KR20050052599A - Optical recording medium - Google Patents
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- KR20050052599A KR20050052599A KR1020030085767A KR20030085767A KR20050052599A KR 20050052599 A KR20050052599 A KR 20050052599A KR 1020030085767 A KR1020030085767 A KR 1020030085767A KR 20030085767 A KR20030085767 A KR 20030085767A KR 20050052599 A KR20050052599 A KR 20050052599A
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/24018—Laminated discs
- G11B7/24024—Adhesion or bonding, e.g. specific adhesive layers
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
- G11B7/257—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
- G11B7/266—Sputtering or spin-coating layers
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
- G11B7/257—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
- G11B2007/25705—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
- G11B2007/25715—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials containing oxygen
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- Thermal Transfer Or Thermal Recording In General (AREA)
- Optical Record Carriers And Manufacture Thereof (AREA)
Abstract
레이저 빔의 분해능 이하 크기의 기록마크를 가지는 광기록매체가 개시되어 있다. Disclosed are an optical recording medium having recording marks having a size smaller than the resolution of a laser beam.
이 개시된 광기록매체는 정보재생장치로부터 입사된 빔의 분해능 이하 크기의 기록마크를 포함하는 것으로, 기판과; 이 기판 상에 형성되는 것으로, 금속산화물과, 이 금속산화물의 금속과 산소 사이의 결합 엔탈피 보다 높은 결합 엔탈피로 금속과 결합되는 첨가제를 구비하는 초해상층;을 포함하는 것을 특징으로 한다.The disclosed optical recording medium includes a recording mark having a size less than or equal to the resolution of a beam incident from an information reproducing apparatus; It is formed on the substrate, characterized in that it comprises a super-resolution layer having a metal oxide and an additive bonded to the metal with a bonding enthalpy higher than the bonding enthalpy between the metal and oxygen of the metal oxide.
Description
본 발명은 초해상 현상을 이용할 수 있는 구조의 정보저장매체에 관한 것으로서, 보다 상세하게는 재생을 반복하는 경우에도 안정적인 재생신호를 얻을 수 있도록 된 구조의 정보저장매체에 관한 것이다.The present invention relates to an information storage medium having a structure capable of using a super resolution phenomenon, and more particularly, to an information storage medium having a structure capable of obtaining a stable playback signal even when playback is repeated.
정보저장매체는 비접촉식으로 정보의 기록 재생을 수행하는 광픽업장치의 정보 저장매체로서 이용되는 것으로, 산업 발전과 더불어 저장되는 정보의 기록밀도가 높아질 것이 요구되고 있다.The information storage medium is used as an information storage medium of an optical pickup apparatus that performs recording and reproduction of information in a non-contact manner, and it is required to increase the recording density of information stored with industrial development.
이를 위하여, 레이저 빔의 분해능 이하 크기의 기록마크를 가지는 초해상 현상을 이용할 수 있는 광기록매체가 연구되고 있다.To this end, an optical recording medium capable of utilizing a super resolution phenomenon having a recording mark having a size smaller than the resolution of a laser beam has been studied.
이 초해상 현상을 이용한 정보저장매체는 입사빔에 의해 표면 플라즈몬(plasmon)이 발생되는 마스크층을 포함하는 것으로, 정보 재생시 마스크층에서 발생되는 표면 플라즈몬을 이용함으로써 고밀도 기록을 구현한다.The information storage medium using the super resolution phenomenon includes a mask layer in which surface plasmons are generated by the incident beam, and high density recording is realized by using surface plasmons generated in the mask layer during information reproduction.
