KR20030084254A - A micro mass spectrometer using micromachining technology and the fabrication method - Google Patents

A micro mass spectrometer using micromachining technology and the fabrication method Download PDF

Info

Publication number
KR20030084254A
KR20030084254A KR1020020022870A KR20020022870A KR20030084254A KR 20030084254 A KR20030084254 A KR 20030084254A KR 1020020022870 A KR1020020022870 A KR 1020020022870A KR 20020022870 A KR20020022870 A KR 20020022870A KR 20030084254 A KR20030084254 A KR 20030084254A
Authority
KR
South Korea
Prior art keywords
mass spectrometer
micro mass
ion
micro
tungsten filament
Prior art date
Application number
KR1020020022870A
Other languages
Korean (ko)
Inventor
양상식
Original Assignee
양상식
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 양상식 filed Critical 양상식
Priority to KR1020020022870A priority Critical patent/KR20030084254A/en
Publication of KR20030084254A publication Critical patent/KR20030084254A/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00349—Creating layers of material on a substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00388—Etch mask forming
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/04—Electrodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)

Abstract

PURPOSE: A micro mass spectrometer and a method for fabricating the same are provided to reduce a size of the micro mass spectrometer by fabricating the micro mass spectrometer using a micro machining technique. CONSTITUTION: A micro mass spectrometer includes an ion generator, an ion separator, and an ion detector. The ion generator and an ion separator includes a tungsten filament(2) and four pairs of nickel electrodes(3a,3b,3c,3d) formed on an upper surface of a silicon substrate(1). The tungsten filament(2) discharges thermal electrons and the nickel electrodes(3a,3b,3c,3d) collect and accelerate ions. Electrons heated by the tungsten filament(2) are accelerated due to pulse voltage applied from the electrode(3a). Thus, the electrons collide with test molecules, so that test molecules are ionized. Ions are moved due to pulse voltage applied from the electrode(3b) and accelerated while passing through a predetermined area.

Description

마이크로머시닝 기술을 이용한 초소형 질량 분석기 및 그 제조 방법 {A micro mass spectrometer using micromachining technology and the fabrication method}Micro mass spectrometer using micromachining technology and the fabrication method

기존의 질량 분석기는 크기가 크고 수천 볼트 이상의 고전압을 사용하는 고가의 대형 장비이다. 이에 반하여 본 발명에 제시한 초소형 질량 분석기는 크기가 작고 저전압을 사용하는 장점을 가지고 있다.Conventional mass spectrometers are expensive, large equipment that is large and uses high voltages of thousands of volts or more. On the contrary, the ultra-small mass spectrometer proposed in the present invention has a small size and an advantage of using low voltage.

본 발명에서는 마이크로머시닝 기술을 이용하여 질량 분석기를 제작함으로써 기존의 질량 분석기의 크기를 줄인다.In the present invention, the mass spectrometer is manufactured by using micromachining technology to reduce the size of the existing mass spectrometer.

도 1: 초소형 질량 분석기의 구조도.1: Schematic diagram of a miniature mass spectrometer.

도 2: 초소형 질량 분석기의 원리를 보여주는 개념도.2 is a conceptual diagram showing the principle of a miniature mass spectrometer.

도 3: 마이크로머시닝 기술을 이용한 초소형 질량 분석기의 공정도.3 is a process diagram of a miniature mass spectrometer using micromachining technology.

도 1은 본 발명의 초소형 질량 분석기의 구조를 보여주는 구조도이다. 초소형 질량 분석기는 이온 발생기, 이온 분리기 그리고 이온 검출기 세부분으로 구성된다. 도면에서 보듯이 이온 발생기와 이온 분리기는 실리콘 기판(1) 위에 텅스텐 필라멘트(2), 네 쌍의 니켈 전극(3a)(3b)(3c)(3d)으로 이루어져 있다. 이 때, 텅스텐 필라멘트는 열전자 방출을 위한 것이고 니켈 전극은 이온을 모아주고 가속시키기 위한 것이다.1 is a structural diagram showing the structure of a microscopic mass spectrometer of the present invention. The ultra-compact mass spectrometer consists of ion generator, ion separator and ion detector details. As shown in the figure, the ion generator and the ion separator consist of tungsten filaments 2 and four pairs of nickel electrodes 3a, 3b, 3c and 3d on the silicon substrate 1. At this time, tungsten filament is for hot electron emission and nickel electrode is for collecting and accelerating ions.

