KR20010034873A - Modular surface mount manifold assemblies - Google Patents

Abstract

A modular manifold system is provided for connecting the fluid flow control components of the fluid system to the reduced zone. The fluid system has one or more crosslinking fittings, the crosslinking fittings having an inlet end in fluid communication with the outlet port of the first fluid flow control component and an outlet end in fluid communication with the inlet port of the second fluid flow control component. do. The bridging fitting may further comprise two or more ports, one of which may be in fluid communication with a manifold located at another substrate level. The bridging fitting may be mounted in a channel of the support plate for structural support, or may be located in a channel block of variable size. Any positioning plate located above the end of the crosslinking fitting may be used to align the inlet and outlet ports of the fluid flow control component with the inlet and outlet ends of the crosslinking fitting. In addition, multiple flow paths can be formed by mounting the cross-linked fittings in the positioning plate in various directions. Further, by stacking the crosslinked fittings to form a multilayer, one layer of the crosslinked fittings can be in fluid communication with the crosslinked fittings of the other layer. The invention may also include a seal in the recess between the port of the fluid flow control component and the end of the mating bridge fitting.

Description

Modular Surface Mount Manifold Assemblies {MODULAR SURFACE MOUNT MANIFOLD ASSEMBLIES}

This application is filed in International Patent Application No. PCT / US99 / 07972, filed March 5, 1999, US Provisional Application No. 60 / 085,817, filed May 18, 1998, and September 29, 1998. US Provisional Application No. 60 / 102,277 is hereby prioritized.

Various high purity gases are used in the manufacture of semiconductors. These gases are controlled by a system of high purity valves, regulators, pressure transducers, mass flow controllers and other components connected by welding and high purity metal seals. However, the above connection method is undesirable in many applications because of the extra time and cost for the welding operation, the unnecessary space between the parts, and the replacement of certain parts located between other parts. Hard. In addition, these systems are typically designed and manufactured on demand, which makes manufacturing and procurement of replacement parts expensive.

To overcome this problem, new modular manifold systems have recently been introduced in the industry. Typical components of such a system, such as valves and pressure regulators, and other typical fluid flow control components, have been reconfigured so that the inlet and outlet ports and attachment mechanisms can be used with surface mount manifolds. Such manifolds typically consist of modular blocks with internal flow passages and made of high purity metal. These prior art modular systems use metal seals between the fluid flow control component and the modular block face for sealing engagement with mating modular blocks, and use face seals formed on the outer side of the modular block face. Is common. One of the objectives of such a system is to enable surface mount components to be compatible by using surface mount standard configurations based on industry standards.

One disadvantage of this type of prior art modular system is that the entire modular block consists of high purity metal. In addition, these block parts are expensive to manufacture because of the complexity of machining, which requires multiple passages in each single block, and the risk of expensive scrap due to such complex machining is also high. In addition, a mating seal is required between the mating blocks, which requires additional manufacturing time, and requires fastening of the fastener member and application of a make-up torque for a leak-free seal.

FIELD OF THE INVENTION The present invention generally relates to manifolds for fluid systems and, more particularly, to modular gas distribution systems for corrosive fluid systems such as gas systems used in the manufacture of semiconductor wafers and high purity fluid systems.

The invention may take its physical form in certain parts and configurations of parts, preferred embodiments of the invention will be described in detail herein and illustrated in the accompanying drawings which are part of this specification.

1 is a perspective view of a complete manifold assembly shown with representative parts and seals embodying features of the present invention.

FIG. 2 is an exploded perspective view of representative components and seals and manifold assemblies embodying features of the invention shown in FIG.

3 is an exploded elevation view of a portion of the manifold of FIG. 2 showing one complete gas crosslinked fitting positioned between two partially shown gas crosslinked fittings and any representative seal.

3A is a cross-sectional view of the manifold portion of FIG. 2 in an assembled state;

FIG. 3B is a cross-sectional view of a variant of gas crosslinked fittings specifying tee fittings and additional pipe sections, in addition to the two elbows and pipe portions of the complete gas crosslinked fittings shown in FIGS. 3 and 3A.

4 is a perspective view of a variant of a manifold system according to the invention embodying multiple flow paths extending in several directions.

5 is an exploded perspective view of another embodiment of a manifold assembly incorporating features of the present invention.

5A-5D are perspective views of the retaining clip of the present invention.

FIG. 6 is a longitudinal cross-sectional view partially disassembled of the two crosslinked fittings 50 shown in FIG. 5, corresponding sealing retainers 90, and mating fluid surface components. FIG.

7 is a plan view of a more complex fluid system including multiple fluid lines.

8 is a perspective view of another embodiment of the manifold assembly of FIG. 1 using a plurality of flow channels located at the upper and lower substrate levels.

9 and 9A are perspective views of two manifold substrates and transverse purge channels.

10a to 10d show several assembly steps of two substrates with ends connected to one another, of which FIG. 10d is a cross-sectional view.

11A and 11B show another embodiment for joining a substrate used in a manifold assembly as shown in FIG. 8.

12A and 12B show a substrate incorporating a shock valve.

Figure 13 is a perspective view of another embodiment of a manifold assembly of the present invention.

14A is a perspective view of the embodiment of FIG. 13 with fluid flow components removed from the manifold assembly.

14B is a top view of FIG. 14A.

15A, 15B, and 15C are perspective, top, and side views, respectively, of another embodiment of a crosslinked fitting for fluid flow.

16A-16C are perspective, top and side views, respectively, of crosslinked fittings for drop down fluid flow;

17 is a cross sectional view of the manifold assembly according to the invention shown in FIG. 14B when viewed in the 17-17 direction.

FIG. 18 is a cross sectional view of the manifold assembly according to the invention shown in FIG. 14B viewed in the 18-18 direction. FIG.

19 is a cross sectional view of the manifold assembly according to the invention shown in FIG. 14B when viewed in the 19-19 direction.

20A, 20B and 20C are perspective, top and side views, respectively, of another embodiment of a crosslinked fitting for fluid flow according to the present invention;

21 is a perspective view of different size crosslinking fittings for fluid flow having multiple ports.

22A and 22B are perspective and side views, respectively, of the seal retainer, and FIG. 22C shows the seal retainer of FIGS. 22A and 22B used with crosslinked fittings for drop-down fluid flow.

23A-23C are perspective and side views of yet another embodiment of a sealing retainer.

24A-24C are perspective and side views of yet another embodiment of a sealing retainer.

25A and 25B are top and perspective views of another embodiment of a substrate manifold with tubular mounting flanges.

FIG. 26 is a perspective view of the lower substrate manifold shown with the retainer straps. FIG.

