KR20030055505A - A method for manufacturing of cerium carbonate from the cerium hydroxide - Google Patents
A method for manufacturing of cerium carbonate from the cerium hydroxide Download PDFInfo
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Description
본 발명은 수산화세륨으로부터 탄산세륨의 제조방법에 관한 것으로서 이는 특히, 3가의 수산화세륨을 이용하여 염화세륨 수용액을 제조하고, 상기 염화세륨 수용액에 탄산암모늄을 첨가하여 고순도의 탄산세륨을 제조하는 수산화세륨으로부터의 탄산세륨 제조방법에 관한 것이다.The present invention relates to a method for producing cerium carbonate from cerium hydroxide, in particular, to prepare a cerium chloride aqueous solution using a trivalent cerium hydroxide, and to add a high-purity cerium carbonate by adding ammonium carbonate to the cerium chloride aqueous solution From a method for producing cerium carbonate from
일반적으로 탄산세륨 제조에 이용되는 출발 원료로는 염화세륨과 같은 세륨염(cerium salts)이 주로 사용되고 있으나, 상기 세륨염은 수산화세륨에 비하여 원료가 고가인 단점이 있다.In general, cerium salts such as cerium chloride are mainly used as starting materials used to prepare cerium carbonate. However, cerium salts have a disadvantage in that raw materials are more expensive than cerium hydroxide.
또한, 출발원료로서 3가의 수산화세륨(Ce(OH)3)을 사용할 경우 상기 수산화세륨은 산화성이 강하여 대기 상태에서 일부가 4가의 수산화세륨(Ce(OH)4)으로 산화되며, 산화된 4가의 수산화세륨(Ce(OH)4)은 탄산세륨의 원료인 염화세륨 수용액 제조 시 염산에 잘 용해되지 않아 제조 수율의 저하를 일으키는 단점이 있는 것이다.In addition, when trivalent cerium hydroxide (Ce (OH) 3 ) is used as a starting material, the cerium hydroxide is oxidatively strong, and part of the cerium hydroxide is oxidized to tetravalent cerium hydroxide (Ce (OH) 4 ) in the air, and the oxidized tetravalent Cerium hydroxide (Ce (OH) 4 ) has a disadvantage in that it does not dissolve well in hydrochloric acid when preparing an aqueous solution of cerium chloride which is a raw material of cerium carbonate, causing a decrease in production yield.
그리고, 원활한 탄산세륨의 제조를 위하여 urea 같은 촉매를 사용한 수열합성법이 많이 이용되고 있으나, 탄산세륨(Ce2(CO3)3·nH2O)의 정확한 결정체 제조를 위하여 엄격하게 반응조건을 지켜야 하는 등 제조 조건이 까다롭게 되는 단점이 있다.In addition, although hydrothermal synthesis using a catalyst such as urea is widely used for the preparation of cerium carbonate smoothly, the reaction conditions must be strictly maintained for accurate crystal preparation of cerium carbonate (Ce 2 (CO 3 ) 3 · nH 2 O). There is a disadvantage that the manufacturing conditions are difficult.
또한, 세륨염으로부터 탄산세륨 제조 시 urea 등의 촉매를 사용하여 엄격한 반응조건을 조절해야 하여야 하는 단점이 있다.In addition, when the cerium carbonate is prepared from cerium salts, there is a disadvantage in that strict reaction conditions must be controlled using a catalyst such as urea.
상기와 같은 문제점을 해결하기 위한 본 발명의 목적은, 수산화세륨으로부터 연속공정에 의해 탄산세륨을 제조하도록 하고, 제조 수율을 향상시키도록 하며, Fe 성분을 제거하여 최종 탄산세륨의 순도를 높이도록 하고, 탄산암모늄 첨가 시 제조공정을 단순화하도록 하는 수산화세륨으로부터의 탄산세륨 제조방법을 제공하는 데 있다.An object of the present invention for solving the above problems is to produce a cerium carbonate from a cerium hydroxide by a continuous process, to improve the production yield, to remove the Fe component to increase the purity of the final cerium carbonate To provide a method for producing cerium carbonate from cerium hydroxide to simplify the manufacturing process when adding ammonium carbonate.
