KR20050105668A - Preparation of uv curable agent by suspension polymerization - Google Patents

Preparation of uv curable agent by suspension polymerization Download PDF

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KR20050105668A
KR20050105668A KR1020040030889A KR20040030889A KR20050105668A KR 20050105668 A KR20050105668 A KR 20050105668A KR 1020040030889 A KR1020040030889 A KR 1020040030889A KR 20040030889 A KR20040030889 A KR 20040030889A KR 20050105668 A KR20050105668 A KR 20050105668A
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suspension polymerization
binder polymer
stabilizer
curing
crude liquid
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KR1020040030889A
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Korean (ko)
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고승오
김영범
강충석
이갑성
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주식회사 코오롱
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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F2/00Processes of polymerisation
    • C08F2/12Polymerisation in non-solvents
    • C08F2/16Aqueous medium
    • C08F2/20Aqueous medium with the aid of macromolecular dispersing agents
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F220/00Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
    • C08F220/02Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
    • C08F220/04Acids; Metal salts or ammonium salts thereof
    • C08F220/06Acrylic acid; Methacrylic acid; Metal salts or ammonium salts thereof
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F220/00Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
    • C08F220/02Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
    • C08F220/10Esters
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials

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  • General Physics & Mathematics (AREA)
  • Polymerisation Methods In General (AREA)
  • Materials For Photolithography (AREA)

Abstract

본 발명은 반응기에 이온교환수, 단량체, 가교제, 지용성 개시제 및 안정제로 이루어진 조액를 투입하여 현탁중합을 거쳐 UV 경화용 바인더 폴리머 비드를 제조하는 방법에 관한 것으로서, 현탁중합 이전에 조액을 호모게나이저에 통과시키는 단계를 더 거침으로써 안정제를 0.1∼3중량%(전체 고형분 함량 기준) 되도록 소량만 사용하더라도 안정성을 확보할 수 있게 되어 결과적으로 이를 포함하는 드라이필름 레지스트의 생산성과 해상도를 향상시킬 수 있는 UV 경화용 바인더 폴리머 비드의 제조방법을 제공한다. The present invention relates to a method of preparing a binder polymer bead for UV curing through suspension polymerization by introducing a crude liquid consisting of ion-exchanged water, a monomer, a crosslinking agent, a fat-soluble initiator and a stabilizer in a reactor, wherein the crude liquid is homogenized prior to suspension polymerization. By going through the step further, it is possible to secure stability even if only a small amount of stabilizer is used in an amount of 0.1 to 3% by weight (based on the total solid content), and as a result, the productivity and resolution of the dry film resist including the same can be improved. Provided is a method of preparing binder polymer beads for UV curing.

Description

현탁 중합을 통한 UV 경화용 바인더 폴리머 비드의 제조방법{Preparation of UV curable agent by Suspension Polymerization}Preparation method of binder polymer beads for heat curing through suspension polymerization {Preparation of UV curable agent by Suspension Polymerization}

본 발명은 UV 경화용 바인더 폴리머 비드(Polymer Bead)를 현탁중합을 통해 제조하는 방법에 관한 것이다. The present invention relates to a method for preparing UV curable binder polymer beads (Polymer Beads) through suspension polymerization.

감광성 필름, 즉 드라이필름을 사용한 인쇄회로기판(PCB) 회로 제조공정을 대한민국특허 제271216호에서 소개하고 있다.The process of manufacturing a printed circuit board (PCB) circuit using a photosensitive film, that is, a dry film, is introduced in Korean Patent No. 271216.

드라이필름 포토레지스트의 감광층을 구성하는 감광성 수지 조성물은 바인더 폴리머, 광중합 단량체, 광중합 개시제 및 기타 첨가제를 포함한다. The photosensitive resin composition which comprises the photosensitive layer of a dry film photoresist contains a binder polymer, a photopolymerization monomer, a photoinitiator, and other additives.

일반적으로 감광성 수지 조성물 중 바인더 폴리머 비드는 반응기에 이온교환수, 단량체, 가교제, 지용성 개시제 및 안정제를 투입하고 고속으로 교반, 내부온도를 50∼80℃로 승온시켜 8∼24시간 반응을 보낸 후 상온으로 온도를 하강시켜 구형의 바인더 폴리머 입자를 얻는다. In general, the binder polymer beads in the photosensitive resin composition are charged with ion exchanged water, monomers, crosslinking agents, fat soluble initiators and stabilizers in a reactor, stirred at high speed, and heated to an internal temperature of 50 to 80 ° C., followed by reaction for 8 to 24 hours. The temperature is lowered to obtain spherical binder polymer particles.

