KR20010095794A - Examining method and its system for plasma display panel of half finished goods - Google Patents

Abstract

PURPOSE: A test method and test system for half-finished PDP is provided to reduce reject ratio and significantly increase yield rate by allowing the semi-finished PDP to be tested under the condition where the completely finished PDP is tested. CONSTITUTION: A test system(10) comprises chambers(12,14,16,18,20) having vacuum atmosphere and gas atmosphere same as the test atmosphere of the completely finished PDP; vacuum devices(74a to 74e) for vacuumization of chambers; a gas supply unit(126) for injecting gas to chambers; gate valves(48,50,52,54,56,58) for opening gates of chambers during transporting of a PDP test device, and separating chambers to be sealed when the PDP test device is stopped; gate valve open/shut units(60,62,64,66,68,70) for opening/shutting gate valves; the PDP test device for testing whether the semi-finished PDP is defective under the condition where the completely finished PDP is tested; and a transport unit(24) for transporting the PDP test device to the inside or outside of chambers.

Description

Examination method and its system for plasma display panel of half finished goods

The present invention relates to an inspection (test) method and a system of a semi-finished plasma display panel, and more particularly, to a semi-finished product before combining a front glass and a rear glass of a plasma display panel (hereinafter referred to as "PDP"). If it is determined to be defective by continuously inspecting (testing) for defects under the same vacuum atmosphere (approximately 100torr ~ 300torr) and gas atmosphere environment that is installed on the actual product, it is possible to repair (remove the cause) immediately or repair is impossible. By using only the good quality of the front glass and the rear glass to reduce the defect rate of the PDP to several hundred times less than the conventional to greatly improve the yield and reduce the manufacturing cost.

In general, PDPs are manufactured in various structures and methods according to the manufacturer or product, and the structure or shape of the PDP is varied due to the type of gas to be injected, gas injection amount, vacuum degree, applied voltage, applied current, applied power source type, and size. And a manufacturing method, etc., because it cannot be specified, the term " PDP " described in the present invention includes all of them, and the environment such as the finished product in the semi-finished state in which the front glass and the rear glass of the finished PDP are not combined. The main point is to create a test (inspection) environment and inspect the defects.

PDP is a display device that displays an image by emitting phosphors by ultraviolet rays generated by the discharge of gas. For example, a large flat panel display device such as an LCD (Lyquid Crystal Display) or an EL (Electro Luminescence) display module cannot be used. There is an advantage that can be produced.

These PDPs are generally classified into alternating current (AC) and direct current (DC) methods. The alternating current type PDP discharges by applying an alternating voltage between two electrodes with a dielectric interposed therebetween, and the direct current type PDP directly discharges between electrodes. It is characteristic to discharge by applying voltage.

Here, the AC type PDP is a surface discharge type using three electrodes and has a merit of low power driving because it uses a dielectric having a memory effect as a charge accumulation, whereas the DC type PDP is a counter discharge type and applies a voltage directly between electrodes. Although the light emitting efficiency is good, the electrode is exposed to the discharge space, which shortens the lifespan.

On the other hand, although the manufacturing method (process) or manufacturing order of the PDP is different depending on the manufacturer or the product model of the PDP, an example of the PDP manufacturing process is shown in FIG. 1 to help the understanding of the present invention.

1 is a cross-sectional configuration diagram of a subcell included in a pixel cell of an AC system PDP which is the mainstream of commercialization. In general, pixel cells of a PDP are formed of red (R), green (G), and blue (B). It consists of three subcells.

The subcells of the PDP are positioned with the rear glass 2 spaced apart by a predetermined distance from the front glass 1, which is the display surface of the image, and is formed between the front glass 1 and the rear glass 2 with a stripe type. The discharge space is formed inside the cell by forming the partition wall 3.

A method of forming the barrier rib 3 includes a screen printing method, an etching method, and a method of etching after thin film deposition. The screen printing method is a method of forming a partition by repeating printing and drying several times. The etching method is a general wet etching method in which the barrier 3 material is applied to the entire area of the screen, covered with a photoresist having a predetermined pattern, and immersed in an etching solution to be etched to complete the barrier.

Meanwhile, on the windshield 1, two sustain electrodes, that is, a stripe type scan electrode 4 and a sustain electrode 4a are arranged side by side, and a front surface on which the sustain electrodes 4 and 4a are disposed. A dielectric layer 5 is formed on the glass 1 to limit the discharge current during discharge and to facilitate the generation of charge, and sputtering caused by the discharge between the two electrodes 4 and 4a on the dielectric layer 5. ), A magnesium oxide (MgO) protective film 4 is deposited to prevent damage to the scan electrode 4 and the dielectric layer 3.

A stripe type address electrode 7 is disposed on the rear glass 2, and the address electrode 6 is separated into a plurality of discharge cells to prevent color mixing between cells and to secure a discharge space. Partition walls 3 are arranged, and on the rear glass 2 on which the address electrodes 7 are arranged, any one of red, green, and blue phosphors for emitting red, green, and blue visible light when the cells are discharged Part of the partition wall 3 is applied, and the interior space of the PDP cell configured as described above is dependent on the manufacturer or product model, but inert gas, such as argon (Ar), neon + xenon, etc. is encapsulated.

The gases are converted into electrons and ions by opposing discharges between the scan electrode 4 and the address electrode 4a, i.e., by scanning discharge, into a plasma state, and in this plasma state, gas particles are excited by collision and are ultraviolet rays. This occurs and the color image is expressed in such a manner that the phosphor is excited by the ultraviolet rays and emits light.

