KR200168788Y1 - Ink jetting apparatus - Google Patents
Ink jetting apparatus Download PDFInfo
- Publication number
- KR200168788Y1 KR200168788Y1 KR2019970013848U KR19970013848U KR200168788Y1 KR 200168788 Y1 KR200168788 Y1 KR 200168788Y1 KR 2019970013848 U KR2019970013848 U KR 2019970013848U KR 19970013848 U KR19970013848 U KR 19970013848U KR 200168788 Y1 KR200168788 Y1 KR 200168788Y1
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- Prior art keywords
- ink
- diaphragm
- electrodes
- electrode
- movable electrode
- Prior art date
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/07—Ink jet characterised by jet control
- B41J2/11—Ink jet characterised by jet control for ink spray
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/02—Ink jet characterised by the jet generation process generating a continuous ink jet
- B41J2/025—Ink jet characterised by the jet generation process generating a continuous ink jet by vibration
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/315—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of heat to a heat sensitive printing or impression-transfer material
- B41J2/32—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of heat to a heat sensitive printing or impression-transfer material using thermal heads
- B41J2/35—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of heat to a heat sensitive printing or impression-transfer material using thermal heads providing current or voltage to the thermal head
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
잉크젯 프린트 헤드에 적용되는 것으로서, 정전기력을 이용한 잉크분사장치가 개시되어 있다. 개시된 잉크분사장치는, 잉크챔버(38)로부터 노즐(37)을 통해 잉크를 분사시키기 위하여 상기 잉크챔버 내의 잉크를 가압하도록 진동되는 진동판(32)과, 상기 진동판에 부착된 가동전극(33) 및 상기 가동전극과 간격을 두고 고정배치되는 고정전극(34)을 구비한다. 상기 양 전극에 소정의 전위차를 갖는 전압을 인가하면, 상기 양 전극 사이의 전위차로 인해 작용하게 되는 정전기력으로 인하여 상기 가동전극과 함께 진동판이 진동함으로써 잉크가 토출되며, 이러한 방식의 잉크분사장치는 토출되는 잉크의 양과 속도제어가 가능하여 고해상도와 고속인쇄에 적합하다.Applied to an inkjet print head, an ink injection device using an electrostatic force is disclosed. The disclosed ink jetting device includes a vibrating plate 32 which vibrates to press ink in the ink chamber to eject ink from the ink chamber 38 through the nozzle 37, a movable electrode 33 attached to the vibrating plate, and A fixed electrode 34 is fixedly spaced apart from the movable electrode. When a voltage having a predetermined potential difference is applied to the two electrodes, ink is ejected by vibrating the diaphragm together with the movable electrode due to the electrostatic force acting due to the potential difference between the two electrodes. It is possible to control the amount and speed of ink, which is suitable for high resolution and high speed printing.
Description
본 고안은 잉크젯 프린트 헤드에 적용되는 잉크분사장치에 관한 것으로서, 특히 정전기력을 이용하여 잉크를 분사하는 잉크분사장치에 관한 것이다.The present invention relates to an ink ejection apparatus applied to an inkjet print head, and more particularly, to an ink ejection apparatus for ejecting ink using an electrostatic force.
종래의 DOD(drop-on-demand) 잉크젯 프린트 헤드에 적용되는 잉크분사장치는 크게 표면발열체를 이용한 가열방식의 잉크분사장치와 압전체를 이용한 압전방식의 잉크분사장치로 대별된다.Ink jetting devices applied to conventional drop-on-demand (DOD) inkjet printheads are roughly classified into heating ink jetting devices using surface heating elements and piezoelectric ink jetting devices using piezoelectric elements.
