KR200291959Y1 - Grinding holder of a sample for semi conductor - Google Patents

Abstract

In order to provide a grinding holder used when grinding the specimen, the present invention includes a fixed holder body, a movable holder body installed on the fixed holder body and an adjusting member for adjusting the flatness of the movable holder body; The adjusting member provides a grinding holder including an elastic body such as a spring or elastic rubber installed between the fixed holder body and the movable holder body, and an adjusting screw for adjusting a relative position of the movable holder body with respect to the fixed holder body. .

Description

Grinding holder for semiconductor specimens {GRINDING HOLDER OF A SAMPLE FOR SEMI CONDUCTOR}

The present invention relates to a specimen manufacturing apparatus, and more particularly to a grinding holder used when grinding a specimen.

As a diffusion process, an oxidation process, a metal process, etc. are repeatedly performed in the manufacturing process of a semiconductor element, many film | membrane quality is laminated | stacked on the wafer. If a specific film quality among defects in the film quality formed on the wafer may cause abnormal operation of the semiconductor device formed by a subsequent process, an operation of extracting and inspecting a random number of wafers from among the wafers in which the specific semiconductor device manufacturing process has been performed is performed. Perform. In addition, as the integration of semiconductor devices increases, the manufacturing process is also complicated and miniaturized, so analysis and verification are essential processes, and much investment and effort are being made.

It is common to make and use specimens for such analysis and verification, and to perform analysis and verification by using a facility such as Scanning Electron Microscopy (SEM).

Thus, when the conventional specimen manufacturing method is described, first, a specimen is prepared by cutting to a predetermined size from a wafer, and a grinding process is performed to planarize the front surface of the wafer on which a plurality of films are formed from the top film to the bottom film. Then, the wet etching is performed by immersing in the dry etching or etching solution. Thereafter, an analysis process of analyzing the processed result is performed using a scanning electron microscope.

As described above, in the conventional specimen fabrication method, the specimen may be analyzed by a scanning electron microscope only after the specimen is pretreated through a cutting process, a grinding process, and an etching process.

In the specimen manufacturing method, the grinding process is a mechanical grinding method in which the specimen fixing device to which the specimen is attached and the polishing cloth opposite to the specimen are automatically rotated at a high speed, and the specimen holding device is directly held by the abrasive cloth. There is a manual grinding method of rubbing and polishing, in which the specimen is usually mounted in a grinding holder.

Referring to FIG. 1, the grinding holder 106 in which the specimen 104 is placed by a solid adhesive 102 is formed into a substantially cylindrical shape, and the holder fixing arm 108 is fixed to the opposite side in which the specimen 104 is placed. do. In addition, a grinding pad 110 for grinding the specimen 104 is installed under the grinding holder 106. Therefore, the test piece 104 is polished by rubbing while rotating the holder fixing arm 108 under an appropriate pressure applied thereto.

However, when the specimen 104 is ground using the holder 106 and the grinding pad 110, the specimen 104 may not be formed in FIG. 2 due to a phase difference or structural characteristics occurring when the specimen 104 is mounted. As shown by the solid line, only the local area is ground. That is, when the conventional grinding holder 106 is used, wear is performed from the outer region of the specimen 104. In this case, when the position to be analyzed is located in the center of the specimen 104, a lot of time is spent on grinding. In the case of analyzing the entirety of the specimen 104, there is a problem that the analysis takes a long time due to the disadvantage that the same film quality patterns cannot be analyzed at the same time.

The present invention has been proposed to solve the above problems, and an object thereof is to provide a grinding holder that can reduce the analysis time by making a uniform specimen.

1 is a front view showing a grinding process using a grinding holder of the prior art,

FIG. 2 is a front view showing a polished state of a specimen ground in a grinding holder of the prior art,

3 is a cross-sectional view of the grinding holder according to the present invention,

4 is a bottom perspective view of FIG. 3.

Explanation of symbols on the main parts of the drawings

12: grinding holder 12a: fixed holder body

12b: movable holder body 14: elastic body

16: fixed pin 18: adjusting screw

20: specimen 22: holder fixing arm

In order to achieve the above object, the grinding holder of the present invention is characterized by including a fixed holder body, a movable holder body installed on the fixed holder body, and an adjusting member for adjusting the flatness of the movable holder body.

