KR200319312Y1 - Flow detect system - Google Patents
Flow detect system Download PDFInfo
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- KR200319312Y1 KR200319312Y1 KR20-2003-0011555U KR20030011555U KR200319312Y1 KR 200319312 Y1 KR200319312 Y1 KR 200319312Y1 KR 20030011555 U KR20030011555 U KR 20030011555U KR 200319312 Y1 KR200319312 Y1 KR 200319312Y1
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- flow rate
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
- G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
- G01F1/38—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of a movable element, e.g. diaphragm, piston, Bourdon tube or flexible capsule
- G01F1/383—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of a movable element, e.g. diaphragm, piston, Bourdon tube or flexible capsule with electrical or electro-mechanical indication
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F3/00—Measuring the volume flow of fluids or fluent solid material wherein the fluid passes through the meter in successive and more or less isolated quantities, the meter being driven by the flow
- G01F3/02—Measuring the volume flow of fluids or fluent solid material wherein the fluid passes through the meter in successive and more or less isolated quantities, the meter being driven by the flow with measuring chambers which expand or contract during measurement
- G01F3/20—Measuring the volume flow of fluids or fluent solid material wherein the fluid passes through the meter in successive and more or less isolated quantities, the meter being driven by the flow with measuring chambers which expand or contract during measurement having flexible movable walls, e.g. diaphragms, bellows
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- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
Abstract
본 고안은 유량검출장치에 관한 것으로, 더욱 구체적으로는 액체 또는 기체등의 유체가 배관을 통해 밸브의 관로로 유입될때의 압력과 유출될때의 유체압력차이 및 관로의 유체공급시간을 감지하고 이를 연산처리하여 유량을 정확하게 측정할수 있고 그 구조를 간단하게 구성하여서 된 것이다.The present invention relates to a flow rate detection device, and more specifically, it detects and calculates the pressure when the fluid, such as liquid or gas, flows into the pipe line of the valve through the pipe, and the fluid pressure difference when the pipe flows out and calculates the fluid supply time of the pipe line. The flow rate can be accurately measured by processing, and the structure is simple.
즉, 밸브몸체(10)의 입ㆍ출력단관로(11)에 각각 설치한 압력센서(12)(12')와, 상기 압력센서(12)(12')사이의 관로(11)를 개폐하는 다이어프램(13)과, 다이어프램(13)은 공기압으로 작동되는 피스톤(16)과 결합하고, 피스톤(16)의 연결로드(16a)에 검출소자(18)를 부착하여 감지센서(19)로 감지하는 구성으로 됨을 특징으로 하는 유량검출장치이다.That is, opening and closing the pipeline 11 between the pressure sensors 12 and 12 'installed in the input / output end pipe passage 11 of the valve body 10 and the pressure sensors 12 and 12', respectively. The diaphragm 13 and the diaphragm 13 are coupled to the piston 16 which is operated by pneumatic pressure, and the detection element 18 is attached to the connecting rod 16a of the piston 16 to sense the detection sensor 19. It is a flow rate detection device characterized in that the configuration.
Description
본 고안은 유량검출장치에 관한 것으로, 더욱 구체적으로는 액체 또는 기체등의 유체가 배관을 통해 밸브의 관로로 유입될때의 압력과 유출될때의 유체압력차이 및 관로의 유체공급시간을 감지하고 이를 연산처리하여 유량을 정확하게 측정할수 있고 그 구조를 간단하게 구성하여서 된 것이다.The present invention relates to a flow rate detection device, and more specifically, it detects and calculates the pressure when the fluid, such as liquid or gas, flows into the pipe line of the valve through the pipe, and the fluid pressure difference when the pipe flows out and calculates the fluid supply time of the pipe line. The flow rate can be accurately measured by processing, and the structure is simple.
유량검출장치는 배관을 통해 흐르는 유량을 측정하기 위해서 액체 또는 기체등의 유체가 연속성을 가지고 일정량과 일정시간에 투입되어야 하고, 그 공급된 유체가 시간에 따라 어느정도의 량이 공급되었는지를 순시값/적산값으로 정확하게 디스플레이(Display)하고 이를 근거로 제공공정관리및 각종 분석자료로 활용되어지므로 매우 중요한 역할을 하게 된다.In order to measure the flow rate flowing through the pipe, the flow rate detection device should be supplied with a continuous amount of fluid such as a liquid or a gas in a certain amount and at a certain time, and the instantaneous value / integration of how much the supplied fluid is supplied with time It plays a very important role because it is accurately displayed as a value and used as a process management and various analysis data based on it.
