KR20010059229A - Device For Controling The Pressure In The Process Chamber - Google Patents

Device For Controling The Pressure In The Process Chamber Download PDF

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Publication number
KR20010059229A
KR20010059229A KR1019990066619A KR19990066619A KR20010059229A KR 20010059229 A KR20010059229 A KR 20010059229A KR 1019990066619 A KR1019990066619 A KR 1019990066619A KR 19990066619 A KR19990066619 A KR 19990066619A KR 20010059229 A KR20010059229 A KR 20010059229A
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South Korea
Prior art keywords
hole
process chamber
plate
rotating
rotating plate
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KR1019990066619A
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Korean (ko)
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KR100574485B1 (en
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박정우
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박종섭
주식회사 하이닉스반도체
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Priority to KR1019990066619A priority Critical patent/KR100574485B1/en
Publication of KR20010059229A publication Critical patent/KR20010059229A/en
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Publication of KR100574485B1 publication Critical patent/KR100574485B1/en

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K13/00—Other constructional types of cut-off apparatus; Arrangements for cutting-off
    • F16K13/02—Other constructional types of cut-off apparatus; Arrangements for cutting-off with both sealing faces shaped as small segments of a cylinder and the moving member pivotally mounted
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K47/00—Means in valves for absorbing fluid energy
    • F16K47/02—Means in valves for absorbing fluid energy for preventing water-hammer or noise

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
  • Control Of Fluid Pressure (AREA)

Abstract

PURPOSE: A pressure controller in a process chamber is provided to efficiently control amount of fluid moving in the process chamber, and to reduce foreign materials and vibration. CONSTITUTION: A process chamber(20) comprises a space unit(22) mounted in the process chamber; a fix plate(30) forming a fixing movable hole(36) moving the fluid up and down; a rotating plate(6) forming a rotation movable hole(64) to contain specific size and install position of the fix movable hole; and a motor(40) rotating the rotating plate by combining a screw unit(44) to the screw groove. The screw unit is formed in an end by being inserted to an insert hole(62) of the rotating plate and a through hole(34) of the fixing plate. An outer sealer(32) is mounted on a peripheral face of the fixing plate for closing. An opening groove unit(54) is installed between an upper face of the fixing plate and a lower face of the rotating plate by having a larger size than the fix movable hole and the rotation movable hole. A closing sealer(50) forming the opening groove unit closes a gap between the fixing plate and the rotating plate.

Description

프로세스 챔버내의 압력조절장치 { Device For Controling The Pressure In The Process Chamber }Device For Controling The Pressure In The Process Chamber

본 발명은 프로세스 챔버내에서 유체 이동을 조절하는 밸브장치에 관한 것으로서, 특히, 프로세스 챔버내에 모터의 회전축에 나사결합되어 회전하고, 일정한 간격으로 다수의 회전이동공이 형성된 회전판을 형성하여, 이 회전판의 회전이동공에 동일한 크기 및 간격을 갖는 고정이동공을 갖는 고정판을 시일링부재를 개재시킨 상태에서 서로 겹쳐서 회전시키므로 프로세스 챔버내를 이동하는 유체의 량을 적절하게 조절하도록 하는 반응 챔버내의 압력조절장치에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a valve device for controlling fluid movement in a process chamber. In particular, the invention relates to a valve device that rotates by being screwed to a rotating shaft of a motor in a process chamber and forms a rotating plate having a plurality of rotating holes formed at regular intervals. Pressure regulating device in the reaction chamber to appropriately control the amount of fluid moving in the process chamber by rotating the fixed plate having a fixed moving hole having the same size and spacing in the rotary movement hole overlapping each other with the sealing member interposed therebetween It is about.