도1은 본 발명에 따른 탄산세륨의 제조를 위한 처리공정도이다.1 is a process chart for the production of cerium carbonate according to the present invention.
도2는 본 발명의 초기 염화세륨 농도변화에 따른 탄산세륨의 XRD 패턴을 도시한 그래프도이다.Figure 2 is a graph showing the XRD pattern of cerium carbonate according to the change in the initial cerium chloride concentration of the present invention.
도3은 본 발명에서 첨가된 탄산암모늄의 농도변화에 따라 제조된 탄산세륨의 XRD 패턴을 도시한 그래프도이다.Figure 3 is a graph showing the XRD pattern of cerium carbonate prepared according to the change in the concentration of ammonium carbonate added in the present invention.
도4는 본 발명의 반응온도 변화에 따라 제조된 탄산세륨의 XRD 패턴을 도시한 그래프도이다.4 is a graph showing an XRD pattern of cerium carbonate prepared according to the reaction temperature change of the present invention.
상기한 목적을 달성하기 위하여 본 발명은, 수산화세륨을 염산에 용해시켜 염화세륨 수용액을 형성하는 단계;In order to achieve the above object, the present invention comprises the steps of dissolving cerium hydroxide in hydrochloric acid to form a cerium chloride aqueous solution;
상기 염화세륨 수용액을 과산화수소를 사용하여 환원시키는 단계;Reducing the cerium chloride aqueous solution using hydrogen peroxide;
염화세륨 수용액내에 포함되는 Fe 성분을 제거하는 단계:및,Removing the Fe component contained in the cerium chloride aqueous solution:
염화세륨 수용액에 탄산암모늄을 첨가하는 단계를 포함하여 구성되는 수산화세륨으로부터의 탄산세륨 제조방법 을 제공한다.It provides a method for producing cerium carbonate from cerium hydroxide comprising the step of adding ammonium carbonate to an aqueous solution of cerium chloride.
이하, 첨부된 도면에 의거하여 본 발명의 실시예를 설명하면 다음과 같다.Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings.
도1에 도시한 바와같이, 산화성이 강한 3가의 수산화세륨(Ce(OH)3)을 제조한 후 수세척 및 대기 중에 노출시켜 4가의 수산화세륨(Ce(OH)4)으로 산화한다.As shown in FIG. 1, a highly oxidizable trivalent cerium hydroxide (Ce (OH) 3 ) is prepared and then washed with water and exposed to air to oxidize to tetravalent cerium hydroxide (Ce (OH) 4 ).
그리고, 3가의 수산화 세륨(Ce(OH)3)은 pH 3 근처에서 염산에 용해되는데, 4가의 수산화세륨(Ce(OH)4)은 pH 0.5 근처에서 용해되기 시작하며 완전히 용해되지 않아 산화된 수산화세륨은 환원제에 의하여 3가의 수산화세륨으로 환원시킨다.The trivalent cerium hydroxide (Ce (OH) 3 ) is dissolved in hydrochloric acid near pH 3, and the tetravalent cerium hydroxide (Ce (OH) 4 ) begins to dissolve near pH 0.5 and is not completely dissolved and is oxidized hydroxide. Cerium is reduced to trivalent cerium hydroxide by a reducing agent.
또한, 반도체 기판 연마제로서 사용되는 산화세륨 원료인 탄산세륨의 출발원료로서 염화세륨 수용액이 많이 사용된다.In addition, many cerium chloride aqueous solutions are used as a starting material of cerium carbonate which is a cerium oxide raw material used as a semiconductor substrate abrasive.
따라서, 탄산세륨은 3가 세륨화합물로서 이루어져, 4가의 세륨에 의해서는 탄산세륨으로의 전환이 이루어 지지 않게 되므로 본 발명의 환원공정은 염화세륨 수용액 제조 시 매우 중요하다.Therefore, the cerium carbonate is composed of a trivalent cerium compound, the conversion of the cerium carbonate is not made by the tetravalent cerium compound, so the reduction process of the present invention is very important when preparing an aqueous solution of cerium chloride.
