KR20020028567A - Flat Panel Display and Method for Manufacturing the Same - Google Patents

Flat Panel Display and Method for Manufacturing the Same Download PDF

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Publication number
KR20020028567A
KR20020028567A KR1020000059627A KR20000059627A KR20020028567A KR 20020028567 A KR20020028567 A KR 20020028567A KR 1020000059627 A KR1020000059627 A KR 1020000059627A KR 20000059627 A KR20000059627 A KR 20000059627A KR 20020028567 A KR20020028567 A KR 20020028567A
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South Korea
Prior art keywords
color filter
transparent substrate
flat panel
panel display
mover
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KR1020000059627A
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Korean (ko)
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이용근
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이용일
(주)해라시스템
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Priority to KR1020000059627A priority Critical patent/KR20020028567A/en
Publication of KR20020028567A publication Critical patent/KR20020028567A/en

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509—Filters, e.g. light shielding masks
    • G02F1/133514—Colour filters
    • G02F1/133516—Methods for their manufacture, e.g. printing, electro-deposition or photolithography
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1884—Manufacture of transparent electrodes, e.g. TCO, ITO
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/133354—Arrangements for aligning or assembling substrates

Abstract

PURPOSE: A flat board display device is provided to fabricate micro electro mechanical elements by a micro machining technology, and to form a color filter and the micro electro mechanical elements as one body, so as to increase light-using efficiency and lower a production cost as well as improving arrangement precision. CONSTITUTION: A color filter layer(24) is formed on a back transparent substrate(20). A transparent electrode(21) is formed on the color filter layer(24) as an electric conductor. Micro electro mechanical elements(22) are formed on the back transparent substrate(20) to switch light. A supporting beam(23) supports the back transparent substrate(20) and a front transparent substrate(25).

Description

평판표시장치 및 그 제조방법{Flat Panel Display and Method for Manufacturing the Same}Flat panel display and method for manufacturing the same

본 발명은 평판표시장치에 관한 것으로, 특히 빛을 차단하거나 통과시키는 미소기전소자를 이용한 평판표시장치에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flat panel display device, and more particularly, to a flat panel display device using a microvoltaic device that blocks or passes light.

종래의 대표적인 표시장치인 액정(Liquid Crystal)을 사용하는 광개폐소자는 응시각도에 따른 빛의 콘트라스트 변화가 심하고, 액정의 반응시간이 길어 동화상 표현이 어렵다. 또한, 빛의 사용효율이 낮다는 결점 외에 액정주입과 액정정렬을 위한 별도의 조립공정이 필요하여 생산단가가 고가화 된다는 큰 문제가 있다.The photo-switching device using a liquid crystal (Liquid Crystal) which is a typical display device of the related art has a severe change in the contrast of light according to the gaze angle, and the reaction time of the liquid crystal is long, making it difficult to express a moving image. In addition, there is a big problem that the production cost is expensive because a separate assembly process for liquid crystal injection and liquid crystal alignment is required in addition to the drawback of low light efficiency.

또한, 종래의 기계적 광 샷터는 일반적으로 전력소모가 많으며 빠른 동작이 어렵고, 수백 ㎛ 크기의 미소한 광샷터를 만드는 것이 어려우며 이들을 복수개 배치하여 디스플레이의 화소로서 사용하는 것은 불가능하다.In addition, the conventional mechanical photo-shotter is generally high power consumption, difficult to operate quickly, it is difficult to make a micro-photocatterer of several hundred ㎛ size and it is impossible to arrange a plurality of them to use as a pixel of the display.

도 1은 종래의 미소기전소자를 이용한 평판표시장치의 단면도로서, 투명 전기 전도체인 투명전극(11)을 포함한 배면 유리기판(10)에 광을 개폐하는 미소기전소자(12)를 형성하고, 전면 유리기판(15)에는 세 가지 기본 색(적, 녹, 청색)의 염료나 안료를 포함하는 수지 필름으로 제조된 모자이크 배열의 칼라 필터층(14)을 형성하며 배면과 전면 유리기판(10, 15)을 지지하는 지지빔(13)을 형성한다.FIG. 1 is a cross-sectional view of a conventional flat panel display using a microvoltaic device. A microvoltaic device 12 that opens and closes light is formed on a back glass substrate 10 including a transparent electrode 11 that is a transparent electrical conductor. The glass substrate 15 forms a color filter layer 14 of a mosaic arrangement made of a resin film containing dyes or pigments of three basic colors (red, green and blue), and the rear and front glass substrates 10 and 15. To form a support beam 13 for supporting.

그러나, 종래의 미소기전소자를 이용한 평판표시장치는 칼라필터와 미소기전소자의 정렬이 어렵기 때문에 생산 수율이 떨어지는 단점이 있다.However, the conventional flat display device using the microvoltaic device has a disadvantage in that the yield of the production is reduced because the color filter and the microvoltaic device are difficult to align.

