KR20030091332A - Organic Electro-Luminescence Display Device And Method Of Fabricating The Same - Google Patents

Abstract

PURPOSE: An organic electro luminescence display device and a manufacturing method thereof are provided to be capable of improving the characteristics of a display panel by reducing the difference of work function between a transparent electrode and an organic electro luminescence layer. CONSTITUTION: An organic electro luminescence display device is provided with a substrate(70) defined with a predetermined light emitting region, a transparent electrode(72) formed at the upper portion of the substrate by linearly flowing oxygen gas, a metal electrode formed on the entire surface of the resultant structure, and an organic light emitting layer formed between the transparent electrode and the metal electrode for emitting light by the voltage applied from the outside. At this time, the transparent electrode is made of a plurality of layers(82a,82b).

Description

Organic electroluminescent display device and manufacturing method thereof {Organic Electro-Luminescence Display Device And Method Of Fabricating The Same}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an organic electroluminescent display device, and more particularly, to an organic electroluminescent display device for improving the characteristics of a display panel by improving an interface property between a transparent electrode constituting an organic electroluminescent diode and an organic light emitting layer, and a method of manufacturing the same. It is about.

Recently, various flat panel displays have been developed to reduce weight and volume, which are disadvantages of cathode ray tubes. Such flat panel displays include liquid crystal displays (hereinafter referred to as "LCD"), field emission displays (hereinafter referred to as "FED"), plasma display panels (hereinafter referred to as "PDP"). "") And electroluminescence ("EL") display elements. In particular, the EL display element is basically formed by attaching electrodes to both surfaces of an EL layer including a hole transport layer, a light emitting layer, and an electron transport layer.

This EL display element is roughly divided into an inorganic EL display element and an organic EL display element according to the material used. The organic EL display element is driven at a lower voltage of about 5 to 20 V than the inorganic EL display panel requiring a high voltage of 100 to 200 V, thereby enabling direct DC low voltage driving. In addition, the organic EL display element has excellent characteristics such as wide viewing angle, high-speed response, and high contrast ratio, so that it is used as a pixel of a graphic display, a pixel of a television image display or a surface light source. It can be used and is suitable for next-generation flat panel display because it is thin, light and good color.

Such organic EL display elements are divided into passive and active matrix organic EL display elements according to the driving method.

First, referring to a cross-sectional view of a passive matrix organic EL display device illustrated in FIG. 1, the passive matrix organic EL display device includes a transparent electrode 4 arranged in a row in a band form on the transparent substrate 2, and An organic electroluminescent layer (hereinafter referred to as an "EL layer", 10) formed by laminating a hole transporting layer, a light emitting layer, and an electron transporting layer on the transparent electrode 4 intersects with the transparent electrode on the organic EL layer 10 and has a band. A metal electrode 12 formed in a shape is provided. In addition, an insulating film 6 is formed between the partition walls 8 formed in the same band between the metal electrodes 12 for separating the neighboring metal electrodes 12, and the transparent electrode 4 and the partition walls 8. Equipped.

The organic EL element is formed in a structure in which the organic EL layer 10 is inserted between the transparent electrode 4 having a high work function and the metal electrode 12 having a low work function on the transparent substrate 2. The transparent electrode 4 having a high work function is used as an anode for injecting holes and the low metal electrode 12 is used as a cathode for injecting electrons. At this time, the transparent electrode 4 is made of a transparent material having little absorption of light in the light emitting wavelength region in order to emit the emitted light to the outside of the light emitting element. As a material of the transparent electrode 4 Indium Tin Oxide (hereinafter referred to as "ITO") in which tin oxide (SnO ₂ ) is doped with indium oxide (In ₂ O ₃ ) is used.

The organic EL layer 10 is composed of a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer and an electron injection layer sequentially stacked between the transparent electrode 4 and the metal electrode 12. When a current flows between the transparent electrode and the metal electrodes 4 and 12, light is generated in the light emitting layer by the movement of electrons and holes.

2 is a diagram showing a basic pixel structure of a general active matrix organic EL display element.

