KR20010076579A - Gap Sensor and Align Camera in united one body of Exposure Device - Google Patents

Abstract

PURPOSE: A light exposure comprising a gap sensor and an align camera in a body is provided to down a fabrication cost by simplifying every kinds of circuits and mechanical devices and an input/output device by embodying the gap sensor and the align camera in a body. CONSTITUTION: A pattern is printed on a circular plate(1), and a target(3) coated with a photosensitive material is located on a lower part of the circular plate. A laser light source irradiating a laser light is installed at a part having an angle with the circular plate. And the first lens(L1) having the same angle as the installation angle of the laser light source is installed on a lower part of the laser light source, and converges the light irradiated from the laser light source between the circular plate and the target. The second lens(L2) making an image by magnifying the light reflected from the circular plate and the target is installed on the opposite part of the first lens, and a reflection plate(20) reflecting the image made by the second lens is installed on an upper part of the second lens. The third and the fourth lens(L3,L4) are installed vertically to the circular plate on a center of the circular plate, and a CCD camera(40) detecting the light reflected from the reflection plate and an align mark is installed on the upper part of the third and the fourth lens. A coaxial illumination(30) illuminating the align mark is installed on a lower part of the CCD camera, and a reflection plane(31) is formed on one side of the coaxial illumination.

Description

Gap Sensor and Align Camera in united one body of Exposure Device}

According to the present invention, the gap measuring device and the alignment device, which are the core parts of the exposure machine, are integrally implemented to use the driving means of the gap measuring device and the alignment device as one, thereby simplifying the device and reducing the manufacturing cost, as well as using the dust free room. The present invention relates to an exposure apparatus in which a gap measuring device and an alignment device are integrated to reduce space and reduce maintenance costs and reduce device maintenance costs.

Gap measuring devices and aligning devices are the key components of proximity exposure devices widely used in the production of display devices such as PDPs, TV shadow masks, LCDs and PCBs.

In general, the exposure machine places the transparent original plate 1 on which the pattern P is printed and the object 3 coated with the photosensitive material on the lower side of the original plate 1, as shown in FIG. It is an apparatus which obtains the same pattern P as the original board 1 to the object 3 by irradiating light. That is, the exposure machine is a black and white camera which photographs the shadow of the original (subject) 1 on the object (film) 3.

Therefore, in order for the pattern P produced | generated to the object 3 to be the same as the original board 1, the object 3 and the original board 1 are so closely attached that it is good. The closer it is, the more clearly the shadow of the original pattern (P) appears on the object. However, in order to protect the expensive disk (1), the distance between the disk (1) and the object (3) must be raised. In this case, a gap measuring device is used to accurately measure and control the distance between the disc 1 and the object 3, and an alignment device is used to accurately match the object 3 and the disc 1.

The alignment device uses the structure of a general digital camera as shown in FIG.

On the other hand, the gap measuring device does not have a dominant method for use in all exposure machines, but uses the optical triangulation method as shown in FIG.

As shown in the drawing, the optical triangulation method causes the disc 1 and the object 3 to be obliquely irradiated from the laser source 7 to reach the detector 9 so as to reach the detector 9. The gap is measured by checking the distance of the laser spot S reaching 9).

The distance a of the spot represents the thickness of the object 3, the distance b represents the distance between the original 1 and the object 3, and the distance c represents the thickness of the original 1.

In the figure, L1 causes light generated by the laser source 7 to be collected between the disc 1 and the object 3. How small the gap can be measured depends on how small the laser light forms between the disc 1 and the object 3 by this lens L1.

In the drawing, L2 is formed by magnifying the laser light reflected from the original plate 1 and the object 3 onto the detector 9. It also serves as a function of correcting the diffuse reflection of the laser in the original 1 and the object 3.