이때, 수계와 모노머계를 단순 혼합하여 현탁중합을 통해 바인더 폴리머를 제조할 경우 용매에 잘 녹지 않는 불용성분이 소량 존재하기 때문에 드라이필름의 해상도를 저해시키는 문제가 있다. 통상 물질의 광학적 특성에 의하여 해상도에 많은 영향을 주기 때문에 드라이필름을 만들 경우 감광성 수지 조성물 조액을 수 ㎛의 망체를 통과시켜 광산란의 원인이 될 수 있는 불순물을 제거한다. In this case, when a binder polymer is prepared through suspension polymerization by simply mixing an aqueous system and a monomer system, a small amount of insoluble components that are not easily dissolved in a solvent is present, thereby preventing the resolution of the dry film. In general, since the optical properties of the material greatly affect the resolution, when the dry film is made, the photosensitive resin composition crude solution is passed through a network of several μm to remove impurities that may cause light scattering.

따라서 다량의 안정제를 사용하게 되면 불용성분으로 존재하게 되고 결과적으로 광산란의 원인이 되는 문제가 있다. Therefore, when a large amount of stabilizer is used, there is a problem that exists as an insoluble component and consequently causes light scattering.

이에, 본 발명자들은 현탁중합을 통해 감광성 수지용 바인더 폴리머 비드를 제조함에 있어서 안정제를 과량 사용하는 문제점을 용이하게 해결하기 위해 연구노력하던 중, 중합하기 전에 호모게나이저에서 조액을 이송시킨 다음 현탁중합을 실시한 결과, 소량의 안정제로도 안정성을 확보할 수 있고 그로 인해 드라이필름 레지스트의 생산성을 향상시키면서 해상도를 향상시킬 수 있음을 알게되어 본 발명을 완성하게 되었다. Accordingly, the present inventors have been trying to easily solve the problem of excessive use of a stabilizer in preparing the binder polymer beads for the photosensitive resin through suspension polymerization, and then, after polymerization, the crude liquid is transferred from the homogenizer before suspension polymerization. As a result, it was found that stability can be ensured even with a small amount of stabilizer, thereby improving the resolution while improving the productivity of the dry film resist, thereby completing the present invention.

따라서, 본 발명의 목적은 호모게나이져를 사용하여 UV 경화용 바인더 폴리머를 제조함으로써 드라이 필름 레지스터의 생산성과 해상도를 향상시킬 수 있는 UV 경화용 바인더 폴리머의 제조방법을 제공하는 데 있다. Accordingly, it is an object of the present invention to provide a method for producing a binder polymer for UV curing that can improve the productivity and resolution of a dry film resistor by producing a binder polymer for curing UV using a homogenizer.

상기와 같은 목적을 달성하기 위한 UV 경화용 바인더 폴리머의 제조방법은 반응기에 이온교환수, 단량체, 가교제, 지용성 개시제 및 안정제로 이루어진 조액를 투입하여 현탁중합을 거치는 것으로서, 현탁중합 이전에 상기 조액을 호모게나이저에 이송하여 통과시키는 단계를 더 거치며 안정제를 전체 고형분 함량 기준으로 0.1∼3중량% 되도록 사용하는 것을 그 특징으로 한다. In order to achieve the above object, a method for preparing a binder polymer for UV curing is to add a crude liquid consisting of ion-exchanged water, monomers, crosslinking agents, fat-soluble initiators and stabilizers into a reactor to undergo suspension polymerization, and to prepare the crude liquid before suspension polymerization. After passing through the homogenizer and passing through it, the stabilizer is characterized by using 0.1 to 3% by weight based on the total solids content.

이와같은 본 발명을 더욱 상세하게 설명하면 다음과 같다. The present invention will be described in more detail as follows.