이들 잉크분사장치중, 표면발열체를 이용한 가열방식의 잉크분사장치는, 도 1에 도시된 바와 같이, 기판(1) 위에 하부절연층(2)과, 발열체(3)와, 전극(4,5)과, 상부절연층(6) 및 보호층(7)을 차례로 형성하고, 상기 노즐판(9)과 보호층(7) 사이에 유로용 벽(8)을 설치하여 잉크챔버(10)를 형성하여 이루어 진다.In these ink ejection apparatuses, the ink ejection value of the heating method using the surface heating element is, as shown in Fig. 1, the lower insulating layer 2, the heating element 3, and the electrodes 4, 5 on the substrate 1; ), The upper insulating layer 6 and the protective layer 7 are formed in this order, and an ink chamber 10 is formed by providing a flow path wall 8 between the nozzle plate 9 and the protective layer 7. Is done.
여기서 상기 잉크챔버(10)는 도시되지 않은 잉크탱크와 연결되어 있고, 상기 양 전극(4,5)은 구동신호 발생기(12)와 연결되며, 상기 구동신호 발생기(12)로부터 전극(4,5)을 통해 발열체(3)에 구동신호를 인가하면 발열체(3)가 가열되고 잉크챔버(10) 내의 잉크(13)가 비등하게 된다.Here, the ink chamber 10 is connected to an ink tank (not shown), and the positive electrodes 4 and 5 are connected to the driving signal generator 12, and the electrodes 4 and 5 from the driving signal generator 12. When a driving signal is applied to the heating element 3 through the heating element 3, the heating element 3 is heated and the ink 13 in the ink chamber 10 is boiled.
이때 잉크챔버(11) 내에 기포(14)가 발생되며, 발생된 기포(14)가 잉크챔버(10) 내의 잉크(13)를 노즐판(9)의 노즐(11) 밖으로 밀어냄으로써 토출잉크(15)를 만든다. 상기 토출잉크(15)는 구동신호, 즉 프린트 신호에 따라 분사된다.At this time, bubbles 14 are generated in the ink chamber 11, and the generated bubbles 14 push the ink 13 in the ink chamber 10 out of the nozzle 11 of the nozzle plate 9 to discharge ink 15. ) The discharge ink 15 is ejected in accordance with a drive signal, that is, a print signal.
한편, 압전체를 이용한 압전방식의 잉크분사장치는, 도 2에 도시된 바와 같이, 기판(16)과, 다이어프램(17)과, 압전소자(18)와, 스페이서(19) 및 노즐판(20)으로 구성된다.On the other hand, the piezoelectric ink jetting device using the piezoelectric body, as shown in Fig. 2, the substrate 16, the diaphragm 17, the piezoelectric element 18, the spacer 19 and the nozzle plate 20 It consists of.
이와 같이 구성된 압전방식의 잉크분사장치의 구동신호 발생기(23)로부터 상기 압전소자(18)에 구동신호를 인가하면 압전소자(18)는 기계적으로 신축되며, 이러한 압전소자(18)의 신축작용으로 잉크챔버(21)내의 잉크(24)가 노즐(22) 밖으로 밀려남으로써 토출잉크(25)가 만들어진다.When the driving signal is applied to the piezoelectric element 18 from the drive signal generator 23 of the piezoelectric ink jetting apparatus configured as described above, the piezoelectric element 18 is stretched mechanically, and the piezoelectric element 18 is stretched. The ink 24 in the ink chamber 21 is pushed out of the nozzle 22 to produce the discharge ink 25.
그러나, 상기와 같은 종래의 잉크분사장치중, 가열방식의 잉크분사장치는 충분한 기포를 생성하는데 시간이 다소 소요되어 잉크의 토출속도, 즉 인쇄속도 향상에 한계가 있으며, 또한 발열체의 특성이 주변온도의 영향으로 잘 변화되어 안정된 성능을 기대하기 어렵다고 하는 문제점이 있었다.However, in the above-described conventional ink spraying device, the heating ink spraying device takes some time to generate sufficient bubbles, and thus there is a limit in improving the ejection speed of ink, that is, the printing speed, and the characteristic of the heating element is the ambient temperature. There was a problem that it is difficult to expect stable performance changed well under the influence of.
