KR20050041215A - Electrostatic microactuator - Google Patents

Abstract

The present invention is different from the conventional comb-type actuator in which the width of the comb is constant, there is a difference in form that the end of the comb is wide. When the large portions of the opposite combs face each other, the spacing between the combs becomes narrow, so that the electrostatic force increases in inverse proportion to this. Therefore, the direction and size of the electrostatic force vary according to the position of the comb teeth. When the constant power driver having this characteristic is combined with a spring having two stable positions, stable digital driving can be obtained. Therefore, there is no need for a fixed voltage electrode or a second signal electrode, so there is an advantage in that bidirectional driving is possible with only two electrodes.

Description

Electrostatic Microactuator

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical switch used in a wavelength division multiplex (WDM) optical communication system, and more particularly, to a structure of a driver and an optical element for applying to a matrixed optical element. will be.

In general, wavelength division multiplexing (WDM) is a method in which a plurality of channels are simultaneously transmitted using light of different wavelengths in a communication using an optical waveguide. In this case, a single mode optical waveguide commonly used uses two types of optical wavelength ranges of 1.3 μm and 1.55 μm with low attenuation. The apparatus for implementing the wavelength division multiplexing method is called a wavelength division multiplexer, and functions as an optical coupler. That is, this is a device that divides one optical waveguide channel by the wavelength of light so that it can be used as a plurality of communication paths. For example, it separates 1.5um wavelength from 1.55um wavelength and inputs two separate signals with different wavelengths and transmits them through one optical waveguide. The receiver receives the integrated signal and separates it into two signals.

There are two mechanisms for the function of the wavelength division multiplexer. One uses the principle that the refraction and reflection vary according to the wavelength, and the other uses a separation method using a fixed or variable filter. In other words, one wavelength passes through the filter, but the other reflects, or vice versa. At this time, an optical add / drop multiplexer is used as the wavelength division multiplexer. In the optical regulator, a process of mechanically driving an optical element such as a mirror to move a light path, that is, a MEMS (blocking or changing an optical path) to move a structure installed on a substrate. A MEMS type optical element such as a technology or an element made by such a process technology is often used.

The MEMS type optical device has been studied a lot because of the low insertion loss, crosstalk, and the like. The optical switch of the optical device is basically divided into a unit channel and a multi-channel optical switch, such as 1 x 2 configuration and 2 x 2. In addition, in the construction of the optical device, it is an optical waveguide that a conductor material is manufactured in the form of a conduit or a rod and used as a light transmission path.

The main method of optical devices, such as optical switches, is to move the mirror to change the direction of light. Conventional drivers for the movement of microstructures, such as mirrors, include comb-type drivers or parallel plate drivers using electrostatic force. Since the constant power driver returns to its original position by the reaction force of the spring supporting the driver when the electric signal is blocked, there is a disadvantage in that the driving state is maintained only when the voltage is continuously applied. On the other hand, there is a micro driver that maintains the current position even when the power is cut off using a spring having two stable positions. However, in order to change the position of this driver, three electrodes, a ground electrode, a fixed voltage electrode, and a signal electrode, are required.

The present invention has been made in view of the problems of the prior art, and relates to the structure of a driver and an optical element for application to one, array or matrixed optical switch. The wide comb, like a shovel, moves forward or backward, depending on the position of the comb. The driver can be driven in both directions using one signal electrode in addition to the ground electrode in combination with a spring structure having two stable positions.

Other objects, specific advantages, and novel features of the present invention will become more apparent from the following detailed description and preferred embodiments associated with the accompanying drawings.

Next, the electrostatic micro driver according to the present invention will be described with reference to the accompanying drawings. In the following description of the present invention, detailed descriptions of related known functions or configurations will be omitted when it is determined that the detailed descriptions may unnecessarily obscure the subject matter of the present invention.

1 is a conceptual diagram of a structure of a conventional optical switch.

