KR200405301Y1 - Control device of a head unit used in an exhausted gas purifying device and head unit whichof - Google Patents

Abstract

The present invention relates to a control unit of a head unit used in a waste gas purification treatment apparatus in which exhaust gas and combustion air can be efficiently mixed in a combustion chamber.

The control unit of the head unit according to the present invention, a head unit is coupled to a plurality of intake unit and the combustion chamber is connected to one side, a pressure sensor for measuring the pressure of the exhaust gas flowing into the plurality of intake unit, A number of changers corresponding to a plurality of intake units installed between the plurality of intake units and the pressure sensor, and a control unit for dividing time to control the pressure sensor to measure the exhaust gas flowing through the plurality of intake units, respectively. do.

Waste Gas Purification System, Head Unit, Control Unit, Pressure Sensor, Changer, Control Unit

Description

CONTROL DEVICE OF A HEAD UNIT USED IN AN EXHAUSTED GAS PURIFYING DEVICE AND HEAD UNIT WHICHOF}

BRIEF DESCRIPTION OF THE DRAWINGS The block diagram which shows the process of the waste gas processing apparatus for semiconductors by a prior art.

2 is a block diagram of a waste gas purification treatment apparatus having a head unit according to an embodiment of the present invention.

3 is a partial perspective view illustrating a head unit to which a plurality of intake units are coupled according to an embodiment of the present invention.

Figure 4a is a conceptual diagram for explaining the generation of vortex for increasing the mixing efficiency of the combustion air in the head unit according to an embodiment of the present invention.

4B is a schematic diagram illustrating vortex generation to increase the mixing efficiency of combustion air in the head unit according to another embodiment of the present invention.

Figure 5 is a schematic diagram for explaining the combined state of the control unit of the head unit for controlling the head unit used in the waste gas purification apparatus according to an embodiment of the present invention.

6 is a trial for explaining a four-channel intake multi-changer according to an embodiment of the present invention.

** Description of Codes for Major Configurations of Drawings **

100: waste gas purification apparatus 110: head unit

120: burner unit 123: temperature control air injection nozzle

125: combustion air injection nozzle 130: wet cleaning

140: piping 160: exhaust duct

200: control unit of the head unit

212, 214, 216, 218: 4-channel intake multichanger

230: controller 240: touch screen

The present invention relates to a waste gas purification treatment apparatus for removing harmful components contained in exhaust gas discharged and connected to a semiconductor manufacturing equipment. More specifically, the exhaust gas generated from the semiconductor manufacturing equipment is transferred to a purification treatment apparatus. A head unit for injecting.

Exhaust gases emitted from chemical processes and semiconductor manufacturing processes are toxic, explosive and corrosive, which is not only harmful to the human body but also causes environmental pollution when released into the atmosphere. Therefore, such exhaust gas must be purified to lower the content of harmful components below the allowable concentration, and it is legally mandated to discharge only harmless gases that have undergone purification to remove such toxic substances into the atmosphere.

There are a burning method and a wet method for treating the harmful gas emitted from the semiconductor manufacturing process. The burning method is mainly a method of treating exhaust gas by decomposing, reacting or burning a ignitable gas containing hydrogen group in a high temperature combustion chamber, and the wet method is mainly soluble in water while passing a water gas stored in a tank. To treat the exhaust gas.

In the gas scrubber device for semiconductors currently used, a mixing method combining the burning method and the wet method is frequently used. As shown in FIG. 1, the mixed gas scrubber 2 first burns the harmful gas 12 discharged from the semiconductor manufacturing apparatus 10 or the like in a burner zone 20 to ignite and explosive gas. After the removal, the wet scrubbing section 30 is configured to dissolve the water-soluble toxic gas in water.

That is, the noxious gas 12 discharged from the semiconductor manufacturing apparatus 10 is burned by a method of combustion / oxidation or pyrolysis in the burner unit 20, and the waste gas released from the burner unit 20. Some untreated gas or untreated gas 22, such as collected particles, are transferred to the wet cleaning unit 30, and secondly, the water in the wet cleaning unit 30 sprays water into the powder in the oxidizing gas. ) Is subjected to a wetting process where the separation is performed. The cleaned process gas 32 is then discharged into the atmosphere through filters and ducts.