예를 들어, 산화백금(PtOX)을 이용한 마스크층을 구비한 경우, 이 마스크층에 레이저 빔을 조사하면 이 마스크층을 구성하는 산화백금이 조사된 빔에 의해 백금(Pt)과 산소(O2)로 분해된다. 이 분해된 백금(Pt)에서 표면 플라즈몬이 발생되어 근접장(near field) 재생이 가능해진다. 따라서, 대물렌즈에 의해 광기록매체에 집속된 레이저 빔의 분해능 한계 보다 작은 크기의 기록마크에 대해서도 신호의 재생이 가능해진다.For example, when the mask layer using platinum oxide (PtO X ) is provided, when a laser beam is irradiated to this mask layer, platinum (Pt) and oxygen (O) are irradiated by the beam to which the platinum oxide which comprises this mask layer was irradiated. Decomposes into 2 ). Surface plasmons are generated from the decomposed platinum (Pt) to enable near field regeneration. Therefore, the signal can be reproduced even for recording marks having a size smaller than the resolution limit of the laser beam focused on the optical recording medium by the objective lens.
한편, 상기한 초해상 현상을 이용한 정보저장매체는 재생 가능한 신호대 잡음비(Carrier-to-Noise Noise: 이하 CNR 이라 함)를 얻을 수 있는 구성 및, 반복적인 재생시 재생신호의 열화를 방지하기 위한 구성에 대하여 구체화 되지 못하고 있는 실정이다.On the other hand, the information storage medium using the super-resolution phenomenon is a configuration that can obtain a carrier-to-noise noise (hereinafter referred to as CNR), and a configuration for preventing degradation of the playback signal during repeated playback The situation is not specified about.
따라서, 본 발명은 상기한 바와 같은 문제점을 감안하여 안출된 것으로서, 반복적인 재생을 수행하는 경우에도 재생신호가 열화되지 않도록 된 구조의 광기록매체를 제공하는데 그 목적이 있다.Accordingly, an object of the present invention is to provide an optical recording medium having a structure in which a reproduction signal is not degraded even when repetitive reproduction is performed in view of the above problems.
상기한 목적을 달성하기 위하여 본 발명은, 정보재생장치로부터 입사된 빔의 분해능 이하 크기의 기록마크를 포함하는 광기록매체에 있어서, 기판과; 상기 기판 상에 형성되는 것으로, 금속산화물과, 이 금속산화물의 금속과 산소 사이의 결합 엔탈피 보다 높은 결합 엔탈피로 금속과 결합되는 첨가제를 구비하는 초해상층;을 포함하는 것을 특징으로 한다.In order to achieve the above object, the present invention provides an optical recording medium comprising a recording mark having a size less than or equal to the resolution of a beam incident from an information reproducing apparatus, comprising: a substrate; And a super-resolution layer formed on the substrate, the super-resolution layer having a metal oxide and an additive bonded to the metal with a bonding enthalpy higher than the bonding enthalpy between the metal and oxygen of the metal oxide.
여기서, 상기 금속산화물은 산화금(AuOX), 산화팔라듐(PdOX), 산화백금(PtOX), 산화은(AgOX) 중에서 선택된 어느 하나의 재질로 이루어지고, 상기 첨가제는 질소(N2)인 것이 바람직하다.Here, the metal oxide is made of any one material selected from gold oxide (AuO X ), palladium oxide (PdO X ), platinum oxide (PtO X ), silver oxide (AgO X ), the additive is nitrogen (N 2 ) Is preferably.
또한, 본 발명은 정보재생장치로부터 입사된 빔의 분해능 이하 크기의 기록마크를 포함하는 광기록매체에 있어서, 기판과; 상기 기판 상에 형성된 제1유전체층과; 상기 제1유전체층 상에 형성되어 상기 기록마크의 기록을 보조하는 제1보조 기록층과; 상기 제1보조 기록층 상에 형성된 제2유전체층과; 상기 제2유전체층 상에 형성되는 것으로, 금속산화물과, 이 금속산화물의 금속과 산소 사이의 결합 엔탈피 보다 높은 결합 엔탈피로 금속과 결합되는 첨가제를 구비하는 초해상층과; 상기 초해상층 상에 형성된 제3유전체층과; 상기 제3유전체층 상에 형성되어 상기 초해상층 상에 대해 상기 기록마크의 기록을 보조하는 제2보조 기록층과; 상기 제2보조 기록층 상에 형성된 제4유전체층;을 포함하는 것을 특징으로 한다.In addition, the present invention provides an optical recording medium comprising a recording mark having a size less than or equal to the resolution of a beam incident from an information reproducing apparatus, comprising: a substrate; A first dielectric layer formed on the substrate; A first auxiliary recording layer formed on the first dielectric layer to assist recording of the recording mark; A second dielectric layer formed on the first auxiliary recording layer; A super resolution layer formed on the second dielectric layer, the metal oxide and an additive bonded to the metal with a bonding enthalpy higher than the bonding enthalpy between the metal and oxygen of the metal oxide; A third dielectric layer formed on the super resolution layer; A second auxiliary recording layer formed on the third dielectric layer and assisting recording of the recording mark on the super resolution layer; And a fourth dielectric layer formed on the second auxiliary recording layer.