As shown in FIG. 1, in a conventional optical switch, four optical waveguides 11 facing vertically, one mirror 12 having a reflecting surface of 45 degrees, and a spring 14 and a driver supporting the mirror 10 are provided. It consists of). As shown in the left conceptual diagram of FIG. 1, a mirror enters a light path and reflects light to enter an optical waveguide positioned at a 90 degree angle with the optical waveguide from which the light is emitted. In FIG. 1 and the following figures, only one light path 13 is shown for convenience, and the other light travels and reflects on the same principle as the light path 13 shown. On the other hand, when the mirror exits from the path of light as shown in the right conceptual diagram of FIG. 1, since the light does not meet the mirror, the light enters the opposite waveguide of the light waveguide from which the light is emitted.

As shown in Fig. 1, the main method of the optical switch is to move the mirror to change the direction of light. The driver mainly used to move the mirror is a comb-type driver or a parallel plate driver using a constant power. The conventional driver may maintain the driving state only by continuously applying an electric signal. This is because when the electric signal is cut off, it is returned to its original position by the reaction force of the spring supporting the actuator.

2 is a structural diagram of an optical switch employing a spring having two stable positions.

The spring structure having two stable positions has the advantage that the position can be maintained even if the power is cut off. However, actuators employing this spring require a large number of electrodes. This is because, in addition to the ground electrode, two signal electrodes are required to transmit signals for driving and returning to the home position. However, an optical switch used in an array or matrix form should use only a small number of signal electrodes. Therefore, a suitable driver is required.

3 is a conceptual diagram of a reaction force according to a position of a spring having two stable positions and a conceptual diagram of an electric signal applied for driving.

When the spring deforms from one stable position to another, the magnitude of the spring reaction force at each position of the spring appears as shown in the upper conceptual diagram of FIG. 3. Where + and-indicate the direction of the reaction force. Accordingly, in order to displace the spring to another stable state, as shown in the lower conceptual diagram of FIG. 3, the signal may be blocked until the point where the reaction force is 0 is slightly passed. To move in the opposite direction, you must also give a signal to apply the opposite force until the point where the reaction force is zero. In the related art, the researchers prepared and operated a pair of comb teeth as shown in FIG. 2 to give a force in the return direction.

4 is a comb of a conventional constant power driver.

The constant power driver is driven in the (41) direction when a voltage is applied between the two electrodes. At this time, the magnitude of the electrostatic force changes in inverse proportion to the spacing 31 between the comb teeth, it is hardly affected by the width 36 of the comb teeth. However, if the section in which the comb teeth can be placed is constant, the larger the sum of the width 36 of the comb teeth and the spacing 31 between the comb teeth, the smaller the number of comb teeth.

5 is a shovel-shaped comb teeth in accordance with the present invention.

The shovel-shaped comb has a narrow width 37 and a wide width 38 of the shovel-shaped comb as shown in FIG. When the comb teeth are on the outside as shown in the upper conceptual diagram of FIG. 5, the electrostatic force is generated in the (41) direction and proceeds to the (41) direction. That is, the electrostatic force in the (41) direction is generated in inverse proportion to the narrow gap 32 between the shovel combs. However, when the comb teeth are inward as shown in the lower conceptual diagram of FIG. 5, electrostatic force occurs in the (42) direction in inverse proportion to the narrow spacing 32 between the comb teeth, but the electrostatic force inversely proportional to the wide spacing 33 in the shovel-shaped comb teeth. Get disturbed. That is, the electrostatic force inversely proportional to the wide spacing 33 in the shovel comb provides the force to proceed in the opposite direction to the (42) direction.

Thus, two stable springs, a mobile comb composed of a series of combs composed of wide and narrow sections, a fixed comb composed of a series of combs composed of a wide section and a narrow section, a spring and a mobile comb Connecting part for connecting the narrow part to transfer power generated between the comb teeth to the spring, fixing part for fixing the narrow part of the spring and the fixing comb that is not in contact with the connecting part, 2 for applying power to the fixing comb and moving comb. It is possible to manufacture a constant power driver, characterized in that consisting of a power supply having a number of electrodes. The driver is characterized by a pulsed input signal that the connection alternately reciprocates between two stable positions.