However, due to the high directivity of semiconductors and the large capacity of liquid crystal display (TFT LCD) panels, the amount of exhaust gas is greatly increased as well as the use of special gases due to the emergence of a new industry.

Therefore, according to the conventional mixed gas scrubber 2 apparatus, in order to simultaneously process various kinds of exhaust gases, a plurality of intake units are adopted in the head unit, and various kinds of exhaust gases are collected using one waste gas purification treatment apparatus. It's being processed.

However, in order to accurately control each intake unit, a pressure sensor must be coupled to each intake unit to monitor whether each intake unit operates normally. However, because the pressure sensor is expensive, the pressure sensor is attached to only one intake unit to check the pressure in the combustion chamber, so it is not possible to accurately control the other intake unit without the pressure sensor and to identify the cause when a failure occurs. There is a problem that is difficult to do.

In addition, in the conventional waste gas purification treatment apparatus, since the four exhaust gas nozzles are arranged horizontally with respect to the central axis of the combustion chamber, the exhaust gas injected in the combustion chamber is not uniformly distributed, and the combustion temperature is high while the internal temperature is varied. There is a problem that the efficiency of mixing with the deterioration.

On the other hand, in the conventional waste gas purification treatment apparatus, since the exhaust gas nozzle and the combustion chamber are integrally formed, when the nozzle of the exhaust gas fails or an abnormality occurs in the combustion chamber, it is necessary to identify and repair the cause of the failure. There are many difficulties.

Therefore, the present invention is devised to solve the problems of the prior art as described above, the object of the present invention is the head used in the waste gas purification treatment apparatus that can be efficiently mixed with the exhaust gas and combustion air in the combustion chamber It is to provide a control device of the unit.

Another object of the present invention is to provide a control unit of a head unit used in a waste gas purification treatment apparatus capable of efficiently controlling the pressure of the exhaust gas input to a plurality of intake units connected to the head unit.

Still another object of the present invention is to provide a control unit of a head unit used in a waste gas purification treatment apparatus capable of minimizing a temperature deviation in a combustion chamber of the waste gas purification treatment apparatus.

Still another object of the present invention is to provide a head unit configured to easily detach a plurality of intake units from a combustion chamber.

According to a feature of the present invention for achieving the object as described above, the present invention includes a burner unit having a combustion chamber for purifying the exhaust gas discharged after being used in a semiconductor manufacturing process or a chemical process and discharged to the discharge duct In the waste gas purification treatment apparatus, a plurality of intake units are coupled to one side and the head unit is connected to the combustion chamber, the pressure sensor for measuring the pressure of the exhaust gas flowing into the plurality of intake units, a plurality of intake A waste gas purification process including a control unit for dividing the number of changers and the time corresponding to the plurality of intake units installed between the unit and the pressure sensor so as to control the pressure sensor to respectively measure the exhaust gas flowing through the plurality of intake units. Provided is a control device for a head unit used in the device.

In addition, a plurality of intake units are characterized by four.

The apparatus may further include a touch screen for displaying the pressure of the exhaust gas measured by the pressure sensor.

In addition, the head unit is a combustion air injection nozzle for injecting the combustion air required to burn the exhaust gas flowing from the plurality of intake units and a temperature-controlled air injection nozzle for injecting hot air for controlling the temperature inside the combustion chamber It includes.

In addition, by installing exhaust gases, combustion air injection nozzles, and temperature-controlled air injection nozzles introduced from a plurality of intake units to have a predetermined slope, the air flowing through them has an exhaust slope and a predetermined slope to prevent vortex flow. It is characterized by forming.

In addition, the exhaust gas introduced from the plurality of intake unit, the combustion air injection nozzle and the air introduced through the temperature control air injection nozzle is characterized in that the vortex is formed to have a predetermined slope.