여기서, 상기 첨가제는 질소(N2)이고, 상기 산소의 량에 비하여 0.1 내지 5.0 atomic % 의 함량비를 가지는 것이 바람직하다.Here, the additive is nitrogen (N 2 ), preferably having a content ratio of 0.1 to 5.0 atomic% relative to the amount of oxygen.
또한, 상기 제4유전체층 상에 형성되는 것으로, 상기 기판 상에 형성된 제1 내지 제4유전체층, 제1 및 제2기록 보조층 및, 상기 초해상층을 보호하는 커버층을 더 포함하는 것이 바람직하다.In addition, it is preferable that the first dielectric layer is formed on the fourth dielectric layer, and further includes first to fourth dielectric layers, first and second recording auxiliary layers, and a cover layer to protect the super resolution layer.
이하, 첨부된 도면들을 참조하면서 본 발명의 바람직한 실시예에 따른 광기록매체를 상세히 설명하기로 한다.Hereinafter, an optical recording medium according to a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings.
도 1은 본 발명의 실시예에 따른 광기록매체를 보인 개략적인 단면도이다.1 is a schematic cross-sectional view showing an optical recording medium according to an embodiment of the present invention.
도면을 참조하면, 본 실시예에 따른 광기록매체는 기판(11)과, 이 기판(11) 상에 순차로 형성된 제1유전체층(13), 제1기록 보조층(15), 제2유전체층(17), 초해상층(19), 제3유전체층(21), 제2기록 보조층(23) 및 제4유전체층(25)을 포함한다. 여기서, 제1 내지 제4유전체층(13)(17)(21)(25)은 히트 싱크의 역할을 하는 층으로, 본 발명의 필수적인 구성 요소는 아니며, 이 층들이 없는 경우에도 정보의 재생이 가능하다. 또한, 상기 제1 및 제2기록 보조층(15)(23)은 상기 초해상층(19)에 대해 기록마크의 기록을 보조하는 층으로, 본 발명의 필수적인 구성 요소는 아니며, 이 층들이 없는 경우에도 정보의 재생이 가능하다. Referring to the drawings, the optical recording medium according to the present embodiment includes a substrate 11, a first dielectric layer 13, a first recording auxiliary layer 15, and a second dielectric layer (sequentially formed on the substrate 11). 17), a super resolution layer 19, a third dielectric layer 21, a second recording auxiliary layer 23, and a fourth dielectric layer 25. Here, the first to fourth dielectric layers 13, 17, 21, and 25 are layers that serve as heat sinks, and are not essential components of the present invention, and information may be reproduced even when these layers are not present. Do. In addition, the first and second recording auxiliary layers 15 and 23 are layers for assisting recording of the recording mark with respect to the super-resolution layer 19, and are not an essential component of the present invention. Information can also be reproduced.
본 실시예에 따른 광기록매체는 상기 제4유전체층(25) 상에 상기 기판(11) 상에 형성된 층들을 보호하며, 입사빔이 투과되는 커버층(27)을 더 포함하는 것이 바람직하다.The optical recording medium according to the present embodiment preferably further includes a cover layer 27 which protects the layers formed on the substrate 11 on the fourth dielectric layer 25 and transmits incident beams.
상기 기판(11)은 폴리카보네이트(Polycarbonate), 폴리메틸메타아크릴레이트 (PMMA), 비정질 폴리올레핀(APO) 및 글래스 재질 중에서 선택된 어느 하나의 재질로 구성된다.The substrate 11 is made of any one material selected from polycarbonate, polymethyl methacrylate (PMMA), amorphous polyolefin (APO), and glass materials.
