KR200292098Y1 - Pump automatic switching device - Google Patents

Pump automatic switching device Download PDF

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Publication number
KR200292098Y1
KR200292098Y1 KR2019970029852U KR19970029852U KR200292098Y1 KR 200292098 Y1 KR200292098 Y1 KR 200292098Y1 KR 2019970029852 U KR2019970029852 U KR 2019970029852U KR 19970029852 U KR19970029852 U KR 19970029852U KR 200292098 Y1 KR200292098 Y1 KR 200292098Y1
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South Korea
Prior art keywords
pump
process liquid
pumps
automatic
switching device
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KR2019970029852U
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Korean (ko)
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KR19990016431U (en
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최확순
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주식회사 하이닉스반도체
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Priority to KR2019970029852U priority Critical patent/KR200292098Y1/en
Publication of KR19990016431U publication Critical patent/KR19990016431U/en
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D15/00—Control, e.g. regulation, of pumps, pumping installations or systems
    • F04D15/02—Stopping of pumps, or operating valves, on occurrence of unwanted conditions
    • F04D15/0245—Stopping of pumps, or operating valves, on occurrence of unwanted conditions responsive to a condition of the pump
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D15/00—Control, e.g. regulation, of pumps, pumping installations or systems
    • F04D15/0005—Control, e.g. regulation, of pumps, pumping installations or systems by using valves

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Control Of Positive-Displacement Pumps (AREA)

Abstract

본 고안은 펌프가 작동중 고장으로 정지할 때 펌프의 정지를 감지하여 자동으로 예비펌프를 작동시키는 펌프 자동 전환장치에 관한 것으로 종래의 수동에 의한 펌프 전환시 작업자가 발견하여 조치하기 전까지 펌프가 동작되지 않아 작업이 중단되고 이에따라 전체적인 공정상에 소요되는 시간이 증대되어 작업성을 저하시키는 문제점이 있었던바 본 고안은 공정액의 흐름을 감지하는 유량계에 의하여 펌프의 작동여부를 판단하여 펌프의 고장 시 예비로 준비된 펌프를 가동하고 펌프측으로 공정액의 흐름을 변경하여 공정액을 중단없이 제조장치에 공급하여 작업효율을 향상시키는 잇점이 있는 펌프 자동 전환장치이다.The present invention relates to a pump automatic switching device that automatically operates a preliminary pump by detecting the stoppage of a pump when the pump stops due to a breakdown during operation. There was a problem that the work is stopped and the time required for the overall process is increased accordingly, thereby degrading workability. The present invention determines whether the pump is operated by a flow meter that detects the flow of process liquid, and when the pump breaks down. It is an automatic pump switching device that has the advantage of improving the work efficiency by operating the pre-prepared pump and changing the flow of process liquid to the pump side to supply the process liquid to the manufacturing apparatus without interruption.

Description

펌프 자동 전환장치Pump automatic switching device

본 고안은 펌프 자동 전환장치에 관한 것으로 더욱 상세하게는 펌프가 작동중 고장으로 정지할 때 펌프의 정지를 감지하여 자동으로 예비펌프를 작동시키는 펌프 자동 전환장치에 관한 것이다.The present invention relates to a pump automatic switching device, and more particularly, to a pump automatic switching device for automatically operating the preliminary pump by detecting the stop of the pump when the pump stops due to failure during operation.

제조장치에 공정액을 지속적으로 공급하기 위한 통상적인 펌프는 도 1에서 도시된 바와같이 적어도 하나 이상의 펌프(1)(3)와, 공정액 공급라인(5)과, 공정액을 각 펌프(1)(3)에 전달하도록 펌프(1)(3)와 동일한 숫자로 상기 공정액 공급라인(3)에서 분기되어 설치된 배관(7)(9)과, 각 펌프(1)(3)의 양단에 형성되어 수동으로 배관을 개폐하는 밸브(11)(13)(15)(17)와, 상기 펌프(1)(3)를 구동하는 작동기체인 에어를 펌프(1)(3)에 각각 공급하는 솔레노이드 밸브(19)(21)와, 상기 솔레노이드 밸브(19)를 제어하는 프로그래머블 로직 컨트롤러(Programmable logic controller : 이하 PLC라 칭함)(21)로 구성된다.Conventional pumps for continuously supplying process liquids to a manufacturing apparatus include at least one pump (1) (3), a process liquid supply line (5), and a process liquid to each pump (1) as shown in FIG. Pipes 7 and 9 branched from the process liquid supply line 3 by the same number as the pumps 1 and 3 and to both ends of each pump 1 and 3 to be delivered to And solenoids for supplying valves 11, 13, 15 and 17 to open and close the pipes manually and air, which is an operating gas for driving the pumps 1 and 3, to the pumps 1 and 3, respectively. Valve 19, 21, and a programmable logic controller 21, which controls the solenoid valve 19, as follows.