On the other hand, although the PDP of the above-described configuration varies depending on the product model, the wiring is very complicated because hundreds of discharge electrodes are formed on the X axis and thousands of color signal electrodes are formed on the Y axis. PDP manufacturing defect rate after laminating to rear glass reaches tens of percent (typically 10% ~ 50%) depending on the manufacturer or product model, and there is a burden of cost increase.

At the bottom, where the defective rate reaches tens of percent, high direct cells, electrode wirings, barrier ribs, and magnesium oxide insulating layer (MgO) are formed on large PDPs. It is not only difficult to check the XYZ axis three-dimensionally even if contamination due to inflow and the inspector identifies with the naked eye to determine whether it is defective or by automatic inspection by a CCD camera. This is due to the irregular distribution of defects in the PDP because the automatic inspection is not perfect because of different and severe personal errors.

In addition, as shown in FIG. 2, the defect (defect) pattern mainly generated in the manufacturing process of the PDP is characterized in that the substrate or magnesium oxide (MgO) is poor due to abnormal electrode deposition and dielectric breakdown. Short due to the hole, a pin hole in which a hole is formed in the cell, an open such as disconnection of the electrode, and a discharge failure due to the mixing of fine dust or foreign substances, etc. Various defects of the type will appear.

In addition, even if the manufacturing process of the PDP is improved, it is difficult to reduce the manufacturing cost unless the defect rate is lowered. Since the large size of the PDP is large, it is difficult to drastically reduce defects.

Therefore, the present invention is to check whether the defect before the final bonding of the front glass and the rear glass of the PDP (semi-finished state) to be repaired (remove the cause) if it is determined to be defective or if the front glass is not repairable PDP inspection method and system that can improve the yield and reduce the manufacturing cost by lowering the defect rate of PDP by several hundred times or less by using only good quality products and the back glass can be manufactured. Aim to contribute to the popularization of

It is also an object of the present invention to provide a method and system for inspecting a semi-finished PDP in a vacuum atmosphere (about 100torr to 300torr) and a gas atmosphere as if it were a finished product. have.

In addition, the present invention is a system that can be inspected by the eyes or a CCD camera to emit a fluorescent surface by directly discharging the PDP in the semi-finished state in a vacuum atmosphere (about 100torr ~ 300torr) and gas atmosphere such as the finished product The purpose is to provide.

In addition, due to the action of the discharge gas in the inspection chamber, the interference or insulation of the inspection circuit is destroyed even at a vacuum degree of about 100 torr to 300 torr, and the air molecules remaining inside and outside of the components or elements constituting the inspection circuit come out of the chamber. Since the degree of vacuum decreases or contamination by foreign matter molecules is generated, the test circuit is molded into the vacuum epoxy to prevent the electrical insulation and the degree of vacuum decrease.

In addition, the present invention aims to significantly reduce the defective rate by allowing the front glass and the rear glass of the PDP to be inspected and repaired separately.

In addition, the present invention is to improve the productivity by rapidly progressing a high vacuum exhaust and exhaust for releasing the vacuum in multiple stages to exhaust the exhaust, high vacuum exhaust, gas injection and inspection, inspection PDP for vacuum in a series of continuous processes For the purpose of

In addition, the present invention is a continuous inspection system to prepare the inspection process, that is, atmospheric pressure Low vacuum High vacuum Gas injection inspection High vacuum Low vacuum By outputting in the exhausted state, it is intended to reduce the total time required and inspection can be performed with one chamber.

In addition, the three chambers provide the preparation required for DPD inspection, i.e. atmospheric pressure. Low vacuum High vacuum Gas injection inspection High vacuum Low vacuum It aims to be able to perform PDP inspection work by outputting in exhaust state.

In order to achieve the above object, a plurality of chambers in which a vacuum atmosphere for inspecting a PDP is formed and a gas necessary for discharging is injected and exhausted, a gate valve is opened when the inspection apparatus is transported (transported), and the inspection apparatus is provided in the chamber. When the seating stops, the gate valve is isolated to maintain the air tightness, the gate valve opening and closing means for opening and closing the gate valve, and the semi-finished PDP is inspected for defects under the vacuum atmosphere and gas atmosphere reproduced in the same situation as the finished product PDP. It consists of a PDP inspection apparatus and a transfer apparatus for transferring (transporting) the PDP inspection apparatus to a chamber inside, outside, or next to the chamber.

In addition, the chamber is configured to secure a vacuum degree of 1 × 10 ^-4 torr to 1 × 10 ^-6 torr by using an exhaust chamber for firstly securing a vacuum degree of 1 × 10 ^-4 torr and a high vacuum pump for the first exhausted vacuum. Inject high-pressure chamber, discharge gas required for PDP inspection under vacuum of about 100torr ~ 300torr to create a realistic gas atmosphere, and then gas injection and inspection chamber to check whether the semi-finished product PDP is defective, and the PDP after inspection It is composed of a high vacuum chamber that prevents the inflow of foreign substances or impurities to the gas injection and inspection chamber and the exhaust chamber made of the same pressure as the outside air and the exhaust chamber when it is pulled out, and the inspection system of the present invention is symmetrical with respect to the gas injection and inspection chamber. .

In the above-mentioned exhaust chamber for maintaining a medium vacuum and high vacuum chamber for maintaining a high vacuum, respectively, an ultraviolet lamp is installed to excite water vapor molecules (water molecules) remaining in the chamber with ultraviolet rays so that the degree of vacuum can be quickly achieved.