상기 제1 내지 제4유전체층(13)(17)(21)(25)은 히트싱크의 역할을 하는 것으로, 황화아연-이산화규소 화합물(ZnS-SiO2), 산화규소(SiOX), 질화규소(SiNX ) 등의 재질로 구성된다.The first to fourth dielectric layers 13, 17, 21, and 25 serve as heat sinks, and zinc sulfide-silicon dioxide compounds (ZnS-SiO 2 ), silicon oxides (SiO X ), and silicon nitrides ( SiN X ) and the like.
상기 제1 및 제2기록 보조층(15)(23)은 게르마늄-안티몬-테릴륨(Ge-Sb-Te)계 합금 또는 은-인듐-안티몬-테릴륨(Ag-In-Sb-Te)계 합금으로 구성된다.The first and second recording auxiliary layers 15 and 23 are made of germanium-antimony-terryllium (Ge-Sb-Te) alloy or silver-indium-antimony-teryllium (Ag-In-Sb-Te) -based alloy. It consists of an alloy.
상기 초해상층(19)은 입사빔의 파워에 따라 선택적으로 변형이 이루어지는 금속 산화물과, 이 금속산화물의 금속과 산소 사이의 결합 엔탈피 보다 높은 결합 엔탈피로 금속과 결합되는 첨가제를 구비한다. The super-resolution layer 19 includes a metal oxide that is selectively deformed according to the power of the incident beam, and an additive that is combined with the metal with a bonding enthalpy higher than the bonding enthalpy between the metal and oxygen of the metal oxide.
즉, 이 초해상층(19)은 기본적으로 산화금(AuOX), 산화팔라듐(PdOX), 산화백금(PtOX), 산화은(AgOX) 등으로 구성되는 것으로, 재생 파워의 빔을 조사하여 반복 재생시 재생신호의 CNR이 열화되지 않도록 하기 위한 방편으로 금속과 산소 사이의 결합 엔탈피 보다 높은 결합 엔탈피를 가지는 물질의 첨가제를 첨가한 것에 그 특징이 있다.In other words, the super-resolution layer 19 is basically composed of gold oxide (AuO X ), palladium oxide (PdO X ), platinum oxide (PtO X ), silver oxide (AgO X ), and the like. In order to prevent the CNR of the reproduced signal from deteriorating during repeated regeneration, an additive of a material having a binding enthalpy higher than that of metal and oxygen is added.
이 첨가제의 예로는 질소(N2)를 들 수 있으며, 이 경우 초해상층(19)은 AuOXNY, PdOXNY, PtOXNY, AgO XNY 화합물이 된다. 여기서, 상기 첨가제로서의 질소는 금속산화물을 이루는 산호의 량에 비하여 0.1 내지 5.0 atomic % 의 함량비를 가지는 것이 바람직하다.Examples of this additive include nitrogen (N 2 ), in which case the super-resolution layer 19 is made of AuO X N Y , PdO X N Y , PtO X N Y , AgO X N Y compounds. Here, the nitrogen as the additive preferably has a content ratio of 0.1 to 5.0 atomic% relative to the amount of the coral forming the metal oxide.
상기 초해상층(19)의 재질로 질소가 첨가된 산화백금(PtOXNY)을 선택한 경우를 예로 들어 설명하기로 한다.A case in which platinum oxide (PtO X N Y ) to which nitrogen is added as the material of the super resolution layer 19 is selected will be described as an example.
상기 초해상층(19)에 결합 엔탈피 이상의 에너지를 가지는 기록용 파워의 레이저 빔을 조사하면, 소정 광강도를 가지는 빔스폿이 형성된다. 이 빔스폿의 중심에서 그 강도가 가장 높고, 그 중심에서 멀어질수록 강도가 내려가는 분포를 가진다. When the super-resolution layer 19 is irradiated with a laser beam of a recording power having energy above the coupling enthalpy, a beam spot having a predetermined light intensity is formed. The intensity is the highest at the center of the beam spot, and the intensity decreases as it moves away from the center.
