KR200173581Y1 - Tantalum condenser firing system - Google Patents

Abstract

The present invention relates to a tantalum capacitor firing system, the present invention implements a layout of the tantalum capacitor firing unit in a mirror type. In this case, the tantalum capacitor firing system of the present invention consists of a combination of a primary tantalum capacitor firing unit and a secondary tantalum capacitor firing unit which are arranged symmetrically with respect to an impregnation liquid / recyclable liquid supply unit.

In the case of the present invention, since the tantalum capacitor firing units are symmetrical with each other, when the present invention is implemented, the production line can maximize the space utilization while installing a plurality of tantalum capacitor firing units. In the production line, it is possible to obtain the effect of greatly increasing the amount of tantalum capacitors produced in the final stage without any problems.

Description

Tantalum condenser firing system

The present invention relates to a tantalum capacitor firing system for producing a tantalum capacitor, for example, by firing a tantalum pellet in which a chemical conversion process is completed. More specifically, a plurality of tantalum capacitor firing units are arranged in a mirror type. Through this, the tantalum capacitor firing system minimizes the occupied area of the tantalum capacitor firing unit within a given condition, thereby simultaneously satisfying the 'multiple installation of the tantalum capacitor firing unit' and the 'maximization of tantalum capacitor' production. It is about.

In general, a tantalum capacitor firing step refers to a step of forming a cathode layer, for example, an MnO ₂ layer, on a tantalum oxide film layer of tantalum pellets formed through a chemical conversion step.

At this time, since the negative electrode layer formed on the tantalum oxide film layer has a great influence on the electrical properties of the final tantalum capacitor, the conventional production line pays special attention to the progress of the firing process in the overall tantalum capacitor manufacturing process. .

Such a conventional tantalum capacitor firing process is disclosed in, for example, Korean Patent Publication No. 99-49611, 'Imperate for firing tantalum capacitors, and a method for manufacturing tantalum capacitors having improved loss and equivalent series resistance characteristics using the same,' Korean Utility Model Publication 120949, 'Hot Wind Force Feeder for Tantalum Capacitor Manufacturing Furnace', for example.

Usually, the above-described tantalum capacitor firing process is generally carried out through a step of 'loading-fire-drying-impregnation-firing-unloading'. In a conventional production line, the 'loading-fire-drying-drying-' According to each stage of impregnation-firing-unloading, structures such as ignition tank, drying furnace, impregnation tank, and calcination furnace are arranged, and these structures are used to enable faster tantalum capacitor firing process.

At this time, the 'chemical furnace, drying furnace, impregnation tank, firing furnace', etc. of the conventional tantalum condenser firing unit is generally carried out so that the above-mentioned 'loading-fire-drying-drying-impregnation-firing-unloading' can be performed more smoothly. In general, they are arranged in a group.

In this case, a plurality of tantalum capacitor firing units forming one group are adjacent to each other. Two impregnation storage boxes, in which case each impregnation storage box stores impregnation liquids of different concentrations, and is connected to the impregnation tank, for example, through a pipe, so that impregnation liquids of different concentrations are impregnated into the impregnation tank. To be supplied.

Recently, with the rapid development of electronic / electrical products, the usage of tantalum capacitors has also increased rapidly. Accordingly, securing the production of tantalum capacitors has become a very important problem in the overall tantalum capacitor production conditions.

In a conventional production line, as a way to increase the production of tantalum capacitors, a number of 'tantalum capacitor firing systems' are being installed in the production line.

However, as described above, in the conventional tantalum capacitor firing unit, 'chemical conversion tank, drying furnace, impregnation tank, firing furnace' and the like are arranged in a group, and the 'line occupancy' is very high. There is a limit to increasing the number of systems' installed at random and increasing the production of tantalum capacitors.

For this reason, in the conventional production line, while reducing the need for increased production of tantalum capacitors, there is a situation in which no specific countermeasures have been prepared.

Therefore, the object of the present invention is to improve the layout of the tantalum capacitor firing system, thereby minimizing the occupied area of the overall tantalum capacitor firing system within a given condition, while significantly increasing the yield of the final tantalum capacitor. It is to make it possible.

Another object of the present invention is to ensure the production of tantalum capacitors described above, and to maximize the working efficiency of the worker.

Still other objects of the present invention will become more apparent from the following detailed description and the accompanying drawings.

1 is an exemplary view showing a tantalum capacitor firing system according to the present invention.

2 is a flow chart sequentially showing a tantalum capacitor firing process using a tantalum capacitor firing system according to the present invention.

3 is a block diagram showing the operation of the tantalum capacitor firing system according to the present invention.

In order to achieve the above object, the present invention implements a layout of a tantalum capacitor firing system in a mirror type. In this case, the tantalum capacitor firing system consists of a combination of a primary tantalum capacitor firing unit and a secondary tantalum capacitor firing unit arranged symmetrically with each other.

At this time, the primary tantalum condenser firing unit is a 'first regeneration tank, a first drying furnace, a plurality of first impregnation tanks, a first preliminary firing furnace and a first main firing furnace' arranged in groups in the order of the impregnation pyrolysis process. And so on. In this case, the secondary tantalum capacitor firing unit also has the same configuration as that of the primary tantalum capacitor firing unit, such as a 'second regeneration tank, a second drying furnace, a plurality of second impregnation tanks, a second preliminary firing furnace, and a second bone. And a structure such as a firing furnace '.