본 발명은 UV 경화용 바인더 폴리머를 현탁중합 공정을 통해 제조함에 있어서 중합 이전에 조액을 호모게나이져에 이송시킴으로써 안정제 사용양을 적게 함으로써 폴리머 비드내 안정제 함량을 적게 하도록 한 제조방법에 관한 것이다. The present invention relates to a manufacturing method for reducing the stabilizer content in the polymer beads by reducing the amount of stabilizer by transferring the crude liquid to the homogenizer prior to the polymerization in the manufacture of the UV curing binder polymer through a suspension polymerization process.

통상 UV 경화용 바인더 폴리머의 현탁중합 과정은 반응기에 이온교환수, 단량체, 가교제, 지용성 개시제 및 안정제를 투입하고 고속으로 교반, 내부온도를 50∼80℃로 승온시켜 8∼24시간 반응을 보낸후 상온으로 온도를 하강시켜 구형의 바인더 폴리머 입자를 얻는다. In the suspension polymerization process of the binder polymer for UV curing, ion-exchanged water, monomers, crosslinking agents, fat-soluble initiators and stabilizers are added to the reactor, stirred at high speed, and the internal temperature is raised to 50-80 ° C., followed by 8 to 24 hours of reaction. The temperature is lowered to room temperature to obtain spherical binder polymer particles.

바인더 폴리머는 선형 아크릴산 고분자로서, 이는 둘 이상의 단량체들의 공중합을 통해 얻어진 공중합 아크릴산 고분자이다. 여기서 단량체로는 메틸아크릴레이트, 메틸메타크릴레이트, 에틸아크릴레이트, 에틸메타크릴레이트, 부틸아크릴레이트, 부틸메타크릴레이트, 아크릴산, 메타크릴산, 2-히드록시에틸 아크릴레이트, 2-히드록시에틸 메타크릴레이트, 2-히드록시크로필 아크릴레이트, 2-히드록시프로필 메타크릴레이트, 아크릴아마이드, 메타크릴아마이드, 스티렌, α-메틸 스트렌, 사이크로헥실아크릴레이트 등을 들 수 있다. The binder polymer is a linear acrylic acid polymer, which is a copolymerized acrylic acid polymer obtained through copolymerization of two or more monomers. The monomers include methyl acrylate, methyl methacrylate, ethyl acrylate, ethyl methacrylate, butyl acrylate, butyl methacrylate, acrylic acid, methacrylic acid, 2-hydroxyethyl acrylate, 2-hydroxyethyl Methacrylate, 2-hydroxychrome acrylate, 2-hydroxypropyl methacrylate, acrylamide, methacrylamide, styrene, α-methyl styrene, cyclohexyl acrylate and the like.

안정제는 통상 폴리비닐알콜, 폴리비닐피롤리돈, 메틸 셀룰로스, 에틸 셀룰로스, 나트륨 카르복실 메틸 셀룰로스, 폴리아크릴산, 폴리메타크릴산, 나트륨 폴리아크릴레이트, 나트륨 폴리메타크릴레이트, 젤라틴, 폴리아크릴아미드 및 폴리에틸렌옥시드 등을 사용하며, 그 함량은 전체 폴리머 비드에 대해 0.1∼3.0중량%인 것이 바람직하다. 본 발명에 따른 호모게나이저의 이송을 거치지 않는 경우 안정제는 과량으로 사용되어야만 목적하는 효과를 얻을 수 있다. Stabilizers are typically polyvinylalcohol, polyvinylpyrrolidone, methyl cellulose, ethyl cellulose, sodium carboxymethyl cellulose, polyacrylic acid, polymethacrylic acid, sodium polyacrylate, sodium polymethacrylate, gelatin, polyacrylamide and Polyethylene oxide and the like are used, and the content thereof is preferably 0.1 to 3.0% by weight based on the total polymer beads. When not passed through the homogenizer according to the present invention, the stabilizer must be used in excess to obtain the desired effect.

개시제로는 벤조일퍼옥사이드, 아조비스이소부티로니트릴, 아조비스메틸부티로니트릴, 아조비스시클로헥산카르보니트릴 등을 사용한다. As the initiator, benzoyl peroxide, azobisisobutyronitrile, azobismethylbutyronitrile, azobiscyclohexanecarbonitrile and the like are used.