이러한 종래 펌프의 동작과정을 설명하면 다음과 같다.Referring to the operation of the conventional pump as follows.

도면을 참조하면 PLC(23)의 동작신호에 따라 일측에 형성된 솔레노이드 밸브(19)가 온되고 이와 연결된 펌프(1)에 에어가 공급된다. 이렇게 공급된 에어에 의하여 하나의 펌프(1)가 작동되어 공정액을 제조장치로 이송한다. 이때 각 펌프(1)(3)의 양측단에 형성된 밸브(11)(13)(15)(17) 중 펌핑작업이 수행되는 펌프(1)의 밸브(11)(13)는 모두 개방되고 예비로 준비된 펌프(3)의 밸브(15)(17)는 모두 잠긴 상태를 유지한다. 따라서 공정액은 작동되는 펌프(3)와 연결된 배관(7)만을 통하여 제조장치에 공급된다.Referring to the drawing, the solenoid valve 19 formed at one side is turned on according to the operation signal of the PLC 23, and air is supplied to the pump 1 connected thereto. The pump 1 is operated by the air thus supplied to transfer the process liquid to the manufacturing apparatus. At this time, among the valves 11, 13, 15, and 17 formed at both ends of each pump 1, 3, the valves 11 and 13 of the pump 1, in which the pumping operation is performed, are all opened and preliminary. The valves 15 and 17 of the pump 3 prepared as described above are all kept locked. Therefore, the process liquid is supplied to the manufacturing apparatus through only the pipe 7 connected to the pump 3 to be operated.

이러한 상태에서 펌프(1)에 이상이 발생하여 작동되지 않을 경우, 에어가 펌프(1)에 공급되더라도 공정액은 제조장치에 전달되지 않는다. 따라서 공정이 중단되고 이러한 사실을 작업자가 발견한 후에 작동이 중지된 펌프(1)측의 밸브(11)(13)를 잠그고 예비로 준비된 펌프(3)측의 밸브(15)(17)를 개방하여 펌프(3)에 에어를 공급한다. 이에 예비로 준비된 펌프(3)가 작동되면서 공정액이 예비측 펌프(3)의 배관(9)을 통하여 제조장치로 전달되어 작업이 지속된다.In this state, if an abnormality occurs in the pump 1 and is not operated, the process liquid is not delivered to the manufacturing apparatus even though air is supplied to the pump 1. Therefore, after the process is stopped and the operator finds this, the valves 11 and 13 on the pump 1 side which have been stopped are closed and the valves 15 and 17 on the pump 3 side prepared in advance are opened. To supply air to the pump (3). As the preliminarily prepared pump 3 is operated, the process liquid is transferred to the manufacturing apparatus through the pipe 9 of the preliminary side pump 3 and the operation is continued.

그러나, 종래의 수동에 의한 펌프 전환시 작업자가 발견하여 조치하기 전까지 펌프가 동작되지 않아 작업이 중단되고 이에따라 전체적인 공정상에 소요되는 시간이 증대되어 작업성을 저하시키는 문제점이 있다.However, when the pump is switched by the conventional manual, the pump is not operated until the operator finds and measures the operation so that the operation is interrupted and thus the time required for the overall process is increased, thereby reducing workability.

본 고안의 목적은 공정액의 흐름을 감지하는 유량계에 의하여 펌프의 작동여부를 판단하여 펌프의 고장 시 예비로 준비된 펌프를 가동하고 펌프측으로 공정액의 흐름을 변경하여 공정액을 중단없이 제조장치에 공급하는 펌프 자동 전환장치를 제공하는 데 있다.The purpose of the present invention is to determine the operation of the pump by a flow meter that detects the flow of the process liquid, to operate the pre-prepared pump in the event of a pump failure, and to change the flow of the process liquid to the pump side to the manufacturing apparatus without interruption It is to provide an automatic pump switching device.