Of course, the second regeneration tank, the second drying furnace, the second impregnation tanks, the second preliminary firing furnace, the second main firing furnace, etc. constituting the secondary tantalum capacitor firing unit constitute the above-described primary tantalum capacitor firing unit. It maintains a structure symmetrical with each other such as 'the first regeneration tank, the first drying furnace, the first impregnation tanks, the first preliminary firing furnace, and the first main firing furnace'.

At this time, an impregnation liquid / recyclable liquid supply unit is disposed between the primary tantalum capacitor firing unit and the secondary tantalum capacitor firing unit, and the impregnation liquid / recyclable liquid supply unit is disposed symmetrically with each other. Located in the center of the firing unit.

The impregnating liquid / liquid liquid supplying unit is disposed in a group of impregnating liquid reservoirs arranged in groups in a state of storing impregnating liquids of different concentrations, and is disposed adjacent to the impregnating liquid reservoirs, and supplies In this case, the impregnating liquid / good liquid supplying unit supplies a predetermined amount of impregnating liquid and the recyclable liquid to the above-described primary and second tantalum condenser firing unit. Play a role.

In the case of the present invention, since the tantalum capacitor firing units are symmetrical with each other, when the present invention is implemented, the production line can maximize the space utilization while installing a plurality of tantalum capacitor firing units. In the production line, it is possible to obtain the effect of greatly increasing the amount of tantalum capacitors produced in the end.

Hereinafter, a tantalum capacitor firing system according to the present invention will be described in more detail with reference to the accompanying drawings.

Hereinafter, a tantalum capacitor firing system according to the present invention will be described in more detail with reference to the accompanying drawings.

As shown in FIG. 1, the tantalum capacitor firing system according to the present invention is largely provided in both sides with an impregnation liquid / recyclable liquid supply unit 400 and the impregnation liquid / recyclable liquid supply unit 400 therebetween. Primary Tantalum Condenser Firing Unit 300 and Secondary Tan It consists of a combination of thallium capacitor firing unit 500.

At this time, as shown in the drawing, the primary tantalum capacitor firing unit 300 is a stage 301, the first regeneration tank (1), the first drying furnace arranged in groups on the stage 301 (2), the first impregnation tanks 3 and 4, the first preliminary firing furnace 5 and the first main firing furnace 6 and the like.

The first regeneration tank (1), the first drying furnace (2), the first impregnation tanks (3, 4), the first preliminary firing furnace (5), and the first main firing furnace (6) are subjected to a series of pyrolysis of the impregnation liquid. According to the process order, it is arranged round, for example.

The centers of the first regeneration tank 1, the first drying furnace 2, the first impregnation tanks 3 and 4, the first preliminary firing furnace 5 and the first main firing furnace 6, which are arranged in this manner, are rounded. The support shaft 30 is arranged in the upper part of the support shaft 30, for example, a plurality of hangers (Hangers: 30a) arranged in a radial (Radial) is mounted, such hangers (30a) described above For example, the structure corresponding to the first regeneration tank 1, the first drying furnace 2, the first impregnation tanks 3 and 4, the first preliminary kiln 5 and the first main kiln 6, Have

In this case, the support shaft 30 performs an operation of moving up and down or rotates the hangers 30a by one pitch according to the control of the controller 203 disposed on the side of the stage 301. To perform.

Here, if the support shaft 30 performs the up / down operation with the guide belts (not shown) mounted with the tantalum pellets to the respective hangers 30a, the respective tantalum pellets are the respective hangers. 1st regeneration tank (1), 1st drying furnace (2) corresponding one-to-one with 30a, The first impregnation tanks 3 and 4, the first preliminary kiln 5 and the first main kiln 6 are filled.

In addition, in the state where the support shaft 30 carries the guide belts on which the tantalum pellets are mounted to the hangers 30a, the rotation operation advances by one pitch, the tantalum pellets are rotated according to the rotation of the support shaft 30a. , First ashing tank 1, first drying furnace 2, first impregnation tanks 3, 4, first preliminary kiln 5 and first main kiln 6, in turn Each tantalum pellet can be subjected to a sequence of 'recycling-drying-impregnation-prefiring-main firing'.

Here, the steam box 101 is disposed at the bottom of the stage 301, and the steam box 101 is connected to the first main firing furnace 6 and the pipe (not shown). (6) serves to introduce high temperature water vapor.

On the other hand, the impregnating liquid / recyclable liquid supply unit 400 is a group of impregnating liquid storage tanks arranged in a group in a state in which the impregnating liquid of different concentrations are stored, and storing the recyclable liquid of a certain concentration It consists of a combination of the recyclable liquid reservoir 24 disposed in the vicinity of the impregnation liquid reservoirs 20 in a state.

At this time, the impregnation liquid consisting of, for example, 20% concentration of manganese nitrate solution is stored in each of the impregnation liquid storage tanks 20, and the impregnation liquid storage tank 22, for example, 40% concentration of manganese nitrate The impregnation liquid made of the liquid is stored, and the impregnation liquid made of, for example, 60% concentration of manganese nitrate liquid is stored in the impregnation liquid storage tank 23.