However, the conventional exposure apparatus configured as described above has a gap measuring device and an alignment device separately configured to separately implement a circuit and a mechanical device for driving the gap measuring device and the alignment device. Because they accept each, MUX (connecting input and output channels to multiple peripheral devices and using them separately) according to the increase in the number of inputs is required, or other additional devices are required, resulting in a high manufacturing cost. .

In addition, as the gap measuring device and the aligning device are respectively installed, a large amount of space of a clean room is occupied, and thus there is a problem of high maintenance cost of the clean room.

In addition, there is a problem that the gap measuring device and the aligning device is mounted independently, so that the number of parts increases, the probability of failure and the maintenance cost accordingly increases.

The present invention has been made to solve the above problems, the object of the present invention is to implement the gap measuring device and the alignment device, which is the main component of the exposure machine integrally, various circuits and mechanical devices, and input and output devices simply In order to reduce the manufacturing cost, and also to narrow the space occupying the dust-free chamber to reduce the dust-free space, a gap measuring device and an alignment apparatus for reducing the dust-free maintenance cost are provided.

1 is a principle diagram of an exposure machine showing the principle of a general exposure machine,

2 is a configuration diagram illustrating an arrangement of a general alignment device;

3 is a measurement principle diagram showing the principle of measuring the distance between the disc and the object by the optical triangulation method according to the prior art,

4 is an optical system showing a state in which a gap measuring device and an alignment device are integrally formed according to an embodiment of the present invention;

Fig. 5 is an image diagram showing a state in which laser light is detected by a CCD camera during gap measurement.

6 is an image diagram showing a state in which an alignment mark is detected by the CCD camera at the time of alignment.

<Explanation of symbols for the main parts of the drawings>

1: disc 3: object

10: laser light source 20: reflector

30: coaxial light 40: CCD camera

L1, L2, L3, L3: First 1,2,3,4 Lenses

An exposure apparatus in which the gap measuring device and the aligning device according to the present invention, which are made to achieve the above object, are integrally provided with a disc at a predetermined angle to irradiate light, and below the light source, the same angle as the light source. A first lens installed so as to form a predetermined angle between the disc and the object; and a second lens configured to form a predetermined angle with the disc to enlarge and image light reflected from the disc and the object. A lens, a reflecting plate installed on the image side of the second lens at the same angle as the installation angle of the second lens and reflecting light magnified by the second lens to form an image; 3rd and 4th lens which enlarges and aligns the alignment mark of an object, and is installed in the image side of the said 4th lens, and illuminates an alignment mark at the time of alignment, A coaxial light for reflecting light formed on the reflecting plate at the time of measurement, and a CCD installed on an image side of the fourth lens to detect light reflected by the reflecting plate and an enlarged alignment mark through the third and fourth lenses It characterized in that it comprises a camera.

Hereinafter, exemplary embodiments of the present invention will be described with reference to the accompanying drawings.

FIG. 4 is an optical system showing a state in which a gap measuring device and an alignment device are integrally formed, and FIG. 5 is an image view showing a state in which laser light is detected by a CCD camera during gap measurement. 6 is an image diagram showing a state in which an alignment mark is detected by a CCD camera at the time of alignment.

As shown in the drawing, there is an original plate 1 on which a pattern is printed, and an object 3 coated with a photosensitive material is positioned below the original plate 1, and forms a predetermined angle with the original plate 1. A portion is provided with a laser light source 10 for irradiating laser light, and below the laser light source 10 collects the light irradiated from the laser light source 10 between the disc 1 and the object 3. The first lens L1 is installed to have the same angle as the installation angle of the laser light source 10.

On the opposite side of the first lens (L1) is provided a second lens (L2) for enlarging and imaging the light reflected from the original plate (1) and the object (3), the second lens (L2) On the image side, there is a reflecting plate 20 installed at the same angle as the installation angle of the second lens L2 and reflecting the light formed by being enlarged by the second lens L2.

