KR20050005141A - Method for generating oxygen using zeolite and apparatus for executing the same method - Google Patents

Abstract

PURPOSE: To provide a method and apparatus for generating high purity oxygen simply and conveniently using an adsorbent, a method for highly concentrating zeolite to obtain oxygen of high purity, and an adsorption machine into which zeolite is highly concentrated to produce oxygen of high purity. CONSTITUTION: The apparatus(10) for generating oxygen using zeolite comprises a compressor(20) for sucking in an external air; a first direction control valve(40) operated such that air flown in from the compressor is alternately supplied in two directions; two adsorption machines(50,60) in which highly concentrated zeolite is installed, into which air passing through the first direction control valve is alternately flown, and from which oxygen of high purity is alternately discharged; an orifice(70) installed on a passageway through which oxygen discharged from the adsorption machine is sent to an other adsorption machine from which oxygen is not discharged; and a second direction control valve(80) for discharging oxygen of high purity to the outside by opening a passageway connected to an adsorption machine from which oxygen is discharged in the two adsorption machines and closing a passageway connected to the other adsorption machine.

Description

Oxygen generation method and apparatus using zeolite {METHOD FOR GENERATING OXYGEN USING ZEOLITE AND APPARATUS FOR EXECUTING THE SAME METHOD}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an oxygen generator, and more particularly, to an oxygen generator for producing high purity oxygen.

At present, high purity oxygen gas is rapidly used in biotechnology, medical and semiconductor fields. Conventionally, high purity oxygen gas has been produced through chemical methods. There are many such methods, but many methods of pyrolyzing chemicals (KMnO ₄ , KClO ₄ ) are widely used. However, these chemical methods are complex and can lead to environmental problems during production.

As a method of producing oxygen, there are a method of using an adsorbent (Pressure Swing Adsorption (PSA)) and a method of separating oxygen using a gas separation membrane in addition to the chemical method. The method using the gas separation membrane is simple, but the PSA oxygen generator is able to obtain higher purity oxygen, so the use of the PSA method is increasing. Adsorption is the adsorption of molecules in a gas or solution onto a solid surface. The solid material that receives adsorption is called an adsorbent. PSA is a method of producing oxygen using this property of the adsorbent, and mainly uses a zeolite (excellent nitrogen adsorption) as the adsorbent. The conventional oxygen generator of the PSA system includes an adsorber filled with zeolite, a compressor for supplying air to the adsorber, and a plurality of valves for controlling gas flow. External air enters the adsorber by the compressor. The gas (mostly nitrogen) in the air entering the adsorber is adsorbed to the zeolite. Oxygen separated from the rest of the gas, such as nitrogen, exits the adsorber and is stored in the storage tank. The gas adsorbed on the zeolite is separated from the zeolite through the desorption process and discharged to the outside of the adsorber. PSA oxygen generator produces oxygen by repeating the adsorption and desorption processes. However, the PSA method using the adsorbent also has a limitation in obtaining high purity oxygen gas.

It is an object of the present invention to provide a method and apparatus for producing high purity oxygen using an adsorbent. It is another object of the present invention to provide a method for high integration of zeolites to obtain high purity oxygen. It is yet another object of the present invention to provide an adsorber in which zeolite is highly integrated.

1 is an overall configuration diagram of an oxygen generator according to an embodiment of the present invention, (a) shows the operation when the oxygen is generated in the first adsorber, (b) is the oxygen generated in the second adsorber Drawing showing operation when

Figure 2 is an exploded perspective view of the adsorber of Figure 1

FIG. 3 is a cut-away view of the housing such that the inside of the adsorber of FIG. 2 is visible.

Figure 4 (a) is a view showing an embodiment of the method of integrating zeolite in a cylindrical container, (b) is a graph showing an experimental example according to the method shown in (a)

Figure 5 (a) is a view showing another embodiment of the method of integrating zeolite in a cylindrical container, (b) is a graph showing an experimental example according to the method shown in (a)

Figure 6 (a) is a view showing another embodiment of the method of integrating zeolite in a cylindrical container, (b) is a graph showing an experimental example according to the method shown in (a)

<Description of the symbols for the main parts of the drawings>

10: oxygen generator 20: compressor

30: first filter 40: first direction control valve

50: first adsorber 52: housing

54: first adsorber filter 54a: second adsorber filter

56: first elastic member 56a: second elastic member

58: first cover 58a: second cover

59: binding rod 60: second adsorber

70: orifice 80: second direction control valve

90: second filter 100: zeolite

According to one aspect of the invention,

Sucking outside air with a compressor,

Removing impurities and moisture from the introduced air,

Separating the oxygen by alternately supplying air from which impurities and moisture have been removed to two adsorbers with high concentration of zeolite,

A method of generating high purity oxygen is provided that includes sending some of the oxygen discharged from the adsorber to the remaining adsorber to discharge gas other than oxygen remaining in the adsorber out of the adsorber.