The impregnation liquid reservoirs 20 have a structure in communication with a part of the above-described first impregnation tanks 3, 4, for example, the first impregnation tank 3, through a pipe, so that the impregnation reservoirs 20 It serves to ensure that the different concentrations of the impregnation liquid stored can be quickly supplied to the first impregnation tank (3). The structure of the pipe connecting the respective impregnation reservoirs 20 and the first impregnation tank 3 is shown in detail in FIG.

At this time, the above-described recyclable liquid storage tank 24 is also connected to the structure of the above-described primary tantalum capacitor firing unit 300 through a pipe, for example, the recyclable liquid storage tank is connected to the first reconstituted liquid tank 1 through piping. By forming a structure in communication with), and serves to ensure that the recyclable liquid stored in its storage space can be quickly supplied to the first reconstruction tank (1). The structure of the pipe connecting the recyclable liquid storage tank 24 and the first regenerating tank 1 is also shown in detail in FIG.

Here, the industrial water storage tank 40 is further disposed adjacent to the impregnation liquid storage tanks 20 and the recyclable liquid storage tank 24, and the industrial water storage tank 40 has respective impregnation liquid storage tanks 20 through pipes. ), And the industrial water stored in its storage space can be quickly supplied to each of the impregnating liquid storage tanks 20 and the recyclable liquid storage tank 24. It plays a role. The structure of the pipe connecting the industrial water storage tank 40, the impregnation liquid storage tanks 20, and the recyclable liquid storage tank 24 is also shown in detail in FIG.

On the other hand, the secondary tantalum capacitor firing unit 500 described above has a structure similar to that of the primary tantalum capacitor firing unit 300 described above, and is arranged in groups on the stage 501 and on the stage 501. A combination of the first regeneration tank 11, the second drying furnace 12, the second impregnation tanks 13 and 14, the second preliminary kiln 15 and the second main kiln 16. It is broken.

In this case, the second regeneration tank 11, the second drying furnace 12, the second impregnation tanks 13 and 14, the second preliminary firing furnace 15, and the second tantalum capacitor firing unit 500 are formed. The main firing furnace 16, etc., includes the first regeneration tank 1, the first drying furnace 2, the first impregnation tanks 3 and 4, which constitute the above-described primary tantalum capacitor firing unit 300; The first preliminary kiln 5, the first main kiln 6 'and the like are maintained in a symmetrical structure.

The symmetrical structures of the primary tantalum capacitor firing unit 300 and the secondary tantalum capacitor firing unit 500 constitute the gist of the present invention, and, of course, the conventional tantalum capacitor firing system has not achieved such a structure at all.

As described above, in the conventional production line, as a way to increase the production of tantalum capacitors, a method of installing a plurality of tantalum capacitor firing units in the line has been promoted, but each 'tantalum capacitor firing unit' is basically As it consists of 'Chemical tank, drying furnace, impregnation tank, and firing furnace', it has a very high line occupancy. Therefore, it has been found that there is a certain limit to increase the number of installation of this tantalum capacitor firing unit. In the end, the conventional production line has not been prepared to deal with the increase in the production of tantalum capacitors.

In order to solve this problem, in the present invention, as described above, by implementing the layout of the overall tantalum capacitor firing unit in a mirror type, the primary tantalum capacitor firing unit 300 and the secondary tantalum capacitor firing unit 500 to each other Symmetrical Lock it.

In this case, in the production line, since the occupied area of the primary tantalum capacitor firing unit 300 and the secondary tantalum capacitor firing unit 500 can be minimized within a given condition, a plurality of tantalum capacitor firing units are installed, It is possible to maximize the utilization, and, as a result, in the production line, it is possible to obtain an effect of greatly increasing the amount of the tantalum capacitor to be finally produced.

At this time, as shown in the figure, the second reconstruction tank 11, the second drying furnace 12, the second impregnation tanks 13 and 14, the second preliminary firing furnace 15 and the second main firing furnace 16 ) And the like are arranged roundly according to the sequence of the impregnation pyrolysis process.

The centers of the second reconstruction tank 11, the second drying furnace 12, the second impregnation tanks 13 and 14, the second preliminary firing furnace 15, and the second main firing furnace 16 arranged in this manner are rounded. In the same manner as in the case of the primary tantalum capacitor firing unit 300 described above, a support shaft 31 is disposed, and a plurality of hangers 31a arranged radially are mounted on the support shaft 31, for example. The hangers 31a may include the second regeneration tank 11, the second drying furnace 12, the second impregnation tanks 13 and 14, the second preliminary firing furnace 15, and the second main firing furnace. It has a one-to-one correspondence with (16).

At this time, the support shaft 31 performs an operation of moving up and down or rotates the hangers 31a by one pitch according to the control of the controller 204 disposed on the side of the stage 501. To perform.

Here, if the support shaft 31 has a row of guide belts equipped with tantalum pellets When the up / down operation is performed in the girdle 31a, each of the tantalum pellets has a second ash tank 11, a second drying furnace 12, and a second one-to-one correspondence with the hangers 31a. The impregnation tanks 13 and 14, the second preliminary kiln 15 and the second main kiln 16 are filled.

