KR20050051415A - Mapping ellipsometer - Google Patents

Abstract

The present invention relates to a mapping ellipsometer, and more particularly, an elliptical analyzer head capable of measuring the thickness of a large area specimen such as a large LCD and a PDP, or an optical or microstructural uniformity distribution of the surface of the specimen. It is about a mapping ellipsometer. It is an object of the present invention to provide an elliptical analyzer head which integrates an optical component of an elliptical analyzer into a small module, and a mapping elliptical analyzer for measuring a specimen while moving by attaching it to an x-y moving stage. In order to achieve the above object, the mapping ellipsometer according to the present invention is equipped with a specimen mounting support for supporting a specimen, an xy moving stage installed vertically spaced apart from the commercial mount, and an inspection of the specimen mounted on the xy moving stage. An integrated elliptical analyzer head movable along two crossing axes parallel to the surface, and an elliptical analyzer head driving unit connected to and driving the elliptical analyzer head, wherein the elliptical analyzer head includes a light emitting unit and a light receiving unit.

Description

 Mapping Ellipsometer {MAPPING ELLIPSOMETER}

The present invention relates to a mapping ellipsometer, and more particularly, an elliptical analyzer head capable of measuring the thickness of a large area specimen such as a large LCD and a PDP, or an optical or microstructural uniformity distribution of the surface of the specimen. It is about a mapping ellipsometer.

Ellipsometry has been used since the end of the 19th century. The ellipsometric technique uses the property that the polarization state of light changes according to the refractive index or thickness of the medium after the light incident on the material is reflected or transmitted through the surface of the medium. It is an analysis method that investigates the optical properties of a material. Specifically, it refers to an optical technology that extracts the thickness of an optical property or a thin film in the case of light incident on the specimen after analyzing the polarization state of the reflected light. The equipment for this analysis is called an ellipsometer. The term ellipse can be guessed as the linearly polarized light is changed to elliptical polarization after reflection on the surface of the medium.

Elliptical interpreters are therefore classified into nulling, photometric and interferometric types. In particular, the photometric type is further subdivided into phase shift type and rotating element type for rotating the polarizer and / or analyzer. Among these, the elliptic analyzer of the rotating element type is most commonly used because of its relatively simple structure and accuracy of data.

1A and 1B are schematic perspective views of optical components mounted on an optical stand of a conventional general mapping ellipsometer and a mapping ellipsometer, respectively. The elliptical interpreter of FIG. 1A includes a stationary optical bench 102 and a movable specimen mounting table 104 supporting the specimen 105 and an x-y moving stage. The xy moving stage is attached to the top of the specimen mounting stage, the y-axis moving stage 101 for moving the specimen mounting 104 to the y-axis and the y-axis moving stage is attached to the top of the x-axis moving stage to move it to the x-axis 100. In order to measure the specimen, such a conventional ellipsometer analyzes the specimen 105 on the specimen mounting table 104 mounted on the x-y moving stage and then moves the specimen 105 by the x-y moving stage. As optical components mounted on the optical bench 102 fixed as the specimen moves, data of each part of the specimen is detected to measure an optical or microstructure homogeneity distribution of the surface. That is, in such a conventional elliptical analyzer, the optical bench 102 is fixed, and the homogeneity or thickness of the test surface 105 placed on the specimen mounting table 104 is moved while the specimen mounting table 104 is moved on the xy moving stage. Is measured. Arrows indicated by the dotted lines on the specimen mounting table 104 indicate the relative movement directions of the specimen mounting table 104 relative to the y-axis moving stage, and arrows indicated by the dotted lines on the y-axis moving stage 101 indicate the relative movement directions about the x-axis moving stage. Indicates the relative movement direction of the y-axis movement stage. The arrows indicated by the solid line between the optical bench 102 and the specimen 105 indicate the direction of movement of light used in the elliptical analyzer.

