KR20040035661A - The bi-directional switch valve device of a mote removing device panel - Google Patents

The bi-directional switch valve device of a mote removing device panel Download PDF

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Publication number
KR20040035661A
KR20040035661A KR1020040024003A KR20040024003A KR20040035661A KR 20040035661 A KR20040035661 A KR 20040035661A KR 1020040024003 A KR1020040024003 A KR 1020040024003A KR 20040024003 A KR20040024003 A KR 20040024003A KR 20040035661 A KR20040035661 A KR 20040035661A
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South Korea
Prior art keywords
air
inlet
valve
exhaust
hole
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KR1020040024003A
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Korean (ko)
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이대준
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이대준
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Priority to KR1020040024003A priority Critical patent/KR20040035661A/en
Publication of KR20040035661A publication Critical patent/KR20040035661A/en

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Classifications

    • EFIXED CONSTRUCTIONS
    • E05LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
    • E05FDEVICES FOR MOVING WINGS INTO OPEN OR CLOSED POSITION; CHECKS FOR WINGS; WING FITTINGS NOT OTHERWISE PROVIDED FOR, CONCERNED WITH THE FUNCTIONING OF THE WING
    • E05F3/00Closers or openers with braking devices, e.g. checks; Construction of pneumatic or liquid braking devices
    • E05F3/04Closers or openers with braking devices, e.g. checks; Construction of pneumatic or liquid braking devices with liquid piston brakes
    • EFIXED CONSTRUCTIONS
    • E05LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
    • E05FDEVICES FOR MOVING WINGS INTO OPEN OR CLOSED POSITION; CHECKS FOR WINGS; WING FITTINGS NOT OTHERWISE PROVIDED FOR, CONCERNED WITH THE FUNCTIONING OF THE WING
    • E05F5/00Braking devices, e.g. checks; Stops; Buffers
    • E05F5/06Buffers or stops limiting opening of swinging wings, e.g. floor or wall stops
    • EFIXED CONSTRUCTIONS
    • E05LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
    • E05FDEVICES FOR MOVING WINGS INTO OPEN OR CLOSED POSITION; CHECKS FOR WINGS; WING FITTINGS NOT OTHERWISE PROVIDED FOR, CONCERNED WITH THE FUNCTIONING OF THE WING
    • E05F5/00Braking devices, e.g. checks; Stops; Buffers
    • E05F5/06Buffers or stops limiting opening of swinging wings, e.g. floor or wall stops
    • E05F5/08Buffers or stops limiting opening of swinging wings, e.g. floor or wall stops with springs
    • EFIXED CONSTRUCTIONS
    • E05LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
    • E05FDEVICES FOR MOVING WINGS INTO OPEN OR CLOSED POSITION; CHECKS FOR WINGS; WING FITTINGS NOT OTHERWISE PROVIDED FOR, CONCERNED WITH THE FUNCTIONING OF THE WING
    • E05F5/00Braking devices, e.g. checks; Stops; Buffers
    • E05F5/06Buffers or stops limiting opening of swinging wings, e.g. floor or wall stops
    • E05F5/10Buffers or stops limiting opening of swinging wings, e.g. floor or wall stops with piston brakes

Abstract

PURPOSE: A bidirectional conversion valve device of a panel damping device is provided to induce the air to pipe lines, and to supply outer cold air to a fan driving motor having high temperature to cool down the motor, then to emit inner high-temperature air, thereby preventing the motor from being overheated. CONSTITUTION: An inner space is divided into a inhalation side(310) and a ventilation side(320). A discharging hole(311) and a retractable hole(321) are formed on the inhalation side(310) and the ventilation side(320), respectively. A circular delivery valve and a circular ventilating valve are disposed on each side, respectively. An air incoming hole(313) and an air outgoing hole(323) are formed on sides of the discharging hole(311) and the retractable hole(321), respectively. An open/shut operation valve 1 is installed between the discharging hole(311) and the air incoming hole(313). An open/shut operation valve 2(350) is disposed between the retractable hole(321) and the air outgoing hole(323).