In addition, the inspection apparatus includes a PDP overlapping with each other, a clamp device for mechanically fixing the front glass and the rear glass of the overlapping PDP, a PDP driving circuit array for applying a driving signal and an image signal to the PDP, and a PDP driving circuit array. And a power supply unit for supplying operating power to the PDP, a pattern generator for supplying the test image signal to the PDP through the PDP driving circuit array, and a removable PDP socket for electrically connecting the terminals of the PDP. In addition, by connecting the exhaust pipe to the gas injection and inspection chamber, and connecting the on-off valve and vacuum device, the gas supply device and a plurality of gas cylinders to the exhaust pipe to supply the gas required for semi-finished PDP inspection gas atmosphere such as the finished product PDP Make it happen.

1 is a cross-sectional view of a general PDP for better understanding of the present invention.

2 and 3: Defect pattern type diagrams appearing on the PDP.

4 is a schematic flowchart of one embodiment of a manufacturing process of a PDP.

5 is a flowchart of one embodiment of a manufacturing process of the present invention PDP.

6 is a block diagram of a continuous inspection system of the present invention.

7 is a partially enlarged view of the continuous inspection system of the present invention.

8 is a block diagram of the inspection device of the present invention.

9 is a circuit block diagram of the inspection system of the present invention.

10 is a cross-sectional view of another embodiment of the present invention.

11 is a cross-sectional view of another embodiment of the present invention.

<Explanation of symbols for main parts of the drawings>

(10)-PDP Inspection System (12) (14) (16) (18) (20)-Chamber

(22)-PDP Inspection Device (24)-Transfer (Transport) Device

(25)-Feeding Roller (27)-Feeding Belt

(29)-Reduction Motor

(26) (28) (30) (32) (34) (36) 38 (40) (42)-Gate

(48) (50) (52) (54) (56) (58)-gate valve

(60) (62) (64) (66) (68) (70)-gate valve opening and closing means

(74)-Vacuum Devices (76) (78)-Ultraviolet Lamps

(80) (82) (84) (86) (88)-Transparent Tempered Glass (90) (92) (94) (96) (98)-Packing

(100)-support member (102)-front glass

(104)-Rear Glass (106)-Gap Maintenance Material

(108)-Semifinished PDP (110)-PDP Drive Circuit Array

(112)-Power Source (114)-Pattern Oscillator

(117)-PDP socket (118)-

(120) (120a)-Exhaust Pipe (122)-Open / Close Valve

(124)-Controller (126)-Gas Supply

(128)-Gas Cylinder (130)-Transfer Position Detector

(132)-Gate Valve Open / Closed Detector (134)-Vacuum Gauge

(136)-Travel Drive Driver

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

4 is a view illustrating a schematic manufacturing procedure of a conventional PDP, which is shown as an example but different according to a manufacturer or a product model of the PDP. Processed by process, cleaning of windshield Discharge electrode printing The front glass is processed through magnesium oxide (MgO) coating, and the rear glass is cleaned. Address electrode printing Bulkhead Magnesium Oxide (MgO) Coating Blue (B) fluorescent printing Green (G) Fluorescent Printing Red (R) fluorescent printing is used to process the rear glass.

In addition, the front glass and the rear glass processed by the above process is bonded by welding the glass, and then maintain the high vacuum of 1 × 10 ^-7 torr through the exhaust hole formed in the rear corner portion of the rear glass while maintaining the glass about 350 ℃ After heating, the adsorbed impurities are exhausted to inject the gas necessary for discharge (about 100 tortor to 300 torr), activate the discharge electrode with sufficient aging, and then complete the manufacturing of the PDP through the final operation process.

On the other hand, in the present invention, as shown in Figure 5 is a defect in the semi-finished state immediately before the combination of the front glass and the rear glass by welding, Figure 5 also manufactured as shown in Figure 4 PDP according to the manufacturer or product model of the PDP Of course, the process and the order is different.

If the inspection finds a defect in the PDP, it can be repaired to remove the cause, or if it is impossible to repair, the PDP will be re-manufactured using only the good quality of the front glass and the rear glass. It can contribute to popularization by reducing manufacturing costs.

FIG. 6 is a cross-sectional configuration diagram of the PDP inspection system 10 of the present invention, in which a plurality of chambers 12, 14, 16, 18 are formed in which a vacuum atmosphere necessary for the inspection of the PDP is formed, and gas for discharge is injected and exhausted. 20 and the gates of the chambers 12, 14, 16, 18 and 20 when the inspection apparatus 22 is transported (transported) by the conveying device 24 composed of a plurality of feeding rollers. (26) (28) (30) (32) (34) (36) (38) (40) (42) are opened and the chamber (12) (14) ( 16, 18, 20 gate valves 48, 50, 52, 54, 56, 58, and gate valves 48, 50, 52 to isolate the airtight from each other. The gate valve opening and closing means 60, 62, 64, 66, 68 and 70 for opening and closing 54, 56 and 58, and the semi-finished PDP are constructed in the same environment as the finished PDP. PDP inspection device 22 for inspecting whether PDP is defective under vacuum atmosphere (about 100torr to 300torr) and gas atmosphere, and PDP inspection device 44 are provided with chambers 12, 14, 16, 18 and 20. of It consists of a conveying device 24 for conveying (transporting) inwards and outwards or for transporting (transporting) to the side chambers 12, 14, 16, 18, 20.

