KR20040006486A - Method for aligning color filter array - Google Patents

Method for aligning color filter array Download PDF

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Publication number
KR20040006486A
KR20040006486A KR1020020040779A KR20020040779A KR20040006486A KR 20040006486 A KR20040006486 A KR 20040006486A KR 1020020040779 A KR1020020040779 A KR 1020020040779A KR 20020040779 A KR20020040779 A KR 20020040779A KR 20040006486 A KR20040006486 A KR 20040006486A
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South Korea
Prior art keywords
color filter
filter array
image sensor
sensor chip
filter arrays
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KR1020020040779A
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Korean (ko)
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최재성
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주식회사 하이닉스반도체
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Priority to KR1020020040779A priority Critical patent/KR20040006486A/en
Publication of KR20040006486A publication Critical patent/KR20040006486A/en

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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509Filters, e.g. light shielding masks
    • G02F1/133514Colour filters
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/201Filters in the form of arrays
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133526Lenses, e.g. microlenses or Fresnel lenses

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Solid State Image Pick-Up Elements (AREA)

Abstract

PURPOSE: A method for arranging color filter arrays is provided to improve a lifting characteristic by increasing adhesive force and arrange several color filter arrays in a small area, thereby efficiently reducing a chip area by simply changing shapes of color filter arrays. CONSTITUTION: Image sensor chip color filter arrays(100) are prepared. A photo diode is arranged under the image sensor chip color filter arrays. A microlens is arranged on the image sensor chip color filter arrays. The image sensor chip color filter arrays are hexagonal color filter arrays and are arranged at 120 deg. The photo diode and the microlens are arranged at 120 deg. respectively. In the image sensor chip color arrays, one box includes 7.5 pixels, wherein a red part(R), a green part(G), and a blue part(B) form one pixel.

Description

칼라필터 어레이 배열방법{Method for aligning color filter array}Method for aligning color filter array}

본 발명은 칼라필터 어레이 배열방법에 관한 것으로서, 보다 상세하게는 육각형 형태의 어레이를 구성하여 기존 사각형 형태의 칼라필터 어레이에 비해 효과적으로 좁은 면적내에 여러 개의 칼라피터 어레이를 배열하는 방법에 관한 것이다.The present invention relates to a method for arranging a color filter array, and more particularly, to a method of arranging a plurality of color pitter arrays in a narrow area more effectively than a conventional color filter array by configuring a hexagonal array.

최근 IMT 2000 등 보빌 제품에 이미지 센서 등이 탑재되기 시작하면서 기존 이미지 센서에 비해 동일한 칼라필터 어레이 개수를 가지면서 제품의 사용전압이 낮고 칩 크기가 작은 제품을 만들기 위해 최근 몇 년 사이에 0.5 급 기술에서 0.18급 기술이 필요한 상황으로 변화해 가고 있다.In recent years, as image sensors, etc., have been installed in Beauville products such as IMT 2000, 0.5 grade technology has been developed in recent years to make products with the same number of color filter arrays as compared to existing image sensors, and have low voltage and small chip size. Is changing to a situation where 0.18 grade technology is needed.

이러한 이미지 센서 제품의 경우 칩 크기를 줄이는데 가장 중요한 역할을 할 수 있는 것이 칼라필터 어레이의 면적을 줄이는 것이다.For these image sensor products, the most important role to reduce chip size is to reduce the area of the color filter array.

하지만 이러한 경우 빛을 받아 들이는 감도가 줄어 들게 되어 칼라필터 어레이 면적을 줄이는데 한계점을 가지게 된다.However, in this case, the sensitivity to receiving light is reduced, which limits the area of the color filter array.

이러한 문제의 해결을 위해 더욱 감도가 좋은 포토다이오드 구조를 설계하는 등 설계 측면에서의 여러 가지 고려할 점들이 있으나 여전히 어느 정도의 문제를 가지고 있는 것이 현실이다.In order to solve this problem, there are many considerations in terms of design, such as designing a more sensitive photodiode structure, but there are still some problems.

또한, 점차적으로 칼라필터 어레이 면적을 줄이게 되므로써 칼라필터 어레이공정 자체에서도 여러 가지 문제점들이 생기고 있다.In addition, as the color filter array area is gradually reduced, various problems occur in the color filter array process itself.

그 한 예가 각각의 칼라필터 어레이 크기가 줄어 듦에 따라 접착 문제로 인한 패턴 리프팅 현상이 발생한다는 것이다.An example of this is that as each color filter array size is reduced, pattern lifting due to adhesion problems occurs.