In addition, when the support shaft 31 has the guide belts with the tantalum pellets mounted on the respective hangers 31a, when the rotation operation is performed by one pitch, the respective tantalum pellets are rotated according to the rotation of the support shaft 31a. , The first regeneration tank 11, the second drying furnace 12, the second impregnation tanks 13 and 14, the second preliminary firing furnace 15, and the second main firing furnace 16 in turn. Each tantalum pellet can be subjected to a sequence of 'recycling-drying-impregnation-prefiring-main firing'.

Here, the steam box 102 is disposed at the bottom of the stage 501, and the steam box 102 is connected to the second main firing furnace 16 and the pipe (not shown). (16) serves to introduce high temperature water vapor.

On the other hand, the impregnation liquid reservoirs 20 described above have a structure in communication with the first impregnation tank 3 through a pipe, as well as a part of the second impregnation tanks, for example, a second impregnation tank 13 through other pipes. By forming a structure in communication with each other), the impregnation liquid of different concentrations stored in its storage space can be quickly supplied not only to the first impregnation tank 3 but also to the second impregnation tank 13. The structure of the pipe connecting the respective impregnation reservoirs 20 and the second impregnation tank 13 is shown in detail in FIG.

At this time, the above-described recyclable liquid storage tank 24 is also connected to the first recyclable tank 1 through piping, and also has a structure connected to the second recyclable tank 11 through other piping. In this way, the recyclable liquid stored in its storage space can be quickly supplied not only to the first reconstruction tank 1 but also to the second reconstruction tank 11. The structure of the pipe connecting the recyclable liquid storage tank 24 and the second regenerating tank 11 is also shown in detail in FIG.

Here, as shown in the figure, for example, a pair of unloading guides between the above-described impregnation liquid reservoir 20, the primary and secondary tantalum capacitor firing unit (300, 500) facing the recyclable liquid storage tank (24) 201 and 202 are further disposed, and a pair of robots 104 and 103 are further disposed adjacent to the unloading guides 201 and 202.

The pair of robots 104 and 103 take out the tantalum pellets from the hangers 30a and 31a when the tantalum pellets having completed the impregnation pyrolysis process are unloaded from the primary and secondary tantalum firing units 300 and 500. The pellets are loaded into the unloading guides 201 and 202.

At this time, when the tantalum pellets are transported by the robots 104 and 103, the unloading guides 201 and 202 guide the tantalum pellets, for example, to the center of the system. In this case, the operator is located in the center of the system, and can easily take out the finished tantalum pellets, and as a result, the worker's work efficiency is greatly improved.

Hereinafter, a tantalum capacitor firing process using the tantalum capacitor firing system according to the present invention having the above-described configuration will be described in detail.

For convenience, the description below assumes that only one guide belt is loaded in the primary tantalum capacitor firing unit.

As shown in FIG. 2, first, in a production line, in a state in which a pretreatment process, for example, a chemical conversion process is completed, primary and secondary tantalum capacitor firing units 300 and 500 disposed in a symmetrical manner with tantalum pellets mounted and supplied to a guide belt. ), The process of loading is carried out (step S1).

In this case, as shown in FIG. 3, workers located in the work area A and the work area B attach a guide belt equipped with tantalum pellets to each hanger 30a, 31a of the primary and secondary tantalum condenser firing units 300,500. Hang. Of course, this work may be performed by one worker.

In this case, the production line inputs the control information related to the operation of the entire system to the controllers 203 and 204 described above in advance, thereby driving the 'support shaft', 'flow on / off of the impregnation liquid', and 'liquid liquid liquid. 'Flow on / off', etc. can be automatically proceed without the intervention of the operator.

Subsequently, the production line proceeds with the first regeneration of the tantalum pellet loaded in each unit (step S2). In this case, the support shafts 30 and 31 of the primary and secondary tantalum capacitor firing units 300 and 500 rotate in a predetermined direction, thereby turning the hangers 30a and 31a positioned in the loading section into the first and second reproducible units 1. , 11).

Subsequently, the support shafts 30 and 31 are quickly down, so that the tantalum pellets hung on the hangers 30a and 31a can be quickly contained in the first and second reproductive tanks 1 and 11.

At this time, as shown in the figure, the support of the primary tantalum capacitor firing unit 300 The support shaft 30 rotates in the clockwise direction I, for example, and the support shaft 31 of the secondary tantalum capacitor firing unit 500 rotates in the counterclockwise direction II, for example.

Here, each of the controllers 203 and 204 controls the pump (not shown) associated with the recyclable liquid storage tank 24 before the above-described down operation of the support shafts 30 and 31 is performed. The recyclable liquid stored in 24 is quickly supplied to the first and second regenerating tanks 1 and 11. In this case, the recyclable liquid stored in the recyclable liquid storage tank 24 quickly flows through the supply pipes 56 and 62, and then fills the first and second regenerating tanks 1 and 11 quickly. At this time, the recyclable liquid storage tank 24 has a structure in communication with the industrial water storage tank through the supply pipe 74, it can be continuously supplied with a certain amount of industrial water.