FIG. 27A is a side view of the manifold assembly of FIG. 26 viewed in the direction of 27A-27A, and FIGS. 27B-27D are cross-sectional views of the top substrate and bottom level shown with another embodiment of the bottom substrate level.

28 is a perspective view of another embodiment of an upper and lower substrate level.

29A and 29B show the state before and after the load is applied to the heated manifold assembly, respectively.

30A and 30B are cross sectional views of yet another embodiment of an upper substrate level.

Thus, by eliminating the seal between the mating modular blocks, it can be made simpler and cheaper by drastically reducing the expensive materials used, and by reducing the system footprint or envelope, existing systems There is a need to provide a modular manifold design that is equal to or better than the performance, integration, and reliability of the system.

According to one embodiment of the present invention, there is provided a bridge fitting for a fluid manifold system in fluid communication with two or more fluid flow control components such as valves, regulators, pressure transducers, mass flow controllers, and the like. . This crosslinked fitting has a first elbow fitting connected to a second elbow fitting, and these first and second elbow fittings have an internal fluid passage therethrough. The inner fluid passage has an inlet end and an outlet end, the inlet end in fluid communication with the outlet port of the first fluid flow control part and the outlet end of the crosslinked fitting is in fluid communication with the inlet end of the second fluid flow control part. do.

According to another embodiment of the present invention, there is provided a crosslinking fitting for a fluid manifold system in fluid communication with at least three fluid flow control components, wherein at least one of the fluid flow control components has a single port. The crosslinked fitting has a first elbow fitting and a second elbow fitting each having an end that is connected to a tee fitting. The tee fitting is located between the first and second elbow fittings, each elbow fitting and tee fitting having an internal fluid passageway in fluid communication with each other. The inner fluid passage has an inlet end and a first outlet end and a second outlet end, the inlet end in fluid communication with the outlet port of the first fluid flow control component, the outlet ends of the inner fluid passageway being the second fluid Respectively in fluid communication with the inlet end of the flow control component and the inlet end of the third fluid flow control component.

According to yet another embodiment of the present invention, a modular fluid manifold system is provided that is connected with one or more surface mount fluid flow control components having an inlet port and an outlet port. This modular fluid manifold system has one or more crosslinked fittings with internal fluid passages therethrough, the internal fluid passages having an inlet end and a second fluid flow control connected to an outlet port of the first fluid flow control component. An outflow end connected to the inlet port of the component, so that with the modular fluid manifold system assembled the inner fluid passageway of the bridge fitting is in fluid with the first fluid flow control component and the second fluid flow control component. Communicate.

According to yet another embodiment of the present invention, a modular fluid manifold system is provided in connection with one or more fluid flow control components having one inlet port and one or more outlet ports. The modular fluid manifold system has one or more crosslinked fittings, the crosslinked fittings having inlet and outlet ends and an internal passageway connecting the ends through the interior of the crosslinking fitting. The modular fluid manifold system also includes a positioning plate, which has a top surface on which the fluid flow control component is mounted, and a plurality of holes aligned with the inlet and outlet ports of the fluid flow control component. . The positioning plate also has a lower surface on which the crosslinking fitting is mounted. Each inlet end of the crosslinked fitting is in fluid communication with an outlet port of a fluid flow control component, and each outlet end of the crosslinked fitting is in fluid communication with an inlet port of another fluid flow control component.

The foregoing and other features and advantages of the present invention will become apparent from the following detailed description and claims taken in conjunction with the accompanying drawings.

With reference to the drawings, which are only intended to illustrate preferred embodiments of the present invention but not to limit the present invention, a unique manifold system is shown in FIGS. The invention shown and described in the figures can be used, for example, as part of a high purity modular gas distribution system used in the manufacture of semiconductor devices or other fluid systems that must resist corrosive fluids. The use of the present invention is not limited to high purity fluid systems and can be used in any application relating to fluid flow control. In addition, various aspects of the invention shown and described herein may be used individually or in various combinations, depending on the particular application. And although preferred embodiments of the present invention are described with reference to exemplary modular manifold designs, those skilled in the art will readily appreciate that the present invention may be used in other modular manifold system designs.

Referring now to the drawings, in particular with reference to FIG. 1, a modular fluid manifold system 10 is assembled with fluid flow control components such as valve 12, flow regulator 13, filter 14, and the like. These fluid flow control components can be used in connection with the present invention, but are not part of the present invention. These fluid flow control components 12-14 are preferably surface mount components, each component having one inlet port 16 and one or more additional outlet ports 18 as shown in FIG. 3A. This allows fluid to communicate between the fluid flow control components. In order to secure the fluid flow control component to the modular fluid manifold system 10, a series of fasteners 22 passes through the opening 24 of the base flange 26 of the fluid flow control component.

The modular fluid manifold system according to the present invention comprises one or more crosslinked fittings 50, an optional positioning plate 30, an optional support plate 40, an optional end fitting 45, and an optional seal. 60 is provided. These elements are described in more detail below. As shown in FIG. 3, the crosslinked fitting 50 can take the form of two elbow fittings 52, which are each elbow fitting 52 by conventional means such as welding. Is joined by any tubular extension 54 which is connected to the end of the head. The elbow fitting 52 has an internal fluid passage 56 with an inlet end 58 and an outlet end 62, 64, wherein the inlet end 58 is 90 degrees relative to the outlet end 62, 64. Has an orientation. The optional tubular extension 54 has an internal fluid passageway connecting adjacent fluid passages of two elbow fittings 52 adjacent to each other, such that a U-shaped fluid passage is formed inside the crosslinking fitting 50. This fluid passageway has an inlet end 62 and an outlet end 64.

As shown in FIG. 3A, the inlet end 62 of the crosslinked fitting 50 is in fluid communication with each outlet opening 18 of the fluid flow control component 12 and the outlet end 64 of the crosslinked fitting 50. Is in fluid communication with the inlet opening of the adjacent fluid flow control component 13. Accordingly, the crosslinking fittings 50 are such as adjacent fluid flow control components 12, 13, without the use of metal-to-metal seals between adjacent crosslinking fittings 50 which are typically required when connecting prior art modular blocks. Acts as a "bridge" to transfer fluid between The crosslinked fitting 50 is preferably made of stainless steel, such as 316, hastalloy, semiconductor quality material ('SCQ'), or other material suitable for use in connection with semiconductor processing fluids. However, any suitable material, such as plastic or metal, can be used for conventional industrial use.