Referring to Fig. 2, the basic pixel structure of the active matrix organic EL display element includes scan lines formed in a first direction; A signal line and a power supply line formed in parallel with each other at a predetermined interval in a second direction crossing the first direction; A pixel area surrounded by a scan line, a signal line, and a power supply line is provided. In addition, the basic pixel structure of the active matrix organic EL display element includes a switching TFT formed at an intersection point of the scan line and the signal line to serve as an address, a storage capacitor formed between the switching TFT and the power supply line, a storage capacitor and a power supply line; And a driving TFT formed to be connected to serve as a current source, and an organic EL diode connected to the driving TFT.

The switching TFT serves to control the voltage and store the current source. When the organic EL diode forwards current to the organic light emitting material, electrons and holes move to a light emitting layer between an anode supplying a hole and a cathode supplying an electron. These carriers combine with each other to emit light due to a predetermined energy difference.

FIG. 3 is a cross-sectional view of the active matrix organic EL display device illustrated in FIG. 2, which will be described with reference to an example of a driving TFT connected to an organic EL diode and a storage capacitor in FIG. 2, and the emitted light passes through an anode, which is a lower electrode. The organic EL display device of the bottom emission type that transmits through and discharges the anode, which is a lower electrode to emit light.

Referring to FIG. 3, a TFT (T) including a semiconductor layer 32, a gate electrode 38, and source and drain electrodes 50 and 52 is formed on an insulating substrate 1, and the TFT (T) is formed. ) Is connected to the storage capacitor C _ST and the organic EL diode E, respectively.

The storage capacitor C _ST is composed of a power electrode 42 and a capacitor electrode 34 facing each other with an insulator interposed therebetween, and the organic EL diode E is provided with an organic EL layer 64 interposed therebetween. It consists of the anode 58 and the cathode 66 opposing each other.

In detail, the source electrode 50 of the TFT (T) is connected to the power electrode 42, and the drain electrode 52 is connected to the anode 58, which is a lower electrode of the organic EL diode E. In general, the anode 58 of the bottom emission method as described above is made of a light transmissive material so that light emitted from the organic EL layer 64 is transmitted, and the cathode 66 is electron injected into the organic EL layer 64. It is made of metal with low work function value to facilitate the operation. In addition, in the organic EL display device driven by the top light emission method, since the light emitted from the organic EL layer is transmitted through the cathode and emitted upward, the cathode is made of a light transmissive material.

On the other hand, in the stack structure of the insulating layers included in the organic EL display device, the buffer layer 30 that buffers the insulating substrate 1 and the semiconductor layer 32, and the insulator for the storage capacitor C _ST The first insulating layer 40, the second insulating layer 44 between the source electrode 50 and the power electrode 42, and the third insulating layer between the anode 58 and the drain electrode 52. (54) and the protective layer 60 between the anode 58 and the organic EL layer 64 are sequentially stacked, the first to third insulating layers (40, 44, 54) and The protective layer 60 includes contact holes for electrical connection between each layer.

FIG. 4 is an enlarged view of a cross section taken along the line “A-A ′” in FIGS. 1 and 3, and FIG. 5 is a view illustrating a light emitting mechanism of the organic light emitting layer illustrated in FIG. 4. 6 is a band diagram of the organic EL display element.

Prior to the description, the substrate 70 denotes the transparent substrate 2 in FIG. 1 and the insulating layers 40, 44, and 54 in FIG. 3, respectively, and the anode 72 denotes a transparent conductive material (ITO). 1 shows the transparent electrode 4 in FIG. 1 and the anode 56 in FIG. Incidentally, the organic light emitting layer 74 denotes the organic EL layer 10 in FIG. 1 and the organic EL layer 64 in FIG. 3, and the cathode of 76 is the metal electrode 12 and FIG. The cathode 66 at 3 is shown.

Referring to FIG. 4 based on this, the light emitting part of the organic EL display device has a structure in which an organic EL layer is inserted between a metal electrode having a high work function and a low metal electrode. The metal electrode having a high work function is used as an anode 72 for injecting holes and the metal electrode having a low work electrode is used as a cathode 76 for injecting electrons.