그리고, 도 1에서와 같이, 기본적으로 사각형 형태의 칼라필터 어레이(10)를 이용할 경우 대칭적으로 포토다이오드를 배열하기 위해 한가지 색을 두군데 배열한 후 평균치를 이용해서 소자를 동작시키게 된다. 즉, 하나의 박스(box)내에는 한 개의 빨간색부(R)와 두 개의 그린색부(G) 및 한 개의 파란색부(B)가 하나의 화소를 구성하고, 이러한 화소 6개가 포함되어 있다.In addition, as shown in FIG. 1, in the case of using the color filter array 10 having a rectangular shape, an element is operated using an average value after arranging two colors to symmetrically arrange photodiodes. That is, one red part R, two green color parts G, and one blue part B constitute one pixel in one box, and six such pixels are included.

하지만, 이러한 사각형 형태의 칼라필터 어레이 배열을 하는 경우에 효과적으로 좁은 면적내에 여러 개의 칼라필터 어레이를 배열할 수 없게 된다.However, in the case of arranging the color filter array of the rectangular shape, it is impossible to effectively arrange a plurality of color filter arrays in a narrow area.

따라서, 이러한 리프팅 문제와 좁은 면적내에 여러개의 칼라필터 어레이를 배열하는 문제들을 해결하기 위해 지속적으로 물질 개발을 하고는 있지만 이 역시 어느 정도의 문제를 항상 가지고 있는 것이 사실이다.Therefore, although the material development continues to solve these lifting problems and the problem of arranging multiple color filter arrays in a small area, it is true that there are always some problems.

이에 본 발명은 상기 종래기술의 제반 문제점을 해결하기 위하여 안출한 것으로서, 육각형 형태의 칼라필터 어레이를 구성하여 기존 사각형 형태의 칼라필터 어레이에 비해 효과적으로 좁은 면적내에 여러 개의 칼라필터 어레이를 배열할 수 있는 칼라필터 어레이 배열방법을 제공함에 그 목적이 있다.Accordingly, the present invention has been made to solve the above problems of the prior art, it is possible to arrange a plurality of color filter array in a narrow area more effectively than the conventional rectangular color filter array by configuring a hexagonal color filter array It is an object of the present invention to provide a color filter array arrangement method.

도 1은 종래기술에 따른 칼라필터 어레이 배열방법에 있어서, 사각형 형태의 칼라필터 어레이를 배열하였을 때의 도면.BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view of arranging a color filter array having a rectangular shape in a method of arranging a color filter array according to the related art.

도 2는 본 발명에 따른 칼라필터 어레이 배열방법에 있어서, 육각형 형태의 칼라필터 어레이를 배열하였을 때의 도면.FIG. 2 is a view of arranging a color filter array of hexagonal shape in the method of arranging a color filter array according to the present invention; FIG.

[도면부호의설명][Description of Drawing Reference]

100 : 칼라필터R : 빨간색부100: color filter R: red part

G : 그린색부B : 파란색부G: Green part B: Blue part

상기 목적을 달성하기 위한 본 발명에 따른 칼라필터 어레이 배열방법은, 이미지 센서 칩 칼라필터 어레이를 준비하는 단계; 상기 이미지 센서 칩 칼라필터 어레이하부에 포토다이오드를 배치하는 단계; 및 상기 이미지 센서 칩 칼라필터 어레이상부에 마이크로 렌즈를 배치하는 단계를 포함하되, 상기 이미지 센서 칩 칼라필터 어레이는 육각형 형태의 칼라필터 어레이를 이용하는 것을 특징으로한다.Color filter array arrangement method according to the present invention for achieving the above object comprises the steps of preparing an image sensor chip color filter array; Disposing a photodiode under the image sensor chip color filter array; And disposing a microlens on the image sensor chip color filter array, wherein the image sensor chip color filter array uses a hexagonal color filter array.

(실시예)(Example)

이하, 본 발명에 따른 칼라필터 어레이 배열방법을 첨부된 도면을 참조하여 상세히 설명한다.Hereinafter, a color filter array arrangement method according to the present invention will be described in detail with reference to the accompanying drawings.

도 2는 본 발명에 따른 칼라필터 어레이 배열방법에 있어서, 육각형 형태의 칼라필터 어레이를 배열하였을 때의 도면이다.2 is a view of arranging a color filter array having a hexagonal shape in the method of arranging a color filter array according to the present invention.

