KR20030049663A - Wireless installation in Digital Voltage Meter - Google Patents

Abstract

PURPOSE: A digital meter including a wireless device is provided to measure a voltage everywhere by installing the wireless device at the digital meter. CONSTITUTION: A digital meter(20) includes the first electric potential measurement portion(200), the second electric potential measurement portion(220), and a main body(240). The first electric potential measurement portion transmits the electric potential of a reference electric potential line. The second electric potential measurement portion transmits the electric potential of a power source line. The main body measures a voltage by detecting the electric potential difference and indicates the measured voltage. The first electric potential measurement portion includes the first wireless transmission portion in order to transmit the electric potential to the main body. The second electric potential measurement portion includes the second wireless transmission portion in order to transmit the electric potential to the main body.

Description

Digital meter with wireless device {Wireless installation in Digital Voltage Meter}

The present invention relates to a digital meter with a wireless device, and more particularly to a digital meter with a wireless device to measure the voltage at any point regardless of the size of the semiconductor device manufacturing equipment.

In general, fabrication of semiconductor devices is achieved by performing selective and repetitive processes such as photography, etching, diffusion, and metal deposition.

Various types of manufacturing facilities are used in the series of process executions, and these manufacturing facilities must be thoroughly inspected and managed in order to perform the process under optimum conditions.

Among these manufacturing facilities, there are manufacturing facilities in which the semiconductor device manufacturing process is performed in a precise voltage state. In this manufacturing facility, a process performed in a manufacturing facility due to these voltage states is performed by checking and managing voltage states such as voltage fluctuation and voltage supply. The purpose is to prevent the occurrence of disruption in advance.

Thus, by measuring the voltage using a digital meter DVM (Digital Voltage Meter) in each manufacturing facility, the operator recognizes this measurement and performs inspection and management of the manufacturing facility.

The DVM 10 is illustrated in FIG. 1. The configuration of the DVM 10 includes a first contact end 110 which is in direct contact with a power line 10a serving as a reference potential among two power lines 10a and 10b. )and; A second contact end 120 in direct contact with the power supply line 10b other than the line serving as the reference potential; The potential contacted at the first contact terminal 110 is transmitted to the potential line 111, and the potential contacted at the second contact terminal 120 is transferred to the potential line 121 to detect a potential difference thereof. The measured voltage measuring unit 132 is provided, and the voltage measured by the voltage measuring unit 132 is composed of a main body 130 having a display unit 134 is displayed to the operator.

In this case, the potential contacted to the first contact terminal 110 and the second contact terminal 120 is transmitted to the voltage measuring unit 132 through the potential lines 111 and 121, and the voltage measuring unit 132 is located at a specific position. Due to the fixed installation in the voltage can not be measured at a position outside the length of the potential line (111, 121), the range of measuring the voltage is bound to be limited. However, since the scale of the manufacturing equipment is largely out of the limited range of the voltage measurement, the point to measure the voltage in the manufacturing equipment is limited.

Therefore, the limitation of the point to be measured makes it difficult to accurately measure the voltage, thereby causing frequent safety accidents in the manufacturing equipment, and deteriorating the efficiency of the manufacturing equipment.

SUMMARY OF THE INVENTION An object of the present invention for solving the above problems is to provide a digital measuring instrument capable of measuring voltage at any point of a semiconductor device manufacturing facility.

1 is a block diagram showing a digital measuring instrument used in the prior art.

2 is a block diagram illustrating a digital measuring instrument equipped with a wireless device according to an embodiment of the present invention.

3 is a block diagram showing a digital measuring instrument with a wireless device according to another embodiment of the present invention.