Meanwhile, FIG. 1B is a schematic view of optical components installed on the optical bench 102 of the elliptical analyzer, and polarized light 107 for injecting light into the specimen 105 to reflect light to the specimen 105. The polarization analysis unit 108 receives the changed polarization state and passes it in a specific direction, and the light detection unit 109 converts light into an electrical signal to detect the brightness of the light passing through the polarization analysis unit. An optical component is mounted on the optical bench 102 of FIG. 1A consisting of two arms. Outside the optical bench 102, a controller 112 for operating the light source power supply 111 for the light source unit 106, the polarization generating unit 107 and the polarization analysis unit 108, and the light detection unit 109 A controller 113 for operating the controller is provided. In addition, the polarization generator 107 and the polarization analysis unit 108 are usually composed of a polarizer and / or a compensator and drive (not shown) to drive each of these parts for position control for calibration before measurement. Each motor is installed.

Looking at the driving of the device, when the light emitted from the light source unit 106 becomes a light having a polarization state through the polarization generating unit 107 and enters the specimen 105, the polarized light reflected from the specimen 105 is polarized After the analyzer 108 passes only the light polarized in a specific direction, the light is detected by the light detector 109 for each wavelength, and the detected signal is analyzed by a computer (not shown) to analyze the waveform. The optical information you have is analyzed.

In order to simplify the description, assuming that the specimen 105 is the same size as the specimen mounting table 104, the moving range of the specimen mounting table in the general elliptical analyzer will be described with reference to FIG. Since the optical bench 102 of the elliptical analyzer is fixed, the point 122 at which the light from the light enters the specimen is fixed, so that the specimen mounting table equipped with the specimen 105 can be used to map all surfaces of the specimen. 104 must move all of the space 124 indicated by the dotted lines to map all surfaces of the specimen. That is, it can be seen that the area 124 to be secured in order to map the entire surface is four times the area of the specimen 105.

That is, to measure the point ⓐ of the specimen, the specimen must be moved to the right so that ⓐ is in coordinates (x ₁ , -y ₁ ). Thus, point ⓑ is moved to the end of the dotted line (x ₃ , -y ₁ ). Assuming that the specimen and the specimen holder are square, 10 cm wide and 100 cm in size, the area of the dotted line on which the specimen mount moves to map all surfaces of the specimen is (2 x 10) ² to 400 Since it becomes ㎠, it can be seen that it is four times larger than the size of the specimen.

In addition, as shown in FIG. 1A, the mounting portion 103 of the fixed optical bench 102 is mounted to the main body of the elliptical analyzer at a position outside the moving range of the specimen mounting table 104 to avoid interference with the specimen mounting table 104. It must be fixed. Therefore, as the specimen grows, there is a problem in that the elliptical solver becomes large in overall.

In particular, the elliptical analyzer of the general configuration has disadvantages in many aspects as the size of the specimen is gradually enlarged, such as a large area display. This is summarized as follows. First, when the specimen is placed on the x-y moving stage and mapped, there must be a work space corresponding to four times the size of the specimen in front, rear, left, and right to measure the entire specimen. Second, the larger the specimen, the larger the elliptical analyzer itself. Third, when measuring a large area specimen in an elliptical analyzer, a large driving force is required due to the load of the specimen when moving the specimen mount. For example, a large xy is required because the heavy and large specimen must be moved each time the measuring point is changed. Moving stage is required. In particular, when used in some of the processes in the semiconductor process, etc., the space occupied by the elliptical analyzer equipment and the space occupied by other process equipment need to be adjusted to each other. Becomes a problem. Fourth, there is a risk that the specimen is damaged due to the frequent movement of the specimen holder.

An object of the present invention is to solve the problems of the prior art as described above, an elliptical analyzer head that integrates the optical component of the elliptical analyzer into a small module, and the mapping elliptical analyzer for measuring the specimen while moving it attached to the xy moving stage To provide.