In order to emit the emitted light to the outside of the light emitting device, the substrate and one electrode are made of a transparent material having almost no light absorption in the light emitting wavelength region. The anode 72 is composed of a transparent electrode, and indium tin oxide (ITO) is most frequently used. As the cathode 76, a metal having a low work function is generally used to facilitate the injection of electrons. As the metal having a low work function, calcium (Ca), magnesium (Mg), aluminum (Al), and the like are used.

As shown in FIG. 5, the organic EL layer 74 includes a hole injection layer (HIL) 74a, a hole transporting layer (HTL) 74b, and an emitting material (Emitting Material) from the anode 72. A layer (EML) 74c, an electron transporting layer (ETL) 74d, and an electron injection layer (EIL) 74e are formed in a multi-layered structure sequentially.

The principle of light emission of such an organic EL display device is as follows. When a current is supplied to the anode 72 having a high work function and the cathode 76 having a low work function, carriers composed of electrons and holes are formed through the hole injection layer 74a and the electron injection layer 74e of the organic EL layer 74, respectively. Is injected. These carriers are transported to the light emitting layer 74c formed between the hole transport layer 74b and the electron transport layer 74d through the hole transport layer 74b and the electron transport layer 74d. At this time, the hole transport layer 74b and the electron transport layer 74d efficiently transport carriers to the light emitting material, thereby increasing the probability of light emission coupling in the light emitting layer 74c. When carriers are injected into the light emitting layer 74c, excitons are generated in the light emitting layer 74c. Light corresponding to the energy difference between Orbital) and HOMO (Highest Occupied Molecular Orbital) is generated.

7 is a view showing a cross section in which an anode is formed on a substrate in an organic EL display device according to the prior art.

Referring to FIG. 7, in the organic EL display device according to the related art, the anode transparent electrode 72 is formed as a single layer on the substrate 70. As a material of the transparent electrode 72, indium tin oxide (hereinafter referred to as "ITO") doped with indium oxide (In ₂ O ₃ ) and tin oxide (SnO ₂ ) is used. At this time, the transparent electrode 72 made of ITO uses 70 sccm of argon (Ar) or argon (Ar) + 4 sccm of oxygen (O ₂ ) gas when sputtering.

The organic EL panel is formed by sequentially forming the organic EL layer 74 and the metal electrode 76 on the transparent substrate 70 on which the transparent electrode 72 is formed. At this time, since the transparent electrode 72 formed of a single layer according to the prior art has less hydrophilicity, the organic EL material is deposited on the surface of the transparent electrode 72 through an oxygen (0 ₂ ) flow rate or an additive. As described above, the contact angle α between the transparent electrode 72 and the hole injection layer 74a of the organic EL layer 74 is about 50 °, so that the degree of interfacial contact between them varies. For this reason, the work function of the transparent electrode 72 according to the prior art is about 4.7, and the work function of the hole injection layer 74a of the organic EL layer 64 is about 5.2. As a result, holes may not easily move into the organic material due to the work function difference between the transparent electrode 72 and the hole injection layer 74a. Since excitons are generated near the cathode because holes are not easily moved, quantum efficiency of the organic light emitting device is deteriorated due to the large non-light emission.

Accordingly, an object of the present invention is to linearly control the oxygen (O ₂ ) flow rate when depositing ITO transparent electrode to reduce the work function difference between the anode transparent electrode and the organic light emitting layer so that the carrier can be easily moved. The present invention relates to an organic electroluminescent display device and a method of manufacturing the same for improving the characteristics of the panel.

1 is a cross-sectional view showing a passive matrix organic EL display element.

2 is a diagram showing a basic pixel structure of a general active matrix organic EL display element.

3 is a cross-sectional view of the active matrix organic EL display element shown in FIG. 2.

FIG. 4 is an enlarged view of a section cut along the line “A-A ′” in FIGS. 1 and 3.

5 is a view for explaining a light emitting mechanism of the organic light emitting layer shown in FIG.

6 is a band diagram of an organic EL display element.

7 is a view showing a cross section in which an anode is formed on a substrate in an organic EL display device according to the prior art.

FIG. 8 is a view illustrating a contact state when an organic light emitting material is deposited on a substrate on which the anode illustrated in FIG. 7 is formed.