In the following description, the constant power driver is referred to as a constant power driver having a shovel-shaped comb.

6 is the magnitude of the electrostatic force generated according to the wide width of the shovel-shaped comb teeth according to the present invention.

If the section where the comb teeth can be placed as shown in Figure 6 is constant, when the comb proceeds from the outside to the inside decreases in inverse proportion to the width of the comb teeth. This is because the number of comb teeth in a certain section decreases, and the electrostatic force is proportional to the number of comb teeth when the interval between comb teeth is constant. However, as shown in FIG. 6, when the wide width becomes less than or equal to the constant value, the force in the return direction has a negative value. This means that the electrostatic force acts in the driving direction. Also, as the width increases, the constant power does not continuously increase, but decreases after the constant power reaches its maximum value. The wide width value with the maximum electrostatic force is determined by the narrow width and narrow spacing of the comb teeth.

7 is a conceptual diagram illustrating a driving principle of a spring having two stable positions in the present invention.

The impact response of the spring with two stable positions can be divided into two types according to the magnitude of the impact, as shown in the upper conceptual diagram of FIG. 7. First, when the impact applied to the spring is small, impulse (impact) response characteristics below the critical force are shown as shown in (56), and the stable position of the spring does not change. On the other hand, when the shock applied to the spring is large, the impulse (shock) response characteristic 57 of the critical force or more is exhibited, and the displacement movement of the second stable position 58 appears.

When the driver proceeds from the outside to the inward as in the upper conceptual diagram of FIG. 5, the electrostatic force 62 occurring at the shovel-shaped comb changes as approximately 62 as shown in the central conceptual diagram of FIG. 7. Because the electrostatic force generated between the comb teeth is caused by the change of the counter area between the comb teeth, as the comb teeth progress toward (41), the increase in the counter area between the comb teeth becomes smaller. When the comb passes over a wide part of the comb, it generates a force in the opposite direction of travel. If this force is greater than the reaction force of the spring indicated by the dotted line as shown in the upper conceptual diagram of Fig. 7, the stable state of the spring can be changed. As shown in the lower conceptual diagram of FIG. 7, the pulse-type voltage from one electrode has positive (+) and negative (-) forces depending on the position of the spring, and sequentially stabilizes the spring. Change.

8 to 15 are examples of the constant power driver having a shovel-shaped comb proposed in the present invention. 8 is a simulation of the magnitude of the electrostatic force according to the relative position between two comb teeth according to the finite element method. The comb teeth are 4μm narrow and 49μm long, 25μm wide and 38μm long. The interval when the wide width of the comb teeth intersects is 3 m. The total number of comb teeth is 300 pairs, which is an analysis result when a driving voltage of 40V is applied. As shown in the figure, when voltage is applied, positive electrostatic force is generated until the comb teeth move about 40μm from the initial position, and when the relative displacement is more than 40μm, positive electrostatic force occurs. It can be seen that power is generated. At this time, the magnitude of the maximum positive constant power is about 110 μN and the magnitude of the maximum negative constant power is about -60 μN.

9 is a simulation result of an example of a spring structure having two stable positions. The spring structure has 16kN / m total horizontal stiffness and 800kNm total rotational stiffness. The upper conceptual diagram of FIG. 9 shows the magnitude of the strain energy stored in the spring structure at each displacement position, and the lower conceptual diagram of FIG. 9 shows the magnitude of the force that must be applied to the spring structure to maintain any displacement. As shown in the figure, force should be applied in the direction parallel to the displacement movement direction of the spring until the displacement movement of about 38μm appears, but to maintain the displacement state of 38μm or more, it should be applied in the opposite direction to the displacement movement direction. Can be. At this time, the force required for the displacement movement should be applied by the external driver, and it can be seen from the upper conceptual diagram of FIG. 9 that the second energy stable position appears at 65 μm as the displacement increases from the initial position.