이때, 상기 초해상층(19)의 재질 특성에 따라 정해지는 결합 엔탈피 이상의강도를 가지는 부분에서 초해상층(19)을 포함한 제2 및 제3유전체층(17)(21)의 광학적 특성이 변한다.In this case, the optical properties of the second and third dielectric layers 17 and 21 including the super resolution layer 19 are changed in a portion having a strength higher than the bonding enthalpy determined by the material characteristics of the super resolution layer 19.
즉, 결합 엔탈피 이상의 강도를 가지는 부분에서, 질소가 첨가된 산화백금(PtOXNY)은 백금(Pt)과 산소 및 질소로 분리되면서, 부피 팽창되어 버블(bubble) 형상으로 부풀게 되어 박막 구조의 변형이 생긴다. 이 변형에 의해 대응되는 부분의 제2 및 제3유전체층(15)(21)도 변형되며 그 두께가 얇아진다. 이와 같은 구조적인 변형을 통하여 기록마크(B)가 형성되며, 이와 같이 형성된 기록마크(B)는 조사되는 레이저 빔이 통과한 후에도 그대로 유지하게 된다. 그 이외의 부분(A)은 PtOXNY 결합 상태를 유지하며, 부피가 팽창된 부분과의 광학적 특성 즉, 굴절률 또는 반사율을 달리한다.That is, in the portion having a strength above the bonding enthalpy, the platinum-added platinum oxide (PtO X N Y ) is separated into platinum (Pt), oxygen, and nitrogen, and is expanded in volume to swell into a bubble shape to form a thin film structure. Deformation occurs. By this deformation, the second and third dielectric layers 15 and 21 of the corresponding portions are also deformed and their thickness becomes thin. The recording mark B is formed through such a structural deformation, and the recording mark B thus formed is maintained even after the laser beam to be irradiated passes. The other portion (A) maintains the PtO X N Y bonded state, and differs in optical properties, that is, refractive index or reflectance, with the expanded portion.
상기한 초해상층(19)은 크게 두 가지 방법으로 형성된다. 즉, 초해상층이 PtOXNY인 경우를 예로 들어 살펴보면 다음과 같다.The super resolution layer 19 is formed in two ways. That is, the case where the super resolution layer is PtO X N Y is as follows.
첫째, 초해상층(19) 형성시, 스퍼터링 장비 내에 아르곤(Ar), 산소(O2) 가스와 함께 질소(N2) 가스를 주입한 상태에서 백금(Pt)을 반응성 스퍼터링(reactive sputtering)함으로써, PtOXNY 화합물이 되도록 한다.First, when forming the super-resolution layer 19, by reactive sputtering of platinum (Pt) in the state of injecting nitrogen (N 2 ) gas with argon (Ar), oxygen (O 2 ) gas in the sputtering equipment, PtO X N Y compound.
둘째, 스퍼터링을 위한 진공 챔버 내에 질소(N2) 가스를 주입하여, 이 질소 가스를 흡착시킨 후 PtOX를 성막하여, 성막시 PtOXNY 화합물이 되도록 한다.Second, nitrogen (N 2 ) gas is injected into the vacuum chamber for sputtering, and after adsorbing this nitrogen gas, PtO X is formed to form a PtO X N Y compound during film formation.
여기서, 질소를 첨가하지 않은 경우의 초해상층의 예로는 PtOX를 들 수 있으며, 이 경우 결합 엔탈피는 390 KJ/mole 이다. 반면, 백금-질소 화합물(PtNY)의 결합 엔탈피는 940 KJ/mole이다.Here, an example of the super resolution layer in which no nitrogen is added is PtO X , where the binding enthalpy is 390 KJ / mole. In contrast, the binding enthalpy of the platinum-nitrogen compound (PtN Y ) is 940 KJ / mole.
