KR200174665Y1 - Piezo actuator - Google Patents

Piezo actuator Download PDF

Info

Publication number
KR200174665Y1
KR200174665Y1 KR2019970005277U KR19970005277U KR200174665Y1 KR 200174665 Y1 KR200174665 Y1 KR 200174665Y1 KR 2019970005277 U KR2019970005277 U KR 2019970005277U KR 19970005277 U KR19970005277 U KR 19970005277U KR 200174665 Y1 KR200174665 Y1 KR 200174665Y1
Authority
KR
South Korea
Prior art keywords
piezo actuator
case member
piezoelectric ceramic
ceramic stack
exerciser
Prior art date
Application number
KR2019970005277U
Other languages
Korean (ko)
Other versions
KR19980061088U (en
Inventor
이정훈
Original Assignee
유무성
삼성항공산업주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 유무성, 삼성항공산업주식회사 filed Critical 유무성
Priority to KR2019970005277U priority Critical patent/KR200174665Y1/en
Publication of KR19980061088U publication Critical patent/KR19980061088U/en
Application granted granted Critical
Publication of KR200174665Y1 publication Critical patent/KR200174665Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Rehabilitation Tools (AREA)
  • Manipulator (AREA)

Abstract

케이스부재의 내부에 다수의 압전세라믹스가 접착되어 적층된 압전세라믹스 스택과, 그 압전세라믹스 스택의 상단부에 마련된 운동자와, 압전세라믹스 스택의 양측부에 각각 마련된 전극에 전압을 인가하기 위한 전압인가수단과, 상기 케이스부재에 지지되는 판스프링부재에 의해 구속되도록 상기 운동자의 상단부에 지지된 볼부재를 포함하는 적층형 피에조 액튜에이터가 개시된다.A piezoelectric ceramic stack in which a plurality of piezoelectric ceramics are adhered and stacked inside the case member, an exerciser provided at an upper end of the piezoelectric ceramic stack, and voltage applying means for applying a voltage to electrodes provided at both sides of the piezoelectric ceramic stack; A stacked piezo actuator comprising a ball member supported on an upper end of the exerciser to be constrained by a leaf spring member supported by the case member is disclosed.

Description

피에조 액튜에이터Piezo Actuator

본 고안은 피에조 액튜에이터에 관한 것으로서, 특히 압전세라믹스가 적층된 적층형 피에조 액튜에이터에 관한 것이다.The present invention relates to a piezo actuator, and more particularly, to a laminated piezo actuator in which piezoelectric ceramics are laminated.

외부로부터 기계적 변형을 가하면 전기분극이 나타나는 압전현상을 이용한 피에조 액튜에이터(piezo actuator)는 다양한 형태의 구동원리를 이용하여 정밀 위치제어에 사용되고 있다. 특히, 압전세라믹스를 적층하여 구성한 적층형 피에조 액튜에이터는 구동범위가 크고 분해능이 뛰어나 예컨대, 광기구나 기계적 필터 및 정밀 스테이지 등과 같은 초정밀 위치제어가 필요한 기계장치에 주로 이용된다.Piezo actuators, which use piezoelectric phenomena that exhibit electrical polarization when mechanically deformed from the outside, are used for precise position control using various driving principles. In particular, the laminated piezo actuator formed by stacking piezoceramic materials has a large driving range and excellent resolution, and is mainly used for a mechanical device requiring ultra-precision position control such as a light fixture, a mechanical filter, and a precision stage.

도 1은 종래의 피에조 액튜에이터를 나타내 보인 개략적 단면도로서, 알루미늄으로 제작된 박스형 케이스부재(110)의 내부에 다수의 압전세라믹스가 접착되어 적층된 압전세라믹스 스택(120)이 형성되고, 그 상단부에는 상기 케이스부재(110)의 상단부로 돌출되도록 적층된 운동자(130)가 마련되어 있다. 그리고, 상기 압전세라믹스 스택(120)의 양측부에는 전극(141)(142)이 마련되어 있어서, 외부전원을 이용하여 상기 전극(141)(142)에 전압을 가하면 상기 운동자(130)의 운동에 의한 종방향의 변위가 발생된다. 참조부호 150은 외부전원(미도시)과 연결되는 커넥터이고, 151 및 152는 상기 전극(141)(142)에 연결되는 리드선이다.Figure 1 is a schematic cross-sectional view showing a conventional piezo actuator, a piezoelectric ceramic stack 120 is formed by bonding a plurality of piezoelectric ceramics are laminated inside the box-shaped case member 110 made of aluminum, the upper end of the The exercisers 130 are stacked to protrude to the upper end of the case member 110. In addition, electrodes 141 and 142 are provided at both sides of the piezoelectric ceramic stack 120, and when voltage is applied to the electrodes 141 and 142 using an external power source, the movement of the exerciser 130 is performed. Displacement in the longitudinal direction occurs. Reference numeral 150 is a connector connected to an external power source (not shown), and 151 and 152 are lead wires connected to the electrodes 141 and 142.