In the state in which the supply of the recyclable liquid is completed, when the down operation of the support shafts 30 and 31 is performed, the tantalum pellets hung on the hangers 30a and 31a are immediately removed when the support shafts 30 and 31 are down. It can be immersed in the regeneration liquid of the 1st and 2nd regeneration tanks (1, 11), and eventually, a tantalum pellet undergoes rapid regeneration process by the action of this regeneration liquid.

Thereafter, when the primary reprocessing process is completed, the controllers 203 and 204 raise the support shaft to take out the tantalum pellets from the first and second regenerating tanks 1 and 11.

At this time, when a certain time has elapsed and a necessity for discharging the recyclable liquid from the first and second regenerating tanks 1 and 11 is raised, the controllers 203 and 204 are connected to the valve associated with the recyclable liquid storage tank 24. By turning on (not shown), the recyclable liquid which filled the 1st and 2nd regeneration tanks 1 and 11 is discharged | emitted quickly. In this case, the recyclable liquid filling the first and second recyclable tanks 1 and 11 is pushed back into the recyclable liquid storage tank 24 via the discharge pipes 57 and 63. All.

On the other hand, if all of the primary reproducibility of the tantalum pellet through the above-described process is completed, the production line proceeds to the first step of drying the tantalum pellet (step S3).

In this case, the controllers 203 and 204 control the support shafts 30 and 31 of the primary and secondary tantalum capacitor firing units 300 and 500, thereby rotating the support shafts 30 and 31 in the clockwise and counterclockwise directions, respectively. In this way, the hanger located in the first and second regenerating tanks 1 and 11 is positioned above the first and second drying furnaces 2 and 12.

Next, by lowering the support shafts 30 and 31, the tantalum pellets hung on the hangers 30a and 31a can be quickly mounted on the first and second drying furnaces 2 and 12.

In this way, in the state where the tantalum pellet is completed to be mounted in the first and second drying furnaces 2 and 12, the controllers 203 and 204 are preliminarily heated at a predetermined temperature, for example, about 40 ° C. By lowering the temperature of 2, 12 and gradually lowering the temperature inside the first and second drying furnaces 2 and 12, the tantalum pellets mounted in the first and second drying furnaces 2 and 12 are quick. Allow the drying process to proceed.

Then, when the primary drying process is completed, the controllers 203 and 204 raise the support shafts 30 and 31 to take out tantalum pellets from the first and second drying furnaces 2 and 12.

Subsequently, when the primary drying of the tantalum pellets is completed through the above-described process, the production line proceeds with the primary impregnation of the tantalum pellets (step S4).

In this case, the controllers 203 and 204 control the support shafts 30 and 31 of the primary and secondary tantalum capacitor firing units 300 and 500, thereby turning the support shafts 30 and 31 clockwise. And by rotating counterclockwise, respectively, after placing the hangers 30a and 31a which were located in the 1st and 2nd drying furnaces 2 and 12 in the upper part of the 1st and 2nd impregnation tanks 3 and 13, By lowering the support shafts 30 and 31, the tantalum pellets hung on the hangers 30a and 31a can be quickly contained in the first and second impregnation tanks 3 and 13.

Here, the controllers 203 and 204 control the pump associated with the impregnation liquid storage tank 21 before the down operation of the support shafts 30 and 31 described above, and impregnation stored in the impregnation liquid storage tank 21. The liquid is quickly supplied to the first and second impregnation tanks 3 and 13. In this case, the impregnation liquid stored in the impregnation liquid storage tank 21 quickly flows through the supply pipes 51 and 58, and then quickly fills the first and second impregnation tanks 3 and 13.

At this time, the impregnation liquid storage tank 21 has a structure in communication with the industrial water storage tank 40 through the supply pipe 71, it can be continuously supplied with a certain amount of industrial water.

When the impregnation liquid supply is completed, when the down operation of the support shafts 30 and 31 is performed, the tantalum pellets hung on the hangers 30a and 31a are immediately removed when the support shafts 30 and 31 are down. It can be immersed in the impregnation liquid of the 1st and 2nd impregnation tanks 3 and 13, and eventually, a tantalum pellet undergoes a rapid impregnation process by the action of this impregnation liquid.

At this time, as described above, since the impregnation liquid consisting of, for example, 20% concentration of manganese nitrate liquid is stored in the impregnation storage tank 21, the tantalum pellet is first subjected to an impregnation process by a dilute impregnation liquid. .

In the state of completing the impregnation process by the dilute impregnation liquid, the controllers 203 and 204 turn on the valve associated with the impregnation liquid storage tank 21 to thereby turn on the first and second liquids. The 20% concentration of the impregnation liquid filling the impregnation tanks 3 and 13 is quickly discharged. In this case, the 20% concentration of the impregnation liquid is pushed back into the impregnation liquid storage tank 21 via the discharge pipes 55 and 59.

As described above, when the '20% impregnation discharge process' proceeds, the controllers 203 and 204 continuously maintain the down states of the support shafts 30 and 31, and the tantalum pellets caught in the hangers 30a and 31a. To remain in the first and second impregnation tanks (3, 13).