According to another aspect of the invention,

A compressor that sucks outside air,

A first direction control valve operative to alternately supply air introduced from the compressor in two directions;

Two adsorbers having a highly integrated zeolite and alternately introducing air passing through the first directional control valve and alternately discharging high purity oxygen,

An orifice provided on a passage for sending oxygen discharged from the adsorber to the remaining adsorber where oxygen is not discharged;

A high purity oxygen generating device including a second directional control valve which opens a passage connected to an adsorption device for oxygen discharge of the two adsorbers and closes a passage connected to the other adsorber to discharge high purity oxygen to the outside.

The zeolite may be highly integrated by ultrasonic waves and filled with the adsorber.

The oxygen generator may include a filter for removing impurities and moisture before air enters the two adsorbers.

The second direction control valve may be a shuttle valve.

The adsorber has a housing in which both ends are opened and a highly integrated zeolite is accommodated, two adsorber filters inserted through both open ends of the housing and in contact with the zeolite and allowing gas to pass through, but not through the zeolite, and opening of the housing. It may include two cover that is closed between the two ends to be separated from the housing, and an elastic member provided between the two adsorber filter and the two cover to push the adsorber filter toward the zeolite.

The adsorber may include a coupling rod extending from the outside of the housing between the two lids to couple the two lids, and threads are formed at both ends of the coupling rod to pass through the two lids, and both ends of the coupling rod may be nuts. Can be tightened.

According to another aspect of the invention,

Putting zeolite in a container,

There is provided a highly integrated method of zeolite comprising simultaneously applying pressure and ultrasonic waves to the zeolite.

The ultrasonic waves may be applied at the bottom of the container.

The ultrasound may be applied at the top of the container.

The ultrasound may be applied at the side of the container.

The frequency of the ultrasonic waves applied to the zeolite may be 10,000 ~ 30,000khz.

The amplitude of the ultrasonic waves applied to the zeolite may be 5 ~ 25㎛.

Now, embodiments of the present invention will be described in detail with reference to the drawings.

Referring to FIG. 1, the oxygen generator 10 includes a compressor 20, a first filter 30, a first direction control valve 40, first and second adsorbers 50 and 60, An orifice 70, a second direction control valve 80, and a second filter 90 are provided. The compressor 20 sucks air from the outside and then compresses and discharges the air. The first filter 30 following the compressor 20 is for removing impurities and moisture from the compressed air discharged from the compressor 20. Since the zeolite (100 in FIG. 3) filled in the adsorbers 50 and 60 described later is weak in moisture, it is necessary to remove the moisture contained in the air before entering the adsorbers 50 and 60.

Referring to FIG. 1, a first directional control valve 40 following the first filter 30 is provided between the first and second adsorbers 50 and 60 to be described later disposed in parallel with the first filter 30. do. The first and second discharge pipes 42 and 44 are connected to the first direction control valve 40 to the outside, and the first discharge pipe 42 is connected to the first adsorber (operation) of the first direction control valve 40. 50 may be connected to the second discharge pipe 44 and the second adsorber 60. Although not shown in detail, the first direction control valve 40 is an automatic valve in which the operation is controlled electronically, and the compressed air passing through the first filter 30 may be the first adsorber 50 and the second adsorber 60. And send them alternately. In addition, the gas inside the first adsorber 50 and the second adsorber 60 is alternately discharged to the outside through the first discharge pipe 42 and the second discharge pipe 44. Referring to Figure 1 (a) in more detail, the first direction control valve 40 is the first filter 30 to send the compressed air introduced from the first filter 30 to the first adsorber (50) The first direction control valve 40 connects the second adsorber 60 and the second discharge pipe 44 so that the gas in the second adsorber 60 is discharged to the outside. At this time, the connection between the first adsorber 50 and the first discharge pipe 42 or the connection between the second adsorber 60 and the first filter 30 is blocked. The opposite case is shown in Fig. 1B. Referring to FIG. 1B, the first directional control valve 40 sends the first filter 30 and the second adsorber to direct the compressed air introduced from the first filter 30 to the second adsorber 60. At the same time, the first direction control valve 40 connects the first adsorber 50 and the first discharge pipe 42 so that the gas in the first adsorber 60 is discharged to the outside. At this time, the connection between the second adsorber 60 and the second discharge pipe 44 or the connection between the first adsorber 50 and the first filter 30 are blocked.