한편, 이와는 달리, 상기와 같은 종래의 잉크분사장치중, 압전방식의 잉크분사장치는, 상기 가열방식의 잉크분사장치보다는 우수한 성능을 얻을 수 있기는 하나, 고가의 압전소자를 사용하기 때문에 가격이 비싼 문제점이 있었다.On the other hand, in the conventional ink jetting apparatuses as described above, the piezoelectric ink jetting apparatus can obtain better performance than the heating ink jetting apparatus, but it is expensive because it uses expensive piezoelectric elements. There was an expensive issue.
또한, 양자 공히 발열체나 압전소자를 전극, 절연층, 보호층 등과 잘 조화시켜야 하기 때문에, 그 제조공정이 까다롭고, 따라서, 그만큼 수율이 저조하다고 하는 문제점이 있었다.In addition, since both the heating element and the piezoelectric element must be well coordinated with the electrode, the insulating layer, the protective layer, etc., the manufacturing process is difficult, and thus there is a problem that the yield is low.
한편, 본 고안과 관련된 기술로서, 미합중국 특허번호 제 4,057,807 호 및 제 4,210,920 호에는 전자석으로 자기능동판을 진동시켜 잉크를 분사하는 잉크분사장치가 개시되어 있다.On the other hand, as a technique related to the present invention, US Patent Nos. 4,057,807 and 4,210,920 disclose an ink spraying device for ejecting ink by vibrating a magnetic copper plate with an electromagnet.
이에 의하면, 상기 종래의 잉크분사장치는, 헤드의 노즐 외측에 마그네트 구동기를 부착하고, 이 마그네트 구동기에서 발생되는 자계에 의하여 외곡되는 자기능동판으로 잉크챔버를 밀봉하여, 이 자기능동판이 자계에 의한 외곡으로 변형될 때 작용하는 압력으로 잉크를 토출시키도록 되어 있다.According to this, the conventional ink spraying device attaches a magnet driver to the outside of the nozzle of the head, seals the ink chamber with a magnetic copper plate that is distorted by the magnetic field generated by the magnetic driver, and the magnetic functional copper plate is formed by the magnetic field. The ink is discharged at a pressure that acts upon deformation into the outer grains.
그러나 이와 같은 종래의 잉크분사장치에 의하면, 어느 한 마그네트 구동기 코일이 여자될 때 이에 인접한 다른 구동기 코일에 2차 전류가 유도되기 때문에, 이 다른 구동기 측의 자기능동판이 작동하게 됨으로써 원치않는 다른 노즐에서 잉크가 분출되는 경향이 있다고 하는 문제점이 있었다.However, according to the conventional ink ejection apparatus, when a magnet driver coil is excited, a secondary current is induced to another driver coil adjacent thereto, and thus, the magnetic function copper plate on the other driver side is operated, so that at other unwanted nozzles. There was a problem that ink tends to be ejected.
따라서 양호한 인쇄품질을 얻기가 힘들뿐만 아니라, 마그네트 구동기가 노즐 외부에 부착되므로 구조적으로 소형화가 어렵게 되었다.Therefore, not only is it difficult to obtain good print quality, but the magnet driver is attached to the outside of the nozzle, making it difficult to miniaturize the structure.
따라서, 본 고안이 이루고자 하는 기술적 과제, 즉, 본 고안의 목적은, 종래의 잉크분사장치의 상기와 같은 문제점을 해결하고자 하는 것으로써, 간단한 구조로서 제작이 쉽고 안정된 동작특성을 가질 뿐만 아니라 잉크의 토출 압력과 속도제어를 가능케 하여 인쇄품질과 인쇄속도를 향상시킬 수 있는 잉크분사장치를 제공하는데 있다.Therefore, the technical problem to be achieved by the present invention, that is, the object of the present invention is to solve the above problems of the conventional ink spraying device, it is easy to manufacture as a simple structure and has a stable operation characteristics as well as the It is to provide an ink spraying device that can improve the printing quality and printing speed by enabling the discharge pressure and speed control.
도 1은 종래의 가열방식 잉크분사장치의 단면도.1 is a cross-sectional view of a conventional heating ink spraying device.