* Description of the symbols for the main parts of the drawings *

10: digital measuring instrument 10a, 10b: power line

110: first contact end 120: second contact end

111, 121: potential line 130: main body

132: voltage measuring unit 134: display unit

20: digital measuring instrument 20a, 20b: power line

200: first potential measurement unit 220: second potential measurement unit

240: main body 20a, 20b: power line

200: first potential measurement unit 201: first contact end 204: first wireless transmitter

220: second potential measurement unit 221: second contact end 224: second wireless transmitter

240: main body 246: first wireless receiving unit 248: voltage measuring unit

242: first display unit 222: second display unit

226: second wireless receiving unit 228: second voltage measuring unit

In order to achieve the above object, the present invention includes a first potential measuring unit for directly contacting a line serving as a reference potential to wirelessly transmit the contact potential; A second potential measurement unit for directly contacting a power supply line other than a line serving as a reference potential to wirelessly transmit the contact potential; The main body is configured to detect a difference between the potentials wirelessly transmitted through the first potential measuring unit and the second potential measuring unit to measure a voltage and display the same to an operator. The first potential measuring unit includes a first wireless transmitter for transmitting a potential contacted by the first potential measuring unit to the main body, and the second potential measuring unit transmits the potential contacted by the second potential measuring unit to the main body. A second wireless transmitter (246) for transmitting a signal transmitted from the first wireless transmitter and a potential transmitted from the second wireless transmitter; A voltage measuring unit measuring a voltage by detecting a potential difference through a potential transmitted to the first wireless receiving unit; It is effective to have a display unit for displaying the voltage measured by the voltage measuring unit to the operator.

Hereinafter, with reference to the accompanying drawings will be described in detail a preferred embodiment of the present invention.

2 is a block diagram illustrating a digital instrument equipped with a wireless device according to an embodiment of the present invention.

The digital measuring instrument 20 of the present invention includes a first potential measuring unit 200, a second potential measuring unit 220, and a main body 240. First, the first potential measuring unit 200 includes two units. The first contact end 201 which is in direct contact with the power supply line 20a serving as the reference potential among the power supply lines 20a and 20b, and the first radio capable of transmitting the potential contacted by the first contact end 201. A second contact end 221 which is composed of a transmitter 204, and the second potential measurement part 220 is in direct contact with the power supply line 20b other than the line which becomes the reference potential. It consists of a second wireless transmitter 224 capable of transmitting a potential in contact with. In addition, the main body 240 includes a first radio receiver 246 for receiving a potential transmitted through the first radio transmitter 204 and a potential transmitted through the second radio transmitter 224, and the first radio. A first voltage measuring unit 248 that detects a potential difference between these potentials transmitted to the receiving unit 246 to measure a voltage, and a first display in which a voltage measured by the first voltage measuring unit 248 is displayed to an operator It consists of a portion (242).

Transmitting the electric potential contacted by the first contact terminal 201 to the first wireless receiving unit 246 of the main body 240 through the first wireless transmitting unit 204 provided by the first electric potential measuring unit 200. 2 In order to transmit the potential contacted by the contact terminal 221 to the first wireless receiver 246 of the main body 240 through the second wireless transmitter 224 provided by the second potential measuring unit 220, Use to send in form.

Looking at the operation of the digital instrument having the configuration as described above are as follows.

In order to measure the voltage at the two power lines, the first contact terminal of the first potential measuring unit 200 is designated to contact the line 20a by designating a line serving as the reference potential among the two power lines 20a and 20b. The second contact terminal 221 of the second potential measuring unit 220 is provided at another power line 20b.

Thus, the potential contacted by the first contact terminal 201 is transmitted to the first wireless receiver 246 of the main body 240 through the first wireless transmitter 204 of the first potential measuring unit 200, and the second contact. The potential contacted at the stage 221 is transmitted to the first wireless receiving unit 246 of the main body 240 through the second wireless transmitting unit 224 of the second potential measuring unit 220.

As such, the potential difference is detected through these potentials transmitted to the first wireless receiver 246 of the main body 240, and the first voltage measuring unit 248 measures two power line voltages through the detected potential difference. The voltage measured by the first voltage measuring unit 248 may be displayed to the operator through the first display unit 242.

On the other hand, Figure 3 shows a block diagram of a digital instrument equipped with a wireless device according to another embodiment of the present invention.