일반적으로, 반도체소자를 제조하는 데 있어 사용되는 가스를 이동시켜서 반응시키도록 하는 프로세스챔버 내에서 이동하는 가스등과 같은 유체위 이동량을 조절하기 위하여 모터를 구동하여 회전축을 시계추 방식으로 흔들면서 개폐하는 펜들럼방식 혹은 모터를 회전시켜 가이드핸들을 수평으로 이동하면서 유체를 이동시키는 방식을 주로 사용하였다.In general, pens for opening and closing the rotating shaft by clockwise rotation by driving a motor to control the amount of movement on the fluid, such as gas moving in the process chamber to move and react the gas used to manufacture the semiconductor device to react. The rum method or the motor was used to move the fluid while moving the guide handle horizontally.

도 1은 종래의 프로세스 챔버내에서 유체의 흐름을 개폐하는 장치의 일실시예의 방식을 보인 도면으로서, 일실시예의 구성을 살펴 보면, 직육면체 형상의 공간을 갖고, 상하로 관통되는 이동공(8)을 갖는 하우징(1)과, 상기 하우징(1)내에서 회전하는 모터(2)와; 상기 모터(2)의 회전축(3)에 고정되는 안내돌기(4)에 가이드홈(6)이 삽설되어 상기 하우징(1)의 이동공(8)을 개폐하도록 오링(7)을 갖는 가이드밸브(5)로 구성된다.1 is a view showing an embodiment of an apparatus for opening and closing a flow of a fluid in a conventional process chamber. Referring to the configuration of the embodiment, the moving hole 8 having a rectangular parallelepiped space and penetrating up and down is shown. A housing (1) and a motor (2) rotating in the housing (1); A guide valve having an O-ring 7 to insert the guide groove 6 into the guide protrusion 4 fixed to the rotation shaft 3 of the motor 2 to open and close the moving hole 8 of the housing 1. 5) consists of.

상기 구성은 모터(2)가 회전하면서 원형으로 회전축(3)이 회전하면, 안내돌기(4)가 가이드홈(6)을 따라 이동함에 따라 가이드밸브(5)가 하우징(1)의 홈부를 따라 이동하면서 이동공(8)을 개방하거나 밀폐하면서 유체의 이동량을 조절하게 된다.According to the above configuration, when the rotating shaft 3 rotates in a circular shape while the motor 2 rotates, the guide valve 5 moves along the groove of the housing 1 as the guide protrusion 4 moves along the guide groove 6. While moving, the moving hole 8 is opened or closed to adjust the amount of movement of the fluid.

그리고, 도 2는 종래의 프로세스 챔버내에서 유체의 흐름을 개폐하는 장치의 다른 실시예의 방식을 보인 도면으로서, 다른 실시예의 구성은, 원뿔 형상을 갖고, 상,하로 관통하는 이동공(18)을 갖는 하우징(10)과; 상기 하우징(10)의 내붸 설치되어 회전하는 동력을 발생하는 모터(15)와; 상기 모터(15)의 회전축(16)에 연결되어 시계추 운동을 하면서 하우징(10)의 이동공(18)을 개폐하는 오링(14)을 갖는 회전밸브(12)로 구성된다.2 is a view showing a method of another embodiment of the device for opening and closing a fluid flow in a conventional process chamber, the configuration of another embodiment has a conical shape, the moving hole 18 penetrating up and down A housing 10 having; A motor 15 installed inside the housing 10 to generate rotating power; It is composed of a rotary valve 12 having an O-ring 14 connected to the rotary shaft 16 of the motor 15 to open and close the moving hole 18 of the housing 10 while performing a clockwise movement.

상기한 구성은 모터(15)가 회전하여 회전밸브(12)가 하우징(10)의 이동공 (18)을 차단하거나 개방하면서, 프로세스 챔버로 공급되는 유체의 이동량을 제어하게 된다.In the above configuration, the motor 15 rotates to control the moving amount of the fluid supplied to the process chamber while the rotary valve 12 blocks or opens the moving hole 18 of the housing 10.

