KR200210019Y1 - Box to take charge of photomask - Google Patents

Abstract

The present disclosure relates to a photomask storage box that can be easily inserted, stored, and transported while minimizing the size of the photomask to simplify handling and reduce logistics costs.

Conventionally, there was a photomask storage box, but the photomask seating protrusion received elasticity, so that the position of the photomask was not fixed, and the size of the box was increased to improve the ease of holding the photomask. In consideration of this point, grooves are formed on both side walls of the lower cover to facilitate gripping, and the size of the box can be downsized, and the upper and lower surfaces of the upper and lower covers respectively form lamination protrusions and corresponding lamination grooves to facilitate transport. It is possible to secure the position of the photomask by extending and fixing each seating protrusion of the upper / lower cover to each corner portion, and the hinges are positioned coaxially on both sides of the rear side of the upper / lower cover. Protruding to form a dust between each hinge to suppress the occurrence of dust, the front of the upper / lower cover The front of the locking member sikidoe improve the assemblability and includes a removable locking device, which is able to form a flat surface for labeling the type of a photomask, etc. accommodated therein.

Description

Photomask Storage Box {Box to take charge of photomask}

The present invention relates to a photomask storage box, and more particularly, to simplify the handling and reduce the logistics cost by miniaturizing the size while allowing the photomask to be stably inserted, stored, and transported.

As is well known, in order to form a circuit device such as a transistor of a semiconductor device, a process of patterning a predetermined portion of a wafer in several steps is required, and in this patterning process, a photomask is used. Since a light shielding film is formed of a material or is etched constantly to form a predetermined pattern, care must be taken in handling to maintain the position of the pattern stably.

Therefore, a storage box for storing or transporting the photomask is separately provided, so that the storage or transport box is usually stored with the photomask in the box. For this purpose, the photomask storage box is completely closed when the photomask is received and completely closed. It provides a structure in which the photomask does not flow therein, and is made of a material capable of maintaining the pattern of the photomask.

That is, the photomask storage box of the conventional structure is composed of a permanent antistatic synthetic resin material to maintain the pattern of the photomask, the structure is formed by projecting projections in the perpendicular direction spaced apart from each corner of the upper and lower cover by a predetermined interval, respectively. And, the bent portion is formed in each of the mounting grooves for seating the photomask, the upper surface of the mounting groove to form a support projection for supporting the photomask, respectively, the upper and lower cover is folded by the hinge, the upper and lower cover The front part is to form a lock.

At this time, each protrusion formed in a direction perpendicular to each corner side of the upper and lower cover is formed in a position that can be in close contact with the photomask when the upper cover and the lower cover is covered.

Therefore, if the photomask is placed in the lower cover of the photomask storage box and the top cover is locked to lock the locking device, the photomask is smoothly stored by shaking the photomask storage box at any angle so that the photomask is smoothly stored. It is transportable.

However, since the pattern of the photomask can be easily deformed even by fine movement, there should be no movement when the photomask is placed in the photomask storage box or transported. Since the photomask seating protrusion is spaced a predetermined distance from each corner of the upper and lower cover, the position is not fixed and may receive elasticity, so there is a problem that the photomask may be vibrated finely during transportation, and the upper and lower cover may be rotatably supported. The dust generated by the friction between the hinges of the upper and lower cover at the hinge portion to be buried in the photomask to cause a decrease in the reliability of the photomask.

In addition, in order to smoothly seat or remove the photomask into the storage box, the hand holding the photomask and both side walls of the storage box should not interfere, so the size of the storage box has to be increased. The photomask is mounted on the storage box. Even when the height of the mounting protrusions was low, the mounting position of the photomask had to be carefully checked and then placed.

In addition, when transporting the photomask storage box, it is common to transport several storage boxes containing photomasks in a predetermined space, but the upper and lower surfaces of the photomask storage box have a flat structure. When stacking, there was a risk of slipping and the upper and lower sides were composed of the same thickness as other parts, so that the photomask storage box was continuously stacked and pressed by the load, so that the position of the photomask housed inside could be stably maintained. There was no problem.