In this case, a general comb-type constant-power driver may be used as a driver for increasing the displacement of the spring structure. In this case, at least three or more electrodes are required to enable both forward driving and backward driving. However, when using the electromotive force driver having a shovel-shaped comb proposed by the present invention as a driver of the spring structure can be expected a number of advantages. First, both electrodes can be driven forward and backward. In addition, since the magnitude of the electrostatic force obtained from the shovel-shaped electrostatic force driver is similar to the magnitude of the force according to the displacement required to drive the spring structure, the structure has to be turned on and off at an appropriate moment. The advantage is that the magnitude of the transient response can be reduced.

Figure 10 shows the voltage of the pulse type applied to the constant power driver having a shovel-shaped comb proposed in the present invention. As shown in FIG. 10, when the voltage is applied to the same electrode for t0 seconds, forward driving is performed, and when the voltage is applied for t1 second again in the next pulse, backward driving is performed. At this time, t0 and t1 cannot use arbitrary values, and as shown in FIGS. 1 and 2, an appropriate value should be used according to the relationship between displacement and force of the spring power structure and the constant power driver having a shovel-shaped comb. do.

FIG. 11 is a transient response response analysis result for forward driving when a damping coefficient of the spring structure is assumed to be 0.0002 Nsec / m and t0 is 5msec. 11 is a conceptual diagram of the displacement and the velocity with time. The lower three conceptual diagrams of Fig. 11 show the magnitude of the constant power (Fy_spade) generated by the constant power driver with a shovel-shaped comb at each time, the magnitude of the resistive force (Fy_reaction) of the spring structure due to the increased displacement, and from these two forces. This figure shows the magnitude of the obtained effective force (Fy_net). As shown in the upper two conceptual diagrams of FIG. 11, the displacement increases with time, but during the t0 seconds when voltage is applied, the displacement of the spring structure is not the second energy stable position obtained in FIG. 9, but Fy_spade and Fy_reaction. You can see that the force is converging to the equilibrium position. If no voltage is applied after t0, the spring structure once again undergoes a transient and eventually converges to the second energy stable position, 65 μm.

12 is an analysis result for the case of driving backward from the second energy stable position with respect to the same spring structure and t1 of 5 msec. In the case of the backward drive in FIG. 10, the displacement movement does not appear to the initial energy stable position even though the magnitude of the force required is smaller than that of the forward drive. As shown in FIG. 8, the constant power driver with the shovel-shaped comb teeth has an energy instability. This is because it has a large amount of constant power in the vicinity of 40 μm. Therefore, since the spring structure has increased displacement in the reverse direction and Fy_net has a very large value near the energy instability point, the spring force is in a position where both forces of Fy_spade and Fy_reaction are in equilibrium as in the forward driving of FIG. You can see that it is converging. When no voltage is applied after t1, the spring structure goes through another transient state and eventually converges to the second energy stable position, 65 μm.

Therefore, in order to drive a spring structure having two energy stable positions with a constant power driver having a shovel-shaped comb proposed in the present invention, both t0 and t1 should have appropriate values. However, as shown in FIG. 8, the electrostatic force having a shovel-shaped comb has an asymmetrical structure with respect to the displacement, and the spring structure of FIG. 9 also has an asymmetrical magnitude of the force required for the forward drive and the reverse drive. The t0 and t1 needed for forward and reverse drive respectively have different values. In the case of this example, t0 in the forward drive should be 0.23 msec or more, and t1 in the reverse drive should have a value between 0.4 msec and 0.53 msec. 13 and 14 show the analysis results when both t0 and t1 are 0.465 msec, which is an intermediate value between 0.4 msec and 0.53 msec.

FIG. 15 compares the displacements occurring when the shovel-shaped comb-type constant power driver and the general comb-type constant-power driver proposed by the present invention are used in a spring drive body having two stable positions. The general comb-type constant power driver is driven by continuous voltage application instead of the pulse type voltage application method, and it is an analysis result obtained by assuming that the maximum force in the forward direction of the comb-type constant power driver is 110 μN. As shown in the figure, in the degree of overshoot occurring in the transient state, the value of the general comb-type constant power driver is more than twice that of the shovel-shaped comb-type constant power driver proposed in the present invention. Therefore, it can be seen that the driving can be more stable.