그런데, 상기한 바와 같이, 종래의 구성은 가이드밸브(5) 혹은 회전밸브(12)를 정확하고 균일하게 회전시키는 것이 어려우므로 유체의 흐름이 균일하지 않을 뿐만아니라 밸브의 개폐시에 동작하는 거리가 길어서 이물질의 발생이 많으며, 밸브의 동작시 진동이 심한 문제점을 지니고 있었다.However, as described above, in the conventional configuration, it is difficult to rotate the guide valve 5 or the rotary valve 12 accurately and uniformly, so that the flow of the fluid is not uniform and the distance to operate when the valve is opened or closed. There is a lot of foreign matters because of the long, the vibration had a serious problem during the operation of the valve.

본 발명의 목적은 이러한 점을 감아하여 안출한 것으로서, 프로세스 챔버내에 모터의 회전축에 나사결합되어 회전하고, 일정한 간격으로 다수의 회전이동공이 형성된 회전판을 형성하여, 이 회전판의 회전이동공에 동일한 크기 및 간격을 갖는 고정이동공을 형성하는 고정판을 시일링부재를 개재시킨 상태에서 서로 겹쳐서 회전시키므로 프로세스 챔버내를 이동하는 유체의 량을 적절하게 조절하는 것이 목적이다.The object of the present invention is to wind up the above point, which is screwed to the rotating shaft of the motor to rotate in the process chamber, to form a rotating plate formed with a plurality of rotating holes at regular intervals, the same size to the rotating hole of the rotating plate And it is the purpose to appropriately control the amount of fluid to move in the process chamber because the rotation of the fixing plate to form a fixed moving hole having a gap overlapping each other in the state of interposing the sealing member.

도 1은 종래의 프로세스 챔버내에서 유체의 흐름을 개폐하는 장치의 일실시예의 방식을 보인 도면이고,1 is a view showing an embodiment of an apparatus for opening and closing a flow of a fluid in a conventional process chamber,

도 2는 종래의 프로세스 챔버내에서 유체의 흐름을 개폐하는 장치의 다른 실시예의 방식을 보인 도면이며,2 is a view showing another embodiment of the device for opening and closing the flow of fluid in a conventional process chamber,

도 3은 본 발명에 따른 프로세스 챔버내에 설치된 압력조절장치의 구성의 분해 사시도이고,Figure 3 is an exploded perspective view of the configuration of the pressure regulator installed in the process chamber according to the present invention,

도 4는 본 발명에 따른 압력조절장치의 평면 상태를 보인 도면이고,4 is a view showing a planar state of the pressure regulator according to the present invention,

도 5는 본 발명에 따른 압력조절장치의 사용 상태를 보인 도면이다.5 is a view showing a state of use of the pressure regulator according to the present invention.

*도면의 주요 부분에 대한 부호의 설명** Description of the symbols for the main parts of the drawings *