Referring to FIG. 1, the first and second adsorbers 50 and 60 are arranged in parallel and connected to the first direction control valve 40, respectively. Since the first adsorber 50 and the second adsorber 60 have the same configuration, only the configuration of the first adsorber 50 will be described in detail. 2 and 3, the first adsorber 50 includes a housing 52, first and second covers 58 and 58a, first and second elastic members 56 and 56a, and First and second adsorber filters 54 and 54a and four bonding rods 59 are provided.

The housing 52 is a hollow cylinder, and both ends thereof are open. The highly integrated zeolite 100 is filled in the housing 52. The zeolite can be integrated after being integrated from the outside or made highly integrated after being placed inside the housing. The highly integrated zeolite 100 is integrated by applying an ultrasonic wave of 10,000 to 30,000 Hz while pressing the zeolite in the particulate state, that is, applying pressure. This allows much more mass of zeolite to be injected into the housing of the same volume than it is without pressurization. This is because the arrangement of the zeolite fine particles is made more compact by the action of the applied ultrasonic waves. Therefore, highly integrated zeolite can be mounted in a housing.

4 (a) shows an embodiment of a method of high-integrating zeolite using ultrasonic waves. Referring to Fig. 4A, the cylinder 520a is placed up and down. A horn 95a of the ultrasonic generator is attached to the lower end of the cylinder 520a. The open upper end of the cylinder 520a is blocked by the pressure plate 96a applying the pressure P. The zeolite 100a is supplied inside the cylinder 520a. In this state, the zeolite 100a is subjected to ultrasonic waves and pressure by the horn 95a and the pressure plate 96a of the ultrasonic wave generator. That is, the zeolite 100a is subjected to ultrasonic waves vibrating in the vertical direction from the bottom. Then, the zeolite 100a inside the cylinder 520a is highly integrated, and the height h of the zeolite 100a is reduced. 4 (b) shows a graph of a highly integrated experimental example according to the method shown in (a). In this experiment, the zeolite 100a filled in the cylinder 520a before ultrasonic and pressure is applied has a diameter of 100 millimeters (mm) and a height (h) of 150 millimeters (mm), and its weight is 250 grams (g). )to be. In FIG. 4B, the horizontal axis represents time when the ultrasonic wave and pressure are applied, and the vertical axis represents the length in which the height h of the zeolite 100a is reduced. Referring to FIG. 4 (b), two lines 98a and 99a are shown as solid lines and dotted lines, and the lines 98a shown as solid lines show an ultrasonic wave having a frequency of 27 khz and an amplitude of 10 μm. The line 99a shown as a dotted line is a case where an ultrasonic wave having a frequency of 20 khz and an amplitude of 15 μm is applied. In the case of a solid line (when ultrasonic wave of 27 kHz is applied), the height h of the zeolite 100a is reduced by about 1 mm. It can be seen that the height (h) of is reduced by about 2mm. In addition, it can be seen that the trend is that the reduced height is kept constant after a certain period of time.