The present invention is different from the conventional comb-type actuator in which the width of the comb is constant, there is a difference in form that the end of the comb is wide. When the large portions of the opposite combs face each other, the spacing between the combs becomes narrow, so that the electrostatic force increases in inverse proportion to this. Therefore, the direction and size of the electrostatic force vary according to the position of the comb teeth. When the constant power driver having this characteristic is combined with a spring having two stable positions, stable digital driving can be obtained. Therefore, there is no need for a fixed voltage electrode or a second signal electrode, so there is an advantage in that bidirectional driving is possible with only two electrodes.

In the following description, a shovel-shaped comb-type constant-power driver and a spring having two stable positions include a shovel-shaped comb-type actuator having a feature that the drive body can be stably positioned with two electrodes only by two electrodes. The constant power is referred to as two stable drivers.

However, the area of time required for the present invention to change the stable position of two shovel-shaped comb-type electrostatic stable drivers is not unique. It causes the following. When the microstructure is moved by the actuator of the present invention and the electrostatic force is cut off, the microstructure moves to a stable position in a direction that minimizes the reaction force of the spring. The time overshoots are constant depending on the structure and surrounding factors, but the number of overshoots beyond the transient state depends on the size and time of the input electrostatic force. That is, when the magnitude of the input electrostatic force becomes the minimum force necessary to move from the first stable position to the second stable position to the first stable position, the overshoot is unique in each driving step. Therefore, if this overshooter applies voltage for a time exceeding the transient state, the stable position changes. However, when the electrostatic force is so large that the electrostatic force is applied during the time of moving from the first stable position to the second stable position beyond the transient state to the second stable position by the overshoot and again to the first stable position by the overshoot, the first stable position To the side. In addition, if the electrostatic force is interrupted when the time is longer and moves to the second stable position beyond the transient state again, it is settled toward the second stable position. With this principle, the number of zones of time moving from the first stable position to the second stable position or from the second stable position to the first stable position is equal to the number of overshoots that can exceed the transient state.

On the other hand, the magnitude of the electrostatic force is smaller than the force for deforming to the first stable position after moving from the first stable position to the second stable position where the shovel-shaped comb-type electrostatic two stable actuators are located during manufacture. A range in which the signal voltage is applied for a time outside the time region of t1 (less than 0.4 msec in the above embodiment) even when the electrostatic force is large so as not to move from the second position to the first stable position instead of the manufacturing position. It can be utilized as a constant power driver having a driving area in.

In addition, the force for moving from the first stable position to the second stable position is satisfied with the electrostatic force generated by the driver and moved to the second stable position, and then the first stable position from the second stable position. It can be utilized as a thermoelastic actuator having a driving region in the range that does not move to.

In addition, when moving from the first stable position to the second stable position, the driving region is moved within a range that does not move from the second stable position to the first stable position after moving with an external force such as physical, chemical, or magnetic. The branch can be utilized as a thermoelastic actuator or the like.

In addition, when moving from the first stable position to the second stable position, when moving to the first stable position from the second stable position after moving to an external force such as physical, chemical, magnetic, etc. You can adopt a way to make a change.

In addition, the driving direction of the shovel-shaped comb-type electrostatic two stable driver is not limited to the horizontal plane direction of the portion supporting the driver, it can be applied in the vertical direction.

16 is a schematic view of an optical switch employing a shovel-shaped comb-type electrostatic two-stable actuator according to the present invention.

FIG. 16 shows four vertically facing optical waveguides 11, one mirror 12 with a reflecting surface of 45 degrees, and a spring 15 bearing two stable positions and a shovel-shaped comb teeth that bear the mirrors. The optical switch is configured by the power driver 40. By applying a signal to the driver of the present invention to allow the mirror 12 to enter the intersection of the light path, it is possible to change the light path as shown in the left and right conceptual diagram of FIG.

Thus, two shovel-shaped static power two-stable actuators, two to four optical waveguides facing each other directly or through several mirrors, are moved by a shovel-shaped comb-type static power two-stable actuators facing each other. And it is possible to manufacture an optical switch, characterized in that composed of a mirror for changing the path of light.