이에따라서, 일부 산화된 4가의 수산화세륨의 환원은 염화세륨 수용액의 적정 pH에서 과산화수소를 첨가함으로서 3가의 수산화세륨으로 환원되면서 염산에 용해된다.Accordingly, the reduction of some oxidized tetravalent cerium hydroxide is dissolved in hydrochloric acid while being reduced to trivalent cerium hydroxide by adding hydrogen peroxide at an appropriate pH of the aqueous solution of cerium chloride.
또한, 상기와 같은 방법으로 제조된 염화세륨수용액 내에는 미량의 Fe 성분이 존재하며, 고순도의 탄산세륨을 제조하기 위해서는 Fe 성분을 제거해야 한다.In addition, a small amount of Fe component is present in the cerium chloride aqueous solution prepared by the above method, and in order to manufacture cerium carbonate with high purity, the Fe component must be removed.
이를 위하여, 3가의 세륨과 Fe 이온이 수산화물로 침전되는 용액의 pH가 다르다는 점에 착안하여 산도조절법을 이용하여 Fe 성분을 제거하였다.For this purpose, paying attention to the fact that the pH of the solution in which the trivalent cerium and Fe ions are precipitated as hydroxide is different, the Fe component is removed by using an acidity control method.
상기와 같은 방법으로 제조된 염화세륨 수용액에 적정 온도에서 탄산암모늄을 첨가함으로서 탄산세륨이 제조된다.Cerium carbonate is prepared by adding ammonium carbonate at an appropriate temperature to an aqueous solution of cerium chloride prepared by the above method.
상기와 같은 제조방법에 의해 제조되는 탄산세륨의 제조방법을 본 발명의 실시예에 의해 상세하게 설명한다.The manufacturing method of cerium carbonate manufactured by the above manufacturing method is demonstrated in detail by the Example of this invention.
[실시예1]Example 1
(수산화세륨으로부터 염화세륨 수용액의 제조)(Production of Aqueous Cerium Chloride Solution From Cerium Hydroxide)
3가의 수산화세륨(Ce(OH)3)은 산화성이 강하여 수세척 또는 대기중에 노출되면 Ce(OH)4로 산화된다.Trivalent cerium hydroxide (Ce (OH) 3 ) is highly oxidizable and is oxidized to Ce (OH) 4 when washed or exposed to air.
이때, 3가의 수산화세륨(Ce(OH)3)은 pH 3 근처에서 염산에 용해되며, 4가의 수산화세륨(Ce(OH)4)은 pH 0.5 근처에서 용해되기 시작하여 완전하게는 용해되지 않게 된다.At this time, the trivalent cerium hydroxide (Ce (OH) 3 ) is dissolved in hydrochloric acid near pH 3, and the tetravalent cerium hydroxide (Ce (OH) 4 ) begins to dissolve near pH 0.5 and is not completely dissolved. .
따라서, 산화된 수산화세륨은 환원제에 의하여 3가의 수산화세륨으로 환원시킨다.Therefore, the oxidized cerium hydroxide is reduced to trivalent cerium hydroxide by the reducing agent.
이때, 상기 수산화세륨을 염산에 첨가하여 형성되는 염화세륨 수용액의 제조공정은 반응식1에 의해 제조된다.At this time, the manufacturing process of the cerium chloride aqueous solution formed by adding the cerium hydroxide to hydrochloric acid is prepared by Scheme 1.
상기 반응식에 의해 형성되는 염화세륨 제조방법에 있어서, 상기 염산의 첨가량은 화학반응식에 의한 1.0 당량만 첨가하면 3가의 수산화세륨이 거의 용해되며, 3가의 수산화세륨 용해 후 염산을 과량 첨가하면 4가의 수산화세륨도 용해된다.In the method for preparing cerium chloride formed by the above reaction formula, the amount of hydrochloric acid added is almost 1.0 trivalent by adding a chemical reaction formula, and the trivalent cerium hydroxide is almost dissolved. Cerium is also dissolved.