FIG. 5A shows another embodiment of a method of high-integrating zeolite using ultrasonic waves. Referring to Fig. 5 (a), the open upper end of the same cylinder 520b as in the embodiment shown in Fig. 4 (a) is blocked by the pressure plate 96b applying the pressure P. A horn 95b of the ultrasonic generator is provided on the side wall surface of the cylinder 520b. The zeolite 100b is supplied inside the cylinder 520b. In this state, the zeolite 100b is subjected to ultrasonic waves and pressure by the horn 95b and the pressure plate 96b of the ultrasonic generator. That is, the zeolite 100b receives ultrasonic waves vibrating in the left and right directions at the sides. Then, the zeolite 100b inside the cylinder 520b is highly integrated, and the height h of the zeolite 100b is reduced. In FIG. 5B, a highly integrated experimental example is graphically shown according to the method shown in (a). Referring to Fig. 5 (b), two lines 98b and 99b shown in solid and dashed lines are shown. The line 98b shown in solid lines shows an ultrasonic wave having a frequency of 27 khz and an amplitude of 10 μm. The line 99b shown as a dotted line is a case where an ultrasonic wave having a frequency of 20 khz and an amplitude of 15 μm is applied. In the case of the solid line (when the ultrasonic wave of 27 kHz is applied), the height h of the zeolite 100b is reduced by about 0.3 mm. It can be seen that the height (h) of) is reduced by about 1.5 mm.

FIG. 6A illustrates another embodiment of a method of high-integrating zeolite using ultrasonic waves. Referring to Fig. 6A, the open top of a cylinder 520c, such as the cylinder in the embodiment of Fig. 4, is blocked by a horn 95c of the ultrasonic generator. The horn 95c generates an ultrasonic wave and simultaneously applies a pressure P to the zeolite 100c. The zeolite 100c is supplied to the inside of the container 520c. In this state, the zeolite 100c is subjected to ultrasonic pressure and pressure by the horn 95c of the ultrasonic generator. That is, the zeolite 100c receives ultrasonic waves vibrating in the vertical direction from the top. Then, the zeolite 100c inside the container 520c is highly integrated, and the height h of the zeolite 100c is reduced. In FIG. 6B, a highly integrated experimental example is graphically shown according to the method shown in (a). Referring to Fig. 5 (b), two lines 98c and 99c shown by solid lines and dotted lines are shown. The line 98c shown by solid lines shows an ultrasonic wave having a frequency of 27 khz and an amplitude of 10 μm. The line 99c shown as a dotted line is a case where an ultrasonic wave having a frequency of 20 khz and an amplitude of 15 μm is applied. In the case of the solid line (when the ultrasonic wave of 27 kHz is applied), the height h of the zeolite 100c is reduced by about 0.3 mm. In the case of the dashed line (when the ultrasonic wave of 20 kHz is applied), the zeolite (100c) is reduced. It can be seen that the height (h) of) is reduced by about 1.5 mm.

Although not shown, in another experimental example, when the zeolite was injected into a container weighing 467 g without using ultrasonic waves, the weight was 798 g (including a container, ie, the zeolite mandatory crab 330 g), and the weight was 862 g during the vibration injection by ultrasonic waves (Including the container, that is, the weight of the zeolite 394 g). That is, it was found that 19.4% of zeolite could be further injected into the housing 52 by ultrasonic vibration.

2 and 3, the first and second adsorber filters 54 and 54a are inserted through open ends of the housing 52 filled with the zeolite 100, respectively. The first adsorber filter 54 and the second adsorber filter 54a have the same configuration. The first and second adsorber filters 54 and 54a have a plurality of holes, and a material such as a nonwoven fabric is attached to one surface of the first and second adsorber filters 54 and 54a to prevent the zeolite 100 from being blown out. That is, the first and second adsorber filters 54 and 54a allow gas to pass but not the zeolite 100.

2 and 3, the first and second elastic members 56 and 56a are compression coil springs, respectively, to push the first and second adsorber filters 54 and 54a into the housing 52, respectively. And between the second adsorber filters 54 and 54a and the first and second lids 58 and 58a described later. The first and second elastic members 56 and 56a act as a buffer when the air pressure or the oxygen pressure is applied. That is, as shown in FIG. 3, when air enters the left side of the adsorber 50, the zeolite 100 is also pushed to the right by the pressure. At this time, the second elastic member 56a contracts to absorb the shock. In addition, when oxygen enters from the right side of the adsorber 50, the zeolite 100 is also pushed to the left by the pressure, at which time the first elastic member 56 contracts to absorb the impact.

2 and 3, the first and second lids 58 and 58a have a rectangular plate shape having the same shape, and close both open ends of the housing 52. A passage hole 581 communicating with the inside of the housing 52 is provided at the center of the first and second covers 58 and 58a, and a pipe through which gas flows is connected to the passage hole 581. Coupling holes 582 are provided near four corners of the covers 58 and 58a. Through these coupling holes 582, four coupling rods 59, which will be described later, are fitted to each other to be combined with the nut 592. One side of the covers 58 and 58a (a surface in contact with the housing 52) is provided with a ring-shaped protruding end 583 which fits snugly inside the housing 52 and prevents leakage of gas.