상기와 같은 문제점을 해결하기 위해 안출된 본 발명의 목적은 광개폐소자인 미소기전소자를 이용하여 광개폐효율이 높고 생산단가가 낮을 뿐만 아니라 생산 수율이 높은 평판표시장치를 제작하는데 있다.SUMMARY OF THE INVENTION An object of the present invention devised to solve the above problems is to manufacture a flat panel display device having a high light-opening efficiency and a low production cost as well as a high production yield using a microvoltaic device that is an optical switch.

도 1은 종래의 평판표시장치의 단면도1 is a cross-sectional view of a conventional flat panel display device

도 2는 본 발명에 따른 평판표시장치의 단면도2 is a cross-sectional view of a flat panel display device according to the present invention.

<도면의 주요부분에 대한 부호의 설명><Description of the symbols for the main parts of the drawings>

10, 15, 20, 25 : 유리기판 14, 24 : 칼라필터10, 15, 20, 25: glass substrate 14, 24: color filter

11, 21 : 투명전극 13, 23 : 지지빔11, 21: transparent electrode 13, 23: support beam

12, 22 : 미소기전소자12, 22: micro electromechanical element

상기와 같은 목적을 달성하기 위한 본 발명의 미소기전소자를 이용한 평판표시장치는 배면 투명기판에 형성된 칼라 필터층과, 칼라 필터층 상에 형성된 전기전도체인 투명전극과, 배면 투명기판에 형성되어 광을 개폐하는 미소기전소자, 및 배면 및 전면 투명기판을 지지하는 지지빔으로 이루어짐을 특징으로 한다.In order to achieve the above object, a flat panel display device using the micro-electroluminescent device of the present invention includes a color filter layer formed on a rear transparent substrate, a transparent electrode, which is an electrical conductor formed on the color filter layer, and a rear transparent substrate. The microvoltaic device, and a support beam for supporting the back and front transparent substrate.

최근에 반도체 가공기술을 활용하여 수 ㎛ 에서 수백 ㎛ 크기의 기계적 구조체를 제작하는 기술, 즉 마이크로 머시닝 기술이 마이크로미터 크기의 센서 및 액츄에이터 제작에 응용되고 있다. 이러한 마이크로 머시닝 기술을 활용하여 광개폐소자인 미소기전소자를 제작하여 액정(Liquid Crystal)을 사용하는 표시장치에 이용함으로써 빛의 사용효율을 높이고, 양산성이 우수한 반도체 공정만으로 미소기전소자를 제작하기 때문에 생산단가를 획기적으로 낮출 수 있다. 또한, 미세한 가공이 가능한 반도체 공정을 사용함으로써 더욱 미소한 수십 ㎛ 크기의 디스플레이 화소를 만들 수 있다.Recently, a technique of fabricating a mechanical structure of several micrometers to several hundred micrometers by using semiconductor processing technology, that is, micromachining technology, has been applied to fabricate micrometer-sized sensors and actuators. By using micro-machining technology, the micro-electromechanical device, which is a photo-switching device, is manufactured and used for a display device using liquid crystal to increase the efficiency of light use and to manufacture the micro-mechanical device using only a semiconductor process having excellent mass productivity. As a result, production costs can be drastically lowered. In addition, by using a semiconductor process capable of fine processing, it is possible to produce a display pixel having a smaller size of several tens of micrometers.

이하, 첨부된 도면을 참조하여 본 발명을 상세히 설명하면 다음과 같다.Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

도 2는 본 발명에 따른 미소기전소자를 이용한 평판표시장치의 단면도이다.2 is a cross-sectional view of a flat panel display using a microvoltaic device according to the present invention.

도 2에 나타낸 바와 같이, 본 발명의 평판표시장치는 배면 투명기판(20)에 세 가지 기본 색(적, 녹, 청색)의 염료나 안료를 포함하는 수지 필름으로 제조된 모자이크 배열의 칼라 필터층(24), 투명한 전기 전도체인 투명전극(21)과 광을 개폐하는 미소기전소자(22)와 배면과 전면 유리기판(20, 25)을 지지하는 지지빔(23)으로 구성되어 이루어져 있다. 여기서, 투명기판(20)을 유리 또는 석영을 사용할 수 있다.As shown in FIG. 2, the flat panel display device of the present invention includes a color filter layer of a mosaic arrangement made of a resin film including a dye or a pigment of three basic colors (red, green, blue) on the rear transparent substrate 20 ( 24), a transparent electrode 21, which is a transparent electric conductor, a microelectrode element 22 for opening and closing the light, and a support beam 23 for supporting the back and front glass substrates 20 and 25. Here, glass or quartz may be used for the transparent substrate 20.