In addition, the optical switch can be manufactured by mixing the optical switch and using the matrix in the form of 1 x N or M x N (where M and N are natural numbers).

17 is an optical filter structure diagram employing a shovel-shaped comb-type electrostatic two-stable actuator according to the present invention.

As shown in FIG. 17, the multilayer thin film 81 that transmits or reflects a signal having a specific wavelength may pass between the optical waveguides 11 facing each other by a constant power driver having a shovel-shaped comb. As shown in the left conceptual diagram of FIG. 17, when the multilayer thin film 81 is removed from the optical path, signals of all wavelengths are transmitted between the optical waveguides 11. However, as shown in the conceptual diagram on the right side of FIG. 17, only signals having a specific wavelength are transmitted within a predetermined wavelength region according to the characteristics of the multilayer thin film 81, and the remaining signals reflect. Or vice versa, it can be used to remove only signals of a specific wavelength.

Thus, two optical waveguides facing each other directly or through several mirrors are multi-layered to control the wavelength of light transmitted and reflected by two stabilizer-driven comb-type electrostatic stable drivers in the space where the optical waveguides face each other. It is possible to manufacture an optical filter comprising a thin film.

In addition, the optical filter may be manufactured by mixing the above optical filters and using them in a matrix form of 1 x N or M x N (where M and N are natural numbers).

Fig. 18 is a structural diagram of an optical attenuator employing a shovel-shaped comb-type electrostatic two stable driver according to the present invention.

As shown in FIG. 18, light may be reflected or blocked between the optical waveguides facing the blocking unit 91 for adjusting the intensity of light transmitted between the optical waveguides 11. As shown in the left conceptual diagram of FIG. 18, when the blocking unit 91 is omitted from the optical path, all signals are transmitted between the optical waveguides 11. However, as shown in the conceptual diagram on the right side of FIG. 18, only a certain amount of light is transmitted through the optical path, and the remaining light is not transmitted, thereby adjusting the amount of light transmitted between the two optical waveguides.

Thus, two shovel-shaped constant-power stable drivers, two optical waveguides facing each other directly or through several mirrors, are moved by a shovel-shaped comb-type constant-power two-stable actuators facing each other. Light attenuator, characterized in that consisting of a mirror or shutter to adjust the intensity of the transmitted light

In addition, the optical attenuator can be manufactured by mixing the above optical attenuators and using them in a matrix form of 1 x N or M x N (where M and N are natural numbers).

On the other hand, the optical element characterized by mixing two or more types of said optical switch, optical filter, and optical attenuator can be used.

Although the present invention has been described in connection with the above-mentioned preferred embodiments, it is possible to make various modifications or variations without departing from the spirit and scope of the invention.

According to the present invention as described above, a structure of a driver and an optical element for applying to an array or matrixed optical switch has been proposed. The present invention has the characteristic that the direction and the size of the electrostatic force vary according to the position of the comb teeth by the shape difference that the end of the comb teeth is wide. When the constant power driver having this characteristic is combined with a spring having two stable positions, stable digital driving can be obtained. Therefore, there is no need for a fixed voltage electrode or a second signal electrode, so there is an advantage in that bidirectional driving is possible with only two electrodes. Although the present invention has been described in connection with the above-mentioned preferred embodiments, it is possible to make various modifications or variations without departing from the spirit and scope of the invention. Accordingly, the appended claims will cover such modifications and variations as fall within the spirit of the invention.

1 is a conceptual diagram related to a structure of a conventional optical switch;

2 is a structural diagram of an optical switch employing a spring having two stable positions;

3 is a conceptual diagram of a reaction force according to the position of the spring having two stable positions and a conceptual diagram of the electric signal applied for driving;

4 is a comb teeth of a conventional constant power driver

5 is a shovel-shaped comb in accordance with the present invention

Figure 6 is the magnitude of the electrostatic force generated according to the wide width of the shovel-shaped comb teeth according to the present invention

7 is a conceptual view showing a driving principle for changing the position of the spring having two stable positions in the present invention

8 is an example of a constant power driver having a shovel-shaped comb proposed in the present invention, which simulates and analyzes the magnitude of electrostatic power according to a relative position between two comb teeth.