9 is a cross-sectional view of a transparent electrode formed on a substrate in an organic EL display panel according to a first embodiment of the present invention.

FIG. 10 is a detailed view of the second transparent electrode layer illustrated in FIG. 9.

FIG. 11 is a view illustrating a contact state when an organic light emitting material is deposited on a substrate on which the anode illustrated in FIG. 9 is formed.

12 is a cross-sectional view of a transparent electrode formed on a substrate in an organic EL display panel according to a second exemplary embodiment of the present invention.

<Description of the symbols for the main parts of the drawings>

1,70 substrate 2 transparent substrate

4,82a, 82b, 86a, 86b: transparent electrode 6: insulating film

8: bulkhead 10, 64, 74: organic electroluminescent layer

12 metal electrode 30 buffer layer

32 semiconductor layer 34 capacitor electrode

38 gate electrode 40, 44, 54 insulating layer

42: power electrode 50: source electrode

52 drain electrode 58, 72 anode

60: protective layer 66,76: cathode

74a: hole injection layer 74b: hole transport layer

74c: light emitting layer 74d: electron transport layer

74e: electron injection layer

In order to achieve the above object, the organic electroluminescent display device according to the present invention is a multi-layered transparent electrode formed by linearly applying an oxygen flow rate on a substrate in which a predetermined light emitting region is defined, and a metal material on the entire surface of the substrate. And an organic light emitting layer formed between the formed metal electrode and the transparent electrode and the metal electrode of the multilayer structure to emit light by an externally applied voltage.

The multi-layered transparent electrode of the present invention is characterized in that the indium oxide (In ₂ O ₃ ) doped with tin oxide (SnO ₂ ) doped with indium tin oxide (Indium Tin Oxide).

The thickness of the transparent electrode of the multi-layer structure in the present invention is characterized in that about 1400Å.

In the present invention, the multi-layered transparent electrode includes a first transparent electrode layer having a thickness of about 1200 GPa and a second transparent electrode layer formed on the first transparent electrode layer to have a thickness of about 200 GPa. do.

Surface characteristics of the first and the second transparent electrode layer in the present invention is characterized by the oxygen (O ₂ ) flow rate is added to the argon (Ar).

The second transparent electrode layer in the present invention is characterized in that composed of four layers formed on the first transparent electrode layer at intervals of about 50Å.

Oxygen flow rate used in the first transparent electrode layer in the present invention is characterized in that 4sccm.

The organic electroluminescent display device of the present invention is characterized in that it is composed of any one of a passive or an active matrix method.

A method of manufacturing an organic electroluminescent display device according to the present invention includes forming a first transparent electrode on a substrate in which a light emitting area is defined, and controlling the oxygen flow rate linearly controlled on the first transparent electrode. Forming a second transparent electrode formed of the above layer, forming an organic light emitting layer by applying an organic light emitting material to a light emitting region on a substrate on which the first and second transparent electrodes are formed, and forming the organic light emitting layer on the organic light emitting layer And forming a metal electrode on the front surface of the substrate so that an electrical signal is applied together with the first and second transparent electrodes.

The substrate in which the emission region is defined in the present invention is a substrate including a thin film transistor.

The first and second transparent electrodes of the present invention are formed of indium tin oxide doped with indium oxide (In ₂ O ₃ ) and tin oxide (SnO ₂ ).

In the present invention, the forming of the first transparent electrode may include arranging the substrate in a chamber for sputtering, and using gas in which ₄ sccm of oxygen (O ₂ ) is injected into argon (Ar) into the chamber. And depositing indium tin oxide.

In the present invention, the forming of the second transparent electrode having the four-layer structure includes arranging the transparent substrate on which the first transparent electrode is formed in a chamber for sputtering, and argon (Ar) in the chamber to 3.75 ccm of oxygen. Depositing the indium tin oxide using a gas injected with (O ₂ ) to form a first transparent electrode layer, and using a gas in which 3.5 sccm of oxygen (O ₂ ) is injected into argon (Ar) in the chamber. Depositing the indium tin oxide to form a second transparent electrode layer, and depositing the indium tin oxide by using a gas in which oxygen (O ₂ ) of 3.25 sccm is injected into argon (Ar) into the chamber. Forming a transparent electrode layer and depositing the indium tin oxide using a gas in which ₃ sccm of oxygen (O ₂ ) is injected into argon (Ar) into the chamber to form a fourth transparent electrode layer. to The.