The conveying device 24 is a plurality of feeding rollers 25 evenly arranged in a horizontal state as shown in Figure 7, the feeding belt 27 surrounding the feeding roller 25, and a reduction motor for driving one side of the feeding roller ( 29) is configured to stop and transport the inspection device 22 seated on the top.

The material of the feeding belt 27 is formed of a Viton-based rubber to minimize the effects of vacuuming the chamber, and the reduction motor 29 and one side feeding roller 25 installed outside the chamber. The airtight part is to be kept tight by vacuum o-rings.

The chambers 12, 14, 16, 18, and 20 are vacuum devices (1) to obtain an appropriate degree of vacuum of 1 × 10 ^-4 torr to 1 × 10 ^-6 torr, which is a vacuum atmosphere required for inspection as shown in FIG. 74a) with an evacuation chamber 12 for securing a primary degree of vacuum of 1 × 10 ⁻¹ torr to 1 × 10 ⁻³ torr, and the first exhausted vacuum using a vacuum device 74a to 1 × 10 ⁻⁴ torr High vacuum chamber 14 which secures a vacuum degree of ˜1 × 10 ⁻⁶ torr, and gases required for inspection under vacuum atmospheres around 100torr to 300torr, for example, gases such as argon (Ar), xenon (Xe), and neon (Ne) Gas injection and inspection chamber (16) for inspecting whether the semi-finished product PDP is defective by forming a gas atmosphere such as a finished product PDP by injecting the gas between the front glass and the rear glass of the chamber or semi-finished product PDP (108). 1 × 10 ^-4 torr to 1 × 10 ^-6 to to prevent foreign material or impurities from entering the gas injection chamber and the inspection chamber 16 before taking it out of the inspection system 10. It consists of a high vacuum chamber 18 which maintains a vacuum degree of rr and an exhaust chamber 20 which opens and releases the gate valve 70 to release the vacuum so that the semi-finished product PDP can be completely taken out of the inspection system. .

In the present invention, in order to obtain the high vacuum required for the test of the PDP, the vacuum is carried out in multiple stages using the high vacuum chamber 14 of the exhaust chamber 12.

On the other hand, it can be easily vacuumed up to 1 × 10 ^-3 torr, so that in order to achieve the vacuum degree required for the test in the present invention, even if the vacuum degree of 1 × 10 ^-1 torr to 1 × 10 ^-3 torr is maintained, Although the test is possible, the semi-finished product PDP may be deteriorated due to contamination or dust, and thus, the present invention is preferably maintained at 1 × 10 ⁻⁴ torr to 1 × 10 ⁻⁶ torr when evacuating.

In the present invention, ultraviolet lamps 76 and 78 are provided inside the exhaust chambers 12 and 20 and the high vacuum chambers 14 and 18, respectively. Water vapor (water) molecules adhering to the inner wall or remaining in the chambers 12, 14, 18 and 20 are excited to achieve the desired degree of vacuum quickly.

In addition, each of the exhaust chambers 12a and 18a is provided with leak valves 121a and 123a, which can be released gradually for several seconds when releasing the vacuum, so as to prevent shock or impact noise due to vacuum release. .

In the present invention, the chambers 12, 14, 16, 18, and 20 are preferably made of stainless steel or aluminum alloy, which is durable enough to withstand high vacuum, and the structure of the chambers 12, 14, 16, 18, and 20 is rectangular (square or rectangular). The upper and lower cylindrical structures are suitable, and gates 26 and 28 through which the inspection device 22 can pass by the transfer device 24 to both sides of the chambers 12, 14, 16, 18 and 20. 30, 32, 34, 36, 38, 40, and 42 are formed respectively, and the openings opened to the upper portions of the chambers 12, 14, 16, 18 and 20 are formed. do.

And the airtightness between the gates 26, 28, 30, 32, 34, 36, 38, 40, 42 of the chambers 12, 14, 16, 18, 20. Normal vacuum gate valves 48, 50, 52, 54, 56 and 58 with means are provided, respectively, and the gate valves 48, 50, 52, 54 and 56 are respectively provided. 58 is a gate 26, 28, 30 in the lifting or moving forward or backward, or a combined movement thereof by the opening and closing means 60, 62, 64, 66, 68, 70, such as an air cylinder. (32) (34) (36) (38) (40) (42) are opened and closed.

The upper part of the chambers 12, 14, 16, 18, and 20 in which the openings are formed is transparent tempered glass 80 capable of viewing the interior of the chambers 12, 14, 16, 18, and 20. (82) (84) (86) (88) are installed on top of each other, and the open edges of the chambers (12) (14) (16) (18) (20) and the transparent tempered glass (80) (82) Airtight packings 90, 92, 94, 96 and 98 are installed between the edges of the (84) (86) and (88) chambers (12) (14) (16) (18). Keep confidentiality of (20).

The transparent tempered glass (80, 82, 84, 86, 88) has a thickness and strength that can withstand high vacuum of 1 × 10 ^-6 torr sufficiently, and the transparent tempered glass (80, 82) ( The bottom surface of the 84, 86, 88 is provided with a plurality of support members 100 at even intervals, as shown in Figure 7, respectively, transparent glass 80, 82, 84, 86, 88 by high vacuum ) To prevent depression or banding into chambers 12, 14, 16, 18 and 20.