폴리머 비드 제조시 사용되는 이온교환수는 이온교환기를 거쳐 생성된 질소기류 하에서 저항치가 5메가오옴(5MΩ) 이상인 순수로써, 전체 단량체에 대하여 150∼400중량%로 사용된다.Ion-exchanged water used in the production of polymer beads is pure water having a resistance value of 5 mega ohms or more (5 MΩ) or more under a nitrogen stream generated through an ion exchanger, and is used at 150 to 400 wt% based on the total monomers.

상기와 같은 모노머계와 수계를 혼합한 후 수백 rpm으로 30분간 교반한 후 호모게나이져로 이송시킨다. 호모게나이져의 사용압력은 1000∼5000psi인 것이 바람직하다. 반응온도와 반응시간을 각각 50∼80℃ 그리고 8∼24 시간으로 하여 얻는다.After mixing the monomer system and the water system as described above, the mixture is stirred at several hundred rpm for 30 minutes and then transferred to the homogenizer. It is preferable that the working pressure of a homogenizer is 1000-5000psi. The reaction temperature and the reaction time are obtained at 50 to 80 DEG C and 8 to 24 hours, respectively.

반응 종료된 폴리머 비드 용액은 필터 및 이온교환수로 반복 세척한 후, 60℃에서 24시간 진공건조시켜 최종제품을 얻는다. After completion of the reaction, the polymer bead solution is washed repeatedly with a filter and ion-exchanged water, followed by vacuum drying at 60 ° C. for 24 hours to obtain a final product.

이하 본 발명을 하기의 실시예, 비교예를 통하여 보다 상세히 설명하기로 한다. 그러나, 다음에 제시되는 실시예들은 본 발명을 보다 쉽게 이해하기 위하여 제공되는 것이지 본 발명이 이들 실시예에 한정되는 것은 아니다.Hereinafter, the present invention will be described in more detail with reference to Examples and Comparative Examples. However, the following examples are provided to more easily understand the present invention, but the present invention is not limited to these examples.

실시예 1∼2 및 비교예Examples 1-2 and Comparative Examples

다음 표 1과 같이 동일한 단량체 조성으로 안정제의 함량을 변화시켜 BP 1, 2, 3을 얻었다. 이의 물성을 표 1에 나타내었다. As shown in Table 1, BP 1, 2, and 3 were obtained by changing the content of the stabilizer with the same monomer composition. Its physical properties are shown in Table 1.

(단위: 중량부)(Unit: parts by weight) 비교예(BP 1)Comparative Example (BP 1) 실시예 1(BP 2)Example 1 (BP 2) 실시예 2(BP 3)Example 2 (BP 3) 단량체조성Monomer composition 메틸메타크릴레이트Methyl methacrylate 105105 105105 105105 스티렌Styrene 6060 6060 6060 에틸아크릴레니트Ethyl acrylate 6666 6666 6666 부틸 아크릴레이트Butyl acrylate 1010 1010 1010 메타아크릴산Methacrylic acid 6060 6060 6060 안정제 PVA(10%)Stabilizer PVA (10%) 3030 1010 88 이온교환수 Ion exchange water 740740 740740 740740 무게평균분자량Weight average molecular weight 77,48677,486 75,89775,897 76,89276,892 분자량 분포Molecular weight distribution 2.542.54 2.502.50 2.492.49 산가Acid 130.5130.5 130130 131131 유리전이온도(℃)Glass transition temperature (℃) 108108 108108 107107 평균입자크기(㎛)Average particle size (㎛) 100100 1010 1212

비교예(BP 1)는 상기 표 1과 같은 조성으로 용액을 준비하고 2L 반응기에 투입하여 질소기류 하에서 250rpm 속도로 교반하면서 내부온도가 60℃ 되도록 가열한 후, 60℃에서 8시간 반응시켜 준비한 것이고, 실시예 1 내지 2(BP 2, BP 3)는 중합하기 전에 호모게나이저(압력 1000∼5000psi)에 2회 이송시킨 후 상기 BP 1과 같은 현탁중합 방법을 통해 준비한 것이다. Comparative Example (BP 1) was prepared by preparing a solution with the composition as shown in Table 1, and added to a 2L reactor and heated at an internal temperature of 60 ℃ while stirring at 250 rpm speed under a nitrogen stream, and then reacted at 60 ℃ for 8 hours , Examples 1 to 2 (BP 2, BP 3) is prepared by a suspension polymerization method such as BP 1 and then transferred to a homogenizer (pressure 1000 ~ 5000psi) twice before polymerization.