In addition, a plurality of intake units and combustion of the waste gas purification treatment apparatus including a plurality of intake units, a burner unit having a combustion chamber to purify the exhaust gas discharged after being used in a semiconductor manufacturing process or a chemical process and discharged to the discharge duct In the head unit mounted between the top of the chamber, the head unit is formed on the side of the head unit body, the head unit body which is detachably fastened to the combustion chamber, so as to combust the exhaust gases introduced from the plurality of intake units. It includes a combustion air injection nozzle for injecting the required combustion air and a temperature control air injection nozzle formed on the side of the head unit body for injecting hot air for controlling the temperature inside the combustion chamber.

In addition, a plurality of intake unit is characterized in that formed on the upper surface of the head unit body.

Hereinafter, with reference to the accompanying drawings, the control unit of the head unit used in the waste gas purification treatment apparatus according to an embodiment of the present invention having the configuration as described above will be described in detail.

2 is a block diagram of a waste gas treatment apparatus using a moisture and dust adsorption apparatus according to an embodiment of the present invention.

The waste gas purification process for purifying the waste gas discharged after being used in the semiconductor manufacturing process or the chemical process of the present invention with a harmless gas below the discharge allowance is performed by a burning-type treatment process and a wetting-type process. ) Is divided into the processing steps.

As shown in FIG. 2, the waste gas purification apparatus 100 including the cooling device according to the embodiment of the present invention is connected to a semiconductor device and includes a head unit 110 and a head unit into which exhaust gas to be treated is injected. Pipe unit for sending the exhaust gas treated in a burning manner by the control device 200 of the head unit for controlling the 110, the burner unit 120 connected to the head unit 110, the burner unit 120 to the next process 140, the wet cleaning unit 130 and the cleaning unit discharged from the wet cleaning unit 130 for treating the exhaust gas processed in the burning method connected to the pipe unit 140 in a wet manner to the outside. Discharge duct 160.

The burner unit 120 includes a heater 127 and a combustion chamber 124 surrounded by the heater 127, and the wet cleaning unit 130 includes a primary dust collection unit 131 and a circulation water spray. 134, secondary dust collection 132, and fresh water spray 135.

3 is a partial perspective view illustrating a head unit to which a plurality of intake units are coupled according to an embodiment of the present invention.

As shown in FIG. 3, in the waste gas purification apparatus 100 according to the embodiment of the present invention, a plurality of intake units for the burner unit 120 to inject exhaust gas from equipment for discharging waste gas such as semiconductor equipment. (112, 114, 116, 118). In addition, the head unit 122 includes a combustion air injection nozzle 125 and a burner unit 120 for injecting combustion air necessary for combusting the exhaust gas delivered from the plurality of intake units 112, 114, 116, and 118. It further includes a temperature control air injection nozzle 123 for injecting hot air for adjusting the temperature inside the combustion chamber of the.

Meanwhile, the head unit 122 mounted between the plurality of intake units 112, 114, 116, and 118 and the upper portion of the combustion chamber has a head unit body 129 and a head unit body 129 fastened to be detachably attached to the combustion chamber. Of the combustion air injection nozzle 125 and the head unit main body 129 which are formed on the side surface of the air inlet to inject the combustion air required to burn the exhaust gas introduced from the plurality of intake units 112, 114, 116, and 118. It is formed on the side includes a temperature control air injection nozzle 123 for injecting hot air for controlling the temperature inside the combustion chamber.

In addition, the plurality of intake units 112, 114, 116, and 118 may be formed on the upper surface of the head unit body 129 and extend downward.

The head unit 122 forms a predetermined internal space as it is formed to protrude to a certain height from the coupling flange formed at the bottom edge, and the gas inhaled in the internal space stays for a predetermined time to increase the combustion efficiency of the gas. At the same time, it serves to prevent the backfire phenomenon of conducting heat upward.

4A is a conceptual view illustrating vortex generation to increase mixing efficiency of combustion air in a head unit according to an embodiment of the present invention.