In this state, the controllers 203 and 204 control the pump associated with the impregnation liquid reservoir 22 to transfer the impregnation liquid stored in the impregnation liquid storage tank 22 to the first and second impregnation tanks 3 and 13. Supply quickly. In this case, the impregnation liquid stored in the impregnation liquid storage tanks 3 and 13 rapidly flows through the supply pipes 53 and 60 and the supply pipes 51 and 58, and then quickly fills the first and second impregnation tanks. Here, the impregnation liquid storage tank 22 has a structure in communication with the industrial water storage tank 40 through the supply pipe 72, it can be continuously supplied with a certain amount of industrial water.

At this time, as described above, since the impregnation liquid consisting of, for example, 40% manganese nitrate solution is stored in the impregnation storage tank 22, the tantalum pellet is secondly impregnated with a slightly thick impregnation liquid. Receive.

In the state where the impregnation process with the slightly thick concentration of the impregnation liquid is completed, the controllers 203 and 204 turn on the valve associated with the impregnation liquid storage tank 22, so that the first and second impregnation tanks 3 and 13 are turned on. Drain the 40% concentration of the impregnation solution that was filled quickly. In this case, the impregnation liquid with a concentration of 40% reflows the supply pipes 51 and 58 and the supply pipes 53 and 60 to lower the impregnation liquid. It is pushed back into the major (22).

Even when the '40% impregnation discharge process' proceeds, the controllers 203 and 204 continuously maintain the down states of the support shafts 30 and 31, so that the tantalum pellets hanged on the hangers 30a and 31a. To remain in the first and second impregnation tanks (3, 13).

In this state, the controllers 203 and 204 control the pump associated with the impregnation liquid reservoir 23 to transfer the impregnation liquid stored in the impregnation liquid storage tank 23 into the first and second impregnation tanks 3 and 13. Supply quickly. In this case, the impregnation liquid stored in the impregnation liquid storage tank 23 quickly flows through the supply pipes 54 and 61 and the supply pipes 51 and 58, and then quickly fills the first and second impregnation tanks 3 and 13. . Here, the impregnation liquid storage tank 23 has a structure in communication with the industrial water storage tank 40 through the supply pipe 73, it can be continuously supplied with a certain amount of industrial water.

At this time, as described above, since the impregnation liquid consisting of, for example, 60% concentration of manganese nitrate liquid is stored in the impregnation liquid storage tank 23, the tantalum pellets are sequentially impregnated with a thick impregnation liquid. Receive.

In the state of completing the impregnation process with such a thick concentration of impregnation liquid, the controllers 203 and 204 turn on the valve associated with the impregnation liquid storage tank 23 to thereby open the first and second impregnation tanks 3 and 13. Quickly drain the 60% impregnation solution that was filled. In this case, the 60% concentration of the impregnation liquid is flowed back into the impregnation liquid reservoir 23 by reflowing the supply pipes 51 and 58 and the supply pipes 54 and 61.

Then, when the above-described first impregnation process is completed, the controllers 203 and 204 The support shafts 30 and 31 are raised to carry out the tantalum pellets from the first and second impregnation tanks 3 and 13.

On the other hand, when the first impregnation of the tantalum pellet is completed through the above-described process, the production line proceeds to the second impregnation of tantalum pellet (step S5).

In this case, the controllers 203 and 204 control the support shafts 30 and 31 of the primary and secondary tantalum capacitor firing units 300 and 500, thereby rotating the support shafts 30 and 31 in the above-described directions, The hangers 30a and 31a which were located in the first and second impregnation tanks 3 and 13 are positioned above the first and second impregnation tanks 4 and 14 adjacent thereto.

Then, the controllers 203 and 204 lower the support shafts 30 and 31 so that the tantalum pellets hung on the hangers 30a and 31a can be quickly contained in the first and second impregnation tanks 4 and 14. .

Here, the controllers 203 and 204 control the pump associated with the impregnation reservoirs 25 and 26 before the down operation of the support shafts 30 and 31 described above, so that the impregnation reservoirs 25, The impregnation liquid stored in 26) is rapidly supplied to the first and second impregnation tanks 4 and 14. In this case, the impregnation liquid stored in the impregnation liquid reservoirs 25 and 26 flows rapidly through the supply pipes 81 and 64, and then quickly fills the first and second impregnation tanks 4 and 14. At this time, the impregnation liquid reservoirs 25 and 26 form a structure in communication with the industrial water storage tank 40 through the supply pipes 75 and 76, respectively, so that a certain amount of industrial water can be continuously supplied.

When the impregnation liquid supply is completed, when the down operation of the support shafts 30 and 31 is performed, the tantalum pellets hanging on the hangers 30a and 31a are supported by the support shafts 30 and 31 down. Can be immediately immersed in the impregnation liquid of the first and second impregnation tanks 4 and 14, and finally, the tantalum pellet is subjected to a rapid impregnation process by the action of this impregnation liquid.

At this time, since the impregnation liquid consisting of, for example, 70% concentration of manganese nitrate solution is stored in the impregnation reservoirs 25 and 26, the tantalum pellet is immediately impregnated with a very high concentration following the impregnation process of the third process. The solution is impregnated with a solution.

Then, when the secondary impregnation process is completed, the controllers 203 and 204 raise the support shafts 30 and 31 to take out the tantalum pellets from the first and second impregnation tanks 4 and 14.