Description

패널 제진장치의 양방향전환밸브장치{The bi-directional switch valve device of a mote removing device panel}Bi-directional switch valve device of a mote removing device panel

본 발명은 LCD, PDP 패널 제진장치의 구성부재 중 에어를 각 필요한 배관라인으로 적지적소에 공급 유도함은 물론 보다 효과적으로 개폐차단하고, 나아가 고열이 발생하는 팬구동모터에 외부의 찬공기를 적절히 강제 유입시켜 냉각함은 물론 내부의 고온은 외부로 방출하여 모터의 과열방지를 함께 도모할 수 있도록 필요한 각 방향으로 적절히 전환 유도시켜주는 양방향전환밸브에 관한 것이다.The present invention induces the supply of air to the appropriate piping line among the constituent members of the LCD and PDP panel vibration suppression system, as well as to open and close more effectively, and also to forcibly introduce external cold air into the fan drive motor that generates high heat. Cooling as well as the internal high temperature is released to the outside to prevent the overheating of the motor with the bidirectional switching valve to induce appropriate switching in each direction necessary.

LCD, PDP 패널 제진장치는 일정압의 에어를 발생시킨 다음 그 에어를 이동 및 순환시켜 토출구와 흡입구로 패널의 상,하 표면에 각각 분사(P) 및 흡입(V)을 동시 실시함으로서, LCD, PDP 등의 패널을 생산하는 생산공정 중 공정간 이동과정에서 패널에 안착되는 미세 먼지나 분진 및 기타 이물질을 용이하게 탈락제거가 가능하고, 나아가 패널의 완벽한 청정유지를 도모할 수 있도록 하는 장치이다.LCD, PDP panel damping device generates air of a certain pressure, and then moves and circulates the air to simultaneously discharge (P) and intake (V) on the upper and lower surfaces of the panel through the discharge and intake ports. It is a device that can easily remove and remove fine dust, dust and other foreign substances that are seated on the panel during the process of moving the production process of producing panels such as PDP, and further promote the perfect clean maintenance of the panel.

그런데 상기와 같은 종래의 제진장치는 상술된 바와 같이 에어분사 및 흡입을 동시에 실시하는데 필요한 기본적인 에어순환기능은 갖추고 있기는 하지만 효과적인 에어순환이 되지 못함은 물론 에어분사 및 흡입의 일시정지 등과 같이 비운전시에는 적절한 에어순환 컨트롤이 되지 못하는 등 에어순환의 불합리성으로 인해 팬 구동모터에 과열이 발생한다거나 부하가 걸려 고장 및 심할 경우 기능불능 상태가 되는 등 상당한 문제점이 있었다.However, the above conventional vibration damping device is equipped with the basic air circulation function necessary to simultaneously perform the air injection and suction as described above, but does not become an effective air circulation, as well as non-operation such as pausing the air injection and suction There is a significant problem such as overheating of the fan drive motor due to irrationality of the air circulation, such as inadequate air circulation control, or failure and severe functioning due to a load.

이러한 문제점은 제진장치내에 설치된 에어배관라인에서 발생된 에어가 보다 효과적으로 순환 또는 자동 컨트롤되지 못하는 문제로 인해 발생되는 것이다.This problem is caused by a problem that the air generated in the air piping line installed in the vibration suppression system is not effectively circulated or automatically controlled.

한편, 제진장치내의 에어배관라인 일측에 설치되는 에어생성용 팬구동모터는 상당한 중량체 일뿐 아니라 고가임에 따라서 고장이 잦거나 사용 이 불가하게 되면 막대한 손실로 이어질 뿐 아니라 교체에 따른 비용, 공정 등의 손실 또한 불가피하다.On the other hand, the fan-driven motor for air production installed on one side of the air piping line in the vibration suppression system is not only a heavy weight, but also expensive, which leads to enormous losses when it is frequently broken or unusable. The loss of is also inevitable.

