KR20010048105A - Grating-assisted codirectional coupler and method for fabricating the same - Google Patents

Abstract

PURPOSE: An optical filter for grating-assisted vertical coupler is provided to improve the characteristics by making the first and second waveguides vertical couplers while making it easy to arrange the waveguides and enabling a simple manufacturing process. CONSTITUTION: In the method of manufacturing the optical filter for grating-assisted vertical coupler, an n-type lnP buffer layer(22) of n-type lnP is formed on an n-type lnP board. The depth is between 0.5 and 1 micro-m. A lnGaAsP first waveguide layer is formed on the buffer layer(22). The depth is between 0.3 and 0.8 micro-m, the width is between 1 and 3 micro-m and the length is between 3 and 10 m. An n-type lnGaAsP lattice layer(25) is formed 0.1 to 0.5 micro-m above the first waveguide layer. The depth is between 0.02 and 0.2 micro-m. An n-type lnP buffer layer(24) is formed blocking gaps of lattices. P-type lnGaAsP second waveguide layers(26a-d) are formed above the buffer layer(24). Finally, on the top is formed a p-type lnP clad layer.

Description

Grating-assisted codirectional coupler and method for fabricating the same

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical filter having a wavelength selectivity for use in optical communication or optical exchange of wavelength division multiplexing, and a method of manufacturing the same. A filter and a method of manufacturing the same.

As is well known, the optical filter is a Grating-Assisted Codirectional Coupler (GACC) filter using a semiconductor material is used a lot, because the semiconductor is integrated with the optical device and the wavelength conversion rate is very high This is because it has the advantage of being fast.

Prior art lattice assisted directional couplers include a planar coupling and a vertical coupling.

Planar coupling is a method of fabricating two waveguides on the same plane and in a planar shape through a photomask operation such as a semiconductor process. When producing an optical filter in this plane coupled distance control between the two waveguides has, but not easy with that in the disadvantage bandwidth is very large to the crystal growth LiNbO ₃ single crystal, because the insertion of the grating, without the shape of the waveguide is not uniform hard It is mainly used for manufacturing optical filters.

On the other hand, in the case of an optical filter using a semiconductor, crystal growth can be performed by epitaxy method, so that it can be manufactured in a vertically coupled type. When crystal growth is used, the distance between two waveguides is precisely controlled and the thickness, width, etc. of the waveguide are controlled. Since the control of the parameters affecting the characteristics of the filter is precisely made, it is possible to manufacture an optical filter having excellent characteristics. However, the lattice-assisted vertically coupled optical filter based on the two waveguides has difficulty in exactly matching the waveguides because the lithography process and the regrowth have to be used in the fabrication.

A grating assist vertically coupled wavelength variable optical filter and a method of manufacturing the same as described above with reference to FIG. 1 will be described, and the problems thereof will be described in detail.

Figure 1 is a schematic cross-sectional view showing a conventional grating help vertically coupled wavelength variable optical filter structure.

Referring to FIG. 1, the structure of the grating assist vertically coupled optical filter generates an optical coupling by inserting a grating 13 between two first and second waveguides 12 and 15, and generates a first waveguide 12. The incident light is extracted by the second waveguide 15 and used as the signal light.

In this case, the grating 13 serves to couple light between two first and second waveguides 12 and 15, and when the first waveguide 12 and the second waveguide 15 are asymmetrically formed. Only one particular wavelength λ i is coupled to the second waveguide 15. The lattice assisted directional coupler as described above may change the wavelength output to the second waveguide by changing the refractive index of the waveguide by using current injection or an electric field effect. Reference numeral 11 denotes a substrate, 14 a buffer layer, and 16 a cladding layer, respectively.

On the other hand, in order to couple a specific wavelength into the second waveguide 15, the second waveguide should have asymmetry with the first waveguide layer 12 formed at its vertical lower portion. Therefore, in order to implement the aforementioned structure, the first waveguide 12 and the second waveguide 15 should be formed using separate lithography and regrowth methods, respectively.

Therefore, in the conventional optical filter, misalignment occurs between two waveguides in lithography, and such misalignment not only lowers the coupling efficiency of the two waveguides, but also makes it impossible to predict the value of the designed coupling efficiency. Can not predict.