이러한 종래의 피에조 액튜에이터는 종방향의 힘에는 강하나, 횡방향의 힘이 압전세라믹스 스택에 가해지면 쉽게 파손되는 문제점이 있다. 따라서, 기계장치에 연결할 때 세심한 주의가 요구된다.Such a conventional piezo actuator is strong in the longitudinal force, but has a problem in that the transverse force is easily broken when the piezoelectric ceramic stack is applied. Therefore, great care must be taken when connecting to machinery.

본 고안이 이루고자 하는 기술적 과제는 상기한 바와 같은 종래 피에조 액튜에이터가 가지는 문제점을 개선하기 위한 것으로서, 본 고안은 외부로부터의 힘 특히, 횡방향에 대한 힘의 영향을 최소로 받을 수 있도록 구조 개선된 적층형 피에조 액튜에이터를 제공함에 그 목적이 있다.The technical problem to be achieved by the present invention is to improve the problems of the conventional piezo actuators as described above, the present invention is a laminated structure that is structurally improved so that the influence of the force from the outside, in particular the force in the transverse direction to a minimum The purpose is to provide a piezo actuator.

도 1은 종래의 피에조 액튜에이터를 나타내 보인 개략적 단면도이고,1 is a schematic cross-sectional view showing a conventional piezo actuator,

도 2는 본 고안에 의한 피에조 액튜에이터를 나타내 보인 개략적 단면도이다.2 is a schematic cross-sectional view showing a piezo actuator according to the present invention.

<도면의 주요부분에 대한 부호의 설명><Description of the symbols for the main parts of the drawings>

210..케이스부재211..두껑부재210. Case member 211. Lid member

211a..개구부220..압전세라믹스 스택211a .. Opening 220. Piezoelectric ceramic stack

230..운동자241, 242..전극230. Exercisers 241, 242. Electrodes

250..커넥터251, 252..리드선250 Connector 251, 252 Lead wire

260..볼부재270..판스프링260 Ball member 270 Leaf spring

271..가이드부271..Guide

상기 목적을 달성하기 위하여 본 고안에 따른 피에조 액튜에이터는, 케이스부재와, 상기 케이스부재의 내부에 다수의 압전세라믹스가 접착되어 적층된 압전세라믹스 스택과, 상기 압전세라믹스 스택의 상단부에 마련된 운동자와, 상기 압전세라믹스 스택의 양측부에 각각 마련된 전극과 상기 전극에 전압을 인가하기 위한 전압인가수단을 포함하는 적층형 피에조 액튜에이터에 있어서, 상기 운동자의 상부에는 볼부재가 마련되고, 상기 볼부재는 상기 케이스부재에 지지되는 판스프링부재에 의해 간섭되도록 지지된 것을 특징으로 한다.In order to achieve the above object, a piezo actuator according to the present invention includes a case member, a piezoelectric ceramic stack in which a plurality of piezoelectric ceramics are adhered and stacked inside the case member, an exerciser provided at an upper end of the piezoelectric ceramic stack, and In the stacked piezo actuator comprising an electrode provided on each side of the piezoelectric ceramic stack and a voltage applying means for applying a voltage to the electrode, a ball member is provided on the upper part of the exerciser, the ball member is provided to the case member It is characterized in that it is supported to interfere with the supported leaf spring member.

상기 본 고안에 의한 적층형 피에조 액튜에이터에 있어서, 상기 판스프링은 상기 볼부재를 간섭하기 위한 가이드부를 가지고, 상기 가이드부는 상기 케이스부재의 상부로 돌출되는 것이 바람직하며, 상기 케이스부재의 상단부에는 개구부가 형성된 두껑부재가 마련되어 있는 것이 바람직하다.In the stacked piezo actuator according to the present invention, the leaf spring has a guide portion for interfering with the ball member, the guide portion preferably protrudes above the case member, the upper end of the case member is formed with an opening It is preferable that a lid member is provided.