In addition, the reduced dimensions of the crosslinked fitting 50 can significantly reduce the expensive materials for the modular manifold. Known art modular manifold systems use modular manifold blocks made of expensive materials (with surface mounted components mounted thereon), which modular manifold blocks are integrally cut from there Has a gas flow passage. As the semiconductor industry progresses toward standardization of modular gas system components, these modular manifold block components have standard top flange mount surface areas to mate with standardized flanges of surface mount fluid flow components. Thus, components for surface mount fluid flow are easily compatible. The present invention provides a gas flow passage formed by a crosslinked fitting 50 with a significantly reduced amount of expensive material compared to conventional prior art modular component blocks. This provides a gas path manifold that is less expensive and easier to manufacture than the modular block of the art of the prior art, and thus more economical.

As shown in FIG. 1, the modular fluid manifold system 10 may also include end fittings 45, which end fittings 45 are Swaglok VCR (R) fittings (Cleveland, Ohio). And elbow fittings having a 90 degree internal passageway that connects to standard fittings 46, such as standard face-type fittings such as Swagelok, Inc., or other suitable fittings suitable for connection to fluid lines. The end fitting 45 can be used as an inlet fitting or outlet fitting to mate with a fluid line (not shown). That is, the outlet end or inlet end of the elbow fitting is connected with the inlet end or the outlet end of the fluid flow control component, respectively. The end fitting 45 is preferably made of 316 stainless steel or SCQ stainless steel or semiconductor processing fluid, or other material suitable for use in connection with a fluid associated with a particular application. For typical industrial use the end fitting 45 may be made of any suitable material, such as plastic or metal.

The modular fluid manifold system 10 according to the invention may also optionally be provided with a support plate 40. The support plate 40 may be made of a flat plate, but preferably includes an inner groove or channel 42 for receiving and fixing the plurality of crosslinked fittings 50 and the end fittings 45 therein. Each elbow fitting 52 and end fitting 45 of the bridging fitting 50 is matched to the shape of the groove or channel 42 to prevent the bridging fitting 50 from rotating in the groove or channel 42. It is provided with an outer shape having a shape of appropriate dimensions to achieve. The outer shape of the elbow fitting 52 is preferably rectangular or square, but is not essential. In addition, the inner wall 44 forming the channel 42 preferably has a size appropriately to accommodate the square, or two opposite sidewalls to have a suitable dimension to accommodate the square. However, the present invention is not limited to the above-described form, and a channel having a shape corresponding to an arbitrary shape of the elbow fitting 52 is sufficient. The support plate 40 may be made of any suitable material, such as a metal and metal matrix composite material, but is preferably an inexpensive light weight material such as aluminum. Depending on the application, nonmetallic materials such as plastics can also be used.

The modular fluid manifold system 10 according to the invention preferably further comprises a seal 60 received between the mating inlet and outlet ports of the crosslinking fitting 50 and the fluid flow control component. This seal 60 may be made of any suitable material such as elastomer, plastic, rubber or polymeric material, but is preferably a soft metal such as nickel. In another example, a C seal may also be used in addition to the composite seal. Other sealing techniques that can be used in connection with the present invention will be apparent to those skilled in the art.

According to the second embodiment of the invention illustrated in FIGS. 2, 3 and 3A, any positioning plate 30 can be used with the invention. This positioning plate 30 has a plurality of holes which are aligned to receive the ends 62, 64 of the bridge fitting 50. The end portion of the crosslinked fitting 50 is slightly shorter than the thickness of the positioning plate 30, so that a recess for accommodating the seal 60 is formed. The positioning plate 30 further includes a hole 32 that is aligned to receive the fastener 22. Accordingly, in order to assemble the modular fluid manifold system according to the second embodiment of the present invention, the crosslinking fitting is disposed in the channel 42 of the supporting plate 40, and the hole of the positioning plate 30 is arranged in the crosslinking fitting 50. ) With the inlet end and the outlet end. Next, the position of the positioning plate 30 is lowered so that the end of the bridge fitting 50 is inserted through the aligned holes 34 of the positioning plate 30. The fastener 36 is then inserted through the aligned holes 38 of the support plate to be received within the aligned holes 39 of the positioning plate 30. Finally, fasteners 22 are used to secure the fluid flow control components 12 to 14 to the positioning plate 30.

3b shows a variant of the crosslinked tee fitting 70. This crosslinked tee fitting 70 can be used in connection with three adjacent fluid flow control components, the central fluid flow control component having only one inlet port, for example a pressure transducer, or the flow of some fluid to another It has a fluid flow transducer that diverts along the path. The bridged tee fitting 70 has two elbow fittings 52, each of which has an internal fluid passageway in fluid communication with the tee fitting 72. The tee fitting 72 has an inlet end 74 and two outlet ends 76, 78. The outlet end 76 of the tee fitting 72 is in fluid communication with the inlet of a single port fluid flow control component such as a pressure transducer. The outlet end 78 of the tee fitting is in fluid communication with the outlet end 80 of the crosslinked fitting. Thus, the crosslinked tee fitting 70 has one inlet end 82 and two outlet ends 76 and 80 and is of "crosslinked" type for transferring the flow of fluid between three adjacent fluid flow control components. And a central fluid flow control component having a single port in fluid communication with the fluid flow passage through the bridged tee fitting 70.

4 shows another embodiment of a positioning plate 80 designed for the purpose of allowing fluid to flow in multiple flow paths A, B, C, and D. As shown in FIG. To better illustrate the invention, the rear portion of the positioning plate 80 is shown in relation to the bridge fitting 50 (ie, in the opposite direction of FIG. 2). Placing the crosslinked fitting 50 in the aperture 82 of the positioning plate 80 allows fluid to be combined or mixed from one or more flow paths. Thus, as shown in FIG. 4, four separate flow paths A, B, C, and D are mixed at a desired rate by a fluid flow control component (not shown) to allow the fluid outlet 86 of the modular fluid manifold system. ) Will consist of the fluids A, B, C, D mixed at the desired ratio. This is accomplished by using a fluid flow control component such as a valve consisting of three ports to allow different fluids to mix from separate flow paths (at position 84). Note that the crosslinked fittings 50 are combined in a "pegboard" type arrangement to achieve the desired results described above. Thus, crosslinking fittings 50 are used to connect or couple the individual flow paths for the mixing of the above-described fluids, eliminating the need for specially modified parts. This is clearly advantageous over modular configurations in the form of prior art blocks, which require special blocks with three ports.

In this embodiment, the positioning plate 80 can be used as a support for the crosslinking fitting 50 and as a " positioning device " that does not require a support plate. The bridging fitting 50 may further have a screw end (not shown) that can be inserted into the aligned screw configuration 82 of the positioning plate 80. The ends 62, 64 of the bridge fitting 50 are also pressed into the aligned holes 82 of the positioning plate 80, or are positioned by a retainer clip (not shown). It can be attached to. Other attachment means will be apparent to those skilled in the art.