도 2는 종래의 압전방식 잉크분사장치의 단면도.2 is a cross-sectional view of a conventional piezoelectric ink spraying device.
도 3은 본 고안에 따른 잉크분사장치의 단면도.Figure 3 is a cross-sectional view of the ink injection device according to the present invention.
도 4a 내지 4e는 본 고안에 따른 잉크분사장치를 구성하는 진동판 부재에 잔류응력에 의한 만곡부를 갖도록 제조하는 과정을 보인 공정도.Figures 4a to 4e is a process diagram showing a process of manufacturing to have a curved portion by the residual stress in the diaphragm member constituting the ink injection value according to the present invention.
도 5a 및 도 5b는 본 고안에 따른 잉크분사장치의 작동상태를 보인 단면도.Figures 5a and 5b is a cross-sectional view showing the operating state of the ink jetting apparatus according to the present invention.
* 도면의 주요부분에 대한 부호의 설명 *Explanation of symbols on the main parts of the drawings
30 : 실리콘 웨이퍼 기판 31 : 요홈30: silicon wafer substrate 31: groove
32 : 진동판 32 : 만곡부32: diaphragm 32: curved portion
33, 34 : 전극 37 : 노즐33, 34: electrode 37: nozzle
38 : 잉크챔버38: ink chamber
상기와 같은 본 고안의 목적은, 잉크를 수용하는 잉크챔버와 이 잉크챔버로부터 잉크를 토출시키기 위한 노즐을 가지는 잉크분사장치를 구성함에 있어서, 상기 잉크챔버 내에서 잉크를 가압하도록 진동되는 진동판 부재를 포함하고, 이 진동판 부재를 구동하는 수단으로서, 2 개의 전극을 사용하여 그 일측 전극을 진동판 부재에 부착하고, 타측 전극은 그 일측 전극과 약간의 간격을 두고 고정배치하여, 양측 전극 상호간에 전위차로 작용하는 정전기력으로 그 일측 전극과 함께 상기한 진동판 부재를 진동시킬 수 있게 구성된 본 고안에 따른 잉크분사장치를 제공함으로써 달성된다.An object of the present invention as described above is to constitute an ink ejection device having an ink chamber containing ink and a nozzle for ejecting ink from the ink chamber, wherein the diaphragm member vibrates to pressurize the ink in the ink chamber. As a means for driving the diaphragm member, two electrodes are used to attach the one electrode to the diaphragm member, and the other electrode is fixedly disposed at a slight distance from the one electrode, so as to have a potential difference between the two electrodes. It is achieved by providing an ink ejection device according to the present invention configured to vibrate the diaphragm member with its one electrode with an acting electrostatic force.
즉, 본 고안에 따른 잉크분사장치는, 2 개의 전극에 전위차를 갖도록 전압을 인가하여, 이 전위차로 작용하는 정전기력을 이용하여 진동판을 진동시킴으로써, 이 진동판의 진동에 의해 작용되는 압력으로 잉크가 분사되도록 하는 것이다.That is, the ink ejection device according to the present invention applies a voltage so as to have a potential difference between the two electrodes, and vibrates the diaphragm using an electrostatic force acting as the potential difference, thereby injecting ink at a pressure applied by the vibration of the diaphragm. To make it possible.
이하 본 고안의 바람직한 실시예를 첨부도면을 참조하여 상세하게 설명한다.Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.
도 3에는 본 고안에 따른 잉크분사장치가 도시되어 있다. 도 3에서 부호 (30)은 실리콘 웨이퍼 기판이며, 이 실리콘 웨이퍼 기판(30)의 상면에 요홈(31)이 형성되고, 요홈(31) 위에 얇은 탄성체인 진동판(32)이 접착제로 부착되어 있다.3 shows an ink ejection apparatus according to the present invention. In Fig. 3, reference numeral 30 denotes a silicon wafer substrate. A groove 31 is formed on the upper surface of the silicon wafer substrate 30, and a diaphragm 32, which is a thin elastic body, is attached to the groove 31 by an adhesive.