도 3a 및 3b는 본 발명의 표시장치를 구성하는 미소기전소자의 단면도로서 동작원리를 나타낸 것이다.3A and 3B are cross-sectional views showing the operation principle of the microvoltaic elements constituting the display device of the present invention.

도 3a 및 도 3b에 나타낸 바와 같이, 양날개 모양의 회전이동형 미소기전소자(30)는 투명전극(21)과 회전이동자(30)를 지지하는 지지빔(31) 및 투명기판(21)으로 구성되어 이루어져 있으며, 회전이동자(30)는 이동전극(32)과 빛(35)의 개폐를 도와주는 마스크(33) 및 이 마스크(33)상에 만든 창(34)으로 이루어져 있다. 여기서, 미소기전소자(30)는 사용 목적에 따라 창이 없는 반사형으로 형성하거나 외날개 모양으로 형성하며, 회전이동자(30)는 2∼10 단계의 구조체로 형성한다.As shown in FIGS. 3A and 3B, the two wing-shaped rotationally moveable micro-element 30 includes a transparent electrode 21 and a support beam 31 and a transparent substrate 21 for supporting the rotary mover 30. The rotary mover 30 is composed of a mask 33 to help the opening and closing of the moving electrode 32 and the light 35 and a window 34 made on the mask 33. Here, the microvoltaic device 30 is formed in a reflective shape without a window or a wing shape according to the purpose of use, and the rotary mover 30 is formed of a structure of 2 to 10 steps.

도 3a는 초기상태로서, 투명전극(21)과 이동전극(32)에 전압을 인가하지 않은 경우이다. 이 상태에서는 회전이동자(30)가 회전운동을 하지 않고 평형 상태로 유지되므로 칼라필터에서 적색, 녹색, 청색을 조합한 빛을 마스크(33) 상에 만든 창(34)을 통하여 모두 통과시킨다.3A illustrates an initial state in which no voltage is applied to the transparent electrode 21 and the moving electrode 32. In this state, since the rotary mover 30 is maintained in an equilibrium state without rotating rotation, the light passing through the window 34 made on the mask 33 combines red, green, and blue in the color filter.

도 3b는 구동상태로서, 투명전극(21)과 이동전극(32) 사이의 인가 전압차이에 의한 정전 흡인력의 차이가 발생한다. 이 정전 흡인력의 차이에 의해 상부의 회전이동자(30)가 회전운동을 하게 되며 마스크(33)에 의해 칼라필터로부터 나온 빛(35)을 차단한다.3B is a driving state, and a difference in electrostatic attraction force due to an applied voltage difference between the transparent electrode 21 and the moving electrode 32 occurs. Due to the difference in the electrostatic attraction force, the upper rotary mover 30 rotates and blocks the light 35 from the color filter by the mask 33.

칼라필터로부터 나온 빛(35)이 차단되면 칼라필터에 도달하는 빛이 없으므로 까만 색상을 표시하게 된다. 이 상태에서 인가전압을 해제하면 회전이동자(30)는 초기상태로 돌아온다. 즉, 상기 정전 흡인력의 차이에 의해 회전이동자(30)를 지지하는 지지빔(31)이 탄성 변형하게 되며, 모든 전극에 인가한 전압을 해제하면 하부지지빔(31)에 저장된 탄성에너지에 의해 회전이동자(30)는 초기상태로 돌아온다. 본 발명의 회전이동자(30)의 형태는 창문에 쇠창살이 촘촘하게 박혀 있는 형상이다. 평상시에는 쇠창살 사이의 틈을 통하여 빛을 통과시키지만 구동전극에 전압을 인가하면 2개 이상의 창으로 구성된 다단계 가동 구조체인 이동전극이 회전하여 쇠창살 사이의 틈을 막아 빛을 차단하게 된다. 도 3b 및 도 3a를 각각 초기상태 및구동상태로 활용할 수도 있다.When the light 35 from the color filter is blocked, since no light reaches the color filter, a black color is displayed. When the applied voltage is released in this state, the rotary mover 30 returns to the initial state. That is, the support beam 31 supporting the rotary mover 30 is elastically deformed by the difference in the electrostatic attraction force, and when the voltage applied to all electrodes is released, the support beam 31 is rotated by the elastic energy stored in the lower support beam 31. The mover 30 returns to the initial state. The rotary mover 30 of the present invention has a shape in which a grate is tightly embedded in a window. In general, light passes through the gap between the grate, but when voltage is applied to the driving electrode, the moving electrode, which is a multi-stage movable structure composed of two or more windows, rotates to block the gap between the grate and block the light. 3B and 3A may be utilized as an initial state and a driving state, respectively.