The present invention has been proposed in view of this point, and the grooves are formed on both side walls of the lower cover of the photomask storage box, and at the same time, protrusions corresponding to the grooves are formed on both side walls of the upper cover, and the upper and lower surfaces are thicker than the other parts. While forming a stacking groove and a stacking protrusion, respectively, each seating protrusion of the upper and lower cover is fixed to extend to each corner portion, but the seating protrusion of the lower cover is configured to protrude upward more than the other seating protrusions respectively, By making it easy to hold the photomask, the size of the overall photomask storage box can be reduced, and when the storage boxes containing the photomask are stacked, the position of the photomask is prevented from being moved by the load. At the same time, photomask storage boxes can be easily stacked, and photomask storage boxes can be stacked. No flow when transferring the photomask mounted projection has the purpose to provide a photo mask storage box which can maintain the position of the photomask stable.

In another aspect, the hinges protrude coaxially from the upper cover and the lower cover, respectively, and rotatably coupled via a buffer member between the hinges, thereby preventing dust from being generated by friction between the hinges. Its purpose is to.

In another aspect, the front surface of the detachable locking device that can selectively lock the upper cover and the lower cover by left and right sliding to make it possible to label the photomask housed therein can be distinguished from the outside. Its purpose is to.

1 is an exploded perspective view of a photomask storage box according to the present invention.

Figure 2 is a cross-sectional view of the photomask accommodated in the photomask storage box according to the present invention, laminated.

3 is a detailed view of the locking device of the photomask storage box according to the present invention,

(a) is an exploded perspective view.

(b) is a sectional view of the closed portion of the lower cover projection.

(c) is a half open section view of the undercover protrusion;

(d) is a perspective view of the back of the locking member.

*** Explanation of symbols for the main parts of the drawing ***

1: upper cover 2: lower cover 3: seating protrusion

4: seating groove 5: support protrusion 6: groove

7,9: protrusion 8: laminated protrusion 10: laminated groove

11: auxiliary seating protrusion 12, 13: hinge 14: cushioning member

15: shaft 16, 16 ', 17, 18: projection of the locking device

16a, 17a: closure 17b: half open 19: locking member

20: opening 21: flat surface

Hereinafter, the present invention will be embodied by the examples presented.

The photomask storage box according to the present invention consists of an upper cover (1) and a lower cover (2), and each of the corners of the upper / lower cover (1) (2) has a seating protrusion in a shape that is bent in a right direction (3). ) Is protruded, and the bent portion is formed with a mounting groove (4) for mounting the photomask (P), respectively, and the support protrusion for supporting the photomask (P) on the upper surface of the mounting groove (4) 5) are formed respectively.

In this case, grooves 6 are formed on both side walls of the lower cover 2, and protrusions 7 are formed on both side walls of the upper cover 1 to correspond to the grooves 6, and the lower surface of the lower cover 2 is formed. Laminated projections 8 are formed in a trapezoidal cross section on the whole, and a projection 9 is formed on the upper surface of the upper cover 1 that is wider than the entire area of the laminated projection 8 and higher than its height. The stacking grooves 10 corresponding to the stacking protrusions 8 are formed therein.

Each seating protrusion 3 of the upper / lower cover 1 and 2 extends and is fixed to each corner portion, and auxiliary seating higher than the height of the other seating protrusions on both sides of each seating protrusion 3 of the bottom cover 1 is fixed. The protrusions 11 are formed integrally with each other.