In order to achieve the above object, the mapping ellipsometer according to the present invention, in the mapping ellipsometer, a specimen mounting table for supporting the specimen, an xy moving stage installed vertically spaced apart from the commercial mount, and the xy moving stage An elliptical analyzer head mounted on the elliptical analyzer head and connected to the elliptical analyzer head, the elliptical analyzer head control unit connected to the elliptical analyzer head and controlling the elliptical analyzer head. It includes a light receiving unit.

The specimen mounting stand may be fixed, the light emitting unit may include a light source unit and a polarization generating unit, and the light receiving unit may include a polarization analysis unit and a light detection unit. The width of the elliptical analyzer head may be reduced by including at least one optical path modulator on the light path connected to the light source, the polarization generator, the test surface of the specimen, the polarization analyzer, and the light detector. The optical path modulating means may include a mirror, and the optical path modulating means may be disposed between the light source unit and the polarization generating unit and between the polarization analyzing unit and the light detecting unit, respectively. The xy stage may be moved vertically with respect to the specimen mounting table, and the elliptical analyzer head may include a polarization modulator for changing the polarization characteristics of light by driving the polarization generator and the polarization analyzer. The modulator includes one rotation driving means, and the rotation driving means may be mechanically interlocked and driven to rotate so that the polarization generating portion and the polarization analysis portion have the same rotation angle. The light source unit and the light detection unit may include an external light source, a light detection sensor, and an optical fiber connected thereto, and the light source unit may include a short wavelength lamp, a halogen lamp, a xenon discharge lamp, or a heavy water reactor lamp. The elliptical analyzer head may be arranged in a plurality of array forms, or may include a plurality of light emitting portion and light receiving portion pairs, and the pair may be arranged in an array form. The elliptic analyzer head may include a reflectance measuring head. The light detector may include a single light detector for short wavelength measurement, a multi-channel detector including a CCD or photodiode array for spectroscopic measurements.

The present invention can be applied to most elliptical solvers, but in the embodiments to be described below, the rotating element type elliptical solver which is most used at present will be described as an example.

Hereinafter, with reference to the accompanying drawings will be described the structure and operation of the mapping ellipsometer according to the present invention.

Schematics of the mapping elliptic solver and the head used therein according to the present invention are shown in Figs. The mapping ellipsometer according to the present invention shown in FIG. 3 is a specimen mounting table 304 for supporting a specimen and an xy moving stage installed vertically spaced apart from the specimen mounting plate 304, and an elliptical analyzer head 302 mounted thereto. It includes. The xy moving stage 300 is a y-axis moving stage 301 fixedly mounted to the stage mounting unit 303 fixed to the specimen mounting plate 304 and the x-axis moving stage 300 mounted to the y-axis moving stage in a y-axis movable stage. It includes. At this time, the elliptical analyzer head 302 is mounted on the x-axis moving stage 300 to be movable on the x-axis. The elliptical analyzer head 302 is provided with a light emitting part for receiving light incident on the test surface of the test piece and a light receiving part for receiving light reflected from the light emitting part. On the other hand, although the specimen mounting plate 304 on which the specimen 305 is placed is shown as being fixed in FIG. 3, the specimen mounting plate does not necessarily need to be fixed.

In order to measure the specimen 305, in the ellipsometer according to the present invention, the specimen 305 is placed on the specimen holder 304, and then the head 302 is moved to the x-axis and the y-axis by an x-y stage. As the head moves, data of each part of the specimen is detected in the light emitting part and the light receiving part mounted in the head, thereby measuring the optical or microstructural homogeneity distribution of the surface. That is, in the elliptical analyzer according to the present invention, the uniformity or thickness of the test surface of the specimen 305 placed on the specimen mounting plate 304 is moved while the head 302 mounted on the xy moving stage moves on the x-axis and the y-axis. Is measured. Arrows indicated by dotted lines on the right side of the head 302 indicate the relative movement directions of the ellipsometer head 302 relative to the x-axis movement stage 300, and arrows indicated by the dotted lines on the x-axis movement stage 300 indicate y-axis movement. The relative movement direction of the x-axis moving stage 300 with respect to the stage 301 is shown. The solid arrows indicate the direction of light movement in the ellipsometer.