At the center of the disc 1, third and fourth lenses L3 and L4 are provided perpendicularly to the disc 1 to enlarge and align the alignment marks of the disc 1 and the object 3. On the image side of the third and fourth lenses L3 and L4, the CCD camera 40 detects the light reflected by the reflector 20 and the alignment mark passing through the third and fourth lenses L3 and L4. ) Is installed.

A coaxial light 30 is provided below the CCD camera 40 to illuminate the alignment mark, and on one side of the coaxial light 30, a reflective surface on which light reflected by the reflector 20 is formed ( 31) is formed at the same angle as the inclination angle of the reflecting plate 20.

In the drawings, the dashed-dotted display portion represents the gap measuring device portion, and the dashed-dotted line display portion represents the alignment apparatus portion.

Reference numeral 50 denotes a driving circuit for driving the CCD camera 40.

Next, the operation principle of the exposure apparatus in which the gap measuring device and the alignment device according to the exemplary embodiment of the present invention configured as described above are integrated will be described.

First, when the distance between the disc 1 and the object 3 is measured, when the coaxial light 30 is turned off and the laser light source 10 is turned on, the light irradiated by the laser light source 10 is the first lens. Light collected on the upper surface of the original plate 1 and the object 3 through the L1, and the light collected on the original plate 1 and the object 3 is reflected and enlarged through the second lens L2 to reflect the plate 20. The light formed on the reflective plate 20 and enlarged and formed on the reflecting plate 20 is formed on the reflecting surface 31 of the coaxial light 30, and the light formed on the reflecting surface 31 of the coaxial light 30 is the CCD camera 40. Is detected.

On the other hand, when the original 1 and the object 3 are aligned, the laser light source 10 is turned off, and the coaxial illumination 30 is turned on, so that the alignment marks displayed on the original 1 and the object 3 ( M) is enlarged through the third and fourth lenses L3 and L4, and the alignment mark M passed through the coaxial light 30 and the coaxial light 30 is detected by the CCD camera 40. .

As described above, when the CCD camera 40 turns on the laser light source 10 and turns off the coaxial light 30, the CCD camera 40 serves as a detector of a gap measuring device, and conversely, the laser light source 10 is turned off and the coaxial light 30 is turned off. When the power is turned on, it acts as an alignment device.

According to the exposure apparatus integrated with the gap measuring device and the aligning device according to the present invention configured as described above, it is possible to measure and align the distance between the original and the object by using a single CCD camera, so that not only the driving circuit and the mechanical device can be used. In addition, it is possible to reduce the manufacturing cost by reducing additional manufacturing costs by simplifying additional devices according to the input / output device and reducing the dust-free maintenance cost.

Claims (4)

In the exposure plate which obtains the same pattern as the original on the object by placing a transparent plate with a printed pattern and the object coated with a photosensitive material on the back of the plate and then irradiating with light, A light source positioned at a predetermined angle with the disc to irradiate light; A first lens positioned below the light source at the same angle as the light source to collect light emitted from the light source between the original plate and the object; A second lens positioned to form a predetermined angle with the disc to enlarge and image light reflected from the disc and an object; A reflecting plate positioned on the image side of the second lens at the same angle as the second lens and reflecting light magnified by the second lens to form an image; Third and fourth lenses positioned perpendicular to the disc to enlarge and align the alignment marks of the disc and the object; Coaxial illumination installed at an image side of the fourth lens to illuminate an alignment mark at the time of alignment, and to reflect light formed in the reflector at the time of gap measurement; And a CCD camera mounted on an image side of the fourth lens to detect light reflected by the reflector and an alignment mark enlarged through the third and fourth lenses. Integrated exposure machine. The method of claim 1, The coaxial illumination is an exposure apparatus in which the gap measuring device and the aligning device are integrated, characterized in that the reflecting surface is formed at an angle parallel to the reflecting plate to form light through the reflecting plate on one side. The method of claim 1, And the light source is powered on when the distance between the disc and the object is measured. The method of claim 2, And the coaxial light is turned on at the time of alignment between the disc and the object, wherein the gap measuring device and the alignment device are integrated.