상기 진동판(32)의 형성에는 부도체로서 가공구조물인 중합체(polymer)나 세라믹 박막이 이용되는데, 바람직하게는 실리콘 웨이퍼 기판(30)의 요홈(31)이 위치하는 부분에 프리스트레스(prestress)에 의한 만곡부(32a)가 형성되도록 제작한다.In the formation of the diaphragm 32, a polymer or a ceramic thin film, which is a processing structure, is used as a non-conductor. Preferably, the curved portion of the diaphragm 32 is formed by a prestress in a portion where the groove 31 of the silicon wafer substrate 30 is located. It is produced so that 32a is formed.
이러한 만곡부(32a)는 진동작동시의 순간적인 변위와 복원을 위해 바람직하며, 이러한 진동판(32)의 제작과정은 나중에 설명된다. 실리콘 웨이퍼 기판(30)에 형성된 요홈(31) 내에는 진동판(32)의 만곡부(32a)에 부착된 가동전극(33)과 그 요홈(31)의 바닥면에 부착된 고정전극(34)이 위치되어 있다.The curved portion 32a is preferable for the momentary displacement and restoration during the vibration operation, and the manufacturing process of the diaphragm 32 will be described later. In the groove 31 formed in the silicon wafer substrate 30, the movable electrode 33 attached to the curved portion 32a of the diaphragm 32 and the fixed electrode 34 attached to the bottom surface of the groove 31 are located. It is.
이들 전극(33,34)은 석판 인쇄술(lithography) 및 박막코팅기술을 이용하여 박막코팅되는데, 이 때 스퍼터(sputter), CVD등을 이용하여 성형된다.These electrodes 33 and 34 are thin film coated using lithography and thin film coating techniques, which are then formed using sputtering, CVD, or the like.
한편, 전극(33,34)은 상호 간격을 두고 있으며, 이 간격은 정전기력에 의한 구동에 영향을 미치는데, 상기한 실리콘 웨이퍼 기판(30)의 요홈(31)을 습식 또는 건식 식각하여 필요한 칫수를 획득한다. 여기서 고정측 전극(34)의 표면은 가동전극(33)과의 전기적 단락을 피하기 위해 절연체(34a)로 코팅된다.On the other hand, the electrodes 33, 34 are spaced apart from each other, this interval affects the driving by the electrostatic force, and the required dimensions by wet or dry etching the groove 31 of the silicon wafer substrate 30 described above Acquire. The surface of the fixed electrode 34 is coated with an insulator 34a to avoid electrical shorts with the movable electrode 33.
진동판(32) 위에는 잉크유로용 벽(35)이 부착되고 그 위에 노즐(37)을 갖는 노즐판(36)이 설치되며, 이 진동판(32)과 벽(35) 및 노즐판(36)으로 둘러싸이는 잉크챔버(38)가 형성된다. 이 잉크챔버(38)는 도시되지 않은 잉크공급수단에 연결되어 이로부터 공급되는 잉크(39)로 채워진다.On the diaphragm 32, a wall 35 for ink flow paths is attached and a nozzle plate 36 having a nozzle 37 is installed thereon and surrounded by the diaphragm 32, the wall 35, and the nozzle plate 36. This forms an ink chamber 38. This ink chamber 38 is filled with ink 39 connected to and supplied from ink supply means, not shown.
도 4a 내지 4e에는 전술한 진동판(32)에 프리스트레스를 가하여 만곡부(32a)를 형성하기 위한 바람직한 제조공정이 도시되어 있다.4A to 4E illustrate a preferred manufacturing process for forming the curved portion 32a by applying prestress to the aforementioned diaphragm 32.
즉, 전술한 잉크유로용 벽(35)을 위한 원재로서 실리콘 웨이퍼(35')의 전면에 상기한 진동판(32)의 원재로서 SiO2막(32')을 2~10㎛ 두께로 적층(thermal oxidation)하고(도 4a 참조), 석판술을 이용하여 상기 실리콘 웨이퍼(35') 후면을 습식식각한다(도 4a 참조).That is, the SiO 2 film 32 'as a raw material of the diaphragm 32 as the raw material for the above-mentioned ink flow path wall 35 on the front surface of the silicon wafer 35' is laminated to a thickness of 2 to 10 탆. oxidation) (see FIG. 4A), and lithography is used to wet etch the back surface of the silicon wafer 35 ′ (see FIG. 4A).