Other objects and features of the present invention in addition to the above object will be apparent from the description of the embodiments with reference to the accompanying drawings.

Hereinafter, a preferred embodiment of the present invention will be described with reference to FIGS. 9 to 12.

FIG. 9 is a diagram illustrating a cross section in which a transparent electrode is formed on a substrate in the organic EL display panel according to the first embodiment of the present invention, and FIG. 10 is a diagram illustrating the second transparent electrode layer illustrated in FIG. 9 in detail.

The organic EL display element according to the embodiment of the present invention is driven with the same configuration as in Figs. 1 to 3, and the same reference numerals as in the prior art are regarded as the same components.

9 and 10, an organic EL display device includes a substrate 70, a transparent electrode 72 formed on the substrate 70 to serve as an anode, and an organic EL sequentially formed on the substrate 70. A layer (not shown) and a metal electrode (not shown).

The transparent electrode 72 is formed to have a thickness of about 1400 μs and includes a first transparent electrode 82 a and a second transparent electrode 82 b sequentially stacked on the substrate 70. In this case, the first and second transparent electrodes 82a and 82b are formed by applying a transparent thin film made of ITO on the substrate 70 by ion plating or sputtering, and then patterning the same by photolithography. do. In this case, the thickness of the first transparent electrode 82a is about 1200 kPa, and the thickness of the second transparent electrode 82b is about 200 kPa.

The first transparent electrode 82a is formed of a single layer. The first transparent electrode 82a of the single layer uses argon (Ar) + 4 sccm of oxygen (O ₂ ) when deposited on the transparent substrate 70.

As shown in FIG. 10, the second transparent electrode 82b is formed of four layers by dividing the thickness of 200 Å by 50 각각 each. The second transparent electrode 82b having four layers is formed of the first layer 84a and argon (Ar) + 3.5 using argon (Ar) + 3.82 sccm of oxygen (O ₂ ) from the first transparent electrode 82a. second layer 84b with sccm of oxygen (O ₂ ), third layer 84c with argon (Ar) + 3.25sccm of oxygen (O ₂ ) and argon (Ar) +3 sccm of oxygen (O ₂ ) is composed of the fourth layer 84d used. At this time, the oxygen (O ₂ ) flow rate is controlled by a mass flow controller (MFC). In the present invention, the method of adjusting the flow rate of oxygen (O ₂ ) added to argon (Ar) when the transparent electrodes 82a and 82b are formed may be modified.

As described above, the first to fourth layers 84a to 4 using the gas in which argon (Ar) is added to the flow rate of linearly adjusting 4 to 3 sccm of oxygen (O ₂ ) on the first transparent electrode 82a. When the second transparent electrode 82b composed of 84d) is formed, the surface of the transparent electrode 72 composed of the first and second transparent electrodes 82a and 82b has hydrophilicity. When the transparent electrode 72 has hydrophilicity, as shown in FIG. 11, the contact angle α is stably formed at about 27 ° on the surface of the transparent electrode 72. For this reason, the work function of the transparent electrode 72 is about 4.95 eV.

Accordingly, in the organic EL display device according to the present invention, the work function difference between the transparent electrode 72 and the hole injection layer 86a is reduced by increasing the work function of the transparent electrode 72 and the holes from the transparent electrode 72 are reduced. It can be easily moved into the organic EL layer. When holes move easily into the organic EL layer, excitons are generated in the light emitting layer, thereby increasing the luminous efficiency.

12 is a cross-sectional view of a transparent electrode formed on a substrate in an organic EL display panel according to a second exemplary embodiment of the present invention.

Referring to FIG. 12, the organic EL display panel includes a substrate 70, a transparent electrode 72 formed on the substrate 70, an organic EL layer (not shown) and a metal sequentially formed on the substrate 70. An electrode (not shown).

