KR20010054658A - Method for controlling a burn-in test system - Google Patents

Abstract

PURPOSE: A burn-in test system managing method is provided to restrain the increase in the unnecessary movement of an operator and to utilize the entire work space effectively. CONSTITUTION: A burn-in test system managing method comprises the steps of: receiving equipment operation data including the present state of the operation of MBT chambers(Monitoring Burn-In Test chambers) and sorters(S1); after computing processing data by processing the equipment operation data, put the processing data into a database(S2); and downloading the processing date into a monitoring PC(Personal Computer) linked to the MBT chambers and sorters respectively(S3).

Description

Method for controlling a burn-in test system

The present invention relates to a burn-in test system management method, and more specifically, to "monitoring burn-in test chambers (MBT chamber) (hereinafter referred to as MBT chamber)", "sorters" By connecting the "monitoring PC", the server, etc. online, the operation of the "MBT chambers" and the linkage of the "MBT chambers" with the "sorters" are automatically managed through the server, thereby eliminating the need for the operator. The present invention relates to a burn-in test system management method that can suppress an increase in the work flow.

In general, most of the semiconductor devices in which the assembling process is completed have the highest probability of a defect occurring in 1000 hours, and the likelihood of the failure occurring after 1000 hours is slim.

For this reason, in the conventional semiconductor production line, by applying electrical and thermal stress to the semiconductor device for which the assembly process is completed for a long time and screening the initial defectiveness in advance, the reliability of the finally shipped product is maintained above a certain level.

Such an initial defective screen process of a semiconductor device is generally referred to as a 'semiconductor device burn-in test process' in a conventional production line. In order to proceed well with this 'semiconductor device burn-in test process', a burn-in test system with appropriate functions should be provided.

Conventional burn-in test systems typically consist of a combination of MBT chambers and Sorters that sort semiconductor devices according to the burn-in test results of these MBT chambers.

When a series of burn-in test processes are performed by the conventional burn-in test system, the operator who manages the MBT chamber checks the operation status of the MBT chamber from time to time, and records the check result on the status board. do.

In addition, the operator who manages the shooter visits the room where the MBT chambers are located, checks the individual MBT chambers, returns to the room where the shooter is placed, and assigns the shooter to be associated with the MBT chambers. Proceed.

Subsequently, the semiconductor device to be tested is classified as good or bad according to the operation of the MBT chambers and the shooters, and then undergoes the next process.

However, there are some significant problems in operating such a conventional burn-in test system.

As described above, when the conventional burn-in test process is performed, the operator who manages the MBT chamber checks the operation status of the MBT chamber from time to time and proceeds to record the check result on the status board. In this case, the worker has to travel between the MBT chamber and the status board from time to time, so that the overall working route is forced to bear the problem.

At this time, since the operation status of the MBT chambers recorded by the operator on the status board is practically very brief, when the conventional burn-in test process is performed, the operator can grasp the detailed operation status of the entire MBT chambers in real time. As a result, the operator is not able to flexibly respond to abnormalities in the MBT chambers that may have occurred.

Moreover, in this conventional case, the worker must necessarily have additional space for placing the status plate on a part of the production line, so that the worker is forced to accept the problem that overall utilization of the work space is poor. do.

On the other hand, as described above, when the conventional burn-in test process is performed, the operator who manages the shooter visits the room where the MBT chambers are arranged, checks the individual MBT chambers, and then returns to the room where the shooter is placed. Returning to work to specify a shooter that can be associated with the MBT chambers, even in this case, the operator has to move between the "MBT chamber room" and "the shooter room" from time to time, so the overall work flow is long There is no choice but to take it.

Accordingly, an object of the present invention is to suppress the unnecessary increase of the worker's movement line by enabling the automatic operation of the MBT chambers and the linkage of the "MBT chambers" and the "sorters" to be managed automatically.

Another object of the present invention is to eliminate the need for the "status board" arrangement, so that the overall workspace utilization can be efficiently achieved.

Another object of the present invention is to enable the operation of the MBT chambers to be managed in real time, to induce a worker to respond flexibly to the abnormalities of MBT chambers that may occur.

Still other objects of the present invention will become more apparent from the following detailed description and the accompanying drawings.

1 is an exemplary diagram illustrating a burn-in test system employing the present invention.

Figure 2 is an exemplary view sequentially showing a burn-in test system management method according to the present invention.

Burn-in test system management method of the present invention for achieving the above object is a step of receiving the operation data containing the operating status of the MBT chambers and the shooter in real time, and processing the equipment operating data processing data And calculating the processing data into a database, and downloading the processing data mentioned above to the monitoring PC associated with the MBT chambers and the shooters.

In the case of the present invention, because the operation status of the MBT chambers are automatically managed by the server, when the present invention is achieved, the operator who manages the MBT chambers frequently checks the operation status of the MBT chamber, or checks the status of the check board. There is no need to record in this way, and thus, there is no need to go between the MBT chamber and the status plate, and as a result, the overall work flow is greatly reduced compared to the conventional one.