8 is a cross-sectional view of the present invention PDP inspection device 22, the front glass 102 and the back glass 104 overlapping each other, the support member 109 is seated, the overlapping front glass 102 and the rear PDP clamp 115 for clamping glass 104 to prevent its flow, PDP socket 117 for supplying driving power and pattern inspection signal to PDP, and PDP socket 117 for driving power and pattern inspection signal. A PDP drive circuit array 113 for supplying a PDP drive circuit, a PDP drive circuit socket 11 to which the PDP drive signal array 113 is electrically connected, a pattern oscillator 114 for generating a PDP pattern signal, and an inspection apparatus ( 22) is composed of a power supply unit 112 for supplying power in a magnetic induction or brush contact method.

In addition, the PDP driving circuit array 113 having a complicated circuit configuration is modularized, but can be inserted and detached from the PDP driving circuit socket 11 so that the PDP driving circuit array 113 is formed in a module unit in which a circuit failure or abnormality is generated. It can be exchanged and repaired, thus making it easy to maintain and reduce the repair cost.

In addition, the PDP driving circuit array 113 may be molded for each module using vacuum epoxy to prevent electrical shorts, discharges, and interferences caused by the interference of discharge gas, and also escape from these circuit elements or components. Since the foreign matter and air generated can be blocked, the vacuum time can be greatly shortened. The PDP inspection device 22 is able to enter and stop each chamber by the transfer device 24 having a drive means.

In addition, the gas injection and inspection chamber 16 is connected to the on-off valve 120a and the gas supply device 126 and the gas cylinder 128 that can adjust the air supply amount, the gas supply device 126 is the controller 124 It is electrically connected to control gas supply.

In this case, when the gas required for inspection is injected through the exhaust port formed in the rear glass 104 or directly into the gas injection and inspection chamber 16 without passing through the exhaust port, the windshield 102 and the rear glass 104 overlap each other. Gas is injected through the gap formed in the semi-finished product PDP can be inspected.

In addition, the vacuum apparatuses 74a, 74b, 74c, 74d and 74e which achieve proper vacuum in the chambers 12, 14, 16 and 18 are provided with the vacuum exhaust pipe 120 and the vacuum opening / closing valve 122 Is mechanically connected, and the controller 124 and the vacuum devices 74a, 74b, 74c, 74d, 74e are electrically connected and controlled.

In the present invention, the chambers 12, 14, 16, 18, and 20 are configured in multiple stages to maximize the productivity of the PDP defect inspection in a large amount of time.

Meanwhile, in the present invention, the PDP inspection apparatus 22 sequentially moves the plurality of chambers 12, 14, 16, 18, and 20 according to the inspection process, and the operation power is supplied to the PDP driving circuit array 110. Not only must this be supplied, but also the vacuum of the chambers 12, 14, 16, 18 and 20 must also be maintained, so that although not shown in the present invention, the inner wall or the bottom surface of the gas injection and inspection chamber 16 is not shown. Install a magnetic induction coil connected to an external power source and install an opposing magnetic induction coil in the inspection device 22 to induce the driving power to be magnetically induced, or external power to the inner wall or the bottom of the gas injection and inspection chamber 16. The brush is connected to the brush (brush), and the inspection device 22 may be installed to the brush contactor or vice versa to supply the driving power. Therefore, there is no need for a vacuum sealing device for power supply, and a lot of commercial feed throughs are omitted.

9 is a circuit block diagram of the present invention, the transfer position sensor 130 for detecting the transfer position of the inspection device 22 to the input of the controller 124 consisting of a PLC or MICOM (MICOM), and the gate valve 48 The gate valve opening / closing detector 132 for detecting the open / closed state of the (50) (52) (54) (56) (58) and the vacuum degree of the chamber (12) (14) (16) (18) The sensing vacuum gauge 134 is connected respectively.

At the output of the controller 124 is a vacuum device 74 which maintains an appropriate degree of vacuum in each of the chambers 12, 14, 16 and 18, and an inspection device 22 equipped with a semi-finished PDP 108. (12) (14) (16) (18) and (20) a conveying device (24), a conveying device driver (136) for driving the conveying device (24), and a gas injection and inspection chamber (16). A gas supply device 126 for supplying a gas required for the test, a pattern oscillator 114 for supplying a test pattern signal to the PDP, a PDP drive circuit array 110 for supplying a drive signal to the PDP, and an exhaust chamber (12) 20 and ultraviolet lamps 76 and 78 for assisting the vacuum of the high vacuum chambers 14 and 18, and a power supply 112 for supplying power in a magnetic induction method or a brush contact method.

10 is a cross-sectional configuration diagram of another embodiment of a semi-finished PDP inspection system 10a capable of continuously inspecting three chambers according to the present invention.

That is, the gas injection and inspection chamber 16a that can inspect the semi-finished product PDP by inspecting the exhaust chamber 12a maintaining the vacuum degree of 1 × 10 ^-4 torr to 1 × 10 ^-6 torr and the gas required for the inspection. It is composed of an exhaust chamber (20a) that can take out the finished PDP to the outside, one end of the exhaust chamber (12a) (18a) to release the leak slowly over a few seconds when releasing the vacuum valve (121a) (123a) Are respectively installed, and silencers or filters are installed at the ends of the leak valves 121a and 123a.

In addition, by connecting the exhaust chamber (12a), (20a), the vacuum valve (122a) and the exhaust pipe (120a) and the controller 124 with electrical vacuum devices (75a) (75b) (75c ) which is connected to, 1 × 10 ^{- It} is possible to maintain a vacuum degree of ⁴ torr ~ 1 × 10 ^-6 torr, and the gas injection device (12a) electrically connected to the air supply pipe 118a, the valve 120a and the controller 124 in the gas injection and inspection chamber (16a) 126a) and the gas cylinder 128a are connected to supply an appropriate amount of gas for PDP inspection.