또한, 습식적정을 통하여 3가 및 4가 세륨의 함량을 분석한 결과 4가 세륨은 전체 세륨의 약 18% 정도로 존재하는 것을 알 수 있었으며, 이에 의하여 4가의 세륨에 반응식2와 같이 첨가되는 환원제인 과산화수소의 첨가량을 산정하였다.In addition, as a result of analyzing the content of trivalent and tetravalent cerium through wet titration, it was found that tetravalent cerium is present in about 18% of the total cerium, thereby reducing the additive added to the tetravalent cerium as in Scheme 2. The amount of hydrogen peroxide added was calculated.
일반적으로 과산화수소 용액은 pH 2 이하에서 환원용하기 때문에 용액의 pH 2 이하에서 pH 변화 및 과산화수소 첨가량을 변화시키면서 4가의 세륨을 3가로 환원시켰으며 이 결과는 표 1과 2에 제시되어 있다.Since the hydrogen peroxide solution is generally used for reducing at pH 2 or less, tetravalent cerium was reduced to trivalent while changing the pH and the amount of hydrogen peroxide added at pH 2 or less of the solution. The results are shown in Tables 1 and 2.
또한, 표 1에 의하면, 용액의 pH가 낮아질수록 세륨의 환원효과가 증가하게 되었으며, pH 1 이하에서는 영향을 거의 받지 않는다는 것을 알 수 있다.In addition, according to Table 1, as the pH of the solution is lowered, the reducing effect of cerium increases, and it can be seen that the pH is less affected by 1 or less.
그리고, 표 2에 의하면, 용액의 pH를 1로 유지하면서 과산화수소의 첨가량을 변화시킨 결과로서 4가 세륨 함량의 약 1.5 당량 정도만 투입되면 완전 환원이 일어나는 것을 알 수 있다.And, according to Table 2, as a result of changing the addition amount of hydrogen peroxide while maintaining the pH of the solution to 1, it can be seen that only about 1.5 equivalents of tetravalent cerium content is added to complete reduction.
[실시예2]Example 2
(염화세륨 수용액으로부터 철분의 제거)(Removal of Iron from Aqueous Cerium Chloride Solution)
상기와 같이 제조된 염화세륨 수용액에는 미량의 Fe 성분(4∼5 ppm)이 존재하는데, Fe 성분 제거를 위하여 다음과 같은 반응식3에 의한 산도조절법을 적용하였다.A small amount of Fe component (4 to 5 ppm) is present in the cerium chloride solution prepared as described above, and the acidity control method according to Scheme 3 is applied to remove the Fe component.
Ce4++ 4OH-→ Ce(OH)4↓ ( > pH 3.5) Ce 4+ + 4OH - → Ce ( OH) 4 ↓ (> pH 3.5)
Ce3++ 3OH-→ Ce(OH)3↓ ( > pH 7.0) Ce 3+ + 3OH - → Ce ( OH) 3 ↓ (> pH 7.0)
Re3++ 3OH-→ Re(OH)3↓ ( > pH 7.5) Re 3+ + 3OH - → Re ( OH) 3 ↓ (> pH 7.5)
여기서 Re는 세륨을 제외한 기타 3가의 희토류 원소를 의미한다.Where Re means other trivalent rare earth elements except cerium.
상기 반응식3과 같이, 세륨을 포함한 3가의 희토류 원소들은 용액의 pH 7.0 근처에서 수산화물로 침전되는데, Fe는 pH 3.0 근처에서 침전되므로 용액의 pH를 조절함으로서 Fe 성분을 제거할 수 있게 되었다.As in Scheme 3, trivalent rare earth elements including cerium are precipitated as hydroxide near pH 7.0 of the solution, and Fe is precipitated near pH 3.0 so that the Fe component can be removed by adjusting the pH of the solution.
이에따라서, 상기 염화세륨 수용액에 산성도(pH)의 조절하여 철을 제거하는 공정이 반응식4에 도시되며, 상기 산성도 조절을 위하여 묽은 암모니아수를 첨가하였다.Accordingly, the process of removing iron by adjusting the acidity (pH) to the aqueous solution of cerium chloride is shown in Scheme 4, and diluted ammonia water was added to adjust the acidity.