9 is a simulation result of an example of a spring structure having two stable positions

10 is an applied voltage in the form of a pulse applied to a constant power driver having a shovel-shaped comb proposed in the present invention

Fig. 11 shows the transient response response analysis results for the forward drive when t0 is 5 msec assuming the damping coefficient of the spring structure is 0.0002 Nsec / m.

FIG. 12 is an analysis result for the case of reversing driving from the second energy stable position for the same spring structure as in FIG. 11 and t1 of 5 msec.

 Fig. 13 shows the analysis results when the input signal time t0 is 0.465 msec in the forward drive.

Fig. 14 shows the analysis results when the input signal time t1 is 0.465 msec in the case of reverse driving;

15 is a comparison of the displacements appearing when using a shovel-shaped comb-type constant-power driver and a general comb-type constant-power driver proposed in the present invention in the spring drive body having two stable positions,

16 is a schematic view of an optical switch employing a shovel-shaped comb-type electrostatic two-stable driver according to the present invention,

17 is an optical filter structure diagram employing a shovel-shaped comb-type electrostatic two stable driver according to the present invention,

Fig. 18 is a structural diagram of an optical attenuator employing a shovel-shaped comb-type electrostatic two stable driver according to the present invention.

<Description of the code | symbol about the principal part of drawing>

10: conventional constant power driver

  11: optical waveguide

12: conventional mirror

13: light path

14: common spring

15: spring with two stable positions

        16: light path

17: Side-by-side optical waveguide

18: An optical waveguide in which the position is adjusted so that the distance between the cross sections is constant.

20: 0 electrode 0 (usually ground electrode)

21 electrode 1

22: electrode 2

31: spacing between combs

32: Narrow spacing between shovel combs

33: wide spacing in the shovel

36: width of comb teeth

37: narrow width of the shovel

38: wide width of the shovel

40: constant power driver with shovel-shaped comb teeth

41: force in driving direction

42: force in the return direction

51: location

52: reaction force of the spring

53: constant power

54: voltage

55: time

56: impulse (shock) response characteristics below the critical force

57: impulse (shock) response characteristics above the critical force

58: second stable position

61: spring reaction force according to position

62: electrostatic force generated from shovel-shaped combs

71: change in electrostatic power during driving

72: change in electrostatic force on return

81: multilayer thin film

91: blocking unit

Claims (7)

Two stable springs, Mobile comb composed of a series of combs composed of wide and narrow sections, Fixed comb composed of a series of combs composed of wide and narrow sections, A connection part for connecting the spring and the narrow part of the moving comb to transfer the power generated between the comb teeth to the spring, Fixing part for fixing a part of the spring which is not in contact with the connecting part and a narrow part of the fixing comb, Constant power driver, characterized in that consisting of a power supply unit having two electrodes for applying power to the fixed comb and mobile comb The constant power driver of claim 1, 2-4 optical waveguides facing each other directly or through several mirrors, Shovel-shaped comb-type constant-power actuator in the space facing the optical waveguide, Optical switch, characterized by a mirror for changing the path of light and moving by a spring having two stable positions The optical switch of claim 2, wherein the optical switch is mixed and used in a matrix form. The constant power driver of claim 1, Two optical waveguides facing each other directly or through several mirrors, An optical attenuator comprising a mirror or a shutter for adjusting the intensity of light transmitted by the constant power driver of claim 1 in a space facing the optical waveguide. An optical attenuator, wherein the optical attenuator of claim 4 is used in a matrix form. The constant power driver of claim 1, Two optical waveguides facing each other directly or through several mirrors, Optical filter comprising a multi-layered thin film for controlling the wavelength of the light transmitted or reflected by the first constant power driver in the space facing the optical waveguide An optical filter, wherein the optical filters of claim 6 are mixed and used in a matrix form.