이 결과로부터 초해상층의 재질로서 PtOX 등의 금속 산화물 대신 N2를 더 첨가하여 PtOXNY를 선택하는 경우 결합 엔탈피가 증가하여, 분해시키기 어려워진다. 이에 따라 1.2 mW 이항의 재생파워로 반복 재생하는 경우에도, A 부분의 변형이 발생되지 않아 안정적인 CNR 값을 얻을 수 있다.From this result, in the case of selecting PtO X N Y by further adding N 2 instead of metal oxides such as PtO X as the material of the super-resolution layer, the bond enthalpy increases, making it difficult to decompose. Accordingly, even in the case of repetitive reproduction with 1.2 mW binomial regeneration power, the deformation of the A portion does not occur, thereby obtaining a stable CNR value.
상기한 바와 같이 구성된 본 발명의 실시예에 따른 광기록매체에 있어서, 분해능 이하의 기록마크에 대하여 신호 재생이 가능한지 여부를 살펴보면 다음과 같다. In the optical recording medium according to the embodiment of the present invention configured as described above, whether or not a signal can be reproduced for a recording mark having a resolution lower than is as follows.
이를 위하여, 본 발명의 실시예에 따른 광기록매체의 조건을 충족하는 실험용 광기록매체를 마련하였다. 이 광기록매체는 1.1 mm 두께와 0.32㎛ 트랙피치의 그루브를 가지는 폴리카보네이트 재질의 기판 상에, 85 nm 두께의 ZnS-SiO2로 된 제1유전체층, 15 nm 두께의 Ge-Sb-Te로 된 제1기록 보조층, 25 nm 두께의 ZnS-SiO2로 된 제2유전체층, 3.5 nm 두께의 PtOXNY 재질로 된 초해상층, 25 nm 두께의 ZnS-SiO2로 된 제3유전체층, 15 nm 두께의 Ge-Sb-Te로 된 제2기록 보조층, 95 nm 두께의 ZnS-SiO2로 된 제4유전체층을 스퍼터링 공정을 통하여 순차적으로 증착 형성한 후, 스핀 코팅법으로 0.1 mm 두께의 커버층을 형성하였다. 이 광기록매체를 파장 405 nm, 개구수 NA 0.85의 광픽업장치를 사용하여 실험하였으며, 이때의 재생 분해능은 119 nm가 된다.To this end, an experimental optical recording medium that satisfies the conditions of the optical recording medium according to an embodiment of the present invention was prepared. The optical recording medium was a first dielectric layer of 85 nm thick ZnS-SiO 2 , a 15 nm thick Ge-Sb-Te, on a polycarbonate substrate having a thickness of 1.1 mm and a track pitch of 0.32 μm. first recording auxiliary layer, a to the super-resolution layer, a 25 nm thick ZnS-SiO 2 to PtO X N Y material of the second dielectric layer, 3.5 nm thick with a of 25 nm thick ZnS-SiO 2, the third dielectric layer, 15 nm A second recording auxiliary layer of Ge-Sb-Te thickness and a fourth dielectric layer of ZnS-SiO 2 having a thickness of 95 nm were sequentially deposited by a sputtering process, followed by spin coating to form a 0.1 mm thick cover layer. Formed. The optical recording medium was tested using an optical pickup device having a wavelength of 405 nm and a numerical aperture of NA 0.85, and the reproduction resolution at this time was 119 nm.
도 2는 상기한 조건의 광기록매체에 있어서, 기록마크 길이 변화에 따른 CNR 특성을 나타낸 그래프이다. 도면을 살펴보면, 재생 분해능인 119 nm 보다 작은 50 nm 길이의 기록마크에 대해서도 약 40 dB의 CNR을 얻을 수 있음을 알 수 있다.2 is a graph showing the CNR characteristics according to the change of the recording mark length in the optical recording medium under the above conditions. Referring to the figure, it can be seen that a CNR of about 40 dB can be obtained even for a recording mark having a length of 50 nm smaller than the reproduction resolution of 119 nm.