On the other hand, the structure of the elliptical analyzer head according to the present invention will be described with reference to FIG. Inside the elliptical analyzer head 302 (not shown) attached to the xy moving stage, a light source unit 306 for irradiating light, and the light emitted from the light source unit 306 while rotating and polarized at a constant angular rate of the specimen 305 The polarization generating unit 307 for injecting light into the light, the polarization analysis unit 308 for receiving the polarized light reflected by the specimen 305 and the polarization state is changed again and passing it in a specific direction, and the light passing through the polarization analysis unit In order to detect the brightness of the light detector 309 for converting light into an electrical signal is mounted. The electrical signal is quantified by an analog-to-digital converter of an interface (not shown) and input to the computer 546 to analyze the waveform to obtain the optical properties of the specimen 305. In this case, the polarization generator 307 and the polarization analyzer 308 may include a polarization modulator (not shown) for use when it is necessary to change the polarization state of the light somewhat in the measurement process. The polarization generator 307 or the polarization analyzer 308 may be configured solely with a polarizer for linearly polarizing light or may be combined with a polarizer using a compensator as a polarization modulator for changing the phase of light. In this embodiment, a compensator will be used as the polarization modulator.

As the light source unit 306, a short wavelength may be used, and a halogen lamp, a xenon discharge lamp, or a heavy water reactor lamp may be used as a light source for spectroscopic measurement. In addition, a single detector may be used as the light detection sensor of the photodetector 309, and a multichannel detector such as a charge coupled device (CCD) or a photodiode array may be used for spectroscopic measurements.

The light source 306 and the light detector 309 are typically mounted in an elliptical analyzer with a light source and a light detection sensor. However, unlike the light source unit 306 and the light detector 309 as shown in FIG. 7, the light source 306a and the light detection sensor 309a provided in the head controller 503 and the optical fibers 306b and 309b connected thereto. ) May be included. That is, the light source 306a and the light detection sensor 309a are mounted in the elliptical analyzer head control unit 503 and connected to one ends of the optical fibers 306b and 309b, respectively, and the other ends of the optical fibers 306b and 309b are shown in FIG. The light source portion 306 and the photodetector portion 309 of the elliptical analyzer head 303 shown may be positioned.

When the xy moving stage places the ellipsometer analyzer 302 at the point where the specimen is to be measured, as shown in FIG. 4, unpolarized light from the light source unit 306 of the head passes through the polarization generator 307. Then polarized light. This light is reflected back from the test surface of the specimen 305, the polarization state is changed. The new polarized light is transmitted to the computer 546 while passing through the polarization analyzer 308 and the photodetector 309, and the result is analyzed by the multilayer thin film model to calculate the optical properties or the thickness of the thin film. can do. After this process, the x-y moving stage is again driven to move the ellipsometer head to the next measurement point, and the desired part of the specimen can be mapped by repeating the above process.

The moving range of the mapping ellipsometer head of the present invention will be described with reference to FIGS. 5 and 6. Since the mapping ellipsometer head is moving and measuring the specimen, it is possible to measure the specimen surface while moving in an area slightly larger than the specimen area. That is, since the specimen is fixed and the head is moving, as shown in FIG. 5, when the point 126 where light is incident on the specimen is moved, the moving range of the head may be drawn along the area of the square specimen shown in the drawing. . Therefore, in the prior art, the moving range of the elliptical analyzer according to the present invention is at least four times larger than the size of the specimen mounting size, and the width of the elliptical analyzer head is half the width of the elliptical analyzer head. All parts of the specimen can be measured.

In detail with reference to Figure 6 compared to the prior art by calculating the moving range in consideration of the width of the head as follows. For example, suppose that the specimen and the specimen holder are square in the same size, the length of one side is 10 cm, and the head width is 1 cm. When the head is moved to measure one side of the specimen, the total working distance of that side is 11 cm as shown. Therefore, the area is 121 cm in the square of 11 and the space occupied by the movement of the head in the present invention requires only about 30% of the movement range occupied by the specimen mount in the prior art.