As shown in FIG. 3, the first potential measuring unit 200 and the main body 240 described above with reference to FIG. 2 are the same, and the second potential measuring unit 220 has the same second contact end 221 as shown in FIG. 2. A second wireless transmitter 224; A second wireless receiver 226 for receiving a potential contacted by the first potential measuring unit 200 through the first wireless transmitting unit 246; A second voltage measuring unit configured to measure a voltage by detecting a difference between a potential of the first potential measuring unit 200 transmitted to the second wireless receiving unit 226 and a potential contacted by the second potential measuring unit 220 ( 228); The second voltage measuring unit 228 is provided with a second display unit 222 that displays the voltage to the operator.

This is to allow the voltage displayed on the first display unit 242 of the main body 240 to be displayed on the second display unit 222 of the second potential measurement unit 220.

The operation of FIG. 3 having such a configuration is as follows.

In order to measure the voltage at the two power lines, the first contact terminal of the first potential measuring unit 200 is designated to contact the line 20a by designating a line serving as the reference potential among the two power lines 20a and 20b. The second contact terminal 221 of the second potential measuring unit 220 is provided at another power line 20b.

Thus, the potential contacted by the first contact terminal 201 is the first wireless receiver 246 of the main body 240 and the second electric potential measurer (204) through the first wireless transmitter 204 of the first electric potential measurer 200. The electric potential transmitted to the second wireless receiver 226 of 220 and contacted at the second contact terminal 221 is controlled by the second wireless transmitter 224 of the second potential measuring unit 220. 1 is transmitted to the wireless receiving unit 246.

At this time, the potential difference is detected through the potential transmitted to the second wireless repair unit 226 of the second potential measuring unit 220 and the potential contacted from the second contact terminal 221 of the second potential measuring unit 220. Through the detected potential difference, the second voltage measuring unit 228 measures two power line voltages. Thus, the voltage measured by the second voltage measuring unit 228 may be displayed to the operator through the second display unit 222.

On the other hand, the potential difference is detected through the potential contacted at the first contact end 201 transmitted to the first wireless receiver 246 of the main body 240 and the potential contacted at the second contact end 221, and the detected potential is detected. Through the potential difference, the first voltage measuring unit 248 measures two power line voltages. Thus, the voltage measured by the first voltage measurer 248 may be displayed to the operator through the first display unit 242.

Accordingly, the operator can recognize the voltage to be measured through the second display unit 222 of the second potential measuring unit 220 and the first display unit 242 of the main body 240.

Meanwhile, the second display unit, the second voltage measuring unit, and the second wireless receiving unit provided in the second potential measuring unit may be provided in the first potential measuring unit, which can be changed within the range specified by the present invention. Do.

On the other hand, the digital measuring instrument is intended to measure the voltage, it is in principle applied to the measurement of electronic devices such as resistance.

As described above, by using a digital measuring instrument equipped with a wireless device, to provide a digital measuring instrument to measure the voltage at any point regardless of the size of the semiconductor device manufacturing facilities.

Claims (4)

A first potential measurement unit for directly contacting the line serving as the reference potential and wirelessly transmitting the contact potential; A second potential measurement unit for directly contacting a power supply line other than a line serving as a reference potential to wirelessly transmit the contact potential; And a main body configured to detect a difference between the potentials transmitted wirelessly through the first potential measurement unit and the second potential measurement unit, measure a voltage, and display the same to an operator. The method of claim 1, wherein the first potential measuring unit And a first wireless transmitter which transmits the potential contacted by the first potential measuring unit to the main body. The method of claim 1, wherein the second potential measuring unit And a second wireless transmitter which transmits the potential contacted by the second potential measuring unit to the main body. The method of claim 1, wherein the main body is A first radio receiver for receiving the electric potential transmitted from the first radio transmitter and the electric potential transmitted from the second radio transmitter; A voltage measuring unit measuring a voltage by detecting a potential difference through a potential transmitted to the first wireless receiving unit; And a display unit for displaying the voltage measured by the voltage measuring unit to a worker.