도 3은 본 발명의 실시예에 따른 광기록매체와 비교예에 따른 광기록매체에 대하여, 재생반복횟수에 따른 CNR 특성 변화를 나타낸 그래프이다. 본 발명의 실시예와 비교예에 따른 광기록매체는 도 2의 그래프를 얻는데 이용되는 광기록매체와 동일한 층구조를 가지는 광기록매체에 대해 수행하였다. 다만, 비교예는 초해상층의 재질로 N2 성분이 배제된 PtOX 금속 산화물을 선택하였다.3 is a graph showing a change in CNR characteristics according to the number of reproduction repetitions of an optical recording medium according to an embodiment of the present invention and an optical recording medium according to a comparative example. The optical recording medium according to the embodiment and the comparative example of the present invention was performed for the optical recording medium having the same layer structure as the optical recording medium used to obtain the graph of FIG. However, in the comparative example, PtO X metal oxide in which the N 2 component was excluded as the material of the super resolution layer was selected.
여기서, 광기록매체를 5 m/sec의 선속도로 회전시키면서, 300 nm 크기의 마크길이를 가지는 신호에 대해 재생파워 Pr가 1.2 mW인 레이저 빔을 이용하여 반복적으로 재생하면서 CNR의 변화를 측정하였다.Here, the change in the CNR is measured while the optical recording medium is rotated at a linear speed of 5 m / sec and repeatedly reproduced using a laser beam having a reproducing power P r of 1.2 mW for a signal having a mark length of 300 nm. It was.
비교예를 살펴보면, 대략 12,000번 정도 반복 재생을 수행한 결과 CNR 값이 1.2 dB 만큼 저하됨을 알 수 있다. 반면, 실시예를 살펴보면 12,000번 이상 반복 재생을 수행한 경우에도 초기의 CNR 값과 동일한 CNR 값을 유지함을 알 수 있다.Looking at the comparative example, it can be seen that as a result of repeated playback about 12,000 times, the CNR value is reduced by 1.2 dB. On the other hand, it can be seen that the embodiment maintains the same CNR value as that of the initial CNR value even when repeated playback of 12,000 or more times.
따라서, 상기한 바와 같이 구성된 본 발명의 실시예에 따른 광기록매체는 결합 엔탈피 값이 상대적으로 높은 재질의 첨가제를 첨가함으로써 재생 반복 횟수가 증가하더라도 CNR 값이 저하되지 않음으로써, 안정성을 높일 수 있다. 또한, 300nm 크기의 기록마크를 기준으로 살펴볼 때, 첨가제를 추가하기 전에 비하여 CNR 값을 향상시킬 수 있다.Therefore, in the optical recording medium according to the embodiment of the present invention configured as described above, even if the number of reproduction repetitions increases by adding an additive of a material having a relatively high binding enthalpy value, the CNR value does not decrease, thereby increasing stability. . In addition, when looking at the recording mark having a size of 300nm, the CNR value can be improved compared to before adding the additive.
도 1은 본 발명의 실시예에 따른 광기록매체를 보인 개략적인 단면도.1 is a schematic cross-sectional view showing an optical recording medium according to an embodiment of the present invention.
도 2는 본 발명의 실시예에 따른 광기록매체의 기록마크 길이 변화에 따른 CNR 특성을 나타낸 그래프.2 is a graph showing CNR characteristics according to changes in recording mark length of an optical recording medium according to an embodiment of the present invention.
도 3은 본 발명의 실시예에 따른 광기록매체와 비교예에 따른 광기록매체에 대하여, 재생반복횟수에 따른 CNR 특성 변화를 나타낸 그래프.3 is a graph showing a change in CNR characteristics according to the number of reproduction repetitions of an optical recording medium according to an embodiment of the present invention and an optical recording medium according to a comparative example.
* 도면의 주요 부분에 대한 부호의 설명 *Explanation of symbols on the main parts of the drawings
11...기판 13...제1유전체층11 substrate 13 first dielectric layer
15...제1보조 기록층 17...제2유전체층15 ... first auxiliary recording layer 17 ... second dielectric layer
19...초해상층 21...제3유전체층19.Super-Resolution Layer 21 ... 3rd Dielectric Layer
23...제2보조 기록층 25...제4유전체층23 second secondary recording layer 25 fourth dielectric layer
27...커버층27 ... cover layer
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