Hinge 12 is formed on both sides of the rear cover of the upper cover 1 to be coaxially positioned, and hinges 13 are formed on both sides of the rear cover of the lower cover 1 to be coaxially positioned. The hinge 13 of the lower cover 2 is located between the hinges 12 of the upper cover 1, and between the hinge 12 of the upper cover 1 and the hinge 13 of the lower cover 2, respectively. The shock absorbing member 14 is interposed and rotatably coupled by the shaft 15, respectively, and the upper cover 1 and the lower cover 2 are all composed of a synthetic resin material for preventing permanent charge, and the shock absorbing member 14 includes PP. It is preferable that the shaft 15 which uses the (polypropylene) resin and couple | bonds each hinge 12, 13 also consists of PP resin.

In addition, one side is closed to the front of the upper cover 1 and the other side is open in the cross-section '└' type protrusions (16, 16 ') protruding to both sides, one side closed to the front of the lower cover (2) And the other side is formed in such a way that the closing portion 17a is formed at the same position perpendicular to the one side protrusion 16 of the upper cover 1 while the other side is at least the top cover ( It is formed in a longer width range than the open protrusion 16 'of 1), and is located between the protrusions 16 and 16' of the upper cover 1 when the upper / lower cover 1 and 2 are covered. '└' type projections 18 on the cross section are formed integrally with the '┌' type projections 17, and the '└' and '┌' types of the respective projections 16, 16, 17 and 18. It is provided with a locking member 19 that can be guided by a groove to selectively slide the upper and lower covers (1) and 2 while sliding left and right, but the locking member (19) is half open of the lower cover protrusion (17) Stopped by part 17b When the other side projection 16 'of the upper cover 1 when the free state in the upward direction when the opening 20 of the same width and the width of the other projection 16' of the upper cover 1 is formed, When the locking member 19 is moved to the closing portions 16a and 17a of each of the protrusions 16 'and 17, the width to which the protrusions 16, 16', 17 and 18 can be completely locked. To form a lock. At this time, the locking member 19 is caught by the half-opened portion 17b of the lower cover 1 projection 17 when the pressure is normally applied, and maintains its position, and this portion 17b when the pressure is increased. Can come out through the outside, when the locking member 19 is inserted in the reverse order. In addition, the front surface of the locking member 19 is formed with a flat surface 21 is configured to be labeled on the front surface.

In the state configured as described above, the worker covers the upper cover 1 after seating the photomask (P) in the mounting groove (4) of the photomask storage box in a state holding both sides of the photomask (P), the present invention Since both side surfaces of the seating protrusions 3 according to the secondary seating protrusions 11 are higher than their heights, respectively, the seating position can be found more easily when the photomask P is seated. After P) is settled, its position does not change.

After covering the upper cover 1, the locking member 19 is slid leftward until it is stopped by the closing portions 16a and 17a of the upper and lower cover protrusions 16 and 17. (1) (2) is completely locked, and at this time, the kind of photomask (P) accommodated therein may be labeled on the front flat surface 21 of the locking member 19 so that it can be easily identified from the outside. .

When the photomask storage box is stacked in this state, the stacking protrusions 8 on the lower surface of the storage box are naturally inserted into the stacking grooves 10 on the upper surface of the storage box, so that the stacking positions can be maintained without change, and thus can be easily stacked. Since the upper and lower thicknesses of the storage box are thicker than other parts, they can withstand the load by the stacked storage boxes and can be transported without changing the position of the photomask (P) housed therein.

When removing the photomask P housed in the photomask storage box, the locking member 19 is pushed to the right until the half cover 17b of the lower cover protrusion 17 is pushed to the right. Protrusions 16 and 16 'are free to move upward to open the top cover 1, and when the top cover 1 is opened, grooves 6 on both side walls of the bottom cover 2 are formed. The two sides of the photomask P are gripped with both hands through the space, which is simply taken out.

At this time, the grooves 6 on both side walls of the lower cover 2 are closed by the protrusions 7 of the upper cover 1 when the upper and lower covers 1 and 2 are completely locked. Only when the cover (1) (2) is open, it can be displayed to facilitate the gripping. Therefore, even if the size of the photomask storage box is small, there is no restriction in gripping the photomask (P), thus storing the photomask. It is to enable the miniaturization of the box.

