alkoxide, titanium alkoxide, 1-methylimidazole, imidazole series, borontrifluoride diethyl isate, benzoyl peroxide, 2.2'-azobisisobutyronitrile Selected manufacturing method Temperature-independent wavelength-division multiplexing device that is polymerized by ring-opening reaction of the same or different compounds including organic monomers crosslinkable with an organic group substituted with silicon among the compounds represented by the following general formulas 2 or 5 using a metal alkoxide or an amine group Manufacturing method of organic-inorganic hybrid material for manufacturing (2) (OR ¹ ) _n Si- (XR ³ ) _m (n + m = 4) (5) R ⁷ _a R ⁸ _b M (OR ⁹ ) _(cab) Each general formula is the same as defined in claims 5 and 7.