20 : 프로세스챔버 22 : 공간부20: process chamber 22: space

30 : 고정판 32 : 외부시일러30: fixed plate 32: outer sealer

34 : 통공 36 : 고정이동공34: through hole 36: fixed movement hole

40 : 모터 42 : 회전축40: motor 42: rotating shaft

44 : 나사부 50 : 밀봉시일러44: thread 50: sealing sealer

52 : 끼움공 54 : 개방홈부52: fitting hole 54: opening groove

60 : 회전판 62 : 나사홈60: rotating plate 62: screw groove

64 : 회전이동공64: rotation movement hole

이러한 목적은 내부에 공간부를 갖는 프로세스 챔버에서, 상기 프로세스 챔버내에 고정되어 중심부에 상,하로 관통된 통공을 형성하고, 상,하로 유체를 이동하도록 하는 고정이동공을 형성하는 고정판과; 상기 고정판의 상부면에 설치되어 중심부에 나사홈을 형성하고, 상기 고정이동공의 크기와 설치위치를 갖도록 회전이동공을 형성하는 회전판과; 상기 고정판의 통공 및 회전판의 삽입공에 삽입되어 끝단에 형성된 나사부가 회전판의 나사홈에 체결되어 회전판을 일정각도로 회전시키는 모터로 구성된 프로세스 챔버내의 압력조절장치를 제공함으로써 달성된다.The object of the present invention is a process plate having a space therein, the fixing plate which is fixed in the process chamber to form a through hole penetrated up and down in the center, and a fixed movement hole for moving the fluid up and down; A rotating plate installed on an upper surface of the fixing plate to form a screw groove in the center thereof, and a rotating plate forming a rotating movement hole to have a size and an installation position of the fixed movement hole; It is achieved by providing a pressure regulating device in a process chamber composed of a motor which is inserted into the through hole of the fixed plate and the insertion hole of the rotating plate and is formed at the end of the screw plate of the rotating plate to rotate the rotating plate at an angle.

이하, 첨부한 도면을 참조하여 본 발명의 바람직한 일실시예의 구성에 대해 상세하게 설명하도록 한다.Hereinafter, with reference to the accompanying drawings will be described in detail the configuration of a preferred embodiment of the present invention.

본 발명의 구성을 살펴 보면, 내부에 공간부(22)를 갖는 프로세스 챔버(20)에서,상기 프로세스 챔버(20)내에 고정되어 중심부에 상,하로 관통된 통공(34)을 형성하고, 상,하로 유체를 이동하도록 하는 고정이동공(36)을 형성하는 고정판(30)과; 상기 고정판(30)의 상부면에 설치되어 중심부에 나사홈(62)을 형성하고, 상기 고정이동공(36)의 크기와 설치위치를 갖도록 회전이동공(64))을 형성하는 회전판 (60)과; 상기 고정판(30)의 통공(34) 및 회전판(60)의 삽입공(62)에 삽입되어 끝단에 형성된 나사부(44)가 회전판(60)의 나사홈(62)에 체결되어 회전판(60)을 일정각도로 회전시키는 모터(40)로 구성된다.Looking at the configuration of the present invention, in the process chamber 20 having a space portion 22 therein, is formed in the process chamber 20 to form a through hole 34 penetrated up and down in the center, A fixed plate 30 forming a fixed moving hole 36 to move the fluid downward; Rotating plate 60 is formed on the upper surface of the fixing plate 30 to form a screw groove 62 in the center, and to form a rotary movement hole 64 to have the size and the installation position of the fixed movement hole 36) and; The threaded portion 44 formed at the end by being inserted into the through hole 34 of the fixing plate 30 and the insertion hole 62 of the rotating plate 60 is fastened to the screw groove 62 of the rotating plate 60 to thereby rotate the rotating plate 60. It consists of a motor 40 for rotating at a predetermined angle.

그리고, 상기 고정판(30)의 외주면에는 밀봉을 위한 외부시일러(32)가 형성된다.In addition, an outer sealer 32 for sealing is formed on an outer circumferential surface of the fixing plate 30.

또한, 상기 고정판(30)의 상부면과 상기 회전판(60)의 저면 사이에는 고정이동공(36)과 회전이동공(64)의 크기 보다 약간 큰 개방홈부(54)를 형성하는 밀봉시일러(50)를 설치하여 고정판(30)과 회전판(60)사이의 밀봉을 수행하도록 한다.In addition, between the upper surface of the fixed plate 30 and the bottom surface of the rotating plate 60 sealing sealer to form an opening groove 54 slightly larger than the size of the fixed moving hole 36 and the rotary moving hole 64 ( 50) to seal between the fixed plate 30 and the rotating plate (60).

그리고, 상기 고정판(30)의 고정이동공(36)과 회전판(60)의 회전이동공(64)의 갯수를 적절하게 조절하도록 하고, 대략적으로 이등변 삼각형상으로 형성하여 꼭지점이 중심으로 향하도록 한다.In addition, the number of the fixed moving hole 36 of the fixed plate 30 and the rotary moving hole 64 of the rotating plate 60 is appropriately adjusted, and is formed in an approximately isosceles triangle shape so that the vertices point toward the center. .