In this embodiment, the heights of the ends 62, 64 of the crosslinked fitting 50 may vary, which should be such that the crosslinked fitting 50 is formed with multiple layers (not shown). This transverse layer structure is useful, for example, when a purge gas is supplied via line A to other lines B, C, D. In order to achieve this, a modified crosslinked fitting 50 is further provided which further comprises a tee fitting mating with the crosslinking fitting of the top layer. The tee fitting is located between the elbow fittings as shown in FIG. 3B and has an internal fluid passageway in communication with the inner fluid passageway of the elbow fitting. However, unlike in the case of Figure 3b, the openings of the tee fittings are angled 180 degrees in the opposite direction to the openings of the elbow fittings to mate with the tee fittings of the bridge fittings located in the other layers. Thus, this embodiment provides a fluid manifold system having multiple fluid flow paths, which can extend in multiple directions. The present embodiment also provides a multi- or three-dimensional gas flow path layer, wherein the fluid flow path of one layer is in fluid communication with the fluid flow path of another layer.

In another embodiment of the present invention shown in FIGS. 5 and 6, any positioning plate 30 has been removed. The seal 60 is fixed in place by an optional flexible retainer 90 made of a thin flexible material such as plastic or metal instead of the positioning plate 30. This flexible retainer 90 is EG & G. It is commercially available from Inc. The holes 92 of the flexible retainer 90 are aligned to receive the fasteners 22 received in the holes 32 'of the support plate or channel block 40. Seals 60, such as C seals, are held in place by one or more support members 92. The seal 60 is adjacent to the inlet port 16 and the outlet port 18 of the fluid flow control components 12, 14 when the aperture 92 is aligned with the fastener 22. It is precisely disposed in the retainer 90 so as to be precisely aligned with the outlet port 64 and the inlet port 62 of the crosslinked fitting 50. The bridging fitting 50 is such that the inlet port 62 and the outlet port 64 are flush with the top surface 43 of the channel block 40 so that the vertical tubular extension is removed and when the bridging fitting 50 is disposed in the channel. Equal to the same height, or modified to form some recesses. Also shown in FIG. 5 is the different shape of the elbow fitting 52 forming the crosslinked fitting 50. In this figure, the elbow fitting 52 has a rectangular body in which the inner fluid passage is formed such that the inlet end has an orientation of approximately 90 degrees with respect to the outlet end. The inlet port 62 and the outlet port 64 of the bridge fitting 50 preferably further comprise circular indented zones around these ports to accommodate the seal 60.

As shown in FIG. 5, after all the elbow fittings 52 are fixed to each other to form the bridge fitting 50, the bridge fitting 50 is placed in the channel of the support plate 40. Any retaining clip 95 may be placed for each crosslinked fitting to maintain the fine fitting 50 in the channel. The retaining clip 95 may be inserted in each narrowed fitting 50 into a narrowed area that forms, for example, a welded connection between adjacent elbow fittings 52. As better shown in FIG. 5A, the retaining clip 95 preferably comprises a U-shape and includes curved legs 96 parallel to each other with a wider spacing than the width of the channel, and thus It has the same characteristics as the spring. Thus, when the leg 96 is inserted around the crosslinking fitting 50 in the channel, the crosslinking fitting 50 is channeled because the leg 96 engages in friction with the sidewall of the channel by its spring force. Is supported within. Further embodiments of retaining clips 97, 98, and 99 are shown in FIGS. 5B-5D.

And, as shown in FIG. 7, the support plate or channel block 40 includes a plurality of channels 42 in which the bridging fitting 50 is located to transfer the fluid flow of the aligned fluid flow control component in the first direction. And one or more mutually engaging transverse or branch channels 41 in which the crosslinking fittings are located, for carrying the fluid in the second direction. Thus, multiple flow paths are formed that allow fluids passing through different flow lines to mix with each other. The branch channel 43 preferably extends laterally across the channel 42 in the first direction to another adjacent channel 42. This is useful, for example, in the case of fluid systems where purge air is required or fluid systems that mix with each other.

Referring next to FIG. 8, a cross-purge is illustrated for the placement of a manifold using a plurality of flow channel manifolds in accordance with another aspect of the present invention. The basic parts of each flow channel manifold are briefly described with some variations in connection with the embodiments described above herein.

In FIG. 8, three flow channel manifolds 100, 102, 104 are shown. Since each manifold is similar in structure to each other, only one manifold is described in detail. In this embodiment, the three manifolds 100, 102, 104 are located substantially parallel to one another and on the same plane. As one example, the first flow channel manifold 100 includes a series of substrate structures 106 that are connected end to end to form a gas stick manifold. The remaining manifolds 102, 104 include a substrate 109 and may take the form of several flow paths available. Each substrate 106 is illustrated in FIG. 9. In this case, each substrate 106 is at least sized to accommodate the surface mounted component 10 therein. Alternatively, as in the embodiment shown in FIG. 5, some or all of the substrate 106 may be lengthened to allow mounting of one or more surface mount components thereon. As another alternative, one substrate 106 can be configured to extend its length sufficiently to accommodate all surface mount components needed for a particular gas stick.

Referring to FIG. 9, two substrates 106, 109 are positioned adjacent to each other, which are part of the adjacent paired manifolds 100, 102, 104 in FIG. 8. Each substrate structure or assembly 106 is similar to the basic substrate structure shown in FIG. 5 in that it includes a channel block 108 in which a channel 110 is formed. At least one crosslinking fitting 50 of one or more crosslinking blocks 52 may be tightly received within the channel 110 and secured by a clip 95 (not shown) if necessary. As shown in FIG. 5, the crosslinked fitting 50 includes an inlet port 16 of the surface mount flow control device when the surface mount flow control device (not shown) is positioned over the substrate 106; Two ports 62, 64 that align with the outlet port 18.

A seal 50, such as a C seal, can be used to form a fluid seal connection between the ports of the fluid flow control components 12, 14 and the ports 114, 116 of the crosslinking block as in the above-described embodiments. . As described in detail above, the crosslinked block 30 of the substrate having adjacent ends (eg, 106a and 106b in FIG. 8) may be welded using tubular extensions.

According to the present invention, the channel block 108 is made of a low cost light material such as aluminum, and the crosslinking block 30 for guiding the semiconductor processing gas is preferably made of more expensive semiconductor quality steel.

As shown in FIG. 9, the three gas stick manifolds 100, 102, 104 may be mechanically connected together by one or more transversely disposed purge channels 120 to form a single assembly. In this embodiment, the lateral purge channels 120 are located substantially parallel to one another and on the same plane and disposed below the manifolds 102, 104, 106. The lateral purge channel 120 can be used, for example, to supply purge gas to each gas stick manifold 100, 102, 104.