In addition, the conventional grating assist type vertically coupled optical filter has to utilize a band shape in any one of the waveguides for coupling the two waveguides and the optical fiber, which causes a step on the second waveguide 15 during regrowth. This seriously affects the propagation loss of the second waveguide 15. In order to put the existing optical filter into practical use, reproducibility and propagation loss must be considered.

An object of the present invention is to solve the above problems, to fabricate the first waveguide and the second waveguide in the vertical coupling type to improve the characteristics of the optical filter, to apply the two waveguide direction alignment and concise process conditions To provide a suitable grating help vertically coupled optical filter and a method of manufacturing the same.

1 is a cross-sectional view of a conventional grating help vertically coupled wavelength tunable optical filter structure;

Figure 2a to 2d is a process diagram showing a grating help vertically coupled wavelength variable optical filter manufacturing method according to a preferred embodiment of the present invention.

Explanation of symbols on the main parts of the drawings

21: n-type InP substrate

22: n-type InP buffer layer

23: InGaAsP first waveguide layer

24: n-type InP buffer layer

25: n-type InGaAsP lattice layer

26a, 26b, 26c, 26d: p-type InGaAsP second waveguide layer

27a, 27b: corner reflector

In order to achieve the above object, the grid-assisted vertically coupled optical filter of the present invention is vertically self-aligned, and is patterned in a '-' shape at a portion interposed between the grids and extends to the 'c' without interposing a grid layer. A first waveguide and a second waveguide having a pattern shape that splits in a shape of a child; And a corner reflector formed at a refractive portion of the second waveguide to spatially separate the second waveguide and the first waveguide.

Preferably, the grating assist vertically coupled optical filter of the present invention may implement a p-type electrode capable of applying an electric field to the first waveguide and the second waveguide in order to implement a wavelength change of the coupled light by current injection or an electric field effect. And an n-type electrode.

In addition, the manufacturing method of the grating help vertically coupled optical filter of the present invention in the manufacturing of the grating help vertically coupled optical filter having the structure as described above, the second waveguide and the second waveguide in a single etching process using the same mask. The corner reflector is formed by etching the refractive portion of the second waveguide.

DETAILED DESCRIPTION Hereinafter, exemplary embodiments of the present invention will be described with reference to the accompanying drawings so that those skilled in the art may easily implement the technical idea of the present invention. do.

2A to 2D are flowcharts illustrating a method of manufacturing a lattice help vertically coupled wavelength variable optical filter according to a preferred embodiment of the present invention.

First, a grating help vertically coupled wavelength variable optical filter structure according to the present invention will be described with reference to FIG. 2D, and then a grating help vertically coupled wavelength variable optical filter manufacturing method according to the present invention will be described with reference to FIGS. Let's take a look.

The optical filter of the present invention has a basic vertical cross-sectional structure substantially the same as that of a conventional optical filter, but has a corner reflector that has not existed in the past, and has a structure in which the first waveguide and the second waveguide are self-aligned and symmetric to each other. It differs in that

Referring to Fig. 2D, an n-type InP buffer layer 22 is formed on the n-type InP substrate 11 with a thickness of 0.5 to 1 mu m. On the buffer layer 22, a spatially limited InGaAsP first waveguide layer 23 is formed so as to have a thickness of 0.3 to 0.8 mu m, a width of 1 to 3 mu m, and a length of 3 to 10 mm, and from 0.1 to the first waveguide layer 23. An n-type InGaAsP lattice layer 25 having a thickness of 0.02 to 0.2 탆 is formed over 0.5 탆. Then, an n-type InP buffer layer 24 having a thickness of 1 to 3 μm is formed on the space between the two lattices constituting the grating, and the thickness is 0.2 to 1 μm, width of 1 to 5 μm, and length of 3 to 3 μm. Spatially limited p-type InGaAsP second waveguide layers 26a, 26b, 26c, 26d to have 10 mm are formed. Although not shown in the figure, a p-type InP cladding layer is formed thereon with a thickness of 1 to 3 m.