그러면, 도 4c에 도시된 바와 같이, 실리콘 웨이퍼(35')가 제거된 노출부분에서, 이전 단계에서 실리콘 웨이퍼(35')와 평형을 이루고 있던 SiO2막(32')의 일부에 응력이 잔류하게 되고, 이와 같이 프리스트레스에 의한 만곡부(32a)가 형성되어진다.Then, as shown in FIG. 4C, in the exposed portion where the silicon wafer 35 'is removed, stress remains in a portion of the SiO 2 film 32' that was in equilibrium with the silicon wafer 35 'in the previous step. In this way, the curved portion 32a is formed by prestressing.
이후에는 상기 만곡부(32a)에 포토레지스트(42)를 도포하고(도 4d 참조), 실리콘 웨이퍼(35')를 전술한 잉크챔버(38)의 용적을 고려하여 2차적으로 습식 식각한 후 상기 포토레지스트(42)를 제거하여 도 4e와 같이 완성한다.Thereafter, the photoresist 42 is applied to the curved portion 32a (see FIG. 4D), and the silicon wafer 35 ′ is wet-etched secondly in consideration of the volume of the ink chamber 38 described above, and then the photoresist is formed. The resist 42 is removed to complete as shown in FIG. 4E.
이와 같이 구성된 본 고안에 따른 잉크분사장치의 작동을 도 5a 및 5b를 참조하여 설명한다.The operation of the ink ejection apparatus according to the present invention configured as described above will be described with reference to FIGS. 5A and 5B.
고정전극(34)에 일정한 전압이 인가되고, 가동전극(33)에 프린트 신호로서 원하는 화상정보에 따라 변조된 신호가 인가되면(이 때, 고정전극(34)에 인가되는 전압은 가동전극(33)의 신호전압보다 커야 한다), 이 상태에서 전극(33,34) 상호간에 작용하는 정전기력에 의하여 가동전극(33)과 함께 진동판(32)의 만곡부(32a)가 고정전극(34)측으로 흡인되어 도 5a와 같이 반대방향 즉, 아래로 볼록해지도록 변형된다. 이때에는 잉크챔버(38)의 체적이 확장되어 잉크(39)는 토출되지 아니하고 다만 전술한 잉크탱크로부터 공급되는 잉크가 더 채워진다.When a fixed voltage is applied to the fixed electrode 34, and a signal modulated according to desired image information as a print signal is applied to the movable electrode 33 (at this time, the voltage applied to the fixed electrode 34 becomes the movable electrode 33). Must be greater than the signal voltage), and in this state, the curved portion 32a of the diaphragm 32 is attracted to the fixed electrode 34 together with the movable electrode 33 by the electrostatic force acting on the electrodes 33 and 34. It is deformed to be convex in the opposite direction, ie downward, as shown in FIG. 5A. At this time, the volume of the ink chamber 38 is expanded so that the ink 39 is not discharged but is further filled with the ink supplied from the ink tank described above.
이와 같은 상태에서 전극(33,34) 양측 또는 가동측의 신호가 차단(OFF)되면 그 상호간의 정전기력이 해지되고 역으로 변형되어 있던 진동판(32)의 만곡부(32a)가 자체 탄력에 의하여 도 5b와 같은 초기의 상태로 순간 복원되며, 이때 앞의 상태에서 확장된 잉크챔버(38)의 체적이 축소되는 결과가 된다. 따라서 그 복원시에 작용하는 압력으로 잉크챔버(38) 내의 잉크(39)가 노즐(37)을 통해 토출된다.In this state, when signals on both sides and the movable side of the electrodes 33 and 34 are turned off, the electrostatic force between the electrodes 33 and 34 is canceled, and the curved portion 32a of the diaphragm 32, which has been deformed inversely, is self-resilient to FIG. 5B. It is instantaneously restored to an initial state such as this, which results in a reduction in the volume of the expanded ink chamber 38 in the previous state. Therefore, ink 39 in the ink chamber 38 is discharged through the nozzle 37 at a pressure acting at the time of restoration.