상기와 같은 유량검출장치를 구성하는데 따른 종래의 유체공급장치는 일정량을 연속적으로 흐르게 되는 수동밸브(Manual valve), 일정량을 일정주기 또는 임의로 유량을 공급하는 에어작동밸브(Air operated valve)그리고 유량을 측정하는 각종유량계(터빈, 초음파, 면적식, 용적식, 차압식, 질량식, 유량계)등이 구성요소를 이루고 있으며, 이러한 구성요소들은 한가지의 기능만 갖고 있으므로 이를 각각 설치해야 된다.Conventional fluid supply apparatus according to the configuration of the flow rate detection device as described above is a manual valve (Manual valve) to flow a certain amount continuously, a certain period of time or an air operated valve (Air operated valve) for supplying a certain flow rate and the flow rate Various flowmeters (turbine, ultrasonic, area, volumetric, differential pressure, mass, and flowmeters) are measured and these components have only one function.
특히, 정확한 유량 측정및 제어가 필요한 반도체/LCD제조공정의 경우에는 항상 연속성을 가지고 일정량과 일정시간에 유체가 투입되어야 하므로 이러한 공정시스템을 구성함에 있어서 밸브와 유량계는 필수적인 구성요소인 것이다.In particular, in the case of semiconductor / LCD manufacturing process that requires accurate flow rate measurement and control, the fluid must be injected in a certain amount and time with continuity, so that the valve and the flow meter are essential components in the process system.
그러나 상기의 유량검출장치를 구성하는데 따른 문제점은 다음과 같다.However, the problem of configuring the above-described flow rate detection device is as follows.
첫째, 밸브와 플로메타, 튜브등이 함께 구성요소로서 설치되어야 하기 때문에 많은 구성부품을 구비하는데 따른 비용이 많이 든다.First, the valve, flow meter, tube, etc. must be installed together as a component, it is expensive to have many components.
둘째, 밸브와 플로메타를 많은 튜브(Tube)로서 연결해야 되므로 설치공간을 많이 차지하게 된다.Second, since the valve and the flowmeter must be connected as many tubes, it takes up a lot of installation space.
셋째, 튜브로서 많은 구성부품을 연결하게 되면서 장기간 사용시에 연결부위를 통해 누출될 우려가 크고, 만약 화학약품등으로 된 유체가 누출되었을 때는 치명적인 인명피해 및 장비파손의 우려가 있다.Third, as many components are connected as a tube, there is a high risk of leaking through the connection part during long-term use, and if a fluid such as a chemical leaks, there is a risk of fatal injury and equipment damage.
넷째, 많은 구성부품과 이를 튜브로 각각 연결하는 구성이 복잡하게 되면서 유체의 운동에너지에서 발생되어지는 환경적인 변수에 의해 측정오차가 커지므로 재현성및 신뢰성이 떨어지게 된다.Fourth, as the complexity of the components and the configuration connecting them to each tube becomes complicated, the measurement error is increased due to environmental variables generated from the kinetic energy of the fluid, thereby reducing reproducibility and reliability.
본 고안은 이러한 문제점을 해결하기 위하여, 유체의 흐름에 따라 발생하는 유체의 운동에너지에 의해 유체압력차이및 밸브가 개폐될때 발생되는 유체공급시간을 감지하여 유체의 유량을 정확하고 안정되게 측정하여 유량공급을 할수 있도록 한 것이다.In order to solve this problem, the present invention detects the fluid pressure difference and the fluid supply time generated when the valve is opened and closed by the kinetic energy of the fluid generated by the flow of the fluid to accurately and stably measure the flow rate of the fluid. It is to be able to supply.