이하, 첨부도면에 의거하여 본 발명의 작용 및 효과를 살펴 보도록 한다.Hereinafter, the operation and effects of the present invention will be described based on the accompanying drawings.

도 5에 도시된 바와 같이, 본 발명의 장치가 프로세스 챔버(20)의 내부에 설치된 상태에서 상부로 부터 가스등과 같은 유체가 이동하여 오는 경우, 하부로 이동하는 유체의 량을 조절하기 위하여 모터(40)를 구동한다.As shown in FIG. 5, when the apparatus of the present invention is installed inside the process chamber 20, when a fluid such as a gas comes from the top, a motor (for adjusting the amount of fluid moving downward) 40).

상기 모터(40)의 회전축(42)에 고정된 회전판(60)이 프로세스 챔버(20)의 내벽면에결합된 고정판(30)에 대하여 소정의 각도로 회전하여 고정판(30)의 고정이동공(36)에 대하여 회전판(60)의 회전이동공(64)이 서로 어긋나면서 유체의 이동경로를 간격을 제어하여 유체의 공급량을 조절하게 된다.The rotating plate 60 fixed to the rotating shaft 42 of the motor 40 rotates at a predetermined angle with respect to the fixed plate 30 coupled to the inner wall surface of the process chamber 20 to fix the moving hole of the fixed plate 30 ( 36, the rotational movement holes 64 of the rotating plate 60 are shifted from each other to control the distance of the fluid movement path to adjust the supply amount of the fluid.

한편, 상기 외부시일러(32)와 밀봉시일러(50)에 의하여 회전판(60)과 고정판 (30) 사이가 밀봉되므로 유체가 회정이동공(64)과 고정이동공(36)의 간극사이로 이동하는 것을 방지하게 된다.On the other hand, since the outer seal 32 and the sealing sealer 50 is sealed between the rotating plate 60 and the fixed plate 30, the fluid is moved between the gap between the rotational movement hole 64 and the fixed movement hole 36. To prevent it.

상기 모터(40)은 저속으로 회전하는 저속모터를 사용하도록 하고, 모터(40)의 회전 각도는 고정판(30)의 고정이동공(36)과 회전판(60)의 회전이동공(64)의 크기 및 간극을 고려하여 정하도록 한다.The motor 40 is to use a low-speed motor to rotate at a low speed, the rotation angle of the motor 40 is the size of the fixed moving hole 36 of the fixed plate 30 and the rotary moving hole 64 of the rotating plate 60 And the gap is considered.

상기 모터(40)가 일정각도 회전한 후에 복귀하면서 간극을 조절하거나 혹은 계속하여 일방향으로 회전하여 유체의 공급량을 조절하도록 시스템을 구성하는 것이 가능하다.It is possible to configure the system to adjust the gap while the motor 40 is rotated by an angle and then adjust the gap or continue to rotate in one direction.

상기한 바와 같이, 본 발명에 따른 프로세스 챔버내의 압력조절장치를 이용하게 되면, 프로세스 챔버내에 모터의 회전축에 나사결합되어 회전하고, 일정한 간격으로 다수의 회전이동공이 형성된 회전판을 형성하여, 이 회전판의 회전이동공에 동일한 크기 및 간격을 갖는 고정이동공을 형성하는 고정판을 시일링부재를 개재시킨 상태에서 서로 겹쳐서 회전시키므로 프로세스 챔버내를 이동하는 유체의 량을 효율적으로 조절하는 매우 유용하고 효과적인 발명이다.As described above, when the pressure regulating device in the process chamber according to the present invention is used, the rotating plate is screwed to the rotating shaft of the motor in the process chamber, and forms a rotating plate having a plurality of rotating holes formed at regular intervals. It is a very useful and effective invention to efficiently control the amount of fluid moving in the process chamber by rotating the fixed plates forming the fixed movement hole having the same size and spacing in the rotation movement hole overlapping each other with the sealing member interposed therebetween. .