따라서, 본 고안은 상기의 목적을 달성하고자, 적어도 하나 이상의 펌프와, 공정액 공급라인과, 공정액을 각 펌프에 전달하도록 펌프와 동일한 숫자로 상기 공정액 공급라인에서 분기되어 펌프에 설치되는 배관과, 각 펌프의 유입부와 배출부에 연결된 배관을 개폐하는 자동 밸브와, 상기 펌프를 구동하는 작동체와, 상기 작동체를 펌프 및 자동밸브에 각각 전달하도록 개폐되는 솔레노이드 밸브와, 상기 솔레노이드 밸브를 제어하는 PLC와, 각 펌프의 배출부에 연결되어 공정액의 유량흐름을 감지하여 감지신호를 PLC에 전달하는 유량계로 구성된다.Therefore, the present invention, to achieve the above object, at least one or more pumps, the process solution supply line, the pipe branched from the process solution supply line by the same number as the pump to deliver the process solution to each pump installed in the pump And an automatic valve for opening and closing a pipe connected to an inlet and an outlet of each pump, an actuator for driving the pump, a solenoid valve for opening and closing the actuator to a pump and an automatic valve, and the solenoid valve. It is composed of a PLC for controlling the flow, and a flow meter connected to the discharge of each pump detects the flow of the process liquid and transmits a detection signal to the PLC.

도 1은 종래의 펌프 구조를 개략적으로 도시한 작동상태도이고,1 is an operation state diagram schematically showing a conventional pump structure,

도 2는 본 고안의 펌프 구조를 개략적으로 도시한 작동상태도이다.Figure 2 is a schematic view showing the operating state of the pump structure of the present invention.

* 도면의 주요 부분에 대한 부호의 설명 *Explanation of symbols on the main parts of the drawings

1 ,3, 101, 103 : 펌프, 5,105 : 공정액 공급라인,1,3, 101, 103: pump, 5,105: process liquid supply line,

7, 9, 107, 109 : 배관, 19, 131 : 솔레노이드 밸브,7, 9, 107, 109: piping, 19, 131: solenoid valve,

21, 129 : PLC, 111, 113, 115, 117 : 자동 밸브,21, 129: PLC, 111, 113, 115, 117: automatic valve,

127 : 유량계.127: flow meter.

이하, 첨부된 도면을 참조하여 본 고안을 설명하면 다음과 같다.Hereinafter, the present invention with reference to the accompanying drawings as follows.

도 2는 본 고안의 펌프 구조를 개략적으로 도시한 작동상태도이다.Figure 2 is a schematic view showing the operating state of the pump structure of the present invention.

제조장치에 공정액을 공급하기 위하여 적어도 하나이상의 펌프(101)(103)가 형성된다.At least one pump 101 or 103 is formed to supply process liquid to the manufacturing apparatus.

이때, 각 펌프(!01)(103)는 작업이 진행되는 펌프(101)와 이러한 펌프(101)의 작동이 중지될 때를 대비하여 예비로 준비된 펌프(103)로 이루어진다.At this time, each pump (! 01) 103 is composed of the pump 101, the operation is in progress and the pump 103 prepared in preparation for when the operation of the pump 101 is stopped.

한편, 제조장치에 제공되는 공정액을 전달하는 공정액 공급라인(105)이 형성되어 각각의 펌프(101)(103)에서 분기되어 형성된 배관(107)(109)과 상호 연결된다.On the other hand, a process liquid supply line 105 for delivering a process liquid provided to the manufacturing apparatus is formed and is interconnected with the pipes 107, 109 formed branched from each of the pump 101 (103).

각 펌프(101)(103)의 유입부와 배출부에 연결된 배관(107)(109)에는 이를 개폐하는 자동 밸브(111)(113)(115)(117)가 각각 형성되어 공정액의 흐름을 조절하고 이러한 자동 밸브(111)(113)(115)(117)는 솔레노이드 밸브(131)가 개폐되며 공급되는 작동체에 의하여 동작된다. 이때 본 고안의 바람직한 실시예에서는 에어를 작동체로 사용한다.In the pipes 107 and 109 connected to the inlet and the outlet of each pump 101 and 103, automatic valves 111, 113, 115, and 117 are formed to open and close the pumps. These automatic valves 111, 113, 115, 117 are operated by an actuator that is opened and closed by the solenoid valve 131. At this time, in the preferred embodiment of the present invention, air is used as the actuator.

한편, 상기 작동체는 펌프(101)(103)를 구동하는데도 사용되어 솔레노이드 밸브(131)의 개폐에 따라 펌프를 작동시킨다.On the other hand, the actuator is also used to drive the pump 101, 103 to operate the pump in accordance with the opening and closing of the solenoid valve 131.

이러한 솔레노이드 밸브(131)는 사전에 프로그램된 PLC(129)에 의하여 개폐시기가 결정된다.The solenoid valve 131 is opened and closed by the PLC 129 programmed in advance.