그리고 통상적으로 LCD, PDP등의 패널 제진장치에 설치되는 팬구동모터는 가동중 상당한 열이 발생하고, 그 열을 적시에 순환냉각하지 않으면 누적되에 고장이 발생한다거나 수명이 급격히 단축될 뿐만 아니라 심할 경우 과열로 기능불능상태가 되는 등의 문제를 야기 시키기 때문에 비운전시에도 항시 외부의 찬공기를 유입시킴은 물론 고온은 즉시 방출해야 한다. 만약 비운전시 외부의 공기를 유입시키거나 배기하지 않고 팬구동모터의 배기구와 흡입구 상호간 연통된 상태로만 반복 순환시키게 되면 발생된 고열이 모터의 배기구에서 그대로 모터 흡입구로 인입되고, 그 인입된 고온공기는 더욱 높은 온도의 열로 반복 순환됨에 따라서 장시간 지속되면 모터에 치명적인 손상이 불가피하다.And fan driving motors, which are usually installed in panel damping devices such as LCDs and PDPs, generate considerable heat during operation, and if the heat is not circulated and cooled in a timely manner, the cumulative failures occur or the lifespan is abruptly shortened. In case of overheating, it causes problems such as incapacity and induces cold air at all times even during non-operation. If the non-driving system repeatedly circulates only in the state in which the exhaust port and the intake port of the fan driving motor communicate with each other without introducing or exhausting outside air, the generated high temperature is drawn into the inlet of the motor as it is from the exhaust port of the motor. As it is repeatedly circulated to heat of higher temperature, if it lasts for a long time, the damage to the motor is inevitable.

아울러 에어순환의 불합리성은 안정적이고 균일한 에어공급/흡입에 장애를 주어 패널상의 이 물질 제거효율이 떨러지는 등의 제진장치의 기능상에도 하자를 유발시키는 등 시급한 해결이 요구된다.In addition, the irrationality of the air circulation impedes a stable and uniform air supply / suction, thus causing an imperfection in the function of the vibration suppression device such as the removal efficiency of foreign matter on the panel.

이에 본 발명에서는 에어를 분사(P) 및 흡입(V)를 실시하는 제진 운전 중에는 물론 분사(P) 및 흡입(V)이 일시 중단된 비운전시(팬구동모터는 회전구동 중)에도 팬구동모터나 배관내부에 절대 과열 및 압력부하가 절대 걸리지 않게 보다 원활하고 효과적인 에어순환 및 에어컨트롤이 될 수 있도록 되게 하는 양방향전환밸브장치를 제공함에 주안점을 두고 그 기술적 과제로서 완성한 것이다.Accordingly, in the present invention, the fan drive motor is not only operated during the vibration suppression operation in which the air is injected (P) and the suction (V) but also during non-operation (the fan drive motor is being rotated) while the injection (P) and the suction (V) are suspended. B. It was completed as a technical task with the focus on providing a bidirectional switching valve device that enables smoother and more effective air circulation and air conditioning control without absolute overheating and pressure load.

도 1은 본 발명 양방향전환밸브의 바람직한 일실시예를 보인 구성도Figure 1 is a block diagram showing a preferred embodiment of the present invention bidirectional switching valve

도 2는 본 발명 양방향전환밸브의 작동상태도Figure 2 is an operating state diagram of the bidirectional switching valve of the present invention

도 3은 본 발명의 방향전환밸브가 적용된 제진장치 전체의 개략 구성도3 is a schematic configuration diagram of an entire vibration suppression apparatus to which the direction change valve of the present invention is applied;

■ 도면의 주요부분에 사용된 주요부호의 설명 ■■ Explanation of the major symbols used in the main parts of the drawings ■