2 and 3, the adsorber 50 is tightly coupled by four binding rods 59. The coupling rod 59 is a long rod, and threads 591 are formed at both ends. Insert the coupling holes 582 of the first and second covers 58 and 58a at both ends of the four coupling rods 59 with the housing 52 therebetween, and then screw the nut 592 to the thread 591. 52 and the two covers 58, 58a are tightly coupled.

Referring to FIG. 1, an orifice 70 is provided in a tube connecting two tubes extending from the first adsorber 50 and the second adsorber 60, respectively. The orifice 70 serves to flow only a portion of the oxygen from one of the two adsorbers 50 and 60 to the other adsorber.

Referring to FIG. 1, two tubes respectively extending from the first adsorber 50 and the second adsorber 60 are further extended to be connected to the second direction control valve 80. The second filter 90 is also connected to the second direction control valve 80 by pipe. The valve 80 is a shuttle valve, and the ball 82 moves in accordance with the pressure to connect the high pressure side of the first adsorber 50 and the second adsorber 60 to the second filter 90 and block the opposite side.

Referring to FIG. 1, a second filter 90 is provided between the second direction control valve 80 and the storage tank 11. The second filter 90 removes impurities from oxygen passing through the second direction control valve 80 and sends the impurities to the storage tank 110.

Now, the operation of the embodiment will be described in detail with reference to Figs. 1A and 1B. Referring to Figure 1 (a), the outside air is introduced into the oxygen generator 10 by the operation of the compressor 20 is compressed. Compressed air passing through the compressor 20 passes through the first filter 30 to remove impurities such as dust and water. Since the zeolites (100 in FIG. 3) of the adsorbers 50, 60 are weak to moisture, the water must be removed before entering the adsorbers 50, 60. The compressed air passing through the first filter 30 flows into the first direction control valve 40. The first direction control valve 40 sends the compressed air introduced from the first filter 30 to the first adsorber 50 and not to the second adsorber 60. At the same time, the first direction control valve 40 connects the second adsorber 60 and the second discharge pipe 44, and blocks the connection between the first adsorber 50 and the first discharge pipe 42. Compressed air is introduced into the first adsorber 50 by the action of the first direction control valve 40. Referring to FIG. 3, compressed air flows into the first adsorber 50 from the left side in the direction of the solid arrow. The compressed air passes through the first adsorber filter 54 and flows into the zeolite 100. At this time, the zeolite 100 is pushed to the right due to the inflow air pressure, and the second elastic member 56a on the right side contracts to absorb the shock. The gas (mostly nitrogen) except oxygen in the compressed air is adsorbed to the zeolite 100. The separated high purity oxygen passes through the second adsorber filter 54a and is discharged to the right side of the first adsorber 50.

Referring to Figure 1 (a), the discharged oxygen enters the second direction control valve 80, a portion of which passes through the orifice 70 to the second adsorber 60 in the middle. The second direction control valve 80 is a shuttle valve, the ball 82 inside is pushed to the opposite side by the pressure of oxygen to block the passage to the second adsorber 60 side. The high purity oxygen that has passed through the second direction control valve 80 passes through the second filter 90 to remove impurities such as foreign matter and enters and is stored in the storage tank 110. Some of the oxygen passing through the first adsorber 50 enters the second adsorber 60 via the orifice 70 and goes out through the first direction control valve 40 together with the gas remaining in the second adsorber 60. Discharged. This will be described again in FIG. 1B. The first directional control valve 40 then changes the flow of compressed air. The operation of the oxygen generator 10 at this time is shown in Figure 1 (b). Referring to FIG. 1B, the first direction control valve 40 introduces compressed air introduced through the first filter 30 into the second adsorber 60. At the same time, the connection between the second adsorber 60 and the second discharge pipe 44 is blocked. In addition, the first adsorber 50 and the first discharge pipe 42 are connected. Compressed air is introduced into the second adsorber 60 by the action of the first directional control valve 40 and oxygen is separated and released in the same manner as in the first adsorber 50. High purity oxygen discharged from the second adsorber 60 flows into the second direction control valve 80. The ball 80 of the second direction control valve 80 moves to the opposite side by the pressure of the oxygen flows to block the passage toward the first adsorber 50. High purity oxygen passing through the second direction control valve 80 passes through the second filter 90 to remove impurities and enters the storage tank 110 to be stored.