도 2는 본 발명의 초소형 질량 분석기의 원리를 보여주는 개념도이다. 초소형 질량 분석기의 분리 방식은 질량에 따라 달라지는 비행 시간의 차이를 이용한비행 시간 질량 분석기의 방식이다. 필라멘트의 가열에 의해 발생된 전자는 바로 앞의 전극(3a)에서 가해주는 펄스 전압에 의하여 가속되어 중성의 시료분자와 충돌하여 분자를 이온화시킨다. 생성된 이온은 전극(3b)에서 가해주는 펄스 전압에 의하여 출발되고 d 영역을 지나는 동안 가속된 후 D 영역을 등속운동으로 비행하여 최종 이온 검출기에 도달하게 된다. 이 때, 이온의 비행시간은에 비례한다. 질량 분석기를 통해 검출되는 각 이온들의 도달시간을 오실로스코프로 관측하면 시료의 정확한 질량을 확인할 수 있으며 신호의 세기로부터 정량분석도 가능하다. 또한 이온 가속기에 각각 걸어주는 자기장을 펄스 형태로 가해줌으로써 효율적인 이온화와 질량분석기의 분해능을 극대화하고, 이온 가속기의 각 전극에 걸어주는 전압의 폭을 짧게 함으로써 질량 분석기의 분해능을 향상시킨다.2 is a conceptual diagram showing the principle of the ultra-small mass spectrometer of the present invention. The separation method of the ultra-compact mass spectrometer is a time-of-flight mass spectrometer using a difference in flight time depending on mass. The electrons generated by the heating of the filament are accelerated by the pulse voltage applied from the electrode 3a immediately before and collide with the neutral sample molecules to ionize the molecules. The generated ions are started by the pulse voltage applied by the electrode 3b, accelerated while passing through the region d, and then fly through the region D in constant motion to reach the final ion detector. At this time, the flight time of ions Proportional to Observing the time of arrival of each ion detected by the mass spectrometer with an oscilloscope can confirm the exact mass of the sample and quantitatively analyze the signal intensity. In addition, by applying a magnetic field applied to each of the ion accelerator in the form of a pulse, the efficiency of the mass spectrometer is improved by maximizing efficient ionization and resolution of the mass spectrometer and shortening the voltage applied to each electrode of the ion accelerator.

도 3은 본 발명에 따른 마이크로머시닝 기술을 이용한 초소형 질량 분석기의 공정도이다. (a)에서 실리콘 식각 마스크로 사용할 열산화막을 성장시키고, (b)와 같이 실리콘 식각액으로 실리콘을 식각하여 단차를 만든 후, 금속 증착 공정을 이용하여 크롬과 금을 증착한다. 니켈 전극을 제작하기 위해 (c)와 같이 후막 감광제(AZ 4620)를 이용하여 mold를 만든 후 전기도금을 한다. (d)에서 금속 증착 공정을 이용하여 금속을 증착하고 패터닝하여 금속 필라멘트를 제작한 후, 식각 보호막으로 사용된 크롬을 금속 증착 공정을 이용하여 증착한다. 마지막으로 (f)와 같이 실리콘 식각액을 이용하여 필라멘트 아래에 공간을 형성하여 초소형 질량 분석기를 완성한다.3 is a process diagram of a micro mass spectrometer using micromachining technology according to the present invention. In step (a), a thermal oxide film to be used as a silicon etching mask is grown, and as shown in (b), silicon is etched with a silicon etching solution to form a step, and then chromium and gold are deposited using a metal deposition process. In order to manufacture the nickel electrode as shown in (c) using a thick film photosensitive agent (AZ 4620) to make a mold and then electroplating. In (d), a metal is deposited and patterned using a metal deposition process to fabricate a metal filament, and then chromium used as an etch protection layer is deposited using a metal deposition process. Finally, as shown in (f), a space is formed under the filament using a silicon etchant to complete the ultra-small mass spectrometer.

본 발명은 휴대가 가능하거나 설치가 용이한 초소형 질량 분석기 및 그를 제조하기 위한 방법에 관한 것으로 생의학, 화학 및 환경 산업과 반도체 산업 등에서 특정 가스나 물질의 농도를 측정하는데 널리 이용될 수 있다.The present invention relates to a portable mass spectrometer and a method for manufacturing the ultra-compact mass spectrometer, and can be widely used to measure the concentration of a specific gas or material in the biomedical, chemical and environmental industries, and the semiconductor industry.