For this purpose, the size of the head must be smaller than that of the specimen and the specimen mounting table. When measuring large specimens with more than a few meters on one side, an integrated head that can accommodate most of the corresponding optical parts of a general large elliptical analyzer can be manufactured. It can be useful. Therefore, the present invention provides a small head manufactured in consideration of the miniaturization of optical parts, the minimization of the number of parts to be used, or the adjustment of the arrangement of optical parts.

First, in order to integrate most of the optical components included in the elliptical analyzer into the head, miniaturization of the optical components is required. This miniaturization reduces the moving range of the head. Moreover, the weight reduction as well as the miniaturization of the head may reduce the load applied to the x-y moving stage.

When the light output of the light source unit is reduced, the size of the lamp used is usually reduced in size, and thus the size of the elliptical analyzer head according to the present invention can be reduced in size and weight. Approaching the ellipsometer head close to the specimen (e.g., about 2 mm) shortens the optical path between the ellipsometer head and the specimen, reducing the light output of the light source. As a light source, a lamp having an output of 200 watts used in a conventional elliptic analyzer can be replaced with a lamp of, for example, about 5 watts in this case. Figure 8a is a light path of the light reflected from the specimen when measuring the specimen using a conventional ellipsometer head, Figure 8b is the light reflected from the specimen when measuring the specimen with the ellipsometer head using the lamp of the present embodiment While showing the optical path of the elliptical analyzer of the present invention shown in Figure 8b it can be seen that the path of light between the head is much shorter. In particular, as an ellipsometer head, a reflection probe as shown in FIGS. 9A and 9B may be used. An optical fiber 945 is used as shown in FIG. 9A, or light is vertically applied to a narrow area as shown in FIG. 9B. It is also used to analyze more precise and curved surface areas because they are incident and reflected and measured at. Meanwhile, in order to maintain the distance between the elliptical analyzer head and the specimen at 2 mm, for example, the elliptic analyzer head 302 may be configured to be movable vertically (in the z-axis direction) with respect to the specimen mounting plate 304. . By adjusting the position of the head 302 vertically in this manner, it is possible to prevent the specimen 305 from interfering with the head 302 when the specimen 305 is loaded / unloaded into the specimen mount 304. . In addition, in order to reduce the size of the space occupied by the optical components in the elliptical analyzer head, as described above, the light source unit and the light detection sensor mounted on the elliptical analyzer head control unit 503 with the light source unit 306 and the light detection unit 309 and these When the optical fiber 545 is connected to the head, the head can be made smaller and lighter (see FIG. 7).

Next, in order to downsize the ellipsometer head, the number of parts used in the head must be minimized.

As an example to which the present invention can be applied, when using a rotating element type elliptic analyzer, three kinds of polarization generators 307, polarization analyzer 308, and polarization modulator (not shown) There is a need for optical components related to polarization. As a polarization modulator, a compensator is generally used, and the polarization generator or the polarizer may be configured as a polarizer or a compensator or a combination thereof. On the other hand, the elliptical analyzer requires calibration before the test of the specimen and for this purpose, position control is required for both the polarizer and the compensator, so that the driving motor is connected to the polarizer and the compensator, respectively. A motor connected to the polarizer is mounted to find the degree of tilt of the specimen surface and take it into account for the measurement. In general ellipsometers using small specimens, it is difficult to find them if the inclination of the specimens is small, so it is necessary to find them by rotating two polarizers. However, when measuring a large specimen, even if the inclination of the large specimen is small, since the height change of the front, rear, left and right ends of the specimen is large, the inclination can be easily corrected by the naked eye. The need for a motor to be reduced is reduced. Therefore, since the elliptical analyzer head of the present invention mainly maps large specimens, the head can be further miniaturized by connecting a motor only to the compensator.