Part of the oxygen discharged from the second adsorber 60 flows into the first adsorber 50 through the orifice 70. Referring to FIG. 3, oxygen introduced from the right side of the first adsorber 50 (indicated by the dotted arrows) enters the zeolite 100 through the second adsorber filter 54a. At this time, the zeolite 100 is pushed to the left by the pressure of the oxygen flowing in, and the first elastic member 56 on the left side contracts to absorb the shock. As oxygen flows into the zeolite 100, a desorption process occurs in which a gas (mostly nitrogen) adsorbed to the zeolite 100 falls. The desorbed gas exits to the left side of the first adsorber 50 and is discharged to the outside through the first discharge pipe 42 via the first direction control valve 40.

The oxygen generator 10 produces high purity oxygen while alternately performing the operations shown in FIGS. 1A and 1B.

By using the oxygen generation process and apparatus according to the present invention, it is possible to produce oxygen of high purity simply and conveniently without using a chemical method requiring a complicated process by various equipments. In addition, there is no fear of causing environmental problems since no chemical methods are used. In addition, since zeolite is highly integrated in the adsorber, a greater amount of zeolite is filled in the adsorber, so that oxygen of higher purity can be produced in an adsorber of the same size.

Although the present invention has been described with reference to the above embodiments, the present invention is not limited thereto. Those skilled in the art will appreciate that modifications and variations can be made without departing from the spirit and scope of the present invention and that such modifications and variations also fall within the present invention.

Claims (14)

Sucking outside air with a compressor, Removing impurities and moisture from the introduced air, Separating the oxygen by alternately supplying air from which impurities and moisture have been removed to two adsorbers with high concentration of zeolite, And sending a portion of the oxygen discharged from the adsorber to the remaining adsorber to discharge gas other than oxygen remaining in the adsorber out of the adsorber. A compressor that sucks outside air, A first direction control valve operative to alternately supply air introduced from the compressor in two directions; Two adsorbers having a highly integrated zeolite and alternately introducing air passing through the first directional control valve and alternately discharging high purity oxygen, An orifice provided on a passage for sending oxygen discharged from the adsorber to the remaining adsorber where oxygen is not discharged; And a second directional control valve configured to open a passage connected to the adsorber from which the oxygen is discharged from the two adsorbers and block a passage connected to the remaining adsorber to discharge oxygen of high purity to the outside. The high purity oxygen generating apparatus of claim 2, wherein the zeolite is highly integrated by ultrasonic waves and filled in the adsorber. The high purity oxygen generator of claim 2, wherein a filter is provided to remove impurities and moisture before air enters the two adsorbers. The high purity oxygen generator of claim 2, wherein the second direction control valve is a shuttle valve. According to any one of claims 2 to 5, wherein the adsorber is a housing which is open at both ends and is contained therein a highly integrated zeolite, Two adsorber filters inserted through open ends of the housing and in contact with the zeolite and allowing gas to pass through and not to pass the zeolite; Two covers which are closed so as to close both open ends of the housing and are not separated from the housing; And an elastic member provided between the two adsorber filters and the two covers to push the adsorber filter toward the zeolite. 7. The high purity oxygen generator of claim 6, wherein the adsorber includes a coupling rod extending between the two covers outside the housing to couple the two covers. 8. The high purity oxygen generator of claim 7, wherein threads are formed at both ends of the coupling rod to pass through the two covers, and both ends of the coupling rod are tightened with a nut. Putting zeolite in a container, A method of high integration of zeolite comprising the step of applying pressure and ultrasonic waves simultaneously to the zeolite. 10. The method of claim 9, wherein ultrasonication is applied at the bottom of the vessel. 10. The method of claim 9, wherein ultrasonication is applied at the top of the vessel. 10. The method of claim 9, wherein an ultrasonic wave is applied at the side of the container. The method according to any one of claims 9 to 12, wherein the frequency of the ultrasonic waves applied to the zeolite is 10,000 to 30,000 khz. The method for integrating zeolite according to any one of claims 9 to 12, wherein the amplitude of the ultrasonic waves applied to the zeolite is 5 to 25 µm.