BP 1의 경우 MEK에 녹인 경우 BP 2, 3 에 비하여 투명도가 떨어지는 것을 눈으로도 쉽게 확인 할 수 있다. 호모게나이저를 사용한 BP2, 3의 경우 적은 안정제를 사용하고도 안정성을 확보할 수 있고 제조된 입자의 평균크기는 약 10∼12㎛이다. 두 고분자 모두 60℃에서 24시간 진공건조시켜 준비하였다. In the case of BP 1, it is easy to see that the transparency is lower than that of BP 2 and 3 when melted in MEK. In the case of BP2 and 3 using a homogenizer, stability can be ensured even with a small amount of stabilizer, and the average size of the prepared particles is about 10 to 12 μm. Both polymers were prepared by vacuum drying at 60 ° C. for 24 hours.

산가나 유리전이온도의 경우 BP 1, 2, 3 모두 유사함을 알 수 있다. 분자량 분포 및 입자 크기의 경우 BP 1이 BP 2, BP 3에 비하여 크게 나오는 것을 확인하였다. In case of acid value or glass transition temperature, it can be seen that BP 1, 2 and 3 are similar. In the case of molecular weight distribution and particle size, it was confirmed that BP 1 is larger than BP 2 and BP 3.

실험예Experimental Example

상기 실시예 및 비교예에서 제조된 바인더 폴리머를 다음 표 2와 같은 조성으로 드라이 필름 포토 레지스트를 제조하여 일반적인 PCB 제조공정에 따라 회로를 구성한 후 드라이 필름 레지스트의 물성을 평가하였다. The binder polymers prepared in Examples and Comparative Examples were manufactured with a dry film photoresist having a composition as shown in Table 2, and then a circuit was constructed according to a general PCB manufacturing process to evaluate physical properties of the dry film resist.

구체적으로 다음 표 2와 같이 준비된 조성액을 폴리에틸렌 테레프탈레이트에 균일하게 코팅을 한 후 건조시켜 드라이 필름 포토레지스트를 준비한다. PCB 회로공정 중에서 현상공정을 거친 후 드라이필름의 감도, 해상도 그리고 세션밀착력을 평가하였다. Specifically, the composition prepared as shown in Table 2 is uniformly coated on polyethylene terephthalate and dried to prepare a dry film photoresist. After developing process in PCB circuit process, dry film sensitivity, resolution and session adhesion were evaluated.

다음 표 3은 노광량을 변화시켜 가며 드라이 필름 포토레지스트의 물성을 평가한 결과이다(단, 표 2의 조성으로 조액을 만들고 별도의 여과과정은 행하지 않았다).Table 3 shows the results of evaluating the physical properties of the dry film photoresist by varying the exposure dose (however, a crude liquid was prepared using the composition of Table 2 and no separate filtration process was performed).

고분자결합제Polymer binder 바인더 폴리머 Binder polymer 5050 광개시제Photoinitiator 벤조페논Benzophenone 2.02.0 4,4'-(비스디데틸아미노)벤조페논4,4 '-(bisdidecylamino) benzophenone 1.01.0 루코 크리스탈 바이올렛Luco Crystal Violet 3.03.0 톨루엔 술폰산 1 수화물Toluene Sulphonic Acid Monohydrate 0.50.5 다이아몬드 그린 GHDiamond Green GH 0.50.5 광중합성단량체Photopolymerizable monomer 9G9G 10.010.0 APG-400APG-400 10.010.0 BPE-500BPE-500 10..010..0 용매 menstruum 메틸에틸케톤Methyl ethyl ketone 13.013.0 루코 크리스탈 바이올렛 (4,4'-트리스(디메틸아미노)트리페닐메탄) :Hodogaya Chemical Co., Ltd 제품다이아몬드 그린 GH : Hodogaya Chemical Co., Ltd 제품9G (폴리에틸렌 글리콜 #400 디아크릴레이트) : 신나카무라 케미컬사 제품APG-400 (폴리프로필렌 글리콜 #400 디아크릴레이트) : 신나카무라 케미컬사 제품BPE-500 (2-2, 비스[4-(메타크릴옥시 폴리에톡시)페닐]프로판 : 신나카무라 케미컬사 제품Luco Crystal Violet (4,4'-tris (dimethylamino) triphenylmethane): Diamond Green GH from Hodogaya Chemical Co., Ltd: HG from Hodogaya Chemical Co., Ltd.9G (polyethylene glycol # 400 diacrylate): Shinnakamura APG-400 (Polypropylene glycol # 400 diacrylate) manufactured by Chemicals, Inc .: BPE-500 (2-2, bis [4- (methacryloxy polyethoxy) phenyl] propane: Shinnakamura Chemicals, Inc. product