100:팬구동모터101:흡입구100: fan drive motor 101: suction port

102:배기구120:순환급기밸브102: exhaust port 120: circulating air supply valve

121:급기송출구122:급기구121: supply air outlet 122: supply mechanism

123:급기팬124:급기개폐용밸브123: Air supply fan 124: Air supply opening and closing valve

124a:실린더124b:작동로드124a: Cylinder 124b: Operating rod

130:순환배기밸브131:배기팬130: circulating exhaust valve 131: exhaust fan

200:헤드부210:흡입장치200: head 210: suction device

220:분사장치230,240:에어연결배관220: spray device 230, 240: air connection piping

260:라인필터250:에브슬롯필터260 line filter 250 subslot filter

280:유량조절밸브300:방향전환밸브280: flow control valve 300: directional control valve

310:흡입측311:인출구310: suction side 311: outlet

312:순환급기배기구313:에어유입구312: circulating air supply / exhaust system 313: air inlet

320:배기측321:인입구320: exhaust side 321: inlet

322:순환급기인입구323:에어출력구322: circulating air supply inlet 323: air output port

340:개폐작동용 밸브1350:개폐작동용 밸브340: valve for opening and closing operation 1350: valve for opening and closing operation

360:실린더370:개폐작동봉360: cylinder 370: opening and closing operating rod

위의 기술적 과제를 달성하기 위하여 본 발명에서는 첨부된 각 도면에 의거하여 상세히 설명하면 하기와 같다.In order to achieve the above technical problem, the present invention will be described in detail with reference to the accompanying drawings.

본 발명의 방향전환밸브(300)는 도 2에서 도시된 상세 도면에서와 같이 내부 공간부를 흡입측(310)과 배기측(320)으로 구분시키되,Directional valve 300 of the present invention is divided into the inlet side 310 and the exhaust side 320, as shown in the detailed view shown in FIG.

상기 흡입측(310)에는 인출구(311)를 배기측(320)에는 인입구(321)가 각각 형성시키며,The inlet port 311 is formed on the suction side 310, and the inlet port 321 is formed on the exhaust side 320, respectively.

상기 배기측(320) 인입구(321)의 전측 일단에는 순환급기밸브(120)를 통해 외부의 공기가 유입되는 순환급기인입구(322)가 내통 설치하는 한편, 상기 인출구(311)의 전측 일단에는 순환배기밸브(130)를 통해 공기를 외부로 방출하는 순환급기배기구(312)가 형성되고,At one end of the exhaust port 320, the inlet 321 is provided with a circulating air supply inlet 322 through which the outside air is introduced through the circulating air supply valve 120, while the front end of the outlet 311 is circulated. A circulating air supply exhaust pipe 312 for discharging air to the outside through the exhaust valve 130 is formed,

상기 흡입측(310)의 인출구(311) 일측에는 제진장치의 헤드부(200) 진공흡입장치(220)에서 흡입된 공기가 에어연결배관(240)을 거처 몸체내로 유입될 수 있도록 하는 에어유입구(313)가 구비하는 한편, 상기 배기측(320) 인입구(321)의 일측에는 제진장치 헤드부(200)의 진공분사장치(210)에 에어가 공급될 수 있도록 하는 에어출력구(323)를 각각 형성되며,An air inlet port at one side of the outlet port 311 of the suction side 310 allows the air sucked from the head 200 of the vibration suppression device 220 to be introduced into the body via the air connection pipe 240. 313 is provided on the one side of the inlet 321 of the exhaust side 320, each of the air output port 323 to allow air to be supplied to the vacuum injection device 210 of the vibration suppression head 200 Formed,

상기 밸브몸체 내부 흡입측(310) 중 인출구(311)와 에어유입구(313) 사이에는 상기 인출구(311)와 에어유입구(313) 사이를 연통되게 하거나 필요시 차단시킬 수 있음은 물론 나아가 상기 밸브몸체내부 흡입측(310)과 배기측(320) 사이 또한 연통/차단을 선택 조절할 수 있는 개폐작동용 밸브1(330)을 설치하는 한편,The valve body may be connected between the outlet 311 and the air inlet 313 between the outlet 311 and the air inlet 313 of the inlet side 310 of the valve body, or may be blocked if necessary, as well as the valve body. While installing an opening and closing valve 1 (330) that can selectively control the communication / blocking between the internal suction side 310 and the exhaust side 320,