Each purge channel 120 may be processed into a low cost metal block such as aluminum or non-SCQ stainless steel. The purge channel 120 may include recesses 122 for receiving each substrate 106 to simplify alignment during assembly. In the purge channel 120, for example, a longitudinal recess 124 is formed to closely contact and accommodate the plurality of purge bridge blocks 126, which are connected to each other by welding by tubular extensions. The purge crosslinking block 126 may be manufactured and connected generally similarly to the crosslinking block 50. Purge bridge block in fluid communication with the purge port of surface-mounted component 10 (not shown in FIG. 9) via conduit 130 having a straight flow path formed along a hole in substrate 106 described above. A purge port 128 is provided in 126. If necessary, an adapter or transition tube block 132 may be used to form the purge port 133 for connection with the surface mount component 10. As shown in FIG. 9, the transition tube block 132 may be used with two crosslinked fittings 50, for example to supply purge gas to three port valves. Thus, located at either side of the transition tube block 132 of the end of the bridge fitting 50 forms three ports 114, 133, 116, of which 133 designates a purge port. do. The other end of the crosslinked fitting 50 is omitted from FIG. 9 for clarity.

Using a suitable seal, such as a C seal, between the purge bridge block 126 and the conduit 130 and between the conduit 130 and the transition tube block 132 and / or the purge port of the surface mount component. It can provide a fluid sealing connection therebetween. In particular during transport, the retaining clip 95 shown in FIGS. 5A-5D can be used to secure the purge bridge block 126 to the longitudinal recesses 124. The transition conduit block 132 may be located in the channel 110 to align with the purge port of the flow control device 10 when the flow control device 10 is mounted on the substrate 106. In the embodiment of Figures 5 and 8, the purge port is located in the middle of the inlet and outlet ports.

10A-10D, each substrate 106 includes longitudinal slots 140a and 140b formed at opposite sides of the substrate near the bottom wall 142 of the substrate. In this exemplary embodiment, the slot 140 extends over the entire length of the substrate, although this is not necessary. The slot is long enough to accommodate a connector strap as described below. Each substrate 106 further comprises a plurality of threaded holes 144 extending through the substrate to at least the slot 140, preferably at each corner of the substrate 106.

The two substrates 106a and 106b are connected end to end by the connector strap 146, in this example by a pair of connector straps 146a and 146b. Approximately half of each connector strap 146 is received so as to be slidable at each end of the adjacent slot 140 of the two substrates 106a and 106b. In this example, the first connector strap 146a fits into the slot 104a of the first substrate 106a and into the corresponding slot 140a of the second substrate 106b. The connector strap 146 is preferably formed so that it is not wider than the slot 140 so that the outer shape of the sidewall of the substrate is smoothly maintained. The connector strap 146 is formed with a hole 148 generally parallel with the screw hole 144. The stop screw 150 can be fastened to the hole 144 and is of sufficient length to fit into the hole 148 of the connector strap 146. However, in order to firmly fix the substrates 106a and 106b, when the substrates 106a and 106b abut against each other, a slight offset compared to the spacing of the screw holes 144 in the spacing of the connector strap holes 148. It is preferable to form When the set screw 150 is screwed into the connector strap hole 148, the substrates 106a and 106b are tightly fixed as shown in FIG. 10D.

Referring again to FIGS. 8 and 9A, some of the substrates 106 are also connected to the lateral purge channel 120. This lateral purge channel 120 includes a screw hole 152 for receiving the mounting bolt 180. In the illustrated embodiment, the substrate covering the lateral purge channel 120 is provided with a mounting strap 182 that includes an outwardly extending flange 184. The flange 184 includes a through hole parallel with the purge channel hole 152 such that the mounting bolt 180 secures the substrate 106 to the lateral purge channel 120.

Since the plurality of substrates 106 in a single gas stick are also connected via a connector strap, the entire assembly of FIG. 8 is a rigid assembly joined together. In another embodiment of FIG. 11A, when the connector pin 164 is used, the substrate 106 is provided with a flange 172 and a corresponding hole parallel to the purge channel hole 152. Thus, mounting bolt 180 secures the substrate to purge channel 120.

11A and 11B, another embodiment for connecting the substrates 106 end to end is illustrated. Instead of the slot 140, each substrate 106 has a bore 160 extending in the longitudinal direction on the adjacent surfaces of the substrates (106a and 106b in FIG. 11) and on both sides of the channel 110 for receiving the bridged fittings. It is prepared. In this bore 160, a circular pin 162 is fitted snugly. Each circular pin 162 extends into a corresponding and side by side bore 160 to bond the substrates 106a and 106b to each other. Each circular pin 162 may include a notch 164. The fixing screw 164 may be screwed in the circular pin 162 and the notch 164 through a screw hole 168 formed side by side. As each threaded end 170 engages with the corresponding notch 164, the circular pin 162 is firmly secured within the substrate body 160. The axial spacing of the notches 164 with respect to the spacing of the screw holes 168 is offset so that the substrates are fixed to each other when the screws 166 are in close contact with each other downward.

In this embodiment, a base extending lip for securing the substrate to the transverse purge channel 120, such as when the substrate 106 is provided with a bolt (not shown in FIG. 11, but shown in FIGS. 9 and 9A). extension lip) 172 is provided.

12A and 12B show another aspect of the present invention. In this embodiment, the substrate 200, such as one of the substrates used in the gas stick of FIG. 8, is modified to include a central opening 202 that is open to the fluid flow block recess 110 formed therein. . A check valve assembly 204 is inserted into the central opening 202. This check valve assembly 204 includes an inlet port 206 and an outlet port 208. As best shown in FIG. 12A, the check valve assembly 204 includes a check valve block 210 inserted into the channel 110. Additional fluid flow block 30 (not shown) may be inserted into channels 110 on both sides of the shock valve block 210. The check valve assembly 204 can be used, for example, to check the flow of purge gas. In such an example, the check valve block 210 may replace the transition tube block 132 (FIG. 9).

Referring next to FIG. 13, shown is a configuration 300 of a multi-level manifold that directs fluid in multiple flow paths located in two or more planes in accordance with another aspect of the present invention. The base system components are described in connection with the above described embodiments, and some variations are briefly described. The manifold system 300 includes any base plate 310 and any support block 312 to be assembled prior to installation. As shown and removed from the fluid flow control component in FIGS. 14A, 14B, and 15, the manifold system 300 includes an upper substrate layer 314 and a lower substrate layer 316. The upper base layer 314 is variable in length and includes a plurality of channel blocks 40 that can be arranged at fine intervals along the parallel orientation as shown. These channel blocks 40 may be fixed to the support block 312 by fasteners, which may in turn be fixed to the support plate 310.