Next, in order to miniaturize the elliptical analyzer head, it is important to appropriately adjust the arrangement of the optical components included therein to reduce the space occupied by the optical components in the head.

In the conventional elliptical analyzer, the arrangement of the optical components has a structure of a light source unit-a polarization generator-a test surface of a specimen-a polarization analyzer (compensator-polarizer)-a photodetector in a linear arrangement according to the optical component sequence as shown in FIG. 10A. In order to reduce the width of the head, the optical path modulating means may be included on the optical path to change the optical path to reduce the width of the head. Referring to FIG. 10B, as a light path modulating means, for example, a mirror or a prism may be used, which may redirect the incident light from the light source to the polarization generator. On the other hand, the light incident on the specimen through the polarization generating unit is reflected back through the compensator and the polarizer of the polarization analysis unit, the incident light from the polarization analysis unit can be redirected to the photodetector by the mirror. At this time, one or more mirrors may be used to further reduce the width of the head. For example, one mirror is provided between the light source and the polarization generating part, and the other is between the polarization analyzing part and the light detecting part, and the light path is positioned 90 ° so that the mirror surface is positioned at 45 ° in the direction of light propagation. Can be changed to In other words, the light incident from the light source to the mirror is reflected to the polarization generator, and the light reflected from the specimen and passed through the polarization analyzer is reflected from the mirror to be incident on the photodetector.

The height of the head may be increased even if the mirror enters the light source connection part and the photodetector connection part, but the width is rather narrow, so that the ellipsometer head moves on the specimen and reduces the moving range.

Embodiments of the present invention have been described using a general rotary element type ellipsometer, in addition to it can be applied to various types of elliptical analyzers, such as a phase modulation type, a null type. FIG. 11 shows a bottom portion of an elliptical analyzer head 602 having a plurality of light emitting portions 603 and light receiving portions 601 arranged in one head 602. At this time, three sets and two sets of the light receiving portion 601 and the light emitting portion 603 are arranged in the elliptical analyzer head 602 vertically and horizontally so that the physical quantities at six positions on the specimen 605 can be measured at one time. The elliptic analyzer head 602 is moved up and down and left and right by a predetermined distance to measure physical quantities at the following six positions. Similarly, the shape of an array of light emitting parts and light receiving parts mounted on an elliptical analyzer head, or the shape of an elliptical analyzer head may be modified to a suitable shape according to the size of a specimen to be measured or a measuring method.

Alternatively, the head itself may be mounted in the form of a plurality of arrays on the x-y moving stage. That is, the elliptical analyzer head can be mounted in a one-dimensional or two-dimensional array.

The mapping ellipsometer according to the present invention firstly, the work space is reduced by about 30% or more compared with the conventional ellipsometer, which is particularly reduced in the measurement of large area specimens. Second, since only the elliptical analyzer head which has been miniaturized instead of the specimen mount needs to be moved, the size of the elliptical analyzer with the size of the xy moving stage decreases, and the driving force for moving the head is considerably reduced than the driving force for moving the specimen mount. do. Third, since there is no movement of the specimen during the measurement of the specimen, there is no fear of damage of the specimen, so that the x-y moving stage driving speed can be increased. Thus, a gain that increases the mapping speed by that amount occurs. In addition, the elliptical analyzer head according to the present invention is provided in a smaller size by miniaturizing the optical parts, minimizing the number of parts to be used, or by adjusting the arrangement of the optical parts to increase the effect of the present invention to greatly improve the productivity and energy consumption The production cost can be reduced by saving.

1A and 1B are a perspective view of a conventional mapping ellipsometer and a schematic view of an optical component thereof.

Figure 2 is a moving range of the specimen mounting plate of the conventional mapping ellipsometer.

Figure 3 is a perspective view of the mapping ellipsometer according to the present invention.

4 is a schematic view of one example of an integration head used in FIG. 3.

5 is a conceptual diagram of the moving range of the mapping ellipsometer head according to the present invention.

6 is a moving range of the mapping ellipsometer head according to the present invention.