In addition, in the case of the present invention, since the operation status of the MBT chambers can be automatically managed by the server, when the present invention is achieved, the operator can move the MBT chambers in real time without having to place a separate "status plate" in the line. It can be managed by, and can respond flexibly to the abnormality of MBT chambers that may occur.

In addition, when the present invention is achieved, since the linkage of "MBT chambers" and "sorters" is automatically managed by the server, when the present invention is achieved, the operator managing the shooter is associated with the MBT chambers. It is possible to obtain an effect of automatically assigning the shooter to be possible, and thus, it is not necessary to frequently move between the "MBT chamber room" and the "shooter room", and as a result, the overall working line is greatly reduced compared to the conventional one.

Hereinafter, the burn-in test system management method according to the present invention with reference to the accompanying drawings in more detail.

As shown in FIG. 1, the burn-in test system employing the present invention has MBT chambers 200 arranged in Group A in an online connection with the server 400, and also online connected with the server 400. It consists of the shooters 100 arranged in another group B in a state. The server 400 performs real-time operation of the "MBT chambers 200" and "sorters 100" by the online relationship with the "MBT chambers 200" and "sorters 100". I can figure it out.

At this time, the MBT chambers 200 serve to directly test the initial defect by applying thermal and electrical stress to the semiconductor device, and the shooters 100 serve to insert the semiconductor device into the burn-in board. According to the burn-in test result of the MBT chambers 200, the semiconductor device is extracted from the burn-in board and classified as good or bad.

Here, as shown in the figure, the monitoring PC 500 connected online with the above-described server is disposed in the vicinity of the MBT chambers 200, the server 400 also described above in the vicinity of the shooters 100 And a monitoring PC 600 connected online.

As described above, the server 400 is online with the "MBT chambers 200" and the "sotters 100", and the monitoring PCs 500, 600 are connected with the server 400 online. Because of this, the monitoring PCs 500 and 600 can display the operation status of the "MBT chambers 200" and "sorters 100" downloaded from the server 400 to the worker in real time.

In a burn-in test system having such a configuration, first, a worker mounts burn-in boards on which semiconductor devices are mounted in a rack (not shown), and then mounts the rack with a carrier such as a cart, AGV (Automatic). The guided vehicle 300 and the like are transported to the MBT chamber 200.

Subsequently, the semiconductor device transferred to the MBT chambers 200 by the AGV 300 or the like is loaded into the MBT chambers 200 while being mounted on the burn-in boards to perform the burn-in test process.

At this time, as shown in FIG. 2, the MBT chambers 200 transmit facility operation data including their operation status to the server 400, and the server 400 is transmitted from the MBT chambers 200. The facility operation data is received in real time (step S1). Here, as described above, since the MBT chambers 200 are connected to the server 400 online, the MBT chambers 200 and the server 400 may achieve rapid data transmission / reception.

In this case, the facility operation data transmitted from the MBT chambers 200 is, for example, "the unique number of the MBT chamber, the type of semiconductor device currently being tested, the quantity of semiconductor devices currently being tested, and the test completion time".

On the other hand, through the above-described process, when the reception of the equipment operation data containing the operation status of the MBT chambers 200 is completed, the server 400 proceeds to process the equipment operation data (step S2). In this case, the server 400 calls a management program stored in its data area and then transforms the facility operation data into a type that is easy to manage using the management program.

When the facility operation data is transformed into the processing data through the above-described process, the server 400 stores the processing data in its own database area. In this case, the operator may obtain an advantage of frequently inquiring the history of the MBT chambers 200 through the monitoring PC 500 as described above whenever necessary.

When the database process is completed, the server 400 proceeds to download the above-described processing data to the monitoring PC 500 (step S3). In this case, the monitoring PC 500 downloads the processing data transmitted from the server 400 and then displays the processing data on its monitor.

At this time, the worker who manages the MBT chambers 200 checks the monitoring PC 500 from time to time, and checks the abnormality of the MBT chambers 200, the operation status of the MBT chambers 200, etc. (step S4). ).

During this checking process, for example, when the MBT chamber 1 has failed, the operator immediately stops the operation of the MBT chamber 1, and then proceeds with an appropriate action to normalize the state of the MBT chamber 1 (step S5). .

As such, in the case of the present invention, since the operation status of the MBT chambers 200 is automatically managed by the server, when the present invention is achieved, the worker managing the MBT chamber 200 is the There is no need to check the operation status from time to time or record the check results on the status plate, and thus there is no need to go between the MBT chamber 200 and the status plate, and as a result, the overall work flow is greatly reduced compared to the conventional effect. Can be obtained.

In addition, the operator managing the MBT chamber 200 can manage the MBT chambers 200 in real time, without having to place a separate "status plate" in the line, of the MBT chambers 200 It can respond flexibly to the above.

On the other hand, when a certain time has elapsed, when the burn-in test is completed, the MBT chambers 200 upload the test result to the server 400 and then unload the burn-in board to the outside.

Subsequently, the semiconductor device is mounted on the burn-in board, loaded in the rack described above, and then transferred to the shooters 100 by the AGV 300 or the like.