Within each channel 42 of the channel block 40 is a bridge fitting 50 as best shown in FIGS. 15A-15C and 16A-16C. As shown in FIG. 15A, another embodiment of the bridge fitting 50 includes two rectangular elbow fittings 52 having tubular extensions that are connected to one another to form a U-shaped flow passage. The outer surface of the inlet port and the outlet port of the crosslinked fitting 50 may be flush with the top surface 43 of the channel block 40, or some recess may be formed below. The inlet port 62 and the outlet port 64 of the crosslinked fitting 50 are formed with recessed portions that partially receive the seal 60, such that the seal is a port 62, 64 of the crosslinked fitting 50. And mating ports 16, 18 of the fluid flow control components 12, 14.

The drop down bridging fitting 320 shown in FIGS. 16A-16C includes adjacent fluid flow control components at the upper substrate level and cross-linking fittings or multi-flow bridging bridge 400 at the lower substrate level (see FIG. 21). Is used to allow fluid to communicate with As shown in FIG. 16A, the drop-down crosslinked fitting 320 has an elbow fitting 52 and an inlet port 326 with a crosslinked fitting 50 or a multi-flow crosslinked fitting 400 of the lower substrate level 316. The tee fitting 322 comprises a tubular extension 324 having a sufficient length to be in fluid communication with the side-by-side ports of. The drop down crosslinked fitting 320 further includes two upper substrate level 314 ports 328, 330 and a lower substrate level port 326. The ports 328 and 330 have recessed circular zones 332 that receive O-rings, metal washers, C seals or other elastomeric / polymer seals known in the art. The drop down bridging fitting 320 is located in the channel of the channel block 40 such that the tubular extension 324 is received in the hole 325 (see FIG. 14B) of the channel wall 42. As shown, the port 326 of the tubular extension 324 is in fluid communication with the multi-flow bridged fitting 400 shown in FIG. 19.

Ports 326, 328, and 330 of the drop-down crosslinked fitting 320 may act as inlet ports or outlet ports depending on the direction in which the fluid flows. For example, when the multi-flow crosslinked fitting 400 of the lower substrate level 316 is used to provide purge gas to the fluid flow control components 12-14, the port 326 functions as an inlet port. Ports 328 and 330, on the other hand, function as outlet ports to provide purge gas to adjacent fluid flow control components. As another example, one of the ports 328, 330 is connected to the two-way valve 12 of the fluid flow control component such that fluid may flow through the upper substrate level 314 or the lower substrate level ( 316). Accordingly, depending on the design of the drop-down crosslinked fitting 320, the flow of gas can move in any direction, ie from one substrate layer to another. Another embodiment of the drop down crosslinked fitting 320 is the transition tube block 132 described above, in which case an elongated fluid flow passage is used. This design is very useful when used with a three-way valve and two adjacent crosslinked fittings 50. The transition conduit block 132 may be connected to a central valve of the three-way valve to provide purge gas to the valve from a lower substrate level.

To facilitate sealing of the ports 326 of the drop down crosslinked fitting 320 with the ports 16, 18 of the crosslinked fitting 50 located within the lower substrate level 316, FIGS. 22A-22C. As shown, any drop down clip 350 may be used to secure the seal 60 in a sealed relationship within the port 326. This drop down clip 350 helps to ensure that the seal 60 is properly positioned between the mating ports. The drop down clip 350 includes a flexible C flange that is received in the flange 352 of the drop down crosslinked fitting 320. Any cutout 354 allows greater flexibility in installing the drop down clip 350 to the flange 352. In order to install the drop down clip 350 on the flange 352, it is first placed on the lower rim 356 by inserting the seal 60 through the opening 358. Next, the flange 352 is inserted through the opening 358 so that the flange 352 of the drop down crosslinked fitting 320 engages the upper rim 359 of the drop down clip 350. Another embodiment 60 of the drop down clip is shown in FIGS. 23A-23B. In this embodiment, the upper rim 362 is engaged with the flange 352 of the drop down bridging fitting 320, but the clip 360 of the drop down bridging fitting 320 from its side opening or top opening. It can be installed at the bottom. 24A shows another embodiment of a drop down clip 370 received within a circular recess 372 of a drop down crosslinked fitting 320. This drop down clip 370 is similar to the drop down clip 350 shown in FIGS. 22A-22C except that there is no upper rim 359. The drop down clip 370 inserts into the recess 372 after the seal 60 is inserted into the recess 372 of the crosslinked fitting 320, and by a spring-like action within the recess 372. Slightly compress to fix. Finally, another embodiment of the drop down clip 380 is shown in FIGS. 24B and 24C, which drop down clip 380 acts as a spring-like action to the tubular extension of the drop down crosslinked fitting 320. A plurality of columnar tube ends 382 fixed to the outer diameter of 324 are used. Circular indentation 384 secures the seal in drop down clip 380 using hoop stress. The circular indentation 384 forms a diameter slightly smaller than the diameter of the seal that forms an interference fit that allows the seal to be secured within the retaining clip 380. Any of the embodiments of the drop down clip described above may be made of any flexible material such as plastic or metal.

As described above, the lower base layer 316 includes a plurality of crosslinked fittings 50 and / or a multi-port crosslinked fitting 400 as shown in FIGS. 20A-20C and 21. The multi-port bridging fitting 400 may include one or more inlet ports 402 and one or more outlet ports 404 that may be in fluid communication with the ports of the drop down cross-linking fittings 320 located at the upper substrate level 314. It includes. The multi-port crosslinked fitting 400 preferably comprises two elbow fittings 52 having a rectangular body and a rectangular body having a straight internal flow path having one or more ports 404 formed therein. Can be done. In addition, the multiport bridge fitting 400 may also include standard end fittings 46, such as VCR type fittings, instead of elbow fittings 52.

The lower substrate layer 316 may include a variable length channel block 40 having a slot 412 to receive a heating element (not shown). The channel block 40 is located in the upper base layer 316 via a fastener 422 located in the hole 414 of the channel block and extending to the side-by-side hole 416 of the lower channel block 40. Is fixed to. Accordingly, the channel block 40 can be separated from the upper base layer 316 and slide out downward, thereby allowing easier access.