본 발명에 따른 칼라필터 이미지 배열방법은, 도면에 도시하지는 않았지만, 먼저 이미지 센서 칩 칼라필터 어레이를 준비한다음, 상기 이미지 센서 칩 칼라필터 어레이하부 및 상부에 포토다이오드와 마이크로 렌즈를 각각 배치한다.In the color filter image arranging method according to the present invention, although not shown in the drawing, first, an image sensor chip color filter array is prepared, and photodiodes and micro lenses are disposed below and on the image sensor chip color filter array, respectively.

이때, 칼라필터 어레이는 육각형 형태의 칼라필터 어레이를 이용하며, 각각 120。 씩 배열하도록 한다.At this time, the color filter array uses a hexagonal color filter array, each 120 ° to be arranged.

또한, 상기 칼라필터 어레이배열 공정순서는 RGB의 어떤 순서에 무관하게 배열하도록 한다.In addition, the color filter array array process order is to be arranged irrespective of any order of RGB.

그리고, 칼라필터 어레이 하부 및 상부에 배치된 포토다이오드와 마이크로렌즈는 각각 120。 씩 배열하도록 한다.The photodiodes and the microlenses disposed below and above the color filter array are arranged by 120 °, respectively.

본 발명에 따른 칼라필터 어레이 배열방법은, 도 2에 도시된 바와같이, 육각형 형태의 칼라필터 어레이를 제조하여 배열할 경우 기존 사각형 형태의 칼라필터 어레이를 제조해서 배열할 경우와 비교하여 125%로 동일 면적내에서의 밀도를 높일 수 있게 된다.In the method of arranging the color filter array according to the present invention, as shown in FIG. 2, when manufacturing and arranging the hexagonal color filter array, the color filter array is 125% compared with the case of manufacturing and arranging the conventional rectangular color filter array. The density in the same area can be increased.

이러한 밀도의 증가는 기본적으로 사각형 형태의 칼라필터 어레이를 이용할 경우 대칭적으로 포토다이오드를 배열하기 위해 한가지 색을 두군데 배열한 후 평균치를 이용해서 소자를 동작시키는데 반해 본 발명에서의 육각형 형태의 칼라필터 어레이(100)를 이용할 경우에는 각각 색 별로 하나의 칼라필터 어레이만을 배열하 f수 있는데서 기인한다. 즉, 하나의 박스(box)내에는 한 개의 빨간색부(R)와 한 개의 그린색부(G) 및 한 개의 파란색부(B)가 하나의 화소를 구성하고, 이러한 화소 7.5 개 정도가 포함되어 있다.This increase in density is basically a hexagonal color filter in the present invention, while using a color filter array in the form of a square to align the photodiodes to symmetrically arranged the photodiode and then operate the device using the average value In the case of using the array 100, only one color filter array can be arranged for each color. That is, in one box, one red part R, one green part G, and one blue part B constitute one pixel, and about 7.5 pixels are included. .

상기에서 설명한 바와같이, 본 발명에 따른 칼라필터 어레이 배열방법에서적용한 육각형 형태의 칼라필터 어레이는 기존 사각형 형태의 칼라필터 어레이에 비해 원형에 가까운 모양을 가지게 되고 이러한 이유로 해서 접착력이 더 우수하게 되어 동일 크기의 패턴 경우에도 리프팅에 대한 특성이 우수해진다는 부과 효과를 얻을 수 있게 된다.As described above, the hexagonal color filter array applied in the method for arranging the color filter array according to the present invention has a shape closer to the circle than the color filter array of the conventional rectangular shape, and for this reason, the adhesive force is superior to the same. Even in the case of the pattern of size, it is possible to obtain a charging effect that the characteristics for lifting are excellent.

그리고, 덧붙여 완전히 대칭한 구조를 갖게 되면서 원하는 칼라필터 어레이 각각의 두께에 따라 RGB 칼라를 원하는 순서대로 공정하여도 각각 공정의 특이 변화없이 적용할 수 있다는 부과 효과 역시 얻을 수 있다.In addition, it has a fully symmetrical structure, and the imposing effect of applying the RGB color according to the thickness of each desired color filter array in a desired order without any specific change in the process can also be obtained.

결론적으로 본 발명을 칼라필터 어레이 공정에 활용하면 선명도 증가를 위해 물질을 개선한다든지 혹은 감도와 리프트(lifting) 등의 손해를 보면서 작은 크기의 칼라필터 어레이를 사용한다든지 하는 변화없이 단지 칼라필터 어레이의 형태를 변경, 배열시키므로써 칩 면적을 효과적으로 줄일 수 있다. 물론, 칼라필터 어레이하부의 포토다이오드 및 상부의 마이크로렌즈도 동일한 방식으로 배열하여야 한다.In conclusion, when the present invention is used in the color filter array process, only the color filter array can be used without changing the material for the purpose of increasing the clarity, or using the small size color filter array with the loss of sensitivity and the lifting. By changing and arranging the shape, the chip area can be effectively reduced. Of course, the photodiodes below the color filter array and the microlenses above must also be arranged in the same manner.