도 1은 본 고안에 따른 유량검출밸브의 관로 차단상태 단면도1 is a cross-sectional view of the pipeline blocked state of the flow detection valve according to the present invention
도 2는 본 고안에 따른 유량검출밸브의 관로 개방상태 단면도Figure 2 is a sectional view of the pipeline open state of the flow rate detection valve according to the present invention
도 3은 본 고안의 제어부의 블럭도3 is a block diagram of a controller of the present invention
* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings
10 : 밸브몸체 11 : 관로10: valve body 11: pipe
12,12' : 압력센서 13 : 다이어프램12,12 ': Pressure sensor 13: Diaphragm
13a : 결합돌부 14 : 에어작동케이스13a: engaging protrusion 14: air operation case
14a : 에어공급부 15 : 스태핑14a: air supply 15: stepping
16 : 피스톤 16a : 연결로드16: piston 16a: connecting rod
17 : 스프링 18 : 검출소자17 spring 18 detection element
19 : 감지센서 20 : 제어부19: detection sensor 20: control unit
21 : 신호전송부 22 : 마이크로프로세서부21: signal transmission unit 22: microprocessor unit
23 : 디스플레이부23: display unit
본 고안은 배관을 통해 액체 또는 기체등의 유체가 흐르는 밸브몸체(Valve Body)(10)의 관로(11)를 피스톤(16)이 작동하여 다이어프램(13)으로 개폐시키되 상기 피스톤(16)이 작동될때 따라 움직이는 연결로드(16a)에 부착시킨 검출소자(18)에 의해 감지센서(19)에서 이를 감지하여 제어부(20)로 전달하고, 상기 제어부(20)는 상기 감지신호를 통해 입력된 정보를 연산, 보정한후 이를 디스플레이(display)하는 구성과, 상기 밸브몸체(10)입ㆍ출력단관로(11)상에 구비되어 유량을 검출하는 압력센서(12)(12')와, 상기 피스톤(16)작동을 위해 외부로 부터 유입되어지는 에어(Air)를 제어하는 에어작동케이스(14), 스태핑(15)등으로 되어 있다.According to the present invention, the piston (16) is opened and closed by the diaphragm (13) by operating the pipe (11) of the valve body (Valve Body) 10 through which a fluid such as liquid or gas flows through the pipe, but the piston 16 is operated. When detected by the detection element 18 attached to the connecting rod (16a) that moves when the transfer to the control unit 20, the control unit 20 receives the information input through the detection signal The pressure sensor 12 (12 ') provided on the valve body (10) input / output end pipe (11) for detecting the flow rate, and the piston ( 16) Air operation case 14, stepping 15, etc. to control the air (Air) flowing from the outside for operation.
이러한 본원 고안의 구성을 도면에 의하여 더욱 상세히 설명하면 다음과 같다.Referring to the configuration of the present invention in more detail by the drawings as follows.
도 1및 도 2는 본 고안에 의한 유량검출밸브의 구성을 나타낸 것으로서, 유체가 흐르는 배관과 연결되는 밸브몸체(10)와, 상기 밸브몸체(10)의 입ㆍ출력단 관로(11)에 각각 설치한 압력센서(12)(12')와, 상기 압력센서(12)(12')사이에서 관로(11)를 개폐하여 유량을 제어하는 다이어프램(13)과, 상기 다이어프램(13)의 양단은 스태핑(15)으로 지지하고 다이어프램(13) 중앙에 형성한 결합돌부(13a)는 피스톤(16)과 결합하여 피스톤(16)으로 다이어프램(13)을 작동시키고, 상기 피스톤(13)은 에어작동케이스(14)내에 설치되어 탄성스프링(17)으로 피스톤(16)일측을 일정한 힘으로 압지시키고 에어공급부(14a)에 의한 공기압으로 피스톤(16)을 작동시키며, 피스톤(16)의 상단중앙은 연결로드(16a)를 결합하고 그 연결로드(16a)의 상단부일측에 검출소자(18)를 부착하여 일측의 감지센서(19)로 관로(11)의 개폐상태를 검출하도록 하되 상기 압력센서(12)(12')및 감지센서(19)의 감지신호는 마이크로프로세서가 구비된 제어부(20)로 전송되게 한다.1 and 2 show the configuration of the flow rate detection valve according to the present invention, which is installed in the valve body 10 connected to the pipe through which the fluid flows, and in the input / output end pipe 11 of the valve body 10, respectively. A diaphragm 13 for controlling the flow rate by opening and closing the conduit 11 between the pressure sensors 12 and 12 'and the pressure sensors 12 and 12', and both ends of the diaphragm 13 are stepped. A coupling protrusion 13a formed at the center of the diaphragm 13, supported by 15, is engaged with the piston 16 to operate the diaphragm 13 by the piston 16, and the piston 13 is an air operation case ( 14 is installed in the elastic spring 17 to press one side of the piston 16 with a constant force, and to operate the piston 16 by the air pressure by the air supply unit 14a, the upper center of the piston 16 is connected to the connecting rod ( 16a) and the detection element 18 is attached to one side of the upper end of the connecting rod (16a) to detect one side of the sensor ( 19 to detect the opening and closing state of the conduit 11, the detection signal of the pressure sensor 12, 12 'and the sensor 19 is transmitted to the control unit 20 equipped with a microprocessor.