상기 각 펌프(101)(103)의 배출부에는 공정액의 흐름을 감지하여 디지털 신호로 변환한 후 상기 PLC(129)에 전달하는 유량계(127)가 형성된다.The discharge part of each of the pumps 101 and 103 is formed with a flow meter 127 that detects the flow of the process liquid, converts it into a digital signal, and transmits it to the PLC 129.

따라서 상기 유량계(127)의 디지털 신호에 의하여 각 펌프(101)(103)에서의 공정액의 흐름여부가 판단되고 PLC(129)에서 각각의 펌프(101)(103) 및 자동 밸브(111)(113)(115)(117)의 개폐를 조정하여 공정액의 흐름을 제어한다.Therefore, whether or not the flow of the process liquid in each of the pumps 101 and 103 is determined by the digital signal of the flow meter 127, and each of the pumps 101 and 103 and the automatic valve 111 ( The flow of the process liquid is controlled by adjusting the opening and closing of 113, 115 and 117.

한편, 상기 펌프(101)(103)를 교체하고자 할 때는 각 펌프에 연결된 배관(107)(109)을 차단하여야 하며 이를 위하여 자동 밸브(111)(113)(115)(117)와 대응된 곳에 형성된 수동 밸브(119)(121)(123)(125)를 닫아 공정액의 방출을 방지한 상태에서 작업을 수행한다.Meanwhile, when the pumps 101 and 103 are to be replaced, the pipes 107 and 109 connected to the respective pumps must be shut off, and for this purpose, the automatic valves 111, 113, 115, and 117 correspond to the pumps. The manual valves 119, 121, 123, 125 are formed to close the process liquid, thereby performing the operation.

본 고안의 펌프 전환장치에 의한 공정액 제어과정을 알아보면 다음과 같다.The process liquid control process by the pump switching device of the present invention is as follows.

도면을 참조하면 PLC(129)에서의 펌프구동신호에 의하여 솔레노이드 밸브(131)가 개방되며 작동체가 일측의 펌프(101)에 전달된다. 이에따라 펌프(101)가 작동되고 양측단에 형성된 자동 밸브(111)(113)가 개방되어 유입부에 연결된 배관(107)(109)을 통하여 공정액 공급라인(105)으로 유입된 공정액이 제조장치까지 이송된다.Referring to the drawings, the solenoid valve 131 is opened by the pump driving signal from the PLC 129, and the actuator is transmitted to the pump 101 on one side. Accordingly, the process liquid introduced into the process liquid supply line 105 through the pipes 107 and 109 connected to the inlet by opening the automatic valves 111 and 113 formed at both ends of the pump 101 is operated. Conveyed to the device.

한편, 예비로 준비된 펌프(103)에는 작동체가 전달되지 않아 동작하지 않고 각각의 자동 밸브(115)(117)는 닫힌 상태로 유지되어 공정액이 전달되지 않는다.On the other hand, the actuator 103 is not delivered to the preliminarily prepared pump 103, and each of the automatic valves 115 and 117 is kept closed so that the process liquid is not delivered.

상기 공정액의 흐름은 펌프(101)의 배출부에 형성된 유량계(127)에 의하여 지속적으로 감지되어 PLC(129)에 디지털 신호로 전달되고 이러한 신호에 의하여 펌프(101)의 작동여부가 판단된다.The flow of the process liquid is continuously sensed by the flow meter 127 formed in the discharge portion of the pump 101 and transmitted to the PLC 129 as a digital signal, and the operation of the pump 101 is determined based on the signal.

따라서 상기 펌프(101)에 이상이 발생하여 작동이 중단되는 경우에는 공정액이 유량계(127)에 전달되지 않고, 이러한 정보는 PLC(129)에 전달된다.Therefore, when an abnormality occurs in the pump 101 and the operation is stopped, the process liquid is not transmitted to the flow meter 127, and this information is transmitted to the PLC 129.

이렇게 펌프(101)의 이상정보가 PLC(129)에 전달되면 정지된 펌프(101)의 자동 밸브(111)(113) 및 작동체를 전달하는 솔레노이드 밸브(131)가 차단되고 예비로 준비된 펌프(103)측에 솔레노이드 밸브(131)가 개방되면서 작동체가 공급되어 펌프(103)가 구동된다. 또한 상기 솔레노이드 밸브(131)에 의하여 펌프(103)의 양측단에 형성된 자동 밸브(115)(117)가 개방되므로써 공정액의 흐름이 전환된다.When the abnormality information of the pump 101 is transmitted to the PLC 129, the solenoid valve 131 for transmitting the automatic valves 111 and 113 and the actuator of the stopped pump 101 are shut off and the pump prepared in advance ( As the solenoid valve 131 is opened to the 103 side, the actuator is supplied and the pump 103 is driven. In addition, the solenoid valve 131 opens the automatic valves 115 and 117 formed at both ends of the pump 103 so that the flow of the process liquid is switched.