또한, 밸브의 역할을 하는 회전판이 회전하므로 장치의 동작 거리가 없어지게되어 이물질의 발생을 줄여주며, 회전판이 회전하므로 진동의 발생이 적은 장점을 지닌 발명이다.In addition, the rotary plate that serves as a valve rotates to reduce the operation distance of the device to reduce the occurrence of foreign matter, the rotation plate rotates is an invention having the advantage of less generation of vibration.

Claims (3)

내부에 공간부를 갖는 프로세스 챔버에 있어서,In a process chamber having a space therein, 상기 프로세스 챔버내에 고정되어 중심부에 상,하로 관통된 통공을 형성하고, 상,하로 유체를 이동하도록 하는 고정이동공을 형성하는 고정판과;A fixing plate fixed in the process chamber to form a through hole penetrating up and down at a center thereof, and a fixed moving hole for moving a fluid up and down; 상기 고정판의 상부면에 설치되어 중심부에 나사홈을 형성하고, 상기 고정이동공의 크기와 설치위치를 갖도록 회전이동공을 형성하는 회전판과;A rotating plate installed on an upper surface of the fixing plate to form a screw groove in the center thereof, and a rotating plate forming a rotating movement hole to have a size and an installation position of the fixed movement hole; 상기 고정판의 통공 및 회전판의 삽입공에 삽입되어 끝단에 형성된 나사부가 회전판의 나사홈에 체결되어 회전판을 일정각도로 회전시키는 모터로 구성된 것을 특징으로 하는 프로세스 챔버내의 압력조절장치.And a screw part formed at an end of the fixing plate through the insertion hole of the fixing plate and the insertion hole of the rotating plate is fastened to the screw groove of the rotating plate to rotate the rotating plate at a predetermined angle. 제 1 항에 있어서, 상기 고정판의 외주면에는 밀봉을 위한 외부시일러가 형성되는 것을 특징으로 하는 프로세스 챔버내의 압력조절장치.The pressure regulator of claim 1, wherein an outer sealer for sealing is formed on an outer circumferential surface of the fixing plate. 제 1 항에 있어서, 상기 고정판의 상부면과 상기 회전판의 저면 사이에는 고정이동공과 회전이동공의 크기 보다 약간 큰 개방홈부를 형성하는 밀봉시일러를 설치하는 것을 특징으로 하는 프로세스 챔버내의 압력조절장치.The pressure regulator of the process chamber of claim 1, wherein a sealing sealer is formed between an upper surface of the fixed plate and a bottom surface of the rotating plate to form an open groove part slightly larger than the size of the fixed moving hole and the rotating moving hole. .
KR1019990066619A 1999-12-30 1999-12-30 Device For Controling The Pressure In The Process Chamber KR100574485B1 (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100669517B1 (en) * 2000-03-24 2007-02-28 김영생 Valve
KR101306848B1 (en) * 2011-12-20 2013-09-10 한국항공우주연구원 flow-area variable unit and fluid pulsator for simulating vibration environment and of including the unit

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Publication number Priority date Publication date Assignee Title
JPS6415581A (en) * 1987-07-08 1989-01-19 Matsushita Electric Ind Co Ltd Motor-operated valve
CA2053948A1 (en) * 1990-11-14 1992-05-15 Kenn S. Bates Acoustic adiabatic liquid quantity sensor
JPH06281023A (en) * 1993-03-29 1994-10-07 Inax Corp Disk valve
JP2882271B2 (en) * 1994-02-15 1999-04-12 株式会社イナックス Valve with disc valve

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100669517B1 (en) * 2000-03-24 2007-02-28 김영생 Valve
KR101306848B1 (en) * 2011-12-20 2013-09-10 한국항공우주연구원 flow-area variable unit and fluid pulsator for simulating vibration environment and of including the unit

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