상기 밸브몸체 내부 배기측(320)의 인입구(321)와 에어출력구(323) 사이에는 상기 인입구(321)와 에어출력구(323) 사이를 연통시키거나 필요시 차단할 수 있는 피스톤 형태의 개폐작동용 밸브2(350)를 실린더(360)의 작동에 의해 일정폭 작동되는 개폐작동봉(370)에 축 설치된다.Opening / closing operation of a piston type to communicate between the inlet 321 and the air output port 323 or to cut off if necessary between the inlet 321 and the air output port 323 of the exhaust body 320 inside the valve body. The valve 2 350 is axially installed on the opening / closing operation rod 370 which is operated at a predetermined width by the operation of the cylinder 360.

이와 같이 구성되는 양방향전환밸브(300)는 제진 운전시 개폐용 밸브1(340)이 실린더(260)의 작동으로 상기 양방향전환밸브(300)의 몸체내부 배기측(310)과 흡입측(320)의 중간부분을 자동으로 차단하기 때문에 팬구동모터(100)에서 발생된 에어가 그 팬구동모터(100)의 배기구(102)를 거친 후 양방향전환밸브(300)의 인입구(321)를 통해 밸브 몸체내에 인입된 다음 연통된 그 일측의 에어출력구(323)를 거처 헤드부(200)의 에어분사장치(210)로 일정압력의 에어가 배기 공급되게 하는 한편,The bidirectional switching valve 300 configured as described above has an opening / closing valve 1 (340) in operation of the cylinder 260 during the vibration suppression operation, and the body side exhaust side 310 and the suction side 320 of the bidirectional switching valve 300. Since the air is automatically cut off the middle portion of the fan driving motor 100 through the exhaust port 102 of the fan driving motor 100 through the inlet 321 of the bi-directional switching valve 300, the valve body While passing through the air output port 323 of the one side that is introduced into and communicates with the air injection device 210 of the head portion 200, the air of a predetermined pressure is exhausted,

상기 팬구동모터(100) 배기구(102)의 다른 측 흡입구(101)에서는 배기와 대응하는 흡입력이 발생됨에 따라서 상기 헤드부(200)의 분사장치(210)에서 분사된 에어 그리고 그 에어에 의해 탈락된 먼지 등의 이물질을 함께 그 분사장치(210)의 일측에 마련된 헤드부(200)의 에어흡입장치(220)에서 흡입 포집한 후 연결배관(240)과 이물질 제거용 라인필터(260)를 경유하여 양방향전환밸브(100)의 에어유입구(313)를 통해 밸브 몸체내부로 인입되고, 다시 연통된 일측의 인출구(311)로 통해 팬구동모터(100)의 흡입구(101)로 유입되게 함으로서 원활한 에어순환를 도모할 수 있다.At the other side inlet port 101 of the fan drive motor 100 exhaust port 102, the air injected from the injector 210 of the head part 200 is eliminated as the suction force corresponding to the exhaust is generated. The foreign substances such as dust and the like are collected by suction by the air suction device 220 of the head part 200 provided on one side of the injection device 210, and then pass through the connection pipe 240 and the line filter 260 for removing the foreign matter. By entering the inside of the valve body through the air inlet 313 of the bi-directional switching valve 100, and through the inlet port 311 of the communication side again flows into the inlet 101 of the fan drive motor 100 by smooth air Circulation can be planned.