At this time, the sorters 100 download the burn-in test result by the MBT chambers 200 described above from the server 400, and then extract and classify the semiconductor device from the burn-in board according to the result. do.

Here, the shooters 100 transmit facility operation data containing their own operation status to the server 400, and the server 400 receives facility operation data transmitted from the shooters 100 in real time (step). S1). Here, as described above, since the shooters 100 are connected to the server 400 online, the shooters 100 and the server 400 may achieve rapid data transmission / reception.

In this case, the facility operation data transmitted from the shooters 100 is, for example, "a scheduled completion time of the shooting, the quantity of semiconductor devices waiting to be shot", and the like.

On the other hand, through the above-described process, when the reception of the equipment operation data containing the operation status of the shooters 100 is completed, the server 400 processes the equipment operation data as in the case of the MBT chambers 200 described above The process proceeds to step S2. In this case, the server 400 calls the management program stored in its data area and then uses the management program to transform the facility operation data into a type that is easy to manage.

When the facility operation data is transformed into the processing data through the above-described process, the server 400 stores the processing data in its own database area. In this case, the operator can obtain an advantage that can be inquired from time to time through the monitoring PC 600 mentioned above, the "history of the shooters 100" whenever necessary.

When the database process is completed, the server 400 proceeds to download the above-described processing data to the monitoring PC 600 (step S3). At this time, since the server 400 also holds the processing data of the MBT chambers 200 through the above-described process, when the above-described download process is performed, the processing of the above-described shooters 100 with the monitoring PC 500 In addition to the data, the processing data of the MBT chambers 200 are also downloaded at the same time. In this case, the monitoring PC 600 downloads the processing data transmitted from the server 400 and then displays the processing data on its monitor.

At this time, the operator who manages the shooters 100 checks the monitoring PC 600 from time to time to check the operation status of the shooters 100 from time to time in connection with the operation status of the MBT chambers 200 (step S4). .

In the case of the present invention, since the linkage between the "MBT chambers 200" and the "sorters 100" is automatically managed by the server, when the present invention is achieved, the operator managing the shooter 100 Can obtain the effect that the shooter 100, which can be associated with the MBT chambers 200, is automatically assigned, and thus, there is no need to frequently move between the "MBT chamber room" and "the shooter room". Therefore, it is possible to obtain the effect that the overall work flow is significantly reduced compared to the conventional one.

After that, the semiconductor device, which has completed the burn-in test process, is subjected to a series of post-treatment processes and manufactured into a product having a certain level or more.

As described above, in the present invention, "MBT chambers", "sorters", "monitoring PC", a server, etc. are connected online, and the operation status of "MBT chambers" and "MBT chambers" through the server. By linking the "sorts" with the automatic management of the computer, it is possible to suppress the unnecessary increase of the worker movement.

The present invention has an overall useful effect in managing various types of semiconductor manufacturing equipment.

And while certain embodiments of the invention have been described and illustrated, it will be apparent that the invention may be embodied in various modifications by those skilled in the art.

Such modified embodiments should not be understood individually from the technical spirit or point of view of the present invention and such modified embodiments should fall within the scope of the appended claims of the present invention.

As described in detail above, the burn-in test system management method according to the present invention connects the "MBT chambers", "sutters", "monitoring PC", etc. online with the server, and through this server "MBT" It automatically manages the operation status of "chambers" and the linkage of "MBT chambers" and "sorters" on a computerized basis.

In the case of the present invention, because the operation status of the MBT chambers are automatically managed by the server, when the present invention is achieved, the operator who manages the MBT chambers frequently checks the operation status of the MBT chamber, or checks the status of the check board. There is no need to record in this way, and thus, there is no need to go between the MBT chamber and the status plate, and as a result, the overall work flow is greatly reduced compared to the conventional one.

In addition, in the case of the present invention, since the operation status of the MBT chambers can be automatically managed by the server, when the present invention is achieved, the operator can move the MBT chambers in real time without having to place a separate "status plate" in the line. It can be managed by, and can respond flexibly to the abnormality of MBT chambers that may occur.

In addition, when the present invention is achieved, since the linkage of "MBT chambers" and "sorters" is automatically managed by the server, when the present invention is achieved, the operator managing the shooter is associated with the MBT chambers. It is possible to obtain an effect of automatically assigning the shooter to be possible, and thus, it is not necessary to frequently move between the "MBT chamber room" and the "shooter room", and as a result, the overall working line is greatly reduced compared to the conventional one.

Claims (2)

Receiving facility operation data containing operating conditions of MBT chambers (Mornitoring Burn-In Test chamber) and sorters (Sorter); Processing the facility operation data to calculate processing data, and then converting the processing data into a database; Downloading the processing data to a monitoring personal computer (PC) associated with the MBT chambers and the shooters, respectively. The method of claim 1, wherein after the downloading of the processing data to the monitoring PC associated with the MBT chambers and the shooters respectively, the processing data is checked, and the MBT chambers and the sorters according to the status of the processing data. Burn-in test system management method characterized in that the further steps of performing a series of actions.