At this time, when a certain time has elapsed and a necessity for discharging the impregnation liquid from the first and second impregnation tanks 4 and 14 is raised, the controllers 203 and 204 are connected to the impregnation liquid reservoirs 25 and 26. By turning on the valve, the impregnation liquid filling the first and second impregnation tanks 4 and 14 is quickly discharged. In this case, the impregnation liquid filling the first and second impregnation tanks 4 and 14 is pushed back into the impregnation liquid reservoirs 25 and 26 via the discharge pipes 82 and 65.

On the other hand, when the first and second impregnation process of the tantalum pellet is completed through the above-described process, the production line proceeds to pre-fire the tantalum pellet (step S6).

In this case, the controllers 203 and 204 control the support shafts 30 and 31 of the primary and secondary tantalum capacitor firing units 300 and 500, so that the support shafts 30 and 31 are clockwise and counterclockwise. By rotating, respectively, the hangers 30a and 31a which were located in the 1st and 2nd impregnation tanks 4 and 14 are located in the upper part of the 1st and 2nd preliminary kilns 5 and 15. As shown in FIG.

Subsequently, the controllers 203 and 204 lower the support shafts 30 and 31 so that the tantalum pellets hanging on the hangers 30a and 31a can be quickly transferred to the first and second preliminary kilns 5 and 15. To be mounted.

In this way, in the state where the tantalum pellet is completed to be mounted in the first and second preliminary kilns 5 and 15, the controllers 203 and 204, for example, have a value of about 150 deg. By raising the internal temperature of the tantalum pellets mounted on the first and second preliminary firing furnaces 5 and 15, a rapid preliminary firing process can be performed.

Since this preliminary calcining process serves as a buffer, the tantalum pellets which have been preliminarily calcined can avoid damage due to thermal shock even if the main calcining proceeds in a high temperature environment.

Subsequently, when the preliminary firing process is completed, the controllers 203 and 204 raise the support shafts 30 and 31 to take out tantalum pellets from the first and second preliminary firing furnaces 5 and 15.

Subsequently, when the preliminary firing process of the tantalum pellets is completed through the above-described process, the production line proceeds to main firing of the tantalum pellets (step S7).

In this case, the controllers 203 and 204 control the support shafts 30 and 31 of the primary and secondary tantalum capacitor firing units 300 and 500, so that the support shafts 30 and 31 are clockwise and counterclockwise. By rotating, respectively, the hangers 30a and 31a which were located in the 1st and 2nd preliminary kilns 5 and 15 are located in the upper part of the 1st and 2nd main kilns 6 and 16. As shown in FIG.

Subsequently, the controllers 203 and 204 lower the support shafts 30 and 31 so that the tantalum pellets hung on the hangers 30a and 31a can be quickly mounted in the first and second main kilns.

Thus, the state in which tantalum pellet was mounted in the 1st and 2nd main kilns 6 and 16 was completed. The controllers 203 and 204 are mounted on the first and second main firing furnaces 6 and 16 by raising the internal temperature of the first and second main firing furnaces 6 and 16 to, for example, a value of about 250 ° C. Tantalum pellets are subjected to rapid firing.

At this time, the steam boxes 101 and 102 serve to introduce high temperature water vapor into the first and second main kilns 6 and 16 through the pipes 108 and 105.

When all of the main firing processes are completed, the impregnation liquid immersed in the tantalum pellet is rapidly pyrolyzed to form, for example, a manganese dioxide layer on the surface of the tantalum pellet.

Thereafter, the controllers 203 and 204 raise the support shafts 30 and 31 to carry out the tantalum pellets from the first and second main kilns 6 and 16.

On the other hand, when the main firing process of the tantalum pellet is completed through the above-described process, the production line proceeds to the second regeneration of the tantalum pellet (step S8).

In this case, the support shafts 30 and 31 of the primary and secondary tantalum capacitor firing units 300 and 500 rotate in the clockwise and counterclockwise directions, respectively, so that they are located in the first and second main firing furnaces 6 and 16. The hangers 30a and 31a are again placed on the upper portions of the first and second reproductive tanks 1 and 11.

Subsequently, the controllers 203 and 204 pull down the support shafts 30 and 31 so that the tantalum pellets hung on the hangers 30a and 31a can be quickly contained in the first and second reproductive tanks 1 and 11. Make sure

At this time, the recyclable liquid storage tanks 1 and 11 are in a state in which the recyclable liquid that has been supplied during the above-described primary regeneration process remains.

As described above, when down operation of the support shafts 30 and 31 is performed while the supply of the recyclable liquid is maintained, the tantalum pellets stuck to the hangers 30a and 31a are supported by the support shafts 30 and 31. As soon as it is down, it can be immersed once again in the regeneration liquid of the first and second regeneration tanks (1, 11), and finally, the tantalum pellet undergoes a rapid secondary regeneration process by the action of the regeneration liquid. .

Then, when the secondary reprocessing process is completed, the controllers 203 and 204 raise the support shafts 30 and 31 to take out the tantalum pellets from the first and second regenerating tanks 1 and 11.