따라서 정지된 펌프(101)측에서 예비로 준비된 펌프(103)측으로 공정액의 흐름이 전환되어 제조장치에 중단없이 지속적으로 공급된다.Therefore, the flow of the process liquid is switched from the stopped pump 101 side to the preliminarily prepared pump 103 side and continuously supplied to the manufacturing apparatus without interruption.

상기에서 상술된 바와 같이, 본 고안은 공정액의 흐름을 감지하는 유량계에 의하여 펌프의 작동여부를 판단하고 펌프의 고장 시 예비로 준비된 펌프를 가동하는 한편 펌프측으로 공정액의 흐름을 변경하는 자동 밸브를 형성하여 공정액을 중단없이 제조장치에 공급하므로써 작업효율을 향상시키는 잇점이 있다.As described above, the present invention is an automatic valve for determining whether the pump is operated by a flow meter that detects the flow of the process liquid, and changes the flow of the process liquid to the pump side while operating a preliminarily prepared pump in case of a pump failure. It is advantageous to improve the working efficiency by forming a process liquid and supplying the process liquid to the manufacturing apparatus without interruption.

Claims (2)

적어도 하나 이상의 펌프(101)(103)와;At least one pump (101) (103); 공정액 공급라인(105)과;A process liquid supply line 105; 공정액을 각 펌프(101)(103)에 전달하도록 펌프(101)(103)와 동일한 숫자로 상기 공정액 공급라인(105)에서 분기되어 펌프(101)(103)에 설치되는 배관(107)(109)과;Pipe 107 branched from the process liquid supply line 105 by the same number as the pumps 101 and 103 so as to deliver the process liquid to each of the pumps 101 and 103 and installed in the pumps 101 and 103. 109; 각 펌프(101)(103)의 유입부와 배출부에 연결된 배관(107)(109)을 개폐하는 자동 밸브(111)(113)(115)(117)와;Automatic valves 111, 113, 115, 117 for opening and closing pipes 107, 109 connected to inlets and outlets of the respective pumps 101, 103; 상기 펌프(101)(103)를 구동하는 작동체를 펌프(101)(103) 및 자동밸브(111)(113)(115)(117)에 각각 전달하도록 개폐되는 솔레노이드 밸브(131)와;A solenoid valve 131 which opens and closes to deliver the actuator driving the pumps 101 and 103 to the pumps 101 and 103 and the automatic valves 111, 113, 115 and 117, respectively; 상기 솔레노이드 밸브(131)를 제어하는 PLC(129)와;A PLC (129) for controlling the solenoid valve (131); 각 펌프(101)(103)의 배출부에 연결되어 공정액의 유량흐름을 감지하여 감지신호를 PLC(129)에 전달하는 유량계(127)로 구성되는 것을 특징으로 하는 펌프 자동 전환장치.It is connected to the outlet of each pump 101, 103, the pump automatic switching device, characterized in that consisting of a flow meter (127) for detecting the flow of the process liquid and transmits a detection signal to the PLC (129). 청구항 1 에 있어서,The method according to claim 1, 상기 자동 밸브(111)(113)(115)(117)와 대응되게 위치하여 펌프(101)(103)교체시 배관(107)(109)을 차단하는 수동 밸브(119)(121)(123)(125)를 각각 구비하는 것을 특징으로 하는 펌프 자동 전환장치.Manual valves 119, 121, 123 positioned to correspond to the automatic valves 111, 113, 115, 117 to shut off the pipes 107, 109 when the pumps 101, 103 are replaced. Automatic pump switching device characterized in that each provided (125).
KR2019970029852U 1997-10-28 1997-10-28 Pump automatic switching device KR200292098Y1 (en)

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Publication number Priority date Publication date Assignee Title
US7434589B2 (en) 2003-06-12 2008-10-14 Samsung Electronics Co., Ltd. Wafer cleaning apparatus with anticipating malfunction of pump

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CN111828301A (en) * 2020-08-11 2020-10-27 中国轻工业南宁设计工程有限公司 Intelligent control system for uniformly pumping filtered juice in sugar refinery
KR102286390B1 (en) * 2020-12-10 2021-08-05 ㈜에스피에스솔루션 Sewage pump system with cooling function pump

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7434589B2 (en) 2003-06-12 2008-10-14 Samsung Electronics Co., Ltd. Wafer cleaning apparatus with anticipating malfunction of pump

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