이하, 바람직한 실시예에 따른 본 고안의 피에조 액튜에이터를 첨부된 도면을 참조하여 상세히 설명한다.Hereinafter, a piezo actuator of the present invention according to a preferred embodiment will be described in detail with reference to the accompanying drawings.

도 2는 본 고안에 의한 피에조 액튜에이터를 나타내 보인 개략적 단면 구성도로서, 박스형 케이스부재(210)의 내부에 다수의 압전세라믹스가 접착되어 적층된 압전세라믹스 스택(220)이 형성되고, 그 상단부에는 운동자(230)가 마련되어 있다. 그리고, 상기 운동자(230)에는 상기 케이스부재(210)에 지지되는 판스프링(270)에 의해 구속되도록 볼부재(260)가 지지된다. 또한, 상기 케이스부재(210)의 상부는 상방으로 개구된 개구부(211a)를 가지는 두껑부재(211)가 구비되어 있고, 상기 판스프링(270)에는 상기 볼부재(260)를 구속하기 위한 가이드부(271)가 상기 개구부(211a)로 돌출되도록 마련되어 있다. 참조 부호 241 및 242는 상기 압전세라믹스 스택(220)의 양측부에 마련되는 전극이고, 250은 외부전원(미도시)과 연결되는 전기적으로 연결되는 리드선(251)(252)에 의해 상기 전극(241)(242)에 연결되는 커넥터이다. 따라서, 외부전원을 이용하여 상기 전극(241)(242)에 전압을 가하면 상기 운동자(130)의 운동에 의한 종방향의 변위가 발생된다. 이때, 상기 판스프링(270)과 상기 볼부재(260)는 외부로부터의 횡방향의 힘을 차단하여 상기 압전세라믹스 스택(220)에 전달되는 것을 방지한다. 즉, 외부로부터 횡방향의 힘이 전달되어 오면, 상기 가이드부(271)가 상기 볼부재(260)를 구속한 상태에서 상기 판스프링(270)이 상기 볼부재(271)를 중심점으로 하여 회동됨으로써 횡방향의 힘이 흡수 소멸된다.2 is a schematic cross-sectional view showing a piezo actuator according to the present invention, a plurality of piezoceramic stacks 220 are formed by bonding a plurality of piezoelectric ceramics to the inside of the box-shaped case member 210, and an upper part of the movement 230 is provided. The ball member 260 is supported by the exerciser 230 so as to be restrained by the leaf spring 270 supported by the case member 210. In addition, an upper portion of the case member 210 is provided with a lid member 211 having an opening 211a opened upward, the guide portion for restraining the ball member 260 in the leaf spring 270 271 is provided so that it may protrude into the said opening part 211a. Reference numerals 241 and 242 denote electrodes provided on both sides of the piezoelectric ceramic stack 220, and 250 denotes the electrodes 241 by lead wires 251 and 252 electrically connected to an external power source (not shown). ) Is a connector connected to (242). Therefore, when a voltage is applied to the electrodes 241 and 242 using an external power source, a longitudinal displacement is generated by the movement of the exerciser 130. At this time, the leaf spring 270 and the ball member 260 blocks the transverse force from the outside to prevent the plate spring 270 and the ball member 260 from being transmitted to the piezoelectric ceramic stack 220. That is, when a force in the lateral direction is transmitted from the outside, the leaf spring 270 is rotated with the ball member 271 as the center point in a state in which the guide portion 271 restrains the ball member 260. The transverse force is absorbed and extinguished.

이상에서 설명된 바와 같이 본 고안에 의한 피에조 액튜에이터에 의하면, 외부로부터의 횡방향의 힘을 판스프링(270)과 볼부재(260)가 차단하여 압전세믹스 스택(220)에 전달되는 것을 방지함으로써 횡방향의 힘에 의한 압전세라믹스 스택의 파손을 방지할 수 있다.As described above, according to the piezo actuator according to the present invention, the plate spring 270 and the ball member 260 are blocked by the transverse force from the outside to prevent the piezoelectric stack 220 from being transmitted. Damage to the piezoceramic stack due to lateral force can be prevented.