FIG. 25B shows another embodiment of a channel block 500 having a tubular flange 502 that engages or is secured with an adjacent recess 504 of an adjacent channel block. The tubular flange 502 has a mounting hole 506 for receiving a fastener (not shown) therein. By securing the tubular flanges 502 to one another, the channel blocks 500 are placed close together, and the fasteners can be accessed without removing the surface mount fluid flow control components 12-14. The channel block 40 of the lower substrate may be fixed to the channel block 500 via fasteners facing the hole 508 in a diagonal direction. Thus, the fluid flow control components 12 to 14 can be fully accessed through the tubular flange 502 with fasteners securing this channel block 500 to the support block 312 and the lower substrate level 316. The fully mounted full channel block 500 may be separated from the assembly.

In another aspect of the invention shown in FIGS. 26 and 27A, the crosslinking fitting 50 or the multi-port crosslinking fitting 400 is connected to the channel block 40 of the upper substrate level 316 through the strap 550. Can be fixed. The strap 550 is variable in length, and therein is formed a channel 522 for receiving and supporting the bridge fitting 50 and the multi-port bridge fitting 400. The strap 550 can be fastened to the channel block 40 through fasteners 554, or in other ways apparent to those skilled in the art. This channel convex 50 may optionally include a multiport crosslinked fitting 400 or recess 556 that partially receives the crosslinked fitting 50.

For some applications of gas manifold systems, a heated gas is required that is heated by a heating element 570 provided in a slot of a modular block manifold, such as slot 560 of channel block 40. Other heating elements such as heating tapes can also be used. When the gas passage parts 40 and 50 are heated, thermal expansion occurs when these parts are made of different materials. In the case of a semiconductor system, the crosslinking fitting 50 preferably comprises a semiconductor quality material as described above, while in the case of the manifold channel block 40 it is preferred to use aluminum. The aluminum channel block 40 thermally expands at a rate greater than that of the steel crosslinking fitting 50, so that the aluminum channel block 40 is connected to the port of the fluid flow control component 12 or the fluid flow control component at the upper substrate level. There is a gap in between. As shown enlarged in FIG. 29A, the gas manifold system can be designed to apply a preload to compensate for the aforementioned thermal expansion. To this end, the height of the crosslinking fitting 50 or the multi-port crosslinking fitting 400 is slightly greater than the height of the channel so that the crosslinking fitting 50 or the multiport crosslinking fitting is when the gas manifold system is heated to its operating temperature. The top surface of 400 is flush with the top surface of the channel, as shown in FIG. 29B. In addition, when the gas manifold system is heated to operating temperature, preload is applied to the bolts 22 such that the bolts 22 have sufficient tension.

Another method of compensating for thermal expansion is shown in FIGS. 27B and 27C. A stamping 580 is provided with a channel therein for receiving the multi-port crosslinked fitting 400 or the crosslinked fitting 50. Channel 582 has a highly formed protrusion 584 that acts like a spring. The stamping 580 is preferably made of steel, and is preferably supported between the brackets 600 made of steel. The stamping 580 and bracket 600 may be secured to an upper substrate level made of another material such as aluminum by fasteners. To compensate for the thermal expansion of the system, by making the height of the crosslinking fitting 50 or the multi-port crosslinking fitting 400 slightly larger than the height of the stamping, the highly formed protrusions are deformed due to the spring-like properties. Thus, when the system is heated to its operating temperature, the top surface of the bridged fitting 50 or multiport bridged fitting 400 is flush with the top of the channel when the highly formed projection 584 returns to its original shape. Thus, the highly formed protrusion 584 serves as a spring for raising and lowering the crosslinking fitting 50 or the multi-port crosslinking fitting 400 to compensate for the mismatch in thermal expansion between the upper substrate level and the lower substrate level. Alternatively, the stamping may consist of a U-shaped channel in which the spring 590 is located, as shown in FIG. 27C. For example, any spring can be used, such as a wavy spring. In Fig. 27D, another aspect of the present invention similar to Fig. 27B is shown except that the spring is removed and the corner 603 is cut off. Stamping 580 acts as a "spring" due to the reduced engagement of stamping corner 581 relative to corner 605. Thus, stamping 580 acts as a cantilever spring, and corner 581 is bent downward to form a space of larger multiple crosslinked fittings 400. When the system is heated, the metal stamping thermally expands at a greater rate than the multi-port crosslinked fitting 400, thus removing the load applied to the metal stamping as described above.

Figure 28 shows another embodiment of the present invention in which the upper substrate level 316 is made of two different materials. As shown in FIG. 28, the base plate 610 forms a U-shaped channel block, and the side bars 620 form sidewalls 622. The base plate 610 may be made of steel or a metal material, and the side wall 622 may be made of a cheaper and lighter material such as aluminum. The use of the steel plate 610 with the side bars 620 made of steel reduces the inconsistency of thermal expansion between the channel block and the bridged fitting 50 made of SCQ material.

30A and 30B show another embodiment of the channel block 700. As shown, an alternative to forming the channel block 700 inexpensively and lightly can be achieved by using a base plate 710 that can be made of sheet metal with sidewalls made of sheet metal stamping that are approximately U-shaped. The fasteners secure the sidewall structure to the base plate, where an indented zone is formed such that it is flush with the top surface of the bridged fitting 50 or the multi-port fitting 400 when the head of the fastener is positioned in the channel. FIG. 30B is a variation of FIG. 30A in which an upper walling 730 having an outer wall and a U-shaped channel formed therein is mated with a lower base plate having a flanged end welded to the interior of the outer wall.

Although the preferred embodiment of the present invention has been illustrated and described, it will be apparent to those skilled in the art that many variations are possible. Accordingly, the invention is not limited by the specific embodiments illustrated and described, and the true scope and spirit of the invention is determined by the claims.

Claims (28)