이러한 동작을 반복하게 됨으로써 노즐(37)로부터 토출잉크(40)가 프린트 신호에 따라 분사되어 원하는 화상을 프린트할 수 있는 것이다.By repeating this operation, the ejecting ink 40 is ejected from the nozzle 37 in accordance with the print signal to print a desired image.
도면으로 예시하지는 않았으나 전술한 진동판의 만곡부가 초기상태로서 아래로 볼록하도록 형성된 것을 사용하고 양측 전극을 전압인가시 상호 반발력이 작용하도록 하는 신호로 구동하여 그 신호가 인가될 때 그 진동판의 만곡부가 위로 볼록하게 1차 변형되는 상태에서 잉크가 토출되게 구동하는 것도 가능할 것이다.Although not illustrated in the drawings, the curved portion of the aforementioned diaphragm is formed to be convex downward as an initial state, and both electrodes are driven by a signal that causes mutual repulsive force to be applied when voltage is applied, and the curved portion of the diaphragm is upward when the signal is applied. It will also be possible to drive the ink to be ejected in the convex primary deformation state.
따라서, 상술한 바와 같은 본 고안에 따른 잉크분사장치에 의하면, 잉크챔버 각각의 전극들이 구동될 때 인접한 다른 잉크챔버의 전극이 오동작하는 일이 없기 때문에, 다른 노즐로부터 원하지 않은 잉크토출 현상이 없고, 따라서 양호한 품질의 인쇄가 가능하다고 하는 효과가 있다.Therefore, according to the ink ejection apparatus according to the present invention as described above, since the electrodes of the adjacent ink chambers do not malfunction when the electrodes of the ink chambers are driven, there is no undesired ink ejection phenomenon from the other nozzles, Therefore, there is an effect that printing of good quality is possible.
또한, 상술한 바와 같은 본 고안에 따른 잉크분사장치에 의하면, 전극에 인가되는 전압의 크기와 주기를 조절하여 진동판의 변형정도를 조정할 수 있기 때문에, 토출되는 잉크의 양과 속도제어가 용이하고, 따라서 고해상도와 고속인쇄에 유리하다고 하는 효과가 있다.In addition, according to the ink ejection apparatus according to the present invention as described above, since the degree of deformation of the diaphragm can be adjusted by adjusting the magnitude and period of the voltage applied to the electrode, it is easy to control the amount and speed of ink ejected. It has the effect of being advantageous for high resolution and high speed printing.
뿐만 아니라, 상술한 바와 같은 본 고안에 따른 잉크분사장치에 의하면, 진동판을 작동시키는 전극이 노즐 내측에 형성되어 있기 때문에, 그 구조가 박형으로서 슬림화된 소형으로 제작할 수 있을 뿐만 아니라 박막코팅기술로 간단히 제작가능함은 물론 제조공정의 단순화로 생산코스트를 낮춰 저렴하게 보급할 수 있게 된다고 하는 효과가 있다.In addition, according to the ink ejection apparatus according to the present invention as described above, since the electrode for operating the diaphragm is formed inside the nozzle, the structure can be made thin and compact, as well as simply thin film coating technology. Not only can it be manufactured, but the manufacturing process is simplified, so that the production cost can be lowered and distributed.
본 고안은 상기에 설명되고 도면으로 예시된 것에 의하여 한정되는 것은 아니며 다음에 기재되는 실용신안등록청구의 범위 내에서 더 많은 변형 및 그 변용예가 가능하게 됨은 물론이다.The present invention is not limited to the above described and illustrated by the drawings, and of course, more modifications and variations thereof are possible within the scope of the utility model registration claims described below.
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