Further, as shown in FIG. 6, opening and closing means 60a, 64a, 66a, 70a having gate valves 48a, 52a, 54a, 56a in the gate portion of each chamber 12a, 16a, 20a. By opening and closing the gate in the form of elevating movement, forward and backward movements, or a combination thereof, the inspection device 22 of the configuration shown in Figure 8 is transferred while the gate is opened.

FIG. 11 is a cross-sectional view of another embodiment of the semifinished product PDP inspection system 10b of the present invention. The configuration of the semifinished PDP inspection system 10b is simplified so that vacuum exhaust and gas injection and inspection can be collectively performed using one chamber.

That is, the vacuum degree of the chamber 16c is 1 × 10 ^-4 torr by connecting the vacuum valve 122c, the exhaust pipe 120c, and the vacuum device 77 electrically connected to the controller 124 to one end of the chamber 18c. To be maintained at ˜1 × 10 ⁻⁶ torr, and the supply pipe 118c, the valve 120d, the gas supply device 126c, and the gas cylinder 128c are connected to one end of the chamber 16c for inspection. Make sure you supply the right amount of gas.

In addition, as shown in FIG. 6, opening and closing means 60b and 62b having gate valves 48b and 50b are provided at the gate portion of the chamber 18c to raise and lower the movements of the opening and closing means 60b and 62b or to move forward and backward. Alternatively, the gates of the chambers 16c may be opened or closed in the form of their combined motions, and the inspection apparatus 22 having the configuration as shown in FIG. 8 may be opened and closed while the gates are opened.

In addition, by installing the leak valve 121c at one end of the chamber 16c, the vacuum valve of the chamber 16c is allowed to proceed slowly for a few seconds to reduce the shock or impact noise caused by the vacuum release, and the leak valve ( At the end of 121c), a silencer or filter is installed.

The inspection system 10b having the above configuration cannot move continuously the inspection apparatus 22 for each inspection step, but it is not possible to perform continuous inspection, but the semifinished product PDP is composed of one chamber 16c which is very simple in configuration and occupies little space for installation. There is an advantage in that (108) can be checked in a batch.

According to the present invention configured as described above, as shown in FIG. 6, the gate valve 48 is opened by the opening / closing means 60 to transfer the inspection apparatus 22 in which the PDP 108 in the semi-finished state is connected to the PDP socket 117. The gate valve 48, which has been transferred to the inside of the exhaust chamber 26 and opened with the help of a), is closed to maintain the airtightness of the exhaust chamber 12, and then the vacuum pump 72 is operated to operate the vacuum degree of the exhaust chamber 12. Vacuum until is maintained at 1 × 10 ⁻¹ to 1 × 10 ⁻³ torr.

When the vacuum degree of the exhaust chamber 12 is maintained at a vacuum degree of 1 × 10 ⁻¹ to 1 × 10 ⁻⁴ torr, the gate valve 50 between the exhaust chamber 12 and the high vacuum chamber 14 is opened to open the high vacuum chamber 14. ), And then close the gate valve 50 to maintain airtightness, and then operate the next vacuum pump 72 so that the vacuum degree of the high vacuum chamber 14 is 1 × 10 ^-4 to 1 × 10 ^-6. Vacuum until it remains at torr.

Since the vacuum of the high vacuum chamber 14 is maintained at 1 × 10 ^-1 to 1 × 10 ^-3 torr by the exhaust chamber 12, high vacuum can be easily achieved. In addition, since water vapor molecules (water molecules) are easily excited by the action of ultraviolet rays generated from the ultraviolet lamps 76 and 68, (high) vacuum can be achieved quickly.

Therefore, the semi-finished PDP 108 transported and seated in the high vacuum chamber 14 is almost completely discharged from impurities by high vacuum of 1 × 10 ⁻⁴ to 1 × 10 ⁻⁶ torr, thereby enabling discharge activation and stabilization.

When the inspection device 22 is transferred to the high vacuum chamber 14 by the transfer device 24 and the airtightness is achieved, the leak valve 121 of the exhaust chamber 12 is opened to gradually release the vacuum until the standby state. When the inspection device 22 is transported and seated, the gate valve 48 opened is closed, and the vacuum degree of the exhaust chamber 12 is 1 × 10 ⁻¹ to 1 × 10 ^{−3 with the} vacuum device 74a as described above. torr is achieved.

On the other hand, the PDP 108 exhausted by the high vacuum is transferred to the gas injection and inspection chamber 16 in which the vacuum atmosphere of about 100torr to 300torr is maintained and seated, and when the gate 52 is closed, the controller 124 and the gas supply device are closed. PDPs which are directly in contact with each other when the gas of the gas cylinder 128 is directly injected into the exhaust port 116 or the gas injection and inspection chamber 16 formed in the supply / exhaust pipe 118 and the rear glass 104 by the 126. Since an appropriate amount of gas for discharging is supplied between the windshield 102 and the rear glass 106 of 108, an environment similar to or similar to the actual environment (finished product PDP environment) is formed to form an appropriate gas atmosphere for the test.

In this state where the test atmosphere is heightened, operating power is supplied from the power supply unit 112 to the PDP driving circuit array 113 to operate the PDP driving circuit array 113 and the pattern generator 114, and the controller 124. The PDP 108 driving power, driving signals, and image signals are supplied to the PDP 108 through the PDP socket 117 under the control of the PDP 108. Thus, the PDP 108 in a semi-finished state is mounted on the finished PDP product. You can inspect it as if.