7 is a schematic view of another example of an integrated head according to the present invention.

8A and 8B are schematic diagrams of refraction of light on a specimen surface in a conventional elliptical analyzer and an elliptic analyzer of the present invention, respectively.

9A and 9B show an example of a reflectance measuring head.

Figure 10a optical path in the conventional ellipsometer.

10B is a schematic diagram of optical paths and modulation in an elliptical analyzer of the present invention.

11 is a bottom view of another example of an elliptical analyzer head of the present invention.

<Explanation of symbols for the main parts of the drawings>

100, 300: x-axis moving stage

101, 301: y-axis movement stage

102: Fixed elliptic analyzer optical bench

103: mounting portion of the optical bench

104: Removable Specimen Mount

105, 305, 605, 905: Psalms

106, 306: light source unit

107, 307: polarization generator

108, 308: polarization analysis unit

109, 309: photodetector

111: light source power supply

112: controller of the polarization generating unit and the polarization analysis unit

113: controller of the light detector

122, 126: light position

124: moving range of specimen mount

302: ellipsometer head

303: stage mount

304: Fixed Specimen Mount

306a: light source

309a: photodetector

503: elliptical analyzer head drive unit

945: optical fiber

546: computer

601: light receiver

602 multi-ellipse head

603: light emitting unit

906: light source

909: detector

910: beam splitter

Claims (15)

In the mapping ellipsometer, A specimen mount for supporting the specimen, X-y moving stage is installed vertically spaced apart from the commercial mount, An elliptical analyzer head mounted on the x-y moving stage and movable along two intersecting axes parallel to the test surface of the specimen; It is connected to the ellipsometer analyzer elliptical analyzer head control unit for controlling it, The elliptical analyzer head mapping ellipsometer, characterized in that it comprises a light emitting portion and a light receiving portion. The elliptic analyzer of claim 1, wherein the specimen mounting station is fixed. The ellipsometer of claim 1 or 2, wherein the light emitting unit comprises a light source unit and a polarization generating unit, and the light receiving unit comprises a polarization analyzer and a light detector. The elliptic analyzer head of claim 3, wherein the width of the elliptical analyzer is reduced by including at least one optical path modulator on an optical path connected to the light source, the polarization generator, the test surface of the specimen, the polarization analyzer, and the light detector. Mapping ellipsometer. The elliptic analyzer of claim 4, wherein the optical path modulator comprises a mirror. The elliptic analyzer of claim 4, wherein the optical path modulator is disposed between the light source unit and the polarization generator, and between the polarization analyzer and the light detector. The ellipsometer of claim 1 or 2, wherein the x-y stage is vertically movable with respect to the specimen mounting table. The elliptic analyzer of claim 3, wherein the elliptical analyzer head includes a polarization modulator for driving the polarization generator or the polarization analyzer to change polarization characteristics of light. The polarization modulator of claim 8, wherein the polarization modulator includes one rotation driving means, and the polarization generating unit and the polarization interpreting unit are rotationally driven so as to have the same rotation angle with each other by the rotation driving means. Mapping elliptic solver. The mapping elliptic analyzer of claim 3, wherein the light source unit and the light detection unit include a light source provided outside, a light detection sensor, and an optical fiber connected thereto. The elliptic analyzer of claim 3, wherein the light source unit comprises a short wavelength lamp, a halogen lamp, a xenon discharge lamp, or a middle channel lamp. The elliptic analyzer of claim 1 or 2, wherein a plurality of elliptic analyzer heads are arranged in an array form. The elliptic analyzer of claim 1 or 2, wherein the elliptical analyzer head comprises a plurality of light emitting units and light receiving unit pairs, and the pairs are arranged in an array form. The ellipsometer according to claim 1 or 2, wherein the ellipsometer head comprises a reflectance measuring head. The ellipsometer according to claim 3, wherein the photodetector comprises a single photodetector for short wavelength measurement, a multi-channel detector composed of a CCD or photodiode array for spectroscopic measurement.