상기 검출소자(18)는 펄스를 송신하는 영구자석으로 구비하여 펄스신호를 전송하는 감지센서(19)에서 펄스신호를 감지하는 수단으로 하거나, 리드센서, 홀센서,광센서등을 적용하여 감지할수 있는 검출소자(18)를 구성하여 이를 감지센서(19)에 의해 감지할수 있는 여러형태의 감지수단을 갖도록 할수 있기 때문에 본 고안에서는 검출소자(18)및 감지센서(19)의 구성요소에 대하여는 한정하지 않는다.The detection element 18 may be provided as a permanent magnet for transmitting pulses and used as a means for detecting a pulse signal in a detection sensor 19 for transmitting a pulse signal or by applying a reed sensor, a hall sensor, an optical sensor, or the like. Since the detection element 18 can be configured to have various types of detection means that can be detected by the detection sensor 19, the present invention is limited to the components of the detection element 18 and the detection sensor 19. I never do that.
도 3은 본 고안의 유량검출밸브에 의해 검출된 신호를 연산, 보정해 주고 디스플레이 해주는 제어부(20)를 나타낸 것으로, 유량검출밸브의 압력센서(12)(12')및 유량개폐감지센서(19)로 부터 전송된 감지신호가 신호전송부(21)를 통해 마이크로프로세서부(22)로 인가되고 마이크로프로세서부(22)는 양단의 압력센서(12)(12')에서 감지된 유체의 압력차이 및 유량개폐감지센서(19)에서 감지된 유체의 공급시간을 각각 연산하고 점도를 가지는 유체에 대해서는 점도를 보정한 다음 연산처리된 신호를 디지탈로 표시해주는 디스플레이부(23)를 통해 측정된 유량을 순시값/적산값으로 나타내도록 한 것이다.Figure 3 shows the control unit 20 for calculating, correcting and displaying the signal detected by the flow rate detection valve of the present invention, the pressure sensor 12 (12 ') and the flow opening and closing detection sensor 19 of the flow rate detection valve The detection signal transmitted from) is applied to the microprocessor unit 22 through the signal transmission unit 21, and the microprocessor unit 22 is the pressure difference of the fluid detected by the pressure sensors 12 and 12 'at both ends. And a flow rate measured through the display unit 23 which calculates a supply time of the fluid sensed by the flow rate switching sensor 19, corrects the viscosity of the fluid having a viscosity, and then displays the calculated signal digitally. It is shown as instantaneous value / integrated value.
이와같이 된 본 고안은 액체 또는 기체등의 유체가 배관을 통해 밸브몸체(10)의 관로(11)를 흐르게 될때 관로(11)의 입ㆍ출력단에 흐르는 유체압력이 관로(11)의 입ㆍ출력단에 각각 설치한 압력센서(12)(12')에 의해 감지되어 그 유체압력을 제어부(20)로 전송시키고, 상기 압력센서(12)(12')사이의 관로(11)에 흐르는 유체를 다이어프램(13)으로 개폐시키되 다이어프램(13)은 공기압으로 작동되는 피스톤(16)으로 제어하고 그 피스톤(16)의 연결로드(16a)에 검출소자(18)가 부착되어 감지센서(19)에 의해 다이프램(13)으로 관로(11)를 개폐시킨 상태의 유체공급시간을 감지하여 제어부(20)로 전송시키게 된다.According to the present invention, when the fluid such as liquid or gas flows into the conduit 11 of the valve body 10 through the pipe, the fluid pressure flowing through the inlet and outlet of the conduit 11 is applied to the inlet and outlet of the conduit 11. Each of the pressure sensors 12 and 12 'installed to sense the fluid pressure is transmitted to the control unit 20, and the fluid flowing in the conduit 11 between the pressure sensors 12 and 12' diaphragm ( 13) The diaphragm 13 is controlled by a piston 16 which is operated by pneumatic pressure, and the detection element 18 is attached to the connecting rod 16a of the piston 16 so that the diaphragm is detected by the sensor 19. (13) detects the fluid supply time in the state in which the pipeline 11 is opened and closed and transmits to the control unit 20.