상기 반응에서 주의할 점은 Fe(OH)3가 침전될 때 세륨이 수산화세륨으로 공침되지 않도록 암모니아수를 천천히 첨가하여 균일상을 유지해야 하는 것이 바람직 하다.In the reaction, it is desirable to maintain a homogeneous phase by slowly adding ammonia water so that cerium is not co-precipitated with cerium hydroxide when Fe (OH) 3 is precipitated.
그리고, 표 3은, 용액의 pH 변화에 따라 Fe 성분을 제거한 후 용액 내 세륨 및 철 함량 변화를 나타내고 있다.And, Table 3 shows the change in cerium and iron content in the solution after removing the Fe component in accordance with the pH change of the solution.
상기 결과에 의하면, 용액의 pH에 관계없이 철의 함량은 0.4∼0.5 ppm으로 제거가 잘 이루어졌음을 알 수 있다.According to the result, it can be seen that the iron content is well removed to 0.4 to 0.5 ppm regardless of the pH of the solution.
그러나, pH 5 이상에서는 일부 세륨이 수산화세륨으로 공침되는 것을 알 수 있으며, 따라서 용액의 pH는 3∼4로 유지하는 것이 바람직 하다.However, at pH 5 or above, it can be seen that some cerium is co-precipitated with cerium hydroxide, and therefore, the pH of the solution is preferably maintained at 3-4.
[실시예3]Example 3
(염화세륨 수용액으로부터 탄산세륨의 제조)(Production of Cerium Carbonate from Aqueous Cerium Chloride)
상기와 같이 제조된 염화세륨 수용액에 탄산암모늄을 첨가하므로서 탄산세륨이 제조되는데, 이 때 염화세륨의 초기농도, 반응온도 및 탄산암모늄의 첨가방법에 따라 형성되는 탄산세륨의 결정상태는 다음과 같다.Cerium carbonate is prepared by adding ammonium carbonate to the aqueous solution of cerium chloride prepared as above, wherein the crystal state of cerium carbonate formed by the initial concentration of cerium chloride, the reaction temperature and the method of adding ammonium carbonate is as follows.
도 2는 반응온도 95℃에서 초기 염화세륨의 농도에 의해 제조된 탄산세륨의 XRD 분석결과를 도시하고 있는데, 이에 의하면 초기 염화세륨의 농도가 90g/ℓ에서 탄산세륨 수화물(cerium carbonate hydrate:Ce2(CO3)3·nH2O)의 결정구조 주 피크가 나타나는 것을 알 수 있으며, 이를 기준으로 하여 염화세륨의 농도가 낮거나 클 경우에는 수산화 탄산세륨(cerium carbonate hydroxide:Ce2OH(CO3)2·nH2O)의 결정구조를 이루고 있는 것을 알 수 있다.FIG. 2 shows XRD analysis results of cerium carbonate prepared by the initial concentration of cerium chloride at a reaction temperature of 95 ° C., which shows that cerium carbonate hydrate (Ce 2) has an initial concentration of 90 g / l. It can be seen that the main peak of the crystal structure of (CO 3 ) 3 nH 2 O appears. On the basis of this, when the concentration of cerium chloride is low or large, cerium carbonate hydroxide (Ce 2 OH (CO 3) is used. ) 2, it can be seen that constitute the crystal structure of nH 2 O).
또한, 도 3은 탄산암모늄 수용액내에 포함된 탄산암모늄의 농도변화에 따라 제조된 탄산세륨의 XRD 분석결과를 도시하고 있는데, 이에 따르면 탄산암모늄의 농도가 0.5M에서 탄산세륨 수화물(Ce2(CO3)3·nH2O)의 결정구조에 주 피크가 나타나며, 그 이상의 탄산암모늄 농도에서는 수산화 탄산세륨(Ce2OH(CO3)2·nH2O)의 결정구조를이루고 있는 것을 알 수 있다.In addition, Figure 3 shows the XRD analysis of the cerium carbonate prepared according to the change in the concentration of ammonium carbonate contained in the aqueous solution of ammonium carbonate, according to which the concentration of ammonium carbonate is cerium carbonate (Ce 2 (CO 3 The main peak appears in the crystal structure of 3 ) nH 2 O), and at a higher ammonium carbonate concentration, the crystal structure of cerium hydroxide (Ce 2 OH (CO 3 ) 2 nH 2 O) is obtained.