또, 상기 제진장치 헤드부(200)의 분사장치(210)/흡입장치(220)에서 분사 및 흡입을 일시 중단한 상태인 비운전시(팬구동모터는 가동중임)에는 개폐용밸브1(340)은 배기측(320)의 인입구(321)와 에어출력구(323) 사이를 막고, 개폐용 밸브2(350)는 흡입측(310)의 인출구(311)와 에어유입구(313) 사이를 자동으로 각각 차단함에 따라서 양방향전환밸브(300)상에서 제진장치 헤드부(200)의 분사장치(210) 및 흡입장치(220)로 이어지는 통로가 완전히 차단된다. 단 팬구동모터(100)의 배기구(102)와 흡입구(101) 양방향 순환만 가능하고 또, 그 측단에 각각 구설된 순환급기밸브(120)와 순환배기밸브(130)의 각 실린더(124a) 작동과 급기팬(123)과 배기팬(133)의 회전작동으로 내부의 고온공기는 외부로 강제 방출시킴과 동시에 외부공기는 강제 유입시켜 모터(100)에서 발생되는 고열을 냉각시키는 등 보다 효과적인 에어순환을 도모하여 고온 혹은 과열의 누적으로 발생될 수 있는 고가인 모터(100)의 손상을 최소화할 수 있었다.In addition, the opening and closing valve 1 (340) during the non-operation (fan drive motor is in operation) in the state in which the injection and suction is suspended in the injection device 210 / suction device 220 of the vibration damper head 200. Is blocked between the inlet 321 of the exhaust side 320 and the air output port 323, the opening and closing valve 2 (350) is automatically between the outlet 311 and the air inlet 313 of the suction side (310) As the respective blocks, the passages leading to the injection device 210 and the suction device 220 of the vibration suppression head 200 on the bidirectional switching valve 300 are completely blocked. However, only the exhaust port 102 and the suction port 101 of the fan driving motor 100 can be circulated in both directions, and each cylinder 124a of the circulating air supply valve 120 and the circulating exhaust valve 130 respectively provided at the side ends thereof is operated. By rotating the supercharge fan 123 and the exhaust fan 133, the internal high temperature air is forced to be discharged to the outside, and the external air is forced to flow to cool the high temperature generated by the motor 100. By minimizing the damage to the expensive motor 100 that can be generated by the accumulation of high temperature or overheating.

이상과 같이 상세히 살펴본 본 발명의 양방향전환밸브는 제진 운전시 팬구동모터에서부터 헤드부의 분사장치 및 흡입장치 전체적으로 원활한 에어 순환을 도모함은 물론 헤드부의 분사장치와 흡입장치로 에어공급 및 흡입이 차단된 상태의 비운전시에도 방향전환밸브의 효율적인 개폐작동으로 팬구동모터의 배기구와 흡입구 상호간 에어 순환시켜 모터의 부하를 방지함은 물론 순환급기밸브 및 순환배기밸브에 의해 모터에서 발생되는 고온은 외부로 강제 방출하는 한편, 외부의 찬공기는 내부로 유입시켜 모터를 냉각시키는 고열에 의해 발생될 수 있는 모터의 손상을 최소화할 수 있는 자동컨트롤 양방향전환밸브를 제공하는 아주 유용한 발명이다.As described above, the bidirectional switching valve of the present invention promotes smooth air circulation from the fan driving motor to the head unit injector and the suction device during the damping operation, as well as the state in which the air supply and the suction are blocked by the head unit injector and the suction device. Efficient open / close operation of the directional valve even during non-operation, prevents the motor load by circulating air between the exhaust and intake ports of the fan drive motor, and forcibly releases the high temperature generated from the motor by the circulation supply valve and the circulation exhaust valve to the outside. On the other hand, the external cold air is a very useful invention to provide an automatic control bidirectional switching valve that can minimize the damage of the motor that can be caused by the high heat flowing into the inside to cool the motor.

Claims (1)