즉, 관로(11)의 입ㆍ출력단에 흐르는 유체압력을 압력센서(12)(12')에 의해 감지함과 아울러 관로(11)의 유체공간시간을 유체개폐감지센서(19)에 의해 감지하여 이를 제어부(20)로 전송시키게 되면 제어부(20)에서는 관로(11)입ㆍ출력단의 유체압력차이및 유체공급시간을 마이크로프로세서부(22)에서 연산처리하여 디스플레이부(23)에 순시값/적산값으로 측정유량을 나타내게 된다.That is, the fluid pressure flowing through the input and output terminals of the conduit 11 is sensed by the pressure sensors 12 and 12 ', and the fluid space time of the conduit 11 is detected by the fluid open / close detection sensor 19. When this is transmitted to the control unit 20, the control unit 20 calculates the fluid pressure difference and the fluid supply time of the pipeline 11 input / output terminals by the microprocessor unit 22 to process the instantaneous value / integration on the display unit 23. The value indicates the flow rate.
또한, 상기의 압력센서(12)(12')는 배관을 통해 관로(11)를 흐르는 유체의 종류에 따른 변수(온도, 압력등)를 감지하여 제어부(20)의 마이크로프로세서부(22)에서 이를 보정하는 수단으로 정확한 유량측정을 하게 된다.In addition, the pressure sensors 12 and 12 ′ detect a variable (temperature, pressure, etc.) according to the type of fluid flowing through the pipe 11 through a pipe, and then detect the variable at the microprocessor unit 22 of the control unit 20. As a means of compensating for this, accurate flow measurement is performed.
본 고안은 상기의 실시예를 참고하여 설명하였지만 본 고안의 기술사상범위내에서 다양한 변형실시가 가능함은 물론이다.Although the present invention has been described with reference to the above embodiments, various modifications are possible within the technical scope of the present invention.
이상에서 설명한 바와 같이 본 고안의 유량검출장치는, 액체 또는 기체등의유체가 밸브몸체의 관로를 흐르게 될때 관로의 입ㆍ출력단에 설치한 압력센서에 의해 유체압력을 각각 감지하고 이를 제어부에서 유체압력차이를 연산처리함과 아울러 관로의 입ㆍ출력단사이에 설치된 다이어프램으로 관로를 개폐하되 그 관로를 공기압으로 제어하는 피스톤의 연결로드에 부착된 검출소자를 감지센서에 의해 감지하여 관로의 개폐에 따른 유체공급시간을 제어부에서 연산처리하는 수단으로 유량을 정확하게 측정할수 있게 된다.As described above, the flow rate detection device of the present invention detects the fluid pressure by a pressure sensor installed at the input and output ends of the pipeline when a fluid such as liquid or gas flows through the pipeline of the valve body. In addition to calculating and processing the difference, the diaphragm installed between the input and output ends of the pipeline opens and closes the pipeline, but detects the detection element attached to the connecting rod of the piston that controls the pipeline with air pressure by using a sensor to detect the fluid. The flow rate can be accurately measured by means of calculating the supply time at the controller.
그리고 측정된 유량은 순시값과 적산값으로 디스플레이부를 통해 표시되기 때문에 정확한 유량조정이 가능하게 되어 사용자의 요구사항으로 유량공급을 할수 있게 된다.Since the measured flow rate is displayed through the display unit as an instantaneous value and an integrated value, accurate flow rate adjustment is possible, so that the flow rate can be supplied as a user requirement.
또한, 본 고안은 별도의 유량계 및 이에 따른 각종 구성부품을 사용하지 않고 하나의 검출장치를 통해 정확한 유량측정이 가능하고 유체의 누출염려가 없으므로 제품의 신뢰성을 높여주고 그 구조가 간단하여 경제적인 이점을 갖게 된다.In addition, the present invention enables accurate flow measurement through a single detection device without using a separate flow meter and various components thereof, and increases the reliability of the product because there is no risk of fluid leakage, and its structure is economical. Will have
Claims (5)
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| KR20-2003-0011555U KR200319312Y1 (en) | 2003-04-15 | 2003-04-15 | Flow detect system |
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| KR20-2003-0011555U KR200319312Y1 (en) | 2003-04-15 | 2003-04-15 | Flow detect system |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| KR101838564B1 (en) * | 2017-09-11 | 2018-03-14 | 주식회사 우성하이테크 | A mixing device for water purifier and water drinking apparatus |
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| KR101838564B1 (en) * | 2017-09-11 | 2018-03-14 | 주식회사 우성하이테크 | A mixing device for water purifier and water drinking apparatus |
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