더하여, 도 4는 일정한 염화세륨 농도에서 반응온도에 따른 탄산세륨의 XRD 분석결과를 도시하고 있는데, 반응온도 50℃를 기준으로 반응온도가 증가할수록 결정구조는 탄산세륨 수화물에서 수산화 탄산세륨 구조로 변하는 것을 알 수 있다.In addition, Figure 4 shows the results of XRD analysis of cerium carbonate according to the reaction temperature at a constant cerium chloride concentration, the crystal structure is changed from cerium carbonate hydrate to cerium hydroxide structure as the reaction temperature increases based on the reaction temperature 50 ℃ It can be seen that.
이는 탄산세륨 제조시 탄산암모늄은 다음과 같은 반응식5를 수반할 수 있는데, 생성된 암모니아수는 염화세륨과 반응하면서 수산기와 세륨이 결합하여 수산화 탄산세륨를 형성하는 것이다.This is the ammonium carbonate in the preparation of cerium carbonate may be accompanied by the following reaction scheme 5, the ammonia water produced is reacted with cerium chloride to combine the hydroxyl group and cerium to form cerium carbonate.
NH4HCO3-------→ NH4OH + CO2↑NH 4 HCO 3 ------- → NH 4 OH + CO 2 ↑
> 30℃> 30 ℃
이에 따라서, 상기 반응식을 억제할 필요성이 있으며, 또한 탄산암모늄이 고농도로 용액 내 존재하면 다음 반응식6이 일어나며, 이는 온도가 증가함에 따라 더욱 잘 일어나게 되는 것을 알수있다.Accordingly, it is necessary to suppress the reaction scheme, and it can be seen that the following reaction scheme 6 occurs when ammonium carbonate is present in the solution at a high concentration, which is more likely to occur as the temperature increases.
NH4HCO3-------→ NH3+ CO2↑ + H2ONH 4 HCO 3 ------- → NH 3 + CO 2 ↑ + H 2 O
NH3+ H2O → NH4 ++ OH- NH 3 + H 2 O → NH 4 + + OH -
그러므로, 상기 반응이 일어나기 전에 탄산세륨의 침전이 우선적으로 일어나야 하며, 본 반응은 염산세륨 수용액을 50℃로 가열하면서 교반 시 탄산암모늄을 국부적으로 첨가함으로서 탄산세륨의 제조반응을 우선적으로 일어날 수 있도록 유도하는 것이 바람직 하다.Therefore, before the reaction takes place, the precipitation of cerium carbonate should occur preferentially, and this reaction induces the production of cerium carbonate preferentially by locally adding ammonium carbonate upon stirring while heating the aqueous solution of cerium chloride at 50 ° C. It is desirable to.
또한, 반응이 완전하게 진행되면 탄산암모늄의 지속적 첨가는 용액의 산도를 감소시키게 되며, 용액의 pH > 7에서 탄산세륨의 반응이 종결되었다.In addition, when the reaction proceeded completely, the continuous addition of ammonium carbonate reduced the acidity of the solution, and the reaction of cerium carbonate was terminated at pH> 7 of the solution.
이상에서 살펴본 바와 같은 본 발명은, 3가의 수산화세륨을 염산에 용해시켜 염화세륨 수용액을 제조할 때, 수용액 내에 존재하는 4가의 수산화세륨은 수용액의 pH를 약 1.0으로 조절하고 과산화수소를 첨가하여 3가의 수산화세륨으로 환원시켜줌으로서 염화세륨 수용액 제조 시 세륨의 손실을 줄일수 있다.As described above, in the present invention, when trivalent cerium hydroxide is dissolved in hydrochloric acid to prepare an aqueous solution of cerium chloride, the tetravalent cerium hydroxide present in the aqueous solution is adjusted to about 1.0 by adding pH of the aqueous solution to trivalent Reduction of cerium hydroxide can reduce the loss of cerium in the preparation of aqueous solution of cerium chloride.