The transparent electrode 72 is formed to a thickness of about 1400 μs and includes a first transparent electrode 86 a formed on the surface of the substrate 70 and a second transparent electrode 86 b stacked on the first transparent electrode 86 a. do. In this case, the first and second transparent electrodes 86a and 86b are formed by applying a transparent thin film made of ITO on the substrate 70 by ion plating or sputtering, and then patterning the same by photolithography. do. In this case, the thickness of the first transparent electrode 86a is about 1200 kPa, and the thickness of the second transparent electrode 86b is about 200 kPa.

The first transparent electrode 86a is formed as a single layer, and uses oxygen (O ₂ ) of argon (Ar) + 4 sccm when deposited on the substrate 70. In addition, the second transparent electrode 86b is also formed as a single layer, and oxygen (O ₂ ) between 3 and 3.5 sccm is used for argon (Ar) when depositing a transparent material composed of ITO.

In the organic EL display panel according to the second embodiment of the present invention configured as described above, the work function difference between the transparent electrode 72 and the hole injection layer 74a is reduced by increasing the work function of the transparent electrode 72. As a result, holes from the transparent electrode 72 can be easily moved into the organic EL layer. When holes move easily into the organic EL layer, excitons are generated in the light emitting layer, thereby increasing the luminous efficiency.

As described above, the organic electroluminescent device and the method of manufacturing the same according to the present invention can improve the interface characteristics between the transparent electrode and the organic light emitting layer by linearly controlling the oxygen flow rate when forming the transparent electrode for the anode. As a result, the injection of holes from the transparent electrode into the organic light emitting layer is improved, thereby increasing the luminous efficiency of the organic light emitting display device and lowering the operating voltage of the organic light emitting device.

Those skilled in the art will appreciate that various changes and modifications can be made without departing from the technical spirit of the present invention. Therefore, the technical scope of the present invention should not be limited to the contents described in the detailed description of the specification but should be defined by the claims.

Claims (24)