As a bridge fitting for a fluid manifold system in fluid communication with two or more fluid flow control components such as valves, flow regulators, pressure transducers, mass flow controllers, etc., A first elbow fitting connected to a second elbow fitting, the connected first and second elbow fittings having an inner fluid passage therethrough, the inner fluid passageway having an inlet end and an outlet end; And the inlet end is in fluid communication with the outlet port of the first fluid flow control component and the outlet end is in fluid communication with the inlet port of the second fluid flow control component. 2. The crosslinked fitting of claim 1 further comprising a plurality of metal seals positioned between and sealing the interior fluid passageway of the crosslinked fitting and the ports of the fluid flow control component. The crosslinked fitting according to claim 1, which is made of a stainless steel material. At least one crosslinked fitting for a fluid manifold system in fluid communication with at least three fluid flow control components having a single port, A first elbow fitting and a second elbow fitting each having an end connected to a tee fitting, said tee fitting being located between said elbow fittings, said elbow fittings and said tee fittings being in fluid communication with one another. Has an internal fluid passageway, The inner fluid passage has an inlet end and a first outlet end and a second outlet end, the inlet end in fluid communication with an outlet port of the first fluid flow control part and the outlet end is an inlet of the second fluid flow control part. A bridge fitting in fluid communication with the port and the inlet port of the third fluid flow control component, respectively. A modular fluid manifold system in communication with one or more surface mount fluid flow control components having an inlet port and an outlet port, One or more crosslinked fittings having an internal fluid passage therethrough, wherein the internal fluid passage is connected with an inlet end connected to an outlet port of the first fluid flow control component and an inlet port of the second fluid flow control component. And an outlet end, wherein the internal fluid passageway is in fluid communication with the first fluid flow control component and the second fluid flow control component when the modular fluid manifold system is assembled. 6. The apparatus of claim 5, further comprising a support plate supporting the bridged fittings at close intervals and the fluid flow control component mounted thereon, wherein the support plate supports and connects the bridged fittings to the fluid flow control component. A modular fluid manifold system. 6. The modular fluid manifold system of claim 5, wherein the support plate further comprises grooves for inserting the bridge fittings at close intervals. 6. The modular fluid manifold system of claim 5 further comprising one or more seals sealing the connection between the end of the crosslinked fitting and the port of the fluid flow control component. 6. The apparatus of claim 5, further comprising a positioning plate positioned between the fluid flow control component and the support plate, the positioning plate further comprising an aligned hole in which the fluid flow control component is mounted. An inlet port and an outlet port of the fluid flow control component are formed in fluid communication with the inlet end and the outlet end of the crosslinked fitting so that the inlet end and the outlet end of the crosslinked fitting are formed. Modular Fluid Manifold System. 10. The modular fluid manifold system according to claim 9, wherein a recess for receiving a gasket is formed between an upper surface of the positioning plate and an inlet end and an outlet end of the bridge fitting. 11. The modular fluid manifold system of claim 10, wherein the gasket is made of metal. A modular fluid manifold system for a fluid manifold system that is connected to one or more fluid flow control components having one inlet port and one or more outlet ports. One or more crosslinked fittings having inlet and outlet ends, and internal passages connecting and passing through these ends; A positioning plate having a top surface on which the fluid flow control component is mounted and a plurality of holes aligned with inlet and outlet ports of the fluid flow control component, The positioning plate has a lower surface on which the bridge fitting is mounted, the inlet end of the bridge fitting is in fluid communication with the outlet port of the fluid flow control component and the outlet end of the bridge fitting is connected to the inlet port of another fluid flow control component. A modular fluid manifold system, in fluid communication. The modular fluid manifold system according to claim 12, wherein a recess for accommodating a gasket is provided between an upper surface of the positioning plate and an inlet end and an outlet end of the bridge fitting. The modular fluid manifold system of claim 13, wherein the gasket is made of metal. 13. The modular fluid manifold system of claim 12, wherein a retaining clip is provided to secure the crosslinking fitting to the positioning plate. 13. The modular fluid manifold system of claim 12 wherein an end of the crosslinking fitting is pressed into a hole in the positioning plate. 13. The method of claim 12, wherein the one or more crosslinked fittings further comprise a tee fitting positioned between the first elbow fitting and the second elbow fitting, the tee fitting and the elbow fitting having an internal fluid passageway in fluid communication with each other. And the tee fitting has a port facing the port of the elbow fitting and is aligned to mate with another layer of bridging fitting. A modular flow system for supplying fluid to gas flow components having inlet and outlet ports, such as valves, filters, mass flow controllers, etc. At least one bridging fitting having an inlet port and an outlet port, and at least one channel block formed therein and having a groove for receiving the bridging fitting, forming a first substrate layer, The inlet port of the crosslinked fitting is connected to the outlet port of the gas flow component, the outlet port of the crosslinked fitting is connected to the inlet port of the adjacent gas flow component, and the outline of the crosslinked fitting is such that the crosslinked fitting is in the groove. Modular flow system, characterized in that it is formed so as not to rotate when positioned. 19. The method of claim 18, wherein the at least one channel block further comprises a cross channel branch for receiving the crosslinked fitting to direct fluid from the channel block in one row to the channel block in the other row. Modular flow system characterized. 19. The modular flow system of claim 18, further comprising a second substrate layer having a groove formed therein for receiving one or more of the bridged fittings, each having an inlet port and an outlet port. 19. The groove of claim 18, wherein the groove of the first base layer has a hole parallel to the port of the crosslinked fitting located in the second base layer, and at least one of the crosslinked fittings located in the upper base layer is in the channel hole. And a port that is received and aligned in sealing engagement with the port of the crosslinked fitting, such that fluid can flow from one substrate layer to the other substrate layer. 20. The modular flow system of claim 19, wherein the second substrate layer is comprised of one or more channel blocks having channels formed therein, wherein the channel blocks are mounted on the first substrate layer. 20. The modular flow system of claim 19 wherein the second substrate layer is comprised of one or more multi-port bridged fittings. 19. The method of claim 18, further comprising a second substrate layer consisting of one or more crosslinked fittings each having an inlet port and an outlet port, wherein the crosslinked fitting is formed by a strap in which a groove is formed to receive the first substrate. Modular flow system, characterized in that it is fixed to the channel block of the layer. And a block having a fixed flat end, wherein the flat ends are staggered with each other for connection with the flat end of the adjacent block. A fitting having an upper substrate port for connection to a side-by-side port of the fluid flow control component and an elbow-shaped fluid passage connected to the opening of the tee fitting, the tee fitting having an internal fluid passage terminating at the upper substrate port A drop down crosslinked fitting having a lower substrate port opposed thereto, whereby the flow of fluid is directed from one substrate level to another. A modular flow system comprising at least one modular block having a channel receiving therein at least one bridging fitting, and at least one surface mount component having a flange mounted to the surface of the channel with a fastener, wherein the bridging fitting comprises: The module is made of a material having a coefficient of thermal expansion smaller than that of the channel, wherein the crosslinked fitting is received in the channel and has an upper surface by a certain distance greater than the upper surface of the channel in the unheated state, and the module is preloaded with a specific tension on the fastener. Preload is applied to the type flow system so that when the modular flow system is heated to a certain temperature, the height of the upper surface of the channel is approximately equal to the height of the upper surface of the bridged fitting. A modular flow system comprising one or more stampings in which a channel for receiving one or more crosslinked fittings is formed, the bottom of the channel having a high spring-like protrusion formed therein, wherein the crosslinked fitting has a coefficient of thermal expansion Made of a smaller material, and the bridge fitting is received in the channel and the protrusion is pressed, so that a preload is applied to the modular system so that when the modular system is heated to a certain temperature, the upper surface of the channel is raised. A modular flow system that is approximately equal to a height of an upper surface of the crosslinked fitting.