According to an embodiment of the present invention, as shown in Figure 4, when the exhaust gas is injected into the combustion chamber 124 from a plurality of intake units 112, 114, 116, 118, combustion air injection nozzle 125 Combustion air injected through the air and hot air for controlling the temperature inside the combustion chamber 124 injected through the temperature-controlled air injection nozzle 123 are injected through the plurality of intake units 112, 114, 116, and 118. By injecting in a direction perpendicular to the exhaust gas, turbulence is formed in the combustion chamber 124. Therefore, the mixing efficiency of the exhaust gas and the combustion gas flowing from the plurality of intake units 112, 114, 116, 118 is maximized. In addition, due to this result, the temperature variation in the combustion chamber 124 is minimized, thereby minimizing heat loss of the burning part 120 and preventing the adhesion of powder to the inner wall of the combustion chamber 124.

4B is a schematic diagram illustrating vortex generation to increase the mixing efficiency of combustion air in the head unit according to another embodiment of the present invention.

According to another embodiment of the present invention, as shown in FIG. 4B, when the exhaust gas is injected into the combustion chamber 124 from the plurality of intake units 112, 114, 116, 118, the combustion air injection nozzle 125a The hot air serving as the combustion oxidant inside the combustion chamber 124 injected through the hot air injection nozzles 123a and 123b exchanged with the combustion air injected through the air 125b is provided with a plurality of intake units 112, 114, The injection is performed to have a predetermined inclination with respect to the direction perpendicular to the exhaust gas injected through the 116 and 118, thereby forming a turbulence in the combustion chamber 124. At this time, unlike the embodiment shown in Figure 4a by placing the combustion air injection nozzles (125a, 125b) and hot air injection nozzles (123a, 123b) in a position facing each other, a plurality of intake units (112, The mixing efficiency of the exhaust gas and the combustion gas flowing from 114, 116, and 118 is maximized. In addition, due to this result, the temperature variation in the combustion chamber 124 is minimized, thereby minimizing heat loss of the burning part 120 and preventing the adhesion of powder to the inner wall of the combustion chamber 124. 5 is a schematic view for explaining a combined state of the control unit of the head unit for controlling the head unit used in the waste gas purification treatment apparatus according to an embodiment of the present invention.

Referring to FIG. 5, in accordance with an embodiment of the present invention, a head unit capable of controlling exhaust gases flowing from a plurality of intake units 112, 114, 116, and 118 using one pressure sensor 220 may be used. The controller 200 of 122 includes four channel intake multiple changers 212, 214, 216, 218, a pressure sensor 220, a programmable controller 230 and a touch screen 240.

The control device 200 according to an embodiment of the present invention is a four-channel intake multiple changer (212, 214, 216,) to monitor the pressure of the exhaust gas flowing into the plurality of intake units (112, 114, 116, 118) Each of the cycles 218 is divided into four equal periods to repeatedly switch the pressure sensor 220 and the corresponding intake unit.

That is, the first 15 seconds every 1 minute, the 212 of the four-channel intake multiple changer is operated, the pressure sensor 220 monitors the pressure of the exhaust gas flowing into the intake unit 112, and the four channels for the next 15 seconds. The pressure sensor 220 monitors the pressure of the exhaust gas flowing into the intake unit 114 by operating 214 of the intake multiple changer, and the 216 of the four-channel intake multiple changer operates for 15 seconds. 220 monitors the pressure of the exhaust gas flowing into the intake unit 116, and during the last 15 seconds, the 218 of the four-channel intake multiple changer is operated to exhaust the pressure sensor 220 into the intake unit 118. Monitoring of gas pressure will be repeated.

According to one embodiment of the present invention, the cycle and order of such monitoring is performed according to a program already stored by the programmable controller 230. In addition, the controller 230 displays the pressure of the exhaust gas of each intake unit measured by the pressure sensor 220 on the touch screen 240.

6 is a perspective view for explaining a four-channel intake multiple changer according to an embodiment of the present invention.

Referring again to FIG. 2, as described above, the exhaust gas injected into the combustion chamber 124 is primarily heated by the heater 127 to be burned / burned or pyrolyzed in the combustion chamber 124. By burning, it is primarily purified.