LCD, PDP 패널 제진장치의 방향전환밸브(300)는 내부 공간부가 흡입측(310)과 배기측(320)으로 구분시킨 다음,The direction switching valve 300 of the LCD and PDP panel vibration suppression device divides the inner space into the suction side 310 and the exhaust side 320, and 그 흡입측(310)에는 인출구(311)를 배기측(320)에는 인입구(321)가 각각 형성시키고,The inlet port 311 is formed at the suction side 310 and the inlet port 321 is formed at the exhaust side 320, respectively. 상기 배기측(320) 인입구(321)의 전측 일단에는 순환급기밸브(120)를 통해 외부의 공기가 유입되는 순환급기인입구(322)가 내통 설치하는 한편, 상기 인출구(311)의 전측 일단에는 순환배기밸브(130)를 통해 공기를 외부로 방출하는 순환급기배기구(312)가 형성되고,At one end of the exhaust port 320, the inlet 321 is provided with a circulating air supply inlet 322 through which the outside air is introduced through the circulating air supply valve 120, while the front end of the outlet 311 is circulated. A circulating air supply exhaust pipe 312 for discharging air to the outside through the exhaust valve 130 is formed, 상기 흡입측(310)의 인출구(311) 일측에는 에어유입구(313)가 구비하는 한편, 상기 배기측(320) 인입구(321)의 일측에는 에어출력구(323)를 각각 형성시키며,An air inlet 313 is provided at one side of the inlet 311 of the suction side 310, and an air outlet 323 is formed at one side of the inlet 321 of the exhaust side 320, respectively. 상기 밸브몸체 내부 흡입측(310) 중 인출구(311)와 에어유입구(313) 사이에는 상기 인출구(311)와 에어유입구(313) 사이를 연통되게 하거나 필요시 차단시킬 수 있음은 물론 상기 밸브(300) 몸체내부 흡입측(310)과 배기측(320) 사이 또한 연통/차단을 선택 조절할 수 있도록 하는 개폐작동용 밸브1(330)을 설치하는 한편, 상기 밸브몸체 내부 배기측(320)의 인입구(321)와 에어출력구(323) 사이에는 상기 인입구(321)와 에어출력구(323) 사이를 연통시키거나 필요시 차단할 수 있는 피스톤 형태의 개폐작동용 밸브2(350)를 실린더(360)의 작동에 의해 일정폭 작동되는개폐작동봉(370)에 축 설치하여서 된 것을 특징으로 한 패널 제진장치의 양방향전환밸브.The valve 300 may be connected between the outlet 311 and the air inlet 313 between the outlet 311 and the air inlet 313 of the valve body inlet side 310 and the air inlet 313 if necessary, as well as the valve 300. In addition, a valve 1 (330) for opening / closing operation is installed between the inner suction side 310 and the exhaust side 320 so as to selectively control communication / disconnection, while the inlet opening ( Between the inlet 321 and the air output port 323 between the inlet 321 and the air output port 323 or a piston type opening and closing operation valve 2 (350) which can be blocked if necessary to the cylinder 360 Bidirectional switching valve of the panel vibration suppressor, characterized in that the shaft is installed in the opening and closing operation rod 370 that is operated by a predetermined width.
KR1020040024003A 2004-04-08 2004-04-08 The bi-directional switch valve device of a mote removing device panel KR20040035661A (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11253897A (en) * 1998-03-11 1999-09-21 Alps Electric Co Ltd Dust removing device
JP2002246374A (en) * 2001-02-20 2002-08-30 Matsushita Electric Ind Co Ltd Plasma processor and maintenance method thereof
KR20030074542A (en) * 2003-08-25 2003-09-19 케이 이엔지(주) The mote removing device of LCD panel
KR20040033138A (en) * 2002-10-11 2004-04-21 삼성전자주식회사 Apparatus for treating a substrate
KR20040104040A (en) * 2003-06-02 2004-12-10 주성엔지니어링(주) Exhaust system of chemical vapor deposition apparatus

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11253897A (en) * 1998-03-11 1999-09-21 Alps Electric Co Ltd Dust removing device
JP2002246374A (en) * 2001-02-20 2002-08-30 Matsushita Electric Ind Co Ltd Plasma processor and maintenance method thereof
KR20040033138A (en) * 2002-10-11 2004-04-21 삼성전자주식회사 Apparatus for treating a substrate
KR20040104040A (en) * 2003-06-02 2004-12-10 주성엔지니어링(주) Exhaust system of chemical vapor deposition apparatus
KR20030074542A (en) * 2003-08-25 2003-09-19 케이 이엔지(주) The mote removing device of LCD panel

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