따라서, 칩면적 감소에 따른 수율향상이 기대되어 칩면적 감소에 따른 웨이퍼당 제품 개수가 증대되고, 접착력 증대를 통한 공정안정성 향상으로 소자 개발 및 생산수율 향상 등의 효과를 얻을 수 있다.As a result, the yield is expected to increase according to the reduction of the chip area, thereby increasing the number of products per wafer due to the reduction of the chip area, and improving the process stability by increasing the adhesive force, thereby improving the device development and the production yield.

한편, 본 발명은 상술한 특정의 바람직한 실시예에 한정되지 아니하며, 청구범위에서 청구하는 본 발명의 요지를 벗어남이 없이 당해 발명이 속하는 분야에서 통상의 지식을 가진 자라면 누구든지 다양한 변경 실시가 가능할 것이다.On the other hand, the present invention is not limited to the above-described specific preferred embodiments, and various changes can be made by those skilled in the art without departing from the gist of the invention claimed in the claims. will be.

Claims (5)

이미지 센서 칩 칼라필터 어레이를 준비하는 단계;Preparing an image sensor chip color filter array; 상기 이미지 센서 칩 칼라필터 어레이하부에 포토다이오드를 배치하는 단계; 및Disposing a photodiode under the image sensor chip color filter array; And 상기 이미지 센서 칩 칼라필터 어레이상부에 마이크로 렌즈를 배치하는 단계를 포함하되, 상기 이미지 센서 칩 칼라필터 어레이는 육각형 형태의 칼라필터 어레이를 이용하는 것을 특징으로하는 칼라필터 어레이 배열방법.And arranging a micro lens on the image sensor chip color filter array, wherein the image sensor chip color filter array uses a hexagonal color filter array. 제1항에 있어서, 상기 칼라필터 어레이를 각각 120。 씩 배열하는 것을 특징으로하는 칼라필터 어레이 배열방법..2. The color filter array arrangement method according to claim 1, wherein the color filter arrays are arranged by 120 degrees each. 제1항에 있어서, 상기 칼라필터 어레이공정순서는 RGB의 어떤 순서에 무관한 것을 특징으로 하는 칼라필터 어레이 배열방법.The method of claim 1, wherein the color filter array process sequence is independent of any order of RGB. 제1항에 있어서, 칼라필터 어레이 하부의 포토다이오드를 각각 120。 씩 배열하는 것을 특징으로하는 칼라필터 어레이 배열방법.The color filter array arrangement method according to claim 1, wherein photodiodes under the color filter array are arranged by 120 degrees each. 제1항에 있어서, 상기 칼라필터 어레이 상부의 마이크로렌즈 어레이를 각각 120。씩 배열하는 것을 특징으로하는 칼라필터 어레이 배열방법.The color filter array arrangement method of claim 1, wherein the microlens arrays on the color filter array are arranged by 120 degrees each.
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JPS61282823A (en) * 1985-06-07 1986-12-13 Sanyo Electric Co Ltd Liquid crystal panel for color television
JPH07261166A (en) * 1994-03-23 1995-10-13 Hideo Yamamoto Method for arranging color filter pixel of liquid crystal display device
KR20010032543A (en) * 1997-11-28 2001-04-25 모리시타 요이찌 Reflection-type display device and image device using reflection-type display device

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JPS61282823A (en) * 1985-06-07 1986-12-13 Sanyo Electric Co Ltd Liquid crystal panel for color television
JPH07261166A (en) * 1994-03-23 1995-10-13 Hideo Yamamoto Method for arranging color filter pixel of liquid crystal display device
KR20010032543A (en) * 1997-11-28 2001-04-25 모리시타 요이찌 Reflection-type display device and image device using reflection-type display device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7511323B2 (en) 2005-08-11 2009-03-31 Aptina Imaging Corporation Pixel cells in a honeycomb arrangement
US7704781B2 (en) 2005-08-11 2010-04-27 Aptina Imaging Corporation Pixel cells in a honeycomb arrangement
US7825970B2 (en) 2006-07-19 2010-11-02 Samsung Electronics Co., Ltd. CMOS image sensor and image sensing method using the same

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