The first waveguide layer 23 and the second waveguide layer 26 have a '-' shape in the portion interposed between the patterned lattice layer 25 and extend therefrom without interposing the lattice layer 25. It has a pattern shape that is divided into 'c' shapes.

Accordingly, light λ1.......... .N. N incident on the first waveguide 25 by the grating layer 25 is coupled between the two waveguides 23, 26a, and a specific wavelength λi is coupled to the second optical waveguide ( The light from the two waveguides that are output when generated through 26) are spatially separated from each other.

On the other hand, in order to distinguish the light from the 26a portion to the 26c portion of the second waveguide layer, it is necessary to change the direction twice. For this purpose, the present invention uses the corner reflectors 27a and 27b.

As shown in FIG. 2D, the corner reflectors 27a and 27b are provided at the portion where the second waveguide layer 26 is bent or split by almost 90 degrees, so that a specific wavelength is 26c in the portion 26a of the second optical waveguide layer. As a result, the corner reflectors 27a and 27b are formed by etching all of the second optical waveguide layer 26 and a part of the buffer layer 24 at the corners of the second waveguide layer.

In addition, by forming a p- type electrode on the upper surface of the device, and an n- type electrode on the lower surface of the device, it is possible to implement a wavelength change of the combined light by the current injection or the electric field effect.

Now, the grating help vertically coupled wavelength variable optical filter having the structure as described above will be described.

First, as shown in FIG. 2A, the buffer layer 22, the first waveguide layer 23, the buffer layer 24, and the lattice layer 25 are sequentially grown on the substrate 21, and then shown in FIG. 2B. The lattice patterns are formed by a lithography process (mask and etching process) as described above.

Subsequently, the buffer layer 24 and the second waveguide layer 26 shown in FIG. 2C are grown again.

Thereafter, as shown in FIG. 2D, where the optical coupling between the two waveguides is caused by the gratings 25 so that the grating is not interposed therebetween, the first and second waveguide layers 23 and 26 are respectively 'c'. 'The mask and the etching process are carried out so as to split into shapes. During etching, partial thicknesses of the second waveguide layer 26, the buffer layer 25, the first waveguide layer 23, and the buffer layer 22 are etched.

Subsequently, subsequent steps such as forming a cladding layer and a current blocking layer may be performed.

As described above, the optical filter manufacturing method of the present invention forms a first waveguide and a second waveguide at the same time in a single lithography process so as to be self-aligned. The first waveguide and the second waveguide having the single mode condition can be formed in a single process. Regrowth such as the formation of a current blocking layer on the etched substrate can eliminate one regrowth and many lithography processes in the existing process. This is because the conventional method uses multiple alignment keys to match the directions of the two waveguides.

Although the technical idea of the present invention has been described in detail according to the above preferred embodiment, it should be noted that the above-described embodiment is for the purpose of description and not of limitation. In addition, those skilled in the art will understand that various embodiments are possible within the scope of the technical idea of the present invention.

According to the present invention, it is very easy to spatially separate the two waveguides by placing a corner reflector in the second waveguide, and also reduce the serious propagation loss due to the step on the second waveguide caused by the use of the existing band structure. In addition, it is possible to reduce the length of the optical element by the band.

In addition, the manufactured optical filter not only simplifies the manufacturing process but also has many advantages in that it is possible to manufacture an optical filter that is always reproducible.

Claims (4)

In the lattice help vertical coupling optical filter, A first waveguide and a second waveguide having a vertically self-aligned pattern intersecting the lattice and having a pattern shape having a '-' shape and extending to the '-' shape without interposing a lattice layer; And A corner reflector formed at a refractive portion of the second waveguide to spatially separate the second waveguide and the first waveguide Lattice help vertical coupling optical filter comprising a. The method of claim 1, Lattice assist vertical coupling further comprising a p-type electrode and an n-type electrode capable of applying an electric field to the first waveguide and the second waveguide in order to implement a wavelength change of the combined light by current injection or an electric field effect. Fluorescent filter. In the method of manufacturing the lattice help vertical coupling optical filter of claim 1 or 2, And the second waveguide and the second waveguide are patterned by a single etching process using the same mask. The method of claim 3, The corner reflector is formed by etching the refractive portion of the second waveguide grating help vertically coupled optical filter manufacturing method.