노광량(mJ/㎠)Exposure amount (mJ / ㎠) 바인더 폴리머Binder polymer BP 1BP 1 BP 2BP 2 BP 3BP 3 감도 Sensitivity 2525 5.05.0 5.05.0 5.05.0 3535 6.06.0 6.06.0 6.06.0 4545 7.57.5 7.07.0 6.96.9 해상도 (μm)(Line/Space=1/1)Resolution (μm) (Line / Space = 1/1) 2525 4040 5050 4949 3535 5050 5656 5656 4545 6161 6363 6363 3535 3535 세선밀착력 (㎛) Fine wire adhesion (㎛) 2525 3535 3333 3030 3535 3030 2727 2626 4545 2525 - 필름두께는 30㎛이다. - 최소현상시간은 22초이다. - 감도는 Stouffer 21 단 step tablet을 이용하여 평가 - 현상시 조건 : Na2CO3농도 1wt%, 30 ℃, 스프레이 압력 1.5kg/㎠·sec Break Point 50%The film thickness is 30 μm. The minimum development time is 22 seconds. -Sensitivity was evaluated using Stouffer 21-stage step tablet-Condition during development: Na 2 CO 3 concentration 1wt%, 30 ℃, spray pressure 1.5kg / ㎠ · sec Break Point 50%

상기 표 3의 결과로부터, 호모게나이저를 이용한 중합법을 통해 얻어진 바인더 폴리머 BP 2, BP 3을 포함하는 경우 그렇지 않은 바인더 폴리머 BP 1을 사용한 경우에 비해서 보다 향상된 해상도를 보여주고 있음을 알 수 있다. From the results of Table 3, it can be seen that when the binder polymers BP 2 and BP 3 obtained through the polymerization method using a homogenizer shows a higher resolution than when using the binder polymer BP 1 which is not .

이상에서 상세히 설명한 바와 같이, 본 발명에 따라 바인더 폴리머 비드를 현탁중합하기 전에 호모게나이저를 통과시키는 경우 안정제의 사용량을 줄일 수 있게 되어 불순물로 인한 광산란을 줄일 수 있게 됨에 따라 결국 드라이필름 레지스트의 해상도를 향상시킬 수 있다. As described in detail above, when the homogenizer is passed through the binder polymer beads according to the present invention, the amount of stabilizer can be reduced, so that light scattering due to impurities can be reduced. Can improve.

Claims (2)

반응기에 이온교환수, 단량체, 가교제, 지용성 개시제 및 안정제로 이루어진 조액를 투입하여 현탁중합을 거쳐 UV 경화용 바인더 폴리머 비드를 제조하는 방법에 있어서, In a method of preparing a binder polymer beads for UV curing through suspension polymerization by introducing a crude liquid consisting of ion-exchanged water, a monomer, a crosslinking agent, a fat-soluble initiator and a stabilizer to the reactor, 현탁중합 이전에 상기 조액을 호모게나이저에 통과시키는 단계를 더 거치며 안정제를 전체 고형분 함량 기준으로 0.1∼3중량%로 사용하는 것을 특징으로 하는 UV 경화용 바인더 폴리머 비드의 제조방법.Passing the crude liquid through a homogenizer prior to suspension polymerization, and using a stabilizer of 0.1 to 3% by weight based on the total solids content, UV curing binder polymer beads production method. 제 1 항에 있어서, 호모게나이저의 사용압력은 1000∼5000psi인 것을 특징으로 하는 UV 경화용 바인더 폴리머 비드의 제조방법.The method of claim 1, wherein the homogenizer is used at a pressure of 1000 to 5000 psi.
KR1020040030889A 2004-05-03 2004-05-03 Preparation of uv curable agent by suspension polymerization KR20050105668A (en)

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