The exhaust gas thus primarily purified is injected into the wet cleaning unit 130 through the piping unit 140. At this time, the primary purified exhaust gas contains some gas or dust particles which have not been processed yet. Accordingly, the circulating water spray 134 of the wet cleaning unit 130 injects water into the primary purified exhaust gas injected through the piping unit 140, and thus, the primary purified exhaust gas injected with the water is discharged. The gas passes through the primary dust collection unit 131, thereby cleaning the dust such as powder (powder) contained in the primary purified exhaust gas. Then, the cleaned exhaust gas is once again passed through the secondary dust collecting part 132 and the fresh water spray 135, so that cleaning can be performed more precisely.

Therefore, the purified processing gas is discharged to the outside through the discharge duct 160.

Although not shown in the drawing, the waste gas purification apparatus 100 includes an electric dust collecting unit that collects and cleans exhaust gas still untreated to further purify the purification gas discharged from the wet cleaning unit 130. You can also do In this case, the electrostatic precipitator is installed between the discharge duct 160 and the wet cleaning unit 130 of the waste gas purification apparatus 100 according to an embodiment of the present invention.

As described above, according to the configuration of the present invention, the following effects can be expected.

First, vortex is formed in the combustion chamber by mixing the combustion air injected through the combustion air injection nozzle and the hot air injected through the temperature-controlled air injection nozzle perpendicular to the exhaust gas introduced through the plurality of intake units. There is an effect that can be.

Second, although one pressure sensor is used by using the four-channel intake multiple changer, the pressure of the exhaust gas input to the plurality of intake units can be effectively controlled.

Therefore, it is possible to minimize the temperature deviation in the combustion chamber of the waste gas purification apparatus and to control the exhaust gas flowing through the plurality of intake units at a low cost.

Claims (7)

In the waste gas purification processing apparatus comprising a burner unit having a combustion chamber for purifying the exhaust gas discharged after being used in a semiconductor manufacturing process or a chemical process and discharged to the discharge duct, A head unit to which a plurality of intake units are coupled to one side and the combustion chamber is connected to the other side; A pressure sensor for measuring a pressure of the exhaust gas flowing into the plurality of intake units; A number of changers corresponding to the plurality of intake units provided between the plurality of intake units and the pressure sensor; And Control unit for controlling the time so that the pressure sensor can measure each of the exhaust gas flowing through the plurality of intake unit by dividing time Control device for a head unit used in the waste gas purification treatment device comprising a. The method of claim 1, The control unit of the head unit used for the waste gas purification processing apparatus characterized by four said intake units. The method of claim 1, And a touch screen for displaying the pressure of the exhaust gas measured by the pressure sensor. The method of claim 1, The head unit is: Combustion air injection nozzles for injecting combustion air necessary for combusting exhaust gases introduced from the plurality of intake units; And Temperature control air injection nozzle for injecting hot air for controlling the temperature inside the combustion chamber Control device for a head unit used in the waste gas purification treatment device comprising a. The method of claim 4, wherein The exhaust gas, the combustion air injection nozzle, and the temperature-controlled air injection nozzle, which are introduced from the plurality of intake units, are installed to have a predetermined slope, so that the air introduced through them has the predetermined slope and the exhaust gas. To form a vortex to control the head unit used in the waste gas purification treatment apparatus. The plurality of intake units and the combustion of the waste gas purification apparatus comprising a plurality of intake units, a burner unit having a combustion chamber for purifying the exhaust gas discharged after being used in a semiconductor manufacturing process or a chemical process and discharged to the discharge duct In the head unit mounted between the top of the chamber, the head unit: A head unit body fastened to the combustion chamber in a detachable manner; A combustion air injection nozzle formed on a side of the head unit main body and configured to inject combustion air necessary to combust the exhaust gas introduced from the plurality of intake units; And Temperature control air injection nozzle is formed on the side of the head unit body for injecting hot air for controlling the temperature inside the combustion chamber Head unit used in the waste gas purification treatment apparatus comprising a. The method of claim 6, And the plurality of intake units are formed on an upper surface of the head unit main body.

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