The adjustment member may include an elastic body including a spring, an elastic rubber, or other material having elastic force, and an adjustment screw for adjusting a relative position of the movable holder body with respect to the fixed holder body. Include.

At this time, it is preferable that four adjustment screws are installed at equal intervals, and the movable holder body is fixed to the fixed holder body at the center thereof.

Hereinafter, a grinding holder according to the present invention will be described in detail with reference to the accompanying drawings.

3 is a cross-sectional view of the grinding holder according to an embodiment of the present invention. As shown in the figure, the grinding holder 12 is formed of two cylindrical bodies, namely, the fixed holder body 12a and the movable holder body 12b. Of course, the fixed and movable holder bodies 12a and 12b may be formed in other shapes such as ellipses. Here, the fixed and movable holder bodies 12a and 12b can be made of a metal, a compound, a ceramic, or the like, and the material thereof is not particularly limited.

The movable holder body 12b is elastically installed on the fixed holder body 12a by an elastic body 14 including a spring, elastic rubber, or other elastic material, which is illustrated in FIG. 3 as an example of the elastic body 14. Is shown.

At this time, in order to prevent the movable holder body 12b from being released from the fixed holder body 12a by the elastic body 14, the movable holder body 12b is fixed by the fixing pin 16. It is fixed to the holder body 12a.

In addition, two or more adjustment screws are installed in the fixed holder body 12a. In FIG. 4, four adjustment screws 18 are installed.

At this time, the adjustment screw 18 serves to maintain the flatness of the specimen 20 placed on the movable holder 12b by adjusting the height of a specific portion of the movable holder 12b.

That is, when the right portion of the specimen is installed higher than the left portion, as shown by the dotted line in FIG. 3, by adjusting the adjusting screw 18 on the left side to push the elastic body 14 as a whole, as shown by the solid line. The specimen 20 is to be installed flat.

In addition, the fixing holder body 12a is provided with a recess 24 in which an end portion of the holder fixing arm 22 is inserted and fixed. Although four grooves 24 are formed in FIG. 4, one groove 24 may be sufficient and one or more grooves may be formed, and the grooves 24 may be fixed in contact with the entire surface of the fixed holder body 12a. have. Moreover, it is also possible to form a recessed portion at the end of the arm 22 and to form a protrusion on the fixed holder body 12a to fix the fixed holder body 12a to the arm 22.

Therefore, when grinding the specimen 18 in a state where the specimen 20 is placed on the specimen mounting surface of the movable holder body 12b, when the specimen 20 is not flatly placed due to its structural characteristics, the fixed holder body 12a Since the grinding operation is performed in a state where the specimen 20 is flatly placed by adjusting the adjusting screw 18 of), the outer region and the center region of the specimen 20 are uniformly worn.

As described above, in the present invention, the grinding holder is divided into fixed and movable holder bodies, and the adjustment screw is used to adjust the flatness of the specimen placed on the movable holder body so that localization occurs due to the structural characteristics of the holder during the grinding operation. The wear is suppressed, and the outer region and the central portion have an effect capable of producing a specimen worn with a uniform thickness.

Therefore, the analysis time can be shortened by shortening the test piece production period, thereby reducing the feedback time, thereby bringing the effect of improving the yield.

Claims (7)

A grinding holder of a semiconductor specimen comprising a fixed holder body, a movable holder body installed on the fixed holder body and an adjusting member for adjusting the flatness of the movable holder body. The grinding holder of claim 1, wherein the adjustment member comprises an elastic body such as a spring or elastic rubber which is installed between the fixed holder member and the movable holder member. The grinding holder of claim 2, wherein the adjusting member further comprises an adjusting screw for adjusting a relative position of the movable holder body with respect to the fixed holder body. The grinding holder of claim 3, wherein four adjustment screws are installed at equal intervals. The grinding holder of claim 3, wherein the movable holder body is fixed to the fixed holder body by a fixing pin at a central portion thereof. The grinding holder of claim 3, wherein the fixed holder body comprises a recessed portion in which the holder fixing arm is fixed. The grinding holder of claim 6, wherein the fixed holder body is fixed to two holder fixing arms.