In the above, the test screen of the PDP 108 can be inspected by a visual inspection of the inspector or by expanding the image to a CCD camera and a monitor from the outside through the transparent tempered glass 86 located at an upper portion thereof. If repair is possible (removing the cause) or if repair is impossible, it can be manufactured using only good quality of the front glass and the rear glass, so that the defect rate of the PDP 108 can be drastically reduced to several hundred times or less than before. Therefore, the production yield of PDP can be greatly improved and manufacturing cost can be reduced, thereby contributing to popularization.

After completion of the inspection, the PDP is moved to the high vacuum chamber 18 to maintain a vacuum of 1 × 10 ⁻⁴ to 1 × 10 ⁻⁶ torr, and then the gate valve 54 is closed to impart impurities or foreign matter to the gas injection and inspection chamber 16. This movement is prevented and then moved to the exhaust chamber 20 and then the gate valve 58 is opened, whereby the atmospheric pressure of the exhaust chamber 20 becomes equal to atmospheric pressure.

That is, after welding welding as shown in Figure 6 to maintain a high vacuum of 1 × 10 ^-7 torr through the exhaust port formed in the rear corner portion of the rear glass, injecting the gas required for discharge (about 100torr ~ 300torr) and In this case, the PDP is manufactured through sufficient aging and final operation.If it is determined to be defective as described above, repair it immediately to remove the cause and then manufacture or repair the windshield and rear glass. Since the PDP is manufactured using only heavy goods, the defect rate is almost eliminated.

In the above, the windshield 102 and the rear glass 104 without defects may be manufactured and manufactured as in the prior art, and defective products may be repaired and manufactured.

In the present invention by repeating the above process while continuously moving the inspection apparatus 22 equipped with the PDP 108 to each chamber 12, 14, 16, 18, 20, continuous inspection Since the inspection speed is increased, productivity can be improved.

As described above, the present invention allows the plasma display panel in the semi-finished state, which is not completed as a final product, to be inspected for defects under the same environment as the finished product or the finished product PDP of the plasma display panel in the actual product. As a result, the yield of the plasma display panel is greatly improved.

In addition, in the conventional case, the PDP was not precisely inspected, and thus, in the case of the finished product in which the front glass and the rear glass were laminated, the defect rate reached several ten percent according to the manufacturer or model name, but there was a factor in the cost increase. Before bonding the glass and the back glass, the chamber constructed in the same environment as the finished product PDP is inspected for defects of the PDP. Therefore, the defect rate of the PDP is greatly reduced several hundred times than before, and the yield of the PDP is greatly improved. It is easy to approach the popularization by reducing the manufacturing cost by.

In addition, the present invention has the effect of improving the inspection speed is faster and the productivity is improved because the exhaust inspection for vacuum, high vacuum, gas injection, inspection and exhaust inspection to pull out the inspected PDP in a series of continuous processes.

Claims (13)