또한, 지지빔(31)은 회전방향으로는 작은 저항강성을 갖도록 하고, 수직방향으로는 이동전극을 충분히 지지할 수 있도록 하는 형상을 갖으며 수직방향 강성이 작으면 회전이동자와 기판이 고착하는 현상이 발생하므로 지지빔(31)은 이러한 고착현상을 충분히 이길 수 있도록 충분한 수직방향 강성을 갖도록 단면과 형상을 형성한다.In addition, the support beam 31 has a shape that has a small resistance stiffness in the rotational direction, and can sufficiently support the moving electrode in the vertical direction, the phenomenon that the rotating mover and the substrate is fixed if the vertical rigidity is small As a result of this, the support beam 31 forms a cross section and a shape so as to have sufficient vertical rigidity to sufficiently overcome this sticking phenomenon.

상기와 같은 본 발명은 평판표시장치에 반도체 가공기술을 활용하여 수 ㎛ 에서 수백 ㎛ 크기의 기계적 구조체를 제작하는 기술, 즉 마이크로 머시닝 기술을 활용하여 미소기전소자를 제작함으로써 빛의 사용효율을 높이고, 반응속도가 매우 빨라 동화상 표현이 우수하며, 양산성이 높은 반도체 공정을 사용하므로 생산단가를 획기적으로 낮출 수 있다. 또한, 칼라 필터와 미소기전소자를 일체형으로 형성하므로 자동 정렬되어 정렬 정밀도를 비약적으로 향상시키고 전면 투명기판의 정렬이 불필요하므로 수율을 향상시키는 잇점이 있다.As described above, the present invention uses a semiconductor processing technology to manufacture a microstructured mechanical structure of several micrometers to several hundred micrometers in size, that is, microfabrication device is manufactured using micromachining technology to increase light use efficiency. The reaction speed is very fast, and the moving picture is excellent and the production cost can be drastically lowered by using the high-volume semiconductor process. In addition, since the color filter and the microvoltaic element are integrally formed, they are automatically aligned, which greatly improves the alignment accuracy and improves the yield since the alignment of the front transparent substrate is unnecessary.

Claims (8)

평판표시장치에 있어서,In the flat panel display device, 배면 투명기판에 형성된 칼라 필터층과,A color filter layer formed on the rear transparent substrate, 상기 칼라 필터층 상에 형성된 전기전도체인 투명전극과,A transparent electrode which is an electrical conductor formed on the color filter layer; 상기 배면 투명기판에 형성되어 광을 개폐하는 미소기전소자, 및A microvoltaic element formed on the rear transparent substrate to open and close light; 상기 배면 및 전면 투명기판을 지지하는 지지빔으로 이루어짐을 특징으로 하는 평판표시장치.And a support beam for supporting the rear and front transparent substrates. 제 1항에 있어서,The method of claim 1, 상기 투명기판은 유리 또는 석영인 것을 특징으로 하는 평판표시장치.And the transparent substrate is glass or quartz. 제 1항에 있어서,The method of claim 1, 상기 칼라필터층은 세 가지 기본 색(적, 녹, 청색)의 염료나 안료를 포함하는 수지 필름으로 제조된 모자이크 배열인 것을 특징으로 하는 평판표시장치.The color filter layer is a flat panel display device characterized in that the mosaic array made of a resin film containing a dye or pigment of three basic colors (red, green, blue). 제 1항에 있어서,The method of claim 1, 상기 미소기전소자는The micro device is 이동전극과 수직적으로 이격된 투명전극 사이의 인가전압 차이로 회전운동이 가능한 회전이동자와,A rotary mover capable of rotating movement due to an applied voltage difference between the movable electrode and the transparent electrode spaced vertically; 상기 회전이동자에 형성된 마스크 및 창, 및A mask and a window formed on the rotary mover, and 상기 회전이동자를 지지하기 위한 지지빔으로 이루어지는 것을 특징으로 하는 평판표시장치.And a support beam for supporting the rotary mover. 제 4항에 있어서,The method of claim 4, wherein 상기 미소기전소자는 양날개 또는 외날개 모양인 것을 특징으로 하는 평판표시장치.The micro device is a flat panel display, characterized in that the shape of both wings or outer wings. 제 4항에 있어서,The method of claim 4, wherein 상기 회전이동자는 2∼10 단계의 구조체로 이루어지는 것을 특징으로 하는 평판표시장치.And the rotating mover is a structure of 2 to 10 steps. 제 1항에 있어서,The method of claim 1, 상기 지지빔은 상기 회전이동자를 충분히 지지할 수 있고 회전운동을 원활히 할 수 있도록 형성된 것을 특징으로 하는 평판표시장치.And the support beam is configured to sufficiently support the rotatable mover and to facilitate the rotational movement. 제 1항에 있어서,The method of claim 1, 상기 마스크 및 상기 창은 빛의 차단 및 통과를 가능하게 하는 것을 특징으로 하는 평판표시장치.And the mask and the window enable blocking and passing of light.
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