On the other hand, the hinge portion according to the present invention, the hinge 12 of the upper cover 1 and the hinge 13 of the lower cover 2 is located coaxially between the buffer member 14 of polypropylene material, Since the shaft 15 is also made of polypropylene, there is almost no generation of dust due to friction between the hinges 12 and 13, which can prevent deterioration in reliability of the photomask P due to dust. Since each seating protrusion 3 supporting P) is extended and fixed to each corner, the position of the photomask P can be stably maintained, and the pattern deformation of the photomask P due to vibration can be prevented. will be.

In addition, the locking member 19 of the locking device according to the present invention is a structure that can be attached and detached through the half-opening portion (17b) of the lower cover protrusion 17 can easily implement the locking device without taking a complicated structure, of course. Since the assembly is excellent, it is possible to improve workability and productivity.

As described above, the present invention forms grooves on both side walls of the lower cover of the photomask storage box, thereby facilitating the holding of the photomask, as well as minimizing the size of the photomask storage box. The upper and lower sides are thicker than the other parts, respectively, forming laminated grooves and lamination protrusions, so that storage boxes containing photomasks can be stacked and transported in multiple layers. Since it is extended and fixed, the pattern of the photomask can be stably maintained, and a cushioning member is interposed between the hinges of the upper and lower covers to prevent damage caused by dust, and each cover can be selectively selected by sliding left and right. Removable locks can be implemented to enhance device assembly and productivity A standing type that the front of the photomask is accommodated in labeling is possible and the like will be effective it can be easily identified from the outside.

Claims (1)

It consists of an upper cover and a lower cover, each of the corners of the upper / lower cover is projected in the shape bent in a direction perpendicular to the seating projection, the bent portion is formed with a seating groove for mounting the photomask, respectively In the photomask storage box, the support protrusion for supporting the photomask is formed on the upper surface of the seating groove, Grooves are formed on both side walls of the lower cover, and projections corresponding to the grooves are formed on both side walls of the upper cover to hold the photomask through the grooves. Laminated projections are formed in a trapezoidal cross-section on the entire lower surface of the lower cover, and projections formed on the upper surface of the upper cover are wider than the entire area of the laminated projection and higher than the height thereof, and correspond to the laminated projections inside the protrusions. Forming a laminated groove, Each seating protrusion of the upper / lower cover is fixed to extend to each corner, but each side of each seating protrusion of the bottom cover is formed integrally with the auxiliary seating protrusions higher than the height of the seating protrusion, respectively. The hinges protrude from the rear side of the upper cover to be positioned coaxially, respectively, and the hinges protrude from the rear side of the lower cover, respectively, to be positioned coaxially, with hinges of the lower cover between the hinges of the upper cover. To be positioned, respectively rotatably coupled via a buffer member between the hinge of the upper cover and the hinge of the lower cover, One side is closed to the front of the upper cover and the other side is open in cross-section '└' type protrusions protruding to both sides, one side is closed to the front of the lower cover and the other side is open to the cross-section '┌' type projections The closing portion is formed at the same position as the vertical protrusion of the upper cover while the other side is formed at least in a wider range than the open protrusion of the upper cover, but the protrusion of the upper cover when the upper / lower cover is covered Cross-section '└' type protrusions are formed integrally with the '┌' type protrusions on the site located between the upper and lower parts while being guided by the '└' and '┌' type grooves of each protrusion while sliding left and right. And a locking member for selectively locking the cover, wherein the locking member is stopped by the half-opened protrusion of the lower cover. An opening having a width equal to the width of the other protrusion of the upper cover is formed at a position where the other protrusion of the subcover is free in the upward direction, and the protrusion is completely completed when the locking member is moved to the closing portion of each protrusion. It is formed in a lockable width, the front surface of the locking member is a photomask storage box, characterized in that the flat surface is formed so that it can be labeled on the front.