Claims (4)

금속 증착 공정과 이방성 식각을 이용하여 텅스텐 필라멘트를 제작하는 방법Fabrication of tungsten filaments using metal deposition and anisotropic etching 제 1항을 이용하여 전자를 방출시켜 이온화하는 방법과 구조Method and structure of ionizing by emitting electrons using claim 1 이온화된 분자를 가속하여 분리시키는 니켈 전극의 구조Nickel Electrode Structure Accelerates Ionized Molecules 제 1항, 제 2항, 제 3항에 있어서 마이크로머시닝 기술을 이용한 초소형 질량 분석기의 제작 방법A method of fabricating an ultra-compact mass spectrometer according to claim 1, 2 or 3 using micromachining technology.
KR1020020022870A 2002-04-26 2002-04-26 A micro mass spectrometer using micromachining technology and the fabrication method KR20030084254A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020020022870A KR20030084254A (en) 2002-04-26 2002-04-26 A micro mass spectrometer using micromachining technology and the fabrication method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020020022870A KR20030084254A (en) 2002-04-26 2002-04-26 A micro mass spectrometer using micromachining technology and the fabrication method

Publications (1)

Publication Number Publication Date
KR20030084254A true KR20030084254A (en) 2003-11-01

Family

ID=32380477

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020020022870A KR20030084254A (en) 2002-04-26 2002-04-26 A micro mass spectrometer using micromachining technology and the fabrication method

Country Status (1)

Country Link
KR (1) KR20030084254A (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0290451A (en) * 1988-09-28 1990-03-29 Oki Electric Ind Co Ltd Quadruple mass spectrometer
JPH10269985A (en) * 1998-04-24 1998-10-09 Hitachi Ltd Mass spectrometer and mass spectroscopic method
KR19980084813A (en) * 1997-05-26 1998-12-05 손욱 Mass spectrometer
JP2000082439A (en) * 1998-09-03 2000-03-21 Jeol Ltd Time-of-flight mass spectrometer

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0290451A (en) * 1988-09-28 1990-03-29 Oki Electric Ind Co Ltd Quadruple mass spectrometer
KR19980084813A (en) * 1997-05-26 1998-12-05 손욱 Mass spectrometer
JPH10269985A (en) * 1998-04-24 1998-10-09 Hitachi Ltd Mass spectrometer and mass spectroscopic method
JP2000082439A (en) * 1998-09-03 2000-03-21 Jeol Ltd Time-of-flight mass spectrometer

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
Sensors and Actuators A97-98 *
the 11th international conference on solid-state sensor and actuators, transducers ''01 and eurosensors XV Munich,Germany, june 10-14 *
대한전기학회논문지, 50C권 8호, pp.419-422 *
성균논문집(기초과학편) 제46집 No.2 *

Similar Documents

Publication Publication Date Title
US5541408A (en) Micromachined mass spectrometer
US7174703B2 (en) Ion thrusting system
Freidhoff et al. Chemical sensing using nonoptical microelectromechanical systems
Siebert et al. Surface microstructure/miniature mass spectrometer:. processing and applications
US20050077897A1 (en) Mass spectrometry
Yoon et al. Fabrication of a novel micro time-of-flight mass spectrometer
US6465792B1 (en) Miniature device for generating a multi-polar field, in particular for filtering or deviating or focusing charged particles
Tassetti et al. A MEMS electron impact ion source integrated in a microtime-of-flight mass spectrometer
EP1016123B1 (en) Atom probe
US6921906B2 (en) Mass spectrometer
US4649279A (en) Negative ion source
EP0003842A1 (en) Mass spectrometer and method for the elemental analysis of solids
KR20030084254A (en) A micro mass spectrometer using micromachining technology and the fabrication method
EP1412061A2 (en) Field ionizing elements and applications thereof
US3371205A (en) Multipole mass filter with a pulsed ionizing electron beam
JP3561422B2 (en) Atmospheric pressure ion source
CN114026670A (en) System for analysing particles, and in particular particle mass
Yoon et al. Test of hot electron emission for the micro mass spectrometer
JPS60246546A (en) Grid for ion beam device
JP3575822B2 (en) Plasma measurement device
US20070131860A1 (en) Quadrupole mass spectrometry chemical sensor technology
Yoon et al. The Fabrication of the Novel Micro Time-of-Flight (TOF) Mass Spectrometer with a Micro Ion Source
JPH10267780A (en) Vacuum measuring element and its manufacture
RU2210135C2 (en) Device for producing liquid-metal nanoclaster ion beams
EP3011328B1 (en) Method and device for a coated corona ionization source

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application