The semi-finished PDP front glass and rear glass operated inside the chamber composed of vacuum atmosphere and gas atmosphere such as finished product PDP, and then the power supply and inspection video signal are supplied to the target PDP. Inspection method for a semi-finished plasma display panel, characterized in that the inspection. The method of claim 1, wherein the exhaust chamber, the high vacuum chamber, the gas injection and inspection chamber, the high vacuum chamber, and the exhaust chamber are configured to continuously inspect whether the semi-finished PDP is defective. . A chamber capable of inspecting whether the semi-finished product PDP is defective by forming a vacuum atmosphere and a gas atmosphere such as a finished product PDP, a vacuum device for evacuating the chamber, a gas supply device for injecting gas required for inspection into the chamber, and An inspection system for a semi-finished plasma display panel consisting of a conveying device for carrying an inspection device to a chamber, and an inspection device for supplying power and an inspection signal to a semi-finished PDP. 4. The method of claim 3, further comprising: a plurality of chambers in which a vacuum atmosphere necessary for the inspection of the PDP is formed and the gas required for discharging is injected and exhausted; and the gate valve is opened when the inspection apparatus is transferred, and the inspection apparatus rests on the chamber. A gate valve for maintaining the airtightness between the chambers, a gate valve opening and closing means for opening and closing the gate valve, a PDP inspection device for inspecting the semi-finished product PDP under a vacuum atmosphere such as a finished product PDP, and a gas atmosphere, and a PDP inspection device for each chamber. And a transfer device for transporting the chamber into or out of the chamber. 5. A plurality of chambers (12), (14), (16) and (20) according to claim 3 or 4, wherein a plurality of chambers (12), (14), (16), (20), and the like are provided with a vacuum atmosphere for inspecting a PDP, and a gas for discharge is injected and exhausted; The gates 26, 28, 30 of the respective chambers 12, 14, 16, 18, 20 when the inspection apparatus 22 is transferred by the conveying apparatus 24 composed of a plurality of feeding rollers. (32) (34) (36) (38) (40) (42) is opened and the chambers 12, 14, 16, 18 and 20 are separated when the PDP inspection device 22 stops seating in the chamber. Gate valves 48, 50, 52, 54, 56 and 58, and the gate valves 48, 50, 52, 54, 56 and 58 to isolate Semi-finished PDP by opening and closing gate valve opening / closing means 60, 62, 64, 66, 68, 70, and semi-finished PDP in a vacuum atmosphere (100torr ~ 300torr) and gas atmosphere such as finished PDP. PDP inspection device 22 for inspecting whether there is a defect of the PDP inspection device 44, and the conveying device 24 for transporting the PDP inspection device 44 to the inside, outside or side of the chamber Inspection system of semi-finished plasma display panel characterized in that the configuration. ^{1 × 10 -1 torr ~ 1 ×} 10 to a vacuum device (74a) to obtain the proper degree of vacuum 4torr ~ 1 × 10 ^-6 torr ^- claim 3 or 4 in a vacuum atmosphere of 1 × 10 necessary to check the High vacuum for securing a vacuum degree of 1 × 10 ^-4 torr to 1 × 10 ^-6 torr by using an evacuation device 74a for the exhaust chamber 12 for securing the primary degree of vacuum of ^-3 torr and the vacuum device 74a. Inject the gas required for inspection under the vacuum atmosphere around the chamber 14 and 100torr ~ 300torr between the front glass and the rear glass of the chamber or semifinished product PDP 108 to form a gas atmosphere such as the finished product PDP to check whether the semifinished product PDP is defective or not. 1 × 10 ^-4 to prevent foreign substances or impurities from entering the gas injection and inspection chamber 16 before the gas injection and inspection chamber 16 to be inspected and the semi-finished PDP whose inspection has been completed are taken out of the inspection system 10. torr ~ 1 × 10 ^-6 torr with the vacuum chamber 18 to maintain the degree of vacuum, the semi-finished gum PDP Opening the gate valve 70 to be able to completely pull out of the system hayeoseo composed of an exhaust chamber 20 to create the same pressure with the atmosphere by releasing the vacuum semi-finished product inspection system of the PDP. 5. The inspection system for a semi-finished plasma display panel according to claim 3 or 4, wherein an ultraviolet lamp is provided inside the exhaust chamber and the high vacuum chamber, respectively. 5. The airtight packing according to claim 3 or 4, wherein the transparent tempered glass that can be connected to the inside of the chamber is placed on the upper part of the chamber, and the airtight packing is provided between the edge of the chamber and the transparent tempered glass. Inspection system of a semi-finished plasma display panel, characterized in that the installation. The PDP inspection apparatus 22 according to claim 3 or 4, wherein the PDP inspection apparatus 22 includes a backing member 102 on which the front glass 102 and the rear glass 104 overlap each other, the overlapping front glass 102 and the rear glass. PDP clamp 115 for clamping 104 to prevent flow, PDP socket 117 for supplying driving power and pattern inspection signal to PDP, and PDP socket 117 for supplying the driving power and pattern inspection signal. A PDP driving circuit array 113, a PDP driving circuit socket 11 to which the PDP driving signal array 113 is electrically connected, a pattern oscillator 114 for generating a PDP pattern signal, and an inspection apparatus 22 Inspection system for a semi-finished plasma display panel, characterized in that consisting of a power supply 112 for supplying power in a magnetic induction method or a brush contact method. The semi-finished plasma display panel according to claim 3 or 4, wherein the PDP driving circuit array 113 is configured to be molded for each module by using vacuum epoxy and to be detachable from the PDP driving circuit socket 11. Inspection system. Exhaust chamber 12a for introducing the inspection device, gas injection and inspection chamber 16a for inspecting the semi-finished product PDP in the vacuum atmosphere and gas atmosphere necessary for the inspection, and the PDP after the inspection can be pulled out. Vacuum devices 75a, 75b and 75c for maintaining the vacuum degree of the exhaust chamber 20a and the exhaust chambers 12a and 20a at 1 x 10 ^-4 torr to 1 x 10 ^-6 torr, and gas injection and The gas injection device 126a and gas cylinder 128a for supplying the gas required for inspection to the inspection chamber 16a, and the gates of the chambers 12a, 16a and 20a provided with transparent tempered glass can be opened and closed. An inspection system for a semi-finished plasma display panel composed of opening and closing means (60a) (64a) (66a) and (70a) having gate valves (48a) (52a) (54a) and (56a). One chamber 18c in which a vacuum atmosphere and a gas atmosphere of 100torr to 300torr required for inspection are formed and transparent tempered glass is installed, and the vacuum degree of the chamber 16c is 1 × 10 ^-4 torr to 1 × 10 ^-6 torr. The vacuum device 77 held at a low temperature, the gas supply device 126c and gas cylinder 128c for supplying an appropriate amount of gas to the chamber 18c for inspection, and the gate of the chamber 18c can be opened and closed. An inspection system for a semi-finished plasma display panel composed of opening and closing means (60b) and (62b) having gate valves (48b) and (50b). A transfer position detector 130 for detecting a transfer position of the inspection device 22 at the input of the controller 124, a gate valve open / close detector 132 for detecting an open / closed state of the gate valve, and a vacuum degree of the chamber A vacuum gauge 134 for sensing the pressure, a vacuum device 74 for maintaining an appropriate degree of vacuum in each of the chambers 12, 14, 16, and 18, and an inspection device 22 equipped with a semi-finished PDP 108. A gas supply device for supplying the gas necessary for the test to the conveying apparatus 24 for conveying the gas into the chamber, the conveying apparatus driver driver 136 for driving the conveying apparatus 24, and the gas injection and inspection chamber (chamber) ( 126, a pattern oscillator 114 for supplying a test pattern signal to the PDP, a PDP drive circuit array 110 for supplying a drive signal to the PDP, an exhaust chamber 12, 20 and a high vacuum chamber 14 ( 18) the ultraviolet lamps (76) and (78) to help vacuum, and the power supply unit (112) for supplying power in a magnetic induction or brush contact method. Semi-finished product inspection system of the plasma display panel.