Subsequently, when all of the secondary recyclability of the tantalum pellet is completed through the above-described process, the production line proceeds with the process of secondary drying the tantalum pellet (step S9).

In this case, the controllers 203 and 204 control the support shafts 30 and 31 of the primary and secondary tantalum capacitor firing units 300 and 500, so that the support shafts 30 and 31 are clockwise and counterclockwise. By rotating, respectively, the hangers 30a and 31a which were located in the 1st and 2nd regeneration tanks 1 and 11 are again located in the upper part of the 1st and 2nd drying furnaces 2 and 12. FIG.

Subsequently, the controllers 203 and 204 lower the support shafts 30 and 31 so that the tantalum pellets hung on the hangers 30a and 31a can be quickly mounted in the first and second drying furnaces.

In this way, in the state where the tantalum pellets have been mounted in the first and second drying furnaces 2 and 12, the controllers 203 and 204 are heated in a predetermined temperature, for example, about 40 ° C. By lowering the temperature of, 12) and gradually lowering the temperature inside the first and second drying furnaces 2 and 12, the tantalum pellets mounted in the first and second drying furnaces 2 and 12 are quick. Let the drying process go through again.

Thereafter, when the secondary drying process is completed, the controllers 203 and 204 raise the support shafts 30 and 31 to take out the tantalum pellets from the first and second drying furnaces 2 and 12.

Subsequently, in the production line, a process of unloading tantalum pellets from the primary and secondary tantalum capacitor firing units 300 and 500 is performed (step S10).

In this case, the controllers 203 and 204 control the respective support shafts 30 and 31 to rotate the support shafts 30 and 31 in the clockwise and counterclockwise directions, respectively. The hangers 30a and 31a which were located at (2, 12) are again placed on the upper parts of the first and second impregnation tanks 3 and 13.

At this time, the pair of robots 104 and 103 arranged in the work area C take out the tantalum pellets from the first and second impregnation tanks 3 and 13 which have completed the impregnation solution pyrolysis process, and then free the tantalum pellets. It is loaded on the loading guides 201 and 202.

The unloading guide 201, 202 then guides the tantalum pellets, which have been carried by the robots 104, 103, to the center of the system, for example.

In this case, the operator located in the work area C quickly completes the impregnation liquid pyrolysis process of the tantalum pellets by quickly discharging the tantalum pellets carried by the unloading guides 201 and 202 from the center of the system.

As described above, in the present invention, a plurality of tantalum capacitor firing units are disposed in a mirror type, thereby minimizing the occupied area of the tantalum capacitor firing unit within a given condition, thereby providing a plurality of tantalum capacitor firing units. And `` maximization of tantalum capacitor output ''.

The present invention is not limited to the above-described tantalum capacitor firing facility, and has a general useful effect in various kinds of semiconductor manufacturing facilities performing similar operations.

In addition, although specific embodiments of the present invention have been described and illustrated, it is obvious that the present invention may be variously modified and implemented by those skilled in the art.

Such modified embodiments should not be understood individually from the technical spirit or point of view of the present invention and such modified embodiments should fall within the scope of the appended claims of the present invention.

As described above in detail, in the tantalum capacitor firing system according to the present invention, the layout of the tantalum capacitor firing unit is implemented in a mirror type. In this case, the tantalum capacitor firing system of the present invention consists of a combination of a primary tantalum capacitor firing unit and a secondary tantalum capacitor firing unit which are arranged symmetrically with respect to an impregnation liquid / recyclable liquid supply unit.

In the case of the present invention, since the tantalum capacitor firing units are symmetrical with each other, when the present invention is implemented, the production line can maximize the space utilization while installing a plurality of tantalum capacitor firing units. In the production line, it is possible to obtain the effect of greatly increasing the amount of tantalum capacitors produced in the end.

Claims (2)

A primary tantalum condenser firing unit comprising a first regeneration tank, a first drying furnace, a plurality of first impregnation tanks, a first preliminary kiln, and a first main kiln, arranged in groups according to the impregnation pyrolysis process sequence; It consists of impregnating liquid reservoirs arranged in groups in a state of storing different concentrations of impregnating liquids and a recyclable liquid storage tank arranged in the vicinity of the impregnating liquid reservoirs in a state of storing a recyclable liquid of a predetermined concentration, An impregnation liquid / recyclable liquid supply unit for supplying the impregnation liquid and the recyclable liquid to the first impregnation tanks and the regeneration tank of the primary tantalum capacitor firing unit; A second regeneration tank and a second drying furnace, arranged symmetrically with the primary tantalum condenser firing unit and arranged in groups according to the impregnation pyrolysis process sequence with the impregnation / recycling liquid supply unit as the center; The impregnating liquid and the recyclable liquid, which are composed of a plurality of second impregnation tanks, a second preliminary firing furnace and a second main firing furnace, and are stored in the impregnation liquid / good liquid supply unit, Tantalum condenser firing system comprising a secondary tantalum capacitor firing unit supplied to the tone. The tantalum pellet of claim 1, wherein the tantalum pellet that has completed the impregnation solution pyrolysis process is unloaded between the primary tantalum capacitor firing unit and the secondary tantalum capacitor firing unit. Tantalum condenser firing system, characterized in that it further comprises a pair of unloading guide for.