또한, 산도조절법에 의하여 미량의 Fe 성분을 제거한 후 저온의 반응조건에서 탄산암모늄 첨가에 의한 고순도 탄산세륨을 제조한다.In addition, high purity cerium carbonate is prepared by adding ammonium carbonate under a low temperature reaction condition after removing a trace amount of Fe by acidity control.
더하여, 종래의 urea를 촉매로 하는 수열합성법과 비교하여 공정의 단순화 및 공정시간의 단축을 구현토록 하는 것이다.In addition, compared with the conventional hydrothermal synthesis method using urea as a catalyst, the process is simplified and the process time can be shortened.
본 발명은 특정한 실시예에 관련하여 도시하고 설명 하였지만, 이하의 특허청구범위에 의해 제공되는 본 발명의 정신이나 분야를 벗어나지 않는 한도내에서 본 발명이 다양하게 개량 및 변화될수 있다는 것을 당업계에서 통상의 지식을 가진자는 용이하게 알수 있음을 밝혀 두고자 한다.While the invention has been shown and described with respect to specific embodiments thereof, it will be apparent to those skilled in the art that various changes and modifications can be made without departing from the spirit or scope of the invention as provided by the following claims. I would like to clarify that those who have knowledge of this can easily know.
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US8361419B2 (en) | 2005-09-20 | 2013-01-29 | Lg Chem, Ltd. | Cerium carbonate powder, method for preparing the same, cerium oxide powder made therefrom, method for preparing the same, and CMP slurry comprising the same |
CN103395820A (en) * | 2013-08-09 | 2013-11-20 | 连云港市镧溪新材料有限公司 | Process of extraction of high-purity soluble cerium hydroxide from fluorine-carbon-cerium mixed rare earth carbonate |
CN103910373A (en) * | 2014-04-04 | 2014-07-09 | 江西稀有金属钨业控股集团有限公司 | Method and system for preparing cerium hydroxide |
KR101486439B1 (en) * | 2013-04-15 | 2015-01-27 | 한국세라믹기술원 | Manufacturing method of cerium carbonate using ceria abrasive material waste |
CN110745855A (en) * | 2018-07-04 | 2020-02-04 | 乐山东承新材料有限公司 | Preparation method of high-purity cerium hydroxide |
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JP2786095B2 (en) * | 1993-11-24 | 1998-08-13 | 信越化学工業株式会社 | Method for producing cerium carbonate and cerium oxide |
JP2980504B2 (en) * | 1993-12-21 | 1999-11-22 | 信越化学工業株式会社 | Cerium carbonate and cerium carbonate having novel morphology and method for producing cerium oxide |
JP4160184B2 (en) * | 1998-11-24 | 2008-10-01 | 信越化学工業株式会社 | Method for producing basic cerium carbonate |
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Cited By (6)
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US8361419B2 (en) | 2005-09-20 | 2013-01-29 | Lg Chem, Ltd. | Cerium carbonate powder, method for preparing the same, cerium oxide powder made therefrom, method for preparing the same, and CMP slurry comprising the same |
KR101486439B1 (en) * | 2013-04-15 | 2015-01-27 | 한국세라믹기술원 | Manufacturing method of cerium carbonate using ceria abrasive material waste |
CN103395820A (en) * | 2013-08-09 | 2013-11-20 | 连云港市镧溪新材料有限公司 | Process of extraction of high-purity soluble cerium hydroxide from fluorine-carbon-cerium mixed rare earth carbonate |
CN103910373A (en) * | 2014-04-04 | 2014-07-09 | 江西稀有金属钨业控股集团有限公司 | Method and system for preparing cerium hydroxide |
CN103910373B (en) * | 2014-04-04 | 2016-05-18 | 江西稀有金属钨业控股集团有限公司 | A kind of preparation method of cerium hydroxide and system |
CN110745855A (en) * | 2018-07-04 | 2020-02-04 | 乐山东承新材料有限公司 | Preparation method of high-purity cerium hydroxide |
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