A transparent electrode having a multilayer structure formed by linearly applying an oxygen flow rate on a substrate in which a predetermined light emitting region is defined; A metal electrode formed of a metal material on the front surface of the substrate; And an organic light emitting layer formed between the transparent electrode and the metal electrode of the multilayer structure to emit light by an externally applied voltage. The method of claim 1, The transparent electrode is indium oxide (In ₂ O ₃₎ doped with indium tin oxide (SnO ₂₎ in the multi-layer structure-tin-oxide, an organic electro-luminescence display device, characterized in that consisting of (Indium Tin Oxide). The method of claim 2, The organic electroluminescent display device of claim 1, wherein the multilayer electrode has a thickness of about 1400 GPa. The method of claim 3, wherein The multi-layered transparent electrode includes a first transparent electrode layer having a thickness of about 1200 Å, And a second transparent electrode layer formed on the first transparent electrode layer to have a thickness of about 200 GPa. The method of claim 3, wherein The surface characteristics of the first and second transparent electrode layers are determined by the amount of oxygen (O ₂ ) added to argon (Ar). The method of claim 4, wherein And the second transparent electrode layer is formed of four layers formed on the first transparent electrode layer at intervals of about 50 mW. The method of claim 5, The organic electroluminescent display device according to claim 1, wherein the oxygen flow rate used in the first transparent electrode layer is 4 sccm. The method of claim 6, The organic electroluminescent display device according to claim 1, wherein the oxygen capacity used for the four layers of the second transparent electrode is linearly reduced from 4 sccm to 3 sccm at intervals of 50 ms. The method of claim 8, And the difference in oxygen capacity applied linearly is about 0.25 sccm. The method of claim 1, The organic electroluminescent display device is an organic electroluminescent display device, characterized in that configured in any one of a passive or active matrix method. The method of claim 10, In the active matrix organic electroluminescent display device, a semiconductor layer and a capacitor electrode formed to be spaced apart at a predetermined interval on the substrate between the substrate and the transparent electrode, the light emitting region is defined; A gate insulating film and a gate electrode sequentially stacked on the semiconductor layer; A power electrode formed to cover the capacitor electrode after insulation on the capacitor electrode; A drain electrode formed to connect the semiconductor layer and the transparent electrode; A source electrode formed simultaneously with the drain electrode so that the semiconductor layer and the power electrode are connected; And a protective layer formed on the source electrode, the drain electrode, and the power electrode to designate a light emitting area of the transparent electrode and to protect the thin film transistor. The method of claim 10, In the passive organic electroluminescent display device, an insulating film formed at a predetermined position on the transparent electrode of the multilayer structure to electrically insulate the transparent electrodes; And a barrier rib formed on the insulating layer to separate the transparent electrode. Forming a first transparent electrode on a substrate in which a light emitting area is defined; Forming a second transparent electrode formed of two or more layers controlled according to an oxygen flow rate linearly controlled on the first transparent electrode; Forming an organic light emitting layer by coating an organic light emitting material on a light emitting region on a substrate on which the first and second transparent electrodes are formed; And forming a metal electrode on the entire surface of the substrate such that an electrical signal is applied together with the first and second transparent electrodes on the organic light emitting layer. The method of claim 13, The substrate in which the emission region is defined is a method of manufacturing an organic electroluminescent device, characterized in that the substrate including a thin film transistor. The method of claim 13, The first and second transparent electrodes are formed of indium tin oxide doped with indium oxide (In ₂ O ₃ ) and tin oxide (SnO ₂ ). Manufacturing method. The method of claim 15, The forming of the first transparent electrode may include arranging the substrate in a chamber for sputtering; And depositing the indium tin oxide using a gas in which ₄ sccm of oxygen (O ₂ ) is injected into argon (Ar) in the chamber. The method of claim 16, And the first transparent electrode is formed to about 1200 mW. The method of claim 15, The second transparent electrode is a method of manufacturing an organic electroluminescent display device, characterized in that formed in a four-layer structure at intervals of 50Å. The method of claim 18, The second transparent electrode of the four-layer structure is formed by depositing the indium tin oxide using a gas injected to linearly reduce the oxygen of 3 to 4 sccm in argon (Ar), characterized in that the organic electroluminescent display device Manufacturing method. The method of claim 17, The forming of the second transparent electrode having the four-layer structure may include arranging a transparent substrate on which the first transparent electrode is formed in a chamber for sputtering; Forming a first transparent electrode layer by depositing the indium tin oxide using a gas in which oxygen (O ₂ ) of 3.75 ccm is injected into argon (Ar) in the chamber; Depositing the indium tin oxide using a gas in which 3.5 sccm of oxygen (O ₂ ) is injected into argon (Ar) in the chamber to form a second transparent electrode layer; Depositing the indium tin oxide using a gas in which 3.25 sccm of oxygen (O ₂ ) is injected into argon (Ar) in the chamber to form a third transparent electrode layer; And depositing the indium tin oxide using a gas in which ₃ sccm of oxygen (O ₂ ) is injected into argon (Ar) in the chamber to form a fourth transparent electrode layer. Manufacturing method. The method of claim 14, Forming the substrate including the thin film transistor includes the step of providing a substrate having the light emitting region defined; Forming active layers and capacitor electrodes spaced at predetermined intervals on the substrate; Sequentially forming a gate insulating film and a gate electrode in a central portion of the active layer; Forming a power electrode on the substrate to cover the capacitor electrode; Ion-doped the substrate on which the active layer is formed to complete a semiconductor layer; Exposing predetermined regions of the semiconductor layer and the power electrode; And simultaneously forming source and drain electrodes spaced apart at predetermined intervals through the exposed predetermined region. The method of claim 21, And forming a protective layer formed on the substrate to designate a light emitting region and to protect the thin film transistor after the transparent electrode is formed. The method of claim 13, The forming of the organic light emitting layer may include forming a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer, and an electron injection layer sequentially on a substrate on which the first and second transparent electrodes are sequentially stacked. A method of manufacturing an organic electroluminescent display device, characterized in that. The method of claim 23, The contact angle between the substrate on which the first and second transparent electrodes are sequentially stacked and the hole injection layer of the organic light emitting layer is about 27 °.