Claims (1)

케이스부재와, 상기 케이스부재의 내부에 다수의 압전세라믹스가 접착되어 적층된 압전세라믹스 스택과, 상기 압전세라믹스 스택의 상단부에 마련된 운동자와, 상기 압전세라믹스 스택의 양측부에 각각 마련된 전극과 상기 전극에 전압을 인가하기 위한 전압인가수단을 포함하는 적층형 피에조 액튜에이터에 있어서,A case member, a piezoelectric ceramic stack in which a plurality of piezoelectric ceramics are adhered and stacked inside the case member, an exerciser provided at an upper end of the piezoelectric ceramic stack, an electrode provided at both sides of the piezoelectric ceramic stack, and the electrodes, respectively. In a stacked piezo actuator comprising a voltage applying means for applying a voltage, 상기 케이스부재의 상단부에는 개구부가 형성된 두껑부재가 마련되며,The upper end of the case member is provided with a lid member having an opening, 상기 운동자의 상부에는 볼부재가 마련되고, 상기 볼부재는 상기 케이스부재에 지지되는 판스프링부재에 의해 간섭되도록 지지되며,A ball member is provided on an upper portion of the exerciser, and the ball member is supported to interfere with the leaf spring member supported by the case member. 상기 판스프링은 상기 볼부재를 간섭하기 위한 가이드부를 가지고, 상기 가이드부는 상기 케이스부재의 개구부를 통하여 상부로 돌출된 것을 특징으로 하는 적층형 피에조 액튜에이터.The leaf spring has a guide portion for interfering with the ball member, the guide portion is a laminated piezo actuator, characterized in that protruding upward through the opening of the case member.
KR2019970005277U 1997-03-20 1997-03-20 Piezo actuator KR200174665Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019970005277U KR200174665Y1 (en) 1997-03-20 1997-03-20 Piezo actuator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019970005277U KR200174665Y1 (en) 1997-03-20 1997-03-20 Piezo actuator

Publications (2)

Publication Number Publication Date
KR19980061088U KR19980061088U (en) 1998-11-05
KR200174665Y1 true KR200174665Y1 (en) 2000-03-02

Family

ID=19497601

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019970005277U KR200174665Y1 (en) 1997-03-20 1997-03-20 Piezo actuator

Country Status (1)

Country Link
KR (1) KR200174665Y1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100338497B1 (en) * 1999-08-12 2002-05-30 박호군 A vibration generating device for assembly task and a Robot path compensation technique

Also Published As

Publication number Publication date
KR19980061088U (en) 1998-11-05

Similar Documents

Publication Publication Date Title
US6316863B1 (en) Piezo actuator with novel contacting and production method
US6800984B2 (en) Piezo linear drive with a group of piezo actuator stacks as well as method for operating such a drive
DK2264801T3 (en) Electroactive Polymers
US6051911A (en) Vibration wave actuator
US6762536B2 (en) Piezoceramic bending transducer and use thereof
ATE259099T1 (en) PIEZOACTUATORIC DRIVE OR ADJUSTMENT ELEMENT
KR20190049707A (en) Haptic feedback generator
GB2445082A (en) Lens driving device comprising piezoelectric actuator and guiding members
KR960016588A (en) Light Path Control
RU2068191C1 (en) Multilayer piezoelectric deformed bimorphous mirror
KR100292596B1 (en) Laminated piezoelectric transformer and method for manufacturing the same
JP2001518721A (en) Piezoelectric element
KR20030001510A (en) Piezoelectric bending transducer and use thereof
US8441175B2 (en) Piezoactuator having electrical contact
KR200174665Y1 (en) Piezo actuator
HK1022782A1 (en) Stacked-type piezoelectric actuator
GB2381595A (en) Piezoelectric actuated optical latching relay with movable liquid
ATE358894T1 (en) PIEZO ACTOR WITH IMPROVED HEAT DISSIPATION
CA2081093A1 (en) Anisotropic transducer
JP4240472B2 (en) Piezoelectric actuator
WO1995034944A1 (en) Piezoelectric actuator device
DE50113157D1 (en) PIEZO ACTUATOR
JP2006527486A (en) Piezo actuator
US6927529B2 (en) Solid slug longitudinal piezoelectric latching relay
US20060050419A1 (en) Integrated wavefront correction module

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20091126

Year of fee payment: 11

LAPS Lapse due to unpaid annual fee